WO2010004935A1 - シール装置 - Google Patents
シール装置 Download PDFInfo
- Publication number
- WO2010004935A1 WO2010004935A1 PCT/JP2009/062198 JP2009062198W WO2010004935A1 WO 2010004935 A1 WO2010004935 A1 WO 2010004935A1 JP 2009062198 W JP2009062198 W JP 2009062198W WO 2010004935 A1 WO2010004935 A1 WO 2010004935A1
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- WIPO (PCT)
- Prior art keywords
- shaft
- magnetic
- magnetic force
- processing chamber
- generating means
- Prior art date
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/40—Sealings between relatively-moving surfaces by means of fluid
- F16J15/43—Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force
Definitions
- the present invention relates to a sealing device suitable for transmitting a motion from outside to a sealed space such as a chamber or a clean room.
- oxidation, diffusion or CVD Chemical Vapor Deposition
- CVD Chemical Vapor Deposition
- the wafer is stored in a chamber or container (hereinafter collectively referred to as a processing chamber) held in a predetermined environment, and is processed by being exposed to the atmosphere in the processing chamber while being rotated, for example. Therefore, the processing chamber used for such processing is required to have high airtightness and to be able to transmit mechanical motion from the outside of the processing chamber to the inside of the processing chamber, for example, by rotating a wafer.
- the sealing device As another prior art related to the sealing device, it has a shaft having an annular projection and a yoke contacting the permanent magnet, and holds magnetic fluid between the inner peripheral surface of the yoke and the annular projection.
- a sealing device (rotating shaft protrusion type magnetic fluid seal rotating bearing) is known (see Patent Document 2 and the like).
- the sealing device that holds the magnetic fluid between the inner peripheral surface of the yoke and the annular projection has a complicated structure, and requires extremely high precision processing and assembly processes for manufacturing. There is a problem in terms of cost.
- the present invention has been made in view of such problems, and the object of the present invention is to provide a simple structure, a good sliding life, and to transmit motion to the processing chamber from the outside. It is to provide a suitable sealing device.
- a sealing device includes: A sealing device that transmits a predetermined mechanical motion to the inside of a processing chamber maintained in a predetermined environment while maintaining the environment of the processing chamber from the outside of the processing chamber, A shaft for transmitting the predetermined mechanical motion to the processing chamber; A housing through which the shaft passes; Magnetic force generating means disposed between the housing and the shaft to generate a magnetic force around the shaft; Protruding from the housing toward the shaft, having a pair of inward protruding edges forming a sealing groove surrounding the shaft, arranged adjacent to the magnetic force generating means and generated by the magnetic force generating means A magnetic transmission member for transmitting magnetic force; A sealing member that is accommodated in the sealing groove in a state where at least a part thereof protrudes toward the shaft, and slides with respect to an outer surface of the shaft; A first fluid that has a magnetic fluid held between the shaft and the magnetic transmission member by the magnetic force generated by the magnetic force generation means, and is close to the magnetic force generation means
- a fluid holding protrusion that protrudes toward the shaft and the seal member is formed on the first inward protrusion edge of the magnetic transmission member.
- the sliding surface with respect to the shaft in the seal member is arranged in the state of being close to the fluid holding projection that holds the most magnetic fluid. Therefore, the distance between the magnetic fluid held by the magnetic transmission member and the seal member is shortened, and the magnetic fluid can easily reach the sliding surface of the seal member. That is, in the sealing device according to the present invention, the magnetic fluid suitably acts as a lubricant in the vicinity of the sliding surface between the shaft and the sealing member, and can extend the sliding life of the sealing member.
- a sealing device is A magnetic fluid seal device for transmitting a predetermined mechanical motion to the inside of a processing chamber held in a predetermined environment while maintaining the environment of the processing chamber from the outside of the processing chamber, A shaft for transmitting the predetermined mechanical motion to the processing chamber; A housing through which the shaft passes; Magnetic force generating means disposed between the housing and the shaft to generate a magnetic force around the shaft; A pair of inward protruding edges that project from the housing toward the shaft to form a sealing groove that surrounds the shaft, and are arranged adjacent to the magnetic force generating means to generate a magnetic force generated by the magnetic force generating means.
- a magnetic transmission member for transmitting A sealing member that is accommodated in the sealing groove in a state where at least a part thereof protrudes toward the shaft, and slides with respect to an outer surface of the shaft; It has a magnetic fluid held between the shaft and the magnetic transmission member by the magnetic force generated by the magnetic force generating means, and the sealing groove has a dovetail shape.
- the sealing member is accommodated in the sealing groove having a dovetail shape.
- the sliding surface with respect to the shaft in the seal member is arranged in a state close to the tip of the magnetic transmission member that holds a large amount of magnetic fluid. Therefore, the distance between the magnetic fluid held by the magnetic transmission member and the sliding surface of the seal member is shortened, and the magnetic fluid can easily reach the sliding surface of the sealing member. That is, in the sealing device according to the present invention, the magnetic fluid suitably acts as a lubricant in the vicinity of the sliding surface between the shaft and the sealing member, and can extend the sliding life of the sealing member.
- a sealing device is A magnetic fluid seal device for transmitting a predetermined mechanical motion to the inside of a processing chamber held in a predetermined environment while maintaining the environment of the processing chamber from the outside of the processing chamber, A shaft for transmitting the predetermined mechanical motion to the processing chamber; A housing through which the shaft passes; Magnetic force generating means disposed between the housing and the shaft to generate a magnetic force around the shaft; A pair of inward protruding edges that project from the housing toward the shaft to form a sealing groove that surrounds the shaft, and are arranged adjacent to the magnetic force generating means to generate a magnetic force generated by the magnetic force generating means.
- the sealing groove having a magnetic fluid held between the shaft and the magnetic transmission member by the magnetic force generated by the magnetic force generation means and observed through a cross section passing through the central axis of the shaft is substantially rectangular.
- the seal member has two or more protrusions protruding toward one of the substantially rectangular vertices of the sealing groove, and two protrusions protruding toward the shaft among the protrusions.
- a fluid holding groove for holding the magnetic fluid is formed between the portions.
- a sealing member having a protrusion protruding toward one of the vertices of a rectangular shape is housed in a sealing groove having a substantially rectangular cross section.
- the sealing device according to the present invention includes a second magnetic transmission unit that is disposed with the magnetism generation unit sandwiched between the magnetic transmission unit and transmits magnetism generated by the magnetic force generation unit. May be.
- the sealing device according to the present invention more reliably supplies the magnetic fluid to the tip portion close to the shaft in the magnetic transmission portion. Can be held.
- FIG. 1 is a cross-sectional view showing a sealing device according to a first embodiment of the present invention.
- FIG. 2 is a sectional view showing a sealing device according to the second embodiment of the present invention.
- FIG. 3 is an enlarged cross-sectional view showing a first magnetic pole member provided in the sealing device according to one embodiment of the present invention and a modification thereof.
- FIG. 4 is an enlarged cross-sectional view of the first magnetic pole member provided in the sealing device used in Reference Example 3 of the present invention.
- FIG. 5 is a sectional view showing a sealing device according to the third embodiment of the present invention.
- FIG. 1 is a cross-sectional view showing a sealing device 3 according to a first embodiment of the present invention.
- the sealing device 3 is disposed so as to close an opening provided in a processing chamber (not shown), and can keep the inside of the processing chamber airtight with respect to the outside of the processing chamber.
- the processing chamber in which the sealing device 3 according to the present embodiment is disposed is not particularly limited, and examples thereof include a wafer processing chamber that processes silicon wafers, a load lock chamber that repeats a vacuum state and an atmospheric pressure state, and the like. . Further, the inside of the processing chamber may be held in a negative pressure environment with respect to the outside of the processing chamber, or may be held in an equal pressure or pressurized environment.
- the sealing device 3 includes a housing 12, a shaft 10, a magnet 14 as a magnetic force generating means, first and second magnetic pole members 18 and 30 as magnetic transmission members, an O-ring 24 as a sealing member, and a magnetic fluid. 26.
- the shaft 10 is disposed so as to penetrate the cylindrical housing 12.
- the magnet 14 and the first magnetic pole member 18 may be formed integrally.
- the magnet 14 may also serve as a part of the first magnetic pole member.
- a portion (the first inner projecting edge 19) that fixes the magnetic fluid 26 in the first magnetic pole member 18 may be used as the magnetic force generating means.
- the end of the shaft 10 outside the processing chamber is connected to a drive unit (not shown).
- the shaft 10 according to the present embodiment can rotate about the axis A by the driving force from the driving unit.
- An end of the shaft 10 on the inner side of the processing chamber is connected to a driven portion (not shown) disposed in the inner portion of the processing chamber.
- the shaft 10 according to the present embodiment can transmit the rotational motion generated by the drive unit arranged outside the processing chamber to the inside of the processing chamber.
- the shaft 10 is formed using a magnetic material, the whole shaft is not limited to a solid magnetic material.
- the shaft may be austenitic steel with a sleeve made of a magnetic material or a shaft made of a non-magnetic material such as a non-ferrous material or quartz, or a single sleeve.
- a resin coating or the like can be applied to the surface of the shaft formed using a magnetic material for sliding characteristics, rust prevention, and the like.
- the thickness of the coating can be set to a thickness that does not significantly weaken the lines of magnetic force from the magnetic material.
- the housing 12 is a cylindrical member installed so that the shaft 10 penetrates, and is fixed to a processing chamber (not shown). A predetermined interval is provided between the inner peripheral surface 12a of the housing 12 and the outer peripheral surface 10a of the shaft 10 so that the magnet 14, the first magnetic pole member 18, the second magnetic pole member 30, the O-ring 24, and the like can be disposed. Is provided.
- the annular magnet 14 is a magnetism generating means for generating magnetism for holding the magnetic fluid 26 as will be described later, and is sandwiched between the first magnetic pole member 18 and the second magnetic pole member 30 on both sides in the axis A direction. It is arranged in the state.
- the shape of the magnet 14 is not limited to an annular shape as in the present embodiment.
- the magnet 14 is a shape in which cylindrical magnets are arranged in an annular shape so as to surround the shaft 10 with the axial direction aligned. May be.
- An annular second magnetic pole member 30 is connected to the end of the magnet 14 on the outside of the processing chamber.
- the second magnetic pole member 30 is a magnetic material provided so as to contact the magnet 14.
- the second inner peripheral end portion 30 a that is the inner peripheral end portion of the second magnetic pole member 30 is disposed with a slight gap with respect to the outer peripheral surface 10 a of the shaft 10. Further, the second outer peripheral end 30 b of the second magnetic pole member 30 may be fixed to the inner peripheral surface 12 a of the housing 12.
- An annular first magnetic pole member 18 is connected to the end of the magnet 14 on the processing chamber inner side. Similar to the second magnetic pole member 30, the first magnetic pole member 18 is a magnetic material provided so as to contact the magnet 14. The first outer peripheral end 18 b of the first magnetic pole member 18 is fixed to the inner peripheral surface 12 a of the housing 12. Between the first magnetic pole member 18 and the housing 12, a static seal member 32 that seals between the first outer peripheral end 18 b of the first magnetic pole member 18 and the inner peripheral surface 12 a of the housing 12 is provided. Also good.
- the first magnetic pole member 18 has a first inner projecting edge 19 a and a second inner projecting edge 19 b that project from the inner peripheral surface 12 a side of the housing 12 toward the outer peripheral surface 10 a side of the shaft 10.
- the first inner projecting edge 19a is formed on the outside of the processing chamber from the second inner projecting edge 19b. Accordingly, the first inner projecting edge 19a is disposed closer to the magnet 14 than the second inner projecting edge 19b.
- a fluid holding protrusion 22 that protrudes toward the shaft 10 and the O-ring 24 is formed at the tip of the first inward protruding edge 19a that faces toward the side close to the shaft 10.
- the fluid holding protrusion 22 is disposed so as to form a slight gap with the outer peripheral surface 10 a of the shaft 10.
- a magnetic fluid 26 is held near the tip 22 a of the fluid holding protrusion 22 by the magnetic force generated by the magnet 14.
- a sealing groove 20 is formed between the first inner protruding edge 19a and the second inner protruding edge 19b.
- the sealing groove 20 is formed so as to surround the shaft 10, and has an opening on the outer peripheral surface 10 a side of the shaft 10.
- the O-ring 24 is accommodated in the sealing groove 20.
- the O-ring 24 according to the present embodiment has a substantially circular or approximately elliptical cross-sectional shape when observed in a cross-section passing through the axis A of the shaft 10.
- a part of the O-ring 24 is accommodated in a state of protruding from the opening of the sealing groove 20.
- the ring outer peripheral end 24b of the O-ring 24 is in contact with the bottom 20a of the sealing groove 20, and the bottom 20a of the O-ring 24 and the sealing groove 20 are in close contact with each other in the circumferential direction.
- the O-ring 24 is slightly in contact with the shaft 10 and is designed so as not to excessively increase the contact torque and satisfy the sealing property.
- the O-ring 24 is accommodated in the sealing groove 20 while being slightly crushed in the radial direction of the axis A by the bottom 20a of the sealing groove 20 and the outer peripheral surface 10a of the shaft 10. ing.
- the O-ring 24 is preferably made of a material having moderate elasticity such as an elastomer.
- the O-ring 24 can seal between the first magnetic pole member 18 and the shaft 10.
- a magnetic fluid 26 is held near the tip 22 a of the fluid holding protrusion 22.
- the magnetic fluid 26 used in the present embodiment is obtained by dispersing magnetic ultrafine particles having a particle size of about 5 to 50 nm in a solvent or oil (base oil) using a surfactant, and moves along the lines of magnetic force. It has the property of being trapped in a magnetic field.
- the magnetic fluid 26 is used as a lubricant that acts on the sliding surface of the shaft 10 and the O-ring 24 and extends the sliding life of the O-ring 24.
- the magnetic fluid 26 can secure the sealing performance on the sliding surface of the O-ring 24 and the shaft 10 and can suppress dust generation in the vicinity of the sliding surface.
- the magnetic fluid 26 held near the tip 22a of the fluid holding projection 22 reaches the sliding surface between the shaft 10 and the O-ring 24 and acts as a lubricant.
- the tip 22 a of the fluid holding projection 22 that holds the magnetic fluid 26 most is It is arranged close to the ring 24. Therefore, the magnetic fluid 26 can easily reach the sliding surface of the shaft 10 and the O-ring 24 via the O-ring 24.
- the O-ring 24 has a substantially circular or substantially elliptical cross-sectional shape
- the ring inner peripheral side end 24 a that is a sliding surface in the O-ring 24 is formed on the fluid holding projection 22. It arrange
- the fluid holding protrusion 22 is formed on the first inner protruding edge 19a close to the magnet 14 among the two inner protruding edges 19a and 19b. More magnetic flux passes through the first inner projecting edge 19a adjacent to the magnet 14 than the second inner projecting edge 19b. Therefore, by forming the fluid holding projection 22 on the first inner projecting edge 19a, more magnetic fluid 26 can be held by the fluid holding projection 22.
- the sealing groove 20 formed in the first magnetic pole member 18 has a dovetail shape.
- the first inner projecting edge 19 a constitutes a part of the wall of the sealing groove 20, and the magnetic body holding projecting part 22 formed at the tip of the first inner projecting edge 19 a faces the sealing groove 20. Is inclined.
- the O-ring 24 having a substantially circular or substantially elliptical cross-sectional shape when observed by a cross-section passing through the axis A of the shaft 10 is formed in the sealing groove 20 having a dovetail shape. It is stored. Therefore, the tip 22a of the fluid holding projection 22 that holds the magnetic fluid 26 is close to the O-ring 24, and the magnetic fluid 26 easily reaches the sliding surface of the shaft 10 and the O-ring 24, It can act suitably as a lubricant.
- the shape of the sealing groove 20 formed by the first inner projecting edge 19a and the second inner projecting edge 19b is not limited to the shape shown in the first embodiment, and for example, FIG. 3 (b) and FIG. 3 (c). It may have a shape as shown in FIG. FIGS. 3B and 3C are enlarged cross-sectional views showing a modification of the first magnetic pole member 18 shown in FIG.
- the first inner protruding edge 39a has a substantially symmetric shape with the second inner protruding edge 39b.
- the fluid holding projection 42 is formed at the tip of the first inner projecting edge 39 a, and the tip 42 a of the fluid holding projection 42 is close to the O-ring 24.
- the magnetic fluid 26 is held by the fluid holding protrusion 42, the magnetic fluid 26 is disposed so as to be close to the O-ring 24. Therefore, even when the first magnetic pole member 40 shown in FIG. 3B is used in the sealing device 3 according to the first embodiment, the magnetic fluid 26 easily reaches the sliding surface of the shaft 10 and the O-ring 24. And can act suitably as a lubricant.
- the first inner protruding edge 49 a has a shape that is substantially symmetrical with the second inner protruding edge 49 b, and protrudes toward the sealing groove 48. .
- the magnetic fluid 26 is held at the tip 50 of the first inward protruding edge 49a.
- the first inward protruding edge 49a forming the sealing groove 48 protrudes toward the sealing groove 48, and the sealing groove 48 has a dovetail shape. For this reason, the distal end portion 50 of the first inward protruding edge 49 a is disposed so as to be close to the O-ring 24.
- the magnetic fluid 26 is held at the tip 50 of the first inward protruding edge 49a, the magnetic fluid 26 and the O-ring 24 are also arranged close to each other. Therefore, even when the first magnetic pole member 51 shown in FIG. 3C is used in the sealing device 3 according to the first embodiment, the magnetic fluid 26 easily reaches the sliding surfaces of the shaft 10 and the O-ring 24. It can act suitably as a lubricant.
- Second embodiment Second embodiment
- FIG. 2 is a cross-sectional view showing a sealing device 6 according to a second embodiment of the present invention.
- the shape of the first magnetic pole member 58 and the shape of the X ring 64 used as the sealing member are the first magnetic pole member 18 provided in the sealing device 3 according to the first embodiment.
- the shape of the O-ring 24 is different.
- the other parts are the same as those of the sealing device 3 according to the first embodiment, and the same members as those in the first embodiment are given the same members as those in the first embodiment.
- the first magnetic pole member 58 is a first inner protruding edge 59a that protrudes from the inner peripheral surface 12a side of the housing 12 toward the outer peripheral surface 10a side of the shaft 10. And a second inward projecting edge 59b.
- no fluid holding projecting part is formed at the tip of the first inner projecting edge 59a.
- the first inner projecting edge 59a and the second inner projecting edge 59b have substantially symmetrical shapes, and a shaft is provided between the first inner projecting edge 59a and the second inner projecting edge 59b.
- a sealing groove 60 having an opening on the 10 side is formed.
- the cross section of the sealing groove 60 observed by the cross section passing through the axis A of the shaft 10 has a substantially rectangular shape.
- the X-ring 64 has a first protrusion 64a, a second protrusion 64b, a third protrusion 64c, and a fourth protrusion 64d that protrude toward each of the rectangular shapes of the cross section of the sealing groove 60.
- the first protrusion 64a and the second protrusion 64b protrude toward the apex on the opening side of the sealing groove 60 among the apexes of the rectangular shape.
- the first protrusion 64a protrudes toward the apex on the first inner projecting edge 59a side among the apexes on the opening side of the sealing groove 60, and the second protrusion is on the apex on the second inner projecting edge 59b side. Protrusively.
- the third protrusion 64c and the fourth protrusion 64d protrude toward the apex on the bottom 60a side of the sealing groove 60 among the apexes of the rectangular shape. Further, the first to fourth protrusions of the sealing groove 60 are continuous along the circumferential direction of the X ring 64.
- the third protrusion 64c and the fourth protrusion 64d are in contact with the bottom 60a of the sealing groove 60, and the X ring 64 and the sealing groove 60 are in close contact with each other in the circumferential direction.
- the inner diameter of the X ring 64 is designed to be a diameter that is substantially the same as the diameter of the shaft 10 or slightly smaller. Therefore, when the shaft 10 rotates about the axis A, the first protrusion 64 a and the second protrusion 64 b of the X ring 64 slide with respect to the outer peripheral surface 10 a of the shaft 10. Thereby, the X ring 64 according to the second embodiment can seal between the first magnetic pole member 58 and the shaft 10.
- a fluid holding groove 64e for allowing the magnetic fluid 26 to go around to the second protrusion 64b is formed. That is, the fluid holding groove 64e guides the magnetic fluid 26 from the first protrusion 64a to the second protrusion 64b by the surface tension between the fluid holding groove 64e and the outer peripheral surface 10a of the shaft 10 facing the fluid holding groove 64e. Designed to be able to.
- the fluid holding groove 64e can hold the magnetic fluid 26 between the fluid holding groove 64e and the outer peripheral surface 10a of the shaft 10 facing the fluid holding groove 64e.
- the magnetic fluid 26 When the shaft 10 rotates about the axis A, the magnetic fluid 26 is held most in the vicinity of the tip of the first inward protruding edge 59a. Since the first protrusion 64a of the X ring 64 is disposed so as to be close to the tip of the first inward protruding edge 59a, the magnetic fluid 26 slides between the shaft 10 and the first protrusion 64a of the X ring 64. It can easily reach the surface and can suitably act as a lubricant.
- the magnetic fluid 26 can easily reach the second protrusion 64b via the first protrusion 64a and the fluid holding groove 64e. That is, in the sealing device 6 according to the second embodiment, the magnetic fluid 26 is easily applied to both sliding surfaces formed between the first protrusion 64 a and the second protrusion 64 b and the outer peripheral surface 10 a of the shaft 10. Can be reached. Therefore, the magnetic fluid 26 can preferably act as a lubricant on the sliding surface between the X ring 64 and the shaft 10.
- the magnetic fluid 26 may be held also at the tip of the second inward protruding edge 59b.
- the magnetic fluid 26 held in the vicinity of the tip of the second inner protruding edge 59b can easily reach the second protrusion 64b of the X ring 64.
- the second inner protruding edge 59b does not pass as much magnetic flux as the first inner protruding edge 59a. Therefore, the amount of the magnetic fluid 26 held at the tip of the second inner protruding edge 59b is small, and the second protrusion 64b and the shaft can be obtained only with the magnetic fluid 26 held at the tip of the second inner protruding edge 59b.
- the sliding surface with the outer peripheral surface 10a cannot be sufficiently lubricated.
- the magnetic fluid 26 held in the vicinity of the distal end portion of the first inward protruding edge 59a passes through the first protrusion 64a and the fluid holding groove 64e.
- the second protrusion 64b can be easily reached. Therefore, the magnetic fluid 26 can preferably act as a lubricant on the sliding surface between the X ring 64 and the shaft 10.
- FIG. 5 is a cross-sectional view showing a sealing device 7 according to a third embodiment of the present invention.
- the second magnetic pole member is constituted by a ball bearing 80
- the first magnetic pole member 82 is constituted by a first ring portion 84 and a second ring portion 86.
- the other parts are the same as those of the sealing device 6 according to the second embodiment, and the same members as those of the second embodiment are given the same members as those of the second embodiment.
- the annular magnet 14 is arranged with the first magnetic pole member 82 and the ball bearing 80 sandwiched on both sides in the axis A direction.
- the ball bearing 80 is disposed so as to be in contact with the end of the magnet 14 on the outside of the processing chamber.
- the ball bearing 80 includes an outer peripheral ring 80a attached to the inner peripheral surface 12a of the housing, an inner peripheral ring 80c attached to the shaft 10, and a plurality of radial bearings held between the outer peripheral ring 80a and the inner peripheral ring 80c. It consists of a ball 80b.
- the inner ring 80 c is fixedly attached to the shaft 10, and rotates with the shaft 10 when the shaft 10 rotates around the axis A.
- a plurality of balls 80b are arranged along the outer circumferential direction of the shaft 10.
- the inner ring 80c fixed to the shaft 10 can rotate relative to the outer ring 80a fixed to the housing in a low friction state by the rotation of the ball 80b.
- the outer ring 80a, the ball 80b, and the inner ring 80c are formed using a magnetic material, and preferably act as a magnetic transmission member of the magnet 14. That is, the ball bearing 80 plays the role of the first magnetic pole members 18 and 58 in the sealing devices 3 and 6 according to the first and second embodiments, and the magnetic force generated by the magnet 14 causes the ball bearing 80 and the shaft 10 to move. Is transmitted to the magnetic fluid 26 via
- the first magnetic pole member 82 includes a first ring portion 84 disposed on the outside of the processing chamber and a second ring portion 86 disposed on the inside of the processing chamber with respect to the first ring portion 84.
- the first ring portion 84 is disposed so as to be in contact with the end portion of the magnet 14 on the processing chamber inner side.
- the first ring portion 84 has a substantially I-shaped cross section when observed in a cross section passing through the axis A of the shaft 10.
- the second ring portion 86 has a substantially T-shaped cross-sectional shape when observed in a cross-section passing through the axis A of the shaft 10.
- the second ring portion 86 is disposed so as to contact the end of the first ring portion 84 on the processing chamber inner side.
- the first magnetic pole member 82 includes two members, a first ring portion 84 and a second ring portion 86. That is, the sealing groove 90 in which the X ring is accommodated is formed by combining the first ring portion 84 and the second ring portion 86.
- a first inward protruding edge 88 a that is a wall on the outside of the processing chamber in the sealing groove 90 is configured by a part of the first ring portion 84.
- the second inner projecting edge 88 b that is a wall on the processing chamber inner side in the sealing groove 90 and the bottom portion 90 a of the sealing groove 90 are constituted by the second ring portion 86.
- the X ring 64 accommodated in the sealing groove 90 is the same as the X ring 64 included in the sealing device 6 according to the second embodiment.
- the first protrusion 64 a and the second protrusion 64 b of the X ring 64 slide relative to the outer peripheral surface 10 a of the shaft 10 to seal between the first magnetic pole member 82 and the shaft 10.
- the magnetic fluid 26 held in the vicinity of the front end portion of the first inner protruding edge 88a is the first inner protruding edge 88a. It can easily reach the first protrusion 64a in the vicinity of the front end portion of the, and can preferably act as a lubricant.
- the fluid holding groove 64e is formed in the X ring 64, the magnetic fluid 26 can easily reach the second protrusion 64b via the first protrusion 64a and the fluid holding groove 64e.
- the sealing device 7 has a ball bearing 80, and the ball bearing 80 also serves as a magnetic transmission member that transmits the magnetism of the magnet 14. Therefore, the sealing device 7 can bearing the shaft 10 with high accuracy.
- the seal device 7 since the ball bearing 80 also serves as a magnetic transmission member that transmits the magnetism of the magnet 14, the seal device 7 is suitable for downsizing because it is not necessary to provide a second magnetic pole member separately. Further, the sealing device 7 does not require a separate bearing for bearing the shaft 10 on the inside of the processing chamber or the outside of the processing chamber of the sealing device 7 or can simplify the bearing provided separately. Therefore, the sealing device 7 is also suitable for downsizing in this respect.
- the sealing device 7 has a structure in which the magnetic lines of force pass through the ball bearing 80, thereby concentrating the magnetic force between the first inward projecting edge 88 a of the first magnetic pole member 82 and the shaft 10, thereby providing magnetic properties.
- the holding ability of the fluid 26 can be improved. This is because the sealing device 7 can transmit the magnetic force generated by the magnet 14 to the magnetic fluid 26 by a magnetic circuit configured by connecting components using a magnetic material.
- the first magnetic pole member 82 is constituted by two members including a first ring portion 84 and a second ring portion 86.
- the X ring 64 is arranged in a state where both sides in the axis A direction are sandwiched between the first ring portion 84 and the second ring portion 86. Therefore, the sealing device 7 according to the present embodiment can easily replace the X ring 64.
- the bottom portion 90a of the sealing groove 90 is constituted by the second ring portion 86.
- the configuration of the sealing groove 90 is not limited to that shown in FIG. 5.
- the bottom portion 90 a of the sealing groove 90 may be configured by the first ring portion. That is, in the sealing device according to the modification of the third embodiment, the first ring portion that contacts the magnet 14 has a substantially T-shaped cross-sectional shape, and the second ring portion that contacts the first ring portion. Have a substantially I-shaped cross-sectional shape.
- the sealing device according to such a modification also has the same effect as the sealing device 7 shown in FIG.
- the first ring portion 84 and the second ring portion 86 shown in FIG. 5 may be configured as an integral member instead of separate members. Is mentioned.
- the sealing device in which the first ring portion 84 and the second ring portion 86 shown in FIG. 5 are integrated also has the same effect as the sealing device 7 according to the third embodiment with respect to the holding capacity of the magnetic fluid 26 and the like.
- Example 1 the sliding life of the O-ring 24 that is a seal member was evaluated using the seal device 3 according to the first embodiment shown in FIG.
- the magnetic fluid 26 a fluorine-based magnetic fluid was used.
- the rotational speed of the shaft 10 in the sliding life evaluation according to the example was performed under the condition that the moving speed of the outer peripheral surface 10a of the shaft 10 is 0.4 to 0.6 m / s.
- the sliding life evaluation according to the example was performed in a state where the inside of the processing chamber was 10-5 to 10-4 Pa and the outside of the processing chamber was atmospheric pressure.
- the O-ring 24 moves relative to the outer peripheral surface 10a of the shaft 10 from the start of the evaluation until either one of the continuous increase in the pressure in the processing chamber or the decrease in the rotation speed of the shaft 10 occurs. This distance was defined as the sliding life.
- the decrease in the rotational speed of the shaft 10 occurs when the sliding resistance increases due to wear of the O-ring 24 and the like, and this becomes larger than the driving torque of the shaft 10 by a motor or the like.
- the results are shown in Table 1.
- Example 2 the sliding life evaluation of the X ring 64 as a seal member was performed using the seal device 6 according to the second embodiment shown in FIG.
- the magnetic fluid 26 a fluorine-based magnetic fluid was used in the same manner as in Example 1.
- the other conditions such as the rotational speed of the shaft are the same as those in the first embodiment.
- the results are shown in Table 1.
- Reference example 1
- Example 1 the O-ring 24 had a sliding life of 10 to 300 times that of each reference example.
- the sealing device 3 used in the first embodiment since the fluid holding projection 22 shown in FIG. 1 protrudes toward the O-ring 24 and the shaft 10, the tip of the fluid holding projection 22 that holds the most magnetic fluid 26. The portion is disposed in proximity to the O-ring 24. Therefore, it is considered that the magnetic fluid 26 easily reaches the sliding surface of the shaft 10 and the O-ring 24 via the O-ring 24 and preferably acts as a lubricant for the sliding surface.
- the X-ring 64 used as a seal member in Example 2 had a sliding life of 30 to 840 times that of each reference example.
- the tip portion of the first inward protruding edge 59a shown in FIG. 2 is in a state of being close to the first protrusion 64a of the X ring 64, compared with the case where the O ring 24 is used.
- the magnetic fluid 26 and the seal member can be brought closer to each other. Therefore, it is considered that the magnetic fluid 26 easily reaches the sliding surface of the first protrusion 64a of the X-ring 64 and preferably acts as a lubricant for the sliding surface.
- the magnetic fluid 26 easily reaches the second protrusion 64b via the first protrusion 64a and the fluid holding groove 64e of the X ring 64, and is suitable as a lubricant on the sliding surface of the X ring 64 and the shaft 10. It is thought that it acted on.
- the viscosity of the magnetic fluid 26 used in Examples 1 and 2 is lower than the viscosity of the grease used in Reference Examples 1 and 2, but the magnetic fluid 26 is held by the fluid holding protrusion 22 by magnetic force. It is held on the sliding surface between the seal member (O-ring 24 or X-ring 64) and the shaft 10.
- the magnetic fluid 26 since the magnetic fluid 26 has a low viscosity and can easily reach the sliding surface, the magnetic fluid 26 is maintained in a more uniform state as a whole. Therefore, it is considered that the magnetic fluid 26 is prevented from locally deteriorating in the vicinity of the sliding surface, and the magnetic fluid 26 in the embodiment is considered to have suitably acted as a lubricant.
- the O-ring 24 had a sliding life of 11 to 1/18 compared with Example 1.
- Greases Y and Z used in Reference Examples 1 and 2 are greases generally used in the prior art.
- the grease generally used in the prior art has a higher viscosity than the magnetic fluid 26 used in Examples 1 and 2, and therefore, in Reference Example 1 and Reference Example 2, even when the grease on the sliding surface deteriorates, It is considered that the grease on the deteriorated sliding surface cannot be replaced with the grease existing in the surrounding area, and the sliding life of the O-ring 24 is shortened.
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
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- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Sealing Devices (AREA)
Abstract
Description
所定の環境に保持される処理室の内部に、当該処理室の外部から当該処理室の環境を維持しつつ所定の機械的運動を伝達するシール装置であって、
前記処理室に前記所定の機械的運動を伝達するシャフトと、
前記シャフトが貫通するハウジングと、
前記ハウジングと前記シャフトとの間に配置されて前記シャフトの周囲において磁力を発生する磁力発生手段と、
前記ハウジングから前記シャフトに向かって突出しており、前記シャフトを取り囲むシーリング溝を形成する一対の内方突縁を有し、前記磁力発生手段に隣接して配置されて当該磁力発生手段で発生される磁力を伝達する磁気伝達部材と、
少なくとも一部が前記シャフトに向かってはみ出した状態で前記シーリング溝に収納され、前記シャフトの外側面に対して摺動するシール部材と、
前記磁力発生手段により発生された磁力により前記シャフトと前記磁気伝達部材の間に保持される磁性流体と
を有し、前記一対の内方突縁のうち前記磁力発生手段に近接する第1内方突縁における前記シャフトに近接する端部には、前記シャフトおよび前記シール部材に向かって突出する流体保持突部が形成されていることを特徴とする。
所定の環境に保持される処理室の内部に、当該処理室の外部から当該処理室の環境を維持しつつ所定の機械的運動を伝達する磁性流体シール装置であって、
前記処理室に前記所定の機械的運動を伝達するシャフトと、
前記シャフトが貫通するハウジングと、
前記ハウジングと前記シャフトとの間に配置されて前記シャフトの周囲において磁力を発生する磁力発生手段と、
前記ハウジングから前記シャフトに向かって突出して前記シャフトを取り囲むシーリング溝を形成する一対の内方突縁を有し、前記磁力発生手段に隣接して配置されて当該磁力発生手段で発生される磁力を伝達する磁気伝達部材と、
少なくとも一部が前記シャフトに向かってはみ出した状態で前記シーリング溝に収納され、前記シャフトの外側面に対して摺動するシール部材と、
前記磁力発生手段により発生された磁力により前記シャフトと前記磁気伝達部材の間に保持される磁性流体と
を有し、前記シーリング溝は、アリ溝形状を有していることを特徴とする。
所定の環境に保持される処理室の内部に、当該処理室の外部から当該処理室の環境を維持しつつ所定の機械的運動を伝達する磁性流体シール装置であって、
前記処理室に前記所定の機械的運動を伝達するシャフトと、
前記シャフトが貫通するハウジングと、
前記ハウジングと前記シャフトとの間に配置されて前記シャフトの周囲において磁力を発生する磁力発生手段と、
前記ハウジングから前記シャフトに向かって突出して前記シャフトを取り囲むシーリング溝を形成する一対の内方突縁を有し、前記磁力発生手段に隣接して配置されて当該磁力発生手段で発生される磁力を伝達する磁気伝達部材と、
少なくとも一部が前記シャフトに向かってはみ出した状態で前記シーリング溝に収納され、前記シャフトの外側面に対して摺動するシール部材と、
前記磁力発生手段により発生された磁力により前記シャフトと前記磁気伝達部材の間に保持される磁性流体と
を有し、前記シャフトの中心軸を通る断面によって観察した前記シーリング溝の断面は、略矩形形状を有しており、
前記シール部材は、前記シーリング溝の前記略矩形形状の頂点のいずれかに向かって突出する2以上の突起部を有しており、前記突起部のうち前記シャフト側に向かって突出する2つの突起部の間には、前記磁性流体を保持する流体保持溝が形成されていることを特徴とする。
図1は、本発明の第1実施形態に係るシール装置3を表す断面図である。シール装置3は、不図示の処理室に設けられた開口を塞ぐように配置されており、処理室内部を処理室外部に対して気密状態に保つことができる。本実施形態に係るシール装置3が配置される処理室としては、特に限定されないが、例えばシリコンウェーハの処理を行うウェーハ処理室や、真空状態と大気圧状態とを繰り返すロードロック室等が挙げられる。また、処理室内部は、処理室外部に対して負圧環境に保持されるものであっても良く、また、等圧もしくは加圧環境に保持されるものであってもよい。
第2実施形態
第3実施形態
実施例1
実施例2
参考例1
参考例2
参考例3
Claims (4)
- 所定の環境に保持される処理室の内部に、当該処理室の外部から当該処理室の環境を維持しつつ所定の機械的運動を伝達する磁性流体シール装置であって、
前記処理室に前記所定の機械的運動を伝達するシャフトと、
前記シャフトが貫通するハウジングと、
前記ハウジングと前記シャフトとの間に配置されて前記シャフトの周囲において磁力を発生する磁力発生手段と、
前記ハウジングから前記シャフトに向かって突出して前記シャフトを取り囲むシーリング溝を形成する一対の内方突縁を有し、前記磁力発生手段に隣接して配置されて当該磁力発生手段で発生される磁力を伝達する磁気伝達部材と、
少なくとも一部が前記シャフトに向かってはみ出した状態で前記シーリング溝に収納され、前記シャフトの外側面に対して摺動するシール部材と、
前記磁力発生手段により発生された磁力により前記シャフトと前記磁気伝達部材の間に保持される磁性流体と
を有し、前記内方突縁のうち前記磁力発生手段に近接する第1内方突縁における前記シャフトに近接する端部には、前記シャフトおよび前記シール部材に向かって突出する流体保持突部が形成されていることを特徴とするシール装置。 - 所定の環境に保持される処理室の内部に、当該処理室の外部から当該処理室の環境を維持しつつ所定の機械的運動を伝達する磁性流体シール装置であって、
前記処理室に前記所定の機械的運動を伝達するシャフトと、
前記シャフトが貫通するハウジングと、
前記ハウジングと前記シャフトとの間に配置されて前記シャフトの周囲において磁力を発生する磁力発生手段と、
前記ハウジングから前記シャフトに向かって突出して前記シャフトを取り囲むシーリング溝を形成する一対の内方突縁を有し、前記磁力発生手段に隣接して配置されて当該磁力発生手段で発生される磁力を伝達する磁気伝達部材と、
少なくとも一部が前記シャフトに向かってはみ出した状態で前記シーリング溝に収納され、前記シャフトの外側面に対して摺動するシール部材と、
前記磁力発生手段により発生された磁力により前記シャフトと前記磁気伝達部材の間に保持される磁性流体と
を有し、前記シーリング溝は、アリ溝形状を有していることを特徴とするシール装置。 - 所定の環境に保持される処理室の内部に、当該処理室の外部から当該処理室の環境を維持しつつ所定の機械的運動を伝達する磁性流体シール装置であって、
前記処理室に前記所定の機械的運動を伝達するシャフトと、
前記シャフトが貫通するハウジングと、
前記ハウジングと前記シャフトとの間に配置されて前記シャフトの周囲において磁力を発生する磁力発生手段と、
前記ハウジングから前記シャフトに向かって突出して前記シャフトを取り囲むシーリング溝を形成する一対の内方突縁を有し、前記磁力発生手段に隣接して配置されて当該磁力発生手段で発生される磁力を伝達する磁気伝達部材と、
少なくとも一部が前記シャフトに向かってはみ出した状態で前記シーリング溝に収納され、前記シャフトの外側面に対して摺動するシール部材と、
前記磁力発生手段により発生された磁力により前記シャフトと前記磁気伝達部材の間に保持される磁性流体と
を有し、前記シーリング溝は、前記シャフトの中心軸を通る断面の形状が略矩形形状であり、
前記シール部材は、前記シーリング溝の前記略矩形形状の頂点のそれぞれに向かって突出する4つの突起部を有しており、前記突起部のうち前記シャフト側に向かって突出する2つの突起部の間には、前記磁性流体を保持する流体保持溝が形成されていることを特徴とするシール装置。 - 前記磁気伝達部に対して前記磁気発生手段を挟んで配置され、当該磁力発生手段で発生される磁気を伝達する第2磁気伝達部をさらに有する請求項1から3のいずれかに記載されたシール装置。
Priority Applications (3)
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JP2010519755A JP5568810B2 (ja) | 2008-07-07 | 2009-07-03 | シール装置 |
CN200980100608A CN101809345A (zh) | 2008-07-07 | 2009-07-03 | 密封装置 |
US12/680,340 US20100230903A1 (en) | 2008-07-07 | 2009-07-03 | Sealing apparatus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2008-176854 | 2008-07-07 | ||
JP2008176854 | 2008-07-07 |
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WO2010004935A1 true WO2010004935A1 (ja) | 2010-01-14 |
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Application Number | Title | Priority Date | Filing Date |
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PCT/JP2009/062198 WO2010004935A1 (ja) | 2008-07-07 | 2009-07-03 | シール装置 |
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US (1) | US20100230903A1 (ja) |
JP (1) | JP5568810B2 (ja) |
KR (1) | KR20110036524A (ja) |
CN (1) | CN101809345A (ja) |
TW (1) | TW201017014A (ja) |
WO (1) | WO2010004935A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012086320A1 (ja) * | 2010-12-23 | 2012-06-28 | イーグル工業株式会社 | 磁性流体を利用したシール装置 |
JP2013069621A (ja) * | 2011-09-26 | 2013-04-18 | Nitto Denko Corp | 表面処理装置および磁気シール式電流導入端子 |
JP2016183776A (ja) * | 2015-03-25 | 2016-10-20 | イーグル工業株式会社 | 高周速磁性流体シール構造 |
Families Citing this family (1)
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CN111503275A (zh) * | 2020-04-30 | 2020-08-07 | 大连理工大学 | 隧道掘进机主驱动橡胶-磁流体耦合密封装置及安装方法 |
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- 2009-07-03 WO PCT/JP2009/062198 patent/WO2010004935A1/ja active Application Filing
- 2009-07-03 JP JP2010519755A patent/JP5568810B2/ja active Active
- 2009-07-03 CN CN200980100608A patent/CN101809345A/zh active Pending
- 2009-07-03 KR KR1020107006900A patent/KR20110036524A/ko not_active Application Discontinuation
- 2009-07-03 US US12/680,340 patent/US20100230903A1/en not_active Abandoned
- 2009-07-06 TW TW098122737A patent/TW201017014A/zh unknown
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JPS6097462U (ja) * | 1983-12-09 | 1985-07-03 | 株式会社神戸製鋼所 | 回転軸のシ−ル装置 |
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JP2003240131A (ja) * | 2002-02-21 | 2003-08-27 | Nok Corp | 密封装置 |
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WO2012086320A1 (ja) * | 2010-12-23 | 2012-06-28 | イーグル工業株式会社 | 磁性流体を利用したシール装置 |
JP5748155B2 (ja) * | 2010-12-23 | 2015-07-15 | イーグル工業株式会社 | 磁性流体を利用したシール装置 |
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JP2013069621A (ja) * | 2011-09-26 | 2013-04-18 | Nitto Denko Corp | 表面処理装置および磁気シール式電流導入端子 |
JP2016183776A (ja) * | 2015-03-25 | 2016-10-20 | イーグル工業株式会社 | 高周速磁性流体シール構造 |
Also Published As
Publication number | Publication date |
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JP5568810B2 (ja) | 2014-08-13 |
CN101809345A (zh) | 2010-08-18 |
KR20110036524A (ko) | 2011-04-07 |
TW201017014A (en) | 2010-05-01 |
US20100230903A1 (en) | 2010-09-16 |
JPWO2010004935A1 (ja) | 2012-01-05 |
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