WO2010090018A1 - 露光方法、カラーフィルタの製造方法及び露光装置 - Google Patents
露光方法、カラーフィルタの製造方法及び露光装置 Download PDFInfo
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- WO2010090018A1 WO2010090018A1 PCT/JP2010/000663 JP2010000663W WO2010090018A1 WO 2010090018 A1 WO2010090018 A1 WO 2010090018A1 JP 2010000663 W JP2010000663 W JP 2010000663W WO 2010090018 A1 WO2010090018 A1 WO 2010090018A1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
Definitions
- the present invention relates to, for example, an exposure method for a color filter used in a liquid crystal display device and an exposure apparatus used therefor.
- a color filter is widely used for the purpose of color image display, reflectance reduction, contrast adjustment, spectral characteristic control, and the like.
- the color filter is formed by arranging colored pixels in a matrix on a substrate.
- a method for forming these colored pixels on a substrate for example, a printing method or a photolithography method is known.
- FIG. 7 is an enlarged view showing the pixel of the color filter
- FIG. 8 is a cross-sectional view taken along line XX of the pixel of the color filter shown in FIG.
- the black matrix 21 has a light shielding property, defines the position of the colored pixels 22 on the substrate 50, and uniformly arranges the sizes of the colored pixels 22. Further, the black matrix 21 has a function of shielding unnecessary light when a color filter is used in a display device, and realizing a uniform image quality with high contrast and no unevenness.
- the colored pixel 22 functions as a filter for reproducing each color.
- a black photoresist is applied on the substrate 50, exposed through a photomask, and then developed to form a black matrix 21.
- a color resist is applied onto the substrate 50, exposed through a photomask, and then developed to form the colored pixels 22.
- the formation process of the colored pixels 22 is repeated until the colored pixels 22 of all colors are formed on the substrate.
- ITO Indium Tin Oxide
- color filters When mass-producing the above color filters, it is common to form a plurality of color filters side by side on a large substrate. For example, four color filters having a diagonal size of 17 inches can be formed on a glass substrate having a size of about 650 mm ⁇ 850 mm.
- a photomask having a plurality of mask patterns corresponding to all the color filters and having substantially the same size as the substrate has been widely performed using a photomask in which a four-side mask pattern corresponding to a color filter having a diagonal size of 17 inches is formed.
- patterns corresponding to all the mask patterns on the photomask are simultaneously formed on the substrate by one exposure (so-called batch exposure method).
- the size of the photomask increases as the size of the color filter increases. This increases the manufacturing cost of the photomask, and also causes a problem of bending due to the weight of the photomask during exposure.
- a single photomask that can expose several color filters at the same time is used, and multiple exposures are performed while changing the position of the photomask facing the substrate.
- the method to do is adopted. For example, when the size of the substrate is about 730 mm ⁇ 920 mm (fourth generation), a uniaxial step exposure method is adopted in which exposure is repeated while the substrate is moved stepwise in one direction with respect to the photomask.
- FIG. 9 is a plan view for explaining an example of manufacturing a color filter by the XY step exposure method.
- the substrate 50 is provided with first to sixth exposure areas 1Ex to 6Ex for exposing a total of six color filters of 2 rows ⁇ 3 columns.
- the substrate 50 is placed on the exposure stage 60 and can freely move in the XY directions.
- exposure is performed in a state where the photomask PM is overlapped with the first exposure region 1Ex, and a mask pattern of the photomask PM is formed in the first exposure region 1Ex.
- the substrate 50 is moved by a distance Py in the positive direction of the Y axis in the drawing, the photomask PM is overlaid on the second exposure region 2Ex, and a pattern of the photomask PM is formed in the second exposure region 2Ex.
- the substrate 50 is moved in the positive direction of the X axis by a distance Px, the photomask PM is overlaid on the third exposure region 3Ex, and a pattern of the photomask PM is formed in the third exposure region 3Ex.
- exposure is repeated while moving the substrate 50 in the X direction or Y direction, and patterns are formed in the fourth exposure area 4Ex to the sixth exposure area 6Ex.
- FIG. 10 is a plan view for explaining the slit exposure method
- FIG. 11 is a sectional view taken along the line XX shown in FIG. 12 is a partially enlarged view of the mask pattern of the photomask shown in FIG. 10, and
- FIG. 13 is a partially enlarged view of the stripe pattern exposed by the slit exposure method.
- FIG. 11A shows a state where the exposure of the first exposure region is started
- FIG. 11B shows a state where the exposure of the first exposure region is completed.
- the photomask PM2 having a size smaller than the first exposure region 1Ex of the substrate 50 placed on the exposure stage 60 is a substrate 50 and a light source (not shown). It is arranged between.
- the exposure stage 60 can move at a constant speed in the left-right direction in the drawing, and can also perform step movement in the vertical direction in the drawing along the Y axis.
- the photomask PM2 is provided with a slit S for exposing a part of the pattern formed in the first exposure region 1Ex.
- a plurality of openings 51 are aligned with a predetermined interval Pi.
- the width and length of each opening 51 are Wi and Li, respectively.
- the photomask PM2 When exposing the first exposure region 1Ex, as shown in FIGS. 10 and 11 (a), the photomask PM2 is disposed at the left end of the first exposure region 1Ex. Then, while irradiating the light from the light source onto the photomask PM2, the substrate 50 is continuously transported along the X axis in the left direction in FIG. 10 until the state shown in FIG. As a result, as shown in FIG. 13, a stripe pattern having a width Wi and a spacing Pi is formed on the substrate 50 so as to extend in the substrate transport direction (the left-right direction in FIG. 10).
- the exposure stage 60 is moved by a distance Py in the positive direction of the Y axis in FIG. 10 to align the photomask PM2 with the exposure start position of the second exposure area. Then, a stripe pattern is formed in the second exposure region by continuous exposure similar to the first exposure region.
- FIG. 14 is a partially enlarged view of a color filter manufactured by a slit exposure method.
- the color filter shown in FIG. 14 forms a red colored pixel 22R, a green colored pixel 22G, and a green colored pixel 22G by forming a striped colored pattern extending in the X direction on a glass substrate on which a grid-like black matrix 21 is formed. Blue colored pixels 22B are formed. In the Y-axis direction, a set of red, green, and blue colored pixel rows is repeatedly formed at intervals Pi.
- the pattern formed by the slit exposure method is limited to a stripe shape continuous in the substrate transport direction (X direction in FIG. 14). Therefore, the slit exposure method cannot be applied to the formation of nonlinear patterns such as rectangular colored pixels and circular columnar spacers.
- a pulsed light exposure method has also been proposed in which light from a light source is intermittently irradiated (turning on and off repeatedly) to form a non-linear pattern (for example, Patent Document 1).
- the pulsed light exposure method is basically the same as the slit exposure method described with reference to FIGS. 10 and 11, but instead of continuously emitting light from the light source, the pattern formation region on the moving substrate is the opening of the photomask.
- the light source emits light at the moment of passing under the section.
- the mask pattern is intermittently printed a plurality of times. Since the light emission time of one pulse is about several tens of microseconds, the exposure shift caused by the movement of the substrate during irradiation falls within an allowable range.
- FIG. 15 is a partially enlarged view of a color filter manufactured by a pulsed light exposure method.
- the color filter shown in FIG. 15 forms a red colored pixel 22R ′, a green colored pixel 22G ′, and a blue colored pixel 22B by forming a rectangular colored pattern on the substrate on which the black matrix 21 is formed. 'Is formed.
- the width and length of each colored pixel are Wi and Li, respectively.
- the rectangular colored pixels of each color are formed at an equal pitch Pi-2 with discontinuity between the pixels in the X-axis direction.
- the colored pixel columns are repeatedly arranged at equal pitches Pi in the order of red, green, and blue.
- each colored pixel is repeatedly arranged at the interval Pi-2, and in the Y-axis direction, adjacent pairs of red, green, and blue colored pixel rows are repeatedly arranged at the interval Pi.
- FIG. 16 is a plan view showing an example in which a plurality of types of color filters are formed on the same substrate.
- a plurality of the same color filters are formed on one substrate, but a plurality of different color filters may be formed on one substrate.
- four color filters CF-A and three color filters CF-B having different color pixel sizes or color filter finished sizes from the color filter CF-A are formed. If a method of forming a mixture of a plurality of different color filters on a single substrate is adopted, a margin portion generated when a plurality of color filters CF-A are created in the region indicated by “A” in FIG. A color filter CF-B smaller than the color filter CF-A can be formed (in the region indicated by “B”). By effectively using the generated blank portion, it is possible to reduce the manufacturing cost of the color filter. In addition, the supply of a plurality of different types of color filters can be started in a short time.
- the color filter CF-A is used as the first method.
- a photomask A (mask pattern A) for exposing the photomask and a photomask B (mask pattern B) for exposing the color filter CF-B are prepared, and the first exposure and photomask using the photomask A are prepared. It is conceivable to perform the second exposure using B. However, in this case, two photomasks are required, and it is difficult to say that the color filter can be manufactured at low cost.
- both a mask pattern A and a mask pattern B are provided on one photomask, and a mask pattern to be used is changed according to an exposure target area.
- the irradiation range in which light from the light source can be irradiated onto the photomask is fixed in the exposure apparatus. Therefore, when the second method is employed, after performing the first exposure by adjusting the position of the photomask so that the mask pattern A is within the irradiation range, the mask pattern B is within the irradiation range. Second exposure is performed by adjusting the position of the photomask. Further, at the start of the first exposure and the second exposure, it is necessary to align the position of the mask pattern with respect to the exposure area on the substrate. That is, in the second method, it is necessary to adjust the position of the photomask with respect to the irradiation range of the light source light and perform alignment of the photomask with respect to the substrate twice. When the second method is adopted, there is an advantage that the number of photomasks is one, but a considerable time is required for alignment of the photomask, which leads to a decrease in production efficiency.
- the first method and the second method are not efficient manufacturing methods.
- an object of the present invention is to provide an exposure method capable of efficiently forming a plurality of types of color filters on a single substrate while adopting an exposure method using a small photomask, and a method for manufacturing a color filter. And providing an exposure apparatus.
- the present invention is an exposure method for forming different resist patterns on the first region and the second region on the same substrate.
- the exposure method includes: a first mask pattern for exposing a part of the resist pattern in the first region; and a second mask pattern for exposing a part of the resist pattern in the second region.
- a photomask having a light source is fixed to the light source, and the substrate is transported, and the first mask pattern is selectively irradiated with light from the light source to continuously or intermittently expose the resist on the first region.
- the second mask pattern is selectively irradiated with light from the light source, and the resist on the second region is exposed continuously or intermittently.
- a color filter manufacturing method includes a first mask pattern for exposing a part of colored pixels in a first region, and a second mask for exposing a part of colored pixels in a second region.
- a photomask having a pattern is fixed to the light source, a process of applying a color resist on the substrate, and a first mask pattern is selectively irradiated with light from the light source while the substrate is being transported.
- the color resist on the first area is exposed to light continuously or intermittently, and the second mask pattern is selectively irradiated with light from the light source while transporting the substrate.
- a colored pattern forming process including a process of exposing the resist continuously or intermittently is repeated to form colored pixels of all colors constituting the color filter.
- the present invention is an exposure apparatus for forming different resist patterns on the first region and the second region on the same substrate.
- the exposure apparatus includes a light source, a first mask pattern that is fixed to the light source and that exposes a part of the resist pattern in the first region, and a part of the resist pattern in the second region.
- Light from a light source to any one mask pattern on the photomask a photomask having a second mask pattern for exposing the substrate, a substrate transfer device for transferring a substrate coated with a resist, and A selective irradiation mechanism for selectively irradiating.
- the mask patterns of the first and second regions on the substrate are different without changing the positions of the exposure apparatus and the photomask. Can be formed.
- FIG. 1 is a plan view showing an example in which two different color filters are formed on the same substrate.
- FIG. 2 is an explanatory diagram of a photomask for exposing the two types of color filters shown in FIG.
- FIG. 3 is a simplified diagram of the exposure apparatus according to the first embodiment.
- FIG. 4 is a simplified diagram of an exposure apparatus according to the second embodiment.
- FIG. 5 is a plan view showing an example in which three different color filters are formed on the same substrate.
- FIG. 6 is a simplified diagram of an exposure apparatus according to the third embodiment.
- FIG. 7 is an enlarged view showing the pixels of the color filter.
- FIG. 8 is a cross-sectional view taken along line XX of the pixel of the color filter shown in FIG. FIG.
- FIG. 9 is a plan view for explaining an example of manufacturing a color filter by the XY step exposure method.
- FIG. 10 is a plan view for explaining the slit exposure method.
- FIG. 11 is a sectional view taken along line XX shown in FIG.
- FIG. 12 is a partially enlarged view of the mask pattern of the photomask shown in FIG.
- FIG. 13 is a partially enlarged view of a stripe pattern exposed by the slit exposure method.
- FIG. 14 is a partially enlarged view of a color filter manufactured by a slit exposure method.
- FIG. 15 is a partially enlarged view of a color filter manufactured by a pulsed light exposure method.
- FIG. 16 is a plan view showing an example in which a plurality of types of color filters are formed on the same substrate.
- FIG. 1 is a plan view showing an example in which two different color filters are formed on the same substrate.
- the exposure method according to the present invention is for forming a plurality of different types of color filters on a substrate using a single photomask.
- the “plurality of color filters different from each other” refers to color filters in which at least one of the size, arrangement interval, and finished size of the colored pixels is different.
- two different color filters are formed on a single substrate. Specifically, four first color filters CF-1 are formed in the region R1 on the substrate, and three second color filters CF-2 are formed in the region R2 on the same substrate. ing.
- FIG. 2 is an explanatory diagram of a photomask for exposing the two types of color filters shown in FIG. 2A is a plan view of the photomask
- FIG. 2B is a cross-sectional view of the photomask shown in FIG. 2A taken along line XX.
- the photomasks PM3 and PM4 include a first slit S1 that is a mask pattern for exposing the first color filter CF-1 and a second color filter CF-. 2 is provided as a second slit S2 which is a mask pattern for exposing 2.
- the first slit S1 includes a light shielding layer 52 and an array of a plurality of openings 51-1 formed by partially removing the light shielding layer 52 on the mask substrate 30.
- the second slit S2 includes a light shielding layer 52 and an array of a plurality of openings 51-2 formed by partially removing the light shielding layer 52 on the mask substrate 30.
- the width, length and arrangement interval of the openings 51-1 are W1, L1 and P1, respectively.
- the width, length, and arrangement interval of the openings 51-2 are W2, L2, and P2, respectively.
- the first slit S1 and the second slit S2 have different widths, lengths, and arrangement intervals of the openings, and W1> W2, L1> L2, and P1> P2.
- the first region PR-1 is a region where a stripe-like or dot-like pattern is formed by the first slit S1
- the second region PR-2 is the second slit S2. This is a region where a stripe or dot pattern is formed.
- FIG. 3 is a simplified diagram of the exposure apparatus according to the first embodiment. More specifically, FIG. 3A is a diagram illustrating a state where the colored pixels of the first color filter are exposed, and FIG. 3B is a diagram illustrating a state where the colored pixels of the second color filter are exposed. It is.
- the exposure apparatus shown in FIG. 3 is for exposing different color filters to the first region PR-1 and the second region PR-2 on one substrate 50.
- the exposure apparatus is arranged to face the light source (not shown), the photomask PM3 fixed to the light source, and the substrate 50 coated with the resist 54 in the direction indicated by the white arrow.
- Substrate transport device 60 that transports continuously, mirror M that folds light E emitted from the light source, collimator lens C that converts the light folded by mirror M into parallel light, and an arbitrary mask pattern of photomask PM3
- a shutter ST that functions as a selective irradiation mechanism that selectively irradiates the light.
- the shutter ST is supported by a moving mechanism (not shown) so as to be movable in the X-axis direction in the figure.
- the parallel light emitted from the collimating lens C is applied to a range including both the first slit S1 and the second slit S2 of the photomask PM3.
- the shutter ST shields either the first slit S1 or the second slit S2 on the photomask PM3, so that light is selectively transmitted to either the first slit S1 or the second slit S2. Irradiated.
- the shutter 54 covers the second slit S2, so that the resist 54 is irradiated with light through the opening 51-1 of the first slit S1.
- the shutter ST covers the first slit S1, so that the resist 54 is irradiated with light through the opening 51-2 of the second slit S2.
- a first color (for example, red) color resist 54 is applied on a substrate 50 on which a black matrix and a metal wiring (both not shown) are formed, and placed on the substrate transfer device 60.
- the position of the first slit S1 is aligned with the exposure start position of the first region PR-1 on the substrate 50.
- the shutter ST shields the second slit S2.
- the substrate transport device 60 continuously transports the substrate 50 in the direction indicated by the white arrow in the figure. Further, the substrate 50 is moved stepwise in the Y-axis direction, and exposure is similarly performed on the first region PR-1 in another row. As a result, stripe-like colored patterns constituting the first color filter are formed in the four first regions PR-1 shown in FIG.
- the position of the second slit S2 is aligned with the exposure start position of the second region PR-2 on the substrate 50.
- the shutter ST shields the first slit S1.
- the substrate 50 is continuously transported in the direction indicated by the white arrow in the figure by the substrate transport device 60 while selectively irradiating the light from the light source to the second slit S2.
- stripe-shaped coloring patterns constituting the second color filter are formed in the three second regions PR-2 shown in FIG.
- a colored pixel constituting the first color filter CF-1 is formed in the first region PR-1 of the substrate 50, and a colored pixel constituting the second color filter CF-2 is formed in the second region PR-2. Can be formed.
- any mask pattern is selectively selected by moving the shutter ST without changing the positional relationship between the photomask PM3 and the irradiation range of the light source light.
- Light can be irradiated.
- the alignment is performed twice (that is, the alignment between the mask pattern and the exposure start position of the region R1, the mask pattern It is only necessary to perform alignment with the exposure start position of the region R2. Therefore, according to the present invention, even when a plurality of color filters are formed on a single substrate, the number of alignments can be reduced and the color filters can be formed efficiently.
- FIG. 4 is a simplified diagram of an exposure apparatus according to the second embodiment.
- the exposure apparatus according to the second embodiment is different from the first embodiment in the selective irradiation mechanism.
- the description of the same configuration as that of the first embodiment is omitted.
- the exposure apparatus shown in FIG. 4 includes a light source (not shown), a photomask PM4 that is arranged to face the substrate 50 and fixed to the light source, and a substrate 50 coated with a resist 54.
- a substrate transport device 60 that transports continuously in the direction indicated by the arrow, a mirror M2 that folds the light E emitted from the light source, a collimator lens C2 that converts the light folded by the mirror M2 into parallel light, and a collimator lens C2.
- a pair of mirrors M3 disposed between the photomask PM4 and the photomask PM4.
- the pair of mirrors M3 are flat mirrors, and are arranged to face each other so that the mirror surfaces are parallel to each other.
- the mirror surface of each mirror M3 is inclined so as to form an angle of 45 degrees with respect to the optical axis of the collimating lens C2.
- the pair of mirrors M3 are supported by a moving mechanism (not shown) so as to be movable in the X-axis direction.
- the irradiation range of the light emitted from the collimating lens C2 is a size that can include only one of the first slit S1 and the second slit S2.
- both the pair of mirrors M3 are disposed at positions that do not overlap the optical path of the emitted light from the collimating lens C2.
- the pair of mirrors M3 is moved in the positive direction of the X axis in FIG.
- a mirror M3 (a mirror whose mirror surface faces obliquely upward) intersects the optical path of the collimating lens C2, and bends the light beam emitted from the collimating lens C2 in the positive direction of the X axis.
- the bent light beam is bent again by 90 degrees by the other mirror M3 and applied to the second slit S2.
- the pair of mirrors M3 that can move in parallel with the photomask PM4 function as a selective irradiation mechanism that selectively irradiates light onto an arbitrary mask pattern on the photomask PM4.
- the exposure method using the exposure apparatus according to this embodiment and the method for manufacturing a color filter are the same as those in the first embodiment, and thus the repeated description thereof is omitted.
- any mask pattern is selectively selected by moving the shutter ST without changing the positional relationship between the photomask PM3 and the irradiation range of the light source light.
- Light can be irradiated.
- the alignment is performed twice (that is, the alignment between the mask pattern and the exposure start position of the region R1, the mask pattern It is only necessary to perform alignment with the exposure start position of the region R2. Therefore, according to the present invention, it is possible to efficiently form a color filter by reducing the number of times of alignment.
- FIG. 5 is a plan view showing an example of forming three different types of color filters on the same substrate
- FIG. 6 is a simplified diagram of an exposure apparatus according to the third embodiment.
- the third embodiment differs from the first embodiment in the number of types of color filters formed on the same substrate and in the photomasks that constitute the exposure apparatus. The description of the same configuration as that of the first embodiment is omitted.
- three different color filters are formed on the same substrate. Specifically, in the region R1, two first color filters CF-1 are formed, in the region R2, three second color filters CF-2 are formed, and in the region R3, Four third color filters CF-3 are formed.
- the first color filter CF-1, the second color filter CF-2, and the third color filter CF-3 differ in at least one of the size, arrangement interval, and finished size of the colored pixels.
- the photomask PM5 used in the exposure apparatus includes three types of mask patterns, that is, a first slit S1 having an array of a plurality of openings 51-1, A second slit S2 having a plurality of openings 51-2 and a third slit S3 having a plurality of openings 51-3 are provided.
- the first slit S1, the second slit S2, and the third slit S3 are for exposing the first region PR-1, the second region PR-2, and the third region PR-3, respectively. is there.
- the exposure apparatus includes two shutters ST.
- the shutter ST shields the second slit S2 and the third slit S3 during the exposure of the first region PR-1, and the first slit S1 and the third slit during the exposure of the second region PR-2.
- the slit S3 is shielded from light, and the first slit S1 and the second slit S2 are shielded during exposure of the third region PR-3.
- any mask pattern on the photomask PM5 can be selected without changing the positional relationship between the photomask PM5 and the light source light irradiation range.
- different color filters can be formed in different regions of the substrate 50 by irradiating the light source.
- the exposure apparatus including the shutter ST as the selective irradiation mechanism has been described.
- a pair of mirrors M3 may be used as in the second embodiment.
- the present invention is not limited to the color filter pattern formation but can be applied to the formation of various resist patterns.
- a shutter or a pair of flat mirrors is used as the selective irradiation mechanism, but prisms and mirrors may be used alone or in combination.
- n different color filters are formed in the first to nth regions (where n is a natural number of 2 or more)
- n types of mask patterns are provided on the photomask, It is sufficient to selectively irradiate only one of the mask patterns according to the exposure target area.
- the mask pattern is formed by providing the light shielding layer and the opening in the photomask.
- the opening may transmit all of the incident light, Only part of the incident light may be transmitted. In other words, the opening only needs to function as a transmission part that transmits at least part of incident light.
- the present invention can be used to manufacture color filters and the like used in liquid crystal display devices.
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Abstract
Description
図3は、第1の実施形態に係る露光装置の簡略図である。より詳細には、図3(a)は、第1のカラーフィルタの着色画素を露光する状態を示す図であり、(b)は、第2のカラーフィルタの着色画素を露光する状態を示す図である。
図4は、第2の実施形態に係る露光装置の簡略図である。第2の実施形態に係る露光装置は第1の実施形態に比べて、選択照射機構が異なる。尚、第1の実施形態と同様の構成については説明を省略する。
図5は、同一基板上に3種類の異なるカラーフィルタを形成する一例を示す平面図であり、図6は、第3の実施形態に係る露光装置の簡略図である。第3の実施形態は、第1の実施形態と比べて、同一基板上に形成されるカラーフィルタの種類の数が異なり、また、露光装置を構成するフォトマスクが異なる。尚、第1の実施形態と同様の構成については説明を省略する。
尚、第1~3の実施形態では、カラーフィルタを構成する着色画素を形成する例を説明したが、本発明は、カラーフィルタのパターン形成に限らず、様々なレジストパターンの形成に適用できる。
22 着色画素
23 透明導電膜
30 フォトマスク基板
50 基板
51、51-1、51-2、51-3 開口部
54 カラーレジスト
60 露光ステージ
C、C2、C3 コリメートレンズ
E、E2、E3 光
M、M2、M4 ミラー
M3 一対のミラーM3
PM、PM2、PM3、PM4、PM5 フォトマスク
PR-1 第1の領域
PR-2 第2の領域
PR-3 第3の領域
R1、R2、R3 領域
S1、S2、S3 第1のスリット、第2のスリット、第3のスリット
ST シャッター
Claims (12)
- 同一基板上の第1の領域と第2の領域とに互いに異なるレジストパターンを形成する露光方法であって、
前記第1の領域内のレジストパターンの一部を露光するための第1のマスクパターンと、前記第2の領域内のレジストパターンの一部を露光するための第2のマスクパターンとを有するフォトマスクを光源に対して固定し、
前記基板を搬送しながら、前記第1のマスクパターンに前記光源からの光を選択的に照射して、前記第1の領域上のレジストを連続的または間欠的に露光し、
前記基板を搬送しながら、前記第2のマスクパターンに前記光源からの光を選択的に照射して、前記第2の領域上のレジストを連続的または間欠的に露光する、露光方法。 - 前記第1のパターンを構成する複数の光透過部の間隔と、前記第2のパターンを構成する複数の光透過部の間隔とが異なる、請求項1に記載の露光方法。
- 前記第1の領域上のレジストの露光時には、前記第2のマスクパターンをシャッターで遮光し、
前記第1の領域上のレジストの露光時には、前記第1のマスクパターンを前記シャッターで遮光する、請求項1に記載の露光方法。 - 前記第2の領域上のレジストの露光時には、一対のミラーで前記光源からの光を屈折させることによって、前記フォトマスクに対する光の照射位置を前記第1のマスクパターンの形成位置から前記第2のマスクパターンの形成位置へと移動させる、請求項1に記載の露光方法。
- 同一基板上の第1の領域と第2の領域とに互いに異なるカラーフィルタを形成するカラーフィルタの製造方法であって、
前記第1の領域内の着色画素の一部を露光するための第1のマスクパターンと、前記第2の領域内の着色画素の一部を露光するための第2のマスクパターンとを有するフォトマスクを光源に対して固定し、
基板上にカラーレジストを塗布する処理と、前記基板を搬送しながら、前記第1のマスクパターンに前記光源からの光を選択的に照射して、前記第1の領域上のカラーレジストを連続的または間欠的に露光する処理と、前記基板を搬送しながら、前記第2のマスクパターンに前記光源からの光を選択的に照射して、前記第2の領域上のカラーレジストを連続的または間欠的に露光する処理とを含む着色パターン形成処理を繰り返して、前記カラーフィルタを構成する全ての色の着色画素を形成する、カラーフィルタの製造方法。 - 前記第1の領域に形成されるカラーフィルタのサイズと、前記第2の領域に形成されるカラーフィルタのサイズとが異なり、かつ、前記第1のマスクパターンを構成する複数の光透過部の間隔と、前記第2のマスクパターンを構成する複数の光透過部の間隔とが異なる、請求項5に記載のカラーフィルタの製造方法。
- 前記第1の領域上のカラーレジストの露光時には、前記第2のマスクパターンをシャッターで遮光し、
前記第1の領域上のカラーレジストの露光時には、前記第1のマスクパターンを前記シャッターで遮光する、請求項5に記載のカラーフィルタの製造方法。 - 前記第2の領域上のカラーレジストの露光時には、一対のミラーで前記光源からの光を屈折させることによって、前記フォトマスクに対する光の照射位置を前記第1のマスクパターンの形成位置から前記第2のマスクパターンの形成位置へと移動させる、請求項5に記載のカラーフィルタの製造方法。
- 請求項5~8のいずれかに記載のカラーフィルタ基板の露光方法を用いて作製した、カラーフィルタ基板。
- 同一基板上の第1の領域と第2の領域とに互いに異なるレジストパターンを形成する露光装置であって、
光源と、
前記光源に対して固定され、かつ、前記第1の領域内のレジストパターンの一部を露光するための第1のマスクパターンと、前記第2の領域内のレジストパターンの一部を露光するための第2のマスクパターンとを有するフォトマスクと、
レジストが塗布された基板を搬送する基板搬送装置と、
前記フォトマスク上のいずれか1つのマスクパターンに対して、前記光源からの光を選択的に照射する選択照射機構とを備える、露光装置。 - 前記照射選択機構は、前記第1の領域上のレジストの露光時には、前記第2のマスクパターンを遮光し、前記第1の領域上のレジストの露光時には、前記第1のマスクパターンを遮光するシャッターである、請求項10に記載の露光装置。
- 前記照射選択機構は、前記第2の領域上のレジストの露光時には、前記光源からの光を屈折させることによって、前記フォトマスクに対する光の照射位置を前記第1のマスクパターンの形成位置から前記第2のマスクパターンの形成位置へと移動させる一対のミラーである、請求項10に記載の露光装置。
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JP2013064872A (ja) * | 2011-09-16 | 2013-04-11 | V Technology Co Ltd | 露光装置 |
JP2015197661A (ja) * | 2014-04-03 | 2015-11-09 | 大日本印刷株式会社 | 近接露光方法および近接露光方法を用いたカラーフィルタの製造方法 |
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CN103676293B (zh) * | 2013-12-02 | 2017-05-31 | 京东方科技集团股份有限公司 | 一种彩膜基板及其制作方法、显示装置 |
TWI704411B (zh) * | 2017-04-25 | 2020-09-11 | 友達光電股份有限公司 | 光罩、對應之間隔物結構及應用其之液晶面板 |
US11866042B2 (en) | 2018-08-20 | 2024-01-09 | Indian Motorcycle International, LLC | Wheeled vehicle adaptive speed control method and system |
CN114063361A (zh) * | 2020-07-29 | 2022-02-18 | 元太科技工业股份有限公司 | 用于反射式显示装置的彩色滤光阵列 |
CN113126195A (zh) * | 2021-04-15 | 2021-07-16 | 成都捷翼电子科技有限公司 | 一种无边框彩色化滤光片及制作方法 |
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