WO2010132591A3 - Revêtement de pecvd à l'aide d'un précurseur d'organosilicium - Google Patents

Revêtement de pecvd à l'aide d'un précurseur d'organosilicium Download PDF

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Publication number
WO2010132591A3
WO2010132591A3 PCT/US2010/034586 US2010034586W WO2010132591A3 WO 2010132591 A3 WO2010132591 A3 WO 2010132591A3 US 2010034586 W US2010034586 W US 2010034586W WO 2010132591 A3 WO2010132591 A3 WO 2010132591A3
Authority
WO
WIPO (PCT)
Prior art keywords
organosilicon precursor
coating
plasma
generating
setting
Prior art date
Application number
PCT/US2010/034586
Other languages
English (en)
Other versions
WO2010132591A2 (fr
Inventor
John T. Felts
Thomas E. Fisk
Robert S. Abrams
Robert J. Pangborn
Peter J. Sagona
Original Assignee
Cv Holdings, Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to SG2011083086A priority Critical patent/SG176008A1/en
Priority to JP2012510983A priority patent/JP2012526922A/ja
Priority to NZ596239A priority patent/NZ596239A/en
Priority to KR1020187001918A priority patent/KR102003651B1/ko
Priority to CA2761872A priority patent/CA2761872C/fr
Priority to KR1020117028718A priority patent/KR101823159B1/ko
Priority to MX2011012038A priority patent/MX345403B/es
Priority to BRPI1012173-0A priority patent/BRPI1012173B1/pt
Priority claimed from EP10162758.6A external-priority patent/EP2251671B1/fr
Priority to AU2010249033A priority patent/AU2010249033B2/en
Priority to CN201080029199.0A priority patent/CN102459693B/zh
Priority to RU2011150499/02A priority patent/RU2550452C2/ru
Application filed by Cv Holdings, Llc filed Critical Cv Holdings, Llc
Publication of WO2010132591A2 publication Critical patent/WO2010132591A2/fr
Publication of WO2010132591A3 publication Critical patent/WO2010132591A3/fr
Priority to PCT/US2011/036097 priority patent/WO2011143329A2/fr
Priority to JP2013510276A priority patent/JP6196152B2/ja
Priority to CA2799213A priority patent/CA2799213C/fr
Priority to EP11731554.9A priority patent/EP2579996B1/fr
Priority to US13/697,048 priority patent/US20130209766A1/en
Priority to CN201180023474.2A priority patent/CN102917805B/zh
Priority to IL215914A priority patent/IL215914A/en
Priority to ZA2011/07835A priority patent/ZA201107835B/en
Priority to HK12110441.0A priority patent/HK1169840A1/zh
Priority to IL254215A priority patent/IL254215B/en
Priority to US16/518,480 priority patent/US11624115B2/en
Priority to US18/298,127 priority patent/US20230383409A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/178—Syringes
    • A61M5/31—Details
    • A61M5/3129—Syringe barrels
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/178—Syringes
    • A61M5/31—Details
    • A61M5/3129—Syringe barrels
    • A61M2005/3131—Syringe barrels specially adapted for improving sealing or sliding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/90—Investigating the presence of flaws or contamination in a container or its contents
    • G01N21/9072—Investigating the presence of flaws or contamination in a container or its contents with illumination or detection from inside the container
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/90—Investigating the presence of flaws or contamination in a container or its contents
    • G01N21/9081—Inspection especially designed for plastic containers, e.g. preforms

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Public Health (AREA)
  • Biomedical Technology (AREA)
  • Veterinary Medicine (AREA)
  • General Physics & Mathematics (AREA)
  • Hematology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Vascular Medicine (AREA)
  • Anesthesiology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Inorganic Chemistry (AREA)
  • Medical Preparation Storing Or Oral Administration Devices (AREA)
  • Chemical Vapour Deposition (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Coating Apparatus (AREA)
  • Spray Control Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

L'invention porte sur un procédé de revêtement d'une surface de substrat par dépôt en phase vapeur par procédé chimique assisté par plasma (PECVD). Le procédé comprend la génération d'un plasma à partir d'un réactif gazeux comprenant un précurseur d'organosilicium et facultativement O2. Le pouvoir lubrifiant, l'hydrophobicité et/ou les propriétés de barrière du revêtement sont réglées par le réglage du rapport de l'O2 au précurseur d'organosilicium dans le réactif gazeux, et/ou par la réglage de la puissance électrique utilisée pour générer le plasma. En particulier, l'invention porte sur un revêtement à pouvoir lubrifiant obtenu par ledit procédé. L'invention porte également sur des récipients revêtus par ledit procédé et sur l'utilisation de tels récipients protégeant un composé ou composition contenu ou reçu dans ledit récipient revêtu à l'encontre des effets mécaniques et/ou chimiques de la surface du matériau de récipient non revêtu.
PCT/US2010/034586 2009-05-13 2010-05-12 Revêtement de pecvd à l'aide d'un précurseur d'organosilicium WO2010132591A2 (fr)

Priority Applications (23)

Application Number Priority Date Filing Date Title
MX2011012038A MX345403B (es) 2009-05-13 2010-05-12 Revestimiento por pecvd utilizando un precursor organosilícico.
NZ596239A NZ596239A (en) 2009-05-13 2010-05-12 Pecvd coating using an organosilicon precursor
KR1020187001918A KR102003651B1 (ko) 2009-05-13 2010-05-12 유기실리콘 전구체를 이용한 ｐｅｃｖｄ 코팅
CA2761872A CA2761872C (fr) 2009-05-13 2010-05-12 Revetement de pecvd a l'aide d'un precurseur d'organosilicium
KR1020117028718A KR101823159B1 (ko) 2009-05-13 2010-05-12 유기실리콘 전구체를 이용한 ｐｅｃｖｄ 코팅
SG2011083086A SG176008A1 (en) 2009-05-13 2010-05-12 Pecvd coating using an organosilicon precursor
BRPI1012173-0A BRPI1012173B1 (pt) 2009-05-13 2010-05-12 métodos para preparar um revestimento de lubricidade em uma superfície de substrato plástico, revestimento de lubricidade e vaso revestido
JP2012510983A JP2012526922A (ja) 2009-05-13 2010-05-12 有機ケイ素前駆体を使用するｐｅｃｖｄ被覆材
AU2010249033A AU2010249033B2 (en) 2009-05-13 2010-05-12 PECVD coating using an organosilicon precursor
CN201080029199.0A CN102459693B (zh) 2009-05-13 2010-05-12 使用有机硅前体的pecvd涂层
RU2011150499/02A RU2550452C2 (ru) 2009-05-13 2010-05-12 Pecvd-покрытие с применением кремнийорганического предшественника
PCT/US2011/036097 WO2011143329A2 (fr) 2010-05-12 2011-05-11 Revêtement lubrifiant pour cuves, procédé de revêtement et appareil associé
CN201180023474.2A CN102917805B (zh) 2010-05-12 2011-05-11 润滑性容器涂层、涂覆方法及设备
US13/697,048 US20130209766A1 (en) 2009-05-13 2011-05-11 Lubricity vessel coating, coating process and apparatus
EP11731554.9A EP2579996B1 (fr) 2010-05-12 2011-05-11 Procédé de revêtement lubrifiant pour cuves
JP2013510276A JP6196152B2 (ja) 2010-05-12 2011-05-11 潤滑性容器被覆材、被覆処理および装置
CA2799213A CA2799213C (fr) 2010-05-12 2011-05-11 Procede et appareil pour generer et preparer un revetement lubrifiant pour cuves
IL215914A IL215914A (en) 2009-05-13 2011-10-25 A pecvd coating that uses an oregano silicone source material
ZA2011/07835A ZA201107835B (en) 2009-05-13 2011-10-26 Pecvd coating using an organosilicon precursor
HK12110441.0A HK1169840A1 (zh) 2009-05-13 2012-10-19 使用有機硅前體的 塗層
IL254215A IL254215B (en) 2009-05-13 2017-08-29 Syringe with a lubricating layer coated with pecvd
US16/518,480 US11624115B2 (en) 2010-05-12 2019-07-22 Syringe with PECVD lubrication
US18/298,127 US20230383409A1 (en) 2010-05-12 2023-04-10 Syringe with pecvd lubrication

Applications Claiming Priority (34)

Application Number Priority Date Filing Date Title
US17798409P 2009-05-13 2009-05-13
US61/177,984 2009-05-13
US22272709P 2009-07-02 2009-07-02
US61/222,727 2009-07-02
US21390409P 2009-07-24 2009-07-24
US61/213,904 2009-07-24
US23450509P 2009-08-17 2009-08-17
US61/234,505 2009-08-17
US26132109P 2009-11-14 2009-11-14
US61/261,321 2009-11-14
US26328909P 2009-11-20 2009-11-20
US61/263,289 2009-11-20
US28581309P 2009-12-11 2009-12-11
US61/285,813 2009-12-11
US29815910P 2010-01-25 2010-01-25
US61/298,159 2010-01-25
US29988810P 2010-01-29 2010-01-29
US61/299,888 2010-01-29
US31819710P 2010-03-26 2010-03-26
US61/318,197 2010-03-26
US33362510P 2010-05-11 2010-05-11
US61/333,625 2010-05-11
EP10162758.6 2010-05-12
EP10162758.6A EP2251671B1 (fr) 2009-05-13 2010-05-12 Procédé de dégazage pour inspecter une surface revêtue
EP10162755.2 2010-05-12
EP10162757.8A EP2251453B1 (fr) 2009-05-13 2010-05-12 Support de récipient
EP10162757.8 2010-05-12
EP10162756.0A EP2251452B1 (fr) 2009-05-13 2010-05-12 Dispositif pecvd pour le revêtement de récipients
EP10162755.2A EP2253735B1 (fr) 2009-05-13 2010-05-12 Traitement de récipient
EP10162761.0A EP2251455B1 (fr) 2009-05-13 2010-05-12 Revêtement PECVD utilisant un précurseur organosilicié
EP10162760.2 2010-05-12
EP10162761.0 2010-05-12
EP10162760.2A EP2251454B1 (fr) 2009-05-13 2010-05-12 Procédé de dégazage pour inspecter une surface revêtue
EP10162756.0 2010-05-12

Related Child Applications (4)

Application Number Title Priority Date Filing Date
US12/779,007 Continuation-In-Part US7985188B2 (en) 2009-05-13 2010-05-12 Vessel, coating, inspection and processing apparatus
US12/779,007 Continuation US7985188B2 (en) 2009-05-13 2010-05-12 Vessel, coating, inspection and processing apparatus
PCT/US2011/036097 Continuation-In-Part WO2011143329A2 (fr) 2009-05-13 2011-05-11 Revêtement lubrifiant pour cuves, procédé de revêtement et appareil associé
US13/697,048 Continuation-In-Part US20130209766A1 (en) 2009-05-13 2011-05-11 Lubricity vessel coating, coating process and apparatus

Publications (2)

Publication Number Publication Date
WO2010132591A2 WO2010132591A2 (fr) 2010-11-18
WO2010132591A3 true WO2010132591A3 (fr) 2011-05-05

Family

ID=43085958

Family Applications (6)

Application Number Title Priority Date Filing Date
PCT/US2010/034571 WO2010132581A2 (fr) 2009-05-13 2010-05-12 Revêtement d'un contenant et inspection d'un contenant
PCT/US2010/034586 WO2010132591A2 (fr) 2009-05-13 2010-05-12 Revêtement de pecvd à l'aide d'un précurseur d'organosilicium
PCT/US2010/034577 WO2010132585A2 (fr) 2009-05-13 2010-05-12 Traitement d'un récipient
PCT/US2010/034568 WO2010132579A2 (fr) 2009-05-13 2010-05-12 Traitement de contenant
PCT/US2010/034576 WO2010132584A2 (fr) 2009-05-13 2010-05-12 Support de récipient
PCT/US2010/034582 WO2010132589A2 (fr) 2009-01-25 2010-05-12 Procédé de dégazage pour inspecter une surface revêtue

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/US2010/034571 WO2010132581A2 (fr) 2009-05-13 2010-05-12 Revêtement d'un contenant et inspection d'un contenant

Family Applications After (4)

Application Number Title Priority Date Filing Date
PCT/US2010/034577 WO2010132585A2 (fr) 2009-05-13 2010-05-12 Traitement d'un récipient
PCT/US2010/034568 WO2010132579A2 (fr) 2009-05-13 2010-05-12 Traitement de contenant
PCT/US2010/034576 WO2010132584A2 (fr) 2009-05-13 2010-05-12 Support de récipient
PCT/US2010/034582 WO2010132589A2 (fr) 2009-01-25 2010-05-12 Procédé de dégazage pour inspecter une surface revêtue

Country Status (3)

Country Link
KR (2) KR101823159B1 (fr)
SG (2) SG176011A1 (fr)
WO (6) WO2010132581A2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9572526B2 (en) 2009-05-13 2017-02-21 Sio2 Medical Products, Inc. Apparatus and method for transporting a vessel to and from a PECVD processing station

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
JP5837060B2 (ja) 2010-07-16 2015-12-24 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 射出成形工程およびそれを使用して製造される製品
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
WO2012125736A2 (fr) * 2011-03-14 2012-09-20 Sio2 Medical Products, Inc. Détection du stress mécanique sur des articles enduits
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
JP6095678B2 (ja) 2011-11-11 2017-03-15 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 薬剤パッケージ用の不動態化、ｐＨ保護又は滑性皮膜、被覆プロセス及び装置
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US10325773B2 (en) 2012-06-12 2019-06-18 Novellus Systems, Inc. Conformal deposition of silicon carbide films
US9234276B2 (en) 2013-05-31 2016-01-12 Novellus Systems, Inc. Method to obtain SiC class of films of desired composition and film properties
CA2890066C (fr) 2012-11-01 2021-11-09 Sio2 Medical Products, Inc. Procedes d'inspection de revetement
EP2920567B1 (fr) 2012-11-16 2020-08-19 SiO2 Medical Products, Inc. Procédé et appareil pour détecter des caractéristiques d'intégrité de revêtement de barrière rapide
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
WO2014085346A1 (fr) 2012-11-30 2014-06-05 Sio2 Medical Products, Inc. Corps creux comportant un revêtement intérieur
TWI470098B (zh) * 2013-02-01 2015-01-21 Adpv Technology Ltd Gas release device for coating process
EP2961858B1 (fr) 2013-03-01 2022-09-07 Si02 Medical Products, Inc. Seringue revetu.
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
CA2904611C (fr) 2013-03-11 2021-11-23 Sio2 Medical Products, Inc. Emballage muni d'un revetement
EP2971227B1 (fr) 2013-03-15 2017-11-15 Si02 Medical Products, Inc. Procede de revetement.
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WO2010132589A2 (fr) 2010-11-18
WO2010132585A3 (fr) 2011-03-31
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WO2010132585A2 (fr) 2010-11-18
WO2010132584A3 (fr) 2011-03-31
KR101823159B1 (ko) 2018-01-29
SG176011A1 (en) 2011-12-29
WO2010132584A2 (fr) 2010-11-18
KR102003651B1 (ko) 2019-07-24
SG176008A1 (en) 2011-12-29
KR20180011350A (ko) 2018-01-31
WO2010132581A9 (fr) 2011-03-24
WO2010132581A2 (fr) 2010-11-18
KR20120060781A (ko) 2012-06-12
WO2010132579A2 (fr) 2010-11-18
WO2010132589A3 (fr) 2011-03-31

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