WO2010010956A1 - 薄膜太陽電池の製造装置および製造方法、ならびに薄膜太陽電池 - Google Patents
薄膜太陽電池の製造装置および製造方法、ならびに薄膜太陽電池 Download PDFInfo
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- WO2010010956A1 WO2010010956A1 PCT/JP2009/063297 JP2009063297W WO2010010956A1 WO 2010010956 A1 WO2010010956 A1 WO 2010010956A1 JP 2009063297 W JP2009063297 W JP 2009063297W WO 2010010956 A1 WO2010010956 A1 WO 2010010956A1
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- power generation
- substrate
- solar cell
- generation layer
- forming
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- 239000010409 thin film Substances 0.000 title claims abstract description 99
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 58
- 238000000034 method Methods 0.000 title claims description 43
- 239000010408 film Substances 0.000 claims abstract description 207
- 239000000758 substrate Substances 0.000 claims abstract description 198
- 239000004065 semiconductor Substances 0.000 claims abstract description 21
- 239000010410 layer Substances 0.000 claims description 168
- 238000010248 power generation Methods 0.000 claims description 102
- 230000015572 biosynthetic process Effects 0.000 claims description 66
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 38
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 27
- 229910052742 iron Inorganic materials 0.000 claims description 19
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 18
- 229910021424 microcrystalline silicon Inorganic materials 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 14
- 230000007797 corrosion Effects 0.000 claims description 10
- 238000005260 corrosion Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000007747 plating Methods 0.000 claims description 10
- 239000011787 zinc oxide Substances 0.000 claims description 9
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 6
- 229910003437 indium oxide Inorganic materials 0.000 claims description 6
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052709 silver Inorganic materials 0.000 claims description 6
- 239000004332 silver Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 5
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims description 5
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 5
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 5
- 238000005452 bending Methods 0.000 claims description 4
- 239000011241 protective layer Substances 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 3
- 229910001887 tin oxide Inorganic materials 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 description 81
- 239000002184 metal Substances 0.000 description 81
- 238000005755 formation reaction Methods 0.000 description 63
- 239000007789 gas Substances 0.000 description 42
- 230000008569 process Effects 0.000 description 22
- 238000009826 distribution Methods 0.000 description 20
- 238000004804 winding Methods 0.000 description 20
- 238000000151 deposition Methods 0.000 description 10
- 230000008021 deposition Effects 0.000 description 9
- 238000005096 rolling process Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229920000840 ethylene tetrafluoroethylene copolymer Polymers 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000000638 solvent extraction Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000037303 wrinkles Effects 0.000 description 2
- 229920006358 Fluon Polymers 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- -1 ethylene-tetrafluoroethylene Chemical group 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 239000004811 fluoropolymer Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910021423 nanocrystalline silicon Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001782 photodegradation Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
- C23C16/5096—Flat-bed apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/202—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table
- H01L31/204—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table including AIVBIV alloys, e.g. SiGe, SiC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/206—Particular processes or apparatus for continuous treatment of the devices, e.g. roll-to roll processes, multi-chamber deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the present invention relates to a thin-film solar cell manufacturing apparatus and a thin-film solar cell manufacturing method for manufacturing a thin-film solar cell by performing a film formation process on the substrate wound around a roll.
- Amorphous silicon (a-Si) solar cells are attracting attention as solar cells that can solve the shortage of raw materials because the amount of silicon (Si) used as a raw material can be significantly reduced compared to bulk Si solar cells. .
- a Si microcrystalline thin film solar cell in which the a-Si film as the power generation layer is replaced with a microcrystalline Si film (nc-Si) in order to eliminate the photodegradation of the a-Si. It has been known.
- One of the thin film solar cell manufacturing methods described above is a so-called roll-to-roll method in which a power generation layer is formed on a moving substrate while winding the substrate wound on a roll onto the other roll.
- Roll-to-Roll system is known (see Patent Document 1).
- the winding of the substrate is temporarily stopped every time the film formation region of the substrate is located in the film formation chamber, and the film formation process is performed on the stopped substrate.
- a so-called stepping roll method is known (see Patent Document 2).
- manufacturing methods aimed at mass production are strongly required to reduce the cost required for conversion efficiency.
- the roll-to-roll method that does not stop the winding of the substrate during the manufacturing process is regularly performed. Compared to the stepping roll method that stops winding, it is expected to achieve higher productivity.
- the power generation layer is formed by sequentially passing through a plurality of film formation chambers for forming the semiconductor layers by a substrate that is moved by the rotation of the roll. At this time, for a semiconductor layer having a slow film formation rate or a semiconductor layer having a large film thickness, it is necessary to increase the film formation time by the slow film formation rate or the thick film thickness.
- the film forming time is selectively increased for a single semiconductor layer.
- the deposition chamber for depositing the semiconductor layer must be elongated along the transport direction.
- the wavelength of the high frequency fed to the electrode is significantly shorter than the electrode size. Therefore, a standing wave is formed on the electrode. As a result, it is difficult to obtain a uniform plasma due to the bias of the voltage distribution due to the standing wave, and as a result, the film characteristics in each semiconductor layer may be non-uniform.
- the present invention has been made in view of the above problems, and the object thereof is a thin film solar in which uniformity of film characteristics is improved when a film is formed on the substrate while winding the substrate wound on a roll. It is providing the manufacturing apparatus of a battery, the manufacturing method of a thin film solar cell, and a thin film solar cell.
- the thin-film solar cell manufacturing apparatus of the present invention includes a pair of rolls provided in a vacuum chamber, and rotates the pair of rolls to transport a substrate from one roll to the other roll, and the pair of rolls
- a plurality of film forming chambers that are partitioned between the rolls along the transport direction of the substrate, and a semiconductor layer is formed on the substrate in each of the plurality of film forming chambers, and a stacked body of the plurality of semiconductor layers
- a power generation layer forming portion for forming a power generation layer wherein each of the plurality of film forming chambers includes a plurality of plate application electrodes arranged along the transport direction so as to face the substrate,
- Each of the plurality of flat plate application electrodes has a feeding end to which high frequency power in the VHF region is fed, and when the wavelength of the high frequency power is ⁇ , it is between the edge of the flat plate application electrode and the feeding end. Is shorter than ⁇ / 4 in the direction perpendicular to the conveying direction. It is characterized by that
- the distance between the open end, which is the edge of the flat plate application electrode, and the feeding end is shorter than ⁇ / 4 in the direction perpendicular to the transport direction (vertical direction).
- the standing wave is more easily formed in the transport direction in the flat plate application electrode than in the vertical direction
- the bias of the voltage distribution due to the standing wave in the transport direction that is, the bias of the film forming speed in the transport direction is
- the substrate is transported along the transport direction, it is easily canceled. Therefore, in each film forming chamber, since a plurality of flat plate application electrodes are arranged in the transport direction, the uniformity of film characteristics can be improved regardless of the length in the transport direction.
- a plurality of long cylindrical recesses are formed on the surface of the flat plate application electrode, and a film is formed on the bottom surface of each recess with a width smaller than the short side of the recess (that is, smaller than the diameter of the recess). It is preferable to form a gas supply part.
- the film forming gas is ejected from the opening of the film forming gas supply section of each recess, high density plasma is generated uniformly and stably in the plane of the high frequency electrode and the film forming gas is efficiently decomposed. be able to. Accordingly, the uniformity of film characteristics can be improved and high-speed film formation is possible.
- a distance between the edge of the flat plate application electrode and the feeding end is shorter than ⁇ / 2 in the transport direction.
- the formation of standing waves is reduced also in the transport direction in the flat plate application electrode.
- a distance between an edge of the flat plate application electrode and the feeding end is greater than ⁇ / 4 in a plane of the flat plate application electrode including the transport direction. short.
- the substrate transport unit includes a pair of first and second rolls, each of which is a pair of rolls, and the power generation layer forming unit includes the first and second roll pairs.
- the electrode or the flat plate ground electrode is an electrode that is disposed between a pair of substrates conveyed by the first and second roll pairs and is common to the pair of substrates.
- the configuration of the manufacturing apparatus can be simplified in order to improve the productivity of the thin film solar cell.
- the plurality of film forming chambers are partitioned by a gas curtain between the pair of rolls, and the substrate transport unit is configured such that the substrate on the one roll is the other substrate. The pair of rolls are continuously rotated until they are wound around the roll.
- the thin-film solar cell manufacturing apparatus further includes one flat ground electrode that is common to the plurality of flat plate application electrodes so as to face the plurality of flat plate application electrodes adjacent to each other in the transport direction.
- each of the plurality of film formation chambers further includes a plurality of second flat plate application electrodes arranged along the transport direction so as to face the substrate.
- the second flat plate application electrode is spaced apart from the plurality of flat plate application electrodes in a direction perpendicular to the transport direction.
- the two electrodes arranged in the vertical direction indicate that the electrode is insufficient with respect to the width of the substrate. It can prevent suitably.
- the method of manufacturing a thin film solar cell of the present invention is such that a pair of rolls provided in a vacuum chamber is rotated to convey a substrate from one roll to the other roll, while the substrate is being conveyed, Forming a power generation layer that is a stacked body of a plurality of semiconductor layers in a plurality of film formation chambers partitioned along the transport direction of the substrate between, and forming the power generation layer includes: Applying high frequency power in a VHF region to a plurality of flat plate application electrodes arranged along the transport direction so as to face each other, wherein the high frequency power is fed to each of the plurality of flat plate application electrodes.
- the wavelength of the high-frequency power is ⁇
- the distance between the edge of the flat plate application electrode and the feeding end is set to be shorter than ⁇ / 4 in the direction perpendicular to the transport direction. ing.
- the distance between the open end, which is the edge of the flat plate application electrode, and the feeding end is shorter than ⁇ / 4 in the direction perpendicular to the transport direction (vertical direction).
- the standing wave is more easily formed in the transport direction in the flat plate application electrode than in the vertical direction
- the bias of the voltage distribution due to the standing wave in the transport direction that is, the bias of the film forming speed in the transport direction is
- the substrate is transported along the transport direction, it is easily canceled. Therefore, in each film forming chamber, since a plurality of flat plate application electrodes are arranged in the transport direction, the uniformity of film characteristics can be improved regardless of the length in the transport direction.
- a distance between the edge of the flat plate application electrode and the feeding end is set to be shorter than ⁇ / 2 in the transport direction.
- the formation of standing waves is reduced also in the transport direction of the flat plate application electrode.
- the substrate is an iron material having a thickness of 0.05 mm to 0.2 mm covered with a corrosion-resistant plating film, and the substrate includes zinc oxide, indium oxide, And a reflective electrode layer in which at least one of tin oxide is laminated on one of a silver thin film and an aluminum thin film.
- the base material of the substrate is iron excellent in thermal conductivity and conductivity, even if a voltage distribution bias is formed in the flat plate application electrode, Thermal bias can be alleviated.
- the surface of the substrate is covered with a corrosion-resistant plating film, the range can be expanded in designing film formation conditions such as film formation gas species, film formation temperature, and film formation pressure.
- substrate is a thin plate using highly versatile iron, the cost reduction of a thin film solar cell can also be achieved. And if it is a board
- the winding can be performed smoothly. Furthermore, since the reflective electrode layer which is a thin film is used as the reflective electrode, the material cost required for the reflective electrode can be suppressed, and further cost reduction of the thin film solar cell can be achieved.
- forming the power generation layer includes forming a first power generation layer from amorphous silicon germanium, forming a second power generation layer from amorphous silicon germanium, and from amorphous silicon. Forming a third power generation layer, wherein the first to third power generation layers are stacked in order from the substrate side, and a band gap of the first power generation layer is larger than a band gap of the second power generation layer narrow.
- forming the power generation layer includes forming the first power generation layer from microcrystalline silicon, forming the second power generation layer from microcrystalline silicon, and forming from amorphous silicon. Forming a third power generation layer, wherein the first to third power generation layers are stacked in order from the substrate side, and a voltage is amplified by the first power generation layer and the second power generation layer.
- forming the power generation layer includes forming the first power generation layer from microcrystalline silicon and forming the second power generation layer from amorphous silicon, The first and second power generation layers are stacked in order from the substrate side.
- forming the power generation layer includes forming the first power generation layer from microcrystalline silicon, forming the second power generation layer from amorphous silicon, and the first power generation. Forming a zinc oxide thin film between the layer and the second power generation layer.
- forming the power generation layer includes forming the first power generation layer from microcrystalline silicon, forming the second power generation layer from amorphous silicon, and the first power generation. Forming one of a silicon oxide thin film and a titanium oxide thin film with a thickness of 10 nm to 100 nm between the layer and the second power generation layer.
- the method for manufacturing the thin-film solar cell further includes bending an end portion of the substrate along the transport direction after forming the power generation layer.
- the mechanical strength of the substrate can be increased by bending the end portion of the substrate.
- the thickness of the substrate can be reduced in the manufacturing process of the thin-film solar cell, and thus the low-cost of the thin-film solar cell. Can also be achieved.
- a flat plate ground electrode that functions as a heating source is provided opposite to the plurality of flat plate application electrodes with the substrate interposed therebetween, and a gap between the flat plate ground electrode and the substrate is provided.
- the substrate is transported while being held at 0.05 mm to 1 mm.
- the heating efficiency for the substrate can be improved and the heat distribution on the substrate can be made uniform, and mechanical damage to the substrate due to friction between the substrate and the plate ground electrode can be avoided. it can.
- the thin film solar cell of the present invention is manufactured using any one of the above-described manufacturing methods, and includes the substrate made of an iron substrate having a thickness of 0.05 mm to 0.2 mm covered with a corrosion-resistant plating film, and the substrate A reflective electrode layer laminated thereon, the power generation layer laminated on the reflective electrode layer, a transparent electrode layer laminated on the power generation layer, and a protective layer laminated on the transparent electrode layer Prepare.
- the base material of the substrate is iron excellent in thermal conductivity and conductivity, even if a bias of voltage distribution is formed in the flat plate application electrode, Thermal bias can be alleviated. Further, since the surface of the substrate is covered with a corrosion-resistant plating film, the range can be expanded in designing film formation conditions such as film formation gas species, film formation temperature, and film formation pressure. And since the board
- a thin-film solar cell manufacturing apparatus and a thin-film solar cell that improve the uniformity of film characteristics when a film is formed on the substrate while winding the substrate wound on a roll. And a thin film solar cell.
- (A)-(d) is sectional drawing which shows the partial cross-section of a thin film solar cell, respectively.
- FIGS. 1 and 2 are views showing a laminated structure of thin film solar cells
- FIG. 3 is a view schematically showing a film forming apparatus which is a manufacturing apparatus for thin film solar cells, as viewed from the vertical direction.
- FIG. 4 is a diagram schematically showing the arrangement of the film forming chambers in the film forming chamber
- FIGS. 5 and 6 are diagrams schematically showing the arrangement of the electrodes in the film forming chamber as viewed from the vertical direction. It is the figure seen from the figure and the conveyance direction.
- the thin-film solar cell 10 is a laminate in which a reflective electrode layer 11, a power generation layer 12, a transparent electrode layer 13, and a protective layer 14 are sequentially laminated on the upper side (front side) of a metal substrate S.
- the metal substrate S is a sheet substrate formed in a strip shape, and is a large substrate whose width in the minor axis direction is, for example, 1 m.
- a metal having high versatility for example, having a thickness of 0. 0 is used to alleviate electrical and thermal bias applied to the substrate during the manufacturing process and to reduce the cost of the thin-film solar cell 10.
- a substrate based on an iron material of 05 mm to 0.2 mm is used.
- the surface of the metal substrate S is subjected to a wet plating process such as nickel having high corrosion resistance to make the metal substrate S corrosion resistant. It is preferable to cover with a plating film.
- the thickness of the metal substrate S is 0.05 mm in order to suppress wrinkling of the substrate due to the winding of the metal substrate S wound on the roll. It is preferable that the thickness be as described above, and it is preferable that the thickness be 0.2 mm or less in order to smoothly perform the winding.
- a pair of bent portions Sa having an L-shaped cross section bent to the side (back side) facing the reflective electrode layer 11 is formed.
- the pair of bent portions Sa are formed over the entire length of the metal substrate S in order to increase the rigidity of the metal substrate S.
- the bent portions Sa are formed, for example, on the metal substrate S by the reflective electrode layer 11 and the power generation layer 12. Then, both end portions in the short axis direction of the metal substrate S are bent by 1 mm. Thereby, the mechanical strength of the metal substrate S which is the said thin plate can be improved, and by extension, the mechanical strength of the thin film solar cell 10 can be improved.
- the reflective electrode layer 11 is an electrode layer for irradiating the power generation layer 12 with the light transmitted through the power generation layer 12 again.
- a single layer electrode made of any one of silver, zinc oxide, and indium oxide is used.
- a stacked electrode in which at least one of zinc oxide, indium oxide, and tin oxide is stacked on one of a silver thin film and an aluminum thin film can be used.
- silver is used as the reflective electrode layer 11
- either one of the sputtering method and the wet plating method is applied to the metal substrate S, and when zinc oxide or indium oxide is used, the metal substrate S is used.
- the atmospheric pressure CVD method By applying the atmospheric pressure CVD method to the above, these silver, zinc oxide, and indium oxide can be formed.
- the structure which makes this reflective electrode layer 11 a texture structure is preferable.
- the power generation layer 12 is a laminated film composed of a plurality of semiconductor layers such as amorphous silicon (a-Si) and amorphous silicon-germanium (a-SiGe), and is an n layer that is an n-type semiconductor layer and an i-type semiconductor layer.
- a so-called pin structure in which an i-layer and a p-layer that is a p-type semiconductor layer are sequentially stacked is used as a unit cell.
- the power generation layer 12 for example, a tandem structure or a triple structure in which the unit cells having different absorption spectra are stacked in multiple stages can be used in order to efficiently absorb and photoelectrically convert light in different wavelength bands.
- the configuration of the power generation layer 12 is arranged in order from the metal substrate S side in the first power generation layer / second power generation layer / third power generation layer or first power generation layer / second power generation layer, or first power generation layer /
- the intermediate layer / second power generation layer the following laminated structure can be given as shown in FIGS. A-SiGe (pin) / a-SiGe (pin) / a-Si (pin):
- This first power generation layer has a higher Ge ratio than the second electrode layer, and its band gap is that of the second power generation layer. Narrower (see FIG. 2A).
- Microcrystalline Si (pin) / microcrystalline Si (pin) / a-Si (pin) This first power generation layer has a larger particle size than the second electrode layer, and its band gap is that of the second power generation layer. Narrower than that (see FIG. 2B). ⁇ Microcrystalline Si (pin) / a-Si (pin) (see FIG. 2 (c)) Microcrystalline Si (pin) / intermediate layer / a-Si (pin) (see FIG. 2 (d))
- the film thickness configuration of the a-SiGe (pin) for example, the p-type / i-type / n-type film thickness can be 10 nm / 120 nm / 10 nm, respectively.
- examples of the film thickness configuration of the a-Si (pin) include p-type / i-type / n-type film thicknesses of 10 nm / 100 nm / 10 nm, respectively.
- p-type / i-type / n-type film thickness can be 10 nm / 1000 nm / 10 nm, respectively.
- a thickness larger than that of a-Si is required when microcrystalline Si is used, but when a-Si is used. Higher throughput can be obtained.
- a zinc oxide thin film having a thickness of 1 nm to 70 nm formed by sputtering can be used, or silicon oxide having a thickness of 10 nm to 100 nm formed by using CVD. Either a film or a titanium oxide thin film can be used.
- the ratio of oxygen atoms to silicon atoms is adjusted to 1 to 2
- the ratio of oxygen atoms to titanium atoms is set to 1 to 2.
- the protective layer 14 is a resin film for protecting the transparent electrode layer 13, the power generation layer 12, and the reflective electrode layer 11, which are the base, from the outside air.
- (ethylene-tetrafluoroethylene) fluoropolymer such as Fluon (registered trademark)
- a transparent resin film made of (ETFE) can be used.
- the film forming apparatus 20 has one unwinding chamber (LC21) that houses four unwinding rolls R1 and one unwinding chamber (UC22) that houses four unwinding rolls R2.
- LC21 unwinding chamber
- U22 unwinding chamber
- Rolls R1 and R2 constitute a substrate transport unit.
- four unwinding rolls R1 and four winding rolls R2 are arranged so as to face each other with the film forming chamber 23 interposed therebetween, and a pair of rolls facing each other with the film forming chamber 23 interposed therebetween.
- One roll pair is configured.
- the unwinding roll R1 and the winding roll R2 facing each other rotate in the direction of the arrow, so that the metal substrate S wound around the unwinding roll R1 is kept constant while maintaining an upright posture. It is transported to the take-up roll R2 at the transport speed and taken up by the take-up roll R2.
- the transport path (1 lane to 4 lanes) of the metal substrate S in the four roll pairs is provided so as to be parallel to each other, and the direction along the lane (the left-right direction in FIG. 3) is the transport direction D of the metal substrate S. That's it.
- the film formation chamber 23 is a chamber for forming the power generation layer 12 by using a plasma CVD method. Inside the film formation chamber 23, a plurality of film formation chambers 23A formed along the transfer direction D are provided. Each is formed in a manner common to 1 to 4 lanes. Each film forming chamber 23 ⁇ / b> A is formed by the number of layers of the respective layers constituting the power generation layer 12. Each film formation chamber 23 ⁇ / b> A is associated with each semiconductor layer so that the arrangement order in the transport direction D matches the stacking order of the semiconductor layers.
- the film formation chamber 23A closest to the LC 21 is associated with the n1 layer which is the lowermost semiconductor layer. Then, the i1, p1, n2, i2, p2, n3, i3, and p3 layers are associated in this order from the film forming chamber 23A toward the transport direction D.
- the length in the transport direction (transport length LA) in each film formation chamber 23A is set based on the film formation time of the semiconductor layer corresponding to the film formation chamber 23A and the transport speed of the metal substrate S. It is formed so that the conveyance length LA becomes longer as the film time becomes longer.
- the film formation times of the n1, i1, and p1 layers are 10 sec, 75 sec, and 10 sec and the transport speed of the metal substrate S is 0.3 m / sec
- the n1 layer, the i1 layer, and The transport length LA of the p1 layer is 3 m (10 ⁇ 0.3), 22.5 m (75 ⁇ 0.3), and 3 m (10 ⁇ 0.3).
- a plurality of ground electrodes 31 and a plurality of high-frequency electrodes 32 are alternately arranged in the film forming chamber 23A so as to sandwich each lane.
- a plurality of gas sealing portions 33 are disposed at each start point and end point in the transport direction D in each film forming chamber 23A so as to sandwich each lane.
- Each of the plurality of gas sealing portions 33 blows a gas toward the metal substrate S on the adjacent lane, thereby forming a gas curtain between the adjacent film forming chambers 23 ⁇ / b> A to form the inside of the film forming chamber 23. Is partitioned in a non-contact manner.
- As the gas used for the gas curtain an inert gas or a film forming gas common between the adjacent film forming chambers 23A can be used.
- Each of the plurality of ground electrodes 31 is a flat plate ground electrode connected to the ground potential, forms a rectangular plate extending along a plane formed by the transport direction D and the vertical direction V, and so on along the transport direction D. Arranged at intervals.
- Each ground electrode 31 is equipped with a heating source (not shown) for heating the metal substrate S. When the heating source is driven, the metal substrate S adjacent to the ground electrode 31 reaches a predetermined film formation temperature. Heated. That is, each ground electrode 31 functions as a heater for heating the metal substrate S while forming a ground potential in the corresponding film forming chamber 23A.
- the gap between the metal substrate S and the ground electrode 31 in the transport process is maintained at 0.05 mm to 1 mm, for example.
- the gap is as narrow as 1 mm or less, a relatively high heat transfer coefficient can be obtained in the same pressure region even when a general-purpose pressure of 0.5 Torr to 1 Torr is applied as the pressure in the film forming chamber 23A.
- the heat transfer from 31 to the metal substrate S can be facilitated.
- a lower limit of 0.05 mm or more an excessive increase in capacitance component between the metal substrate S and the ground electrode 31 can be suppressed, and impedance matching is performed in generating plasma in the film forming chamber 23A. Can be easily performed.
- the film quality can be made uniform under stable plasma while avoiding damage to the metal substrate S due to friction between the metal substrate S and the ground electrode 31.
- Each of the plurality of high-frequency electrodes 32 is a flat-plate application electrode connected to a high-frequency power source GE (see FIG. 6), and has a rectangular plate shape extending along a surface formed by the transport direction D and the vertical direction V. They are arranged at equal intervals along the transport direction D so as to face the ground electrode 31.
- a terminal (feeding end portion 36) connected to the high-frequency power source GE is formed at the center of the high-frequency electrode 32 in the transport direction D and in the center of the vertical direction V, that is, the center of the electrode surface of the so-called high-frequency electrode 32.
- the high-frequency power in the VHF region is supplied from the high-frequency power source GE to the power supply end portion 36 of the high-frequency electrode 32.
- the VHF region 30 MHz to 300 MHz can be used, and more preferably 40 MHz to 80 MHz can be used. Note that when the frequency of the high-frequency power is increased, the plasma density in the deposition chamber 23A is increased, so that the deposition rate in the deposition chamber 23A can be improved. On the other hand, when the plasma density in the film formation chamber 23A becomes excessively high, the energy of ions incident on the metal substrate S and the film formation chamber 23A increases, and thus the metal substrate S and the formation of the metal substrate S due to collision with such ions. Plasma damage is easily induced in the film chamber 23A.
- the frequency of the high-frequency power supplied to the high-frequency electrode 32 depends on various conditions such as a film forming gas, a film forming pressure, and a film forming temperature in order to improve throughput in a complementary relationship with the plasma density described above.
- the VHF region is appropriately selected.
- the first electrode length L1 that is the length of the high-frequency electrode 32 in the transport direction D is formed based on the wavelength of the high-frequency power, and when the wavelength is ⁇ (1 m to 10 m), the transmission line is opened. The distance between the edge of the electrode surface, which is the end, and the feeding end 36 is shorter than ⁇ / 2 in the transport direction D.
- the second electrode length L2 (see FIG. 6), which is the length of the high-frequency electrode 32 in the vertical direction V, is also formed based on the wavelength of the high-frequency power, and the electrode surface that is the open end of the transmission path. The distance between the edge portion and the feeding end portion 36 is formed to be shorter than ⁇ / 4 in the vertical direction V.
- the formation of standing waves is reduced in the conveyance direction D of the electrode surface, and in the vertical direction V of the electrode surface. Further, it becomes difficult to form a standing wave.
- the deviation of the voltage distribution caused by the standing wave in the transport direction D that is, the bias of the film formation speed in the transport direction D
- the bias of the voltage distribution caused by the standing wave in the vertical direction V that is, the bias of the film formation speed in the vertical direction V
- the upper limit of the distance between the edge of the electrode surface in the vertical direction V and the feeding end 36 is ⁇ / 4, so that the uniformity of the film quality distribution in the vertical direction V of the metal substrate S can be improved. it can. Furthermore, since the upper limit ( ⁇ / 4) of the distance between the edge of the electrode surface in the vertical direction V and the feeding end portion 36 is smaller than the upper limit ( ⁇ / 2) in the transport direction D, the high-frequency electrode 32 In the vertical direction V, the deviation of the voltage distribution caused by the standing wave can be suppressed more reliably than in the transport direction D. Thus, even if the transport length LA of the film forming chamber 23A is significantly longer than ⁇ , which is the wavelength of the high frequency power, in order to ensure the film forming time, the film quality distribution caused by the standing wave Bias is suppressed.
- each high-frequency electrode 32 is connected to a gas supply unit 34 for supplying a film forming gas.
- the gas supply unit 34 supplies the film-forming gas to the high-frequency electrode 32
- the film-forming gas from the high-frequency electrode 32 is directed toward the pair of ground electrodes 31 that sandwich the high-frequency electrode 32, as indicated by arrows in FIG. Supplied. That is, the high frequency electrode 32 supplies high frequency power to the corresponding film forming chamber 23A and functions as a shower head for the pair of ground electrodes 31 sandwiching the high frequency electrode 32.
- a plurality of long cylindrical recesses are formed on the surface of the high-frequency electrode 32 (flat plate application electrode), and the bottom surface of each recess has a width smaller than the short side of the recess. It is preferable to form a film forming gas supply part that opens at a diameter (for example, a hole having a diameter smaller than the diameter of the recess).
- a film forming gas supply part that opens at a diameter (for example, a hole having a diameter smaller than the diameter of the recess).
- SiH4 / H2 / B2H6 is used as a film forming gas when forming the p layer (a-Si), and SiH4 / H2 is used when forming the i layer (a-Si).
- SiH4 / H2 / PH3 can be used.
- H2 can be selected as a gas for forming the gas curtain.
- each of the four roll pairs rotates and the metal substrate S is transported on each lane, in each film forming chamber 23A, the heating source of each ground electrode 31 is driven so that the metal substrate S is formed into a predetermined structure. Heated to film temperature. Then, when the gas supply unit 34 is driven, the film forming gas is supplied to the metal substrate S via the high frequency electrode 32, and when the high frequency power source GE is driven, the film is formed between the high frequency electrode 32 and the ground electrode 31. Plasma using film gas is generated. At this time, since it is difficult to form a bias in the voltage distribution on the electrode surface of the high frequency electrode 32, a uniform film formation process is performed on the entire metal substrate S passing between the high frequency electrode 32 and the ground electrode 31. Applied.
- the film forming apparatus of the first embodiment has the following advantages. (1) Since the distance between the edge of the high-frequency electrode 32 and the feeding end 36 is shorter than ⁇ / 2 in the transport direction D and shorter than ⁇ / 4 in the vertical direction V, the transport direction in the high-frequency electrode 32 In D, the formation of standing waves is reduced, and in the vertical direction V in the high-frequency electrode 32, standing waves are more difficult to be formed. In each film forming chamber 23A, since the high-frequency electrodes 32 are arranged along the transport direction D, the bias in the voltage distribution caused by the standing wave is determined as the transport direction D regardless of the length of the transport length LA. It can be suppressed in the vertical direction V. As a result, it is possible to improve the uniformity of the film characteristics when performing the film forming process on the metal substrate S wound around the unwinding roll R1.
- a metal substrate S based on iron having a thickness of 0.05 mm to 0.2 mm was used. Since the metal substrate S to be deposited is made of a material having excellent electrical and thermal conductivity, the power generation layer 12 is formed in a manner that alleviates the electrical and thermal bias in the deposition process. Can do. In addition, since the metal substrate S is covered with a corrosion-resistant plating film, the range can be expanded in designing film formation conditions such as film formation gas species, film formation temperature, and film formation pressure. . Moreover, since the metal substrate S is a thin plate using highly versatile iron, the cost of the thin film solar cell 10 can be reduced.
- the metal substrate S can be wound up smoothly.
- the bent portion Sa is formed at the end of the metal substrate S in the transport direction D, the mechanical properties of the thin-film solar cell 10 can be reduced even when the metal substrate S that is the base material of the thin-film solar cell 10 is thinned. Strength can be improved. In addition, since the metal substrate S can be thinned in the process of manufacturing the thin film solar cell 10, the cost of the thin film solar cell 10 can be reduced.
- the metal substrate S and the ground electrode 31 increase the capacity by reducing this gap, and facilitate the coupling. Therefore, by maintaining the gap between 0.05 mm and 1 mm, the high frequency current propagating from the plasma can easily reach the ground electrode.
- FIGS. 7 and 8 are diagrams schematically showing the arrangement of the electrodes in the film forming chamber, and are a diagram seen from the vertical direction and a diagram seen from the transport direction.
- a ground electrode 31 that is continuous along the transport direction D is disposed between the first lane and the second lane and between the third lane and the fourth lane in the film forming chamber 23A.
- a plurality of high-frequency electrodes 32 are arranged at equal intervals along the transport direction D on the side facing the ground electrode 31 across one lane and the side facing the ground electrode 31 across two lanes.
- a plurality of high-frequency electrodes 32 are arranged at equal intervals along the transport direction D on the side facing the ground electrode 31 across 3 lanes and on the side facing the ground electrode 31 across 4 lanes. Yes.
- the plurality of gas sealing portions 33 are respectively arranged on the opposite side of the ground electrode 31 with the metal substrate S interposed therebetween, and adjacent film formations are performed by blowing gas toward the metal substrate S on the adjacent lane.
- a gas curtain is formed between the chambers 23A to partition the inside of the film forming chamber 23 in a non-contact manner.
- the length in the transport direction D and the length in the vertical direction V of each high-frequency electrode 32 are formed by the first electrode length L1 and the second electrode length L2, respectively, as in the first embodiment.
- each film formation chamber 23 ⁇ / b> A the gas supply unit 34 is driven so that the film formation gas passes through the high-frequency electrode 32.
- the high frequency power supply GE is driven by being supplied to the substrate S, plasma using the film forming gas is generated between the high frequency electrode 32 and the ground electrode 31.
- a uniform film formation process is performed on the entire metal substrate S passing between the high frequency electrode 32 and the ground electrode 31. Applied.
- the film forming apparatus of the second embodiment has the following advantages. (7) Since the film forming process on the pair of metal substrates S can be realized by one ground electrode 31, the structure of the film forming chamber 23A is simplified in order to improve the productivity of the thin film solar cell 10 using a plurality of lanes. Can be
- one ground electrode 31 connected in the transport direction D is associated with a plurality of high-frequency electrodes 32 adjacent to each other in the transport direction D, one ground electrode 31 corresponds to the plurality of high-frequency electrodes 32. Therefore, the film characteristics can be made uniform with a simpler apparatus configuration.
- the film forming process on the pair of metal substrates S is performed by one high-frequency electrode 32.
- the high-frequency electrode 32 is replaced by the ground electrode 31 instead of the high-frequency electrode 32 of FIG. 32 may be installed to perform the film forming process.
- the film forming process on the pair of metal substrates S can be realized by the single ground electrode 31, it is possible to improve the productivity of the thin film solar cell 10 using a plurality of lanes.
- the configuration can be simplified.
- the ground electrode 31 that is one flat plate ground electrode is disposed for the high-frequency electrode 32 that is one flat plate application electrode, but is adjacent to the transport direction D as in the second embodiment.
- One ground electrode 31 connected to the plurality of high-frequency electrodes 32 in the transport direction D may be provided. According to this configuration, even in the first embodiment, uniform film characteristics can be achieved with a simpler device configuration.
- a plurality of film forming chambers 23A are formed by partitioning the inside of the film forming chamber 23 with a gas curtain.
- the configuration for partitioning the film forming chamber 23 is not limited to this, and any configuration that can suppress the flow of film forming gas (crosstalk) between adjacent film forming chambers 23A may be used.
- the inside of the film forming chamber 23 may be partitioned.
- the configuration of the substrate transfer unit is also changed, and each time the film formation chamber 23A is formed, In other words, it is necessary to stop the rotation of the roll every time the film forming process of each layer is performed.
- one film formation chamber 23A forms a film formation space common to all lanes, but the film formation chamber 23A may be formed independently for each lane. According to this configuration, since the size of the film formation chamber 23A can be changed for each lane, different power generation layers 12 can be formed by using one film formation apparatus 20, and therefore, various types of power generation layers 12 can be formed. This is useful for film formation.
- the distance between the edge of the high-frequency electrode 32 and the power supply end 36 is shorter than ⁇ / 2 in the transport direction D and shorter than ⁇ / 4 in the vertical direction V.
- the configuration is not limited thereto, and the distance between the edge portion of the high-frequency electrode 32 and the feeding end portion 36 may be shorter than ⁇ / 4 in the plane of the electrode surface. According to this, since it becomes difficult for a standing wave to be formed on the entire electrode surface of the high-frequency electrode 32, it is possible to more reliably suppress the deviation of the voltage distribution over the entire metal substrate S. Therefore, the uniformity of the film characteristics can be further improved when the metal substrate S wound around the unwinding roll R1 is subjected to the film forming process.
- the high-frequency electrode 32 is embodied as a rectangular flat plate, but the high-frequency electrode 32 may be, for example, an elliptical plate, and the distance between the edge of the high-frequency electrode 32 and the feeding end 36. May be shorter than ⁇ / 2 in the transport direction D and shorter than ⁇ / 4 in the vertical direction V.
- the distance between the edge portion of the high-frequency electrode 32 and the power supply end portion 36 is configured to be shorter than ⁇ / 4 in the vertical direction V.
- the distance between the edge portion of the electrode 32 and the feeding end portion 36 is configured to be shorter than ⁇ / 4 in the surface direction of the main surface or the surface direction of the electrode surface and perpendicular to the transport direction D. May be.
- the substrate transport unit is embodied by four roll pairs, but the substrate transport unit may be embodied by, for example, one roll pair, and one of the rolls is rotated by rotating each of the pair of rolls. Any substrate may be used as long as the substrate wound around is transported to the other roll and wound by the other roll.
- the power generation layer 12 is formed by the single film formation chamber 23 that is the power generation layer forming unit.
- the present invention is not limited to this, and the power generation layer 12 is formed by the two or more film formation chambers 23. It may be configured to.
- a first film forming apparatus 20A having a plurality of first film forming chambers 23A1 and a second film forming apparatus 20B having a plurality of second film forming chambers 23A2 are used.
- the first pin structure is formed by the first film forming apparatus 20A, and then the second and third pin structures are formed by the second film forming apparatus 20B. May be.
- the plurality of high-frequency electrodes 32 may be arranged not only in the transport direction D but also in the vertical direction V that is the width direction of the metal substrate S.
- a plurality of first flat plate application electrodes 32 ⁇ / b> A that are arranged along the carrying direction D so as to face the substrate S, and that are arranged along the carrying direction D so as to face the substrate S.
- the plurality of second flat plate application electrodes 32B may be arranged apart from each other in the vertical direction V (direction perpendicular to the transport direction D).
- the substrate is embodied as a metal substrate, but the substrate may be embodied as a resin substrate having high heat resistance such as polyimide.
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Abstract
Description
この構成では、平板印加電極における搬送方向においても定在波の形成が軽減される。
好ましくは、上記薄膜太陽電池の製造装置において、前記複数の成膜室は、前記一対のロールの間でガスカーテンで区画され、前記基板搬送部は、前記一方のロールにある前記基板が前記他方のロールに巻取られるまで前記一対のロールを連続的に回転する。
好ましくは、上記薄膜太陽電池の製造装置は、前記搬送方向に隣接する前記複数の平板印加電極に対向して、該複数の平板印加電極に共通する1つの平板接地電極を更に備える。
好ましくは、上記薄膜太陽電池の製造装置において、前記複数の成膜室の各々は更に、前記基板と対向して前記搬送方向に沿って配列される複数の第2平板印加電極を含み、該複数の第2平板印加電極は、前記搬送方向に垂直な方向において前記複数の平板印加電極から離間して位置する。
この方法では、平板印加電極における搬送方向においても定在波の形成が軽減される。
この方法では、基板の端部が折り曲げられることにより同基板の機械的強度を高めることができる。換言すれば、薄膜太陽電池の機械的強度を基板の端部における折り曲げにより補償できることから、同薄膜太陽電池の製造過程においては基板の厚さを薄くすることができ、ひいては薄膜太陽電池の低コスト化も図ることができる。
以下、本発明を具体化した第一実施形態について図1~図6を参照して説明する。図1及び図2は薄膜太陽電池の積層構造を示す図であり、図3は薄膜太陽電池の製造装置である成膜装置を模式的に示す図であって鉛直方向から見た図である。また、図4は成膜チャンバにおける成膜室の配置を模式的に示す図であり、図5及び図6は成膜室における電極の配置を模式的に示す図であって鉛直方向から見た図及び搬送方向から見た図である。
・a-SiGe(pin)/a-SiGe(pin)/a-Si(pin):この第1発電層は第2電極層よりもGe比率が高く、そのバンドギャップは第2発電層のバンドギャップよりも狭い(図2(a)参照)。
・微結晶Si(pin)/微結晶Si(pin)/a-Si(pin):この第1発電層は第2電極層よりも粒径が大きく、そのバンドギャップは第2発電層のバンドギャップよりも狭い(図2(b)参照)。
・微結晶Si(pin)/a-Si(pin)(図2(c)参照)
・微結晶Si(pin)/中間層/a-Si(pin)(図2(d)参照)
なお上記a-SiGe(pin)の膜厚構成としては、例えばp型/i型/n型の膜厚がそれぞれ10nm/120nm/10nmを挙げることができる。また上記a-Si(pin)の膜厚構成としては、例えばp型/i型/n型の膜厚がそれぞれ10nm/100nm/10nmを挙げることができる。また微結晶Si(pin)の膜厚構成としては、例えばp型/i型/n型の膜厚がそれぞれ10nm/1000nm/10nmを挙げることができる。ちなみに、この微結晶Siの成膜速度は適宜変更することが可能であるため、微結晶Siを用いる場合にはa-Siよりも厚い膜厚が要求されるものの、a-Siを利用する場合よりも高いスループットを得ることが可能である。
(1)高周波電極32における縁部と給電端部36との間の距離が搬送方向Dにおいてλ/2よりも短く、鉛直方向Vにおいてλ/4よりも短いことから、高周波電極32における搬送方向Dでは定在波の形成が軽減されて、同高周波電極32における鉛直方向Vではさらに定在波が形成され難くなる。各成膜室23Aにおいては、こうした高周波電極32が搬送方向Dに沿って配列されるがゆえ、その搬送長LAの長さに関わらず定在波に起因する電圧分布の偏りを搬送方向Dと鉛直方向Vとで抑制できる。この結果、巻出しロールR1に巻かれた金属基板Sに成膜処理を施す上で膜特性の均一性を向上させることができる。
以下、本発明を具体化した第二実施形態について図7及び図8を参照して説明する。第二実施形態は、第一実施形態における電極配置を変更したものである。そのため、以下においては、その変更点について詳しく説明する。図7及び図8は成膜室における電極の配置を模式的に示す図であって鉛直方向から見た図及び搬送方向から見た図である。
(7)一対の金属基板Sへの成膜処理を1つの接地電極31により実現できることから、複数のレーンを用いて薄膜太陽電池10の生産性を向上させる上で成膜室23Aの構成を簡素化できる。
なお、上記実施形態は以下の態様で実施してもよい。
Claims (18)
- 薄膜太陽電池の製造装置であって、
真空槽に設けられた一対のロールを含み、該一対のロールを回転させて一方のロールから他方のロールに基板を搬送する基板搬送部と、
前記一対のロールの間で前記基板の搬送方向に沿って区画される複数の成膜室を含み、該複数の成膜室の各々で前記基板に半導体層を成膜して複数の半導体層の積層体である発電層を形成する発電層形成部と、を備え、
前記複数の成膜室の各々は、前記基板と対向して前記搬送方向に沿って配列される複数の平板印加電極を含み、該複数の平板印加電極の各々はVHF領域の高周波電力が給電される給電端部を有し、前記高周波電力の波長をλとするとき、前記平板印加電極の縁部と前記給電端部との間の距離が、前記搬送方向に垂直な方向においてλ/4よりも短いことを特徴とする薄膜太陽電池の製造装置。 - 前記平板印加電極の縁部と前記給電端部との間の距離が、前記搬送方向においてλ/2よりも短いことを特徴とする請求項1に記載の薄膜太陽電池の製造装置。
- 前記平板印加電極の縁部と前記給電端部との間の距離が、前記搬送方向を含む前記平板印加電極の面内においてλ/4よりも短いことを特徴とする請求項1又は2に記載の薄膜太陽電池の製造装置。
- 前記基板搬送部は、その各々が前記一対のロールであって互いに隣合う第1及び第2のロール対を含み、
前記発電層形成部は、前記第1及び第2のロール対に共通する成膜室を含み、
前記共通する成膜室は、前記基板を挟んで前記複数の平板印加電極と対向する平板接地電極を含み、前記複数の平板印加電極又は前記平板接地電極は、前記第1及び第2のロール対で搬送される一対の基板の間に配置されて該一対の基板に共通する電極であることを特徴とする請求項1~3のいずれか1つに記載の薄膜太陽電池の製造装置。 - 前記複数の成膜室は、前記一対のロールの間でガスカーテンで区画され、
前記基板搬送部は、前記一方のロールにある前記基板が前記他方のロールに巻取られるまで前記一対のロールを連続的に回転することを特徴とする請求項1~4のいずれか1つに記載の薄膜太陽電池の製造装置。 - 前記搬送方向に隣接する前記複数の平板印加電極に対向して、該複数の平板印加電極に共通する1つの平板接地電極を備えることを特徴とする請求項1~5のいずれか1つに記載の薄膜太陽電池の製造装置。
- 前記複数の成膜室の各々は更に、前記基板と対向して前記搬送方向に沿って配列される複数の第2平板印加電極を含み、該複数の第2平板印加電極は、前記搬送方向に垂直な方向において前記複数の平板印加電極から離間して位置することを特徴とする請求項1~6のいずれか1つに記載の薄膜太陽電池の製造装置。
- 薄膜太陽電池の製造方法であって、
真空槽に設けられた一対のロールを回転させて一方のロールから他方のロールに基板を搬送すること、
前記基板を搬送しながら、前記一対のロールの間で前記基板の搬送方向に沿って区画された複数の成膜室で複数の半導体層の積層体である発電層を形成すること、を備え、
前記発電層を形成することは、前記基板と対向するように前記搬送方向に沿って配列された複数の平板印加電極にVHF領域の高周波電力を印加することを含み、前記高周波電力は前記複数の平板印加電極の各々に設けられた給電端部に給電され、前記高周波電力の波長をλとするとき、前記平板印加電極の縁部と前記給電端部との間の距離が、前記搬送方向に垂直な方向においてλ/4よりも短く設定されていることを特徴とする薄膜太陽電池の製造方法。 - 前記平板印加電極の縁部と前記給電端部との間の距離が、前記搬送方向においてλ/2よりも短く設定されていることを特徴とする請求項8に記載の薄膜太陽電池の製造方法。
- 前記基板は、耐食性のめっき被膜で覆われた厚さが0.05mm~0.2mmの鉄材であり、前記基板には、酸化亜鉛、酸化インジウム、および酸化スズの少なくとも一つが銀薄膜とアルミニウム薄膜のいずれか一方に積層されてなる反射電極層が設けられていることを特徴とする請求項8又は9に記載の薄膜太陽電池の製造方法。
- 前記発電層を形成することは、
アモルファスシリコンゲルマニウムから第1発電層を形成すること、
アモルファスシリコンゲルマニウムから第2発電層を形成すること、
アモルファスシリコンから第3発電層を形成すること、を含み、
前記第1~第3発電層は前記基板側から順に積層されており、前記第1発電層のバンドギャップが前記第2発電層のバンドギャップよりも狭いことを特徴とする請求項8又は9に記載の薄膜太陽電池の製造方法。 - 前記発電層を形成することは、
微結晶シリコンから第1発電層を形成すること、
微結晶シリコンから第2発電層を形成すること、
アモルファスシリコンから第3発電層を形成すること、を含み、
前記第1~第3発電層は前記基板側から順に積層されており、前記第1発電層と前記第2発電層とにより電圧を増幅することを特徴とする請求項8又は9に記載の薄膜太陽電池の製造方法。 - 前記発電層を形成することは、
微結晶シリコンから第1発電層を形成すること、
アモルファスシリコンから第2発電層を形成すること、を含み、
前記第1及び第2発電層は前記基板側から順に積層されていることを特徴とする請求項8又は9に記載の薄膜太陽電池の製造方法。 - 前記発電層を形成することは更に、
前記第1発電層と前記第2発電層との間に酸化亜鉛薄膜を形成することを含むことを特徴とする請求項13に記載の薄膜太陽電池の製造方法。 - 前記発電層を形成することは更に、
前記第1発電層と前記第2発電層との間に、酸化シリコン薄膜と酸化チタン薄膜のいずれか一方を10nm~100nmの厚さで形成することを含むことを特徴とする請求項13に記載の薄膜太陽電池の製造方法。 - 前記発電層を形成した後に前記搬送方向に沿う前記基板の端部を折り曲げることを更に備えることを特徴とする請求項8~15のいずれか1つに記載の薄膜太陽電池の製造方法。
- 前記基板を挟んで前記複数の平板印加電極と対向し、加熱源として機能する平板接地電極を設け、該平板接地電極と前記基板との間隙を0.05mm~1mmに保持しつつ前記基板を搬送することを特徴とする請求項8~16のいずれか1つに記載の薄膜太陽電池の製造方法。
- 請求項8に記載の製造方法によって作製された薄膜太陽電池であって、
耐食性のめっき被膜で覆われた厚さ0.05mm~0.2mmの鉄基板からなる前記基板と、
前記基板上に積層された反射電極層と、
前記反射電極層上に積層された前記発電層と、
前記発電層上に積層された透明電極層と、
前記透明電極層上に積層された保護層と、
を備えることを特徴とする薄膜太陽電池。
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