WO2009122874A1 - 有機エレクトロルミネッセンス素子の製造方法、有機エレクトロルミネッセンス素子および表示装置 - Google Patents
有機エレクトロルミネッセンス素子の製造方法、有機エレクトロルミネッセンス素子および表示装置 Download PDFInfo
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- WO2009122874A1 WO2009122874A1 PCT/JP2009/054629 JP2009054629W WO2009122874A1 WO 2009122874 A1 WO2009122874 A1 WO 2009122874A1 JP 2009054629 W JP2009054629 W JP 2009054629W WO 2009122874 A1 WO2009122874 A1 WO 2009122874A1
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- organic light
- emitting layer
- layer
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
Definitions
- the present invention relates to a method for producing an organic electroluminescence element (hereinafter sometimes referred to as an organic EL element), an organic EL element obtained by using the production method, and a display device including the organic EL element. .
- an organic EL element has, as a basic structure, a first electrode (anode or cathode) and a second electrode (cathode or anode) and an organic light emitting layer provided between these electrodes. is doing.
- the organic light emitting layer emits light by passing a current between electrodes facing each other across the organic light emitting layer.
- a display panel in which a large number of organic EL elements each functioning as one pixel are arranged in a grid pattern is used.
- the first electrode is formed in a fine pattern, and in order to form a large number of pixel regions on the patterned first electrode, a lattice shape is formed.
- a partition is formed.
- the partition walls are formed by forming a photoresist film on the first electrode pattern and patterning the photoresist film using a photolithography technique. The first electrode is exposed in the interior surrounded by a large number of partition walls, and this region becomes a pixel region.
- the plurality of barrier ribs are formed by adding an ink repellency (water repellency) substance to the photoresist material, or by selectively covering the surface with an ink repellant substance after the barrier rib is formed. Is imparted with ink repellency.
- an organic light emitting layer is formed in these pixel regions, but before that, one or more organic material layers (interlayers) may be formed.
- This wet coating method is a method in which an organic light emitting material is dissolved in a solvent to form a coating solution, and this coating solution is selectively applied to the pixel region.
- printing methods such as letterpress printing and ink jet printing are used.
- Patent Document 1 As a method for forming an organic light emitting layer using the relief printing method, for example, a method disclosed in Patent Document 1 is known.
- the feature of the method disclosed in Patent Document 1 is that ink repellency is imparted to the surface of the partition wall by mixing an ink repellant substance into the photoresist compound that is a partition wall material when forming the partition wall, and the ink repellency.
- An organic light emitting layer is formed by selectively applying a coating solution of an organic light emitting material into a pixel region by relief printing on a pixel region defined by a conductive partition.
- the organic material layer (hole transport layer in this Patent Document 1) formed before the formation of the organic light emitting layer is coated all over the substrate with the organic material ink (hole transport ink). Can be formed. That is, even if the hole transport ink is applied all over the substrate including the partition wall surface, the hole transport ink applied to the partition wall surface is repelled by the partition wall surface and flows into each pixel region. It remains exposed.
- the ink repellent property may be applied even if the organic light emitting ink may be applied to the partition wall. Therefore, color mixing of the organic light emitting material between adjacent pixel regions can be prevented.
- a method for forming an organic light-emitting layer by applying organic light-emitting ink to a pixel region whose surface is defined by an ink-repellent partition wall using a relief printing method includes an organic EL element.
- the organic luminescent ink when organic luminescent ink is selectively applied to each pixel region by letterpress printing, the organic luminescent ink may be repelled in the periphery of the pixel region and in the pixel region, and there is a portion where the organic luminescent ink is not applied.
- the application of the organic light emitting ink to the entire pixel region may not be realized, and the area of the pixel region that actually emits light may be less than the design value.
- the amount of light emitted from a pixel having such a coating defect is equal to or less than the design value, and in some cases, light emission may not be possible. As a result, unevenness in light emission occurs, and the light emission quality is significantly lowered.
- the present invention has been made in view of the above-described conventional circumstances, and the object thereof is to use an organic EL element manufacturing method capable of forming an organic light emitting layer without causing film defects, and the manufacturing method. Another object of the present invention is to provide an organic EL element obtained in this manner and a display device including the organic EL element.
- the present invention provides a method for manufacturing an organic EL element adopting the following configuration, an organic EL element obtained by using the manufacturing method, and a display device including the organic EL element. To do.
- a method of manufacturing an organic electroluminescence device comprising at least a cathode, an anode, and an organic light emitting layer located between the cathode and the anode on a substrate, and enclosing a pixel region in which pixels are formed
- the manufacturing method of the organic electroluminescent element including the surface treatment process which processes the surface with an organic solvent from the side.
- a display device comprising the organic electroluminescence element according to [11].
- the method for producing an organic EL device includes a step of applying an organic solvent to the surface on which the organic light emitting ink is applied before applying an ink containing an organic light emitting material in the partition wall (hereinafter sometimes referred to as organic light emitting ink). Since the ink repellency is alleviated by the treatment with, the coating property when the organic light emitting ink is applied to the pixel region is improved, and the application failure of the organic light emitting ink can be greatly improved. . Therefore, according to the present invention, it is possible to obtain an organic EL element and a display device having excellent light emission characteristics with reduced light emission unevenness on the light emitting surface.
- the method for producing an organic EL device is a method for producing an organic electroluminescence device comprising at least a cathode, an anode, and an organic light emitting layer located between the cathode and anode on a substrate.
- a surface treatment step of treating the surface with an organic solvent from the side where the partition wall is installed with respect to the substrate is included.
- the substrate used for the organic EL element may be any substrate that does not change when the electrode is formed and the organic layer is formed.
- glass, plastic, polymer film, silicon substrate, or a laminate of these is used. It is done. Further, a plastic, a polymer film or the like that has been subjected to a low water permeability treatment may be used.
- a commercially available substrate can be used as the substrate, and it may be manufactured by a known method.
- the organic EL element is configured by laminating at least an anode, a cathode, and an organic light emitting layer positioned between the anode and the cathode. Further, at least one of the anode and the cathode is made of a transparent electrode having optical transparency. For the light emitting layer, a low molecular weight and / or high molecular weight organic light emitting material is used.
- a plurality of light emitting layers may be provided between the anode and the cathode, or layers other than the light emitting layer may be provided.
- a layer provided between the cathode and the light-emitting layer may be referred to as a cathode-side interlayer
- a layer provided between the anode and the light-emitting layer may be referred to as an anode-side interlayer.
- Examples of the anode-side interlayer provided between the anode and the light emitting layer include a hole injection layer, a hole transport layer, and an electron block layer.
- the hole injection layer is a layer having a function of improving the efficiency of hole injection from the cathode
- the hole transport layer is a positive hole from the hole injection layer or a layer closer to the anode (hole transport layer).
- This layer has a function of improving hole injection.
- these layers may be referred to as an electron block layer. Having the function of blocking electron transport makes it possible, for example, to manufacture an element that allows only electron current to flow and to confirm the blocking effect by reducing the current value.
- Examples of the cathode side interlayer provided between the cathode and the light emitting layer include an electron injection layer, an electron transport layer, and a hole blocking layer.
- the electron injection layer is a layer having a function of improving electron injection efficiency from the cathode, and the electron transport layer has a function of improving electron injection from the electron injection layer or a layer closer to the cathode (electron transport layer). It is a layer having.
- the electron injection layer or the electron transport layer has a function of blocking hole transport, these layers may be referred to as a hole blocking layer. Having the function of blocking hole transport makes it possible, for example, to produce an element that allows only hole current to flow, and confirm the blocking effect by reducing the current value.
- the layered structure of each layer provided between the anode and the cathode as described above includes a hole transport layer provided between the anode and the light emitting layer, and an electron transport layer provided between the cathode and the light emitting layer. And a structure in which an electron transport layer is provided between the cathode and the light emitting layer and a hole transport layer is provided between the anode and the light emitting layer.
- the following laminated structures a) to d) are specifically mentioned.
- Anode / light emitting layer / cathode b) Anode / hole transport layer / light emitting layer / cathode c) Anode / light emitting layer / electron transport layer / cathode d) Anode / hole transport layer / light emitting layer / electron transport layer / cathode (Here, / indicates that each layer is laminated adjacently. The same applies hereinafter.)
- the light emitting layer is a layer having a function of emitting light
- the hole transporting layer is a layer having a function of transporting holes
- the electron transporting layer is a function of transporting electrons. It is a layer which has.
- the electron transport layer and the hole transport layer may be collectively referred to as a charge transport layer.
- Two or more light emitting layers, hole transport layers, and electron transport layers may be used independently.
- those having a function of improving the charge injection efficiency from the electrodes and having the effect of lowering the driving voltage of the element are particularly charge injection layers (hole injection layers).
- an electron injection layer Sometimes referred to as an electron injection layer).
- the charge injection layer or an insulating layer having a thickness of 2 nm or less may be provided adjacent to the electrode, and the adhesion at the interface is improved.
- a thin buffer layer may be inserted at the interface between the charge transport layer and the light emitting layer. What is necessary is just to set suitably about the order and number of the layers to laminate
- an organic EL element provided with a charge injection layer (electron injection layer, hole injection layer)
- an organic EL element provided with a charge injection layer adjacent to the cathode and a charge injection layer provided adjacent to the anode.
- An organic EL element is mentioned.
- the following structures e) to p) are specifically mentioned.
- anode for example, as a transparent electrode or a semitransparent electrode, a metal oxide, metal sulfide or metal thin film having high electrical conductivity can be used, and a high transmittance can be suitably used.
- a metal oxide, metal sulfide or metal thin film having high electrical conductivity can be used, and a high transmittance can be suitably used.
- ITO indium tin oxide
- IZO indium zinc oxide
- gold, platinum, silver, and copper In these, ITO, IZO, and tin oxide are preferable.
- an organic transparent conductive film such as polyaniline or a derivative thereof, polythiophene or a derivative thereof may be used.
- a thin film made of a mixture containing at least one selected from the group consisting of materials used for the organic transparent conductive film, metal oxides, metal sulfides, metals, and carbon materials such as carbon nanotubes is used as an anode. It may be used.
- a material that reflects light may be used for the anode, and such a material is preferably a metal, metal oxide, or metal sulfide having a work function of 3.0 eV or more.
- Examples of the method for producing the anode include a vacuum deposition method, a sputtering method, an ion plating method, and a plating method.
- the thickness of the anode can be appropriately selected in consideration of light transmittance and electrical conductivity, and is, for example, 5 nm to 10 ⁇ m, preferably 10 nm to 1 ⁇ m, and more preferably 20 nm to 500 nm. .
- anode-side interlayer such as a hole injection layer and a hole transport layer is laminated between the anode and the light emitting layer as necessary.
- the hole injection layer may be provided between the anode and the hole transport layer or between the anode and the light emitting layer.
- a material for forming the hole injection layer a known material can be appropriately used, and there is no particular limitation.
- the thickness of such a hole injection layer is preferably about 5 to 300 nm. If the thickness is less than 5 nm, the production tends to be difficult. On the other hand, if the thickness exceeds 300 nm, the driving voltage and the voltage applied to the hole injection layer tend to increase.
- the material constituting the hole transport layer is not particularly limited.
- N, N′-diphenyl-N, N′-di (3-methylphenyl) 4,4′-diaminobiphenyl (TPD), 4 , 4'-bis [N- (1-naphthyl) -N-phenylamino] biphenyl (NPB), etc. polyvinyl carbazole or derivatives thereof, polysilane or derivatives thereof, aromatic amines in the side chain or main chain Polysiloxane derivatives having pyrazole, pyrazoline derivatives, arylamine derivatives, stilbene derivatives, triphenyldiamine derivatives, polyaniline or derivatives thereof, polythiophene or derivatives thereof, polyarylamine or derivatives thereof, polypyrrole or derivatives thereof, poly (p-phenylene vinylene) Or its derivatives, or poly (2,5-thienylene vinylene) or a derivative thereof.
- the hole transport material used for the hole transport layer polyvinyl carbazole or a derivative thereof, polysilane or a derivative thereof, a polysiloxane derivative having an aromatic amine compound group in a side chain or a main chain, polyaniline or a derivative thereof, Polymeric hole transport materials such as polythiophene or derivatives thereof, polyarylamine or derivatives thereof, poly (p-phenylene vinylene) or derivatives thereof, or poly (2,5-thienylene vinylene) or derivatives thereof are preferred, and more preferred Is polyvinyl carbazole or a derivative thereof, polysilane or a derivative thereof, and a polysiloxane derivative having an aromatic amine in the side chain or main chain.
- a low-molecular hole transport material it is preferably used by being dispersed in a polymer binder.
- the thickness of the hole transport layer is not particularly limited, but can be appropriately changed according to the intended design, and is preferably about 1 to 1000 nm. If the thickness is less than the lower limit, production tends to be difficult or the effect of hole transport is not sufficiently obtained. On the other hand, if the thickness exceeds the upper limit, the driving voltage and the hole transport layer are increased. There is a tendency that the voltage applied to is increased. Therefore, as described above, the thickness of the hole transport layer is preferably 1 to 1000 nm, more preferably 2 nm to 500 nm, and still more preferably 5 nm to 200 nm.
- Organic light emitting layer usually contains organic substances (low molecular compounds and high molecular compounds) that mainly emit fluorescence or phosphorescence. Further, a dopant material may be further included. Examples of the material for forming the organic light emitting layer used in the present invention include the following dye-based materials, metal complex-based materials, polymer-based materials, and dopant materials.
- the dye material examples include cyclopentamine derivatives, tetraphenylbutadiene derivative compounds, triphenylamine derivatives, oxadiazole derivatives, pyrazoloquinoline derivatives, distyrylbenzene derivatives, distyrylarylene derivatives, quinacridone derivatives, and coumarin derivatives.
- metal complex materials include metal complexes having light emission from triplet excited states such as iridium complexes and platinum complexes, aluminum quinolinol complexes, benzoquinolinol beryllium complexes, benzoxazolyl zinc complexes, benzothiazole zinc complexes, Azomethylzinc complex, porphyrin zinc complex, europium complex, etc., which has Al, Zn, Be, etc. or rare earth metals such as Tb, Eu, Dy, etc. as the central metal, and oxadiazole, thiadiazole, phenylpyridine, phenyl as the ligand
- metal complexes having benzimidazole, quinoline structure, and the like include metal complexes having benzimidazole, quinoline structure, and the like.
- polymer material examples include a polyparaphenylene vinylene derivative, a polythiophene derivative, a polyparaphenylene derivative, a polysilane derivative, a polyacetylene derivative, a polyfluorene derivative, a polyvinylcarbazole derivative, and the above-described dye bodies and metal complex light emitting materials. And the like.
- Examples of materials that emit blue light among the organic light emitting layer forming materials include distyrylarylene derivatives, oxadiazole derivatives, and polymers thereof, polyvinylcarbazole derivatives, polyparaphenylene derivatives, polyfluorene derivatives, and the like. . Of these, polymer materials such as polyvinyl carbazole derivatives, polyparaphenylene derivatives, and polyfluorene derivatives are preferred.
- examples of the material that emits green light among the organic light emitting layer forming materials include quinacridone derivatives, coumarin derivatives, and polymers thereof, polyparaphenylene vinylene derivatives, polyfluorene derivatives, and the like. Of these, polymer materials such as polyparaphenylene vinylene derivatives and polyfluorene derivatives are preferred.
- examples of the material that emits red light among the above light emitting layer forming materials include coumarin derivatives, thiophene ring compounds, and polymers thereof, polyparaphenylene vinylene derivatives, polythiophene derivatives, polyfluorene derivatives, and the like.
- polymer materials such as polyparaphenylene vinylene derivatives, polythiophene derivatives, and polyfluorene derivatives are preferable.
- a dopant may be added to the organic light emitting layer for the purpose of improving the light emission efficiency or changing the light emission wavelength.
- dopants include perylene derivatives, coumarin derivatives, rubrene derivatives, quinacridone derivatives, squalium derivatives, porphyrin derivatives, styryl dyes, tetracene derivatives, pyrazolone derivatives, decacyclene, phenoxazone, and the like.
- the thickness of the organic light emitting layer is usually 2 nm to 200 nm.
- a cathode-side interlayer such as an electron injection layer and an electron transport layer is laminated between the light emitting layer and a cathode described later, if necessary.
- Electrode transport layer As the material for forming the electron transport layer, known materials can be used. For example, oxadiazole derivatives, anthraquinodimethane or derivatives thereof, benzoquinone or derivatives thereof, naphthoquinone or derivatives thereof, anthraquinones or derivatives thereof, tetracyanoanthra Quinodimethane or derivatives thereof, fluorenone derivatives, diphenyldicyanoethylene or derivatives thereof, diphenoquinone derivatives, or metal complexes of 8-hydroxyquinoline or derivatives thereof, polyquinoline or derivatives thereof, polyquinoxaline or derivatives thereof, polyfluorene or derivatives thereof, etc. Can be mentioned.
- oxadiazole derivatives benzoquinone or derivatives thereof, anthraquinones or derivatives thereof, or metal complexes of 8-hydroxyquinoline or derivatives thereof, polyquinoline or derivatives thereof, polyquinoxaline or derivatives thereof, polyfluorene or derivatives thereof are preferred, 2- (4-biphenylyl) -5- (4-t-butylphenyl) -1,3,4-oxadiazole, benzoquinone, anthraquinone, tris (8-quinolinol) aluminum, and polyquinoline are more preferable.
- the electron injection layer is provided between the electron transport layer and the cathode, or between the light emitting layer and the cathode.
- the electron injection layer for example, depending on the type of the light emitting layer, an alkali metal, an alkaline earth metal, an alloy containing one or more of the above metals, an oxide, halide and carbonate of the metal, or the substance And the like.
- alkali metal or its oxide, halide, carbonate examples include lithium, sodium, potassium, rubidium, cesium, lithium oxide, lithium fluoride, sodium oxide, sodium fluoride, potassium oxide, potassium fluoride, oxide
- alkaline earth metals or oxides, halides and carbonates thereof include magnesium, calcium, barium, strontium, magnesium oxide, magnesium fluoride, calcium oxide, calcium fluoride, calcium fluoride, barium oxide, fluorine. Barium fluoride, strontium oxide, strontium fluoride, magnesium carbonate and the like.
- a metal, a metal oxide, an organometallic compound doped with a metal salt, an organometallic complex compound, or a mixture thereof can be cited as a material for the electron injection layer.
- This electron injection layer may have a stacked structure in which two or more layers are stacked. Specifically, Li / Ca etc. are mentioned.
- This electron injection layer is formed by vapor deposition, sputtering, printing, or the like.
- the thickness of the electron injection layer is preferably about 1 nm to 1 ⁇ m.
- cathode As a material for the cathode, a material having a small work function and easy electron injection into the light emitting layer and / or a material having a high electric conductivity and / or a material having a high visible light reflectance are preferable. Specific examples of such cathode materials include metals, metal oxides, alloys, graphite or graphite intercalation compounds, and inorganic semiconductors such as zinc oxide (ZnO).
- the metal examples include alkali metals, alkaline earth metals, transition metals, and Group 13 metals of the periodic table. Specific examples of these metals include lithium, sodium, potassium, rubidium, cesium, beryllium, magnesium, calcium, strontium, barium, gold, silver, platinum, copper, manganese, titanium, cobalt, nickel, tungsten, tin, and aluminum. , Scandium, vanadium, zinc, yttrium, indium, cerium, samarium, europium, terbium, ytterbium and the like.
- examples of the alloy include an alloy containing at least one of the above metals.
- Specific examples of such alloys include magnesium-silver alloys, magnesium-indium alloys, magnesium-aluminum alloys, indium-silver alloys, lithium-aluminum alloys, lithium-magnesium alloys, lithium-indium alloys, and calcium-aluminum alloys. Is mentioned.
- the cathode is a transparent electrode or a semi-transparent electrode as required.
- the material include conductive oxides such as indium oxide, zinc oxide, tin oxide, ITO, and IZO; polyaniline or a derivative thereof; Examples thereof include conductive organic substances such as polythiophene or derivatives thereof.
- the cathode may have a laminated structure of two or more layers. Moreover, an electron injection layer may be used as a cathode.
- the thickness of the cathode can be appropriately selected in consideration of electric conductivity and durability, but is, for example, 10 nm to 10 ⁇ m, preferably 20 nm to 1 ⁇ m, and more preferably 50 nm to 500 nm. is there.
- an upper sealing film for sealing the light emitting function part is formed in order to protect the light emitting function part having the anode-light emitting layer-cathode as a basic structure.
- This upper sealing film usually has at least one inorganic layer and at least one organic layer. The number of stacked layers is determined as necessary. Basically, inorganic layers and organic layers are alternately stacked.
- the plastic substrate has higher gas and liquid permeability than the glass substrate, and light emitting substances such as the organic light emitting layer are easily oxidized.
- the lower sealing film having a high barrier property against gas and liquid is laminated on the plastic substrate, and then the lower sealing film.
- the light emitting function unit is stacked on the substrate.
- the lower sealing film is usually formed with the same configuration and the same material as the upper sealing film.
- a substrate made of any of the aforementioned substrate materials is prepared.
- a plastic substrate having high gas and liquid permeability is used, a lower sealing film is formed on the substrate as necessary.
- an anode is patterned on the prepared substrate using any of the anode materials described above.
- a transparent electrode material such as ITO, IZO, tin oxide, zinc oxide, indium oxide, and zinc aluminum composite oxide is used.
- the electrode pattern is formed as a uniform deposited film on the substrate by a sputtering method, and then patterned into a line shape by photolithography.
- Partition forming process After forming the line-shaped anode, a photosensitive material is applied onto the substrate on which the anode is formed, and a photoresist film is laminated. Next, this photoresist film is patterned into a lattice shape by photolithography to form an insulating partition. A rectangular region covered with the lattice-shaped partition walls becomes a pixel region, and the patterned anode is exposed in this pixel region.
- the insulating photosensitive material forming the insulating partition may be either a positive resist or a negative resist. It is important that the partition walls have insulating properties. If they do not have insulating properties, current may flow between different pixels, and display defects may occur.
- photosensitive material constituting this partition examples include polyimide, acrylic resin, and novolak resin photosensitive compounds.
- This photosensitive material may contain a light-shielding material for the purpose of improving the display quality of the organic EL element.
- an ink repellant may be added to the photosensitive material for forming the partition.
- the surface of the partition may be coated with an ink repellent material to impart ink repellency to the partition surface.
- This ink repellency is preferably repellant both for the ink for an interlayer described later and for the ink for an organic light emitting layer.
- ink repellent compound used when an ink repellent substance is added to the photosensitive material for example, a silicone compound or a fluorine-containing compound is used.
- These ink repellent compounds exhibit ink repellency in both organic light-emitting ink (coating liquid) used for forming an organic light-emitting layer, which will be described later, and organic material ink (coating liquid) for an interlayer such as a hole transport layer. Therefore, it is preferable.
- Examples of a method for forming an ink-repellent film on the surface of the partition after forming the partition include, for example, a method in which a coating liquid containing an ink-repellent component is applied to the partition surface, and a functional group of the organic material on the partition surface is replaced with fluorine.
- Examples thereof include a method for modifying the surface by vaporizing, a method for vaporizing an ink repellent component, and depositing on the partition wall surface.
- Specific examples of the latter vapor deposition method include plasma treatment using CF 4 gas as an introduction gas. Compared to a substrate and an electrode, the organic partition wall is easily fluorinated by CF 4 gas, and the partition surface may be selectively made ink-repellent by performing plasma treatment.
- the photosensitive material (photoresist composition) for forming the insulating partition may be applied by a coating method using, for example, a spin coater, bar coater, roll coater, die coater, gravure coater, slit coater or the like. Good. After curing, the coating film is patterned into a lattice shape having a desired dimension using conventional photolithography.
- an interlayer forming step for forming an organic material layer in the pixel region is provided, and an organic material layer such as the above-described hole transport layer ( Anode-side interlayer) is formed.
- the film formation method for the anode-side interlayer is not particularly limited, but for low molecular weight materials, for example, a method by film formation from a mixed solution with a polymer binder can be mentioned. In the case of a polymer material, for example, a method by film formation from a solution can be given.
- the solvent used for film formation from a solution is not particularly limited as long as it dissolves the above-mentioned anode side interlayer material.
- solvents include chlorine solvents such as chloroform, methylene chloride and dichloroethane; ether solvents such as tetrahydrofuran; aromatic hydrocarbon solvents such as toluene and xylene; ketone solvents such as acetone and methyl ethyl ketone; ethyl acetate and acetic acid.
- ester solvents such as butyl and ethyl cellosolve acetate.
- Examples of the film forming method from the above solution include spin coating method, casting method, micro gravure coating method, gravure coating method, bar coating method, roll coating method, wire bar coating method, dip coating method, and slit coating from a solution.
- Coating methods such as coating methods, capillary coating methods, spray coating methods, nozzle coating methods, gravure printing, screen printing methods, flexographic printing methods, offset printing methods, reverse printing methods, inkjet printing methods, etc. It is done.
- a printing method such as a gravure printing method, a screen printing method, a flexographic printing method, an offset printing method, a reverse printing method, and an ink jet printing method is preferable in that the pattern formation is easy.
- polymer binder to be mixed those not extremely disturbing charge transport are preferable, and those that do not strongly absorb visible light are suitably used.
- examples of such a polymer binder include polycarbonate, polyacrylate, polymethyl acrylate, polymethyl methacrylate, polystyrene, polyvinyl chloride, polysiloxane and the like.
- the coating solution When the coating solution is applied to the entire surface of the substrate by the above coating method, the coating solution may be applied onto the partition wall.
- the coating solution on the partition wall is repelled by the surface of the partition wall showing ink repellency.
- it falls into the pixel area divided by the partition walls, and is formed as a coating film in each pixel area.
- the coating film in each pixel region is then dried to form an interlayer, which exhibits its function.
- the organic light emitting layer is formed after forming the anode-side interlayer as necessary.
- the organic light emitting layer is formed on the substrate before forming the organic light emitting layer. From the side where the partition walls are provided, the surface (hereinafter, may be referred to as the substrate surface on the side where the partition walls are formed) is treated with an organic solvent.
- This surface treatment step is realized by bringing the organic solvent into contact with the surface from the side where the partition walls are installed with respect to the substrate.
- the contact with the organic solvent needs to be performed on at least the surface of the partition wall, and may not be performed on the entire surface of the substrate, but is preferably performed on the entire surface of the substrate surface on the side where the partition wall is formed.
- Examples of the method of contacting the organic solvent with the substrate surface include, for example, a spin coating method in which the organic solvent is dropped onto the rotating substrate and the organic solvent is brought into contact with the entire surface of the substrate, or a method of applying or spraying the organic solvent onto the inclined substrate. Further, after the substrate is immersed in an organic solvent, a method of pulling up the substrate is used. After bringing the organic solvent into contact with the entire surface of the substrate or the partition walls and the pixel region surface by any method, it is preferable to dry the organic solvent with the surface in contact so that no droplets of the organic solvent remain. Examples of the drying method include heat drying, natural drying, and air blowing.
- an organic solvent to be used it is preferable that it is 1 type, or 2 or more types of the solvent for inks, and it is further more preferable that it is 1 type or 2 or more types of the solvent for organic luminescent materials mentioned later among the solvents for inks.
- Specific examples of the solvent for the organic light emitting material include toluene, xylene, acetone, anisole, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, and a mixed solvent thereof, and anisole is preferable.
- the surface treatment with the organic solvent slightly reduces the ink repellency on the partition wall surface, but does not impair the ink repellency.
- Organic light emitting layer formation process After the above-described surface treatment process is completed, an organic light emitting layer forming process is performed.
- the organic light-emitting material used for the organic light-emitting layer the above-described polymer organic light-emitting material and / or low-molecular organic light-emitting material are used.
- organic light emitting material coating liquid organic light emitting ink
- the solvent for dissolving or dispersing the organic light emitting material include toluene, xylene, acetone, anisole, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone and the like, or a mixed solvent thereof.
- aromatic organic solvents such as toluene, xylene, and anisole are preferable because they have good solubility of the organic light emitting material.
- surfactant, antioxidant, a viscosity modifier, a ultraviolet absorber, etc. to the ink of organic luminescent material as needed.
- a coating liquid containing an organic light emitting material organic light emitting ink
- organic light emitting ink organic light emitting ink
- spin coating method casting method, micro gravure coating method, gravure coating method, bar coating method, coal coating method, wire bar coating method, dip coating method, slit coating method, capillary coating method, spray coating method, nozzle coating method, etc.
- a coating method may be used.
- the organic EL element emits multicolor light for use in a color display device, it is necessary to selectively apply a predetermined organic light emitting ink to each pixel region to avoid color mixing.
- a gravure printing method for example, a screen printing method, a flexographic printing method, an offset printing method, a reverse printing method, an inkjet printing method, or the like is used.
- the inkjet printing method and the flexographic printing method are preferable, and the flexographic printing method is particularly preferable in order to apply the organic light-emitting ink in the partition more accurately.
- the coating solution is repelled on the side of the ink-repellent partition walls and the surface of the anode or anode side interlayer, and the coating film is deficient.
- Coating unevenness may occur, but in the present invention, since the surface treatment process using an organic solvent is performed before the organic light emitting layer forming process, uneven coating is prevented by moderately reducing ink repellency.
- the organic light emitting ink is applied so as to spread over the entire pixel area as designed, and a coating film is formed on the entire pixel area.
- the organic light emitting coating film formed in each pixel region without causing uneven coating becomes an organic light emitting layer through a drying process as necessary, and exhibits its function.
- a cathode-side interlayer such as a hole transport layer or a hole injection layer is formed as necessary.
- the method for forming this cathode side interlayer is not particularly limited in the case of an electron transport layer, but for low molecular weight electron transport materials, a vacuum deposition method from powder or a method by film formation from a solution or a molten state is exemplified.
- a vacuum deposition method from powder or a method by film formation from a solution or a molten state is exemplified.
- a method by film formation from a solution or a molten state is exemplified.
- a polymer binder may be used in combination.
- a film formation method similar to the method for forming a hole transport layer from a solution described above may be used.
- an electron injection layer it forms, for example using a vapor deposition method, sputtering method, a printing method etc.
- the cathode is formed using any of the materials described above by, for example, a vacuum deposition method, a sputtering method, a CVD method, an ion plating method, a laser ablation method, or a laminating method for pressing a metal thin film.
- an upper sealing film is formed in order to protect the light emitting function part having the anode-light emitting layer-cathode as a basic structure.
- the upper sealing film is composed of at least one inorganic layer and at least one organic layer as necessary. The number of these layers is determined as necessary. Basically, the inorganic layers and the organic layers are alternately stacked.
- the organic EL element of the present embodiment is useful as a planar light source, a light source of a segment display device and a dot matrix display device, and a backlight of a liquid crystal display device.
- a planar anode and a cathode may be arranged so as to overlap each other when viewed from one side in the stacking direction.
- an organic EL element that emits light in a pattern as a light source of a segment display device
- a method of installing a mask having a light-transmitting window formed in a pattern on the surface of the planar light source the light should be extinguished
- the organic material layer in a part is formed extremely thick to make it substantially non-luminescent
- a method in which at least one of the anode and the cathode is formed in a pattern By forming an organic EL element that emits light in a pattern by one of these methods, and by applying wiring so that voltage can be selectively applied to several electrodes, numbers, letters, simple symbols, etc. May be realized.
- the anode and the cathode may be formed in stripes and arranged so as to be orthogonal to each other when viewed from one side in the stacking direction.
- a method of separately coating a plurality of types of light emitting materials having different emission colors, a color filter, a fluorescence conversion filter, and the like are used.
- a method may be used.
- the dot matrix display device may be passively driven or may be actively driven in combination with a TFT or the like.
- the above-described display device is useful as a display device for a computer, a television, a mobile terminal, a mobile phone, a car navigation system, a video camera viewfinder, and the like.
- planar light source is self-luminous and thin, and is useful as a backlight of a liquid crystal display device or a planar illumination light source.
- a flexible substrate may be used as a curved light source or display device.
- an organic EL element having a laminated structure in which a hole injection layer was provided as an anode interlayer and a cathode interlayer was not provided was used.
- a feature of the present invention is that it has a surface treatment step with an organic solvent on the substrate surface on the side where the partition walls are formed. Therefore, all types of organic EL other than the multilayer structures shown in the following examples are used.
- the present invention can be similarly applied to elements, and the same effects can be obtained.
- an ITO thin film was formed on a transparent glass plate of 200 mm (vertical) ⁇ 200 mm (horizontal) ⁇ 0.7 mm (thickness), and further patterned to form a striped anode.
- a pixel region in which pixels are formed when viewed from one side in the thickness direction of the substrate is set in an island shape at a predetermined interval in the one direction on an ITO thin film extending in one direction.
- a positive photoresist (trade name “OFPR-800”, manufactured by Tokyo Ohka Kogyo Co., Ltd.) is applied to the entire surface of the substrate by spin coating, and this coating film is dried to obtain a film thickness of 1 ⁇ m. A photoresist layer was formed.
- a photomask designed to shield the region excluding the pixel region where the pixel is formed from one side in the thickness direction of the substrate from ultraviolet rays is disposed on the photoresist layer, and an alignment exposure machine ( The photoresist layer was irradiated with ultraviolet rays through the photomask from Dainippon Screen Mfg. Co., Ltd. (trade name “MA1300”) (exposure process).
- the exposed portion of the photoresist layer was removed using a resist developer (trade name “NMD-3” manufactured by Tokyo Ohka Kogyo Co., Ltd.) (development step).
- the glass substrate was heat-treated at 230 ° C. for 1 hour on a hot plate to completely heat and cure the developed photoresist layer (thermosetting step).
- a partition wall organic insulating layer surrounding the pixel region is formed, and the anode is exposed inside the partition wall.
- the width dimension of the obtained partition line was 20 ⁇ m, and the height dimension was 2 ⁇ m.
- Each pixel region was a rectangle of 60 ⁇ m ⁇ 180 ⁇ m.
- partition walls were subjected to an ink repellency treatment using a vacuum plasma apparatus (trade name “RIE-200L”, manufactured by Samco International Laboratories) using CF 4 gas.
- RIE-200L vacuum plasma apparatus
- Organic light-emitting ink (concentration of polymer light-emitting material) in which a polymer light-emitting material (trade name “RP158”, manufactured by Sumation Corporation) is dissolved as an organic light-emitting material in a mixed solvent in which anisole and cyclohexylbenzene are mixed at a weight ratio of 1: 1 : 1% by weight).
- This organic light-emitting ink (viscosity: 28 cp) was applied to the insulating partition walls after the surface treatment with the anisole using a flexographic printing method. This coating film was dried to form an organic light emitting layer having a thickness of 60 nm in the pixel region. The time from the completion of the surface treatment with the anisole to the start of printing of the organic light emitting ink was about 30 minutes.
- the state of the organic light emitting layer formed in each pixel region was observed with an optical microscope (manufactured by Nikon Corporation, trade name “Optiphoto 88”, objective lens magnification: 50 ⁇ ).
- the organic light emitting ink is repelled on the partition wall or the anode-side interlayer surface, so that there is a pixel region with a defective portion where an organic light emitting layer is not formed in the partition wall as viewed from one side in the thickness direction of the substrate. Confirmed that it was scattered.
- the organic EL device manufacturing method according to the present invention can manufacture an organic EL device without reducing the formation area of the organic light emitting layer from the design value.
- an organic EL element and a display device having excellent light emission characteristics can be obtained.
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Abstract
Description
隔壁を撥インキ性としておくことにより、有機発光層の形成前に形成する有機材料層(この特許文献1では正孔輸送層)を有機材料インキ(正孔輸送インキ)を基板全面へ一括コーティングすることによって形成することができる。すなわち、隔壁表面を含む基板全面に正孔輸送インキを一括して塗布しても、隔壁表面に塗布された正孔輸送インキは、隔壁表面ではじかれ、各画素領域内に流れ込み、隔壁表面は露出状態のままとなる。したがって、正孔輸送層形成後に形成される有機発光層形成用の有機発光インキを凸版印刷により画素領域に塗布する際に、有機発光インキが隔壁に塗布されることがあっても、撥インク性の隔壁表面によりはじかれるので、隣接画素領域間の有機発光材料の混色を防止することができる。
以下に、本発明方法が対象とする有機EL素子の構造について説明し、その後、本発明にかかる有機EL素子の製造方法について、さらに詳しく説明する。
有機EL素子に用いる基板は、電極を形成し、有機物の層を形成する際に変化しないものであればよく、例えば、ガラス、プラスチック、高分子フィルム、シリコン基板、これらを積層したものなどが用いられる。さらに、プラスチック、高分子フィルムなどに低透水化処理を施したものを用いてもよい。前記基板としては、市販のものが使用可能であり、また公知の方法により製造してもよい。
有機EL素子は、少なくとも陽極と、陰極と、前記陽極および陰極の間に位置する有機発光層とが積層されて構成される。また少なくとも陽極および陰極のうちのいずれか一方が光透過性を有する透明電極から成る。前記発光層には低分子および/または高分子の有機発光材料が用いられる。
a)陽極/発光層/陰極
b)陽極/正孔輸送層/発光層/陰極
c)陽極/発光層/電子輸送層/陰極
d)陽極/正孔輸送層/発光層/電子輸送層/陰極
(ここで、/は各層が隣接して積層されていることを示す。以下同様。)
e)陽極/電荷注入層/発光層/陰極
f)陽極/発光層/電荷注入層/陰極
g)陽極/電荷注入層/発光層/電荷注入層/陰極
h)陽極/電荷注入層/正孔輸送層/発光層/陰極
i)陽極/正孔輸送層/発光層/電荷注入層/陰極
j)陽極/電荷注入層/正孔輸送層/発光層/電荷注入層/陰極
k)陽極/電荷注入層/発光層/電荷輸送層/陰極
l)陽極/発光層/電子輸送層/電荷注入層/陰極
m)陽極/電荷注入層/発光層/電子輸送層/電荷注入層/陰極
n)陽極/電荷注入層/正孔輸送層/発光層/電荷輸送層/陰極
o)陽極/正孔輸送層/発光層/電子輸送層/電荷注入層/陰極
p)陽極/電荷注入層/正孔輸送層/発光層/電子輸送層/電荷注入層/陰極
上記陽極には、たとえば透明電極または半透明電極として、電気伝導度の高い金属酸化物、金属硫化物や金属の薄膜を用いることができ、透過率が高いものが好適に利用でき、用いる有機層により適宜、選択して用いる。具体的には、例えば、酸化インジウム、酸化亜鉛、酸化スズ、インジウムスズ酸化物(Indium Tin Oxide:略称ITO)、インジウム亜鉛酸化物(Indium Zinc Oxide:略称IZO)、金、白金、銀、および銅等の薄膜が用いられ、これらのなかでも、ITO、IZO、酸化スズが好ましい。
上述のように、前記陽極と発光層との間に、必要に応じて、正孔注入層、正孔輸送層などの陽極側インターレイヤーが積層される。
正孔注入層は、上述のように、陽極と正孔輸送層との間、または陽極と発光層との間に設けてもよい。正孔注入層を形成する材料としては、公知の材料を適宜用いることができ、特に制限はない。例えば、フェニルアミン系、スターバースト型アミン系、フタロシアニン系、ヒドラゾン誘導体、カルバゾール誘導体、トリアゾール誘導体、イミダゾール誘導体、アミノ基を有するオキサジアゾール誘導体、酸化バナジウム、酸化タンタル、酸化タングステン、酸化モリブデン、酸化ルテニウム、酸化アルミニウム等の酸化物、アモルファスカーボン、ポリアニリン、ポリチオフェン誘導体等が挙げられる。
正孔輸送層を構成する材料としては、特に制限はないが、例えば、N,N’-ジフェニル-N,N’-ジ(3-メチルフェニル)4,4’-ジアミノビフェニル(TPD)、4,4’-ビス[N-(1-ナフチル)-N-フェニルアミノ]ビフェニル(NPB)等の芳香族アミン誘導体、ポリビニルカルバゾールもしくはその誘導体、ポリシランもしくはその誘導体、側鎖もしくは主鎖に芳香族アミンを有するポリシロキサン誘導体、ピラゾリン誘導体、アリールアミン誘導体、スチルベン誘導体、トリフェニルジアミン誘導体、ポリアニリンもしくはその誘導体、ポリチオフェンもしくはその誘導体、ポリアリールアミンもしくはその誘導体、ポリピロールもしくはその誘導体、ポリ(p-フェニレンビニレン)もしくはその誘導体、またはポリ(2,5-チエニレンビニレン)もしくはその誘導体などが挙げられる。
有機発光層は、通常、主として蛍光または燐光を発光する有機物(低分子化合物および高分子化合物)を含む。なお、さらにドーパント材料を含んでいてもよい。本発明において用いられる有機発光層を形成する材料としては、例えば、以下の色素系材料、金属錯体系材料、高分子系材料、およびドーパント材料などが挙げられる。
なお、かかる有機発光層の厚さは、通常、2nm~200nmである。
上述のように、前記発光層と後述の陰極との間に、必要に応じて、電子注入層、電子輸送層などの陰極側インターレイヤーが積層される。
電子輸送層を形成する材料としては、公知のものが使用でき、例えば、オキサジアゾール誘導体、アントラキノジメタンもしくはその誘導体、ベンゾキノンもしくはその誘導体、ナフトキノンもしくはその誘導体、アントラキノンもしくはその誘導体、テトラシアノアンスラキノジメタンもしくはその誘導体、フルオレノン誘導体、ジフェニルジシアノエチレンもしくはその誘導体、ジフェノキノン誘導体、または8-ヒドロキシキノリンもしくはその誘導体の金属錯体、ポリキノリンもしくはその誘導体、ポリキノキサリンもしくはその誘導体、ポリフルオレンもしくはその誘導体等が挙げられる。
電子注入層は、先に述べたように、電子輸送層と陰極との間、または発光層と陰極との間に設けられる。電子注入層としては、例えば、発光層の種類に応じて、アルカリ金属やアルカリ土類金属、あるいは前記金属を一種類以上含む合金、あるいは前記金属の酸化物、ハロゲン化物および炭酸化物、あるいは前記物質の混合物などが挙げられる。
この電子注入層の膜厚としては、1nm~1μm程度が好ましい。
陰極の材料としては、仕事関数が小さく、発光層への電子注入が容易な材料および/または電気伝導度が高い材料および/または可視光反射率の高い材料が好ましい。かかる陰極材料としては、具体的には、金属、金属酸化物、合金、グラファイトまたはグラファイト層間化合物、酸化亜鉛(ZnO)等の無機半導体などが挙げられる。
上述のように陰極が形成された後、基本構造として陽極-発光層-陰極を有してなる発光機能部を保護するために、該発光機能部を封止する上部封止膜が形成される。この上部封止膜は、通常、少なくとも一つの無機層と少なくとも一つの有機層を有する。積層数は、必要に応じて決定され、基本的には、無機層と有機層は交互に積層される。
以下、本発明にかかる有機EL素子の製造方法について、さらに詳しく説明する。
前述のいずれかの基板材料からなる基板を準備する。ガスおよび液体の透過性が高いプラスチック基板を用いる場合は、必要に応じて、基板上に下部封止膜を形成しておく。
ライン状の陽極を形成後、陽極が形成された基板上に感光性材料を塗布してフォトレジスト膜を積層する。次に、このフォトレジスト膜を、フォトリソグラフィーにより格子状にパターニングして絶縁性隔壁を形成する。この格子状の隔壁に覆われた矩形状の領域が画素領域となり、この画素領域には、前記パターン形成された陽極が露出する。
絶縁性隔壁形成後、必要に応じて、後続の表面処理工程の前に、前記画素領域に有機材料層を形成するインターレイヤー形成工程を有し、前述の正孔輸送層などの有機材料層(陽極側インターレイヤー)を形成する。
従来の有機EL素子の製造方法では、上述のように、必要に応じて陽極側インターレイヤーを形成した後に有機発光層を形成するが、本発明では、有機発光層形成前に、基板に対して隔壁の設置された側から、有機溶媒によって表面(以下、隔壁が形成された側の基板表面という場合がある)を処理する。
なお、有機溶媒による表面処理により、隔壁表面の撥インキ性は幾分緩和されるものの、撥インキ性が損なわれることはない。すなわち、有機溶媒により隔壁の表面処理が実行された後で、隔壁上に有機発光インキが塗布した場合にも、その隔壁上の有機発光インキをはじく性能が損なわれるには到らず、必要とされる撥インキ性は健在のままである。
上述の表面処理工程が終了した後、有機発光層の形成工程が実行される。
有機発光層に使用される有機発光材料としては、前述の高分子有機発光材料及び/又は低分子有機発光材料が用いられる。
上記有機発光層の形成後、必要に応じて、正孔輸送層や正孔注入層などの陰極側インターレイヤーを形成する。
この陰極側インターレイヤーの形成方法は、電子輸送層の場合、特に制限はないが、低分子電子輸送材料では、粉末からの真空蒸着法、または溶液もしくは溶融状態からの成膜による方法が例示され、高分子電子輸送材料では、溶液または溶融状態からの成膜による方法が例示される。溶液または溶融状態からの成膜時には、高分子バインダーを併用してもよい。溶液から電子輸送層を成膜する方法としては、前述の溶液から正孔輸送層を成膜する方法と同様の成膜法を用いてもよい。
また、電子注入層の場合、例えば、蒸着法、スパッタリング法、印刷法等を用いて形成される。
陰極は、前述のいずれかの材料を用い、例えば、真空蒸着法、スパッタリング法、CVD法、イオンプレーティング法、レーザーアブレーション法、および金属薄膜を圧着するラミネート法などにより形成する。
以下に示す実施例では、陽極インターレイヤーとして正孔注入層を設け、陰極インターレイヤーは設けない積層構造の有機EL素子を対象として実施した。本発明の特徴は、隔壁が形成された側の基板表面の有機溶媒による表面処理工程を有する点にあるので、以下の実施例に示す積層構造以外の他の全ての種類の積層構造の有機EL素子に対しても同様に本発明を適用でき、同様の作用効果が得られる。
まず、200mm(縦)×200mm(横)×0.7mm(厚み)の透明ガラス板上にITO薄膜を形成し、さらにパターニングを行ってストライプ状の陽極を形成した。陽極の繰り返し間隔(ピッチ)は、80μmで、陽極(ライン)の幅70μmに対して陽極間の間隔(スペース)は10μmであった(ライン/スペース=70μm/10μm)。基板の厚み方向の一方から見て画素の形成される画素領域は、一方向に伸びるITO薄膜上において、前記一方向に所定の間隔をあけて島状に設定される。
次に、上記基板上の全面に、ポジ型フォトレジスト(東京応化工業(株)製、商品名「OFPR-800」)をスピンコーティング法により塗布し、この塗膜を乾燥させて、膜厚1μmのフォトレジスト層を形成した。
次に、基板の厚み方向の一方から見て画素の形成される画素領域を除く領域を紫外線から遮蔽するように設計されたフォトマスクを、上記フォトレジスト層の上に配置し、アライメント露光機(大日本スクリーン製造社製社製、商品名「MA1300」)から前記フォトマスクを介して前記フォトレジスト層に紫外線を照射した(露光工程)。
前記露光工程に続いて、レジスト現像液(東京応化工業(株)製、商品名「NMD-3」)を用いて、前記フォトレジスト層の露光部を除去した(現像工程)。
続いて、上記ガラス基板をホットプレート上で230℃で1時間加熱処理を行なって、上記現像後のフォトレジスト層を完全に加熱硬化させた(熱硬化工程)。
上記一連のフォトリソグラフィー工程により、画素領域を囲う隔壁(有機絶縁層)が形成され、この隔壁内部で陽極が露出する。得られた隔壁ラインの幅寸法は、20μmであり、高さ寸法は、2μmであった。また、各画素領域は60μm×180μmの矩形であった。
次に、ポリ(3,4-エチレンジオキシチオフェン)/ポリスチレンスルホン酸(Bayer社製、商品名「BaytronP AI4083」)の懸濁液を0.2μmメンブランフィルターで濾過した。この濾過液をノズルコート法により上記画素領域に塗布した。続いて、この塗布層を200℃×20分間、加熱処理して、60nm厚の正孔注入層を形成した。
次に、上記基板上に合計量30mLのアニソールを連続的に滴下し、スピンコーティング法によりアニソールを基板上の全表面に接触させた(塗布した)。その後、約30分間エアーブロー処理を行うことにより基板を乾燥させた。
アニソールとシクロヘキシルベンゼンとを重量比1:1で混合した混合溶媒に有機発光材料として高分子発光材料(サメイション社製、商品名「RP158」)を溶解させた有機発光インキ(高分子発光材料の濃度:1重量%)を準備した。この有機発光インキ(粘度:28cp)を、フレキソ印刷法を用いて、前記アニソールによる表面処理後の絶縁性の隔壁内に塗布した。この塗膜を乾燥して画素領域内に60nm厚の有機発光層を形成した。なお、前記アニソールによる表面処理完了から有機発光インキの印刷開始までの時間は、約30分であった。
次に、上記有機発光層の上に、陰極として、カルシウムを100Åの厚さで蒸着し、さらに、酸化保護層としてアルミニウムを2000Åの厚さで蒸着した。これにより、ボトムエミッション構造の有機EL素子を作製した。
上記実施例において有機発光層を形成する前の(隔壁側の基板表面の溶媒による処理)を実施しなかったことを除いて、実施例と同様にして有機EL素子を製造した。
Claims (12)
- 基板上に少なくとも陰極と、陽極と、前記陰極および陽極の間に位置する有機発光層とが積層されてなる有機エレクトロルミネッセンス素子の製造方法であって、
画素の形成される画素領域を囲って設置された隔壁内に、有機発光材料を含むインキを塗布して有機発光層を形成する有機発光層形成工程と、
該有機発光層形成工程の前に、基板に対して隔壁の設置された側から、有機溶媒によって表面を処理する表面処理工程とを含む、有機エレクトロルミネッセンス素子の製造方法。 - 前記表面処理工程が、基板に対して隔壁の設置された側から、有機溶媒を表面に接触させる工程である、請求項1に記載の有機エレクトロルミネッセンス素子の製造方法。
- 前記表面処理工程では、スピンコーティング法によって、基板に対して隔壁の設置された側から、有機溶媒を表面に接触させる、請求項2に記載の有機エレクトロルミネッセンス素子の製造方法。
- 前記表面処理工程において、有機溶媒を表面に接触させた後、該有機溶媒を乾燥させる、請求項2に記載の有機エレクトロルミネッセンス素子の製造方法。
- 前記有機溶媒がインキ用溶媒の一種もしくは二種以上である、請求項1に記載の有機エレクトロルミネッセンス素子の製造方法。
- 前記有機溶媒が前記有機発光材料用の溶媒の一種もしくは二種以上である、請求項1に記載の有機エレクトロルミネッセンス素子の製造方法。
- 前記有機溶媒がアニソールである、請求項1に記載の有機エレクトロルミネッセンス素子の製造方法。
- 前記有機発光層形成工程では、印刷法により、前記隔壁内に有機発光材料を含むインキを塗布する、請求項1に記載の有機エレクトロルミネッセンス素子の製造方法。
- 前記印刷法がフレキソ印刷法である、請求項8に記載の有機エレクトロルミネッセンス素子の製造方法。
- 前記表面処理工程の前に、前記画素領域に有機材料層を形成するインターレイヤー形成工程を有する、請求項1に記載の有機エレクトロルミネッセンス素子の製造方法。
- 請求項1に記載の有機エレクトロルミネッセンス素子の製造方法を用いて得られた有機エレクトロルミネッセンス素子。
- 請求項11に記載の有機エレクトロルミネッセンス素子を含む表示装置。
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EP09728402A EP2278859A4 (en) | 2008-03-31 | 2009-03-11 | PROCESS FOR PREPARING AN ORGANIC ELECTROLUMINESCENT TELEPHONE, ORGANIC ELECTROLUMINESCENE ELEMENT AND DISPLAY ASSEMBLY |
CN2009801100856A CN101978783A (zh) | 2008-03-31 | 2009-03-11 | 有机电致发光元件的制造方法、有机电致发光元件以及显示装置 |
US12/935,242 US20110018433A1 (en) | 2008-03-31 | 2009-03-11 | Method of producing organic electroluminescence element, organic electroluminescence element, and display device |
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US10226278B2 (en) * | 2012-10-29 | 2019-03-12 | Ablative Solutions, Inc. | Method for painless renal denervation using a peri-vascular tissue ablation catheter with support structures |
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