WO2009123009A1 - 流体分配装置、マイクロプラント、流体分配装置の設計方法及び流路閉塞検知方法 - Google Patents
流体分配装置、マイクロプラント、流体分配装置の設計方法及び流路閉塞検知方法 Download PDFInfo
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- WO2009123009A1 WO2009123009A1 PCT/JP2009/056106 JP2009056106W WO2009123009A1 WO 2009123009 A1 WO2009123009 A1 WO 2009123009A1 JP 2009056106 W JP2009056106 W JP 2009056106W WO 2009123009 A1 WO2009123009 A1 WO 2009123009A1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/717—Feed mechanisms characterised by the means for feeding the components to the mixer
- B01F35/7182—Feed mechanisms characterised by the means for feeding the components to the mixer with means for feeding the material with a fractal or tree-type distribution in a surface
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502746—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means for controlling flow resistance, e.g. flow controllers, baffles
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/01—Control of flow without auxiliary power
- G05D7/0186—Control of flow without auxiliary power without moving parts
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0694—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means or flow sources of very small size, e.g. microfluidics
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/30—Micromixers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00889—Mixing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/00891—Feeding or evacuation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00781—Aspects relating to microreactors
- B01J2219/0095—Control aspects
- B01J2219/00952—Sensing operations
- B01J2219/00954—Measured properties
- B01J2219/00959—Flow
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/14—Process control and prevention of errors
- B01L2200/143—Quality control, feedback systems
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/14—Process control and prevention of errors
- B01L2200/143—Quality control, feedback systems
- B01L2200/146—Employing pressure sensors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
- B01L2300/0864—Configuration of multiple channels and/or chambers in a single devices comprising only one inlet and multiple receiving wells, e.g. for separation, splitting
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8158—With indicator, register, recorder, alarm or inspection means
- Y10T137/8175—Plural
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
Definitions
- the present invention relates to a fluid distribution device, a microplant, a fluid distribution device design method, and a flow path blockage detection method.
- the microchemical process realizes a chemical process in a small space by connecting micron-order process equipment (micro-processing apparatus) via a micron-order channel (micro-channel).
- a technique called numbering up is used as a technique for increasing the throughput, that is, a plurality of microprocessing devices are arranged in parallel, and a plurality of microchannels (parallelly arranged in parallel with each microprocessing device).
- a structure is adopted in which a fluid to be processed is supplied via the flow path) and the processed fluid is recovered from each micro processing apparatus via the parallel flow path.
- Patent Document 1 discloses a technique for adjusting the flow rate of each microchannel by providing a valve and a flow rate sensor in each microchannel as a fluid distribution technique for the microchannel in the numbering-up structure. ing.
- Patent Document 2 as a fluid mixing device having a numbering-up structure, a plurality of fluids are rectified in an annular flow path provided for each fluid, and then each fluid is used using a plurality of distribution flow paths. It is disclosed that equal distribution of each fluid is realized by distributing a plurality of fluids and providing pressure loss means in each distribution channel.
- each of the above conventional techniques has a complicated structure for realizing the uniform distribution of each fluid, and there is room for improvement. That is, in the micro chemical process, since the micro processing device and the micro flow path are provided in the minute space, the flow path shape is complicated, or a fluid such as the valve or the pressure loss means is provided in the middle of the flow path. When there is something that forms a staying part, the risk of the channel being blocked increases. In addition, since the micro measurement device such as the flow rate sensor forms a retention portion like the valve and the pressure loss means, it is a cause of blockage of the flow path and is expensive.
- the present invention has been made in view of the above-described circumstances, and has the following objects.
- Blockage of the flow path is prevented by realizing uniform distribution of the fluid with a simple configuration.
- the blockage of the parallel flow path is detected using a smaller number of measuring devices than in the past.
- the blockage state (blockage degree) of the block channel is detected.
- a fluid distribution device that equally distributes the fluid supplied to an input flow path to three or more output flow paths and outputs the fluid.
- it is formed by combining a plurality of branch flow paths, and includes at least three fluid branch portions and at least one fluid junction portion, and corresponds to a pressure loss compartment connection model including a fluid balance type and a pressure balance type. The method of being formed is adopted.
- a monitoring device for monitoring the blockage of each output flow path, and any two output flow paths among three or more output flow paths, respectively.
- Two flow meters provided, and the monitoring device acquires, as pre-processing, the measurement value of each flow meter in a state where all the output flow paths are not blocked as the reference flow rate, and each flow meter
- the measured value of each flow meter when the output flow path not provided with is closed is obtained as the reference flow rate, and the difference between the reference flow rate of one flow meter and the reference flow rate, the standard flow rate of the other flow meter, and the reference flow rate
- the ratio of the difference is stored as the reference flow rate change ratio.
- the measured value of each flow meter is acquired as the initial flow rate at the start of operation, and the measured value of each flow meter in the subsequent operation is evaluated. Get as flow rate and one
- the ratio of the difference between the initial flow rate and the evaluation flow rate of the meter and the difference between the initial flow rate and the evaluation flow rate of the other flow meter is calculated as the operating flow rate change ratio, and the difference between the operating flow rate change ratio and the reference flow rate change ratio is calculated.
- a means of specifying the output flow path where the blockage has occurred based on the comparison is adopted.
- the monitoring device has all the output flow paths in a state where flow meters are provided in all the output flow paths.
- the measured value of each flow meter in the state where no blockage has occurred is acquired as the reference flow rate, and the measured value of each flow meter when the output flow path is closed sequentially is sequentially acquired as the reference flow rate.
- the difference between the difference between the flow rate and the reference flow rate and the difference between the standard flow rate and the reference flow rate of the flow meter are stored as the standard flow rate change ratio, respectively.
- each output flow path is based on the product of the flow rate change rate obtained from the initial flow rate and the evaluation flow rate and the reference flow rate change ratio.
- the monitoring device determines the blockage degree of the output flow path where the blockage occurs.
- the means of detecting is adopted.
- a means is adopted in which any one of the first to fourth solving means is finely formed for a numbering-up structure microplant.
- a means is adopted in which the processing target fluid is equally distributed to each microprocessing device via the fifth fluid distribution device to perform processing.
- the fluid distribution device As a first solving means related to the design method of the fluid distribution device, there is a design method of the fluid distribution device that equally distributes and outputs the fluid input to the input flow path to three or more output flow paths. Then, the fluid distribution device has a shape including at least three fluid branch portions and at least one fluid junction portion by combining a plurality of branch channels, and is connected to a pressure loss compartment consisting of a fluid balance type and a pressure balance type. The means of applying the model to the fluid distribution device is adopted.
- the output flow paths are blocked as a pre-process for the fluid distribution apparatus designed by the first fluid distribution apparatus design method.
- the flow rates of any two output flow paths in a state where they are not generated are acquired as reference flow rates, and the flow rates of the two output flow paths when the output flow paths other than the two output flow paths are blocked are used as reference flow rates.
- the ratio of the difference between the standard flow rate and the reference flow rate in one of the two output flow paths and the difference between the standard flow rate and the reference flow rate of the flow meter in the other are stored as a standard flow rate change ratio.
- the flow rates of the two output flow paths are acquired as initial flow rates at the start of operation of the fluid distributor, the flow rates of the two output flow paths in the subsequent operation are acquired as evaluation flow rates, and the 2
- the ratio of the difference between the initial flow rate and the evaluation flow rate of the flow meter in one of the output flow paths and the difference between the initial flow rate and the evaluation flow rate of the flow meter in the other is calculated as the flow rate change ratio during operation.
- the means for specifying the output flow path where the blockage has occurred is adopted.
- the fluid distribution apparatus designed by the first fluid distribution apparatus design method is in a state where all the output flow paths have not been blocked as pre-processing.
- the flow rates of all output flow paths are acquired as reference flow rates, and the flow rates of all output flow paths when the output flow paths are sequentially closed are sequentially acquired as reference flow rates.
- the ratio of the difference between the standard flow rate and the reference flow rate of the output flow path that is different from the difference between the flow rates is stored as the standard flow rate change ratio, and at the time of operation after this pre-processing, any two output flow paths at the start of operation of the fluid distributor Is obtained as the initial flow rate, the flow rates of the two output channels in the subsequent operation are obtained as the evaluation flow rate, and the product of the flow rate change rate obtained from the initial flow rate and the evaluation flow rate and the reference flow rate change ratio is obtained. Detecting the clogging degree of each output channel on the basis, to adopt a means of.
- a means is adopted that is applied to a fluid distribution device that is finely formed for a microplant having a numbering-up structure.
- a pressure loss compartment connection model is formed by combining a plurality of branch flow paths, and includes at least three fluid branch portions and at least one fluid junction portion, and includes a fluid balance type and a pressure balance type. Therefore, the fluid can be evenly distributed with a simpler configuration than in the prior art. Therefore, the fluid retention portion can be reduced as compared with the conventional case, and the blockage of the flow path can be prevented. Further, the cost can be reduced by simplifying the configuration.
- the present invention since it is detected which of the three or more output flow paths is blocked based on the flow rate of any two output flow paths during operation, a smaller number of measurement devices than in the past are provided. Can be used to identify blockages in the output flow path. Furthermore, according to the present invention, since the degree of blockage of three or more output flow paths is detected based on the flow rates of any two output flow paths during operation, the blockage is performed using a smaller number of measuring devices than in the past. The blockage state (blockage degree) of the flow path can be detected.
- FIG. 3 is a simplified flow path model for explaining a pressure loss compartment (PDC) connection model in an embodiment of the present invention.
- FIG. 5 is a flow path model for applying a pressure compartment (PDC) connection model to the design of the present microfluidic distributor M in an embodiment of the present invention.
- PDC pressure loss compartment
- the relationship between the flow rate variation of the output microchannel Rc51 and the flow rate variation of the output microchannels Rc53 to Rc55 (parallel channels) when the output microchannel Rc52 is clogged is shown. It is a graph to show. In one embodiment of the present invention, it is a graph showing the relationship between the flow rate change amount of the output microchannel Rc51 and the flow rate change amount of the output microchannel Rc52 when the output microchannel Rc52 is blocked. 6 is a graph showing the relationship between the flow rate change amount of the output micro flow channel Rc51 and the flow rate change amount of the output micro flow channel Rc55 when the output micro flow channels Rc52 to Rc54 are clogged in one embodiment of the present invention. . It is a flowchart which shows the detail of the obstruction
- M Microfluidic distributor
- Rc11 Input microchannel, Rc21-Rc44, Rs11-Rs48 ... Branch microchannel, Rc51-Rc55 ... Output microchannel, B11-B44 ... Diverging section, G21-G43 ... Merging section, W ... Process target fluid, P ... Micro plant, 1 ... Micro supply tank, 2 ... Micro pump, RA1 to RA5 ... Micro processing device, 4 ... Micro fluid collection device, 5 ... Micro recovery tank, FM1, FM5 ... Micro flow meter , 6 ... Monitoring device
- FIG. 1 is a plan view showing a two-dimensional configuration of a microfluidic distributor M according to this embodiment.
- FIG. 2 is a configuration diagram of a microplant P using the microfluidic distributor M.
- This microfluidic distributor M is for distributing five fluids to be processed W evenly in a microplant P having a numbering-up structure.
- an input microchannel Rc11 input channel
- a branch micro It is composed of channels Rc21 to Rc44, Rs11 to Rs48 (branch channels) and output microchannels Rc51 to Rc55 (output channels).
- each microchannel indicates that the microchannel extends in the x-axis direction in the xy orthogonal coordinate system
- the subscript “s” indicates x -Indicates that the micro channel extends in the y-axis direction in the y-orthogonal coordinate system.
- the microchannels Rc21 to Rc44 extending in the x-axis direction have the same channel length Lc, and the microstreams extending in the y-axis direction.
- the path lengths Ls of the paths Rs11 to Rs48 are all equal.
- the input microchannel Rc11 located at the left end is a microchannel having a predetermined length Lc11, a predetermined cross-sectional area Ac11, a hydraulic equivalent diameter Dc11, and extending in the x-axis direction.
- a processing target fluid W having a predetermined flow rate q11 is supplied from the outside to the left end of the input microchannel Rc11.
- one branch microchannel Rs11 is a microchannel having a predetermined length Ls11, a predetermined cross-sectional area As11, a hydraulic equivalent diameter Ds11, and extending in the y-axis direction.
- the processing target fluid W input from one end (lower end) is output from the other end (upper end) to the branch microchannel Rc21.
- the other branch microchannel Rs12 has a predetermined length Ls12, a predetermined cross-sectional area As12,
- the micro-fluidic channel has a hydraulic equivalent diameter Ds12 and extends in the y-axis direction, and the processing target fluid W input from one end (upper end) is output from the other end (lower end) to the branch micro-channel Rc22.
- the branch microchannel Rc21 is a microchannel having a predetermined length Lc21, a predetermined cross-sectional area Ac21, a hydraulic equivalent diameter Dc21 and extending in the x-axis direction, and is a processing target fluid input from one end (left end) W is output from the other end (right end) to the pair of branch microchannels Rs21 and Rs22.
- the branch microchannel Rc22 is a microchannel having a predetermined length Lc22, a predetermined cross-sectional area Ac22, a hydraulic equivalent diameter Dc22 and extending in the x-axis direction, and is a processing target input from one end (left end).
- the fluid W is output from the other end (right end) to the pair of branch microchannels Rs23 and Rs24.
- one branch microchannel Rs21 is a microchannel having a predetermined length Ls21, a predetermined cross-sectional area As21, a hydraulic equivalent diameter Ds21, and extending in the y-axis direction.
- the processing target fluid W input from one end (lower end) is output to the branch microchannel Rc31 from the other end (upper end), and the other branch microchannel Rs22 has a predetermined length Ls22, a predetermined cross-sectional area As22,
- the microfluidic channel has a hydraulic equivalent diameter Ds22 and extends in the y-axis direction, and the processing target fluid W input from one end (upper end) is output from the other end (lower end) to the branch microchannel Rc32.
- one branch microchannel Rs23 has a predetermined length Ls23, a predetermined cross-sectional area As23, a hydraulic equivalent diameter Ds23, and extends in the y-axis direction.
- the processing target fluid W input from one end (lower end) is output to the branch microchannel Rc32 from the other end (upper end), and the other branch microchannel Rs24 has a predetermined length Ls24 and a predetermined cross-sectional area.
- a microchannel having As24 and a hydraulic equivalent diameter Ds24 and extending in the y-axis direction, and the processing target fluid W input from one end (upper end) is output to the branch microchannel Rc33 from the other end (lower end). .
- the branch microchannel Rc31 is a microchannel that has a predetermined length Lc31, a predetermined cross-sectional area Ac31, a hydraulic equivalent diameter Dc31, and extends in the x-axis direction. W is output from the other end (right end) to the pair of branch microchannels Rs31 and Rs32.
- the branch microchannel Rc32 is a microchannel that has a predetermined length Lc32, a predetermined cross-sectional area Ac32, a hydraulic equivalent diameter Dc32, and extends in the x-axis direction. W is output from the other end (right end) to the pair of branch microchannels Rs33 and Rs34.
- the branch microchannel Rc33 is a microchannel having a predetermined length Lc33, a predetermined cross-sectional area Ac33, a hydraulic equivalent diameter Dc33 and extending in the x-axis direction, and is a processing target fluid input from one end (left end) W is output from the other end (right end) to the pair of branch microchannels Rs35 and Rs36.
- one branch microchannel Rs31 is a microchannel having a predetermined length Ls31, a predetermined cross-sectional area As31, and a hydraulic equivalent diameter Ds31 and extending in the y-axis direction.
- the processing target fluid W input from one end (lower end) is output from the other end (upper end) to the branch microchannel Rc41.
- the other branch microchannel Rs32 has a predetermined length Ls32, a predetermined cross-sectional area As32
- the microfluidic channel has a hydraulic equivalent diameter Ds32 and extends in the y-axis direction, and the processing target fluid W input from one end (upper end) is output from the other end (lower end) to the branch microchannel Rc42.
- one branch microchannel Rs33 has a predetermined length Ls33, a predetermined cross-sectional area As33, a hydraulic equivalent diameter Ds33, and a micro flow extending in the y-axis direction.
- the processing target fluid W input from one end (lower end) is output to the branch microchannel Rc42 from the other end (upper end), and the other branch microchannel Rs34 has a predetermined length Ls34 and a predetermined cross-sectional area.
- a microchannel having As34 and a hydraulic equivalent diameter Ds34 and extending in the y-axis direction, and the processing target fluid W input from one end (upper end) is output from the other end (lower end) to the branch microchannel Rc43. .
- one branch microchannel Rs35 has a predetermined length Ls35, a predetermined cross-sectional area As35, a hydraulic equivalent diameter Ds35, and extends in the y-axis direction.
- the processing target fluid W input from one end (lower end) is output to the branch microchannel Rc43 from the other end (upper end), and the other branch microchannel Rs36 has a predetermined length Ls36 and a predetermined cross-sectional area.
- a microchannel having As36 and a hydraulic equivalent diameter Ds36 and extending in the y-axis direction, and the processing target fluid W input from one end (upper end) is output from the other end (lower end) to the branch microchannel Rc44. .
- the branch microchannel Rc41 is a microchannel having a predetermined length Lc41, a predetermined cross-sectional area Ac41, a hydraulic equivalent diameter Dc41, and extending in the x-axis direction. W is output from the other end (right end) to the pair of branch microchannels Rs41 and Rs42.
- the branch microchannel Rc42 is a microchannel that has a predetermined length Lc42, a predetermined cross-sectional area Ac42, a hydraulic equivalent diameter Dc42, and extends in the x-axis direction. W is output from the other end (right end) to the pair of branch microchannels Rs43 and Rs44.
- the branch microchannel Rc43 is a microchannel having a predetermined length Lc43, a predetermined cross-sectional area Ac43, a hydraulic equivalent diameter Dc43 and extending in the x-axis direction, and is a processing target fluid input from one end (left end) W is output from the other end (right end) to the pair of branch microchannels Rs45 and Rs46.
- the branch microchannel Rc44 is a microchannel that has a predetermined length Lc44, a predetermined cross-sectional area Ac44, a hydraulic equivalent diameter Dc44, and extends in the x-axis direction. W is output from the other end (right end) to the pair of branch microchannels Rs47 and Rs48.
- one branch microchannel Rs41 is a microchannel having a predetermined length Ls41, a predetermined cross-sectional area As41, a hydraulic equivalent diameter Ds41 and extending in the y-axis direction.
- the processing target fluid W input from one end (lower end) is output from the other end (upper end) to the output microchannel Rc51
- the other branch microchannel Rs42 has a predetermined length Ls42, a predetermined cross-sectional area As42
- one branch microchannel Rs43 has a predetermined length Ls43, a predetermined cross-sectional area As43, a hydraulic equivalent diameter Ds43, and extends in the y-axis direction.
- the processing target fluid W input from one end (lower end) is output to the output microchannel Rc52 from the other end (upper end), and the other branch microchannel Rs44 has a predetermined length Ls44 and a predetermined cross-sectional area.
- a microchannel having As44 and a hydraulic equivalent diameter Ds44 and extending in the y-axis direction, and the processing target fluid W input from one end (upper end) is output to the output microchannel Rc53 from the other end (lower end). .
- one branch microchannel Rs45 has a predetermined length Ls45, a predetermined cross-sectional area As45, a hydraulic equivalent diameter Ds45, and extends in the y-axis direction.
- the processing target fluid W input from one end (lower end) is output from the other end (upper end) to the output microchannel Rc53
- the other branch microchannel Rs46 has a predetermined length Ls46 and a predetermined cross-sectional area As46.
- the micro-fluidic channel has a hydraulic equivalent diameter Ds46 and extends in the y-axis direction, and the processing target fluid W input from one end (upper end) is output from the other end (lower end) to the output micro-channel Rc54.
- one branch microchannel Rs47 has a predetermined length Ls47, a predetermined cross-sectional area As47, and a hydraulic equivalent diameter Ds47 and extends in the y-axis direction.
- the processing target fluid W input from one end (lower end) is output from the other end (upper end) to the output microchannel Rc54
- the other branch microchannel Rs48 has a predetermined length Ls48 and a predetermined cross-sectional area As48.
- the micro-fluidic channel has a hydraulic equivalent diameter Ds48 and extends in the y-axis direction, and the processing target fluid W input from one end (upper end) is output from the other end (lower end) to the output micro-channel Rc55.
- the output micro-channel Rc51 is a micro-channel having a predetermined length Lc51, a predetermined cross-sectional area Ac51, a hydraulic equivalent diameter Dc51 and extending in the x-axis direction, and is a processing target fluid input from one end (left end) W is output from the other end (right end).
- the output microchannel Rc52 is a microchannel having a predetermined length Lc52, a predetermined cross-sectional area Ac52, a hydraulic equivalent diameter Dc52 and extending in the x-axis direction, and is a processing target fluid input from one end (left end) W is output from the other end (right end).
- the output microchannel Rc53 is a microchannel having a predetermined length Lc53, a predetermined cross-sectional area Ac53, a hydraulic equivalent diameter Dc53 and extending in the x-axis direction, and is a processing target fluid input from one end (left end) W is output from the other end (right end).
- the output microchannel Rc54 is a microchannel having a predetermined length Lc54, a predetermined cross-sectional area Ac54, a hydraulic equivalent diameter Dc54 and extending in the x-axis direction, and is a processing target fluid input from one end (left end). W is output from the other end (right end).
- the output microchannel Rc55 is a microchannel having a predetermined length Lc55, a predetermined cross-sectional area Ac55, a hydraulic equivalent diameter Dc55 and extending in the x-axis direction, and is a processing target fluid input from one end (left end). W is output from the other end (right end).
- the present microfluidic distributor M having such a flow path shape (structure) has ten flow dividing portions B11 to B44 for diverting the processing target fluid W and six confluence portions G21 to G43 for merging the processing target fluid W. And eight connection portions J11 to J42, and the processing target fluid W supplied to one input microchannel Rc11 is finally divided / joined by the respective branching portions B11 to B44 and the respective joining portions G21 to G43. Output from the five output microchannels Rc51 to Rc55 to the outside.
- the present microfluidic distributor M combines a total of 29 branch microchannels Rc21 to Rc44, Rs11 to Rs48, so that 10 branching portions B11 to B44 and 6 joining portions G21 related to the processing target fluid W are combined. To G43 and eight connecting portions J11 to J42.
- the cross-sectional areas Ac11 to Ac55 for all the microchannels that is, the input microchannels Rc11, the branch microchannels Rc21 to Rc44, Rs11 to Rs48, and the output microchannels Rc51 to Rc55, As11 to As48 are all equal, and hydraulic equivalent diameters Dc11 to Dc55 and Ds11 to Ds48 are all set equal.
- the present microfluidic distributor M outputs the processing target fluid W inputted from the outside to the input microchannel Rc11 equally to each of the output microchannels Rc51 to Rc55, that is, outputs to the outside.
- the flow rate q51 to q55 of the processing target fluid W to be processed is designed based on the pressure loss compartment connection model.
- the micro plant P includes such a micro fluid distribution device M, a micro supply tank 1, a micro pump 2, micro processing devices RA1 to RA5, a micro fluid collection device 4, a micro recovery tank 5, and two micro flow meters FM1 and FM5. And a monitoring device 6.
- the micro supply tank 1 stores the processing target fluid W, which is a process raw material, and the micropump 2 discharges the processing target fluid W from the micro supply tank 1 to input micro flow path of the micro fluid distribution apparatus M. Supplied to Rc11.
- the microfluidic distributor M equally distributes the processing target fluid W into five and supplies it from the output microchannels Rc51 to Rc55 (parallel channels) to the microprocessors RA1 to RA5.
- Each of the micro-processing devices RA1 to RA5 performs a predetermined process on the processing target fluid W supplied through the output micro-channels Rc51 to Rc55 (parallel channels), and the micro-fluid collecting device as a processed fluid Xa 4 to the input micro flow paths Rc61 to Rc65 (parallel flow paths).
- the microfluidic collecting device 4 is provided with a flow channel shape in which the present microfluidic distributing device M is reversed left and right, and collects the processed fluid Wa input from each of the microprocessing devices RA1 to RA5. Output from one output microchannel Rc101 to the microrecovery tank 5.
- the micro collection tank 5 collects and stores the processed fluid Wa supplied from the micro fluid collection device 4.
- one micro flow meter FM1 is provided in the output micro flow channel Rc51, and measures and monitors the flow rate q51 of the processing target fluid W flowing through the output micro flow channel Rc51.
- the other micro flow meter FM5 is provided in the output micro flow channel Rc55, measures the flow rate q55 of the processing target fluid W flowing through the output micro flow channel Rc55, and outputs it to the monitoring device 6.
- the micro flow meter FM1 is provided in the output micro flow channel Rc51 and the micro flow meter FM5 is provided in the output micro flow channel Rc55, but the micro flow meter has five output micro flow channels Rc51 to Any two of Rc55 may be provided. The reason for this will be described later.
- the monitoring device 6 is a kind of computer that monitors the blockage of the microfluidic distributor M based on a predetermined monitoring program. This monitoring device 6 performs calculation processing on the flow rates q51 and q55 of the two micro flow meters FM1 and FM5 provided in the two output microchannels Rc51 and Rc55, respectively, based on the above monitoring program, so that each output microflow The blockage of the paths Rc51 to Rc55 (parallel flow paths) is monitored. The details of the monitoring process of the monitoring device 6 will be described later as a blockage detection method for the output micro flow paths Rc51 to Rc55 (parallel flow paths).
- the design purpose of the microfluidic distributor M is to optimize the channel lengths of the output microchannels Rc51 to Rc55 so that the flow rates of the processing target fluids W flowing through the output microchannels Rc51 to Rc55 are equal. is there.
- the flow rate of the processing target fluid W can be handled equivalent to the average flow velocity (linear velocity) of the processing target fluid W.
- the output microchannels Rc51 to Rc55 that satisfy the constraint that the linear velocities u C 51 to u C 55 of the processing target fluid W in the output microchannels Rc51 to Rc55 (parallel channels) are equal.
- the optimum flow path length of the parallel flow path is obtained.
- a pressure loss compartment (PDC) connection model is adopted as a design method for obtaining the optimum flow path length of the output micro flow paths Rc51 to Rc55 (parallel flow paths) that satisfy the above constraints.
- FIG. 3 is a channel model for explaining the PDC connection model.
- a single flow path a is branched into two flow paths b and c (divided flow paths) and merged into a single flow path d.
- the cross-sectional areas A in d are all the same.
- the linear velocity of the fluid in each of the flow paths a to d is u a , u b , u c , u d
- the length of each straight line portion in the two diversion flow paths b and c is L.
- the fluid balance equations (1) and (2) and the pressure balance equation (3) are expressed by the following fluid balance equations ( 4), (5) and pressure balance equation (6) can be simplified.
- the PDC connection model obtains the shapes and linear velocities of the channels a to d by solving simultaneous equations composed of these three equations (4) to (6).
- FIG. 4 is a flow channel model (design model) for applying such a PDC connection model to the design of the microfluidic distributor M.
- This design model has the same flow path shape as the micro plant P shown in FIG. 2, that is, the flow path shape in which the present microfluidic distributor M and the microfluidic collector 4 are connected.
- the difference between the number of variables and the number of expressions is “8”, and other variables can be easily obtained by designating 8 variables.
- Commercially available numerical analysis software can be used as means for solving such simultaneous equations, and enormous calculation processing based on computational fluid dynamics (CFD) is unnecessary. Therefore, the design method of the microfluidic distributor M using the PDC connection model is more convenient than the conventional design method using numerical fluid dynamics.
- the design model is symmetrical, it is possible to complete the design of the entire design model by setting an appropriate boundary condition, for example, by establishing a fluid balance equation and a pressure balance equation for only the left half of the design model. it can.
- the channel length L1 of the corresponding output microchannel Rc51 is equal to the channel length L5 of the output microchannel Rc55
- the output micro-channel Rc54 are equal in length L4
- the channel of the output micro-channel Rc51 The length L1 and the channel length L5 of the output microchannel Rc55 are set to 0.5 m.
- Table 2 shows the results of obtaining the design variables based on the simultaneous equations consisting of the above formulas (7) to (17).
- the optimum flow path lengths of the output micro flow paths Rc51 to Rc55 (parallel flow paths) shown in Table 2 satisfy the above-mentioned restrictions, and therefore the processing targets in the output micro flow paths Rc51 to Rc55 (parallel flow paths).
- the linear velocities u C 51 to u C 55 of the fluid W that is, the flow rates q 51 to q 55 of the processing target fluid W in the output microchannels Rc51 to Rc55 (parallel channels) can all be made equal.
- the pressure balance type In this case, a nonlinear term due to the product of the channel length and the linear velocity occurs.
- the fluid distribution device is characterized in that it comprises three or more branching portions for branching the processing target fluid by combining a plurality of branch flow paths and one or more joining portions for joining the processing target fluid.
- Examples of the shape of the flow path including such a diverting part and a merging part include those shown in FIGS. 5A, 5B, 6A, and 6B.
- the fluid distribution device Ma shown in FIG. 5A is composed of nine branch portions Ba1 to Ba10 and three junction portions Ga1 to Ga3, and distributes the fluid to five output channels (parallel channels). is there.
- the fluid distribution device Mb shown in FIG. 5B is composed of seven branch portions Bb1 to Bb7 and five junction portions Gb1 to Gb5, and in the same manner as the fluid distributor Ma, the fluid is distributed to five output channels (in parallel). Distribution to the flow path).
- the fluid distributor Mc shown in FIG. 6A is the simplest, and includes three flow dividing portions Bc1 to Bc3 and one confluence portion Gc1, and the fluid is supplied to three output flow paths (parallel flow paths).
- the fluid distribution device Md shown in FIG. 6B is composed of six branch portions Bd1 to Bd6 and three junction portions Gd1 to Gd3, and distributes the fluid to four output channels (parallel channels).
- FIG. 5A, FIG. 5B, FIG. 6A, and FIG. 6B are a part of the modified examples, and further include a plurality of branching portions and a merging portion and a plurality of output flow paths (parallel flow paths). Conceivable.
- the number of output flow paths (parallel flow paths) may be either odd or even, and the fluid is distributed to any number of output flow paths (parallel flow paths) by combining the flow dividing section and the merge section. can do.
- FIG. 7 is a flowchart showing the blockage monitoring process executed by the monitoring device 6 based on the monitoring program and the flow rates q51 and q55 input from the micro flowmeters FM1 and FM5.
- this blockage monitoring process is composed of two steps S1 and S2.
- step S1 a preliminary process is performed before the flow path blockage determination process.
- step S1 the standard flow rate (q01 to q05) and the reference flow rate (q1 to q5) of the output microchannels Rc51 to Rc55 are acquired and substituted into the equation (18) to obtain all the reference flow rate change ratios r i, j (n) is calculated and stored in the monitoring device 6.
- step S2 the microplant is operated and a flow path blockage determination process is performed.
- the initial flow rates (Q01, Q05) and evaluation flow rates (Q1, Q5) of the output microchannels Rc51, Rc55 are acquired and substituted into the equation (18-1) to substitute the flow rate change ratio (R 1,5 ) is calculated and compared with the reference flow rate change ratio to identify the flow path where the blockage occurred.
- occlusion degree B (n) is performed as needed.
- the reference flow rate is a flow rate of each output micro flow channel when the output micro flow channels Rc51 to Rc55 are not closed at step S1, and the reference flow rate is the output micro flow rate at step S1.
- This is the flow rate of each output microchannel in a state where any of the channels Rc51 to Rc55 is forcibly blocked.
- the initial flow rate is the flow rate of each output microchannel immediately after the start of operation of the microplant in step S2, that is, in a state where no blockage has occurred in each output microchannel. Is the flow rate of each output microchannel during operation of the microplant in step S2.
- FIG. 8 is a flowchart showing details of step S1
- FIG. 9 is a plan view of a reference flow rate change ratio acquisition flow path used in step S1.
- step S1 a flow path that is designed in exactly the same way as the micro plant P (actual machine) shown in FIG. 2 and to which micro flow meters FM2 to FM4 and flow control valves V1 to V5 are added is used.
- step S1 the monitoring device 6 forcibly and sequentially closes the output micro flow paths Rc51 to Rc55 (parallel flow paths) by controlling the flow control valves V1 to V5, and the micros obtained at this time.
- a reference flow rate change ratio is acquired based on the measured values (flow rates q1 to q5) of the flow meters FM1 to FM5.
- FIG. 9 the same components as those of the micro plant shown in FIG.
- step S1 the monitoring device 6 first measures the flow rate of the output microchannels Rc51 to Rc55 when the output microchannels Rc51 to Rc55 are not blocked at all using the micro flowmeters FM1 to FM5, and the reference flow rate.
- q01 to q05 are set (step S11).
- the number is assigned to the flow path Rc55. This correspondence is stored in the monitoring device 6 in advance. Further, the number of each output microchannel Rc51 to Rc55 is represented by a variable n, and the initial value of n is set to “1” (step S12).
- the monitoring device 6 forcibly closes the output micro flow path Rc51 set to “1” as the variable n (step S13), and the flow rates q51 to q55 of the micro flowmeters FM1 to FM5 in this state. Are taken in as reference flow rates q1 to q5 (step S14). Then, the monitoring device 6 calculates the reference flow rate change ratio r i, j (1) by substituting the reference flow rates q01 to q05 and the reference flow rates q1 to q5 into the following evaluation formula (18) (step S15). ).
- the monitoring device 6 subsequently executes the variable n determination process in step S16 and the variable n increment process in step S17, thereby all the variables n (that is, the output microchannels Rc51 to Nc1).
- the reference flow rate change ratio r i, j (n) is acquired and stored internally in the case where Rc55 is forcibly completely closed.
- i and j are output microchannel numbers, i is 1, j is an integer from 2 to 5, and n is a closed output microchannel number.
- the reference flow rate change ratios r i, j (1) to r i, j (5) obtained by forcibly sequentially closing the output micro flow paths Rc51 to Rc55 (parallel flow paths) are as follows. Different values. Table 4 below shows the flow rate change ratios r 1,5 (1) to r 1,5 (5) of the output microchannels Rc51 and Rc55 as an example. As Table 4 shows, the flow rate change ratio r 1,5 (n) of the output microchannels Rc51 and Rc55 varies depending on which of the output microchannels Rc51 to Rc55 (parallel channels) is blocked. Value.
- Table 5 shows the flow rate measurement values measured for the reference flow rate change ratio acquisition flow path that is simply manufactured by joining stainless steel tubes having an inner diameter of 1 mm. That is, this Table 5 shows that the degree of opening of the valve is changed (stepwise) when pure water is supplied to the input microchannel Rc11 at a constant flow rate of 20 ml / min, that is, a linear velocity of 0.42 m / s ( State 1 to 10) shows the experimental results of measuring the flow rates q51 to q55 of pure water flowing through the output microchannels Rc51 to Rc55 (parallel channels).
- the state 1 is a state immediately after the start of the supply of pure water, that is, a state where no blockage of the flow path has occurred, and theoretically the flow rate of each flow path is completely equal.
- the actual measurement values are not completely equal due to an error or the like, and a deviation of about 2% occurs.
- the flow rate is larger as the flow path is closer to the closed flow path Rc52.
- FIG. 10A shows the relationship between the flow rate variation (horizontal axis) of the output microchannel Rc51 and the flow rate variation (vertical axis) of the output microchannels Rc53 to Rc55 when the output microchannel Rc52 is clogged. It is a graph to show.
- FIG. 10B is a graph showing the relationship between the flow rate change amount of the output microchannel Rc51 and the flow rate change amount of the output microchannel Rc52 when the output microchannel Rc52 is blocked.
- Table 5 is used in FIGS. 10A and 10B. As shown in FIG.
- Table 6 also shows that the output microchannel Rc51 when the opening degree of each of the flow control valves V2 to V4 is changed stepwise, that is, when the degree of blockage of the output microchannels Rc52 to Rc54 is changed stepwise.
- Rc55 shows the flow rate change amount.
- the state 10 indicates that the flow control valves V2 and V3 are fully closed, that is, the output microchannels Rc52 and Rc53 are completely closed.
- FIG. 11 shows the relationship between the flow rate change amount of the output microchannel Rc51 and the flow rate change amount of the output microchannel Rc55 when the degree of blockage of the output microchannels Rc52, Rc53, and Rc54 is changed stepwise. It is a graph. In FIG. 11, the data of Table 6 is used. As shown in FIG. 11, when the degree of blockage of the output microchannels Rc52, Rc53, and Rc54 changes stepwise, the flow rate variation of the output microchannel Rc55 is relative to the flow rate variation of the output microchannel Rc51. It has a linear change.
- the ratio of the flow rate change amount of the output microchannel Rc55 and the flow rate change amount of the output microchannel Rc51 that is, the reference flow rate change ratios r 1,5 (2), r 1,5 (3) and r 1,5 ( 4) was constant regardless of the degree of blockage of each output microchannel. Also, the values of r 1,5 (2), r 1,5 (3) and r 1,5 (4) are different from each other, and therefore the reference flow rate change ratio r 1,5 (n) is blocked. It was found that the output microchannels differed.
- FIG. 12 is a flowchart showing details of the blockage determination process (step S2).
- the monitoring device 6 acquires the flow rates q51 and q55 of the micro flow meters FM1 and FM5 as the initial flow rates Q01 and Q05 at the start of operation of the microplant (step S21).
- the flow rates q51 and q55 of the micro flow meters FM1 and FM5 are taken in as evaluation flow rates Q1 and Q5 (step S22).
- the monitoring device 6 blocks one of the output microchannels Rc51 to Rc55 by substituting the initial flow rates Q01 and Q05 and the evaluation flow rates Q1 and Q5 into the following judgment formulas (19) and (20). Whether or not has occurred is determined (step S23).
- the monitoring device 6 initial flow rate Q05 when the absolute value of the difference between the initial flow rate Q01 and evaluation flow Q1 is larger than the predetermined threshold epsilon 1 or / and output microchannel Rc55 at the output micro flow channel Rc51 When the absolute value of the difference between the flow rate Q5 and the evaluation flow rate Q5 is larger than the predetermined threshold value ⁇ 5 , it is determined that any one of the output microchannels Rc51 to Rc55 is blocked.
- the monitoring device 6 calculates the operating flow rate change ratio R 1 , 5 based on the following evaluation formula (18-1) (step S24). By comparing the flow rate change ratios R 1 and 5 with the reference flow rate change ratios r 1 and 5 (n) stored in the monitoring device 6 in advance, the actually closed output micro flow path (blocked flow path), that is, The variable n of the closed channel is specified (step S25).
- the monitoring device 6 calculates the degree of blockage in the blocked channel (step S26). That is, the monitoring device 6 uses the following flow rate change equation (21) to calculate the reference flow rate change ratio r 1, n (n) between the closed flow channel and the output micro flow channel Rc51, the initial flow rate Q01 obtained in steps S21 and S22, and the evaluation. By substituting the flow rate Q1, the flow rate change ⁇ Q (n) of the closed channel is calculated.
- the monitoring device 6 adds the reference flow rate change ratio r 1, n (n) between the closed flow channel and the output micro flow channel Rc51 to the closed flow rate calculation formula (22) below, and the initial flow rate Q01 obtained in steps S21 and S22, and By substituting the evaluation flow rate Q1, the blockage degree of the block passage is calculated.
- This blockage degree calculation formula (22) is blocked by the product of the flow rate change rate obtained from the initial flow rate and the evaluation flow rate and the reference flow rate change ratio r 1, n (n) of the closed flow channel and the output micro flow channel Rc51.
- Degree B (n) is the product of the flow rate change rate obtained from the initial flow rate and the evaluation flow rate and the reference flow rate change ratio r 1, n (n) of the closed flow channel and the output micro flow channel Rc51.
- Table 7 shows a reference flow rate change ratio r i, j (n) obtained by substituting the calculation result of Table 6 described above into the above equation (18).
- Table 8 substitutes the calculation result of Table 5 into the above formula (18-1), the above flow rate change formula (21), and the blockage degree calculation formula (22), thereby changing the operating flow rate change ratio R 1,5 , It is the result of calculating the flow rate change ⁇ Q (n) and the blockage degree B (n) of the road.
- the initial flow rate Q01 of the output micro flow channel Rc51, the evaluation flow rate Q1 of the output micro flow channel Rc51, and the reference flow rate change ratio r 1,2 (2) of the blockage flow rate are expressed by equations (21) and ( 22)
- the flow rate change amount ⁇ Q (n) and the blockage degree B (n) of the closed flow path Rc52 obtained by substituting in 22) are substantially smaller than the flow rate change amount and the blockage degree obtained from the actual measurement value of the micro flow meter FM2. Since they agree with each other, the blockage state of the microplant P that is the monitoring target is sufficiently shown.
- the monitoring device 6 determines whether or not the operation of the microplant is continued (step S27). If the operation is continued, the above-described steps S22 to S26 are performed. By repeating the process, the blockage channel is specified, the flow rate change amount ⁇ Q (n) and the blockage degree B (n) are periodically calculated, and the monitoring process is terminated when the operation is completed.
- the blockage determination process (step S2) shown in FIG. 12 is to obtain the flow rate change amount ⁇ Q (n) and the blockage degree B (n) in addition to specifying the blockage flow path.
- step S26 When it is not necessary to acquire (n), the process of step S26 is omitted, and the initial flow rate changes of the two output microchannels Rc51 and Rc55 in the initial flow rate data acquisition process (step S1) shown in FIG. Only the ratios r 1,5 (1) to r 1,5 (5) have to be obtained. Therefore, in this case, as the initial flow rate data acquisition flow path, only the two output micro flow paths Rc51 and Rc55 are provided with the micro flow meters FM1 and FM5, that is, provided in the output microflow paths Rc52 to Rc54. Those obtained by omitting the obtained micro flow meters FM2 to FM4 can be used.
- the blockage determination process (step S2) shown in FIG. 12 calculates the flow rate change amount ⁇ Q (n) and the blockage degree B (n) only when the occurrence of blockage is detected in step S23.
- the degree of blockage of each of the output microchannels Rc51 to Rc55 may be calculated periodically regardless of the presence or absence of blockage. In this case, since any sign of blockage can be detected before any of the output microchannels Rc51 to Rc55 is completely blocked, it is preferable for stable operation of the microplant P.
- the flow dividing types (1) to (14) and the pressure balance type (15) to (15) are combined with the diverting portions B11 to B44 and the merging portions G21 to G43. Since it is designed based on the pressure loss compartment connection model consisting of (17), the equal distribution of the processing target fluid W supplied to the input microchannel Rc11 to each of the output microchannels Rc51 to Rc55 can be achieved with a simple configuration. Can be realized. In addition, since the uniform distribution has robustness, the uniform distribution is maintained even if the flow rate of the processing target fluid W supplied to the input microchannel Rc11 varies.
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Abstract
Description
本願は、2008年3月31日に、日本に出願された特願2008-093480号に基づき優先権を主張し、その内容をここに援用する。
例えば下記特許文献1には、上記ナンバリングアップ構造におけるマイクロ流路の流体分配技術として、各々のマイクロ流路にバルブと流量センサとを設けることにより各マイクロ流路の流量を調節することが開示されている。
また、下記特許文献2には、ナンバリングアップ構造の流体混合装置として、複数の流体を当該流体毎に設けられた環状流路で流体を整流化した後、複数の分配流路を用いて各流体を複数に分配すると共に、各分配流路に圧力損出手段を設けることにより、各流体の均等分配を実現することが開示されている。
(1)流体の均等分配を簡単な構成で実現することにより流路の閉塞を防止する。
(2)従来よりも少ない数の計測装置を用いて並列流路の閉塞を検知する。
(3)閉塞流路を特定する。
(4)閉塞流路の閉塞状態(閉塞度)を検知する。
さらに、本発明によれば、運転時において任意の2つの出力流路の流量に基づいて3つ以上の出力流路の閉塞度を検知するので、従来よりも少ない数の計測装置を用いて閉塞流路の閉塞状態(閉塞度)を検知することができる。
図1は、本実施形態に係るマイクロ流体分配装置Mの2次元構成を示す平面図である。また、図2は、本マイクロ流体分配装置Mを用いたマイクロプラントPの構成図である。本マイクロ流体分配装置Mは、ナンバリングアップ構造を有するマイクロプラントPにおいて処理対象流体Wを均等に5分配するためのものであり、図示するように入力マイクロ流路Rc11(入力流路)、枝マイクロ流路Rc21~Rc44,Rs11~Rs48(枝流路)及び出力マイクロ流路Rc51~Rc55(出力流路)から構成されている。
PDC連結モデルは、これら3つの式(4)~(6)からなる連立方程式を解くことにより各流路a~dの形状や線速を求めるものである。例えば各流路a~dにおける長さLb1~Lb3,Lc1~Lc3と流体の入口に該当する流路aの線速ua(入口線速)とを定数として与えることにより、3つの変数、つまり流路b~dにおける線速ub,uc,udを求めることができる。
なお、図5A、図5B、図6A及び図6Bは変形例の一部であって、さらに多数の分流部と合流部とを備えると共にさらに多数の出力流路(並列流路)を備えるものが考えられる。また、出力流路(並列流路)の個数は奇数あるいは偶数の何れであっても良く、分流部と合流部とを組み合わせることにより任意の個数の出力流路(並列流路)に流体を分配することができる。
ステップS1では、流路閉塞判定処理を行う前の事前処理を行う。ステップS1では、出力マイクロ流路Rc51~Rc55の基準流量(q01~q05)及び参照流量(q1~q5)を取得し、それを式(18)に代入して全ての基準流量変化比ri,j(n)を計算し、監視装置6に記憶する。ステップS2では、マイクロプラントを運転させ、流路閉塞判定処理を行う。ステップS2では、出力マイクロ流路Rc51、Rc55の初期流量(Q01、Q05)及び評価流量(Q1、Q5)を取得し、それを式(18-1)に代入して運転時流量変化比(R1,5)を計算し、前記基準流量変化比と比較することにより、閉塞が発生した流路を特定する処理を行う。また、必要に応じて、特定された閉塞流路の流量変化量ΔQ(n)及び閉塞度B(n)を計算する処理を行う。
ここで、基準流量とは、ステップS1において、出力マイクロ流路Rc51~Rc55が全く閉塞していない状態での各出力マイクロ流路の流量であり、参照流量とは、ステップS1において、出力マイクロ流路Rc51~Rc55の何れかを強制的に閉塞させた状態での各出力マイクロ流路の流量である。また、初期流量とは、ステップS2において、マイクロプラントの運転開始直後、つまり各出力マイクロ流路に全く閉塞が発生していないと想定する状態での各出力マイクロ流路の流量であり、評価流量とは、ステップS2において、マイクロプラントの運転中における各出力マイクロ流路の流量である。
表8の運転時流量変化比R1,5は表7のr1,5(2)に略一致しているので、本実施形態での閉塞流路はn=2と判断できる。閉塞流路の流量変化ΔQ(n)及び閉塞度B(n)はr1,2(2)=-2.011を用いて計算した。
表8に示すように、出力マイクロ流路Rc51の初期流量Q01、出力マイクロ流路Rc51の評価流量Q1及び閉塞流量の基準流量変化比r1,2(2)を、式(21)及び式(22)に代入して得られる閉塞流路Rc52の流量変化量ΔQ(n)及び閉塞度B(n)は、マイクロ流量計FM2の実測値により得られる流量変化量及び閉塞度に比べて、略一致しているので、監視対象であるマイクロプラントPの閉塞状態を十分に示している。
(1)本マイクロ流体分配装置Mによれば、分流部B11~B44と合流部G21~G43とを組み合わせて構成されると共に流体収支式(1)~(14)及び圧力バランス式(15)~(17)からなる圧力損失コンパートメント連結モデルに基づいて設計されているので、入力マイクロ流路Rc11に供給された処理対象流体Wの各出力マイクロ流路Rc51~Rc55への均等分配を簡単な構成で実現することができる。また、この均等分配がロバスト性を有するので、入力マイクロ流路Rc11に供給された処理対象流体Wの流量が変動しても均等分配が維持される。
Claims (10)
- 入力流路に供給された流体を3以上の出力流路に均等分配して出力する流体分配装置であって、
複数の枝流路を組み合わせて形成され、少なくとも3つの流体の分流部と少なくとも1つの流体の合流部とを備え、流体収支式と圧力バランス式からなる圧力損失コンパートメント連結モデルに対応するように形成されることを特徴とする流体分配装置。 - 各出力流路の閉塞を監視する監視装置と、3以上の出力流路のうち任意の2つの出力流路に各々設けられた2つの流量計とをさらに備え、
前記監視装置は、
事前処理として、全ての出力流路が閉塞を発生していない状態における前記各流量計の計測値を基準流量として取得し、前記各流量計が設けられていない出力流路が閉塞した場合における前記各流量計の計測値を参照流量として取得し、一方の流量計の基準流量と参照流量との差と他方の流量計の基準流量と参照流量との差の割合を基準流量変化比として記憶し、
この事前処理後の運転時には、運転開始時に前記各流量計の計測値を初期流量として取得し、その後の運転における前記各流量計の計測値を評価流量として取得し、一方の流量計の初期流量と評価流量との差と他方の流量計の初期流量と評価流量との差の割合を運転時流量変化比として計算し、
当該運転時流量変化比と前記基準流量変化比との比較に基づいて閉塞が発生した出力流路を特定する
ことを特徴とする請求項1記載の流体分配装置。 - 前記監視装置は、
事前処理として、全ての出力流路に流量計を設けた状態において全ての出力流路が閉塞を発生していない状態における前記各流量計の計測値を基準流量として取得し、出力流路を順次閉塞させた場合における前記各流量計の計測値を参照流量として順次取得し、各流量計における基準流量と参照流量との差と異なる流量計の基準流量と参照流量との差の割合を基準流量変化比としてそれぞれ記憶し、
この事前処理後の運転時には、運転開始時に前記各流量計の計測値を初期流量として取得し、その後の運転における前記各流量計の計測値を評価流量として取得し、初期流量と評価流量とから得られる流量変化率と前記基準流量変化比との積に基づいて各出力流路の閉塞度を検知する
ことを特徴とする請求項1または2記載の流体分配装置。 - 前記監視装置は、閉塞が発生した出力流路が特定された場合に、当該閉塞が発生した出力流路の閉塞度を検知することを特徴とする請求項3記載の流体分配装置。
- ナンバリングアップ構造のマイクロプラント用に微細に形成されることを特徴とする請求項1に記載の流体分配装置。
- 請求項5記載の流体分配装置を介して処理対象流体を各マイクロ処理装置に均等分配して処理を施すことを特徴とするマイクロプラント。
- 入力流路に入力された流体を3以上の出力流路に均等に分配出力する流体分配装置の設計方法であって、
前記流体分配装置を、複数の枝流路を組み合わせることにより少なくとも3つの流体の分流部と少なくとも1つの流体の合流部とを備える形状とし、
流体収支式と圧力バランス式からなる圧力損失コンパートメント連結モデルを前記流体分配装置に適用する
ことを特徴とする流体分配装置の設計方法。 - 請求項7に記載の流体分配装置の設計方法で設計された流体分配装置について、
事前処理として、全ての出力流路が閉塞を発生していない状態における任意の2つの出力流路の流量を基準流量として取得し、前記2つの出力流路以外の出力流路が閉塞した場合における前記2つの出力流路の流量を参照流量として取得し、前記2つの出力流路の一方における基準流量と参照流量との差と他方における流量計の基準流量と参照流量との差の割合を基準流量変化比として記憶し、
この事前処理後における運転時には、流体分配装置の運転開始時に前記2つの出力流路の流量を初期流量として取得し、その後の運転における前記2つの出力流路の流量を評価流量として取得し、前記2つの出力流路の一方における流量計の初期流量と評価流量との差と他方における流量計の初期流量と評価流量との差の割合を運転時流量変化比として計算し、
当該運転時流量変化比と前記基準流量変化比との比較に基づいて閉塞が発生した出力流路を特定する
ことを特徴とする流路閉塞検知方法。 - 請求項7に記載の流体分配装置の設計方法で設計された流体分配装置について、
事前処理として、全ての出力流路が閉塞を発生していない状態において全ての出力流路の流量を基準流量として取得し、出力流路が順次閉塞した場合における全ての出力流路の流量を参照流量として順次取得し、各出力流路における基準流量と参照流量との差と異なる出力流路の基準流量と参照流量との差の割合を基準流量変化比としてそれぞれ記憶し、
この事前処理後の運転時には、流体分配装置の運転開始時に任意の2つの出力流路の流量を初期流量として取得し、その後の運転における前記2つの出力流路の流量を評価流量として取得し、初期流量と評価流量とから得られる流量変化率と前記基準流量変化比との積に基づいて各出力流路の閉塞度を検知する
ことを特徴とする流路閉塞検知方法。 - ナンバリングアップ構造のマイクロプラント用に微細に形成された流体分配装置に適用することを特徴とする請求項8または9記載の流路閉塞検知方法。
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