WO2010131394A1 - Sonde ultrasonore et dispositif de diagnostic ultrasonore - Google Patents

Sonde ultrasonore et dispositif de diagnostic ultrasonore Download PDF

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Publication number
WO2010131394A1
WO2010131394A1 PCT/JP2010/001088 JP2010001088W WO2010131394A1 WO 2010131394 A1 WO2010131394 A1 WO 2010131394A1 JP 2010001088 W JP2010001088 W JP 2010001088W WO 2010131394 A1 WO2010131394 A1 WO 2010131394A1
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WIPO (PCT)
Prior art keywords
piezoelectric
ultrasonic
signal
elements
ultrasonic probe
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PCT/JP2010/001088
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English (en)
Japanese (ja)
Inventor
佐々木頂之
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コニカミノルタエムジー株式会社
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Priority to JP2011513215A priority Critical patent/JP5582139B2/ja
Publication of WO2010131394A1 publication Critical patent/WO2010131394A1/fr

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • G01S15/8909—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration

Definitions

  • the present invention relates to an ultrasonic probe capable of transmitting and receiving ultrasonic waves and an ultrasonic diagnostic apparatus equipped with the ultrasonic probe.
  • Ultrasonic waves usually mean sound waves of 16000 Hz or higher and are applied to various fields such as defect inspection and disease diagnosis because they can be examined non-destructively, harmlessly and in real time.
  • an ultrasound that scans the inside of the subject with ultrasound and images the internal state of the subject based on a reception signal generated from the reflected wave (echo) of the ultrasound coming from inside the subject.
  • echo reflected wave
  • This ultrasonic diagnostic apparatus is smaller and less expensive for medical use than other medical imaging apparatuses, has no radiation exposure such as X-rays, is highly safe, and has a blood flow utilizing the Doppler effect. It has various features such as display capability.
  • an ultrasonic diagnostic apparatus includes a circulatory system (for example, diagnosis of the coronary artery of the heart), a digestive system (for example, diagnosis of the gastrointestinal tract), an internal system (for example, diagnosis of the liver, pancreas, spleen, etc.), urinary system ( For example, it is widely used in diagnosis of kidney and bladder, etc.) and obstetrics and gynecology.
  • a circulatory system for example, diagnosis of the coronary artery of the heart
  • a digestive system for example, diagnosis of the gastrointestinal tract
  • an internal system for example, diagnosis of the liver, pancreas, spleen, etc.
  • urinary system For example, it is widely used in diagnosis of kidney and bladder, etc.
  • obstetrics and gynecology For example, it is widely used in diagnosis of kidney and bladder, etc.
  • This ultrasonic probe uses a piezoelectric phenomenon to generate an ultrasonic wave (ultrasonic signal) by mechanical vibration based on an electric signal transmitted, and generates an ultrasonic wave due to mismatch of acoustic impedance inside the subject. It is configured to include one or a plurality of piezoelectric elements that receive a reflected wave of a sound wave (ultrasonic signal) and generate a received electrical signal.
  • harmonic imaging technology that forms an image of the internal state of a subject using frequency components (harmonic components) of (harmonic frequency) has been researched and developed.
  • the side lobe level is small compared to the level of the fundamental wave component, the S / N ratio (signal to noise ratio) is improved, the contrast resolution is improved, and the beam width is increased by increasing the frequency.
  • the lateral resolution improves, the sound pressure is small and the fluctuation in sound pressure is small at short distances, so that multiple reflections are suppressed.
  • the harmonic imaging technology is roughly classified into two methods, a filter method and a phase inversion method (pulse inversion method).
  • This filter method separates the fundamental wave component and the harmonic component by a harmonic detection filter, extracts only the harmonic component, and shows an internal state in the subject (ultrasonic image) from this harmonic component.
  • this phase inversion method transmits first and second transmission signals whose phases are successively inverted in the same direction, and first and second reception signals corresponding to the first and second transmission signals are transmitted.
  • a harmonic component is extracted by addition and an ultrasonic image is generated from the harmonic component.
  • the fundamental wave components in the first and second received signals are inverted in phase
  • the second harmonic component of the harmonic for example, is in phase, so this can be achieved by adding the first and second received signals.
  • Second harmonic components are extracted (see, for example, Patent Document 1).
  • an ultrasonic probe disclosed in Patent Document 2 is suitably used for such a harmonic imaging technique.
  • the ultrasonic probe disclosed in Patent Document 2 includes a high relative dielectric constant layer (ferroelectric layer) made of an organic material and a low relative dielectric constant layer laminated on the high relative dielectric constant layer. It comprises a receiving piezoelectric element and a transmitting piezoelectric element laminated on the receiving piezoelectric element.
  • the ultrasonic probe disclosed in Patent Document 2 can be suitably used for the harmonic imaging technique, but there is room for improvement in forming a higher-quality ultrasonic image.
  • the present invention has been made in view of the above circumstances, and an object of the present invention is to provide an ultrasonic probe capable of forming an ultrasonic image with higher image quality and an ultrasonic probe using the ultrasonic probe.
  • An ultrasonic diagnostic apparatus is provided.
  • An ultrasonic probe of the present invention and an ultrasonic diagnostic apparatus using the ultrasonic probe include first and second piezoelectric units including a plurality of first and second piezoelectric elements, and the first piezoelectric unit.
  • the first element pitch in the plurality of first piezoelectric elements in FIG. 3 and the second element pitch P2 in the plurality of second piezoelectric elements in the second piezoelectric portion are different from each other. According to this configuration, the ultrasonic probe according to the present invention and the ultrasonic diagnostic apparatus including the same can form an ultrasonic image with higher image quality.
  • FIG. 1 is a diagram illustrating an external configuration of an ultrasonic diagnostic apparatus according to an embodiment of the present invention.
  • FIG. 2 is a block diagram showing an electrical configuration of the ultrasonic diagnostic apparatus shown in FIG. 1. It is sectional drawing which shows the structure of the ultrasound probe in the ultrasound diagnosing device shown in FIG. It is a perspective view for demonstrating the manufacturing method in the ultrasonic probe shown in FIG. It is a perspective view for demonstrating the other form of the 2nd piezoelectric part in the ultrasonic probe shown in FIG.
  • FIG. 1 is a diagram illustrating an external configuration of an ultrasonic diagnostic apparatus according to an embodiment.
  • FIG. 2 is a block diagram illustrating an electrical configuration of the ultrasonic diagnostic apparatus according to the embodiment.
  • FIG. 3 is a cross-sectional view illustrating a configuration of an ultrasonic probe in the ultrasonic diagnostic apparatus according to the embodiment.
  • FIG. 4 is a perspective view for explaining a manufacturing method in the ultrasonic probe of the embodiment. 4A shows the second piezoelectric part during the manufacturing process, and FIG. 4B shows the first piezoelectric part during the manufacturing process.
  • FIG. 5 is a perspective view for explaining a modification of the second piezoelectric unit in the ultrasonic probe of the embodiment.
  • the ultrasonic diagnostic apparatus S transmits an ultrasonic wave (first ultrasonic signal) to a subject such as a living body (not shown), and is based on the first ultrasonic signal.
  • the ultrasonic probe 2 that receives ultrasonic waves (second ultrasonic signal) coming from within the subject, and the ultrasonic probe 2 and the cable 3 are connected to each other, and the cable 3 is connected to the ultrasonic probe 2.
  • the ultrasonic probe 2 transmits the first ultrasonic signal to the subject by transmitting a transmission signal of an electrical signal via the, and also comes from within the subject received by the ultrasonic probe 2.
  • an ultrasonic diagnostic apparatus main body 1 that images the internal state of the subject as an ultrasonic image based on the received signal of the electrical signal generated by the ultrasonic probe 2 according to the second ultrasonic signal. Configured.
  • the ultrasonic waves coming from within the subject based on the first ultrasonic signal are not only reflected waves (echoes) reflected from the first ultrasonic signal in the subject due to acoustic impedance mismatches in the subject, for example,
  • an ultrasonic contrast agent such as microbubbles (microbubbles)
  • an ultrasonic contrast agent is irradiated with ultrasonic waves, the microbubbles of the ultrasonic contrast agent resonate or resonate, and further collapse or disappear at a sound pressure above a certain threshold.
  • ultrasonic waves are generated by resonance of microbubbles or by collapse or disappearance of microbubbles.
  • the ultrasonic diagnostic apparatus main body 1 includes an operation input unit 11, a transmission unit 12, a reception unit 13, an image processing unit 14, a display unit 15, and a control unit 16. Configured.
  • the operation input unit 11 is a device for inputting data such as a command for instructing the start of diagnosis and personal information of a subject, for example, and is an operation panel or a keyboard provided with a plurality of input switches, for example.
  • the transmission unit 12 supplies the transmission signal of the electric signal to the ultrasonic probe 2 via the cable 3 according to the control of the control unit 16, thereby causing the ultrasonic probe 2 to generate the first ultrasonic signal.
  • the transmission unit 12 includes, for example, a high voltage pulse generator that generates a high voltage pulse. Then, the transmission unit 12 transmits the first ultrasonic signal of the transmission beam in which the main beam (main beam) is formed in the predetermined direction (predetermined direction) by the plurality of piezoelectric elements constituting the ultrasonic probe 2 into the subject.
  • a transmission beamformer for generating a drive signal by adding a delay time to a pulse generated by a high voltage pulse generator by a delay circuit is also provided.
  • the drive signal generated by the transmission unit 12 is a plurality of pulse-like signals in which delay times are individually set appropriately for each of the plurality of piezoelectric elements, and the ultrasonic probe 2 is transmitted via the cable 3. Are supplied to each of the plurality of piezoelectric elements. With this plurality of drive signals, the ultrasonic probe 2 causes the phases of the ultrasonic waves radiated from the piezoelectric elements to coincide with each other in a specific direction (specific direction) (or a specific transmission focus point), and the main direction is the main direction. A first ultrasonic signal of the transmission beam forming the beam is generated.
  • the predetermined direction is represented by an angle based on a normal direction (0 degree) on a transmission / reception surface of an ultrasonic signal formed by the plurality of piezoelectric elements.
  • Such electronic scanning methods include a linear scanning method, a sector scanning method, and a convex method.
  • the receiving unit 13 is a circuit that receives a reception signal of an electrical signal from the ultrasonic probe 2 via the cable 3 under the control of the control unit 16, and outputs the reception signal to the image processing unit 14.
  • the receiving unit 13 includes, for example, an amplifier that amplifies the received signal with a predetermined amplification factor to compensate for the transmission loss (transmission loss) of the cable 3. Similarly to the formation of the transmission beam at the time of transmission, a reception beam is formed by so-called phasing addition at the time of reception.
  • the receiving unit 13 includes, for example, a reception beamformer to which each output signal amplified by the amplifier is input.
  • the image processing unit 14 controls the inside of the subject based on a predetermined frequency component in the second ultrasound signal received from the inside of the subject based on the first ultrasound signal received by the receiving unit 13 according to the control of the control unit 16. It is a circuit which forms the image (ultrasonic image) showing the internal state of.
  • the predetermined frequency component include a fundamental wave component and harmonic components such as a second harmonic component, a third harmonic component, and a fourth harmonic component.
  • the image processing unit 14 may be configured to form an ultrasonic image using a plurality of frequency components.
  • the image processing unit 14 performs processing by the DSP (Digital Signal Processor) that generates an ultrasonic image of the subject based on the output of the receiving unit 13 and the DSP to display the ultrasonic image on the display unit 15. And a digital-analog conversion circuit (DAC circuit) for converting the converted signal from a digital signal to an analog signal.
  • the DSP includes, for example, a B-mode processing circuit, a Doppler processing circuit, a color mode processing circuit, and the like, and can generate so-called B-mode images, Doppler images, and color mode images.
  • the display unit 15 is a device that displays an ultrasonic image of the subject generated by the image processing unit 14 under the control of the control unit 16.
  • the display unit 15 is, for example, a display device such as a CRT display, LCD (liquid crystal display), organic EL display, or plasma display, or a printing device such as a printer.
  • the control unit 16 includes, for example, a microprocessor, a storage element, and peripheral circuits thereof, and the ultrasonic probe 2, the operation input unit 11, the transmission unit 12, the reception unit 13, the image processing unit 14, and a display. It is a circuit that performs overall control of the ultrasound diagnostic apparatus S by controlling the unit 15 according to the function.
  • the ultrasonic probe (ultrasonic probe) 2 is a device that transmits a first ultrasonic signal into the subject and receives a second ultrasonic signal coming from within the subject based on the first ultrasonic signal. It is.
  • the ultrasonic probe 2 is laminated on a flat acoustic braking member (acoustic absorption member, backing layer, damper layer) 21 and one main surface of the acoustic braking member 21.
  • the first piezoelectric portion 22, the first electrode layer 23 stacked on the first piezoelectric portion 22, the intermediate layer 24 stacked on the first electrode layer 23, and the intermediate layer 24 are stacked on the intermediate layer 24.
  • the second electrode layer 25, the second piezoelectric part 26 laminated on the second electrode layer 25, and the acoustic matching layer 27 laminated on the second piezoelectric part 26 are configured.
  • the acoustic braking member 21 mechanically supports the first piezoelectric portion 22 and applies an acoustic braking to keep the acoustic characteristics of the first piezoelectric portion 22 good, and is a material that absorbs ultrasonic waves ( Ultrasonic absorbers), and mainly absorbs ultrasonic waves radiated from the first piezoelectric portion 22 toward the acoustic braking member 21.
  • Ultrasonic absorbers Ultrasonic absorbers
  • the first piezoelectric unit 22 includes a first piezoelectric material, and includes a plurality of first piezoelectric elements that can mutually convert signals between an electrical signal and an ultrasonic signal by using a piezoelectric phenomenon. Configured.
  • the first piezoelectric unit 22 is connected to the transmission unit 12 of the ultrasonic diagnostic apparatus body 1 via the cable 3 and is used for transmission for transmitting the first ultrasonic signal into the subject.
  • the first piezoelectric unit 22 converts a transmission signal input from the transmission unit 12 of the ultrasonic diagnostic apparatus main body 1 via the cable 3 into an ultrasonic signal and converts the ultrasonic signal to the subject as a first ultrasonic signal. Send.
  • the ultrasonic signal generated by the first piezoelectric unit 22 is transmitted into the subject as the first ultrasonic signal, and in this embodiment as described later, A second ultrasonic signal coming from within the subject is received by the second piezoelectric unit 26.
  • Each of the plurality of first piezoelectric elements in the first piezoelectric portion 22 includes a pair of first and second electrodes facing each other, and includes a first piezoelectric material between the first and second electrodes.
  • the plurality of first piezoelectric elements may be linearly arranged at a predetermined interval from each other to form a one-dimensional linear array type ultrasonic transducer.
  • the plurality of first piezoelectric elements Is a two-dimensional array type arranged in two rows linearly independent from each other in a plan view at a predetermined interval, for example, j rows ⁇ k columns in two directions orthogonal to each other.
  • An ultrasonic transducer may be configured (j and k are positive integers). Between the first piezoelectric elements in the first piezoelectric portion 22, an ultrasonic absorber that absorbs ultrasonic waves may be filled in order to reduce mutual interference.
  • the second piezoelectric portion 26 includes a second piezoelectric material, and includes a plurality of second piezoelectric elements that can mutually convert signals between an electrical signal and an ultrasonic signal by using a piezoelectric phenomenon. Configured.
  • the second piezoelectric unit 22 is connected to the receiving unit 13 of the ultrasonic diagnostic apparatus main body 1 via the cable 3, and the second ultrasonic wave coming from within the subject based on the first ultrasonic signal. Used for reception to receive signals.
  • the second piezoelectric unit 22 converts the received second ultrasonic signal into an electric signal and outputs the electric signal (reception signal) to the receiving unit 13 of the ultrasonic diagnostic apparatus body 1 via the cable 3.
  • Each of the plurality of second piezoelectric elements in the second piezoelectric unit 26 includes a pair of third and fourth electrodes facing each other, like the first piezoelectric element of the first piezoelectric unit 22, and these third and fourth electrodes are provided.
  • a second piezoelectric material is provided between the electrodes.
  • the plurality of second piezoelectric elements may be linearly arranged at a predetermined interval from each other to form a one-dimensional linear array type ultrasonic transducer.
  • the plurality of second piezoelectric elements Is a two-dimensional array type arranged in two rows linearly independent from each other in a plan view with a predetermined interval, for example, arranged in m rows ⁇ n columns in two directions orthogonal to each other.
  • An ultrasonic transducer may be configured (m and n are positive integers).
  • the first piezoelectric unit 22 and the second piezoelectric unit 26 are configured of the same type, and when the first piezoelectric unit 22 is a one-dimensional linear array type ultrasonic transducer, the second piezoelectric unit 26 is also configured.
  • the first piezoelectric unit 22 is a two-dimensional array type ultrasonic transducer
  • the second piezoelectric unit 26 is also a two-dimensional array type ultrasonic transducer.
  • an ultrasonic absorber that absorbs ultrasonic waves may be filled in order to reduce mutual interference.
  • the intermediate layer 24 is a member for laminating the first piezoelectric portion 22 and the second piezoelectric portion 26, and matches the acoustic impedance between the first piezoelectric portion 22 and the second piezoelectric portion 26.
  • the first electrode layer 23 is a common ground electrode for grounding each first piezoelectric element of the first piezoelectric unit 22.
  • the first piezoelectric element of the first piezoelectric unit 22 has an acoustic braking member in the stacking direction. Electric transmission signals are respectively supplied by signal lines 28 penetrating 21.
  • the second electrode layer 25 is a common ground electrode for grounding each second piezoelectric element of the second piezoelectric portion 26, and a signal line (not shown) is connected to each second piezoelectric element of the second piezoelectric portion 26. Connected to each other, an electric reception signal is taken out.
  • the first electrode layer 23 is formed on one main surface of the intermediate layer 24, and the second electrode layer 25 is formed on the other main surface of the intermediate layer 24 (main surface opposite to the one main surface).
  • the first piezoelectric portion 22 and the second piezoelectric portion 26 are indirectly stacked via the first electrode layer 23, the intermediate layer 24, and the second electrode layer 25.
  • the first piezoelectric unit 22 and the second piezoelectric unit 26 may be directly stacked.
  • the acoustic matching layer 27 is a member that matches the acoustic impedance of the first piezoelectric unit 22 and the acoustic impedance of the subject, and matches the acoustic impedance of the second piezoelectric unit 26 and the acoustic impedance of the subject.
  • the acoustic matching layer 27 may include an acoustic lens that converges an ultrasonic wave that is transmitted toward the subject, and has an arcuate shape.
  • the ultrasonic probe 2 of the present embodiment includes the first element pitch P1 in the plurality of first piezoelectric elements of the first piezoelectric unit 22 and the plurality of second elements of the second piezoelectric unit 26.
  • the second element pitch P2 in the piezoelectric element is different from each other.
  • the element pitches P1 and P2 are distances between the center of the first element and the center of the second element in the first and second elements adjacent to each other, as shown in FIG.
  • the first element pitch P1 in the first piezoelectric element of the first piezoelectric portion 22 and the second element pitch P2 in the second piezoelectric element of the second piezoelectric portion 26 are as follows. Since they can be different from each other, the first element pitch P1 is designed to be a pitch (interval) suitable for transmission of the first ultrasonic signal when the first piezoelectric element transmits the first ultrasonic signal. In addition, when the second piezoelectric element receives the second ultrasonic signal, the second element pitch P1 can be designed to a pitch (interval) suitable for reception of the second ultrasonic signal. As a result, side lobes can be reduced and artifacts can be reduced. As a result, an ultrasonic image with higher image quality can be formed.
  • the piezoelectric part (the first piezoelectric part 22, the second piezoelectric part 26, and the ultrasonic probe 2) including a plurality of piezoelectric elements
  • the element pitch There is the following relation, and from this relational expression 1, it is possible to reduce the side lobes by designing the element pitch appropriately.
  • p is the element pitch
  • ⁇ the wavelength
  • ⁇ is the scanning angle.
  • the scanning angle ⁇ may be within a predetermined angle range, but in order to emit the first ultrasonic signal more favorably from the piezoelectric element and to make the second ultrasonic signal incident better to the piezoelectric element, the scanning angle ⁇ Is preferably ⁇ 45 ° ⁇ ⁇ ⁇ + 45 °.
  • the second piezoelectric unit 26 should receive a high frequency.
  • the ultrasonic probe 2 may be configured to be an approximate value obtained by dividing the first element pitch P1 by the order of the second harmonic.
  • the second element pitch P2 of the second piezoelectric unit 26 is substantially equal to the first element pitch P1 of the first piezoelectric unit 22 divided by two.
  • the second element pitch P2 is set to a magnitude according to the order of the higher harmonics to be received by the second piezoelectric unit 26, so that the second piezoelectric unit 26 has the order Can be received better (with a higher signal-to-noise ratio).
  • Each of the first and second piezoelectric portions 22 and 26 is a one-dimensional linear array type in which the first and second piezoelectric elements are arranged in a row, and a plurality of first piezoelectric elements of the first piezoelectric portion 22 are provided. , Any number from 64 to 512, and the plurality of second piezoelectric elements of the second piezoelectric portion 26 is equal to the number of elements of the plurality of first piezoelectric elements of the first piezoelectric portion 22.
  • the ultrasonic probe 2 may be configured to be any one of 2 times to 4 times.
  • the ultrasonic probe When forming a tomographic image of the human body using an ultrasonic diagnostic device, the ultrasonic probe must be inserted into the human body or the ultrasonic probe pressed against the body surface.
  • the ultrasonic probe is preferably small, and the size of the ultrasonic probe is generally limited to 80 mm because of the size of the flat surface of the body surface in the general physique of the human body. On the other hand, it is desirable that a wider area is made a measurable area by one-time pressing. Considering such circumstances and a general element pitch of about 0.1 to 0.8 mm, the opening size of the ultrasonic probe is preferably about 5 mm to 60 mm, and a margin in a manufacturing process or the like.
  • the opening size of the ultrasonic probe is preferably about 6 mm to about 50 mm.
  • the number of the first piezoelectric elements of the first piezoelectric portion 22 is from 64 to 512. It is preferable that it is the number in any one of these.
  • the number of primes of the piezoelectric element is larger.
  • the element pitch is about 0.1 to 0.4 mm. More preferably, it is about 0.1 to 0.2 mm.
  • the second element pitch P2 is the second harmonic to the fourth harmonic. Since the size is set according to any one, the second piezoelectric unit 26 can receive the higher-order harmonics of the set order better (with a higher S / N ratio). As a result, when an ultrasonic image is formed by a so-called harmonic imaging technique, it is possible to form an ultrasonic image with higher image quality.
  • Each of the first and second piezoelectric portions 22 and 26 is a one-dimensional linear array type in which the first and second piezoelectric elements are arranged in a row, and a plurality of first piezoelectric elements of the first piezoelectric portion 22 are provided. , 64 to 512, and the plurality of second piezoelectric elements of the second piezoelectric portion 26 is equal to the number of elements of the plurality of first piezoelectric elements of the first piezoelectric portion 22.
  • the ultrasonic probe 2 may be configured so as to be approximately the order of the higher harmonics to be received by the two piezoelectric units 26.
  • the number of second piezoelectric elements in the second piezoelectric unit 26 is approximately equal to the number of first piezoelectric elements in the first piezoelectric unit 22.
  • the acoustic probe 2 is configured. By configuring in this way, it is possible to achieve both the handleability of the ultrasound probe 2 and the widening of the diagnostic range, and the second element pitch P2 is higher harmonics to be received by the second piezoelectric unit 26.
  • the second piezoelectric unit 26 can receive the higher-order harmonic of the set order better (with a higher S / N ratio). As a result, when an ultrasonic image is formed by a so-called harmonic imaging technique, the ultrasonic image can be formed with higher image quality.
  • a transmission signal of an electrical signal is generated by the transmission unit 12 under the control of the control unit 16.
  • the generated electrical signal transmission signal is supplied to the ultrasonic probe 2 via the cable 3. More specifically, the transmission signal of the electrical signal is supplied to the first piezoelectric portion 22 in the ultrasonic probe 2, and the first piezoelectric portion 22 has the plurality of first piezoelectric portions in the first piezoelectric portion 22. Each element is supplied with a predetermined delay time. The first piezoelectric element expands and contracts in the thickness direction when the transmission signal of the electric signal is supplied, and ultrasonically vibrates in accordance with the transmission signal of the electric signal.
  • the first piezoelectric element Due to this ultrasonic vibration, the first piezoelectric element emits a first ultrasonic signal.
  • the first ultrasonic signal radiated from the first piezoelectric element toward the acoustic braking member 21 is absorbed by the acoustic braking member 21.
  • the first ultrasonic signal radiated from the first piezoelectric element toward the acoustic matching layer 27 is a first electrode layer 23, an intermediate layer 24, a second electrode layer 25, a second piezoelectric portion 26, and an acoustic matching layer 27. Radiated through. For example, when the ultrasonic probe 2 is in contact with the subject, the first ultrasonic signal is transmitted from the ultrasonic probe 2 to the subject.
  • the ultrasound probe 2 may be used in contact with the surface of the subject, or may be used by being inserted into the subject, for example, being inserted into a body cavity of a living body. .
  • the ultrasonic wave transmitted to the subject is reflected at one or a plurality of boundary surfaces having different acoustic impedances inside the subject, and becomes a reflected wave of the ultrasonic wave.
  • ultrasound is generated by the ultrasound contrast agent due to the first ultrasound signal.
  • This ultrasonic wave includes not only the frequency (fundamental fundamental frequency) component of the transmitted first ultrasonic signal but also a harmonic frequency component that is an integral multiple of the fundamental frequency.
  • second harmonic components such as twice, three times, and four times the fundamental frequency, third harmonic components, and fourth harmonic components are also included.
  • This ultrasonic wave is received by the ultrasonic probe 2.
  • the ultrasonic waves are received by the plurality of second piezoelectric elements in the second piezoelectric unit 26 via the acoustic matching layer 27. That is, this ultrasonic wave is received by the second piezoelectric element, and mechanical vibration is converted into an electric signal by the second piezoelectric element and is extracted as a received signal.
  • reception signal of this electric signal taken out by the second piezoelectric unit 26 is received by the receiving unit 13 controlled by the control unit 16 via the cable 3.
  • the reception unit 13 performs reception processing on the input reception signal, and more specifically, outputs the signal to the image processing unit 14 after amplification, for example.
  • the first ultrasonic signal is sequentially transmitted from the first piezoelectric unit 22 toward the subject and reflected by the subject.
  • the second ultrasonic signal is received by the second piezoelectric unit 26.
  • the image processing unit 14 generates an ultrasound image of the subject based on the reception signal received by the receiving unit 13 from the time from transmission to reception, the received intensity, and the like under the control of the control unit 16.
  • the image processing unit 14 extracts a harmonic component from the received signal by a filtering method, and generates an ultrasonic image of the internal state inside the subject using a harmonic imaging technique based on the extracted harmonic component.
  • the image processing unit 14 extracts a harmonic component from the received signal by the phase inversion method (pulse inversion method), and uses the harmonic imaging technique based on the extracted harmonic component to inside the subject.
  • An ultrasound image of the state is generated.
  • the display unit 15 displays the ultrasound image of the subject generated by the image processing unit 14 under the control of the control unit 16.
  • the first element pitch P1 of the first piezoelectric portion 22 and the element pitch P2 of the second piezoelectric portion 26 can be different from each other.
  • the pitch (interval) suitable for each application can be designed. As a result, side lobes can be reduced and artifacts can be reduced. As a result, an ultrasonic image with higher image quality can be formed.
  • the first and second piezoelectric portions 22 and 26 are stacked on each other, so that the size can be reduced.
  • first and second piezoelectric portions 22 and 26 are configured to be stacked on each other as described above.
  • first and second piezoelectric portions 22 and 26 may be configured to be adjacent to each other on substantially the same plane. Good.
  • the first and second piezoelectric materials forming the first and second piezoelectric portions 22 and 26 in the ultrasonic probe 2 may both be inorganic piezoelectric materials, and both may be organic piezoelectric materials. It may be a material, and one may be an inorganic piezoelectric material and the other may be an organic piezoelectric material.
  • the inorganic piezoelectric material include so-called PZT, quartz, lithium niobate (LiNbO 3 ), potassium niobate tantalate (K (Ta, Nb) O 3 ), barium titanate (BaTiO 3 ), lithium tantalate (LiTaO 3).
  • a polymer of vinylidene fluoride can be used.
  • a vinylidene fluoride (VDF) copolymer can be used as the organic piezoelectric material.
  • This vinylidene fluoride copolymer is a copolymer (copolymer) of vinylidene fluoride and other monomers. Examples of the other monomers include ethylene trifluoride, tetrafluoroethylene, perfluoroalkyl vinyl ether ( PFA), perfluoroalkoxyethylene (PAE), perfluorohexaethylene, and the like can be used.
  • the electromechanical coupling constant (piezoelectric effect) in the thickness direction varies depending on the copolymerization ratio.
  • an appropriate copolymerization ratio is adopted according to the specifications of the ultrasonic probe, etc. .
  • the copolymerization ratio of vinylidene fluoride is preferably 60 mol% to 99 mol%, and in the case of a composite element in which an organic piezoelectric element is laminated on an inorganic piezoelectric element, The copolymerization ratio of vinylidene is more preferably 85 mol% to 99 mol%.
  • polyurea can be used for the organic piezoelectric material.
  • PFA perfluoroalkyl vinyl ether
  • PAE perfluoroalkoxyethylene
  • polyurea it is preferable to produce a piezoelectric body by vapor deposition polymerization.
  • a monomer for polyurea there can be mentioned a general formula, H 2 N—R—NH 2 structure.
  • R may include an alkylene group, a phenylene group, a divalent heterocyclic group, or a heterocyclic group which may be substituted with any substituent.
  • the polyurea may be a copolymer of a urea derivative and another monomer.
  • Preferred polyureas include aromatic polyureas using 4,4′-diaminodiphenylmethane (MDA) and 4,4′-diphenylmethane diisocyanate (MDI).
  • both the first and second piezoelectric materials are inorganic piezoelectric materials
  • a second inorganic piezoelectric body made of a flat inorganic piezoelectric material having a predetermined thickness is prepared, and then Third and fourth electrodes are formed on the two main surfaces over substantially the entire surface by, for example, screen printing, vapor deposition, or sputtering.
  • an acoustic matching layer 27 is provided on one main surface via signal lines (not shown).
  • a groove (gap, gap, gap, slit) is formed on the second inorganic piezoelectric body with a second element pitch P2 in two directions that are linearly independent in plan view, and the acoustic matching layer 27 is formed on the second inorganic piezoelectric body by, for example, a dicing saw. It is formed in the stacking direction until it is exposed.
  • a plurality of inorganic piezoelectric elements are formed as the second piezoelectric elements on the acoustic matching layer 27, and the second piezoelectric part 26A as the second piezoelectric part 26 shown in FIG. 3 is formed. Is done.
  • a first inorganic piezoelectric body made of a flat inorganic piezoelectric material having a predetermined thickness is prepared, and then first and second electrodes are respectively formed on both main surfaces almost entirely over, for example, screen printing.
  • an acoustic braking member 21 is laminated on one main surface, and then grooves (gap, gap,...) Are linearly independent in two directions in a plan view with a first element pitch P1. Gap, slit) are formed in the first inorganic piezoelectric body in the stacking direction until the acoustic braking member 21 is exposed by, for example, a dicing saw.
  • a plurality of signal lines 28 (not shown) for transmitting electrical signals for transmission are formed so as to penetrate the acoustic braking member 21 in the stacking direction.
  • each signal line 28 is electrically connected to an electrode layer formed on one main surface of the first inorganic piezoelectric body.
  • FIG. 4B a plurality of inorganic piezoelectric elements are formed on the acoustic braking member 21 as the first piezoelectric elements, and the first piezoelectric portion 22 is formed.
  • the groove of the first piezoelectric portion 22 and the groove of the second piezoelectric portion 26A are filled with an ultrasonic absorber, and then the first electrode layer 23 is formed on the first piezoelectric portion 22 by, for example, screen printing or vapor deposition.
  • the intermediate layer 24 is formed thereon by, for example, screen printing or vapor deposition
  • the second electrode layer 25 is formed thereon by, for example, screen printing, vapor deposition, or sputtering.
  • the acoustic matching layer 27 and the second piezoelectric portion 26 shown in FIG. 4A are laminated thereon, and the ultrasonic probe 2 having the structure shown in FIG. 3 is manufactured.
  • both the first and second piezoelectric materials are organic piezoelectric materials, or when one of the first and second piezoelectric materials is an inorganic piezoelectric material and the other is an organic piezoelectric material, the first and second piezoelectric materials are also used.
  • the ultrasonic probe 2 may be manufactured, or when the piezoelectric material is an organic piezoelectric material, a plurality of piezoelectric elements are integrated. A sheet-like piezoelectric portion may be used.
  • an organic piezoelectric body 261 made of a flat organic piezoelectric material having a predetermined thickness is prepared, and then a plurality of elementary electrodes 262 separated from each other on one main surface thereof are, for example, a screen. It is formed by printing, vapor deposition or sputtering.
  • the plurality of elementary electrodes 262 are formed to be arranged in a two-dimensional array in two linearly independent directions in a plan view, for example, in two directions orthogonal to each other.
  • the elementary electrode 262 has, for example, a rectangular shape in plan view.
  • an electrode 263 is formed on the other main surface of the organic piezoelectric body 261 over substantially the entire surface by, for example, screen printing, vapor deposition, sputtering, or the like.
  • a plurality of elementary electrodes 262 arranged in a two-dimensional array are provided on one main surface, and a piezoelectric portion 26B including an electrode 263 is formed on the other main surface over substantially the entire surface.
  • the piezoelectric portion 26B having such a configuration includes a single electrode composed of an element electrode 262, an electrode 263 facing the element electrode 262, and an organic piezoelectric body 261 made of an organic piezoelectric material interposed between the element electrode 262 and the electrode 263.
  • An element is configured and includes a plurality of organic piezoelectric elements. Since it is manufactured in this manner, there is no need to form a groove (gap, gap, gap, slit) in the sheet-like organic piezoelectric body 261 in order to form a plurality of organic piezoelectric elements. Accordingly, in such a configuration, a process for forming a groove in the organic piezoelectric element is not necessary, and thus the manufacturing process of the organic piezoelectric element is further simplified, and the ultrasonic probe 2 is manufactured with less man-hours. It becomes possible.
  • the second piezoelectric material of the second piezoelectric portion 26 is preferably an organic piezoelectric material. That is, the second piezoelectric portion 26 shown in FIG. 3 is preferably the piezoelectric portion 26B shown in FIG. With this configuration, the second piezoelectric unit 26 (26B) for reception is made of an organic piezoelectric material, so that the second piezoelectric unit 26 (26B) can easily be widened, and the second ultrasonic signal It becomes easier to receive the higher harmonics.
  • An ultrasonic probe includes a first piezoelectric material, and a plurality of first probes capable of mutually converting signals between an electric signal and an ultrasonic signal by using a piezoelectric phenomenon.
  • a plurality of second piezoelectric elements each including a first piezoelectric part including a piezoelectric element and a second piezoelectric material and capable of mutually converting signals between an electric signal and an ultrasonic signal by utilizing a piezoelectric phenomenon.
  • a second piezoelectric unit including an element, wherein the first piezoelectric unit is for transmitting a first ultrasonic signal into a subject, and the second piezoelectric unit is configured to transmit the first ultrasonic signal.
  • the second element pitch in the plurality of second piezoelectric elements is mutually It made.
  • the first element pitch in the first piezoelectric element of the first piezoelectric portion and the second element pitch in the second piezoelectric element of the second piezoelectric portion can be different from each other.
  • the pitch can be designed to a pitch (interval) suitable for transmission of the first ultrasonic signal when the first piezoelectric element transmits the first ultrasonic signal
  • the second element pitch is set to the second piezoelectric element.
  • the element receives the second ultrasonic signal it can be designed to have a pitch (interval) suitable for receiving the second ultrasonic signal.
  • side lobes can be reduced and artifacts can be reduced.
  • an ultrasonic image with higher image quality can be formed.
  • the element pitch (first element pitch, second element pitch) is a distance between the center of the first element and the center of the second element in the first and second elements adjacent to each other.
  • the second element pitch in the plurality of second piezoelectric elements is the second frequency when the frequency of the first ultrasonic signal is a fundamental frequency. This is an approximate value obtained by dividing the first element pitch by the order of higher harmonics to be received by the piezoelectric unit.
  • the second element pitch is set to a magnitude corresponding to the order of the higher order harmonics to be received by the second piezoelectric part, so that the second piezoelectric part has the higher order harmonics of the order. Waves can be received better (with a higher signal-to-noise ratio).
  • harmonic imaging technique when an ultrasonic image is formed by a so-called harmonic imaging technique, the ultrasonic image can be formed with higher image quality.
  • each of the first and second piezoelectric units is a linear array element in which the first and second piezoelectric elements are arranged in a row
  • the plurality of first piezoelectric elements of the first piezoelectric portion is any number from 64 to 512
  • the plurality of second piezoelectric elements of the second piezoelectric portion is the first piezoelectric portion.
  • the number of the plurality of first piezoelectric elements is any one of twice to four times the number of the first piezoelectric elements.
  • the second piezoelectric unit can receive the higher-order harmonics of the set order better (with a higher S / N ratio).
  • the ultrasonic image can be formed with higher image quality.
  • each of the first and second piezoelectric units is a linear array element in which the first and second piezoelectric elements are arranged in a row,
  • the plurality of first piezoelectric elements of the first piezoelectric portion is any number from 64 to 512, and the plurality of second piezoelectric elements of the second piezoelectric portion is the first piezoelectric portion.
  • the number of the first piezoelectric elements is approximately the order of the higher harmonics to be received by the second piezoelectric unit.
  • the second element pitch depends on the order of higher harmonics to be received by the second piezoelectric unit. Therefore, the second piezoelectric unit can receive the higher-order harmonics of the set order better (with a higher S / N ratio). As a result, when an ultrasonic image is formed by a so-called harmonic imaging technique, the ultrasonic image can be formed with higher image quality.
  • the second piezoelectric material of the second piezoelectric portion is an organic piezoelectric material.
  • the second piezoelectric part for reception is made of an organic piezoelectric material, it is easy to widen the band of the second piezoelectric part, and it is easier to receive high-order harmonics of the second ultrasonic signal. It becomes.
  • the first piezoelectric portion and the second piezoelectric portion are stacked in a sound axis direction.
  • the size can be reduced.
  • the ultrasonic diagnostic apparatus includes any one of the above-described ultrasonic probes.
  • an ultrasonic diagnostic apparatus capable of forming an ultrasonic image with higher image quality is provided.

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  • Engineering & Computer Science (AREA)
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  • Life Sciences & Earth Sciences (AREA)
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  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

L'invention porte sur une sonde ultrasonore (2) qui comporte des premier et second éléments piézoélectriques et qui comprend une première partie piézoélectrique (22) ayant une pluralité de premiers éléments piézoélectriques et une seconde partie piézoélectrique (26) et une pluralité de seconds éléments piézoélectriques, les éléments piézoélectriques étant capables de convertir des signaux électriques en signaux ultrasonores et réciproquement, par utilisation de phénomènes piézoélectriques. La première partie piézoélectrique (22) est utilisée pour transmettre un premier signal ultrasonore à un sujet, et la seconde partie piézoélectrique (26) est utilisée pour recevoir un second signal ultrasonore sur la base du premier signal ultrasonore, provenant de l'intérieur du sujet. Un premier pas d'élément (P1) de la pluralité de premiers éléments piézoélectriques dans la première partie piézoélectrique (22) diffère d'un second pas d'élément (P2) de la pluralité de seconds éléments piézoélectriques dans la seconde partie piézoélectrique (26).
PCT/JP2010/001088 2009-05-11 2010-02-19 Sonde ultrasonore et dispositif de diagnostic ultrasonore WO2010131394A1 (fr)

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CN103006258A (zh) * 2011-09-27 2013-04-03 富士胶片株式会社 超声诊断设备和超声图像生成方法
JP2013074375A (ja) * 2011-09-27 2013-04-22 Fujifilm Corp 超音波探触子およびその製造方法
US9056333B2 (en) 2011-09-27 2015-06-16 Fujifilm Corporation Ultrasound probe and method of producing the same
JP2018164048A (ja) * 2017-03-27 2018-10-18 日東電工株式会社 圧電積層体
JP2020520140A (ja) * 2017-04-28 2020-07-02 ザ ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティー 音響生体識別タッチスキャナ
JP2021034968A (ja) * 2019-08-28 2021-03-01 株式会社東芝 超音波センサ
JP2021034969A (ja) * 2019-08-28 2021-03-01 株式会社東芝 超音波センサ

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KR101818311B1 (ko) * 2015-12-07 2018-01-12 동국대학교 산학협력단 고조파 영상 구현을 위한 배열형 초음파 변환자 및 그 제조 방법

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103006258A (zh) * 2011-09-27 2013-04-03 富士胶片株式会社 超声诊断设备和超声图像生成方法
JP2013070734A (ja) * 2011-09-27 2013-04-22 Fujifilm Corp 超音波診断装置および超音波画像生成方法
JP2013074375A (ja) * 2011-09-27 2013-04-22 Fujifilm Corp 超音波探触子およびその製造方法
US8876718B2 (en) 2011-09-27 2014-11-04 Fujifilm Corporation Ultrasound diagnostic apparatus and ultrasound image generating method
US9056333B2 (en) 2011-09-27 2015-06-16 Fujifilm Corporation Ultrasound probe and method of producing the same
JP2018164048A (ja) * 2017-03-27 2018-10-18 日東電工株式会社 圧電積層体
JP2020520140A (ja) * 2017-04-28 2020-07-02 ザ ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティー 音響生体識別タッチスキャナ
JP2021034968A (ja) * 2019-08-28 2021-03-01 株式会社東芝 超音波センサ
JP2021034969A (ja) * 2019-08-28 2021-03-01 株式会社東芝 超音波センサ
JP7133521B2 (ja) 2019-08-28 2022-09-08 株式会社東芝 超音波センサ
JP7222850B2 (ja) 2019-08-28 2023-02-15 株式会社東芝 超音波センサ

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