WO2010064321A1 - Pompe à vide, pompe turbo-moléculaire, et filet de protection - Google Patents

Pompe à vide, pompe turbo-moléculaire, et filet de protection Download PDF

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Publication number
WO2010064321A1
WO2010064321A1 PCT/JP2008/072171 JP2008072171W WO2010064321A1 WO 2010064321 A1 WO2010064321 A1 WO 2010064321A1 JP 2008072171 W JP2008072171 W JP 2008072171W WO 2010064321 A1 WO2010064321 A1 WO 2010064321A1
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum pump
net
pump according
protective net
net plate
Prior art date
Application number
PCT/JP2008/072171
Other languages
English (en)
Japanese (ja)
Inventor
関田　幸照
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to PCT/JP2008/072171 priority Critical patent/WO2010064321A1/fr
Priority to JP2010541180A priority patent/JP5397385B2/ja
Publication of WO2010064321A1 publication Critical patent/WO2010064321A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
    • F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a turbo molecular pump and a vacuum pump provided with a protective net formed by etching.
  • a protection net is provided at the air inlet so that foreign matter (wafer fragments, bolts, etc.) does not enter the pump (for example, Reference 1).
  • the protective net is a thin plate in which a large number of hexagonal or square meshes are formed, and in order to set the size of the mesh so as to prevent the fall of the foreign matter and to prevent the reduction of the exhaust speed, The line width of the part is set very narrow. Therefore, it is difficult to form the net portion by machining, and a mesh is usually formed by etching.
  • the vacuum pump according to the present invention has a rotor rotating at high speed, an inlet port formed, a pump casing accommodating the rotor, an inlet port, and a plurality of net plate members having a plurality of openings etched. And an integrated protection net.
  • the net plate material is made of metal such as aluminum or stainless steel.
  • the beam part of the net plate material subjected to the etching process has a cross-sectional shape having a different width in the thickness direction.
  • the protective net may be formed by integrally bonding a plurality of net plate materials by diffusion bonding.
  • the vacuum pump may be a turbo molecular pump provided with a rotating body on which a plurality of rotating blades are formed, and fixed blades alternately arranged in the rotation axis direction with respect to the rotating blades.
  • FIG. 1 is a cross-sectional view of a rotary vacuum pump according to an embodiment of the present invention.
  • FIG. 6 is a plan view of a protection net 30.
  • A An enlarged view of the mesh 300, (b) a BB sectional view, and (c) a sectional view of a conventional protective net.
  • FIG. 1 is a view showing an embodiment of a vacuum pump according to the present invention, and is a cross-sectional view of a magnetic bearing type turbo molecular pump 1.
  • the turbo molecular pump shown in FIG. 1 has a high gas load including a turbo molecular pump unit including a plurality of stages of moving blades 19 and a plurality of stages of stator blades 21, and a screw groove pump unit including a screw rotor 20 and a screw stator 23. It is a corresponding turbo molecular pump.
  • a plurality of stages of moving blades 19 and a screw rotor 20 are formed on a rotor 4, and the rotor 4 is fixed to a rotating shaft 8 rotatably provided in a spindle housing 24.
  • an upper radial sensor 13 an upper radial electromagnet 9, a motor stator 12, a lower radial electromagnet 10, a lower radial sensor 14 and a thrust electromagnet 11 are provided in this order from the upper side in the figure.
  • the rotating shaft 8 is supported in a noncontacting manner by the radial electromagnets 9 and 10 and the thrust electromagnet 11, and is rotationally driven by a DC motor constituted by the motor stator 12 and a motor rotor on the rotating shaft side.
  • the floating position of the rotating shaft 8 is detected by radial sensors 13 and 14 provided corresponding to the radial electromagnets 9 and 10 and the thrust electromagnet 11 and a thrust sensor 15.
  • Protective bearings 16 and 17 provided on the upper and lower sides of the rotating shaft 8 are mechanical bearings and support the rotating shaft 8 when the magnetic bearings are not operating, and limit the floating position of the rotating shaft 8 Function.
  • a plurality of stationary blades 21 and a screw stator 23 are provided on the base 6 in the casing 7.
  • the stationary vanes 21 are held on the base 6 so as to be sandwiched by ring-shaped spacers 22 at the top and bottom, and the casing 7 is bolted to the base 6 so that the vanes 21 and the spacer 22 are at the upper end of the casing 7 It is fixed between the and the base 6.
  • each stationary blade 21 is positioned at a predetermined position between the moving blades 19.
  • the screw stator 23 is bolted onto the base 6.
  • the gas molecules flowing from the intake port 7a are knocked down by the turbo molecular pump unit 2 in the figure and compressed and exhausted toward the downstream side.
  • the screw rotor 20 is provided in proximity to the inner circumferential surface of the screw stator 23, and a spiral groove is formed on the inner circumferential surface of the screw stator 23.
  • exhaust by viscous flow is performed by the spiral groove of the screw stator 23 and the screw rotor 20 rotating at high speed.
  • the gas molecules compressed by the turbo molecular pump unit 2 are further compressed by the thread groove pump unit 3 and discharged from the exhaust port 6a.
  • the intake port 7a of the casing 7 is provided with a protective net 30 for preventing the entry of foreign matter from the apparatus side.
  • the attachment of the protective net 30 to the casing 7 is performed by engaging the claw formed on the protective net 30 with the hole on the casing 7 side or pressing the periphery of the protective net 30 with a C-shaped ring.
  • FIG. 2 is a plan view of the protective net 30, and a mesh 300 which is a hexagonal mesh is formed on the entire surface of a region A surrounded by a two-dot chain line.
  • the protection net 30 is formed by, for example, stacking three net members 30a (see FIG. 3B).
  • a pair of positioning holes 302 for forming the net members 30a is formed.
  • the shape of the mesh 300 is not limited to a hexagon.
  • FIG. 3 is a view for explaining the protection net 30, (a) is an enlarged view of a plurality of meshes 300 in the central part of FIG. 2, and (b) is a view showing a cross section of the beam 301 taken along BB. It is. Further, FIG. 3C shows a cross section of a beam portion of a conventional protective net.
  • a metal plate of thickness t is etched to form a mesh 300.
  • Materials such as stainless steel and aluminum are used for the metal plate.
  • W is the width dimension (design value) of the beam 301.
  • the diameter dimension of the mesh 300 is determined so that foreign matter can not pass through, and the width dimension W of the beam 301 is set so as to satisfy the required aperture ratio.
  • the width dimension W is set to, for example, about 0.3 mm.
  • the thickness t is determined in terms of strength.
  • a leak operation may be performed in which a gas at atmospheric pressure is introduced to the pump inlet side or the pump outlet side.
  • a pressure corresponding to the pressure difference between the front and back acts on the entire surface of the protective net 30, the thickness t is set so as to withstand such use.
  • symbol C of FIG.3 (c) has shown the sag by etching.
  • the width dimension increases toward the lower side of the cross section due to the occurrence of the sag C.
  • the sag C at the corner of the beam 301 appears notably.
  • the dimension L in the width direction of the sag C is about 25 to 40% of the plate thickness t. Therefore, assuming that the plate thickness t is 1 mm, the dimension L is approximately 0.25 to 0.4 mm, which is approximately the same as the width dimension W of the beam 301 (0.3 mm in the above example), and the aperture ratio decreases The decrease in exhaust speed due to
  • a plurality of net members 30a on which the mesh 300 is formed by etching are stacked to form an integral protective net 30, thereby reducing the influence of sagging. I try to suppress. Since three net members 30a of the same thickness are used in the example of FIG. 3 (b), when the thickness of the protective net 30 is t, the thickness of each net member 30a can be held to t / 3. . Therefore, the dimension of the portion of the sag C in each net member 30a is 1/3, that is, L / 3 when using the plate material of thickness t.
  • a method using an adhesive, a method of welding by spot welding or the like, a diffusion bonding method, or the like can be used as a method of overlapping and integrally forming the etched net members 30a.
  • the bars are passed through the positioning holes 302 to overlap so that the positions of the upper and lower beams 301 coincide.
  • the protection net 30 is integrated by suitable diffusion bonding.
  • Diffusion bonding is a method in which a base material is brought into close contact and pressurized under temperature conditions lower than the melting point of the base material, and bonding is performed using diffusion of atoms generated between bonding surfaces.
  • the bonding interface is recrystallized due to the diffusion of atoms between materials, and bonding is performed at the atomic level, so that the adhesion is good, and the same strength as in the case of forming a single plate material can be obtained.
  • the net member 30a does not peel off.
  • they may be integrated by adhesion, welding or the like. In the case of spot welding, there are disadvantages such as deformation caused by welding and differences in strength between the welded portion and the non-welded portion.
  • bonding there is a concern about gas release from the adhesive.
  • the protective net 30 used in the vacuum pump according to the present embodiment has a plurality of net members 30a on which a plurality of meshes 300 are formed by etching, which are integrally formed.
  • the influence of C can be reduced.
  • the decrease in the aperture ratio of the protective net 30 due to the occurrence of the dripping C can be suppressed to a low level.
  • by bonding the laminated net members 30a by diffusion bonding to integrate them there is no influence on vacuum due to gas release and protection having the same strength as in the case of using a plate material of the same thickness.
  • the net 30 can be obtained.
  • the protection net used in the turbo molecular pump has been described as an example, but a vacuum pump including a protection net that rotates at high speed and has a protection net preventing foreign matter mixing, such as a drag pump Can also be applied. Further, the present invention is not limited to the above embodiment as long as the features of the present invention are not impaired.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

L'invention concerne une pompe à vide comprenant un corps rotatif tournant à haute vitesse, un carter de pompe comportant un orifice d'aspiration d'air et englobant le corps rotatif, et un filet de protection attaché à l'orifice d'aspiration et formé en laminant intégralement une pluralité de plaques comportant chacune des ouvertures gravées. L'épaisseur d'une feuille de plaque peut être réduite en laminant les plaques, et l'effet de rétrécissement causé par le processus de gravure peut aussi être réduit. Par conséquent, la réduction du taux d'ouverture du filet protecteur à cause de la gravure peut être éliminée.
PCT/JP2008/072171 2008-12-05 2008-12-05 Pompe à vide, pompe turbo-moléculaire, et filet de protection WO2010064321A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2008/072171 WO2010064321A1 (fr) 2008-12-05 2008-12-05 Pompe à vide, pompe turbo-moléculaire, et filet de protection
JP2010541180A JP5397385B2 (ja) 2008-12-05 2008-12-05 真空ポンプ、ターボ分子ポンプおよび保護ネット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2008/072171 WO2010064321A1 (fr) 2008-12-05 2008-12-05 Pompe à vide, pompe turbo-moléculaire, et filet de protection

Publications (1)

Publication Number Publication Date
WO2010064321A1 true WO2010064321A1 (fr) 2010-06-10

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PCT/JP2008/072171 WO2010064321A1 (fr) 2008-12-05 2008-12-05 Pompe à vide, pompe turbo-moléculaire, et filet de protection

Country Status (2)

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JP (1) JP5397385B2 (fr)
WO (1) WO2010064321A1 (fr)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014049728A1 (fr) * 2012-09-26 2014-04-03 株式会社島津製作所 Filet de protection pour pompe à vide, procédé de fabrication de celui-ci et pompe à vide
JP2021526297A (ja) * 2018-05-31 2021-09-30 マイクロマス ユーケー リミテッド ベンチトップ飛行時間型質量分析計
US20210355966A1 (en) * 2018-10-31 2021-11-18 Edwards Japan Limited Vacuum pump, protective net, and contact part
US11355331B2 (en) 2018-05-31 2022-06-07 Micromass Uk Limited Mass spectrometer
US11367607B2 (en) 2018-05-31 2022-06-21 Micromass Uk Limited Mass spectrometer
US11373849B2 (en) 2018-05-31 2022-06-28 Micromass Uk Limited Mass spectrometer having fragmentation region
US11437226B2 (en) 2018-05-31 2022-09-06 Micromass Uk Limited Bench-top time of flight mass spectrometer
US11476103B2 (en) 2018-05-31 2022-10-18 Micromass Uk Limited Bench-top time of flight mass spectrometer
US11538676B2 (en) 2018-05-31 2022-12-27 Micromass Uk Limited Mass spectrometer
US11621154B2 (en) 2018-05-31 2023-04-04 Micromass Uk Limited Bench-top time of flight mass spectrometer
US12009193B2 (en) 2018-05-31 2024-06-11 Micromass Uk Limited Bench-top Time of Flight mass spectrometer
US12027359B2 (en) 2018-05-31 2024-07-02 Micromass Uk Limited Bench-top Time of Flight mass spectrometer

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02229512A (ja) * 1989-12-08 1990-09-12 Wada Shoichi 濾材用多孔板の鍍金処理製造方法
JP2002316013A (ja) * 2001-04-18 2002-10-29 Minoru Kitano 濾過フィルター
JP2006299968A (ja) * 2005-04-21 2006-11-02 Shimadzu Corp 異物侵入防止板、回転真空ポンプおよび真空システム

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2963733B2 (ja) * 1990-06-29 1999-10-18 株式会社東芝 井形格子の製造方法
JPH04300308A (ja) * 1991-03-22 1992-10-23 Nhk Spring Co Ltd 樹脂供給装置のブレーカプレート
JPH10118569A (ja) * 1996-10-19 1998-05-12 Ricoh Co Ltd 微細粒子分級用フィルター及びその製造方法
JP2006017421A (ja) * 2004-07-05 2006-01-19 Fuji Electric Holdings Co Ltd 冷凍機の熱交換器
US7415895B2 (en) * 2005-08-26 2008-08-26 Smc Kabushiki Kaisha Flow meter with a rectifying module having a plurality of mesh members

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02229512A (ja) * 1989-12-08 1990-09-12 Wada Shoichi 濾材用多孔板の鍍金処理製造方法
JP2002316013A (ja) * 2001-04-18 2002-10-29 Minoru Kitano 濾過フィルター
JP2006299968A (ja) * 2005-04-21 2006-11-02 Shimadzu Corp 異物侵入防止板、回転真空ポンプおよび真空システム

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014049728A1 (fr) * 2012-09-26 2014-04-03 株式会社島津製作所 Filet de protection pour pompe à vide, procédé de fabrication de celui-ci et pompe à vide
US9976572B2 (en) 2012-09-26 2018-05-22 Shimadzu Corporation Vacuum pump protection net, method for manufacturing the same, and vacuum pump
US11476103B2 (en) 2018-05-31 2022-10-18 Micromass Uk Limited Bench-top time of flight mass spectrometer
JP7039736B2 (ja) 2018-05-31 2022-03-22 マイクロマス ユーケー リミテッド ベンチトップ飛行時間型質量分析計
US11355331B2 (en) 2018-05-31 2022-06-07 Micromass Uk Limited Mass spectrometer
US11367607B2 (en) 2018-05-31 2022-06-21 Micromass Uk Limited Mass spectrometer
US11373849B2 (en) 2018-05-31 2022-06-28 Micromass Uk Limited Mass spectrometer having fragmentation region
US11437226B2 (en) 2018-05-31 2022-09-06 Micromass Uk Limited Bench-top time of flight mass spectrometer
JP2021526297A (ja) * 2018-05-31 2021-09-30 マイクロマス ユーケー リミテッド ベンチトップ飛行時間型質量分析計
US11538676B2 (en) 2018-05-31 2022-12-27 Micromass Uk Limited Mass spectrometer
US11621154B2 (en) 2018-05-31 2023-04-04 Micromass Uk Limited Bench-top time of flight mass spectrometer
US11879470B2 (en) 2018-05-31 2024-01-23 Micromass Uk Limited Bench-top time of flight mass spectrometer
US12009193B2 (en) 2018-05-31 2024-06-11 Micromass Uk Limited Bench-top Time of Flight mass spectrometer
US12027359B2 (en) 2018-05-31 2024-07-02 Micromass Uk Limited Bench-top Time of Flight mass spectrometer
US20210355966A1 (en) * 2018-10-31 2021-11-18 Edwards Japan Limited Vacuum pump, protective net, and contact part

Also Published As

Publication number Publication date
JP5397385B2 (ja) 2014-01-22
JPWO2010064321A1 (ja) 2012-05-10

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