WO2010113921A1 - 光変調器 - Google Patents
光変調器 Download PDFInfo
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- WO2010113921A1 WO2010113921A1 PCT/JP2010/055642 JP2010055642W WO2010113921A1 WO 2010113921 A1 WO2010113921 A1 WO 2010113921A1 JP 2010055642 W JP2010055642 W JP 2010055642W WO 2010113921 A1 WO2010113921 A1 WO 2010113921A1
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- waveguide
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- optical modulator
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/2935—Mach-Zehnder configuration, i.e. comprising separate splitting and combining means
- G02B6/29352—Mach-Zehnder configuration, i.e. comprising separate splitting and combining means in a light guide
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
- G02B6/2808—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using a mixing element which evenly distributes an input signal over a number of outputs
- G02B6/2813—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using a mixing element which evenly distributes an input signal over a number of outputs based on multimode interference effect, i.e. self-imaging
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/217—Multimode interference type
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
- G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
- G02F1/3136—Digital deflection, i.e. optical switching in an optical waveguide structure of interferometric switch type
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/31—Digital deflection, i.e. optical switching
- G02F1/313—Digital deflection, i.e. optical switching in an optical waveguide structure
- G02F1/3137—Digital deflection, i.e. optical switching in an optical waveguide structure with intersecting or branching waveguides, e.g. X-switches and Y-junctions
Definitions
- the present invention relates to an optical modulator, and more particularly to an optical modulator in which a Mach-Zehnder type waveguide is formed on the surface of a dielectric substrate.
- an optical waveguide element in which an optical waveguide is formed on the surface of a dielectric substrate is often used.
- an optical modulator in which a Mach-Zehnder type waveguide is formed to perform optical modulation such as optical intensity modulation is highly utilized due to advantages such as easy integration and high efficiency of optical modulation.
- an optical wave is applied to at least one arm (branch waveguide) of the MZ type waveguide and propagates through the arm.
- the phase is controlled.
- the LiNbO 3 substrate is prone to a so-called drift phenomenon in which the operating point of the modulation signal shifts due to temperature change, DC bias control over a long time, or the like. For this reason, as shown in Patent Documents 1 to 3, the output light from the optical modulator and the radiation mode light radiated from the Y-combining part of the MZ type waveguide are monitored, and the optical modulation is performed so that the proper operating point is obtained.
- the DC bias applied to the device is adjusted.
- the ideal Y-combining portion of the MZ-type waveguide has a gap between the branching waveguides of 0 at the crotch portion of the Y-combining portion where the two branching waveguides 1 are coupled.
- radiation mode light high-order mode light
- the output waveguide 3 between the region B and the region C.
- the gap G between the branched waveguides cannot be zero. This is because the minimum line width when forming the optical waveguide is finite. Under the influence of such a gap, at the place where the branching waveguide 1 is coupled (between the region A and the region B), a mode mismatch of the light wave occurs, and a part of the light wave propagating through the waveguide leaks. Mode mismatch light is generated.
- the mode mismatch light causes the optical characteristics of the optical modulator to deteriorate.
- the propagation loss increases, the extinction ratio deteriorates, and the mode mismatched light interferes with the radiation mode light, or the mode mismatched light itself is detected by the monitor means, so the radiation mode light cannot be detected accurately. This causes malfunctions.
- the line width of the optical waveguide is reduced from about 5 to 7 ⁇ m, which is normal (the thickness of the substrate is several hundred ⁇ m), to about 2 to 4 ⁇ m.
- the influence of the gap G at the wave portion becomes larger than that of the normal one, and the generation of mode mismatch light becomes more remarkable.
- Patent Document 4 The present applicant disclosed in Patent Document 4 that the Y-multiplexing portion of the MZ-type waveguide is formed by a 2 ⁇ 3 branch waveguide in order to separate the radiation mode light from the signal light.
- a part of the mode mismatched light generated when the two branching waveguides are coupled is recombined with the optical waveguide, and is converted into radiation mode light and output light. There was a problem of mixing.
- JP-A-5-53086 Japanese Patent Laid-Open No. 5-134220 JP 2001-281507 A JP 2006-301612 A
- the present invention solves the above-described problems, suppresses the generation of mode mismatched light in the Y-combining portion of the MZ-type waveguide, and mixing of the mode mismatched light into the radiation mode light and output light, and the radiation mode light. And an optical modulator capable of efficiently separating and extracting output light.
- an invention according to claim 1 is directed to an optical modulator in which a Mach-Zehnder type waveguide is formed on the surface of a dielectric substrate.
- the waveguide after the wave is a multi-mode waveguide, and an output sub-waveguide that is a waveguide for higher-order modes is connected to a location where the multi-mode waveguide is changed to an output-driven waveguide that becomes a single-mode waveguide.
- the multimode waveguide is characterized by having a length of 150 ⁇ m or more.
- the two output sub-waveguides are line-symmetric with respect to the output main waveguide and sandwiching the output main waveguide. It is characterized by being arranged in.
- the invention according to claim 3 is the optical modulator according to claim 1 or 2, wherein the width of each of the two branching waveguides coupled at the Y multiplexing section is narrower than the width of the output main waveguide, The width of the output sub-waveguide is characterized by being narrower than the width of the branch waveguide.
- the invention according to claim 4 is the optical modulator according to any one of claims 1 to 3, wherein the thickness of the dielectric substrate is 20 ⁇ m or less.
- the input is provided in the middle of the input waveguide to the Y branch portion on the incident side of the Mach-Zehnder type waveguide.
- a high-order mode waveguide branched from the waveguide is provided.
- the number of waveguides after the combination of the Y-combining portion on the output side of the Mach-Zehnder type waveguide is multiple. Since it is a mode waveguide and an output sub-waveguide, which is a waveguide for higher-order modes, is connected to a location where the multimode waveguide is changed to an output-driven waveguide that becomes a single-mode waveguide, two branched waveguides Since there is no mode change or leaking region (single mode waveguide) at the portion where the light is coupled, generation of mode mismatch light is suppressed.
- the multimode waveguide is 150 ⁇ m or more in length
- the mode mismatched light generated at the coupling portion of the two branch waveguides may be recombined with the output main waveguide or the output sub waveguide. Therefore, mode mismatched light is not mixed into the radiation mode light or the output light.
- the two output sub-waveguides are arranged so as to sandwich the output main waveguide and be symmetrical about the output main waveguide, the radiation mode light is output from the output main waveguide.
- the sub-waveguide can be stably derived.
- the width of each of the two branch waveguides coupled at the Y multiplexing portion is narrower than the width of the output main waveguide, and the width of the output sub-waveguide is smaller than the width of the branch waveguide. Because it is narrow, the mode diameter at the coupling part of the branching waveguide and the mode diameter of the output-driven waveguide that becomes a single-mode waveguide that outputs the light wave in the ON state can be substantially matched, and the output light is output to the output-driven waveguide. Can be efficiently derived from
- the thickness of the dielectric substrate is 20 ⁇ m or less, the influence of mode mismatched light appears remarkably, so suppression of mode mismatched light is essential. For this reason, by applying the configuration of the optical modulator of the present invention, the driving voltage for driving the optical modulator is reduced, and the speed mismatch between the driving signal and the propagating light is achieved, and the mode mismatched light is Can also be suppressed.
- the higher-order mode light generated in the part and propagating through the input waveguide can be removed by the higher-order mode waveguide, so that the light wave branching ratio in the Y-branch part can be made closer to 1: 1. It becomes.
- the branching ratio is not 1: 1, a high-order mode unrelated to modulation occurs in the Y multiplexing unit. This unnecessary light is mixed into the output main waveguide and the output sub-waveguide, and the characteristics such as the extinction ratio deteriorate.
- FIG. 2 is a diagram showing a waveguide shape in the vicinity of the Y multiplexing section used in the optical modulator of the present invention.
- the present invention is characterized in that, in an optical modulator in which a Mach-Zehnder type waveguide is formed on the surface of a dielectric substrate, the waveguide 2 after multiplexing of the Y-combining portion on the output side of the Mach-Zehnder type waveguide is a multimode.
- the sub waveguide (4) is connected.
- Reference numeral 1 denotes an arm of the MZ-type waveguide, and shows two branching waveguides coupled at the Y multiplexing section.
- the light intensity Pc of the output light of the optical modulator and the light intensity P ⁇ of the radiation mode light are ⁇ as the phase difference between the arms of the MZ type waveguide, and ⁇ as the phase difference between the fundamental mode and the higher order mode at the coupler unit.
- the ratio of the fundamental mode light leaking to the output sub-waveguides on both sides is e 2
- the conventional light intensity does not apply to the equation shown in Equation 1 because the mode mismatched light at the Y multiplexing section recombines with the output sub-waveguide, which is a waveguide for higher-order modes, as described above.
- values close to these equations can be obtained.
- the multimode waveguide since there is no mode change or leakage region (single mode waveguide) at the portion where the two branched waveguides are coupled (Y multiplexing portion), mode mismatched light is generated (outside the waveguide). Leakage). Furthermore, since the multimode waveguide has a length of 150 ⁇ m or more, the generated mode mismatched light is also prevented from recombining with the output main waveguide and the output sub-waveguide, and the mode is applied to the radiation mode light and the output light. Mismatched light is not mixed. Furthermore, the shape of the multimode waveguide according to the present invention is such that the change in the width of the multimode waveguide is extremely gradual, such as the width of the multimode waveguide is substantially constant or increases gradually over 150 ⁇ m. . On the other hand, as shown in FIG. 3A, a waveguide that easily leaks light, such as changing to a single mode waveguide, is not preferable as the shape of the multimode waveguide of the present invention.
- FIGS. 3A and 3B a trial calculation (simulation) was performed for two types of waveguide shapes in the vicinity of the Y multiplexing portion.
- FIG. 5 shows the maximum light intensity (when the MZ type modulator is in the OFF state) in the output sub-waveguide (waveguide for deriving radiation mode light), which is a waveguide for higher-order modes, with respect to the change in the coupling length L. Change in output light intensity).
- the output sub-waveguide waveguide for deriving radiation mode light
- FIGS. 3 (a) and 3 (b) show a clear difference between FIGS. 3 (a) and 3 (b).
- a stable light quantity can be obtained by using a multimode waveguide as the coupling portion. If the wavelength of the propagating light wave becomes shorter, even if the coupling length L of the coupling portion is constant, the coupling length will feel longer for the light wave. For this reason, in the structure of FIG.
- the light intensity change generally increases as the wavelength of the light wave becomes shorter, and so-called light intensity change having a large wavelength dependency is shown.
- FIG. 3B it is easily understood that the wavelength dependence can be suppressed because the light intensity change is small.
- the shape of the waveguide in the vicinity of the Y multiplexing portion is the shape shown in FIG. 3B, and the gap (gap) when the two branched waveguides are coupled is 0 ⁇ m (ideal value) and 0.8 ⁇ m ( The maximum light intensity output from the output sub-waveguide was calculated and compared. The result is shown in FIG.
- the gap when the gap is 0 ⁇ m, it does not change even if the length L of the coupling portion is changed. However, when the gap is 0.8 ⁇ m, the output sub-waveguide becomes longer as the coupling portion becomes longer. It can be seen that the maximum intensity output from decreases. This is because, when the gap is set to 0.8 ⁇ m, the refractive index distribution changes between the MZ arm (branch waveguide) and the waveguide portion of the coupling portion, so that mode mismatch light is generated.
- the mode mismatched light recombines with the output sub-waveguide, and thus shows a light intensity as high as the ideal state.
- the coupling length L is 150 ⁇ m or more
- the mode The probability that the mismatched light recombines with the output sub-waveguide is reduced, and the maximum intensity decreases as the waveguide length of the coupling portion increases.
- the length L of the coupled waveguide portion needs to be 150 ⁇ m or more. Is understood.
- the two output sub-waveguides 4 are arranged so as to be line-symmetric with respect to the output main waveguide 3 with the output main waveguide 3 interposed therebetween. It is preferable to do this. As a result, it is possible to separate and derive radiation mode light, which is higher-order mode light, from signal output light with good reproducibility.
- the width w1 of each of the two branch waveguides coupled at the Y multiplexing section shown in FIG. 3B is narrower than the width w5 of the output main waveguide, and the output sub-waveguide Since the width w6 is narrower than the width w1 of the branching waveguide, the mode diameter at the coupling portion of the branching waveguide and the mode diameter of the output main waveguide serving as a single mode waveguide from which the ON-state light wave is output are obtained. Can be almost matched. Thereby, output light can be efficiently derived from the output main waveguide 3.
- the dielectric substrate used in the optical modulator of the present invention is preferably a substrate having an electro-optic effect, for example, lithium niobate, lithium tantalate, PLZT (lead lanthanum zirconate titanate), and quartz-based substrates. It is composed of materials, specifically, these single crystal materials are composed of an X-cut plate, a Y-cut plate, and a Z-cut plate, and in particular, it is easy to be configured as an optical waveguide device and has a large anisotropy. Therefore, it is preferable to use lithium niobate (LN). Furthermore, the present invention can be suitably applied to a dielectric substrate having a thickness of 20 ⁇ m or less. Even if mode mismatched light is easily confined in a thin plate, the present invention can be applied to suppress the generation of mode mismatched light. Therefore, it is effective to mix mode mismatched light into radiation mode light and output light. This is because it is suppressed.
- the optical waveguide can be formed on the substrate by diffusing titanium (Ti) or the like on the substrate surface by a thermal diffusion method, a proton exchange method, or the like.
- Ti titanium
- a thermal diffusion method a proton exchange method
- the above-described method using Ti or the like and a ridge structure can be used in combination.
- the optical modulator of the present invention branches from the input waveguide 5 in the middle of the input waveguide 5 up to the Y branching section 6 on the incident side of the Mach-Zehnder type waveguide.
- a high-order mode waveguide 7 is preferably provided.
- the generation of mode mismatched light in the Y multiplexing section of the MZ type waveguide and the mixing of mode mismatched light into the radiation mode light and output light are suppressed, and the radiation mode
- An optical modulator capable of efficiently separating and extracting light and output light can be provided.
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Abstract
Description
図2は、本発明の光変調器に利用されるY合波部近傍の導波路形状を示す図である。
本発明の特徴は、誘電体基板の表面にマッハツェンダー型導波路を形成した光変調器において、該マッハツェンダー型導波路の出射側のY合波部の合波後の導波路2がマルチモード導波路であり、該マルチモード導波路(2)をシングルモード導波路となる出力主導波路(3)に変更する箇所(領域Bと領域Cとの境目)に高次モード用導波路である出力副導波路(4)を接続していることを特徴とする。符号1は、MZ型導波路のアームであり、Y合波部で結合する2つの分岐導波路を示している。
2 結合導波路
3 出力導波路
4 出力副導波路
Claims (5)
- 誘電体基板の表面にマッハツェンダー型導波路を形成した光変調器において、
該マッハツェンダー型導波路の出射側のY合波部の合波後の導波路がマルチモード導波路であり、
該マルチモード導波路をシングルモード導波路となる出力主導波路に変更する箇所に高次モード用導波路である出力副導波路を接続し、
該マルチモード導波路は、長さが150μm以上であることを特徴とする光変調器。 - 請求項1に記載の光変調器において、2本の該出力副導波路が、該出力主導波路を挟み、かつ、該出力主導波路を中心に線対称となるように配置されていることを特徴とする光変調器。
- 請求項1又は2に記載の光変調器において、該Y合波部で結合する2つの分岐導波路の各々の幅は、該出力主導波路の幅より狭く、該出力副導波路の幅は、該分岐導波路の幅よりも狭いことを特徴とする光変調器。
- 請求項1乃至3のいずれかに記載の光変調器において、該誘電体基板の厚みは、20μm以下であることを特徴とする光変調器。
- 請求項1乃至4のいずれかに記載の光変調器において、該マッハツェンダー型導波路の入射側のY分岐部に至るまでの入力導波路の途中に、該入力導波路から分岐する高次モード用導波路を設けることを特徴とする光変調器。
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US13/138,809 US9329340B2 (en) | 2009-03-31 | 2010-03-30 | Optical modulator |
CN201080007026.9A CN102308246B (zh) | 2009-03-31 | 2010-03-30 | 光调制器 |
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JP2009084344A JP4745415B2 (ja) | 2009-03-31 | 2009-03-31 | 光変調器 |
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JP (1) | JP4745415B2 (ja) |
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CN103189783A (zh) * | 2010-10-25 | 2013-07-03 | 住友大阪水泥股份有限公司 | 光控制元件 |
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JPWO2010082673A1 (ja) * | 2009-01-16 | 2012-07-12 | 日本碍子株式会社 | 分岐型光導波路、光導波路基板および光変調器 |
JP4745415B2 (ja) | 2009-03-31 | 2011-08-10 | 住友大阪セメント株式会社 | 光変調器 |
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US9329340B2 (en) | 2016-05-03 |
US20120027337A1 (en) | 2012-02-02 |
CN102308246B (zh) | 2015-06-17 |
JP4745415B2 (ja) | 2011-08-10 |
CN102308246A (zh) | 2012-01-04 |
JP2010237376A (ja) | 2010-10-21 |
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