WO2010073576A1 - Capteur de vitesse angulaire - Google Patents

Capteur de vitesse angulaire Download PDF

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Publication number
WO2010073576A1
WO2010073576A1 PCT/JP2009/007043 JP2009007043W WO2010073576A1 WO 2010073576 A1 WO2010073576 A1 WO 2010073576A1 JP 2009007043 W JP2009007043 W JP 2009007043W WO 2010073576 A1 WO2010073576 A1 WO 2010073576A1
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WO
WIPO (PCT)
Prior art keywords
lower electrode
electrode
upper electrode
angular velocity
voltage signal
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Application number
PCT/JP2009/007043
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English (en)
Japanese (ja)
Inventor
相澤宏幸
大内智
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パナソニック株式会社
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Filing date
Publication date
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Publication of WO2010073576A1 publication Critical patent/WO2010073576A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Definitions

  • the present invention relates to an angular velocity sensor used for automobile control, a car navigation device, a digital camera, and the like.
  • This element has a base 1, a first drive arm 3A, a second drive arm 3B, a first sense arm 5A, and a second sense arm 5B.
  • the first drive arm 3A and the second drive arm 3B are connected to the base 1 and formed symmetrically with each other.
  • the first sense arm 5A is connected to the base 1 and extends in a direction substantially opposite to the first drive arm 3A.
  • the second sense arm 5B is also connected to the base 1 and extends in a direction substantially opposite to the second drive arm 3B.
  • the first drive arm 3A and the second drive arm 3B vibrate in a direction substantially perpendicular to their extending direction.
  • the first sense arm 5A includes a first substrate 6, a first lower electrode 7, a second lower electrode 8, a first piezoelectric body 10A, and a second piezoelectric body 10B.
  • the first upper electrode 11 and the second upper electrode 12 are provided.
  • the lower electrodes 7 and 8 are formed on the first substrate 6.
  • the piezoelectric bodies 10A and 10B are formed on the lower electrodes 7 and 8, respectively.
  • the upper electrodes 11 and 12 are formed on the piezoelectric bodies 10A and 10B, respectively.
  • the second sense arm 5B includes the second substrate 13, the third lower electrode 14, the fourth lower electrode 15, the third piezoelectric body 16A, the fourth piezoelectric body 16B, and the third upper electrode. 18 and a fourth upper electrode 19.
  • the third lower electrode 14 and the fourth lower electrode 15 are formed on the second substrate 13.
  • the third piezoelectric body 16 A is formed on the third lower electrode 14, and the fourth piezoelectric body 16 B is formed on the fourth lower electrode 15.
  • the third upper electrode 18 is formed on the third piezoelectric body 16A, and the fourth upper electrode 19 is formed on the fourth piezoelectric body 16B.
  • the second upper electrode 12 is disposed on the side close to the second sense arm 5B, and the first upper electrode 11 is disposed on the opposite side to the second sense arm 5B.
  • the third upper electrode 18 is disposed on the side close to the first sense arm 5A, and the fourth upper electrode 19 is disposed on the opposite side to the first sense arm 5A.
  • the angular velocity around the axis about the Z direction shown in FIG. 8 is detected as follows.
  • the drive arms 3A and 3B vibrate so as to be parallel to the surface constituting the base 1 and to approach and separate from each other.
  • the sense arms 5A and 5B also vibrate in synchronization.
  • the drive arm 3A and the sense arm 5A vibrate in the same phase
  • the drive arm 3B and the sense arm 5B vibrate in the same phase.
  • the drive arm 3A and the drive arm 3B vibrate in opposite phases.
  • a current (drive current) due to this vibration is generated in the electrodes provided on the sense arms 5A and 5B.
  • the current generated in the upper electrodes of the sense arms 5A and 5B in this way is then converted into a voltage. Then, the sum of the voltage of the second upper electrode 12 and the voltage of the fourth upper electrode 19 is obtained. On the other hand, the sum of the voltage of the first upper electrode 11 and the sum of the voltage of the third upper electrode 18 is obtained.
  • the angular velocity in the direction perpendicular to the plane forming the base 1 is detected from the difference between the two sums. Specifically, the voltage line from the second upper electrode 12 and the voltage line from the fourth upper electrode 19 are connected, and the voltage line of the first upper electrode 11 and the voltage line of the third upper electrode 18 are connected to each other. Connect. These outputs are input to the amplifier. Thus, in this calculation, the angular velocity around the axis about the Z direction can be detected.
  • the out-of-plane angular velocity cannot be accurately detected. That is, it is impossible to accurately detect the angular velocity around the axis with the sense arm 5A, 5B extending from the base 1, that is, the Y direction in FIG.
  • the voltage line from the upper electrode is connected. Therefore, in order to obtain the angular velocity around the axis with the Y direction as an axis, it is necessary to input a voltage caused by the drive current to the amplifier. As a result, the S / N ratio decreases.
  • Patent Document 1 is known as prior art document information relating to this application.
  • the angular velocity sensor of the present invention has an element and a calculation unit.
  • the element includes a base, first and second drive arms, and first and second sense arms.
  • the first and second drive arms have portions connected to the base and extending parallel to each other from the base.
  • the first and second sense arms are connected to the base and have portions extending from the base in opposite directions to the first and second drive arms and extending in parallel with each other from the base.
  • the first sense arm has a first substrate, first and second lower electrodes, first and second piezoelectric bodies, and first and second upper electrodes.
  • the first and second lower electrodes are formed on the first substrate.
  • the second lower electrode is formed closer to the second sense arm than the first lower electrode.
  • the first and second piezoelectric bodies are respectively formed on the first and second lower electrodes, and the first and second upper electrodes are respectively formed on the first and second piezoelectric bodies.
  • the second sense arm has a second substrate, third and fourth lower electrodes, third and fourth piezoelectric bodies, and third and fourth upper electrodes.
  • the third and fourth lower electrodes are formed on the second substrate.
  • the fourth lower electrode is formed on the side farther from the first sense arm than the third lower electrode.
  • the third and fourth piezoelectric bodies are respectively formed on the third and fourth lower electrodes, and the third and fourth upper electrodes are respectively formed on the third and fourth piezoelectric bodies.
  • the computing unit includes a sum of a voltage signal of the first lower electrode with respect to the first upper electrode and a voltage signal of the second lower electrode with respect to the second upper electrode, and the third lower electrode with respect to the third upper electrode.
  • the difference between the voltage signal and the sum of the voltage signal of the fourth lower electrode with respect to the fourth upper electrode is calculated.
  • the sum of the voltage signal of the fourth upper electrode with respect to the fourth lower electrode is calculated.
  • FIG. 1 is a perspective view of an element of an angular velocity sensor according to an embodiment of the present invention.
  • 2 is a cross-sectional view taken along line 2-2 of the element shown in FIG.
  • FIG. 3 is a block diagram showing the configuration of the angular velocity sensor according to the embodiment of the present invention.
  • FIG. 4 is a conceptual diagram illustrating a voltage detection method in the calculation unit of the angular velocity sensor according to the embodiment of the present invention.
  • FIG. 5A is a perspective view showing a driving state of the element shown in FIG. 5B is a perspective view showing a state in which an angular velocity around the Y axis is applied to the element shown in FIG.
  • FIG. 5A is a perspective view showing a driving state of the element shown in FIG.
  • FIG. 5C is a perspective view showing a state in which an angular velocity around the Z-axis is applied to the element shown in FIG.
  • FIG. 6 shows the voltage phase of each electrode in a state where an angular velocity around the Y axis is applied and an angular velocity around the Z axis is applied when the element shown in FIG. 1 is driven.
  • FIG. 7A is a conceptual diagram illustrating a method of detecting an angular velocity around the Y axis by the calculation unit of the angular velocity sensor according to the embodiment of the present invention.
  • FIG. 7B is a conceptual diagram illustrating a method of detecting an angular velocity around the Z axis by the calculation unit of the angular velocity sensor according to the embodiment of the present invention.
  • FIG. 8 is a perspective view of an element of a conventional angular velocity sensor.
  • FIG. 9 is a cross-sectional view of the element shown in FIG. 8 taken along line 9-9.
  • FIG. 1 is a perspective view of an element of an angular velocity sensor according to an embodiment of the present invention
  • FIG. 2 is a sectional view taken along line 2-2 of FIG.
  • FIG. 3 is a block diagram showing the overall configuration of the angular velocity sensor according to the embodiment of the present invention.
  • the element 20 has a base 21, a first drive arm 22, a second drive arm 23, a first sense arm 24, and a second sense arm 25.
  • the first drive arm 22 has a U-shaped bent portion 22A and a weight portion 22B provided at the tip of the bent portion 22A.
  • the second drive arm 23 has a bending portion 23A and a weight portion 23B.
  • the first sense arm 24 has a bent portion 24A and a weight portion 24B
  • the second sense arm 25 has a bent portion 25A and a weight portion 25B.
  • the bending portions 22A, 23A, 24A, and 25A are connected to the base portion 21.
  • the bent portions 22A and 23A are parallel on the side connected to the base portion 21.
  • bent portions 24 ⁇ / b> A and 25 ⁇ / b> A are parallel on the side connected to the base portion 21. That is, the drive arms 22 and 23 have a portion connected to the base portion 21 and extending in parallel from the base portion 21.
  • the sense arms 24 and 25 are connected to the base 21 and extend in the opposite direction from the base 21 to the drive arms 22 and 23 and have portions extending in parallel from the base 21.
  • the first sense arm 24 and the second sense arm 25 are formed in substantially opposite directions with respect to the first drive arm 22 and the second drive arm 23. That is, the first drive arm 22 and the second drive arm 23 are provided symmetrically with respect to the Y axis in the X axis direction, and the first drive arm 22 and the first sense arm 24 are in the X axis direction in the Y axis direction. With respect to the line symmetry. Similarly, the first sense arm 24 and the second sense arm 25 are provided symmetrically with respect to the Y axis in the X-axis direction, and the second drive arm 23 and the second sense arm 25 are X-directional in the Y-axis direction. It is provided in line symmetry with respect to the axis.
  • the bending portion 24 ⁇ / b> A of the first sense arm 24 includes a first substrate 26, a first lower electrode 27, a second lower electrode 28, a first piezoelectric body 29, and a second piezoelectric element. Piezoelectric body 30, first upper electrode 31, and second upper electrode 32.
  • the first lower electrode 27 and the second lower electrode 28 are formed on the first substrate 26.
  • the second lower electrode 28 is formed closer to the second sense arm 25 than the first lower electrode 27.
  • the first piezoelectric body 29 is formed on the first lower electrode 27, and the second piezoelectric body 30 is formed on the second lower electrode 28.
  • the first upper electrode 31 is formed on the first piezoelectric body 29, and the second upper electrode 32 is formed on the second piezoelectric body 30.
  • the flexible portion 25A of the second sense arm 25 includes a second substrate 33, a third lower electrode 34, a fourth lower electrode 35, a third piezoelectric body 36, and a fourth piezoelectric body 37. And a third upper electrode 38 and a fourth upper electrode 39.
  • the lower electrodes 34 and 35 are formed on the second substrate 33.
  • the fourth lower electrode 35 is formed on the side farther from the first sense arm 24 than the third lower electrode 34.
  • the piezoelectric bodies 36 and 37 are formed on the lower electrodes 34 and 35, respectively, and the upper electrodes 38 and 39 are formed on the piezoelectric bodies 36 and 37, respectively.
  • the bent portions 22A and 23A also have a similar laminated structure.
  • the base of the element 20, such as the base 21, the first substrate 26, and the second substrate 33, is formed of silicon or the like.
  • the piezoelectric bodies 29, 30, 36 and 37 are made of lead zirconate titanate (PZT) or the like.
  • PZT lead zirconate titanate
  • the base portion 21, the first substrate 26, the second substrate 33, etc., the element 20 and the piezoelectric materials 29, 30, 36, 37 are formed. You may form as one.
  • the element 20 configured as described above is connected to the drive unit 50 and the calculation unit 70 to form an angular velocity sensor as shown in FIG.
  • the output of the drive part 50 is connected to each electrode formed in the bending parts 22A and 23A.
  • each electrode of the element 20 is connected to the calculation unit 70. That is, the first lower electrode 27, the second lower electrode 28, the first upper electrode 31, and the second upper electrode 32 are connected to the output lines 27A, 28A, 31A, and 32A, respectively, and the third lower electrode 34 is connected.
  • the fourth lower electrode 35, the third upper electrode 38, and the fourth upper electrode 39 are connected to output lines 34A, 35A, 38A, and 39A, respectively.
  • Output lines 80 and 90 are provided on the output side of the arithmetic unit 70.
  • FIG. 4 is a conceptual diagram illustrating a voltage detection method in the calculation unit 70.
  • a set of the first lower electrode 27 and the first upper electrode 31 will be described as an example.
  • FIG. 5A is a perspective view showing a driving state of the element 20
  • FIG. 5B is a perspective view showing a state where an angular velocity around the Y axis is applied to the element 20
  • FIG. 5C is a state where an angular velocity around the Z axis is applied to the element 20
  • FIG. 6 shows the voltage phase of each electrode when the element 20 is driven in a state where an angular velocity around the Y axis is applied and in a state where an angular velocity around the Z axis is applied.
  • FIG. 6 shows the voltage phase of each electrode when the element 20 is driven in a state where an angular velocity around the Y axis is applied and in a state where an angular velocity around the Z axis is applied.
  • FIG. 7A is a conceptual diagram illustrating a method for detecting an angular velocity around the Y axis by the calculation unit 70
  • FIG. 7B is a conceptual diagram illustrating a method for detecting the angular velocity around the Z axis by the calculation unit 70.
  • the material constituting the substrate such as the first substrate 26 is combined with the pair of the lower electrode and the upper electrode provided on the first drive arm 22 and the second drive arm 23 from the drive unit 50 shown in FIG.
  • An AC voltage with a unique resonance frequency is applied.
  • the drive arms 22 and 23 vibrate in a direction substantially perpendicular to the direction in which the bent portions 22 ⁇ / b> A and 23 ⁇ / b> A extend from the base portion 21 in a direction parallel to the surface forming the base portion 21.
  • the sense arms 24 and 25 also vibrate in synchronization. That is, for example, the drive vibration 42 is generated in the sense arm 25 in synchronization with the drive vibration 41 of the drive arm 23.
  • the first drive arm 22 and the first sense arm 24 vibrate in the same phase
  • the second drive arm 23 and the second sense arm 25 vibrate in the same phase
  • the first drive arm 22 and the second drive arm 23 vibrate in opposite phases.
  • a current (drive current) due to this vibration is generated in the electrodes provided on the sense arms 24 and 25.
  • the phase of the output signal in each of the above states is shown in FIG.
  • the first sense arm 24 and the second sense arm 25 are driven in a direction away from each other, the first piezoelectric body 29 is compressed and the second piezoelectric body 30 is stretched. Therefore, the phase of the voltage signal of the first lower electrode 27 with respect to the first upper electrode 31 is +, and the phase of the voltage signal of the second lower electrode 28 with respect to the second upper electrode 32 is ⁇ . Similarly, + and-indicate whether the phase is the same or opposite.
  • lower 1 indicates a voltage signal of the first lower electrode 27 with respect to the first upper electrode 31.
  • Upper 4 indicates a voltage signal of the fourth upper electrode 39 with respect to the fourth lower electrode 35.
  • the leftmost column indicates the voltage signal of the electrode with respect to the pair of electrodes in each pair of the upper electrode and the lower electrode.
  • the calculating unit 70 When calculating the angular velocity around the Y axis, as shown in FIG. 7A, the calculating unit 70 first obtains the sum of the voltage output 27B of “lower 1” and the voltage output 28B of “lower 2”. On the other hand, the sum of the voltage output 34B of the “lower 3” and the voltage output 35B of the “lower 4” is obtained. Then, the difference between the two is obtained. As apparent from FIG.
  • the calculation unit 70 outputs the difference signal 80B obtained in this way from the output line 80 to an external circuit.
  • the external circuit calculates the angular velocity applied around the Y axis based on the amplitude of the difference signal 80B.
  • the calculation unit 70 may include such a function and output an electrical signal corresponding to the angular velocity.
  • Coriolis force is proportional to the angular velocity.
  • the magnitude of deflection of the sense arms 24 and 25 changes according to the Coriolis force, and a current having a magnitude corresponding to the magnitude of the deflection. Are generated from each electrode. Therefore, the angular velocity can be calculated by knowing the magnitude of the amplitude of the voltage difference signal 80B.
  • the first sense arm 24 moves to the negative side in the Z-axis direction
  • the second sense arm 25 moves to the positive side in the Z-axis direction.
  • the output amplitude of the sum of the voltage output of the first lower electrode 27 with respect to the first upper electrode 31 and the voltage output of the second lower electrode 28 with respect to the second upper electrode 32 decreases.
  • the output amplitude of the sum of the voltage output of the third lower electrode 34 to the third upper electrode 38 and the voltage output of the fourth lower electrode 35 to the fourth upper electrode 39 increases.
  • the angular velocity around the axis about the direction in which the flexures 24A and 24B, which are a part of the sense arms 24 and 25, extend from the base 21, that is, the Y direction shown in FIG. can do.
  • the calculation unit 70 when calculating the angular velocity around the Z axis, the calculation unit 70 first obtains the sum of the voltage output 31B of the upper part 1 and the voltage output 38B of the upper part 3 as shown in FIG. 7B. On the other hand, the sum of the voltage output 32B of the upper part 2 and the voltage output 39B of the upper part 4 is obtained. Then, the difference between the two is obtained. As apparent from FIG. 6, when an angular velocity is applied around the Z axis, the upper part 1 and the upper part 3 are in phase, the upper part 2 and the upper part 4 are in phase, and the upper part 1 is in antiphase. Therefore, the difference signal 90B output to the output line 90 in FIG. 3 has an amplitude four times that of a single voltage output.
  • the calculation unit 70 outputs the difference signal 90B thus obtained to the external circuit, and the external circuit calculates the angular velocity around the Z axis based on the amplitude of the difference signal 90B.
  • the calculation unit 70 may include such a function and output an electrical signal corresponding to the angular velocity.
  • the first and second sense arms 24 and 25 move to the negative side in the X axis direction. Accordingly, the output amplitude of the sum of the voltage output of the second upper electrode 32 with respect to the second lower electrode 28 and the voltage output of the fourth upper electrode 39 with respect to the fourth lower electrode 35 increases. On the other hand, the output amplitude of the sum of the voltage output of the first upper electrode 31 with respect to the first lower electrode 27 and the voltage output of the third upper electrode 38 with respect to the third lower electrode 34 decreases.
  • the angular velocity sensor according to the present embodiment can perform multi-axis detection.
  • the angular velocity around the axis with the Z direction as the axis can also be obtained as follows. That is, the arithmetic unit 70 first obtains the sum of the voltage output 28B of the lower part 2 and the voltage output 35B of the lower part 4. On the other hand, the sum of the voltage output 27B of the lower part 1 and the voltage output 34B of the lower part 3 is obtained. Then, the difference between the two is obtained. However, in this case, since the angular velocity around the Y axis and the angular velocity around the Z axis are calculated using the same signal, it is necessary to perform all calculations using an amplifier. Therefore, many amplifiers are required for the arithmetic unit 70.
  • the calculating part 70 can be comprised simply.
  • Drive current is 10 6 times the current due to the angular velocity, because the driving current can be canceled before entering into the amplifier, this arrangement is effective from the viewpoint of S / N ratio.
  • the lower electrodes 27, 28, 34, and 35 are preferably formed of platinum.
  • a platinum electrode is essential.
  • the upper electrodes 31, 32, 38, and 39 are preferably formed of gold.
  • the angular velocity is detected by finally obtaining the difference in voltage output. Therefore, occurrence of phase shift can be suppressed.
  • the material of the upper electrode and the lower electrode is not limited to this combination.
  • the upper electrodes 31, 32, 38 and 39 are used for calculation in angular velocity detection around the axis with the Z direction as an axis shown in FIG.
  • the lower electrodes 27, 28, 34, and 35 are used for calculation in angular velocity detection around an axis with the Y direction shown in FIG. 1 as an axis.
  • the upper electrodes 31, 32, 38, and 39 can be formed using gold of the same material, and the lower electrodes 27, 28, 34, and 35 can be formed of platinum of the same material. Thus, even when the lower electrodes 27, 28, 34, and 35 and the upper electrodes 31, 32, 38, and 39 are formed of different materials, the occurrence of phase shift can be suppressed.
  • the drive current is 10 6 times the current due to the angular velocity as described above.
  • the first lower electrode 27 and the second lower electrode 28 may be electrically connected on the first substrate 26.
  • the third lower electrode 34 and the fourth lower electrode 35 may be electrically connected on the second substrate 33.
  • the first lower electrode 27 and the second lower electrode 28 are integrally formed, and the third lower electrode 34 and the fourth lower electrode 35 are integrally formed.
  • the arithmetic unit 70 obtains the sum of the voltage signal of the first lower electrode 27 for the first upper electrode 31 and the voltage signal of the second lower electrode 28 for the second upper electrode 32.
  • the sum of the voltage signal of the third lower electrode 34 for the third upper electrode 38 and the voltage signal of the fourth lower electrode 35 for the fourth upper electrode 39 is obtained.
  • the difference between the two sums is obtained. Based on this difference, it is possible to detect the angular velocity around the axis with the direction in which the sense arms 24 and 25 extend from the base 21 as the axis. That is, the angular velocity around the axis with the Y direction shown in FIG. 1 as an axis can be detected. However, the angular velocity about the axis about the Y direction shown in FIG. 1 can be detected even if the same calculation is performed using the voltage signal of each corresponding upper electrode for each lower electrode.
  • the arithmetic unit 70 obtains the sum of the voltage signal of the first upper electrode 31 for the first lower electrode 27 and the voltage signal of the second upper electrode 32 for the second lower electrode 28.
  • the sum of the voltage signal of the third upper electrode 38 for the third lower electrode 34 and the voltage signal of the fourth upper electrode 38 for the fourth lower electrode 35 is obtained.
  • the difference between the two sums is obtained. Based on this difference, it is possible to detect the angular velocity around the axis with the direction in which the sense arms 24 and 25 extend from the base 21 as the axis.
  • the calculation unit 70 may be configured in this way.
  • the arithmetic unit 70 calculates the sum of the voltage signal of the second lower electrode 28 for the second upper electrode 31 and the voltage signal of the fourth lower electrode 35 for the fourth upper electrode 39, and the first upper electrode 31.
  • the difference between the voltage signal of the first lower electrode 27 for the electrode 31 and the sum of the voltage signal of the third lower electrode 34 for the third upper electrode 38 may be calculated. From this difference, it is also possible to detect an angular velocity around an axis about the direction perpendicular to the plane forming the base 21, that is, the Z direction shown in FIG.
  • the angular velocity around the axis with the Y direction as the axis and the angular velocity around the axis with the Z direction as the axis are obtained separately using the upper electrode for the lower electrode and the upper electrode for the lower electrode, respectively. . Therefore, it is possible to accurately detect the biaxial angular velocity while suppressing the influence of the drive current.
  • 3 may be configured not to be included in the angular velocity sensor but to provide a terminal electrically connected to each drive arm and to supply a drive signal from an external circuit to each drive arm.
  • the angular velocity sensor of the present invention can detect the angular velocity around the axis with the direction in which the first and second sense arms extend from the base as an axis. This angular velocity sensor is useful in automobile control, car navigation devices, digital cameras, and the like.

Abstract

Selon la présente invention, un premier bras de détection (24) comporte un premier substrat (26), une première et une deuxième électrode inférieure (27, 28) formées sur le premier substrat, un premier et un deuxième corps piézo-électrique (29, 30) formés sur la première et la deuxième électrode inférieure, ainsi qu'une première et une deuxième électrode supérieure (31, 32) formées sur le premier et le deuxième corps piézo-électrique. Un second bras de détection (25) comporte un second substrat (33), une troisième et une quatrième électrode inférieure (34, 35) formées sur le second substrat, un troisième et un quatrième corps piézo-électrique (36, 37) formés sur la troisième et la quatrième électrode inférieure, ainsi qu'une troisième et une quatrième électrode supérieure (38, 39) formées sur le troisième et le quatrième corps piézo-électrique. Une unité de calcul calcule la différence entre la somme des tensions de la première et de la deuxième électrode inférieure (27, 28) et la somme des tensions de la troisième et de la quatrième électrode inférieure (34, 35). Sur la base de la différence obtenue, il est possible d'obtenir une vitesse angulaire autour de l'axe avec la direction dans laquelle le premier et le second bras de détection (24, 25) s'étendent depuis une section de base servant d'axe.
PCT/JP2009/007043 2008-12-26 2009-12-21 Capteur de vitesse angulaire WO2010073576A1 (fr)

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JP2008332553 2008-12-26

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013076942A1 (fr) 2011-11-22 2013-05-30 パナソニック株式会社 Capteur de vitesse angulaire et élément de détection utilisé dans celui-ci

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62217115A (ja) * 1986-03-19 1987-09-24 Tokyo Keiki Co Ltd ジヤイロ装置
WO2008023566A1 (fr) * 2006-08-21 2008-02-28 Panasonic Corporation Capteur de vitesse angulaire
WO2008035649A1 (fr) * 2006-09-22 2008-03-27 Panasonic Corporation Capteur de force d'inertie

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62217115A (ja) * 1986-03-19 1987-09-24 Tokyo Keiki Co Ltd ジヤイロ装置
WO2008023566A1 (fr) * 2006-08-21 2008-02-28 Panasonic Corporation Capteur de vitesse angulaire
WO2008035649A1 (fr) * 2006-09-22 2008-03-27 Panasonic Corporation Capteur de force d'inertie

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013076942A1 (fr) 2011-11-22 2013-05-30 パナソニック株式会社 Capteur de vitesse angulaire et élément de détection utilisé dans celui-ci
US9400180B2 (en) 2011-11-22 2016-07-26 Panasonic Intellectual Property Management Co., Ltd. Angular velocity sensor and detection element used therein

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