WO2010122612A1 - Contacteur spiral et son procédé de fabrication - Google Patents

Contacteur spiral et son procédé de fabrication Download PDF

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Publication number
WO2010122612A1
WO2010122612A1 PCT/JP2009/005129 JP2009005129W WO2010122612A1 WO 2010122612 A1 WO2010122612 A1 WO 2010122612A1 JP 2009005129 W JP2009005129 W JP 2009005129W WO 2010122612 A1 WO2010122612 A1 WO 2010122612A1
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WIPO (PCT)
Prior art keywords
spiral
contact
contactor
photomask
photoresist
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Application number
PCT/JP2009/005129
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English (en)
Japanese (ja)
Inventor
平井幸廣
Original Assignee
株式会社アドバンストシステムズジャパン
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Priority claimed from JP2009106614A external-priority patent/JP2010257757A/ja
Priority claimed from JP2009136741A external-priority patent/JP2010282902A/ja
Application filed by 株式会社アドバンストシステムズジャパン filed Critical 株式会社アドバンストシステムズジャパン
Publication of WO2010122612A1 publication Critical patent/WO2010122612A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2407—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
    • H01R13/2421—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means using coil springs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R43/00—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
    • H01R43/16—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors for manufacturing contact members, e.g. by punching and by bending

Definitions

  • the present invention relates to a spiral contactor having a good combination of excellent electrical characteristics and spring characteristics with a high yield point.
  • the spiral contactors are stacked in two upper and lower stages, the upper spiral contact and the lower spiral contact.
  • the present invention relates to a spiral contactor in which at least one part of a base from the base of a contact has an integral structure and a method for manufacturing the same.
  • FIG. 20 is a schematic view showing an outline of a conventional single spiral two-stage spiral contactor.
  • a convex spiral contactor 201 having a tip at the center of a spiral has a plurality of spiral contacts 211 and 212 joined together at the tip.
  • the roots 211b and 212b of the spiral contacts 211 and 212 are arranged at the overlapping positions, and fixed by, for example, laser spot welding, and rise from the roots 211b and 212b toward the center of the spiral, Are provided with tips 211a and 212a.
  • connection terminals of various shapes it is possible to connect to connection terminals of various shapes, and when the spiral contact makes contact with the connection terminal and the spiral contact is pushed down from the tip in order, the spiral contact makes a twisting action with the connection terminal. It has excellent electrical connectivity by making a contact while drawing and drawing a minute circle (see Patent Document 1).
  • the present invention was devised to solve the above-described problems, and is a spiral contactor having a superior spiral characteristic and a high yield point spring characteristic in which convex spiral contacts are superposed in two upper and lower stages.
  • the spiral contactor is stacked in two upper and lower stages, and the spiral contactor in which the upper spiral contact is integrated with at least one part of the base from the base of the lower spiral contact and its It is an object to provide a manufacturing method.
  • the spiral contactor of the invention according to claim 1 is formed in a spiral shape from the root toward the center of the tip, and the convex spiral contacts 11 and 12 having a tip at the spiral center are overlapped in two upper and lower stages.
  • the spiral contactor 1 has an integral structure in which at least one part from the base to the base of the upper spiral contact 11 and the lower spiral contact 12 is integrated. .
  • At least one portion of the base from the base of the upper spiral contact and the lower spiral contact is integrated with the spiral contact.
  • the invention according to claim 2 is the spiral contactor 1 according to claim 1, wherein the spiral contactors 11 and 12 of the upper and lower two stages are arranged at the same base, and the spiral contactor is arranged from the root.
  • the spiral contactor 1 rising toward the center is characterized in that at least one portion of the base portion from the base has an integral structure.
  • the spiral contact element alone is realized by forming at least one portion of the base portion from the base of the upper spiral contact element and the lower spiral contact element.
  • the invention according to claim 3 is the spiral contactor 3 according to claim 1, wherein the roots of the upper and lower two-stage spiral contacts 31, 32 are arranged at positions shifted from each other by 180 °.
  • a double spiral spiral that rises from the root toward the center of the spiral, and the two spiral contacts 31 and 32 that are arranged in a spiral shape with the center being the same are joined together at the tip.
  • the contactor 3 is characterized in that at least one part of the base portion from the base has an integral structure.
  • the invention of claim 3 it is realized by a single spiral contactor by having at least one part of the base from the base of the upper spiral contactor and the lower spiral contactor to be integrated. Although it is difficult, the yield point can be deepened by stacking two spiral contactors in two upper and lower stages, and the electrical resistance can be reduced without increasing the contact pressing force. Thus, a spiral contact having a small installation area can be maintained.
  • the invention according to claim 4 is the spiral contactor 4 according to claim 1, wherein the roots of the upper and lower two-stage spiral contacts 41, 42 are arranged at positions shifted from each other by 120 °, and A triple spiral spiral contactor that rises from the root toward the center of the spiral, and the three spiral contacts 41 and 42 that are arranged in a spiral with the centers being the same are joined together at the tip. 4 is characterized in that at least one part of the base from the base has an integral structure.
  • the invention of claim 4 it is realized by a single spiral contactor by having at least one part of the base from the base of the upper spiral contactor and the lower spiral contactor to be integrated. Although it is difficult, the yield point can be deepened by stacking two spiral contactors in two upper and lower stages, and the electrical resistance can be reduced without increasing the contact pressing force. Thus, a spiral contact having a small installation area can be maintained.
  • the invention according to claim 5 is the spiral contactor 5 according to claim 1, wherein the spiral bases of the spiral contactors 51, 52 in the upper and lower two stages are made to be the same in parallel and arranged in a spiral shape.
  • the spiral contactor itself can be realized by having at least one portion of the base part from the base of the upper spiral contactor and the lower spiral contactor to be integrated.
  • the yield point can be deepened by stacking two spiral contactors in two upper and lower stages, and the electrical resistance can be reduced without increasing the contact pressing force.
  • a spiral contact having a small installation area can be maintained.
  • the spiral contactor of the invention according to claim 6 is formed in a spiral shape from the root toward the tip center, and the convex spiral contactor (112, 122) having the tip at the spiral center in two upper and lower stages.
  • the spiral contactor (101) is a superposed spiral contactor (101) that uses a spiral contactor (112) using a material having high electrical conductivity at the upper stage and a material having high springiness at the lower stage.
  • a spiral contact (122) provided is provided.
  • the upper and lower spiral contactors use a material having high electrical conductivity at the upper stage on the side in contact with the connection terminal and a material having high springiness at the lower stage.
  • the yield point can be deepened and the electrical resistance can be reduced without increasing the contact pressure. It is possible to maintain the required yield point depth and to make a spiral contact with a small installation area.
  • the invention according to claim 7 is the spiral contactor (101) according to claim 6, wherein the width of the lower spiral contactor (122) is greater than the width of the upper spiral contactor (112). It is characterized by being narrow.
  • the width of the spiral contactor on the lower side of the spiral contactor arranged in the upper and lower two stages is made narrower than the width of the upper spiral contact, thereby making the upper and lower two stage spirals. Even when the contactor is compressed, the entire upper surface of the lower spiral contactor is not detached from the lower surface of the upper spiral contactor, and a stable electrical connection characteristic can be obtained. Excellent electrical characteristics and an excellent spring It is possible to realize a spiral contact having both characteristics.
  • the invention according to claim 8 is the spiral contactor (101) according to claim 6, wherein the thickness of the lower spiral contact (122) is the thickness of the upper spiral contact (112). It is characterized by being thinner than that.
  • the thickness of the lower spiral contact disposed in the upper and lower spiral contacts is made thinner than that of the upper spiral contact. Since the spiral contact has a smaller cross-sectional stress, the upper surface of the lower spiral contact is not separated from the lower surface of the upper spiral contact even when the upper and lower spiral contacts are compressed. Following this, a stable electrical connection characteristic can be obtained, and a spiral contactor having both excellent electrical characteristics and excellent spring characteristics can be realized.
  • the invention according to claim 9 is the spiral contactor (101) according to claim 6, wherein the roots of the upper and lower two-stage spiral contactors (112, 122) are arranged at positions shifted from each other by 180 °. Then, the two spiral contacts (112, 122), which rise from the root toward the center of the spiral and are arranged in a spiral with the centers being the same, are joined together at the tip.
  • the double spiral spiral contactor (101) is characterized in that at least one portion of the base portion is vertically joined from the base and is superposed in two stages.
  • the upper and lower spiral contactors use a material having high electrical conductivity at the upper stage on the side in contact with the connection terminal, and a material having high springiness at the lower stage.
  • the yield point can be deepened and the electrical resistance can be reduced without increasing the contact pressure. It is possible to maintain the required yield point depth and to make a spiral contact with a small installation area.
  • the invention according to claim 10 is the spiral contactor (101) according to claim 6, wherein the roots of the upper and lower two-stage spiral contactors (131, 132) are arranged at positions shifted by 120 ° from each other. Then, the triple spiral spiral that rises from the root toward the center of the spiral, and the three spiral contacts that are arranged in a spiral in parallel with each other at the center join together at the tip.
  • the contactor (101 ') is characterized in that at least one portion of the base portion is vertically joined from the base, and is superposed in two stages.
  • the upper and lower spiral contactors use a material with high electrical conductivity at the upper stage on the side in contact with the connection terminal, and use a material with high springiness at the lower stage.
  • it is difficult to achieve with a single spiral contact but by stacking two spiral contacts in two steps, the yield point can be deepened and the electrical resistance can be reduced without increasing the contact pressure. It is possible to maintain the required yield point depth and to make a spiral contact with a small installation area.
  • the invention according to claim 11 is the spiral contactor (101) according to claim 6, wherein in the spiral contactors (133, 134) of the upper and lower two stages, the roots of the spirals are made to be the same to each other.
  • Two spiral contacts (133, 134) arranged in a spiral shape merge at the tip to form an integral spiral contact (133, 134) up and down at least one location from the base to the base. It is characterized by being joined to the upper and lower two stages.
  • the upper and lower spiral contactors use a material with high electrical conductivity on the upper stage on the side in contact with the connection terminal, and use a material with high springiness on the lower stage.
  • it is difficult to achieve with a single spiral contact but by stacking two spiral contacts in two steps, the yield point can be deepened and the electrical resistance can be reduced without increasing the contact pressure. It is possible to maintain the required yield point depth and to make a spiral contact with a small installation area.
  • the invention according to claim 12 is the spiral contactor (101, 101 ′, 101 ′′) according to claim 6, wherein the spiral contactor is formed in a spiral shape from the root toward the tip center, and the spiral contactor is formed at the center of the spiral shape.
  • a hole is provided in the vicinity of the center on the flat surface of the tip of the contact.
  • the mirror-like flat surface 31aa disposed in the upper stage is provided with a substantially circular hole 31aaa (a depression or a through hole) in the vicinity of the center. Due to the holes 31aaa, the surface pressure is not dispersed and a large pressure is applied, and since the radius to which the surface pressure is applied is large, the area in which the surface moves is increased and the metal-to-metal bonding is easily generated. In addition, when soldering is used, fillets that are sucked up solder are formed in both the hole and the periphery, thereby enabling a stronger solder joint.
  • a spiral contactor manufacturing method comprising: a first step (a) of preparing a metal plate 14; and applying or drying a first photoresist 15 on the surface of the metal plate 14 made of Cu foil 14. Affix the film.
  • a second step (b) of covering the first photomask 16 having the spiral contact 11 pattern from above and irradiating light from above the photomask 16 for exposure, and the first photomask 16 A third step (c) of developing the first photoresist 15 so as to form a pattern, and further, a metal plating 13 composed of Au plating 17, rhodium Rh19, and Ni plating on the exposed surface of the Cu foil 14 from above.
  • the third photoresist 22 is applied to the back surface of the metal plate 14 or a dry film is applied.
  • Method for manufacturing a spiral contactor spiral contacts 11, 12 of the state is characterized by comprising a seventeenth step in close contact with each other of the bottom and the top surface (q), the.
  • At least one part of the base from the base of the upper spiral contact and the lower spiral contact has an integral structure, thereby shortening the manufacturing process and reducing the manufacturing cost. Can do.
  • Resist 40 is applied or a dry film is applied.
  • a second photomask 38 having a pattern of the integrated structure portion 42 is applied from above, and the F-step (f) is performed by irradiating light from above the photomask 38, and the photomask 38 is irradiated with light.
  • a third photomask 46 having a pattern of spiral contacts 11 ′ is applied from above, and a J-th step (j) is performed by irradiating light from above the photomask 46.
  • step L (l) The K-th step (k) in which the third photoresist 45 is removed by irradiating light with exposure and development, and the metal plating 33 composed of the Ni plating 33 is applied to the surface of the Au plating 37, and further Au plating
  • step L (l) the fourth photo resist 47 is applied to the back surface of the metal plate 34 or a dry film is applied.
  • a fourth photomask 48 having a pattern of etching holes is covered from above, and the Mth step (m) in which exposure is performed by irradiating light from above the photomask 48, and the fourth photomask 48 is irradiated with light.
  • At least one portion of the base portion from the base of the upper spiral contact and the lower spiral contact has an integrated structure, thereby shortening the manufacturing process and reducing the manufacturing cost. Can do.
  • two spiral contacts are stacked to form a two-tier structure, and at least one of the base and the base is made into an integral structure, so that the length of the spiral contact is increased.
  • An effect was born.
  • the spring constant of the two-stage spiral contact increased, and the yield point was deepened. Therefore, it can be connected to connection terminals of various shapes, and when the spiral contact comes into contact with the connection terminal and the spiral contact is pushed down sequentially from the tip, the tip of the spiral contact is connected to the connection terminal.
  • a spiral contact that has both excellent electrical characteristics and excellent spring characteristics in a spiral contact with excellent electrical connectivity by making contact with twisting motion and drawing a micro circle. be able to.
  • the single spiral two-stage spiral contact for explaining the first embodiment of the present invention is shown, (a) is a plan view showing a single spiral two-stage spiral contact, (b) is ( It is sectional drawing of the AA line shown to a), and is sectional drawing of a convex single spiral two-stage spiral contact in a natural body, (c) is a single spiral two-stage spiral shape shown in (b) It is sectional drawing which shows the state which the upper and lower sides of the contactor adhered. It is process sectional drawing which shows the manufacturing process of the single spiral two-stage spiral contactor for demonstrating the 1st Embodiment of this invention.
  • FIG. 2B is a cross-sectional view taken along line BB shown in FIG. 1A, and is a cross-sectional view of a double contact spiral contact having a convex shape in a natural body
  • FIG. 2C is a double spiral double step shown in FIG. It is sectional drawing which shows the state which the upper and lower sides of the spiral contactor of a formula adhered.
  • the triple spiral two-stage spiral contact for explaining the fourth embodiment of the present invention is shown, (a) is a plan view showing the triple spiral two-stage spiral contact, (b) is ( It is sectional drawing of CC line shown to a), It is sectional drawing of a convex triple spiral two-stage spiral contactor in a natural body, (c) is a triple spiral two-stage spiral shape shown in (b). It is sectional drawing which shows the state which the upper and lower sides of the contactor adhered.
  • the spiral base for explaining the fifth embodiment of the present invention is shown as a two-stage spiral contact arranged in parallel with each other with the same spiral root, and (a) shows the spiral contact.
  • FIG. 4B is a cross-sectional view taken along line DD shown in FIG.
  • FIG. 1A is a cross-sectional view of a spiral contact that is a convex shape in a natural body.
  • the double spiral two-stage spiral contact for explaining the sixth embodiment of the present invention is shown, (a) is a plan view showing the double spiral two-stage spiral contact, (b) FIG. 2A is a cross-sectional view taken along line EE shown in FIG. 1A, and is a cross-sectional view of a double contact spiral contact having a convex shape in a natural body.
  • FIG. 10 shows a two-stage spiral contactor for explaining an eighth embodiment of the present invention, wherein (a) is a plan view showing a spiral contact having a tip and a protrusion in the vicinity thereof, and (b) is (a). ) Is a cross-sectional view taken along line GG shown in FIG. It is the schematic of the interconnector to which the spiral contactor of this invention is applied, (a) is a general view, (b) is an enlarged view of the part shown by E in the figure. It is the schematic which shows the outline of the conventional single spiral two-stage spiral contactor.
  • FIG. 1 shows a single spiral two-stage spiral contact for explaining the first embodiment of the present invention
  • (a) is a plan view showing a single spiral two-stage spiral contact
  • (b) is a cross-sectional view taken along line AA shown in (a)
  • (c) is a single-stage double-stage shown in (b)
  • the spiral contactor 1 is formed in a spiral shape from the root 11b toward the center of the tip 11a, and has a convex spiral shape having the tip 11a at the center of the spiral.
  • the contacts 11 and 12 are superposed in two upper and lower stages, and at least one portion from the base 11b to the base 11d of the upper spiral contact 12 and the lower spiral contact 11 has an integral structure.
  • the base 11b to the base portion 11d of the upper spiral contact 12 and the lower spiral contact 11 has an integral structure, it is difficult to realize with a single spiral contact.
  • the yield point can be deepened, and the electrical resistance can be reduced without increasing the contact pressing force, and the required yield point depth is maintained and installed.
  • a spiral contact with a small area can be obtained.
  • FIGS. 2, 3, and 4 are process cross-sectional views illustrating a manufacturing process of a single spiral two-stage spiral contactor for explaining the first embodiment of the present invention.
  • the first step (a) for preparing the metal plate 14 and the first photoresist 15 is applied to the surface of the metal plate 14 made of Cu foil 14 or a dry film is applied. .
  • a third step (c) of developing the first photoresist 15 so as to form a pattern, and a metal plating 13 composed of Au plating 17, rhodium Rh19, and Ni plating on the exposed surface of the Cu foil 14 from above is further performed.
  • the ninth step (i) for applying the metal plating 13 composed of 13 is turned upside down, and the third photoresist 22 is applied to the back surface of the metal plate 14 or a dry film is applied.
  • a 14th step (n) of annealing forming in a heated state The fifteenth step (0) for applying the adhesive tape 24, the sixteenth step (p) for removing the Cu foil 14 by etching, and the spiral contacts 11 and 12 in the form of being stacked one above the other are the bottom and top surfaces of each other. And a seventeenth step (q) in close contact with each other.
  • FIGS. 5 to 8 are process cross-sectional views showing a manufacturing process of a single spiral two-stage spiral contactor for explaining a second embodiment of the present invention.
  • the first step 35 (a) in which the metal plate 34 is prepared and the first photoresist 35 is applied to the surface of the metal plate 34 that is the Cu foil 34 or a dry film is applied.
  • a D step (d) To form a spiral contact 11 ′, a D step (d), an E step (e) to remove the first photoresist 35, and a second contact on the surface of the formed spiral contact 11 ′.
  • the photoresist 40 is applied or a dry film is applied.
  • a second photomask 38 having a pattern of the integrated structure portion 42 is applied from above, and the F-step (f) is performed by irradiating light from above the photomask 38, and the photomask 38 is irradiated with light.
  • the G step (g) for removing the second photoresist 40 by exposure and development, the H step (h) for applying the Cu plating 31e to the removed surface and further applying the Au plating 37, the first step The first step (i) for removing the photoresist 35, and the third photoresist 45 is applied to the surface of the Au plating 37 and the Cu plating 31e, or a dry film is applied.
  • a third photomask 46 having a pattern of spiral contacts 11 ′ is applied from above, and a J-th step (j) is performed by irradiating light from above the photomask 46.
  • step L (l) the fourth photo resist 47 is applied to the back surface of the metal plate 34 or a dry film is applied.
  • a fourth photomask 48 having a pattern of etching holes is covered from above, and the Mth step (m) in which exposure is performed by irradiating light from above the photomask 48, and the fourth photomask 48 is irradiated with light.
  • Q-th step (q) of annealing forming in a deformed state The R step (r) for attaching the adhesive tape 49, the S step (s) for removing the Cu foil 34 by etching, and the spiral contacts 11 ', 12' in the form of being stacked one above the other are the bottom surfaces of each other. And a T-th step (t) in close contact with each other on the upper surface.
  • FIG. 9 shows a double spiral two-stage spiral contact for explaining the third embodiment of the present invention
  • FIG. 9A is a plan view showing a double spiral two-stage spiral contact
  • (B) is a cross-sectional view taken along line BB shown in (a), and is a cross-sectional view of a convex double spiral two-stage spiral contact in a natural body
  • (c) is a cross-sectional view shown in (b). It is sectional drawing which shows the state which the upper and lower sides of the double spiral type spiral contactor contact
  • the spiral contacts 32, 31 arranged in two upper and lower stages are convex spirals (spirals) in the natural body, but the roots 32b, 31b. Are formed in a spiral shape toward the center of the tip, and the tips 32a and 31a are arranged in parallel with each other in a spiral shape, and the double spiral spiral contacts 32 and 31 in which the tips 32a and 31a are integrated are formed at the root. At least one of the base portions 32d and 31d from the portions 32b and 31b has an integral structure.
  • the spiral contacts 32, 31 are formed in a spiral shape from the roots 32b, 31b toward the center of the tip, and the convex spiral contacts 32, 31 having the tips 32a, 31a at the center of the spiral are arranged vertically. It is the spiral contactor 3 piled up in the step
  • the spiral contactor 3 uses the material rich in electrical conductivity, and the material rich in spring property.
  • the core material forming the spiral contacts 32 and 3 is a nickel (Ni) base material of a low electrical resistance material, and the upper and lower surfaces are plated with Au.
  • the core material forming the spiral contacts 32 and 3 is a nickel alloy (Ni alloy) blended with tungsten having excellent spring characteristics, and at least the upper surface is Au plated.
  • the yield point can be deepened, and the electrical resistance can be reduced without increasing the contact pressing force, and the required depth of the yield point.
  • a spiral contact with a small installation area can be obtained.
  • FIG. 10 shows a triple spiral two-stage spiral contact for explaining the fourth embodiment of the present invention
  • (a) is a plan view showing a triple spiral two-stage spiral contact
  • b) is a cross-sectional view taken along the line C-C shown in (a), and is a cross-sectional view of a convex triple spiral spiral contact in a natural body
  • (c) is a triple spiral double stage shown in (b). It is sectional drawing which shows the state which the upper and lower sides of the spiral contactor of a formula adhered. As shown in FIGS.
  • the spiral contacts 42 and 41 arranged in two upper and lower stages are convex spirals (spirals) in the natural body, but the roots 42b and 41b. Are formed in a spiral shape toward the center of the tip, and the tips 42a and 41a are arranged in parallel with each other in a spiral shape, and the double spiral spiral contacts 42 and 41 in which the tips 42a and 41a are integrated are formed at the root. At least one part of the base parts 42d and 41d from the parts 42b and 41b has an integral structure.
  • FIG. 11 shows a two-stage spiral contact arranged in a spiral shape in parallel with each other with the same spiral root for explaining the fifth embodiment of the present invention.
  • FIG. FIG. 4B is a cross-sectional view taken along the line DD shown in FIG. 4A, and is a cross-sectional view of a spiral contact that is a convex shape in a natural body.
  • the spiral contacts 52 and 51 arranged in two upper and lower stages are convex spirals (spirals) in the natural body, but from the roots 52b and 51b to the center of the tip.
  • the spiral contacts 52 and 51 are integrally formed with the tips 52a and 51a from the roots 52b and 51b to the base 52d.
  • 51d has an integral structure.
  • the yield point can be deepened, and the electrical resistance can be reduced without increasing the contact pressing force, and the required yield point depth is maintained and installed.
  • a spiral contact with a small area can be obtained.
  • FIG. 12 shows a double spiral two-stage spiral contact for explaining the sixth embodiment of the present invention
  • FIG. 12A is a plan view showing a double spiral two-stage spiral contact
  • (B) is sectional drawing of the EE line shown to (a), and is a sectional view of a spiral contact of a convex double spiral two-stage type in a natural body.
  • the spiral contacts 112 and 122 arranged in two upper and lower stages are convex spirals (spirals) in the natural body, but from the roots 112b and 122b to the center of the tip.
  • the spiral contacts 112 and 122 are formed in a spiral shape from the root toward the tip center, and spiral spiral contacts 112 and 122 having tips at the spiral center are stacked in two upper and lower stages.
  • the spiral contactor 101 is provided with a spiral contactor 112 using a material having high electrical conductivity in the upper stage and a spiral contactor 122 using a material having high springiness in the lower stage.
  • the core material forming the spiral contact 112 is a nickel (Ni) base material of a low electrical resistance material, and the upper and lower surfaces are plated with Au.
  • the core material forming the spiral contact 122 is a nickel alloy (Ni alloy) containing tungsten having excellent spring characteristics, and at least the upper surface is Au plated.
  • the spiral contact of the upper and lower stages uses a material having high electrical conductivity for the upper stage on the side in contact with the connection terminal, and a material having high springiness for the lower stage, so that the spiral contact element alone
  • the yield point can be deepened, and the electrical resistance can be reduced without increasing the contact pressure.
  • a spiral contact with a small installation area can be obtained while maintaining the depth of the yield point.
  • the width of the lower spiral contact 122 is formed narrower than the width of the upper spiral contact 112. In this way, by making the width of the spiral contact 122 on the lower side of the spiral contacts 112, 122 arranged in two upper and lower stages narrower than the width of the upper spiral contact 112, two upper and lower stages Even when the spiral contacts 112 and 122 are compressed, the entire upper surface of the lower spiral contact 122 is not detached from the lower surface of the upper spiral contact 112, and stable electrical connection characteristics can be obtained. It is possible to realize a spiral contact having both electrical characteristics and excellent spring characteristics.
  • the thickness of the lower spiral contact 122 is formed to be thinner than the thickness of the upper spiral contact 112.
  • the lower spiral contact since the cross-sectional stress is small, even when the upper and lower spiral contacts are compressed, the entire upper surface of the lower spiral contact follows the upper spiral contact without moving away from the lower surface, thereby providing stable electricity. Connection characteristics can be obtained, and a spiral contactor having both excellent electrical characteristics and excellent spring characteristics can be realized.
  • a columnar protrusion (column) 112d is provided at the tip 112a located at the center of the upper spiral contact 112. This column 112d is at least one column provided upward at the position of the tip 112a of the upper spiral contact 112.
  • the lower spiral contact 122 has no protrusion.
  • the spiral widths V (V1, V2) of the two spiral upper and lower spiral contacts 112, 122 are the same, and become wider as they approach the roots 112b, 122b from the tips 112a, 122a.
  • the spiral portions 112c and 122c are provided from the roots 112b and 122b toward the tips 112a and 122a.
  • the width V may be constant as it goes from the tips 112a and 122a to the roots 112b and 122b.
  • the thickness T (T1, T2) is also constant, the thickness T (T1, T2) may be gradually increased from the tips 112a, 122a to the roots 112b, 122b.
  • the upper spiral contact 112 has its roots 112b and 112b arranged at positions that are opposed to each other by 180 degrees, and is directed from the roots 112b and 112b toward the center of the spiral.
  • the tip 112a which stands
  • the roots 122b and 122b of the lower spiral contact 122 are arranged at positions facing each other, and provided with tips 122a that rise from the roots 122b and 122b toward the center of the spiral and merge with each other at the center of the spiral. Yes.
  • the double spiral spiral contacts 112, 122 are vertically stacked to form two stages, and the tips 112a, 122a are freed, and laser spot welding is used to at least one place from the bases 112b, 122b to the bases 112d, 122d.
  • the effect similar to that of increasing the length of the spiral contactor was obtained by fixing.
  • the two-stage spiral contactor 1 has the effect of increasing the spring constant and deepening the yield point. Therefore, it can be connected to connection terminals of various shapes, and the spiral contact disposed on the upper stage when the spiral contactor 101 contacts the connection terminal (not shown) and pushes down the spiral contactor 1 sequentially from the tip.
  • the tip 112a of the child 112 comes into contact with the connection terminal with a torsional motion and draws a minute circle, a spiral contact having both excellent electrical characteristics and excellent spring characteristics can be realized. .
  • the width of the lower spiral contact 122 is narrower than the width of the upper spiral contact 112. As shown in FIG.
  • the widths V2 and W2 of the spiral contacts 122 on the lower side of the spiral contacts 112 and 122 arranged in two upper and lower stages narrower than the widths V1 and W1 of the upper spiral contacts 112, the upper and lower Even when the spiral contacts 112 and 122 of the stage are compressed, the entire upper surface of the spiral contact 122 of the lower stage is not detached from the lower surface of the spiral contact 112 of the upper stage, and stable electrical connection characteristics can be obtained.
  • the thickness T2 of the lower spiral contact 122 is thinner than the thickness T1 of the upper spiral contact 112.
  • the two upper and lower spiral contacts Even when the contactor 101 is compressed, the entire upper surface of the lower spiral contactor 122 follows the lower surface of the upper spiral contactor 112, and stable electrical connection characteristics can be obtained. It is possible to realize a spiral contact having both spring characteristics.
  • FIG. 13 is a process diagram of the manufacturing method of the spiral contactor according to the sixth embodiment of the present invention, and shows the manufacturing process of the upper spiral contactor 112.
  • a metal plate 114 is prepared, and at least one recess 114 a is formed on the surface of the metal plate 114 so as to come to the position of the tip of the spiral contact.
  • the metal plate 114 is preferably a Cu foil, the metal plate 114 is hereinafter referred to as a Cu foil 114.
  • the thickness of the Cu foil 114 is a foil shape, for example, 0.08 mm, but is not limited thereto.
  • a photoresist 115 is applied to the surface of the Cu foil 114 or a dry film is applied.
  • a photomask 116 having a spiral contact 112 pattern is applied from above, and exposure is performed by irradiating light from above the photomask 116.
  • the shape of the photomask 116 is a pattern in which the spiral contact 112 is blackened. Further, a method using a reverse black and white pattern may be used.
  • the photoresist 115 is developed so as to form a pattern of the photomask 116.
  • the exposed surface 114b of the Cu foil 14 is further subjected to metal plating 117 composed of Au plating 117b and Ni plating 117a from above to form the spiral contact 112.
  • the metal plating 117 here is preferably a nickel alloy plating excellent in electrical conductivity.
  • nickel nickel alloy plating was used for metal plating, for example, it is not limited to this.
  • the photoresist 115 is removed.
  • a photoresist 115 is pasted or applied on the back surface of the Cu foil 114, and a photomask 116 'for opening a hole is covered, and this photomask 116' is irradiated with light to be exposed and developed.
  • a hole 114c is formed in the Cu foil 114 from the back surface of the Cu foil 114 by etching.
  • the photoresist 115 on the back surface of the Cu foil 114 is removed.
  • FIG. 14 is a process chart of the manufacturing method according to the sixth embodiment of the present invention, and shows a process following the eighth process shown in FIG.
  • annealing is performed in a state where the spiral center of the spiral contact 112 turned upside down is pushed up from one side by the convex tool 130 and deformed into a convex shape.
  • the convex tool 130 is disposed below the spiral contact 112, and the forming is stabilized by annealing forming the spiral contact 112 being pushed up from below by the convex tool 130 and deformed into a convex shape. That is, the spiral contact 112 deformed into a convex shape is heated and annealed to be formed into a convex shape.
  • annealing forming for example, heating is performed at 250 ° C., annealing is performed, and internal stress is removed. Although the heating temperature is 250 ° C. here, it is assumed to include around 250 ° C., and is not limited to this.
  • the annealing forming is completed and the convex tool 130 is removed.
  • FIG. 15 is a process diagram of the manufacturing method of the spiral contactor according to the sixth embodiment of the present invention, and shows the manufacturing process of the lower spiral contactor 122.
  • a metal plate 124 is prepared in the eleventh step (k).
  • the metal plate 124 is preferably a Cu foil, and is the same material as the metal plate 114 described above.
  • a photoresist 125 is applied to the surface of the Cu foil 124 or a dry film is applied.
  • a photomask 126 having a spiral contact 122 pattern is applied from above, and exposure is performed by irradiating light from above the photomask 126.
  • the shape of the photomask 126 is a pattern in which the spiral contact 122 is blackened. Further, a method using a reverse black and white pattern may be used.
  • the photoresist 125 is developed so as to form a pattern of the photomask 126.
  • the exposed surface 124b of the Cu foil 124 is further subjected to metal plating 127 composed of Au plating 127b and Ni plating 127a from above to form the spiral contact 122.
  • the metal plating 127 here is preferably a nickel alloy plating containing tungsten having a high spring property.
  • nickel nickel alloy plating was used for metal plating, for example, it is not limited to this.
  • the photoresist 125 is removed.
  • a photoresist 125 is pasted or applied on the back surface of the Cu foil 124, and a photomask 126 'for making a hole is covered, and the photomask 126' is irradiated with light to be exposed and developed.
  • a hole 124 c is formed in the Cu foil 124 by etching from the back surface of the Cu foil 124.
  • the photoresist 125 on the back surface of the Cu foil 124 is removed.
  • FIG. 16 is a process diagram of the manufacturing method according to the present invention, and shows a process following the 18th process shown in FIG.
  • annealing is performed in a state where the center of the spiral of the spiral contact 122 turned upside down is pushed up from one side by the convex tool 130 and deformed into a convex shape.
  • the convex tool 130 is arranged below the spiral contact 122, and the forming is stabilized by annealing forming the spiral contact 122 pushed up from below by the convex tool 130 and deformed into a convex shape. That is, the spiral contact 122 deformed into a convex shape is heated and annealed to be formed into a convex shape.
  • annealing forming for example, heating is performed at 250 ° C., annealing is performed, and internal stress is removed. Although the heating temperature is 250 ° C. here, it is assumed to include around 250 ° C., and is not limited to this.
  • a mounting substrate 128 having a conductive land 128a is provided on the surface, a conductive paste (solder paste) 129 is applied to the upper surface of the land 128a, and a spiral contact is formed on the upper surface of the land 128a.
  • the child 122 is positioned.
  • the Cu foil 124 is removed by etching.
  • the spiral contact 112 is superposed on the spiral contact 122 in two upper and lower stages, the tip is made free, and the root is joined by laser spot welding.
  • the spiral contact 122 is fixed to 128a, and the double spiral spiral contact 112 having a protrusion on the upper stage is overlapped on the lower spiral contact 122 having no protrusion.
  • a spiral contactor 101 is formed. Further, the double spiral is described with two spirals in parallel, but a triple spiral, a quadruple spiral, or a plurality of spirals may be used.
  • the spiral can be manufactured by shifting the root position and the tip position equally.
  • FIG. 17 shows a triple spiral two-stage spiral contact for explaining the seventh embodiment of the present invention, and (a) is a plan view showing the triple spiral two-stage spiral contact; b) (c) and (d) are cross-sectional views taken along line FF shown in (a), and are cross-sectional views of a spiral contact of a triple-spiral type having a convex shape in a natural body. Two types of two-stage configurations are shown. As shown in FIGS.
  • the spiral contacts 131 and 132 arranged in two upper and lower stages are convex spirals (spirals) in the natural body, but the root A, the root B, and the root
  • the triple spiral spiral contacts 131 and 132 are formed in a spiral shape from the reference numeral 131b toward the center of the tip, arranged in a spiral shape with the tip ends 131a being parallel to each other, and joined together at the tip 131a.
  • the spiral contactor 101 ′ is provided with a spiral contact 131 using a material having high electrical conductivity in the upper stage and a spiral contact 132 using a material having high spring characteristics in the lower stage.
  • the core material forming the spiral contact 131 is a nickel (Ni) base material, and the upper and lower surfaces are plated with Au.
  • the core material forming the spiral contact 132 is a nickel alloy (Ni alloy) blended with tungsten, and at least the upper surface is Au plated.
  • the root A, the root B, and the root C In the convex spiral contact 131 formed in a spiral shape from the root A, the root B, and the root C toward the tip center, and having a tip at the spiral center, the root A, the root B of the spiral contact 131, Three roots C are arranged at positions shifted by 120 ° from each other, the root A, the root B, the root C rises from the root C toward the center of the spiral, the center is the same, and the three are arranged in a spiral shape.
  • the spiral contact 131 has a mirror-like flat surface 131aa obtained by mirror-treating the upper surface of the tip 131a of the triple spiral spiral contact 131 integrated with the tip.
  • a hole 131aa (a depression or a through hole) is provided in the vicinity of a substantially circular center in the mirror-like flat surface 131aa disposed in the upper stage. Due to the hole 131aaa, the surface pressure is not dispersed and a large pressure is applied, and the radius to which the surface pressure is applied is large, so that the area in which the surface moves is increased and the metal-to-metal bonding is easily generated.
  • a column 131ab may be provided on the upper surface of the tip 131aa, and at this time, the upper surface of the column 131ab is provided with a mirror-like flat surface 131aba that is mirror-finished.
  • the column 131ab used the cylinder and the prism, the column of other shapes may be sufficient as long as the upper surface is flat.
  • a flat mirror-like flat surface 131aa may be provided.
  • FIG. 18 shows a two-stage spiral contactor for explaining an eighth embodiment of the present invention, wherein (a) is a plan view showing a spiral contact having a tip and a protrusion in the vicinity thereof; ) Is a cross-sectional view taken along line GG shown in FIG. As shown in FIGS. 18 (a) and 18 (b), the spiral contactor 101 ′′ arranged in two upper and lower stages is a convex spiral (spiral) in the natural body, but it goes from the root 133b to the center of the tip 133a.
  • a groove 133d is provided at the center in the width direction of the spiral contact 133 along the longitudinal direction of the spiral contact 133.
  • the contactors 133 and 134 are joined to at least one of the base parts 133d and 134d from the bases 133b and 134b and overlapped in two upper and lower stages to form a double spiral two-stage spiral contactor 101 ′′.
  • a projection 133aa having a quadrangular pyramid shape is provided at the tip 133a located at the center thereof. The width of the spiral increases as it approaches the root 133b from the tip 133a, and a spiral portion 133c is provided from the root 133b toward the tip 133a.
  • the width may be constant as it goes from the tip 133a to the root 133b. Although the thickness is also constant, the thickness may gradually increase from the tip to the base.
  • the spiral contactor 101 ′′ is provided with a spiral contact 133 using a material having a high electrical conductivity in the upper stage and a spiral contact 134 using a material having a high spring property in the lower stage.
  • the core material forming the spiral contact 133 is a nickel (Ni) base material, and the upper and lower surfaces are plated with Au.
  • the core material forming the spiral contactor 134 is a nickel alloy (Ni alloy) blended with tungsten, and at least the upper surface is Au plated. Note that the protrusion 133aa may not be provided.
  • the length of the groove 133d is provided in a predetermined section from the root 133b of the spiral contact 133 to the tip 133a.
  • the section can be set as appropriate.
  • the length of the groove 133d of the spiral contact 133 can be fixed as follows. That is, the roots 133b and 133b of the two spiral contacts 133 and 133 are the same, and are formed in a spiral shape from the root 133b toward the center of the tip 133a, and have a tip 133a at the center of the spiral and have two spiral contacts.
  • the child 133 may be formed in parallel with a space between each other, the space being referred to as a groove 133d, and the two spiral contacts 133 may be combined at the tip 133a.
  • FIG. 19A and 19B are schematic views of an interconnector to which the spiral contactor of the present invention is applied.
  • FIG. 19A is an overall view
  • FIG. 19B is an enlarged view of a portion indicated by D in the figure.
  • it is used as an interconnector that electrically connects between substrates, between a device and a substrate, and can be applied to a spiral contactor having a good combination of excellent electrical characteristics and spring characteristics.
  • the metal plates 14 and 34 are preferably Cu foils, the metal plates 14 and 34 are hereinafter referred to as Cu foils 14 and 34.
  • the thicknesses of the Cu foils 14 and 34 are foil-like, for example, 0.08 mm, but are not limited thereto.
  • the metal plating here is preferably a nickel alloy plating excellent in electric conductivity.
  • nickel nickel alloy plating was used for metal plating, for example, it is not limited to this.
  • heating is performed at 250 ° C., annealing is performed, and internal stress is removed. Although the heating temperature is 250 ° C.
  • the shape of the photomask is a pattern in which the spiral contact portion is blackened. Further, a method using a reverse black and white pattern may be used.
  • the spiral contactor has at least a part of the base portion from the base as an integral structure, the tip portion may also have an integral structure by the same construction method. In this case, the spiral part between the base and at least a part of the base part and the tip part overlaps in a state of being in close contact or slightly separated.
  • It is used as an interconnector that electrically connects substrates, between devices and substrates, etc., and can be applied to spiral contactors that have a good combination of excellent electrical characteristics and spring characteristics.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

L'invention porte sur un contacteur spiral (1) dans lequel des contacts saillants en spirale (11, 12), constitués selon des formes en spirale (11c, 12c) à partir de parties de début (11b, 12b) vers le centre des parties antérieures (11a, 12a) et ayant les parties antérieures (11a, 12a) au centre des formes en spirale (11c, 12c), sont placés les uns sur les autres selon deux couches. Le contacteur spiral (1) possède une structure dans laquelle le contact spiral supérieur (12) et le contact spiral inférieur (11) à partir des parties de départ (11b, 12b) vers les sections de base (11d, 12d) sont intégrés dans au moins une zone. Ainsi, les contacts saillants en spirale sont placés les uns sur les autres selon deux couches et on obtient un contacteur spiral ayant un point de claquage élevé sans augmenter la surface occupée par le contacteur spiral.
PCT/JP2009/005129 2009-04-24 2009-10-02 Contacteur spiral et son procédé de fabrication WO2010122612A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2009-106614 2009-04-24
JP2009106614A JP2010257757A (ja) 2009-04-24 2009-04-24 スパイラルコンタクタ
JP2009-136741 2009-06-05
JP2009136741A JP2010282902A (ja) 2009-06-05 2009-06-05 スパイラルコンタクタおよびその製造方法

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WO2010122612A1 true WO2010122612A1 (fr) 2010-10-28

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WO (1) WO2010122612A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105047382A (zh) * 2015-08-25 2015-11-11 重庆民生变压器有限责任公司 变压器用蜗式接线端子
EP2947721A3 (fr) * 2014-05-23 2016-03-02 Alps Electric Co., Ltd. Connecteur de type à contact à pression et son procédé de fabrication

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007087679A (ja) * 2005-09-21 2007-04-05 Alps Electric Co Ltd 接続部材
JP2008251331A (ja) * 2007-03-30 2008-10-16 Advanced Systems Japan Inc 凸形ケルビン・スパイラルコンタクタ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007087679A (ja) * 2005-09-21 2007-04-05 Alps Electric Co Ltd 接続部材
JP2008251331A (ja) * 2007-03-30 2008-10-16 Advanced Systems Japan Inc 凸形ケルビン・スパイラルコンタクタ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2947721A3 (fr) * 2014-05-23 2016-03-02 Alps Electric Co., Ltd. Connecteur de type à contact à pression et son procédé de fabrication
EP3416245A1 (fr) * 2014-05-23 2018-12-19 Alps Electric Co., Ltd. Connecteur de type à contact à pression et son procédé de fabrication
CN105047382A (zh) * 2015-08-25 2015-11-11 重庆民生变压器有限责任公司 变压器用蜗式接线端子
CN105047382B (zh) * 2015-08-25 2017-04-12 重庆民生变压器有限责任公司 变压器用蜗式接线端子

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