WO2010095215A1 - Appareil de transfert de pièces et procédé de collage sous vide - Google Patents

Appareil de transfert de pièces et procédé de collage sous vide Download PDF

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Publication number
WO2010095215A1
WO2010095215A1 PCT/JP2009/052701 JP2009052701W WO2010095215A1 WO 2010095215 A1 WO2010095215 A1 WO 2010095215A1 JP 2009052701 W JP2009052701 W JP 2009052701W WO 2010095215 A1 WO2010095215 A1 WO 2010095215A1
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WO
WIPO (PCT)
Prior art keywords
work
flexible sheet
plate
works
vacuum
Prior art date
Application number
PCT/JP2009/052701
Other languages
English (en)
Japanese (ja)
Inventor
道也 横田
豊 今川
Original Assignee
信越エンジニアリング株式会社
新光エンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 信越エンジニアリング株式会社, 新光エンジニアリング株式会社 filed Critical 信越エンジニアリング株式会社
Priority to JP2009519079A priority Critical patent/JP4417432B1/ja
Priority to PCT/JP2009/052701 priority patent/WO2010095215A1/fr
Publication of WO2010095215A1 publication Critical patent/WO2010095215A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Definitions

  • the present invention relates to, for example, glass substrates used for flat panel displays (FPD) such as liquid crystal displays (LCDs), organic EL displays (OLEDs), plasma displays (PDPs), flexible displays, etc., or polarized light adhered to the surfaces thereof.
  • FPD flat panel displays
  • LCDs liquid crystal displays
  • OLEDs organic EL displays
  • PDPs plasma displays
  • a flexible thin plate is stretched and fixed so as to close the opening of a pair of upper and lower surface plates, and a sealed space is formed between these thin plates.
  • the pair of flexible thin plates sandwiching the pair of glass substrates which has been previously aligned and temporarily fixed, is held by the pair of flexible thin plates so that the glass substrates are held in the sealed space, and the reduced pressure in the sealed space Atmospheric pressure acts to pressurize the glass substrate, and heat is generated by energization of a heating element provided on the flexible thin plate to heat, pressurize and cure the sealing material interposed between the glass substrates.
  • Patent Document 1 There is one (see, for example, Patent Document 1).
  • a glass substrate carried by two glass substrates is carried toward the substrate holding surface of the surface plate by the substrate transfer robot, and a plurality of lift pins are provided so as to move up and down through the surface plate.
  • a plurality of lift pins are provided so as to move up and down through the surface plate.
  • An object of the present invention is to easily transfer a plate-like work with a work conveying means only by partial bending of a flexible sheet.
  • the present invention provides a flexible sheet provided on a work holding table, a pressing means for partially pressing a part of the flexible sheet against a plate-like work, and the pressing means.
  • a control unit for controlling the operation of the unit, the control unit pressing the flexible sheet by the pressing unit to partially bend the flexible sheet, and the partial curved portion is conveyed by the work conveying unit; It is characterized in that it reaches the work.
  • the tip of the pressing means is formed to be curved so as to protrude toward the flexible sheet.
  • a backing plate is partially fixed to a portion of the flexible sheet facing the pressing means.
  • an air vent is pierced through the flexible sheet and the backing plate.
  • the work transfer device described above is disposed in a vacuum chamber, and the two plate-like works are transferred by the work transfer means into the vacuum chamber, and two spaces are formed by sandwiching the flexible sheet. According to the present invention, after the plate-like workpieces are bonded in a vacuum state due to the pressure difference, the plate-like workpieces bonded together are transported to the outside of the vacuum chamber by the workpiece transport means.
  • a pressing means for partially pressing a portion of a flexible sheet provided on a work holding table toward a plate-like work, and a flexible sheet being pressed by the pressing means
  • the partially curved portion of the flexible sheet abuts, is supported, and can be received, and when carrying out the work, both plate-like works bonded together are pushed by the partially curved portion to the work unloading start position of the work conveying means Can be delivered.
  • the delivery of the plate-like work with the work conveying means can be easily performed only by the partial bending of the flexible sheet.
  • the plate-like work can be carried in and out reliably with respect to the flexible sheet, and the plate-like work is assuredly performed.
  • the manufacturing cost can also be reduced because a complicated mechanism for clamping is not required.
  • the distal end of the pressing means when the distal end of the pressing means is curved to protrude toward the flexible sheet, when the curved distal end of the pressing means abuts on the flexible sheet, the curve of the distal end Curve along the surface. Therefore, the flexible sheet can be reliably elastically deformed without being broken by the contact of the pressing means.
  • the tip of the pressing means abuts the flexible sheet via the backing plate, and the flexible sheet Makes an euphemism. Therefore, the flexible sheet can be reliably elastically deformed without being broken by the contact of the pressing means.
  • the vent opened in the flexible sheet is not expanded with the elastic deformation of the flexible sheet.
  • only the plate-like work in contact with the plate-like work or the two plate-like works bonded to each other through the air holes are adsorbed and held immovably against the flexible sheet 2. Therefore, positional deviation of the plate-like work relative to the flexible sheet can be prevented.
  • a work transfer device is disposed in a vacuum chamber, and the two plate-like works are transferred by the work transfer means into the vacuum chamber, and two spaces formed by sandwiching the flexible sheet.
  • the work transfer means When the both plate-like works bonded together are transported to the outside of the vacuum chamber by the work transfer means after bonding the plate-like works together in a vacuum state due to the pressure difference, the work is carried out when the work is carried in
  • the partial curved portion of the flexible sheet abuts on and is supported and can be received by one of the two plate-like workpieces carried in by the conveying means, and the two plate-like workpieces bonded together when carrying out the workpiece are
  • the partial folding portion can be pushed and delivered to the workpiece unloading start position by the workpiece transport means and can be delivered.
  • the delivery of the plate-like work with the work conveying means can be easily performed only by the partial bending of the flexible sheet.
  • the plate-like work can be carried in and out reliably with respect to the flexible sheet, and the plate-like work is assuredly performed.
  • the manufacturing cost can also be reduced because a complicated mechanism for clamping is not required.
  • FIG. 2 is a cross-sectional plan view taken along line (2)-(2) of FIG. 1 (b). It is a partial expansion longitudinal cross-sectional front view which shows an example of a press means. It is a vertical front view which shows the time of thermocompression bonding. It is a vertical front view showing the vacuum chamber before opening. It is a vertical front view which shows the vacuum chamber after opening. It is a longitudinal front view which shows the time of workpiece removal.
  • the embodiment of the work transfer apparatus comprises a flexible sheet provided on a work holding table, a pressing means for partially pressing a part of the flexible sheet against a plate-like work, and the pressing means. And a control unit for controlling the operation, the control unit pressing the flexible sheet by the pressing unit to partially bend the flexible sheet, and the plate-like workpiece having the partially curved section conveyed by the work conveying unit To reach the
  • the embodiment of the vacuum bonding method using this work transfer apparatus is, as shown in FIGS. 1 to 9, a smooth member 1 and a flexible sheet 2 whose opposing surfaces are smooth and arranged in parallel, and these smooth members 1 And a work conveying means 3 for conveying two plate-like works A and B between the flexible sheets 2, and the work conveyance means 3 carries the sheet between the smooth member 1 and the flexible sheet 2 from the outside.
  • the two plate-like works A and B are pressed together in a vacuum state by the pressure difference between the two first spaces S1 and second spaces S2 formed with the flexible sheet 2 interposed therebetween, and
  • the two plate-like works A and B bonded together are carried out by the work conveying means 3 from between the smooth member 1 and the flexible sheet 2 to the outside.
  • the second space S2 formed behind the flexible sheet 2 is provided with pressing means 4 for partially pressing the part of the flexible sheet 2 toward the plate-like works A and B.
  • the flexible sheet 2 is partially bent toward the plate-like works A and B by controlling operation of the pressing means 4 by the control unit 6 described later, and the partial bent portion 2 b is conveyed by the work conveying means 3.
  • both the plate-like works A and B bonded together are pushed to the work unloading start position by the work conveying means 3 by the partial bending portion 2b.
  • the smooth member 1 is formed in a flat plate shape of a rigid material or formed in a sheet shape of an elastic material.
  • the flexible sheet 2 is formed in a sheet shape, for example, of an elastic material excellent in heat resistance such as fluorine rubber or silicon rubber.
  • the backing plate 2c is partially fixed to the portion of the work facing portion 2a of the flexible sheet 2 facing the tip end 4a of the pressing means 4 as necessary, thereby the tip end 4a of the pressing means 4 It is preferable to increase the strength of the portion where the contact is made to make it difficult to break.
  • the smooth member 1 and the flexible sheet 2 are assembled in an openable and closable chamber, and are formed behind the flexible sheet 2 opposite to the internal pressure of the first space S1 in which the smooth member 1 is disposed.
  • the internal pressure of the second space S2 is adjustable.
  • the openable and closable chambers are a pair of vacuum chambers 5a and 5b provided so as to be able to open and close in directions to approach or separate from each other, and the smooth member 1 is disposed inside one of the vacuum chambers 5a.
  • the flexible sheet 2 is disposed so as to cover the opening of the other vacuum chamber 5b, and an annular seal 5c such as an O-ring is provided between the opening edges of the vacuum chambers 5a and 5b, At the time of the closing movement, a region surrounded by the flexible sheet 2 and one of the vacuum chambers 5a is preferably the first space S1.
  • air passages 5d, 5e communicating with the outside of the vacuum chambers 5a, 5b are opened, and pressure adjusting portions 5f are provided for taking out gas in and out of them.
  • Ambient air pressure by suctioning air from the spaces S1 and S2 to the outside of the vacuum chambers 5a and 5b to a predetermined vacuum state and supplying air to the spaces S1 and S2 from the outside of the vacuum chambers 5a and 5b). It is preferable to return to the same state as atmospheric pressure).
  • the work transfer means 3 comprises, for example, a transfer robot, and is preferably provided with a transfer hand 3a for scooping up and holding the bottom surfaces of the two plate-like works A and B, that is, the bottom of the plate-like work B located below. .
  • a specific example of the pressing means 4 includes a tip portion 4a in contact with the flexible sheet 2 and a drive source 4b for reciprocating the plate, and the tip portion 4a is a plate conveyed by the work conveying means 3 It arrange
  • the tip portion 4 a is curved in a circular arc shape so as to protrude toward the flexible sheet 2 so that when the tip portion 4 a abuts on the flexible sheet 2, the curved surface thereof It is preferable to make the hole difficult to open at this contact point by bending along the
  • a control unit 6 to be described later is electrically connected to the drive source 4 b of the pressing means 4, and the operation control is performed based on the control unit 6 so that the flexible sheet 2 is not pressed by the leading end 4 a
  • the standby position which is arranged to be smooth, and the tip 4a are most moved toward the flexible sheet 2, and the workpiece facing part 2a of the flexible sheet 2 is partially pressed and elastically deformed It reciprocates over the operation position arranged to reach the plate-like works A and B conveyed by the conveying means 3.
  • the control unit 6 includes not only the drive source 4b of the pressing means 4 but also the drive source (not shown) of the work transfer means 3 described above, the pressure adjustment section 5f connected by piping to the air passages 5d and 5f, and the vacuum chamber 5a, It is also electrically connected to the drive source 5g for opening and closing 5b, etc., and the two plates are formed immediately after the plate-like works A and B are carried in by the work transfer means 3 and by the pressure difference between the first space S1 and the second space S2.
  • the tip 4a of the pressing means 4 is moved from the standby position to the operating position only immediately after the workpieces A and B are attached to each other, and after delivery of the workpiece with the workpiece conveying means 3, the reverse position is returned from the operating position to return to the standby position. It is like that.
  • embodiments of the present invention will be described based on the drawings.
  • the vacuum bonding method using the work transfer apparatus is characterized in that the flat plate made of a rigid material as the smooth member 1 is placed above the vacuum
  • the flexible sheet 2 is disposed so as to cover the opening of the vacuum chamber 5b disposed inside the chamber 5a and disposed below, and when the upper and lower vacuum chambers 5a and 5b are opened, the plate-like work A, A vacuum laminate in which a sealing material C interposed therebetween is heated and cured while pressurizing both of them by carrying in a pair of glass substrates previously aligned and temporarily fixed as B. It shows the case of use in the device.
  • the surface plate 1 is provided with a heating element 7, and the heating element 8 is disposed behind the flexible sheet 2 as well.
  • the operation control is performed by the control unit 6, and the upper and lower vacuum chambers 5a and 5b are closed after loading of the plate-like works A and B, and the internal pressure of the second space S2 formed behind the flexible sheet 2 is loaded.
  • the heating elements 7 and 8 are caused to generate heat substantially simultaneously with raising the internal pressure of the first space S1 in which the two plate-like works A and B are placed, and the smooth surface 1a below the platen 1 and The temperature of the flexible sheet 2 is raised to the curing temperature of the sealing material C.
  • the flexible sheet 2 is formed in a rectangular shape, and a frame 2 d formed in a frame shape, for example, of metal or the like is integrally fixed to the outer periphery thereof.
  • the entire flexible sheet 2 is stretched by connecting 2 d to the opening edge of the lower vacuum chamber 5 b, and an annular seal 5 c such as an O-ring is disposed on the upper surface of the frame 2 d.
  • an annular seal 5 c such as an O-ring is disposed on the upper surface of the frame 2 d.
  • the outer peripheral edge of the flexible sheet 2 made of an elastic material is connected to the opening edge of the lower vacuum chamber 5b without providing the frame 2c, or the annular seal portion 5c is connected to the upper vacuum chamber 5a. It is also possible to arrange so that it can not drop out with respect to the opening edge of.
  • the tip portions 4a of the pressing means 4 are formed so as to extend near substantially the entire length of one side of the plate-like works A and B, and a plurality of tip portions 4a are arranged at appropriate intervals in the direction of the other side.
  • a support portion 4c formed in, for example, a plate shape or a rod shape is continuously provided at the tip end portion 4a of the pressing means 4, and the support portion 4c It is vertically movably supported through the hole 8a and vertically penetrates the bottom wall of the lower vacuum chamber 5b so as to protrude outward in an airtight manner, and the drive source 4b is disposed around the periphery.
  • the tip 4a of the pressing means 4 is formed in a semicircular cross-section that is much larger than the width dimension of the support 4c, and the case where the support 4c and the drive source 4b are rodless cylinders is assumed. Although shown, it is also possible to use drive sources 4b of other structures.
  • a backing plate 2c formed in a sheet shape with a rigid material or an elastic material is fixed on the back surface of the work-facing portion 2a of the flexible sheet 2 facing the tip portion 4a of the pressing means 4 to increase strength. ing.
  • the distal end portion 4a of the pressing means 4 is not curved in a circular arc shape in cross section, and the substantially smooth distal end surface is abutted against the backing plate 2c or the backing plate 2c is not provided. It is also possible to strike directly on the back of the
  • the plate-like works A and B are supported by the apexes of the partial curved portions 2b, and a gap is formed between the portion excluding the partial curved portion 2b of the flexible sheet 2 and the lower plate-like work B. Even if S3 is empty, the plate-like works A and B do not fall even if the hand 3a of the work transfer means 3 is removed.
  • each pressing means 4 starts to descend, and while maintaining the support state of the lower plate-like work B, each partial curved portion 2b is gradually eliminated, as shown in FIG. 1 (b)
  • the entire flexible sheet 2 returns to be smooth.
  • the sheet-like works A and B are received from the work conveying means 3 onto the flexible sheet 2 only by the partial bending of the flexible sheet 2, and the loading process is completed.
  • the pressure adjustment unit 5f is activated, and suction is started from the second space S2 already formed behind the flexible sheet 2 through the air passage 5e, and the plate-like work A,
  • the approaching movement of the upper and lower vacuum chambers 5a and 5b is started by the opening / closing driving source 5g.
  • the pressure adjusting portion 5f arranges the surface plate of the smoothing member 1 Suction is started from one space S1 through the air passage 5d, and a predetermined degree of vacuum is achieved, and the heating element 7 provided on the surface plate of the smooth member 1 and the back of the flexible sheet 2 are disposed.
  • the heating element 8 is heated.
  • the first space S1 is opened to the atmosphere by the pressure adjusting unit 5f, and suction deformation is released from the second space S2 to release the expansion deformation of the flexible sheet 2 Meanwhile, the separation movement of the upper and lower vacuum chambers 5a and 5b is started.
  • the vacuum laminating method of the present invention is replaced with the vacuum laminating apparatus, and the surface plate of the smooth member 1 and the flexible sheet 2 are used.
  • Work holding means (not shown) for detachably holding the two plate-like works A and B carried in by the work conveying means 3 are provided, and the plate-like works A and B held by these are mutually
  • the configuration used for a vacuum substrate bonding apparatus such as a liquid crystal display, etc., which is aligned and pressed to a predetermined gap between them, is different from that of the first embodiment shown in FIGS. Is the same as that of the first embodiment shown in FIGS.
  • one or both of the upper and lower vacuum chambers 5a and 5b are disposed movably in the horizontal (XY ⁇ ) direction, and the upper plate-like work A is held on the lower smooth surface 1a of the smooth member 1, After holding the lower plate-like work B on the flexible sheet 2, after the first space S1 around it reaches a predetermined degree of vacuum, the upper and lower vacuum chambers 5a, 5b are relatively adjusted and moved in the XY ⁇ direction. Thereby, rough alignment and fine alignment are sequentially performed as alignment between the plate-like works A and B.
  • the plate-like work A at the upper side is peeled off from the lower smooth surface 1 a of the smooth member 1 and stacked on the lower plate-like work B via the sealing material C in vacuum, and these are accommodated
  • the pressure difference between the both plate-like works A and B is pressed to a predetermined gap by the pressure difference generated inside and outside the both plate-like works A and B, and the sealing material C is It cures and adheres.
  • the lower plate-like work B carried in from the outside by the work conveying means 3 is transferred to the flexible sheet 2 as described above.
  • a plurality of portions of the work facing portion 2a of the flexible sheet 2 are partially bent by the operation control of the pressing unit 4 by the control unit 6, and the vertexes of the partially curved portions 2b are downward
  • the portion of the flexible sheet 2 is formed by projecting toward, abutting, and supporting the plate-like workpiece B and gradually eliminating the partially curved portion 2b while maintaining this supported state. It is possible to receive the lower plate-like work B from the work transfer means 3 on the flexible sheet 2 only by bending and complete the loading process.
  • an electrostatic chuck a suction chuck, an adhesive chuck, a combination thereof, or the like is used.
  • a suction chuck is provided on the workpiece facing portion 2a of the flexible sheet 2, for example, as shown in FIG. 9, the backing plate 2c is fixed to the location where the suction chuck is disposed.
  • vent hole 2e is pierced through the workpiece facing portion 2a and the backing plate 2c, and the vacuum passage 2f is piped to the vent hole 2e, whereby the vent hole 2e opened in the flexible sheet 2 is
  • the flexible sheet 2 is prevented from spreading along with the elastic deformation, and the plate-like work B or the two plate-like works A and B bonded together move relative to the flexible sheet 2 through the air holes 2e. It is preferable to be able to be incapable of being adsorbed and held.
  • vacuum substrate bonding apparatuses such as a vacuum laminating apparatus and a liquid crystal display
  • a vacuum bonding method which used the workpiece conveyance apparatus of this invention in the above-mentioned Example
  • Other apparatuses may be used as long as the two plate-like works A and B are vacuum bonded using the flexible sheet 2.
  • the tip 4a in contact with the flexible sheet 2 is reciprocated as a specific example of the pressing means 4, the present invention is not limited to this, for example, using a fluid such as compressed air, the flexible sheet 2 It is possible to press a part of the part to partially bend it.

Abstract

L'invention concerne un appareil de transfert de pièces au moyen duquel une pièce en panneau est facilement transférée vers et depuis un moyen de transfert de pièces, uniquement en faisant partiellement coulisser et fléchir une feuille souple. L'appareil de transfert de pièces est muni d'un moyen (4) de pression qui plaque une partie d'une feuille souple (2) placée sur une table (5b, 8) porte-pièces en direction de pièces (A, B) en panneaux, et d'un moyen (6) de commande qui commande le fonctionnement de telle sorte que la feuille souple (2) soit pressée par le moyen (4) de pression de façon à coulisser et à fléchir partiellement, et qu'une partie (2b) ayant coulissé et fléchi atteigne les pièces (A, B) en panneaux transférées par le moyen (3) de transfert de pièces. Ainsi, au moment de l'introduction de la pièce, la partie (2b) ayant partiellement coulissé et fléchi de la feuille souple (2) prend appui contre au moins la pièce (B) en panneau introduite par le moyen (3) de transfert de pièces, ce qui permet aux pièces en panneaux d'être reçues. Au moment de l'extraction de la pièce, des pièces (A, B) en panneaux collées sont poussées et transférées vers une position de départ d'extraction de pièces du moyen (3) de transfert de pièces au moyen de la partie (2b) ayant partiellement coulissé et fléchi, ce qui permet aux pièces en panneaux d'être extraites.
PCT/JP2009/052701 2009-02-17 2009-02-17 Appareil de transfert de pièces et procédé de collage sous vide WO2010095215A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009519079A JP4417432B1 (ja) 2009-02-17 2009-02-17 ワーク搬送装置及び真空貼り合わせ方法
PCT/JP2009/052701 WO2010095215A1 (fr) 2009-02-17 2009-02-17 Appareil de transfert de pièces et procédé de collage sous vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2009/052701 WO2010095215A1 (fr) 2009-02-17 2009-02-17 Appareil de transfert de pièces et procédé de collage sous vide

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WO2010095215A1 true WO2010095215A1 (fr) 2010-08-26

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WO (1) WO2010095215A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103715125A (zh) * 2012-09-28 2014-04-09 株式会社日立高新技术 板状体保持机构、基板贴合装置以及基板贴合方法
JP2016212277A (ja) * 2015-05-11 2016-12-15 株式会社日立製作所 紫外線照射装置、及び基板組立システム
WO2018119703A1 (fr) * 2016-12-26 2018-07-05 武汉华星光电技术有限公司 Procédé de fabrication de panneau d'affichage
TWI723426B (zh) * 2018-07-09 2021-04-01 日商艾美柯技術股份有限公司 基板組裝裝置及基板組裝方法
JP7347869B2 (ja) 2020-05-26 2023-09-20 Ａｉメカテック株式会社 基板組立装置及び基板組立方法

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JP2016212277A (ja) * 2015-05-11 2016-12-15 株式会社日立製作所 紫外線照射装置、及び基板組立システム
WO2018119703A1 (fr) * 2016-12-26 2018-07-05 武汉华星光电技术有限公司 Procédé de fabrication de panneau d'affichage
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TWI723426B (zh) * 2018-07-09 2021-04-01 日商艾美柯技術股份有限公司 基板組裝裝置及基板組裝方法
JP7347869B2 (ja) 2020-05-26 2023-09-20 Ａｉメカテック株式会社 基板組立装置及び基板組立方法

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