WO2010122612A1 - Spiral contactor and method for manufacturing same - Google Patents

Abstract

Provided is a spiral contactor (1) wherein protruding spiral contacts (11, 12), which are formed in spiral shapes (11c, 12c) from start portions (11b, 12b) toward the center of the leading ends (11a, 12a) and have the leading ends (11a, 12a) at the center of the spiral shapes (11c, 12c), are placed one over another in two layers. The spiral contactor (1) has the structure wherein the upper spiral contact (12) and the lower spiral contact (11) from the start portions (11b, 12b) to base sections (11d, 12d) are integrated at least on one area. Thus, the protruding spiral contacts are placed one over another in two layers and the spiral contactor having a high breakdown point is provided without increasing the area occupied by the spiral contactor.

Description

Spiral contactor and manufacturing method thereof

The present invention relates to a spiral contactor having a good combination of excellent electrical characteristics and spring characteristics with a high yield point. In particular, the spiral contactors are stacked in two upper and lower stages, the upper spiral contact and the lower spiral contact. The present invention relates to a spiral contactor in which at least one part of a base from the base of a contact has an integral structure and a method for manufacturing the same.

FIG. 20 is a schematic view showing an outline of a conventional single spiral two-stage spiral contactor. As shown in FIG. 20, a convex spiral contactor 201 having a tip at the center of a spiral has a plurality of spiral contacts 211 and 212 joined together at the tip. The roots 211b and 212b of the spiral contacts 211 and 212 are arranged at the overlapping positions, and fixed by, for example, laser spot welding, and rise from the roots 211b and 212b toward the center of the spiral, Are provided with tips 211a and 212a.
As a result, it is possible to connect to connection terminals of various shapes, and when the spiral contact makes contact with the connection terminal and the spiral contact is pushed down from the tip in order, the spiral contact makes a twisting action with the connection terminal. It has excellent electrical connectivity by making a contact while drawing and drawing a minute circle (see Patent Document 1).

Japanese Patent Application No. 2008-202905

However, in order to further improve the electrical connection characteristics when the spiral contact is strongly pressed against the connection terminal, a spiral contact having both electrical characteristics and spring characteristics is required. It was.
For this reason, it is necessary to increase the spring constant of the spiral contact and to deepen the yield point. In addition, as a method for this, there are methods such as increasing the plating thickness of the spiral contactor or increasing the plate thickness itself, but increasing the plate thickness increases the spring constant, but yielding as a material The point becomes shallow. For this reason, it is necessary to increase the yield point by increasing the length of the spiral contact.

The present invention was devised to solve the above-described problems, and is a spiral contactor having a superior spiral characteristic and a high yield point spring characteristic in which convex spiral contacts are superposed in two upper and lower stages. In particular, the spiral contactor is stacked in two upper and lower stages, and the spiral contactor in which the upper spiral contact is integrated with at least one part of the base from the base of the lower spiral contact and its It is an object to provide a manufacturing method.

The spiral contactor of the invention according to claim 1 is formed in a spiral shape from the root toward the center of the tip, and the convex spiral contacts 11 and 12 having a tip at the spiral center are overlapped in two upper and lower stages. In the spiral contactor 1, the spiral contactor 1 has an integral structure in which at least one part from the base to the base of the upper spiral contact 11 and the lower spiral contact 12 is integrated. .

According to the first aspect of the present invention, at least one portion of the base from the base of the upper spiral contact and the lower spiral contact is integrated with the spiral contact. Although it is difficult, the yield point can be deepened by stacking two spiral contactors in two upper and lower stages, and the electrical resistance can be reduced without increasing the contact pressing force. Thus, a spiral contact having a small installation area can be maintained.

The invention according to claim 2 is the spiral contactor 1 according to claim 1, wherein the spiral contactors 11 and 12 of the upper and lower two stages are arranged at the same base, and the spiral contactor is arranged from the root. The spiral contactor 1 rising toward the center is characterized in that at least one portion of the base portion from the base has an integral structure.

According to the second aspect of the present invention, the spiral contact element alone is realized by forming at least one portion of the base portion from the base of the upper spiral contact element and the lower spiral contact element. Although it is difficult, the yield point can be deepened by stacking two spiral contactors in two upper and lower stages, and the electrical resistance can be reduced without increasing the contact pressing force. Thus, a spiral contact having a small installation area can be maintained.

The invention according to claim 3 is the spiral contactor 3 according to claim 1, wherein the roots of the upper and lower two-stage spiral contacts 31, 32 are arranged at positions shifted from each other by 180 °. A double spiral spiral that rises from the root toward the center of the spiral, and the two spiral contacts 31 and 32 that are arranged in a spiral shape with the center being the same are joined together at the tip. The contactor 3 is characterized in that at least one part of the base portion from the base has an integral structure.

According to the invention of claim 3, it is realized by a single spiral contactor by having at least one part of the base from the base of the upper spiral contactor and the lower spiral contactor to be integrated. Although it is difficult, the yield point can be deepened by stacking two spiral contactors in two upper and lower stages, and the electrical resistance can be reduced without increasing the contact pressing force. Thus, a spiral contact having a small installation area can be maintained.

The invention according to claim 4 is the spiral contactor 4 according to claim 1, wherein the roots of the upper and lower two- stage spiral contacts 41, 42 are arranged at positions shifted from each other by 120 °, and A triple spiral spiral contactor that rises from the root toward the center of the spiral, and the three spiral contacts 41 and 42 that are arranged in a spiral with the centers being the same are joined together at the tip. 4 is characterized in that at least one part of the base from the base has an integral structure.

According to the invention of claim 4, it is realized by a single spiral contactor by having at least one part of the base from the base of the upper spiral contactor and the lower spiral contactor to be integrated. Although it is difficult, the yield point can be deepened by stacking two spiral contactors in two upper and lower stages, and the electrical resistance can be reduced without increasing the contact pressing force. Thus, a spiral contact having a small installation area can be maintained.

The invention according to claim 5 is the spiral contactor 5 according to claim 1, wherein the spiral bases of the spiral contactors 51, 52 in the upper and lower two stages are made to be the same in parallel and arranged in a spiral shape. In the spiral contactor 5 in which the two spiral contactors 51 and 52 provided are merged at the tip and integrated with each other, at least one portion of the base from the base has an integral structure.

According to the fifth aspect of the present invention, the spiral contactor itself can be realized by having at least one portion of the base part from the base of the upper spiral contactor and the lower spiral contactor to be integrated. Although it is difficult, the yield point can be deepened by stacking two spiral contactors in two upper and lower stages, and the electrical resistance can be reduced without increasing the contact pressing force. Thus, a spiral contact having a small installation area can be maintained.

The spiral contactor of the invention according to claim 6 is formed in a spiral shape from the root toward the tip center, and the convex spiral contactor (112, 122) having the tip at the spiral center in two upper and lower stages. The spiral contactor (101) is a superposed spiral contactor (101) that uses a spiral contactor (112) using a material having high electrical conductivity at the upper stage and a material having high springiness at the lower stage. A spiral contact (122) provided is provided.

According to the invention of claim 6, the upper and lower spiral contactors use a material having high electrical conductivity at the upper stage on the side in contact with the connection terminal and a material having high springiness at the lower stage. However, it is difficult to achieve with a single spiral contact, but by stacking two spiral contacts in two steps, the yield point can be deepened and the electrical resistance can be reduced without increasing the contact pressure. It is possible to maintain the required yield point depth and to make a spiral contact with a small installation area.

The invention according to claim 7 is the spiral contactor (101) according to claim 6, wherein the width of the lower spiral contactor (122) is greater than the width of the upper spiral contactor (112). It is characterized by being narrow.

According to the seventh aspect of the present invention, the width of the spiral contactor on the lower side of the spiral contactor arranged in the upper and lower two stages is made narrower than the width of the upper spiral contact, thereby making the upper and lower two stage spirals. Even when the contactor is compressed, the entire upper surface of the lower spiral contactor is not detached from the lower surface of the upper spiral contactor, and a stable electrical connection characteristic can be obtained. Excellent electrical characteristics and an excellent spring It is possible to realize a spiral contact having both characteristics.

The invention according to claim 8 is the spiral contactor (101) according to claim 6, wherein the thickness of the lower spiral contact (122) is the thickness of the upper spiral contact (112). It is characterized by being thinner than that.

According to the eighth aspect of the present invention, the thickness of the lower spiral contact disposed in the upper and lower spiral contacts is made thinner than that of the upper spiral contact. Since the spiral contact has a smaller cross-sectional stress, the upper surface of the lower spiral contact is not separated from the lower surface of the upper spiral contact even when the upper and lower spiral contacts are compressed. Following this, a stable electrical connection characteristic can be obtained, and a spiral contactor having both excellent electrical characteristics and excellent spring characteristics can be realized.

The invention according to claim 9 is the spiral contactor (101) according to claim 6, wherein the roots of the upper and lower two-stage spiral contactors (112, 122) are arranged at positions shifted from each other by 180 °. Then, the two spiral contacts (112, 122), which rise from the root toward the center of the spiral and are arranged in a spiral with the centers being the same, are joined together at the tip. The double spiral spiral contactor (101) is characterized in that at least one portion of the base portion is vertically joined from the base and is superposed in two stages.

According to the invention of claim 9, the upper and lower spiral contactors use a material having high electrical conductivity at the upper stage on the side in contact with the connection terminal, and a material having high springiness at the lower stage. However, it is difficult to achieve with a single spiral contact, but by stacking two spiral contacts in two steps, the yield point can be deepened and the electrical resistance can be reduced without increasing the contact pressure. It is possible to maintain the required yield point depth and to make a spiral contact with a small installation area.

The invention according to claim 10 is the spiral contactor (101) according to claim 6, wherein the roots of the upper and lower two-stage spiral contactors (131, 132) are arranged at positions shifted by 120 ° from each other. Then, the triple spiral spiral that rises from the root toward the center of the spiral, and the three spiral contacts that are arranged in a spiral in parallel with each other at the center join together at the tip. The contactor (101 ') is characterized in that at least one portion of the base portion is vertically joined from the base, and is superposed in two stages.

According to the invention of claim 10, the upper and lower spiral contactors use a material with high electrical conductivity at the upper stage on the side in contact with the connection terminal, and use a material with high springiness at the lower stage. However, it is difficult to achieve with a single spiral contact, but by stacking two spiral contacts in two steps, the yield point can be deepened and the electrical resistance can be reduced without increasing the contact pressure. It is possible to maintain the required yield point depth and to make a spiral contact with a small installation area.

The invention according to claim 11 is the spiral contactor (101) according to claim 6, wherein in the spiral contactors (133, 134) of the upper and lower two stages, the roots of the spirals are made to be the same to each other. Two spiral contacts (133, 134) arranged in a spiral shape merge at the tip to form an integral spiral contact (133, 134) up and down at least one location from the base to the base. It is characterized by being joined to the upper and lower two stages.

According to the invention of claim 11, the upper and lower spiral contactors use a material with high electrical conductivity on the upper stage on the side in contact with the connection terminal, and use a material with high springiness on the lower stage. However, it is difficult to achieve with a single spiral contact, but by stacking two spiral contacts in two steps, the yield point can be deepened and the electrical resistance can be reduced without increasing the contact pressure. It is possible to maintain the required yield point depth and to make a spiral contact with a small installation area.

The invention according to claim 12 is the spiral contactor (101, 101 ′, 101 ″) according to claim 6, wherein the spiral contactor is formed in a spiral shape from the root toward the tip center, and the spiral contactor is formed at the center of the spiral shape. A spiral contactor (101, 101 ′, 101 ″) in which convex spiral contacts having tips are stacked in two upper and lower stages, and a spiral disposed at least in the upper stage of the two upper and lower spiral contactors. A hole is provided in the vicinity of the center on the flat surface of the tip of the contact.

According to the twelfth aspect of the present invention, the mirror-like flat surface 31aa disposed in the upper stage is provided with a substantially circular hole 31aaa (a depression or a through hole) in the vicinity of the center. Due to the holes 31aaa, the surface pressure is not dispersed and a large pressure is applied, and since the radius to which the surface pressure is applied is large, the area in which the surface moves is increased and the metal-to-metal bonding is easily generated. In addition, when soldering is used, fillets that are sucked up solder are formed in both the hole and the periphery, thereby enabling a stronger solder joint. In this way, two spiral contactors are stacked in two steps, and the root is fixed by laser spot welding, thereby producing the same effect as increasing the length of the spiral contactor. As a result, the spring constant of the two-stage spiral contact increased, and the yield point was deepened. Therefore, it can be connected to connection terminals of various shapes, and when the spiral contact comes into contact with the connection terminal and the spiral contact is pushed down sequentially from the tip, the tip of the spiral contact is connected to the connection terminal. A spiral contact that has both excellent electrical characteristics and excellent spring characteristics in a spiral contact with excellent electrical connectivity by making contact with twisting motion and drawing a micro circle. be able to.

According to a thirteenth aspect of the present invention, there is provided a spiral contactor manufacturing method comprising: a first step (a) of preparing a metal plate 14; and applying or drying a first photoresist 15 on the surface of the metal plate 14 made of Cu foil 14. Affix the film. A second step (b) of covering the first photomask 16 having the spiral contact 11 pattern from above and irradiating light from above the photomask 16 for exposure, and the first photomask 16 A third step (c) of developing the first photoresist 15 so as to form a pattern, and further, a metal plating 13 composed of Au plating 17, rhodium Rh19, and Ni plating on the exposed surface of the Cu foil 14 from above. And a fourth step (d) of forming the spiral contact 11 and applying the second photoresist 20 on the surface of the formed spiral contact 11 or applying a dry film. A fifth step (e) in which the second photomask 18 having the pattern of the integrated structure portion 25 is covered from above and exposed by irradiating light from above the photomask 18, and the photomask 18 is irradiated with light. Then, the second photoresist 20 is removed by exposure and development, and a sixth step (f) in which Au (gold) plating 17 is applied to the removed surface, and Cu plating 11e is applied to the surface of the metal plating 17 and Au is further applied. A seventh step (g) for applying the plating 17; an eighth step (h) for removing the second photoresist 20; and a ninth step for applying the metal plating 13 composed of the Ni plating 13 on the surface of the Au plating 17. (I) Then, the third photoresist 22 is applied to the back surface of the metal plate 14 or a dry film is applied. A tenth step (j) in which a third photomask 23 having a pattern of holes for etching is covered from above and exposed by irradiating light from above the photomask 23, and the photomask 23 is irradiated with light. An eleventh step (k) in which the third photoresist 22 is removed by exposure and development, a twelfth step (l) in which a hole 14c is formed in the Cu foil 14 by etching from the back surface of the Cu foil 14, and the Cu foil 14 13th step (m) for removing the third photoresist 22 on the back surface of the substrate, and the spiral center of the spiral contactors 11 and 12 turned upside down is pushed up from one side by the convex tool 21 and deformed into a convex shape 14th step (n) for annealing forming in a heated state, 15th step (0) for attaching the adhesive tape 24, and 16th step (p) for removing the Cu foil 14 by etching, which were stacked one above the other. Method for manufacturing a spiral contactor spiral contacts 11, 12 of the state is characterized by comprising a seventeenth step in close contact with each other of the bottom and the top surface (q), the.

According to the thirteenth aspect of the present invention, at least one part of the base from the base of the upper spiral contact and the lower spiral contact has an integral structure, thereby shortening the manufacturing process and reducing the manufacturing cost. Can do.

In the spiral contactor manufacturing method according to the fourteenth aspect of the present invention, the first step 35 (a) in which the metal plate 34 is prepared, and the first photoresist 35 is applied to the surface of the metal plate 34 as the Cu foil 34 or dry. Affix the film. A first step B (b) in which a first photomask 36 having a pattern of the spiral contactor 11 is covered from above and exposed by irradiating light from above the photomask 36, and the first photomask 36 is exposed. A C-step (c) in which the first photoresist 35 is developed so as to form a pattern, and a metal plating 33 composed of Au plating 37, rhodium Rh39, and Ni plating 33 is applied to the exposed surface of the Cu 34 from above. The D step (d) for forming the spiral contact 11 ′, the E step (e) for removing the first photoresist 35, and the second photo on the surface of the formed spiral contact 11 ′. Resist 40 is applied or a dry film is applied. A second photomask 38 having a pattern of the integrated structure portion 42 is applied from above, and the F-step (f) is performed by irradiating light from above the photomask 38, and the photomask 38 is irradiated with light. Then, the G step (g) for removing the second photoresist 40 by exposure and development, the H step (h) for applying the Cu plating 31e to the removed surface and further applying the Au plating 37, the first step The first step (i) for removing the photoresist 35, and the third photoresist 45 is applied to the surface of the Au plating 37 and the Cu plating 31e, or a dry film is applied. A third photomask 46 having a pattern of spiral contacts 11 ′ is applied from above, and a J-th step (j) is performed by irradiating light from above the photomask 46. The K-th step (k) in which the third photoresist 45 is removed by irradiating light with exposure and development, and the metal plating 33 composed of the Ni plating 33 is applied to the surface of the Au plating 37, and further Au plating In step L (l), the fourth photo resist 47 is applied to the back surface of the metal plate 34 or a dry film is applied. A fourth photomask 48 having a pattern of etching holes is covered from above, and the Mth step (m) in which exposure is performed by irradiating light from above the photomask 48, and the fourth photomask 48 is irradiated with light. N step (n) in which the fourth photoresist 47 is removed by exposure / development by irradiation, an O step (o) in which a hole 34c is formed in the Cu foil 34 by etching from the back surface of the Cu foil 34, and The P-th step (p) for removing the fourth photoresist 47 on the back surface of the Cu foil 34, and the center of the spiral of the spiral contact 11 ', 12' turned upside down is pushed up from one side by the convex tool 43. Q process (q) for annealing forming in a deformed state, R process (r) for attaching adhesive tape 49, S process (s) for removing Cu foil 34 by etching, Of the form superimposed on And a T-th step (t) in which the spiral contacts 11 ′ and 12 ′ are in close contact with each other on the bottom surface and the top surface.

According to the fourteenth aspect of the present invention, at least one portion of the base portion from the base of the upper spiral contact and the lower spiral contact has an integrated structure, thereby shortening the manufacturing process and reducing the manufacturing cost. Can do.

In addition, in this way, two spiral contacts are stacked to form a two-tier structure, and at least one of the base and the base is made into an integral structure, so that the length of the spiral contact is increased. An effect was born. As a result, the spring constant of the two-stage spiral contact increased, and the yield point was deepened. Therefore, it can be connected to connection terminals of various shapes, and when the spiral contact comes into contact with the connection terminal and the spiral contact is pushed down sequentially from the tip, the tip of the spiral contact is connected to the connection terminal. A spiral contact that has both excellent electrical characteristics and excellent spring characteristics in a spiral contact with excellent electrical connectivity by making contact with twisting motion and drawing a micro circle. be able to.

The single spiral two-stage spiral contact for explaining the first embodiment of the present invention is shown, (a) is a plan view showing a single spiral two-stage spiral contact, (b) is ( It is sectional drawing of the AA line shown to a), and is sectional drawing of a convex single spiral two-stage spiral contact in a natural body, (c) is a single spiral two-stage spiral shape shown in (b) It is sectional drawing which shows the state which the upper and lower sides of the contactor adhered. It is process sectional drawing which shows the manufacturing process of the single spiral two-stage spiral contactor for demonstrating the 1st Embodiment of this invention. It is process sectional drawing which shows the manufacturing process of the single spiral two-stage spiral contactor for demonstrating the 1st Embodiment of this invention. It is process sectional drawing which shows the manufacturing process of the single spiral two-stage spiral contactor for demonstrating the 1st Embodiment of this invention. It is process sectional drawing which shows the manufacturing process of the single spiral two-stage spiral contactor for demonstrating the 2nd Embodiment of this invention. It is process sectional drawing which shows the manufacturing process of the single spiral two-stage spiral contactor for demonstrating the 2nd Embodiment of this invention. It is process sectional drawing which shows the manufacturing process of the single spiral two-stage spiral contactor for demonstrating the 2nd Embodiment of this invention. It is process sectional drawing which shows the manufacturing process of the single spiral two-stage spiral contactor for demonstrating the 2nd Embodiment of this invention. The double spiral two-stage spiral contact for explaining the third embodiment of the present invention is shown, (a) is a plan view showing the double spiral two-stage spiral contact, (b) FIG. 2B is a cross-sectional view taken along line BB shown in FIG. 1A, and is a cross-sectional view of a double contact spiral contact having a convex shape in a natural body, and FIG. 2C is a double spiral double step shown in FIG. It is sectional drawing which shows the state which the upper and lower sides of the spiral contactor of a formula adhered. The triple spiral two-stage spiral contact for explaining the fourth embodiment of the present invention is shown, (a) is a plan view showing the triple spiral two-stage spiral contact, (b) is ( It is sectional drawing of CC line shown to a), It is sectional drawing of a convex triple spiral two-stage spiral contactor in a natural body, (c) is a triple spiral two-stage spiral shape shown in (b). It is sectional drawing which shows the state which the upper and lower sides of the contactor adhered. The spiral base for explaining the fifth embodiment of the present invention is shown as a two-stage spiral contact arranged in parallel with each other with the same spiral root, and (a) shows the spiral contact. FIG. 4B is a cross-sectional view taken along line DD shown in FIG. 1A, and is a cross-sectional view of a spiral contact that is a convex shape in a natural body. The double spiral two-stage spiral contact for explaining the sixth embodiment of the present invention is shown, (a) is a plan view showing the double spiral two-stage spiral contact, (b) FIG. 2A is a cross-sectional view taken along line EE shown in FIG. 1A, and is a cross-sectional view of a double contact spiral contact having a convex shape in a natural body. It is process drawing of the manufacturing method of the spiral contactor which concerns on this invention, and has shown the manufacturing process of the upper spiral contactor. It is process drawing of the manufacturing method of the spiral contactor which concerns on this invention, and has shown the process following the 8th process shown in FIG. It is process drawing of the manufacturing method of the spiral contactor which concerns on this invention, and has shown the manufacturing process of the lower spiral contactor. It is process drawing of the manufacturing method which concerns on this invention, and has shown the process following the 18th process shown in FIG. The triple spiral two-stage spiral contact for explaining the seventh embodiment of the present invention is shown, (a) is a plan view showing the triple spiral two-stage spiral contact, (b) (c) ) (D) is a cross-sectional view taken along line FF shown in (a), and is a cross-sectional view of a spiral contact of a triple-spiral type having a convex shape in a natural body, and is representative of three types of two-stages. The formula form is shown. FIG. 10 shows a two-stage spiral contactor for explaining an eighth embodiment of the present invention, wherein (a) is a plan view showing a spiral contact having a tip and a protrusion in the vicinity thereof, and (b) is (a). ) Is a cross-sectional view taken along line GG shown in FIG. It is the schematic of the interconnector to which the spiral contactor of this invention is applied, (a) is a general view, (b) is an enlarged view of the part shown by E in the figure. It is the schematic which shows the outline of the conventional single spiral two-stage spiral contactor.

1, 1 ', 3, 4, 5 Spiral contactor 11, 12, 11', 12 ', 21, 22, 31, 32, 41, 41, 51, 52 Spiral contact 11e, 31e Cu plating 14, 34 Cu Foil 15, 20, 22, 35, 40, 45 Photoresist 16, 18, 23, 36, 38, 46, 48 Photomask 13, 33 Metal plating, Ni plating 25, 42 Integrated structure 21, 43 Convex tool 101 , 101 ′, 101 ″ Spiral contactor 112, 122, 131, 132, 133, 134 Spiral contactor 114, 124 Cu foil 115, 125 Photoresist 116, 116 ′, 126, 126 ′ Photomask 117 Metal plating 128 Mounting Substrate 119, 129 Paste 130 Convex tool

Embodiments of a spiral contactor and a manufacturing method thereof according to the present invention will be described below in detail with reference to the drawings.
<First Embodiment>
FIG. 1 shows a single spiral two-stage spiral contact for explaining the first embodiment of the present invention, (a) is a plan view showing a single spiral two-stage spiral contact, (b) is a cross-sectional view taken along line AA shown in (a), and is a cross-sectional view of a spiral contact with a single-convex double-stage type having a convex shape in a natural body, and (c) is a single-stage double-stage shown in (b) It is sectional drawing which shows the state which the upper and lower sides of the spiral contactor of a formula adhered.
As shown in FIGS. 1A, 1B, and 1C, the spiral contactor 1 is formed in a spiral shape from the root 11b toward the center of the tip 11a, and has a convex spiral shape having the tip 11a at the center of the spiral. The contacts 11 and 12 are superposed in two upper and lower stages, and at least one portion from the base 11b to the base 11d of the upper spiral contact 12 and the lower spiral contact 11 has an integral structure.

Although at least one part from the base 11b to the base portion 11d of the upper spiral contact 12 and the lower spiral contact 11 has an integral structure, it is difficult to realize with a single spiral contact. By stacking two contactors in the upper and lower stages, the yield point can be deepened, and the electrical resistance can be reduced without increasing the contact pressing force, and the required yield point depth is maintained and installed. A spiral contact with a small area can be obtained.

2, 3, and 4 are process cross-sectional views illustrating a manufacturing process of a single spiral two-stage spiral contactor for explaining the first embodiment of the present invention.
As shown in FIGS. 2 to 4, the first step (a) for preparing the metal plate 14 and the first photoresist 15 is applied to the surface of the metal plate 14 made of Cu foil 14 or a dry film is applied. . A second step (b) of covering the first photomask 16 having the spiral contact 11 pattern from above and irradiating light from above the photomask 16 for exposure, and the first photomask 16 A third step (c) of developing the first photoresist 15 so as to form a pattern, and a metal plating 13 composed of Au plating 17, rhodium Rh19, and Ni plating on the exposed surface of the Cu foil 14 from above is further performed. And a fourth step (d) of forming the spiral contact 11 and applying the second photoresist 20 on the surface of the formed spiral contact 11 or applying a dry film. A fifth step (e) in which the second photomask 18 having the pattern of the integrated structure portion 25 is covered from above and exposed by irradiating light from above the photomask 18, and the photomask 18 is irradiated with light. A sixth step (f) of removing the second photoresist 20 by exposure and development, and applying Au (gold) plating 17 to the removed surface;
Seventh step (g) of applying Cu plating 11e to the surface of the metal plating 17 and further applying Au plating 17, an eighth step (h) of removing the second photoresist 20, and Ni plating on the surface of the Au plating 17 The ninth step (i) for applying the metal plating 13 composed of 13 is turned upside down, and the third photoresist 22 is applied to the back surface of the metal plate 14 or a dry film is applied. A tenth step (j) in which a third photomask 23 having a pattern of etching holes is covered from above and exposed by irradiating light from above the photomask 23, and the photomask 23 is irradiated with light. An eleventh step (k) in which the third photoresist 22 is removed by exposure and development, a twelfth step (l) in which a hole 14c is formed in the Cu foil 14 by etching from the back surface of the Cu foil 14, and the Cu foil 14 13th step (m) for removing the third photoresist 22 on the back surface of the substrate, and the center of the spiral of the spiral contactors 11 and 12 turned upside down is pushed up from one side by the convex tool 21 and deformed into a convex shape. A 14th step (n) of annealing forming in a heated state;
The fifteenth step (0) for applying the adhesive tape 24, the sixteenth step (p) for removing the Cu foil 14 by etching, and the spiral contacts 11 and 12 in the form of being stacked one above the other are the bottom and top surfaces of each other. And a seventeenth step (q) in close contact with each other.

<Second Embodiment>
5, FIG. 6, FIG. 7, and FIG. 8 are process cross-sectional views showing a manufacturing process of a single spiral two-stage spiral contactor for explaining a second embodiment of the present invention.
As shown in FIGS. 5 to 8, the first step 35 (a) in which the metal plate 34 is prepared and the first photoresist 35 is applied to the surface of the metal plate 34 that is the Cu foil 34 or a dry film is applied. . A first step B (b) in which a first photomask 36 having a pattern of the spiral contactor 11 is covered from above and exposed by irradiating light from above the photomask 36, and the first photomask 36 is exposed. A C-step (c) in which the first photoresist 35 is developed so as to form a pattern, and a metal plating 33 composed of an Au plating 37, a rhodium Rh39, and an Ni plating 33 on the exposed surface of the Cu foil 34 from above. To form a spiral contact 11 ′, a D step (d), an E step (e) to remove the first photoresist 35, and a second contact on the surface of the formed spiral contact 11 ′. The photoresist 40 is applied or a dry film is applied. A second photomask 38 having a pattern of the integrated structure portion 42 is applied from above, and the F-step (f) is performed by irradiating light from above the photomask 38, and the photomask 38 is irradiated with light. Then, the G step (g) for removing the second photoresist 40 by exposure and development, the H step (h) for applying the Cu plating 31e to the removed surface and further applying the Au plating 37, the first step The first step (i) for removing the photoresist 35, and the third photoresist 45 is applied to the surface of the Au plating 37 and the Cu plating 31e, or a dry film is applied. A third photomask 46 having a pattern of spiral contacts 11 ′ is applied from above, and a J-th step (j) is performed by irradiating light from above the photomask 46. The K-th step (k) in which the third photoresist 45 is removed by irradiating light with exposure and development, and the metal plating 33 composed of the Ni plating 33 is applied to the surface of the Au plating 37, and further Au plating In step L (l), the fourth photo resist 47 is applied to the back surface of the metal plate 34 or a dry film is applied. A fourth photomask 48 having a pattern of etching holes is covered from above, and the Mth step (m) in which exposure is performed by irradiating light from above the photomask 48, and the fourth photomask 48 is irradiated with light. N step (n) in which the fourth photoresist 47 is removed by exposure / development by irradiation, an O step (o) in which a hole 34c is formed in the Cu foil 34 by etching from the back surface of the Cu foil 34, and The P-th step (p) for removing the fourth photoresist 47 on the back surface of the Cu foil 34, and the center of the spiral of the spiral contact 11 ', 12' turned upside down is pushed up from one side by the convex tool 43. Q-th step (q) of annealing forming in a deformed state,
The R step (r) for attaching the adhesive tape 49, the S step (s) for removing the Cu foil 34 by etching, and the spiral contacts 11 ', 12' in the form of being stacked one above the other are the bottom surfaces of each other. And a T-th step (t) in close contact with each other on the upper surface.

<Third Embodiment>
FIG. 9 shows a double spiral two-stage spiral contact for explaining the third embodiment of the present invention, and FIG. 9A is a plan view showing a double spiral two-stage spiral contact. (B) is a cross-sectional view taken along line BB shown in (a), and is a cross-sectional view of a convex double spiral two-stage spiral contact in a natural body, and (c) is a cross-sectional view shown in (b). It is sectional drawing which shows the state which the upper and lower sides of the double spiral type spiral contactor contact | adhered.
As shown in FIGS. 9A, 9B, and 9C, the spiral contacts 32, 31 arranged in two upper and lower stages are convex spirals (spirals) in the natural body, but the roots 32b, 31b. Are formed in a spiral shape toward the center of the tip, and the tips 32a and 31a are arranged in parallel with each other in a spiral shape, and the double spiral spiral contacts 32 and 31 in which the tips 32a and 31a are integrated are formed at the root. At least one of the base portions 32d and 31d from the portions 32b and 31b has an integral structure.

The spiral contacts 32, 31 are formed in a spiral shape from the roots 32b, 31b toward the center of the tip, and the convex spiral contacts 32, 31 having the tips 32a, 31a at the center of the spiral are arranged vertically. It is the spiral contactor 3 piled up in the step | level, Comprising: The spiral contactor 3 uses the material rich in electrical conductivity, and the material rich in spring property. The core material forming the spiral contacts 32 and 3 is a nickel (Ni) base material of a low electrical resistance material, and the upper and lower surfaces are plated with Au. The core material forming the spiral contacts 32 and 3 is a nickel alloy (Ni alloy) blended with tungsten having excellent spring characteristics, and at least the upper surface is Au plated.
Thus, by stacking two spiral contactors in two upper and lower stages, the yield point can be deepened, and the electrical resistance can be reduced without increasing the contact pressing force, and the required depth of the yield point. Thus, a spiral contact with a small installation area can be obtained.

<Fourth Embodiment>
FIG. 10 shows a triple spiral two-stage spiral contact for explaining the fourth embodiment of the present invention, (a) is a plan view showing a triple spiral two-stage spiral contact; b) is a cross-sectional view taken along the line C-C shown in (a), and is a cross-sectional view of a convex triple spiral spiral contact in a natural body, and (c) is a triple spiral double stage shown in (b). It is sectional drawing which shows the state which the upper and lower sides of the spiral contactor of a formula adhered.
As shown in FIGS. 10A, 10B, and 10C, the spiral contacts 42 and 41 arranged in two upper and lower stages are convex spirals (spirals) in the natural body, but the roots 42b and 41b. Are formed in a spiral shape toward the center of the tip, and the tips 42a and 41a are arranged in parallel with each other in a spiral shape, and the double spiral spiral contacts 42 and 41 in which the tips 42a and 41a are integrated are formed at the root. At least one part of the base parts 42d and 41d from the parts 42b and 41b has an integral structure.

<Fifth Embodiment>
FIG. 11 shows a two-stage spiral contact arranged in a spiral shape in parallel with each other with the same spiral root for explaining the fifth embodiment of the present invention. FIG. FIG. 4B is a cross-sectional view taken along the line DD shown in FIG. 4A, and is a cross-sectional view of a spiral contact that is a convex shape in a natural body.
As shown in FIGS. 11 (a) and 11 (b), the spiral contacts 52 and 51 arranged in two upper and lower stages are convex spirals (spirals) in the natural body, but from the roots 52b and 51b to the center of the tip. The spiral contacts 52 and 51 are integrally formed with the tips 52a and 51a from the roots 52b and 51b to the base 52d. , 51d has an integral structure.

As described above, since at least one portion of the base portion from the base of the upper spiral contact and the lower spiral contact has an integrated structure, it is difficult to realize the spiral contact alone. By stacking two contactors in the upper and lower stages, the yield point can be deepened, and the electrical resistance can be reduced without increasing the contact pressing force, and the required yield point depth is maintained and installed. A spiral contact with a small area can be obtained.

<Sixth Embodiment>
FIG. 12 shows a double spiral two-stage spiral contact for explaining the sixth embodiment of the present invention, and FIG. 12A is a plan view showing a double spiral two-stage spiral contact. (B) is sectional drawing of the EE line shown to (a), and is a sectional view of a spiral contact of a convex double spiral two-stage type in a natural body.
As shown in FIGS. 12 (a) and 12 (b), the spiral contacts 112 and 122 arranged in two upper and lower stages are convex spirals (spirals) in the natural body, but from the roots 112b and 122b to the center of the tip. Are formed in a spiral shape with the tips 112a and 122a being the same in parallel and arranged in a spiral shape, and double spiral spiral contacts 112 and 122 having the tips 112a and 122a integrally formed have roots 112b and 122b. To at least one of the bases 112d and 122d is joined by laser spot welding and overlapped in two stages.

The spiral contacts 112 and 122 are formed in a spiral shape from the root toward the tip center, and spiral spiral contacts 112 and 122 having tips at the spiral center are stacked in two upper and lower stages. In the contactor 101, the spiral contactor 101 is provided with a spiral contactor 112 using a material having high electrical conductivity in the upper stage and a spiral contactor 122 using a material having high springiness in the lower stage. The core material forming the spiral contact 112 is a nickel (Ni) base material of a low electrical resistance material, and the upper and lower surfaces are plated with Au. The core material forming the spiral contact 122 is a nickel alloy (Ni alloy) containing tungsten having excellent spring characteristics, and at least the upper surface is Au plated.

In this way, the spiral contact of the upper and lower stages uses a material having high electrical conductivity for the upper stage on the side in contact with the connection terminal, and a material having high springiness for the lower stage, so that the spiral contact element alone However, it is difficult to achieve this, but by stacking two spiral contacts in two steps, the yield point can be deepened, and the electrical resistance can be reduced without increasing the contact pressure. A spiral contact with a small installation area can be obtained while maintaining the depth of the yield point.

Further, the width of the lower spiral contact 122 is formed narrower than the width of the upper spiral contact 112.
In this way, by making the width of the spiral contact 122 on the lower side of the spiral contacts 112, 122 arranged in two upper and lower stages narrower than the width of the upper spiral contact 112, two upper and lower stages Even when the spiral contacts 112 and 122 are compressed, the entire upper surface of the lower spiral contact 122 is not detached from the lower surface of the upper spiral contact 112, and stable electrical connection characteristics can be obtained. It is possible to realize a spiral contact having both electrical characteristics and excellent spring characteristics.

Further, the thickness of the lower spiral contact 122 is formed to be thinner than the thickness of the upper spiral contact 112.
Thus, by making the thickness of the spiral contact on the lower side of the spiral contact arranged in the upper and lower stages thinner than that of the upper spiral contact, the lower spiral contact However, since the cross-sectional stress is small, even when the upper and lower spiral contacts are compressed, the entire upper surface of the lower spiral contact follows the upper spiral contact without moving away from the lower surface, thereby providing stable electricity. Connection characteristics can be obtained, and a spiral contactor having both excellent electrical characteristics and excellent spring characteristics can be realized.

Also, a columnar protrusion (column) 112d is provided at the tip 112a located at the center of the upper spiral contact 112. This column 112d is at least one column provided upward at the position of the tip 112a of the upper spiral contact 112. The lower spiral contact 122 has no protrusion. Further, the spiral widths V (V1, V2) of the two spiral upper and lower spiral contacts 112, 122 are the same, and become wider as they approach the roots 112b, 122b from the tips 112a, 122a. The spiral portions 112c and 122c are provided from the roots 112b and 122b toward the tips 112a and 122a. The width V may be constant as it goes from the tips 112a and 122a to the roots 112b and 122b. Although the thickness T (T1, T2) is also constant, the thickness T (T1, T2) may be gradually increased from the tips 112a, 122a to the roots 112b, 122b.

In this double spiral two-stage spiral contactor 101, the upper spiral contact 112 has its roots 112b and 112b arranged at positions that are opposed to each other by 180 degrees, and is directed from the roots 112b and 112b toward the center of the spiral. The tip 112a which stands | starts up and merges mutually in the center of a spiral is provided. That is, the tip 112a is further twisted and rotated while being maintained at the center by the double spiral supported from the left and right. Similarly, the roots 122b and 122b of the lower spiral contact 122 are arranged at positions facing each other, and provided with tips 122a that rise from the roots 122b and 122b toward the center of the spiral and merge with each other at the center of the spiral. Yes. In this way, the double spiral spiral contacts 112, 122 are vertically stacked to form two stages, and the tips 112a, 122a are freed, and laser spot welding is used to at least one place from the bases 112b, 122b to the bases 112d, 122d. The effect similar to that of increasing the length of the spiral contactor was obtained by fixing. As a result, the two-stage spiral contactor 1 has the effect of increasing the spring constant and deepening the yield point. Therefore, it can be connected to connection terminals of various shapes, and the spiral contact disposed on the upper stage when the spiral contactor 101 contacts the connection terminal (not shown) and pushes down the spiral contactor 1 sequentially from the tip. When the tip 112a of the child 112 comes into contact with the connection terminal with a torsional motion and draws a minute circle, a spiral contact having both excellent electrical characteristics and excellent spring characteristics can be realized. .

12B, the width of the lower spiral contact 122 is narrower than the width of the upper spiral contact 112. As shown in FIG. By making the widths V2 and W2 of the spiral contacts 122 on the lower side of the spiral contacts 112 and 122 arranged in two upper and lower stages narrower than the widths V1 and W1 of the upper spiral contacts 112, the upper and lower Even when the spiral contacts 112 and 122 of the stage are compressed, the entire upper surface of the spiral contact 122 of the lower stage is not detached from the lower surface of the spiral contact 112 of the upper stage, and stable electrical connection characteristics can be obtained. Thus, it is possible to realize a spiral contactor having both excellent electrical characteristics and excellent spring characteristics.

Also, the thickness T2 of the lower spiral contact 122 is thinner than the thickness T1 of the upper spiral contact 112. Thus, by making the thickness T2 of the spiral contactor 122 on the lower side of the spiral contactor 101 arranged in two upper and lower stages thinner than the thickness T1 of the upper spiral contactor, the two upper and lower spiral contacts Even when the contactor 101 is compressed, the entire upper surface of the lower spiral contactor 122 follows the lower surface of the upper spiral contactor 112, and stable electrical connection characteristics can be obtained. It is possible to realize a spiral contact having both spring characteristics.

Next, a manufacturing method of the spiral contactor will be described.
FIG. 13 is a process diagram of the manufacturing method of the spiral contactor according to the sixth embodiment of the present invention, and shows the manufacturing process of the upper spiral contactor 112. As shown in FIG. 13, in the first step, a metal plate 114 is prepared, and at least one recess 114 a is formed on the surface of the metal plate 114 so as to come to the position of the tip of the spiral contact. Since the metal plate 114 is preferably a Cu foil, the metal plate 114 is hereinafter referred to as a Cu foil 114. The thickness of the Cu foil 114 is a foil shape, for example, 0.08 mm, but is not limited thereto.

In the second step (b), a photoresist 115 is applied to the surface of the Cu foil 114 or a dry film is applied. A photomask 116 having a spiral contact 112 pattern is applied from above, and exposure is performed by irradiating light from above the photomask 116.
The shape of the photomask 116 is a pattern in which the spiral contact 112 is blackened. Further, a method using a reverse black and white pattern may be used.
In the third step (c), the photoresist 115 is developed so as to form a pattern of the photomask 116.
In the fourth step (d), the exposed surface 114b of the Cu foil 14 is further subjected to metal plating 117 composed of Au plating 117b and Ni plating 117a from above to form the spiral contact 112. The metal plating 117 here is preferably a nickel alloy plating excellent in electrical conductivity. In addition, although nickel nickel alloy plating was used for metal plating, for example, it is not limited to this.

In the fifth step (e), the photoresist 115 is removed.
In the sixth step (f), a photoresist 115 is pasted or applied on the back surface of the Cu foil 114, and a photomask 116 'for opening a hole is covered, and this photomask 116' is irradiated with light to be exposed and developed. .
In the seventh step (g), a hole 114c is formed in the Cu foil 114 from the back surface of the Cu foil 114 by etching.
In the eighth step (h), the photoresist 115 on the back surface of the Cu foil 114 is removed.

FIG. 14 is a process chart of the manufacturing method according to the sixth embodiment of the present invention, and shows a process following the eighth process shown in FIG. As shown in FIG. 14, in the ninth step (i), annealing is performed in a state where the spiral center of the spiral contact 112 turned upside down is pushed up from one side by the convex tool 130 and deformed into a convex shape.
Specifically, the convex tool 130 is disposed below the spiral contact 112, and the forming is stabilized by annealing forming the spiral contact 112 being pushed up from below by the convex tool 130 and deformed into a convex shape. That is, the spiral contact 112 deformed into a convex shape is heated and annealed to be formed into a convex shape. In this annealing forming, for example, heating is performed at 250 ° C., annealing is performed, and internal stress is removed. Although the heating temperature is 250 ° C. here, it is assumed to include around 250 ° C., and is not limited to this.
In the tenth step (j), the annealing forming is completed and the convex tool 130 is removed.

FIG. 15 is a process diagram of the manufacturing method of the spiral contactor according to the sixth embodiment of the present invention, and shows the manufacturing process of the lower spiral contactor 122. As shown in FIG. 15, in the eleventh step (k), a metal plate 124 is prepared. The metal plate 124 is preferably a Cu foil, and is the same material as the metal plate 114 described above.

In the twelfth step (l), a photoresist 125 is applied to the surface of the Cu foil 124 or a dry film is applied. A photomask 126 having a spiral contact 122 pattern is applied from above, and exposure is performed by irradiating light from above the photomask 126.
The shape of the photomask 126 is a pattern in which the spiral contact 122 is blackened. Further, a method using a reverse black and white pattern may be used.
In the thirteenth step (m), the photoresist 125 is developed so as to form a pattern of the photomask 126.
In the fourteenth step (n), the exposed surface 124b of the Cu foil 124 is further subjected to metal plating 127 composed of Au plating 127b and Ni plating 127a from above to form the spiral contact 122. The metal plating 127 here is preferably a nickel alloy plating containing tungsten having a high spring property. In addition, although nickel nickel alloy plating was used for metal plating, for example, it is not limited to this.

In the fifteenth step (o), the photoresist 125 is removed.
In the sixteenth step (p), a photoresist 125 is pasted or applied on the back surface of the Cu foil 124, and a photomask 126 'for making a hole is covered, and the photomask 126' is irradiated with light to be exposed and developed. .
In the seventeenth step (q), a hole 124 c is formed in the Cu foil 124 by etching from the back surface of the Cu foil 124.
In the eighteenth step (r), the photoresist 125 on the back surface of the Cu foil 124 is removed.

FIG. 16 is a process diagram of the manufacturing method according to the present invention, and shows a process following the 18th process shown in FIG. As shown in FIG. 16, in the nineteenth step (s), annealing is performed in a state where the center of the spiral of the spiral contact 122 turned upside down is pushed up from one side by the convex tool 130 and deformed into a convex shape.
Specifically, the convex tool 130 is arranged below the spiral contact 122, and the forming is stabilized by annealing forming the spiral contact 122 pushed up from below by the convex tool 130 and deformed into a convex shape. That is, the spiral contact 122 deformed into a convex shape is heated and annealed to be formed into a convex shape. In this annealing forming, for example, heating is performed at 250 ° C., annealing is performed, and internal stress is removed. Although the heating temperature is 250 ° C. here, it is assumed to include around 250 ° C., and is not limited to this.
In the twentieth step (t), a mounting substrate 128 having a conductive land 128a is provided on the surface, a conductive paste (solder paste) 129 is applied to the upper surface of the land 128a, and a spiral contact is formed on the upper surface of the land 128a. The child 122 is positioned.

In the 21st step (u), the Cu foil 124 is removed by etching.
In the 22nd step (v), the spiral contact 112 is superposed on the spiral contact 122 in two upper and lower stages, the tip is made free, and the root is joined by laser spot welding. The spiral contact 122 is fixed to 128a, and the double spiral spiral contact 112 having a protrusion on the upper stage is overlapped on the lower spiral contact 122 having no protrusion. A spiral contactor 101 is formed.
Further, the double spiral is described with two spirals in parallel, but a triple spiral, a quadruple spiral, or a plurality of spirals may be used. The spiral can be manufactured by shifting the root position and the tip position equally.

<Seventh Embodiment>
FIG. 17 shows a triple spiral two-stage spiral contact for explaining the seventh embodiment of the present invention, and (a) is a plan view showing the triple spiral two-stage spiral contact; b) (c) and (d) are cross-sectional views taken along line FF shown in (a), and are cross-sectional views of a spiral contact of a triple-spiral type having a convex shape in a natural body. Two types of two-stage configurations are shown.
As shown in FIGS. 17 (a) and 17 (b), the spiral contacts 131 and 132 arranged in two upper and lower stages are convex spirals (spirals) in the natural body, but the root A, the root B, and the root The triple spiral spiral contacts 131 and 132 are formed in a spiral shape from the reference numeral 131b toward the center of the tip, arranged in a spiral shape with the tip ends 131a being parallel to each other, and joined together at the tip 131a. Are joined to at least one of base portions 131d and 132d from the bases 131b and 131b and stacked in two upper and lower stages to form a double spiral two-stage spiral contactor 101 ′. The spiral contactor 101 ′ is provided with a spiral contact 131 using a material having high electrical conductivity in the upper stage and a spiral contact 132 using a material having high spring characteristics in the lower stage. The core material forming the spiral contact 131 is a nickel (Ni) base material, and the upper and lower surfaces are plated with Au. The core material forming the spiral contact 132 is a nickel alloy (Ni alloy) blended with tungsten, and at least the upper surface is Au plated.

In the convex spiral contact 131 formed in a spiral shape from the root A, the root B, and the root C toward the tip center, and having a tip at the spiral center, the root A, the root B of the spiral contact 131, Three roots C are arranged at positions shifted by 120 ° from each other, the root A, the root B, the root C rises from the root C toward the center of the spiral, the center is the same, and the three are arranged in a spiral shape. The spiral contact 131 has a mirror-like flat surface 131aa obtained by mirror-treating the upper surface of the tip 131a of the triple spiral spiral contact 131 integrated with the tip. A hole 131aa (a depression or a through hole) is provided in the vicinity of a substantially circular center in the mirror-like flat surface 131aa disposed in the upper stage. Due to the hole 131aaa, the surface pressure is not dispersed and a large pressure is applied, and the radius to which the surface pressure is applied is large, so that the area in which the surface moves is increased and the metal-to-metal bonding is easily generated.

Further, as shown in FIG. 17C, a column 131ab may be provided on the upper surface of the tip 131aa, and at this time, the upper surface of the column 131ab is provided with a mirror-like flat surface 131aba that is mirror-finished. In addition, although the column 131ab used the cylinder and the prism, the column of other shapes may be sufficient as long as the upper surface is flat.
Thus, by making the shape of the column a cylinder, it is possible to efficiently join the joining surface of the joining partner, and it is possible to easily join even if the joining surface is narrow.
Further, as shown in FIG. 17D, a flat mirror-like flat surface 131aa may be provided.

<Eighth Embodiment>
FIG. 18 shows a two-stage spiral contactor for explaining an eighth embodiment of the present invention, wherein (a) is a plan view showing a spiral contact having a tip and a protrusion in the vicinity thereof; ) Is a cross-sectional view taken along line GG shown in FIG.
As shown in FIGS. 18 (a) and 18 (b), the spiral contactor 101 ″ arranged in two upper and lower stages is a convex spiral (spiral) in the natural body, but it goes from the root 133b to the center of the tip 133a. In the spiral contact 133 formed in a spiral shape and having a tip 133a at the center of the spiral, a groove 133d is provided at the center in the width direction of the spiral contact 133 along the longitudinal direction of the spiral contact 133. The contactors 133 and 134 are joined to at least one of the base parts 133d and 134d from the bases 133b and 134b and overlapped in two upper and lower stages to form a double spiral two-stage spiral contactor 101 ″.
A projection 133aa having a quadrangular pyramid shape is provided at the tip 133a located at the center thereof. The width of the spiral increases as it approaches the root 133b from the tip 133a, and a spiral portion 133c is provided from the root 133b toward the tip 133a. The width may be constant as it goes from the tip 133a to the root 133b. Although the thickness is also constant, the thickness may gradually increase from the tip to the base. The spiral contactor 101 ″ is provided with a spiral contact 133 using a material having a high electrical conductivity in the upper stage and a spiral contact 134 using a material having a high spring property in the lower stage. The core material forming the spiral contact 133 is a nickel (Ni) base material, and the upper and lower surfaces are plated with Au. The core material forming the spiral contactor 134 is a nickel alloy (Ni alloy) blended with tungsten, and at least the upper surface is Au plated. Note that the protrusion 133aa may not be provided.

Further, the length of the groove 133d is provided in a predetermined section from the root 133b of the spiral contact 133 to the tip 133a. The section can be set as appropriate.

Also, the length of the groove 133d of the spiral contact 133 can be fixed as follows. That is, the roots 133b and 133b of the two spiral contacts 133 and 133 are the same, and are formed in a spiral shape from the root 133b toward the center of the tip 133a, and have a tip 133a at the center of the spiral and have two spiral contacts. The child 133 may be formed in parallel with a space between each other, the space being referred to as a groove 133d, and the two spiral contacts 133 may be combined at the tip 133a.

<Other embodiments>
19A and 19B are schematic views of an interconnector to which the spiral contactor of the present invention is applied. FIG. 19A is an overall view, and FIG. 19B is an enlarged view of a portion indicated by D in the figure.
As shown in FIG. 19, it is used as an interconnector that electrically connects between substrates, between a device and a substrate, and can be applied to a spiral contactor having a good combination of excellent electrical characteristics and spring characteristics.

The common features of the spiral contactor manufacturing method will be described below. Since the metal plates 14 and 34 are preferably Cu foils, the metal plates 14 and 34 are hereinafter referred to as Cu foils 14 and 34. The thicknesses of the Cu foils 14 and 34 are foil-like, for example, 0.08 mm, but are not limited thereto. The metal plating here is preferably a nickel alloy plating excellent in electric conductivity. In addition, although nickel nickel alloy plating was used for metal plating, for example, it is not limited to this.
In this annealing forming, for example, heating is performed at 250 ° C., annealing is performed, and internal stress is removed. Although the heating temperature is 250 ° C. here, it is assumed to include around 250 ° C., and is not limited to this.
The shape of the photomask is a pattern in which the spiral contact portion is blackened. Further, a method using a reverse black and white pattern may be used.
Moreover, although the spiral contactor has at least a part of the base portion from the base as an integral structure, the tip portion may also have an integral structure by the same construction method. In this case, the spiral part between the base and at least a part of the base part and the tip part overlaps in a state of being in close contact or slightly separated.

It is used as an interconnector that electrically connects substrates, between devices and substrates, etc., and can be applied to spiral contactors that have a good combination of excellent electrical characteristics and spring characteristics.

Claims (14)

1. Convex shape formed in a spiral shape (11c, 2c) from the root (11b, 12b) toward the center of the tip (11a, 12a) and having the tip (11a, 12a) at the center of the spiral shape (11c, 12c) In the spiral contactor (1) in which the spiral contacts (11, 12) are superposed in two upper and lower stages,
   The spiral contactor (1) has a structure in which at least one portion from the base to the base (11d, 12d) of the upper spiral contact (11) and the lower spiral contact (12) is integrated. Spiral contactor (1) characterized by the above.
2. In the spiral contactor (1) which is arranged at the same position of the roots of the upper and lower spiral contactors (11, 12) and rises from the root toward the center of the spiral, the base ( The spiral contactor (1) according to claim 1, wherein at least one of 11d and 12d) has an integral structure.
3. The roots of the upper and lower two-stage spiral contacts (31, 32) are arranged at positions shifted from each other by 180 °, rise from the root toward the center of the spiral, and the centers are the same and run parallel to each other. In the double spiral spiral contactor (3) in which the two spiral contacts (31, 32) arranged in a spiral shape merge at the tip, the base (31d, 32d) of the base (31d, 32d) is integrated. The spiral contactor (3) according to claim 1, characterized in that at least one part has an integral structure.
4. The roots of the upper and lower two-stage spiral contacts (41, 42) are arranged at positions shifted from each other by 120 °, rise from the roots toward the center of the spiral, In the triple spiral spiral contactor (4) in which the three spiral contacts (41, 42) arranged in a spiral shape are joined together at the tip, and at least the base (41d, 42d) from the root. The spiral contactor (4) according to claim 1, characterized in that one place has an integral structure.
5. Two spiral contacts (51, 52) arranged in a spiral shape with the spiral roots of the upper and lower two-stage spiral contacts (51, 52) being arranged in parallel with each other at the tip. The spiral contactor (5) according to claim 1, wherein at least one part of the base part (51d, 52d) from the root has an integral structure in the joined and integrated spiral contactor (5). .
6. A spiral contactor (101) in which convex spiral contacts (112, 122) formed in a spiral shape from the base toward the center of the tip and having a tip at the center of the spiral are stacked in two upper and lower stages. The spiral contactor (101) is provided with a spiral contact (112) using a material having high electrical conductivity in the upper stage and a spiral contact (122) using a material having a high spring property in the lower stage. A spiral contactor (101) characterized by that.
7. The spiral contactor (101) according to claim 6, wherein a width of the lower spiral contact (122) is narrower than a width of the upper spiral contact (112).
8. The spiral contactor (101) according to claim 6, wherein the thickness of the lower spiral contact (122) is smaller than the thickness of the upper spiral contact (112).
9. The roots of the upper and lower two-stage spiral contacts (112, 122) are arranged at positions shifted from each other by 180 °, rise from the root toward the center of the spiral, and the centers are the same as each other. A double spiral spiral contactor (101) in which two spiral contacts (112, 122) arranged in a spiral shape join together at the tip end and at least one part of the base is vertically joined from the base. The spiral contactor (101) according to claim 6, wherein the spiral contactor (101) is superposed in two upper and lower stages.
10. The roots of the upper and lower two-stage spiral contacts (131, 132) are arranged at positions shifted from each other by 120 ° phase, rise from the root toward the center of the spiral, Three spiral contactors (101 '), in which the three spiral contacts arranged in a spiral shape merge at the tip and merge at the tip, are joined at the top and bottom at least at one location from the base. The spiral contactor (101 ') according to claim 6, wherein the spiral contactor (101') is superposed in two upper and lower stages.
11. In the spiral contactors (133, 134) in the two upper and lower stages, the two spiral contactors (133, 134) arranged in a spiral shape in parallel with each other with the roots of the spirals being the same. The spiral contact according to claim 6, wherein the spiral contactors (133, 134) joined and integrated together at the base are joined at the upper and lower portions at least one portion of the base portion and are superposed in two stages. Contactor (101 ″).
12. Spiral contactors (101, 101 ′, 101 ″) in which convex spiral contacts formed in a spiral shape from the root toward the center of the tip and having a tip at the center of the spiral are stacked in two upper and lower stages. The hole in the vicinity of the center is provided in the tip plane of the spiral contact disposed at least in the upper stage of the two upper and lower spiral contactors. Spiral contactors (101, 101 ′, 101 ″).
13. A first step (a) of preparing a metal plate;
    A first photoresist is applied or a dry film is applied to the surface of the metal plate made of Cu foil. A second step (b) of covering the first photomask having a spiral contact pattern from above and exposing the photomask by irradiating light from above;
    A third step (c) of developing the first photoresist so as to form a pattern of the first photomask;
    A fourth step (d) of forming a spiral contact by applying metal plating composed of rhodium Rh and Ni plating on the exposed surface of the Cu foil from above;
    A second photoresist is applied or a dry film is applied to the surface of the formed spiral contact. A fifth step (e) in which a second photomask having a pattern of an integral structure portion is covered from above and exposed by irradiating light from above the photomask;
    A sixth step (f) of irradiating the photomask with light, exposing and developing to remove the second photoresist,
    A seventh step (g) for applying Cu plating to the surface of the metal plating;
    An eighth step (h) of removing the second photoresist;
    A ninth step (i) of applying metal plating composed of Ni plating on the surface of Cu plating;
    It is turned upside down and a third photoresist is applied to the back surface of the metal plate or a dry film is applied. A tenth step (j) in which a third photomask having a pattern of holes for etching is applied from above, and exposure is performed by irradiating light from above the photomask; and
    An eleventh step (k) of irradiating the photomask with light, exposing and developing to remove the third photoresist;
    A twelfth step (l) of making a hole in the Cu foil by etching from the back side of the Cu foil;
    A thirteenth step (m) of removing the third photoresist on the back surface of the Cu foil;
    A 14th step (n) in which annealing forming is performed in a state in which the center of the spiral of the spiral contactor turned upside down is pushed up from one side with a convex tool and deformed into a convex shape;
    A fifteenth step (0) for applying an adhesive tape;
    A sixteenth step (p) of removing the Cu foil by etching;
    And a seventeenth step (q) in which spiral contacts in the form of being stacked one above the other are in close contact with each other at the bottom and top surfaces.
14. Step A (a) for preparing a metal plate;
    A first photoresist is applied or a dry film is applied to the surface of the metal plate made of Cu foil. A first step (b) in which a first photomask having a spiral contactor pattern is covered from above and exposed by irradiating light from above the photomask;
    A step C of developing the first photoresist so as to form a pattern of the first photomask; and
    Further, from the upper side, the exposed surface of the Cu foil is subjected to metal plating composed of rhodium Rh and Ni plating, and a D step (d) for forming a spiral contact,
    An E step (e) of removing the first photoresist;
    A second photoresist is applied or a dry film is applied to the surface of the formed spiral contact. An F-step (f) in which a second photomask having a pattern of a monolithic structure portion is covered from above and exposed by irradiating light from above the photomask;
    G step (g) of irradiating the photomask with light, exposing and developing to remove the second photoresist,
    Step H (h) for applying Cu plating to the removed surface;
    A first step (i) of removing the first photoresist;
    A third photoresist is applied or a dry film is applied to the surface of the Cu plating. Covering a third photomask having a spiral contact pattern from above, J-th step (j) for exposing by irradiating light from above the photomask;
    A K-th step (k) in which the third photomask is irradiated with light, exposed and developed to remove the third photoresist;
    Step L (l) for applying metal plating composed of Ni plating on the surface of Cu plating;
    It is turned upside down and a fourth photoresist is applied to the back surface of the metal plate or a dry film is applied. An Mth step (m) in which a fourth photomask having a pattern of holes for etching is covered from above, and exposure is performed by irradiating light from above the photomask; and
    An Nth step (n) of irradiating the fourth photomask with light, exposing and developing to remove the fourth photoresist;
    O-th step (o) for making a hole in the Cu foil by etching from the back side of the Cu foil;
    A P-th step (p) for removing the fourth photoresist on the back surface of the Cu foil;
    A Q-step (q) of annealing forming in a state where the spiral center of the spiral contact that is turned upside down is pushed up from one side with a convex tool and deformed into a convex shape;
    R-step (r) for applying an adhesive tape;
    Step S (s) for removing the Cu foil by etching;
    And a T-th step (t) in which spiral contacts in the form of being stacked one above the other are in close contact with each other at the bottom and top surfaces.

Images