WO2009146447A1 - High vibration thin film rtd sensor - Google Patents

High vibration thin film rtd sensor Download PDF

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Publication number
WO2009146447A1
WO2009146447A1 PCT/US2009/045836 US2009045836W WO2009146447A1 WO 2009146447 A1 WO2009146447 A1 WO 2009146447A1 US 2009045836 W US2009045836 W US 2009045836W WO 2009146447 A1 WO2009146447 A1 WO 2009146447A1
Authority
WO
WIPO (PCT)
Prior art keywords
temperature sensor
rtd
ceramic adhesive
adhesive
sheath
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2009/045836
Other languages
English (en)
French (fr)
Inventor
Holger Weber
Ulrich Thiel
Dirk Willy Bauschke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rosemount Inc
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Priority to EP09755807.6A priority Critical patent/EP2291625A4/en
Priority to CN200980119759.9A priority patent/CN102047087B/zh
Priority to JP2011511895A priority patent/JP5395897B2/ja
Publication of WO2009146447A1 publication Critical patent/WO2009146447A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/08Protective devices, e.g. casings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00Thermometers specially adapted for specific purposes
    • G01K13/02Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow
    • G01K13/024Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow of moving gases
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K2205/00Application of thermometers in motors, e.g. of a vehicle
    • G01K2205/04Application of thermometers in motors, e.g. of a vehicle for measuring exhaust gas temperature
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49082Resistor making
    • Y10T29/49085Thermally variable

Definitions

  • the present invention relates to temperature sensors, and in particular to a temperature sensor capable of operating in high vibration environments with improved accuracy and a high temperature range.
  • the temperature of a process fluid in an industrial process is typically measured by a temperature sensor or probe that is positioned in the fluid.
  • the temperature sensor may use a thermocouple or a resistance temperature detector (RTD) to produce an electrical signal that is a function of temperature.
  • RTD resistance temperature detector
  • a thermocouple makes use of two dissimilar metals with different Seebeck coefficients.
  • the thermocouple generates a voltage based upon a temperature difference between the thermocouple junction and a reference junction.
  • the thermocouple offers a wide temperature operating range (typically from 0°C to 1450°C), and does not require a power source to generate an output signal.
  • Thermocouples also are capable of operating in high vibration environments. However, thermocouples are less accurate than RTD devices.
  • a resistance temperature detector senses temperature by a change in electrical resistance of a metal. The higher the temperature of the RTD, the higher the resistance.
  • An output signal of the RTD sensor is generated by passing a constant electrical current through the RTD and measuring the voltage produced.
  • An RTD may be either a wire wound or a thin film device.
  • the RTD may be encapsulated in a temperature probe and used in conjunction with an industrial process transmitter to generate a transmitter output representing the temperature of the fluid in contact with the probe.
  • Platinum is commonly used in wire wound and thin film RTDs, and provides stable and accurate measurement of temperatures up to about 600°C to 65O 0 C.
  • RTD devices When compared to thermocouples, RTD devices are capable of higher accuracy but have smaller overall temperature range. Also, RTD devices are more susceptible to damage or failure in high vibration environments than are thermocouples. There is a need for a temperature sensor capable of operation in high vibration environments with the accuracy of an RTD and with a better high temperature range than is currently available with RTDs designed for high vibration environments.
  • a temperature sensor includes a sensor sheath mounted at a distal end of a cable carrying electrical leads.
  • An RTD sensing element positioned within the sheath is connected to leads from the cable.
  • a ceramic thermal adhesive holds the RTD sensing element in place within the sheath.
  • FIG. 1 is a cross-sectional view of a distal portion of the RTD temperature sensor of the present invention.
  • FIG. 1 is a cross-sectional view of a distal portion of RTD temperature sensor 10, which is capable of operating in high vibration environments, which provides improved high temperature performance.
  • RTD sensor 10 includes mineral insulator (MI) cable 12, sheath 14, and RTD sensing element 16.
  • MI mineral insulator
  • MI cable 12 extends from the proximal end (not shown) of RTD sensor 10 to sheath 14 at the distal end of RTD sensor 10.
  • MI cable 12 includes outer tube 20, electrical leads 22a, 22b, 22c, and 22d, and a filling of a mineral insulator powder.
  • outer tube 20 is a metallic tube made of 321 stainless steel, leads 22a-
  • mineral insulator filler 24 is magnesium oxide (MgO) powder.
  • Sheath 14 includes extension tube 30 and end cap 32. Distal end of extension tube 30 is welded to the distal end of tube 20. End cap 32 is welded to the distal end of extension tube 30 to close the distal end of sheath 14. In one embodiment, both extension tube 30 and end cap 32 are 316 stainless steel. In other embodiments, extension tube 30 may be formed of 316L, 321, or 316Ti stainless steel.
  • RTD sensing element 16 is positioned within sheath 14 near end cap 32. Leads 34a and 34b of RTD sensing element 16 extend in a proximal direction to make connection with leads 22a- 22d of cable 12. Lead 34a of RTD sensing element 16 is connected to the distal ends of leads 22a and 22b by laser weld 36a. Lead 34b of RTD sensing element 16 is connected to the distal ends of cable leads 22c and 22d by laser weld 36b.
  • RTD sensing element 16 is a thin film RTD device, such as the HD-421 sensing element manufactured by Heraeus Sensor GmbH. In that embodiment, lead 34a and 34b are platinum leads. In other embodiments, wire wound
  • RTD sensing elements may be used.
  • ceramic adhesive filler 38 is a two-component thermoepoxy Thermoguss 2000, which provides stable temperature performance up to about 450 0 C.
  • ceramic adhesive filler 38 is Cerastil V336, a two-component ceramic adhesive, which provides stable operation up to about 600 0 C.
  • Ceramic adhesive filler 38 must provide electrical insulation, stable characteristics up to the desired maximum temperature, and must prevent relative movement of RTD sensing element 16 and sheath 14. Ceramic adhesive filler 38 prevents relative movement by forming a rigid mass within sheath 14, so that RTD sensing element 16 cannot move relative to capsule 14 during vibration of RTD sensor
  • the vibrational load on sensor 10 can exceed an acceleration of 100m/s at frequencies in range of 10Hz to 500Hz. In some cases, the acceleration can be up to 600m/s over the frequency range of 10Hz to 500Hz.
  • Cerastil V336 offers a higher operating range (up to 600 0 C), but does not have as high a thermal conductivity as Thermoguss 2000. It is possible, however, to achieve enhanced temperature range and response times by using a combination of Cerastil V336 and
  • Thermoguss 2000 In one embodiment, approximately two thirds of the interior of sheath 14 is filled with Cerastil V336, and one third of sheath 14 is filled with Thermoguss 2000. In that embodiment, the portion filled by Thermoguss 2000 is at the distal end, nearest RTD sensing element 16. Other combinations of layers of ceramic adhesives are also possible.
  • RTD sensor 10 is fabricated by laser welding leads 34a and 34b to leads 22a-22d that extend from the distal end of MI cable 12. Extension tube 30 is then placed over leads 22a-22d, leads 34a, 34b, and RTD sensing element 16 so that the proximal end of extension tube 30 abuts the distal end of tube 20 of cable 12. A laser welded butt joint is then formed between tube 20 and extension tube 30.
  • Ceramic adhesive filler 38 is then introduced into the interior of sheath 14 as defined by extension tube 30. End cap 32 has not yet been joined to extension tube 30, so that ceramic adhesive filler 38 can be introduced through the distal opening of sheath
  • Ceramic adhesive filler 38 may be allowed to cure and harden before end cap 32 is inserted into the distal opening and welded to extension tube 30.
  • RTD sensors in which the entire capsule was filled with Thermoguss 2000 also provided satisfactory operation in vibrational loads of acceleration up to 600m/s in a range of frequency from 10Hz to 500Hz.
  • the RTD sensors in which Thermoguss 2000 filled the entire capsule provided satisfactory stable temperature performance up to about

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
PCT/US2009/045836 2008-05-30 2009-06-01 High vibration thin film rtd sensor Ceased WO2009146447A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP09755807.6A EP2291625A4 (en) 2008-05-30 2009-06-01 THIN FILM RTD PROBE AND STRONG VIBRATIONS
CN200980119759.9A CN102047087B (zh) 2008-05-30 2009-06-01 高振动薄膜rtd传感器
JP2011511895A JP5395897B2 (ja) 2008-05-30 2009-06-01 高振動対応抵抗温度センサ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/156,144 US7982580B2 (en) 2008-05-30 2008-05-30 High vibration thin film RTD sensor
US12/156,144 2008-05-30

Publications (1)

Publication Number Publication Date
WO2009146447A1 true WO2009146447A1 (en) 2009-12-03

Family

ID=41377624

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2009/045836 Ceased WO2009146447A1 (en) 2008-05-30 2009-06-01 High vibration thin film rtd sensor

Country Status (5)

Country Link
US (1) US7982580B2 (enExample)
EP (1) EP2291625A4 (enExample)
JP (1) JP5395897B2 (enExample)
CN (1) CN102047087B (enExample)
WO (1) WO2009146447A1 (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010031127A1 (de) 2010-07-08 2012-01-12 Endress + Hauser Flowtec Ag Messaufnehmer eines thermischen Durchflussmessgeräts zur Ermittlung des Durchflusses eines Mediums durch ein Messrohr und Verfahren zu dessen Herstellung
FR3016695A1 (fr) * 2014-01-21 2015-07-24 Okazaki Mfg Company Capteur de temperature pour temperature elevee
EP3772638A1 (en) 2019-08-08 2021-02-10 Ztove ApS Thermal sensor wire and method of assembling the same
EP3822596A1 (en) * 2019-11-13 2021-05-19 HIDRIA d.o.o. Method for manufacturing a sensing tip for a temperature sensing device, temperature sensing device, combustion engine and vehicle comprising the same
CN114689192A (zh) * 2020-12-30 2022-07-01 罗斯蒙特公司 具有改进的响应时间的温度探针

Families Citing this family (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7997795B2 (en) * 2006-05-02 2011-08-16 Watlow Electric Manufacturing Company Temperature sensors and methods of manufacture thereof
US8303173B2 (en) * 2007-10-29 2012-11-06 Smiths Medical Asd, Inc. Dual potting temperature probe
DE102008015359A1 (de) * 2008-03-20 2009-09-24 Endress + Hauser Flowtec Ag Temperatursensor und Verfahren zu dessen Herstellung
US8118485B2 (en) * 2008-09-04 2012-02-21 AGlobal Tech, LLC Very high speed thin film RTD sandwich
US8118486B2 (en) * 2008-09-04 2012-02-21 AGlobal Tech, LLC Very high speed temperature probe
JP4541436B2 (ja) * 2008-11-27 2010-09-08 日本特殊陶業株式会社 温度センサ
US20110026562A1 (en) * 2009-07-31 2011-02-03 Rtd Company Temperature sensor using thin film resistance temperature detector
DE102010031917B3 (de) * 2010-07-22 2012-02-02 Borgwarner Beru Systems Gmbh Temperatursensor
US8828570B2 (en) 2011-06-29 2014-09-09 Hewlett-Packard Development Company, L.P. Battery temperature sensor
US20130301677A1 (en) * 2012-05-14 2013-11-14 Thermo King Corporation Temperature probe for transport refrigeration
US9958334B2 (en) 2012-09-17 2018-05-01 TESONA GmbH & Co. High temperature sensor with a moulded protective tube
US20150231868A1 (en) * 2012-09-17 2015-08-20 Tesona Gmbh & Co. Kg Method for pressing or welding the protective cover of a high temperature sensor
DE102013015377A1 (de) * 2012-09-17 2014-03-20 Tesona Gmbh & Co. Kg Hochtemperatursensor und Verfahren zur Herstellung einer Schutzkappe für einen Hochtemperatursensor
US20150192444A1 (en) * 2012-09-21 2015-07-09 Sierra Instruments, Inc. Single-probe mass flow meters
US20150192443A1 (en) * 2012-09-21 2015-07-09 Sierra Instruments, Inc. Wire-wound sensor componentry for mass flow meters
US9188490B2 (en) * 2013-03-12 2015-11-17 Rosemount Inc. Thermowell insert
US20170138800A1 (en) * 2014-07-14 2017-05-18 Tokyo Electron Limited Temperature sensor
JP6421690B2 (ja) * 2014-07-17 2018-11-14 株式会社デンソー 温度センサ
CN107076619B (zh) * 2014-10-24 2021-01-22 沃特洛电气制造公司 快速响应传感器外壳
KR101766285B1 (ko) 2016-03-28 2017-08-08 주식회사 동양센서 온도센서 및 그 제조방법
EP3264059B1 (en) * 2016-06-27 2019-01-30 MEAS France Temperature sensor with heat transfer element and fabrication method
US10317295B2 (en) * 2016-09-30 2019-06-11 Rosemount Inc. Heat flux sensor
DE102017118198A1 (de) * 2016-11-03 2018-05-03 Danfoss A/S Rohrförmige Leitungsabschirmung für eine Abgastemperatursensoranordnung, Abgastemperatursensoranordnung und Verfahren zum Zusammenbauen einer Abgastemperatursensoranordnung
DE102016125403A1 (de) * 2016-12-22 2018-06-28 Endress + Hauser Wetzer Gmbh + Co Kg Temperatursensor
JP6888439B2 (ja) 2017-06-28 2021-06-16 株式会社デンソー 温度センサ
US10976204B2 (en) 2018-03-07 2021-04-13 Rosemount Inc. Heat flux sensor with improved heat transfer
DE102018111167A1 (de) * 2018-05-09 2019-11-14 Endress + Hauser Wetzer Gmbh + Co. Kg Messeinsatz mit Schutzrohr
US11073429B2 (en) * 2018-09-24 2021-07-27 Rosemount Inc. Non-invasive process fluid temperature indication for high temperature applications
US20200103293A1 (en) * 2018-09-28 2020-04-02 Rosemount Inc. Non-invasive process fluid temperature indication
RU2770168C1 (ru) 2018-09-28 2022-04-14 Роузмаунт Инк. Неинвазивная индикация температуры технологической среды со сниженной погрешностью
WO2021207976A1 (en) * 2020-04-15 2021-10-21 Rosemount Inc. Vibration resistant temperature sensing assembly
US12151442B1 (en) 2020-06-09 2024-11-26 Ingenarious Consultants LLC Pliable material milling technology
US20230096651A1 (en) * 2021-09-28 2023-03-30 Rosemount Inc. Temperature probe
DE102022111698A1 (de) 2022-05-10 2023-11-16 Danfoss A/S Temperatursensor und Verfahren zur Herstellung eines Temperatursensors

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5030294A (en) * 1987-05-20 1991-07-09 Bell-Irh Limited High-temperature mineral-insulated metal-sheathed cable
US6059453A (en) * 1998-04-20 2000-05-09 Rosemount Inc. Temperature probe with sapphire thermowell
US20070104247A1 (en) * 2005-11-09 2007-05-10 Denso Corporation Temperature sensor
US20080036569A1 (en) * 2006-07-21 2008-02-14 Beru Aktiengesellschaft Temperature sensor for a resistance thermometer, in particular for use in the exhaust gas system of combustion engines
US20080080592A1 (en) * 2006-07-21 2008-04-03 Hans Houben Temperature sensor for a resistance thermometer, in particular for use in the exhaust gas system of combustion engines

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3119956C2 (de) * 1981-05-20 1984-11-22 Joh. Friedrich Behrens AG, 2070 Ahrensburg Schallgedämpftes Eintreibgerät für Befestigungsmittel
JPS5863535U (ja) * 1981-10-23 1983-04-28 日立電線株式会社 温度センサ
US4575705A (en) 1984-02-17 1986-03-11 Weed Instrument Co., Inc. Temperature probe
US4590669A (en) * 1984-11-13 1986-05-27 Netsushin Co., Ltd. Method of preparing resistance thermometer
GB8531177D0 (en) * 1985-12-18 1986-01-29 Bicc Plc Temperature monitoring device
US4937552A (en) 1986-03-28 1990-06-26 Weed Instrument Company Resistance temperature detector
DE4103642A1 (de) * 1991-02-07 1992-08-13 Ego Elektro Blanc & Fischer Temperaturfuehler
US5632557A (en) 1994-12-16 1997-05-27 Weed Instrument Company, Inc. Modular temperature sensing apparatus
US5674009A (en) 1995-05-03 1997-10-07 Weed Instrument Company, Inc. Adjustable length temperature sensor
JPH11218449A (ja) * 1997-11-21 1999-08-10 Denso Corp 温度センサ及びその製造方法
US6305841B1 (en) * 1998-09-29 2001-10-23 Denso Corporation Temperature sensor with thermistor housed in blocked space having ventilation
JP3975023B2 (ja) * 1999-03-19 2007-09-12 日本特殊陶業株式会社 温度センサ
JP3788363B2 (ja) * 2001-03-23 2006-06-21 株式会社デンソー 温度センサ
US6762671B2 (en) * 2002-10-25 2004-07-13 Delphi Technologies, Inc. Temperature sensor and method of making and using the same
JP4620400B2 (ja) * 2004-07-16 2011-01-26 日本特殊陶業株式会社 温度センサ、温度センサの製造方法
JP2007198806A (ja) * 2006-01-24 2007-08-09 Mitsubishi Materials Corp 温度センサ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5030294A (en) * 1987-05-20 1991-07-09 Bell-Irh Limited High-temperature mineral-insulated metal-sheathed cable
US6059453A (en) * 1998-04-20 2000-05-09 Rosemount Inc. Temperature probe with sapphire thermowell
US20070104247A1 (en) * 2005-11-09 2007-05-10 Denso Corporation Temperature sensor
US20080036569A1 (en) * 2006-07-21 2008-02-14 Beru Aktiengesellschaft Temperature sensor for a resistance thermometer, in particular for use in the exhaust gas system of combustion engines
US20080080592A1 (en) * 2006-07-21 2008-04-03 Hans Houben Temperature sensor for a resistance thermometer, in particular for use in the exhaust gas system of combustion engines

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010031127A1 (de) 2010-07-08 2012-01-12 Endress + Hauser Flowtec Ag Messaufnehmer eines thermischen Durchflussmessgeräts zur Ermittlung des Durchflusses eines Mediums durch ein Messrohr und Verfahren zu dessen Herstellung
WO2012004117A1 (de) 2010-07-08 2012-01-12 Endress+Hauser Flowtec Ag Messaufnehmer eines thermischen durchflussmessgeräts zur ermittlung des durchflusses eines mediums durch ein messrohr und verfahren zu dessen herstellung
EP2591318B1 (de) * 2010-07-08 2017-10-25 Endress+Hauser Flowtec AG Messaufnehmer eines thermischen durchflussmessgeräts zur ermittlung des durchflusses eines mediums durch ein messrohr und verfahren zu dessen herstellung
FR3016695A1 (fr) * 2014-01-21 2015-07-24 Okazaki Mfg Company Capteur de temperature pour temperature elevee
EP3772638A1 (en) 2019-08-08 2021-02-10 Ztove ApS Thermal sensor wire and method of assembling the same
EP3822596A1 (en) * 2019-11-13 2021-05-19 HIDRIA d.o.o. Method for manufacturing a sensing tip for a temperature sensing device, temperature sensing device, combustion engine and vehicle comprising the same
CN114689192A (zh) * 2020-12-30 2022-07-01 罗斯蒙特公司 具有改进的响应时间的温度探针

Also Published As

Publication number Publication date
US20090296781A1 (en) 2009-12-03
US7982580B2 (en) 2011-07-19
CN102047087B (zh) 2015-11-25
EP2291625A1 (en) 2011-03-09
JP5395897B2 (ja) 2014-01-22
EP2291625A4 (en) 2015-07-29
JP2011522261A (ja) 2011-07-28
CN102047087A (zh) 2011-05-04

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