WO2009107751A1 - 磁歪式トルクセンサとその製造方法、並びに電動パワーステアリング装置 - Google Patents
磁歪式トルクセンサとその製造方法、並びに電動パワーステアリング装置 Download PDFInfo
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- WO2009107751A1 WO2009107751A1 PCT/JP2009/053606 JP2009053606W WO2009107751A1 WO 2009107751 A1 WO2009107751 A1 WO 2009107751A1 JP 2009053606 W JP2009053606 W JP 2009053606W WO 2009107751 A1 WO2009107751 A1 WO 2009107751A1
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- magnetostrictive
- magnetostrictive film
- torque
- film portion
- steering
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62D—MOTOR VEHICLES; TRAILERS
- B62D5/00—Power-assisted or power-driven steering
- B62D5/04—Power-assisted or power-driven steering electrical, e.g. using an electric servo-motor connected to, or forming part of, the steering gear
- B62D5/0457—Power-assisted or power-driven steering electrical, e.g. using an electric servo-motor connected to, or forming part of, the steering gear characterised by control features of the drive means as such
- B62D5/046—Controlling the motor
- B62D5/0463—Controlling the motor calculating assisting torque from the motor based on driver input
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62D—MOTOR VEHICLES; TRAILERS
- B62D6/00—Arrangements for automatically controlling steering depending on driving conditions sensed and responded to, e.g. control circuits
- B62D6/08—Arrangements for automatically controlling steering depending on driving conditions sensed and responded to, e.g. control circuits responsive only to driver input torque
- B62D6/10—Arrangements for automatically controlling steering depending on driving conditions sensed and responded to, e.g. control circuits responsive only to driver input torque characterised by means for sensing or determining torque
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/02—Rotary-transmission dynamometers
- G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
- G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
- G01L3/101—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means
- G01L3/102—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means involving magnetostrictive means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/02—Rotary-transmission dynamometers
- G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
- G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
- G01L3/101—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means
- G01L3/102—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means involving magnetostrictive means
- G01L3/103—Details about the magnetic material used
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/02—Rotary-transmission dynamometers
- G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
- G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
- G01L3/101—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means
- G01L3/105—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means involving inductive means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49007—Indicating transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
Definitions
- the present invention relates to a magnetostrictive torque sensor suitable for detecting a steering torque of an electric power steering device of an automobile, a method of manufacturing the magnetostrictive torque sensor, and an electric power steering configured using the magnetostrictive torque sensor. Relates to the device.
- a steering torque applied from a steering wheel to a steering shaft by a driver's steering operation is detected by a steering torque detector.
- a magnetostrictive torque sensor is used as the steering torque detector.
- the steering shaft is a rotating shaft that rotates in response to the rotational force generated by the driver's steering, and functions as the rotating shaft in the steering torque detector.
- the electric power steering device drives and controls a steering force assisting motor in accordance with the torque signal detected from the steering torque detector, and reduces the driver's steering force to give the driver a comfortable steering feeling. .
- Magnetostrictive films 102A and 102B are formed on the surface of a steering shaft (rotating shaft) 101 of the automobile.
- the magnetostrictive films 102 ⁇ / b> A and 102 ⁇ / b> B have magnetic anisotropies 103 and 104 that are opposite to each other at two locations along the entire circumference in the circumferential direction of the steering shaft 101.
- the magnetic permeability of the magnetostrictive film 102A increases with respect to the clockwise torque.
- the magnetic permeability increases and changes with respect to the counterclockwise torque.
- the magnetostrictive torque sensor 100 has the magnetic characteristics of the magnetostrictive films 102A and 102B according to the twist generated in the steering shaft 101 when a clockwise or counterclockwise input torque as indicated by an arrow 105 acts on the steering shaft 101.
- the change is detected in a non-contact manner by the respective detection coils 106A and 106B.
- the detection coil 106A is disposed so as to surround the magnetostrictive film 102A
- the detection coil 106B is disposed so as to surround the magnetostrictive film 102B.
- FIG. 12 shows the detection principle of the input torque based on the sensor configuration of the magnetostrictive torque sensor 100.
- a characteristic VT1 is an input torque output characteristic created based on the output signal from the detection coil 106A
- a characteristic VT2 is an input torque output characteristic created based on the output signal from the detection coil 106B.
- the characteristic VT3 is an input torque output characteristic created by taking the difference (VT1 ⁇ VT2) between the characteristic VT1 and the characteristic VT2. Based on the characteristic VT3, the input torque applied to the steering shaft is obtained.
- the point B of the characteristic VT3 is set as the origin (output value 0), the right area is set as the positive area, and the left area is set as the negative area. Based on the characteristic VT3, information about the rotation direction and magnitude of the input torque applied to the steering shaft is obtained.
- the entire surface in the circumferential direction of the surface is formed at an appropriate axial width at two locations along the axial center of the rotatable rod-shaped (cylindrical) steering shaft 101.
- the magnetostrictive films 102A and 102B are formed, and magnetic anisotropy 103 and 104 are added to these magnetostrictive films 102A and 102B, respectively.
- a conventional method of adding magnetic anisotropy to a magnetostrictive film is, for example, by forming a magnetostrictive material plating portion (magnetostrictive film) by electrolytic plating and applying a torsional torque to a shaft member (rotating shaft). In this method, stress is applied to the circumferential surface of the member, and the shaft member is heat-treated in a thermostatic bath in the state where the stress is applied (Patent Document 1).
- Patent Document 1 as a method for imparting magnetic anisotropy, after a magnetostrictive film is plated in the circumferential direction on the surface of the steering shaft to a thickness of 40 ⁇ m, a stress is applied by applying a torsion torque of 2 kgm, and 150 to 550 is applied. It has been proposed to heat-treat at 10 ° C. for about 10 minutes to 20 hours.
- the conventional magnetostrictive torque sensor 100 shown in FIG. 11 has a problem that a failure of the magnetostrictive films 102A and 102B cannot be accurately detected. The reason is that even if a change occurs in the sensor output signal related to the steering torque, it is determined whether the change is due to an environmental change, a change due to the applied steering torque, or a change due to a failure of the magnetostrictive films 102A and 102B itself. Because I could not do it.
- each of the two magnetostrictive films 102A and 102B is provided in order to detect a failure of the magnetostrictive films 102A and 102B.
- two coils 106A-1, 106A-2, 106B-1, 106B-1, and 106B-2 are provided (Patent Document 2).
- Each of the two magnetostrictive films 102A and 102B is provided with the upper detection coils 106A-1 and 106B-1 and the lower detection coils 106A-2 and 106B-2 in FIG. It is done.
- a detection signal related to the steering torque and a failure detection signal can be obtained by combining the voltage signals output from each of these four detection coils based on a predetermined relationship. According to such a configuration, when a failure occurs in any of the magnetostrictive films 102A and 102B, the failure of the magnetostrictive film can be detected by the failure detection signal.
- FIG. 14 shows another magnetostrictive torque sensor having a failure detection structure (Patent Document 3).
- the magnetostrictive torque sensor 200 three magnetostrictive films 201A, 201B, and 201C are formed in a state separated in the axial direction of the rotating shaft 101.
- the two magnetostrictive films 201A and 201B positioned on the upper side and the lower side are magnetostrictive films provided with different magnetic anisotropies.
- a magnetostrictive film 201C for failure detection is formed between the two magnetostrictive films 201A and 201B.
- Detection coils 202A, 202B, and 202C are provided around each of the three magnetostrictive films 201A, 201B, and 201C.
- a signal relating to the steering torque is extracted. Further, a failure detection signal is extracted based on the three detection signals output from the three detection coils 201A, 201B, and 201C.
- the magnetostrictive torque sensor in the case where the steering torque detection and the magnetostrictive film failure detection can be performed simultaneously, when there are two magnetostrictive films, a total of four detection coils are required. There is a problem that the number of parts increases, the manufacturing cost increases, and the manufacturing process increases. Further, when the magnetostrictive films are formed in three places, the total number of detection coils is three. However, the magnetostrictive film located in the middle in the actual manufacturing process has a problem that the composition of the iron component (Fe) must be lower than that of the other upper and lower magnetostrictive films, and the manufacturing process is increased.
- Fe iron component
- the present invention can perform torque signal detection and magnetostrictive film failure at the same time, can make the area where the magnetostrictive film is formed on the rotating shaft small, can reduce the total number of parts such as detection coils, Furthermore, a magnetostrictive torque sensor capable of simplifying the structure without increasing the manufacturing process, a method for manufacturing the magnetostrictive torque sensor, and an electric power steering device configured using the magnetostrictive sensor are provided.
- a magnetostrictive torque sensor includes a rod-shaped rotating shaft, a magnetostrictive film formed around the circumference of the surface of the rotating shaft in a circumferential direction, and around the magnetostrictive film.
- the first detection coil, the second detection coil, and the third detection coil that are arranged, the magnetostrictive film is formed as a continuous region in the axial direction of the rotating shaft, and the region that is continuously formed, A first magnetostrictive film portion and a second magnetostrictive film portion having magnetic anisotropies in opposite directions; and a third magnetostrictive film portion formed between the first magnetostrictive film portion and the second magnetostrictive film portion.
- the first detection coil, the second detection coil, and the third detection coil are provided corresponding to the first magnetostrictive film portion, the second magnetostrictive film portion, and the third magnetostrictive film portion, respectively.
- two magnetostrictive film parts for torque detection and a magnetostrictive film part for fault detection located between them are formed as one continuous magnetostrictive film.
- the two magnetostrictive film portions for torque detection are heat-treated to have opposite magnetic anisotropy, and as a result, the magnetostrictive film portion formed in the middle is formed as a portion that does not change with respect to torque. .
- the third magnetostrictive film portion is a torque insensitive region and the third detection coil is a failure detection coil.
- the magnetostrictive film is formed continuously in the axial direction at a part of the axial direction of the rotating shaft on the peripheral surface of the rotating shaft.
- the axial lengths of the first magnetostrictive film portion, the second magnetostrictive film portion, and the third magnetostrictive film portion are substantially the same.
- the rotation shaft is preferably at least a part of a steering shaft in an electric power steering device of an automobile.
- the electric power steering device is responsive to a steering shaft, a steering torque detector that detects a steering torque applied to the steering shaft, and a steering torque detection signal that is output from the steering torque detector.
- a control means for controlling the steering shaft so as to apply an auxiliary torque to the steering shaft, and the steering torque detector preferably includes any one of the above-described magnetostrictive torque sensors.
- a method for manufacturing a magnetostrictive torque sensor according to the present invention wherein the surface of the rod-shaped rotating shaft is continuous in the entire axial direction and partially in the axial direction.
- Forming a magnetostrictive film performing a heat treatment on the first magnetostrictive film portion of the magnetostrictive film in a state where the first torsional torque is applied to the rotating shaft, and releasing the first torsional torque to form the first magnetostrictive film.
- first magnetic anisotropy in the portion Forming a first magnetic anisotropy in the portion, performing a heat treatment on the second magnetostrictive film portion in a state where a second torsion torque in a direction opposite to the first torsion torque is applied to the rotating shaft, And releasing a second torsional torque to create a second magnetic anisotropy in the second magnetostrictive film portion, and the first magnetostrictive film portion has no magnetic anisotropy between the first magnetostrictive film portion and the second magnetostrictive film portion.
- 3 magnetostrictive film portions are formed.
- the first magnetostrictive film portion, the second magnetostrictive film portion, and the third magnetostrictive film portion of the magnetostrictive film are formed continuously. Is preferred.
- the same heating coil is used for the heat treatment of the first magnetostrictive film portion and the heat treatment of the second magnetostrictive film portion, and the first magnetostrictive film is used. It is preferable that the axial lengths of the portion and the second magnetostrictive film portion are substantially the same.
- FIG. 1 is a partial cross-sectional side view conceptually showing the basic structure of a magnetostrictive torque sensor according to the present invention. It is a figure which shows the apparatus structure of a magnetostriction type torque sensor. It is a longitudinal cross-sectional view which shows the internal structure of the electric power steering apparatus which concerns on embodiment of this invention. It is a graph which shows the magnetostriction characteristic curve and sensor detection characteristic of the torque detection part of a magnetostriction type torque sensor. It is a graph which shows the output change characteristic of the torque detection coil of a magnetostriction type torque sensor, and a failure detection coil. It is a manufacturing method of a magnetostrictive torque sensor, and is a process diagram showing a manufacturing process of a rotating shaft.
- FIG. 9A to FIG. 9C are diagrams for explaining the heat treatment when adding magnetic anisotropy to two portions of the magnetostrictive film of the rotating shaft.
- FIGS. 10A and 10B are views for explaining the advantages of the magnetostrictive film of the magnetostrictive torque sensor according to the present embodiment.
- FIGS. 1 to 3 show an example of the structure of a magnetostrictive torque sensor according to the present invention.
- 1 is a partially sectional side view showing the basic structure of a magnetostrictive torque sensor
- FIG. 2 is a side view conceptually showing the basic structure of the magnetostrictive torque sensor
- FIG. The longitudinal cross-sectional view of the specific structure integrated in the steering shaft of the electric power steering apparatus as a steering torque detection part is shown.
- the magnetostrictive torque sensor 10 has a rod-shaped rotating shaft 11, an excitation coil 12, and three detection coils 13A, 13B, and 13C.
- the exciting coil 12 and the detection coils 13A, 13B, 13C are arranged around the rotating shaft 11.
- the rotating shaft 11 is shown with its upper and lower parts cut away and omitted for convenience of explanation.
- the magnetostrictive torque sensor 10 is used as a steering torque detection unit of an electric power steering device for an automobile, the rotating shaft 11 becomes a part of the steering shaft. This state is shown in FIG.
- the rotary shaft 11 receives a rotational force (torque) of clockwise rotation (clockwise) or counterclockwise rotation (counterclockwise) as indicated by an arrow A around the axis 11a.
- the rotating shaft 11 is formed of a metal rod such as a chromium molybdenum steel material (SCM material).
- a magnetostrictive film 14 is formed on the rotating shaft 11 as one region continuous in the axial direction.
- the magnetostrictive film 14 is formed over the entire circumference of the rotating shaft 11 in the circumferential direction. In FIG. 1 and the like, the thickness of the magnetostrictive film 14 is exaggerated.
- the magnetostrictive film 14 formed at one place is divided into three regions (portions).
- first and second magnetostrictive film portions 14A and 14B are formed at two upper and lower portions in FIG. 1 and the like, and a third magnetostrictive film portion 14C is further provided between the two magnetostrictive film portions 14A and 14B. It is formed continuously.
- Each of the magnetostrictive film portions 14A, 14B, 14C is formed over the entire circumference of the rotating shaft 11 in the circumferential direction.
- each of the three magnetostrictive film portions 14A, 14B, and 14C is preferably 8 mm. For this reason, the overall axial dimension of the magnetostrictive film 14 is 24 mm.
- the magnetostrictive film 14 is preferably formed as a magnetostrictive material plating portion on the surface of the rotary shaft 11 by an electrolytic plating process using a Ni—Fe alloy material.
- the magnetostrictive film portions 14A and 14B having magnetic anisotropy in the oblique direction are formed by performing magnetic anisotropy processing for each region on the magnetostrictive material plated portion. Magnetic anisotropy is not added to the magnetostrictive film portion 14C.
- the magnetostrictive film portions 14A and 14B have opposite magnetic anisotropy.
- the magnetostrictive film portion 14C does not have an oblique magnetic anisotropy and becomes a torque dead zone portion.
- the method of forming the magnetostrictive film 14 is not limited to the electrolytic plating process, and vapor deposition, sputtering, or the like can also be used.
- the excitation coil 12 and the detection coils 13A, 13B, and 13C correspond to the first to third magnetostrictive film portions 14A, 14B, and 14C formed on the surface of the rotating shaft 11, respectively. Provided.
- a detection coil 13A is disposed around the magnetostrictive film portion 14A with a gap therebetween.
- the substantially cylindrical ring-shaped detection coil 13A surrounds the entire circumference of the magnetostrictive film 14A.
- a detection coil 13B is disposed around the magnetostrictive film portion 14B with a gap therebetween.
- the detection coil 13B surrounds the entire periphery of the magnetostrictive film 14B.
- a ring-shaped excitation coil 12 is disposed around each of the two detection coils 13A and 13B. In FIG. 1, the excitation coils 12 are individually provided so as to correspond to the magnetostrictive film portions 14 ⁇ / b> A and 14 ⁇ / b> B, respectively, but actually two portions of one excitation coil 12 are shown separately. It is.
- the detection coils 13A and 13B and the excitation coil 12 are wound around the space around the magnetostrictive film portions 14A and 14B using ring-shaped support frame portions 15A and 15B.
- the support frame bodies 15A and 15B are provided around the rotation shaft 11 so as to surround the rotation shaft 11.
- a detection coil 13C and an excitation coil 12 are provided so as to surround the magnetostrictive film portion 14C with a gap interposed therebetween.
- the third magnetostrictive film portion 14C is a magnetostrictive film portion for detecting a failure of the magnetostrictive film portions 14A and 14B provided for detecting input torque.
- the detection coil 13C and the excitation coil 12 are wound around the magnetostrictive film 14C using a ring-shaped support frame body portion 15C.
- the support frame body portion 15 ⁇ / b> C is also provided around the rotation shaft 11 so as to surround the rotation shaft 11.
- the excitation coil 12 and the detection coils 13A and 13B arranged with respect to the magnetostrictive film portions 14A and 14B of the magnetostrictive film 14 formed on the rotating shaft 11 are conceptually shown as electrical relationships.
- An AC power supply 16 that constantly supplies an AC current for excitation is connected to the excitation coil 12 that is arranged in common with respect to the magnetostrictive film portions 14A and 14B.
- Induced voltages V A and V B are output from the output terminals of the detection coils 13A and 13B arranged corresponding to the magnetostrictive film portions 14A and 14B, respectively.
- the induced voltages V A and V B correspond to the torque to be detected.
- the excitation coil 12 and detection coil 13C is disposed, is output by the voltage V C from the output terminal of the detection coil 13C.
- the induction voltages V A and V B output from the output terminals of the detection coils 13A and 13B are input to the torque calculation unit 17.
- the torque calculator 17 calculates and calculates the torque applied to the rotating shaft 11 based on the induced voltages V A and V B , and outputs a signal (T) related to the torque.
- the torque calculation unit 17 is configured by calculation means such as a microcomputer or an electric circuit for calculation.
- the induced voltages V A , V B , and V C output from the output terminals of the detection coils 13A, 13B, and 13C are input to the failure detection unit 18.
- the failure calculation unit 18 detects a failure in the magnetostrictive film portions 14A and 14B based on the induced voltages V A , V B and V C and outputs a failure signal SG1.
- the failure detection unit 18 is configured by a calculation means such as a microcomputer or a calculation electric circuit.
- the relationship between the exciting coil 12 and the detection coils 13A, 13B, and 13C is the relationship between the primary winding and the secondary winding of the transformer.
- FIG. 3 a structure in which the magnetostrictive torque sensor 10 is incorporated as, for example, a steering torque detector on a steering shaft of an electric power steering apparatus will be described.
- elements that are substantially the same as those described in FIGS. 1 and 2 are denoted by the same reference numerals.
- FIG. 3 shows specific configurations of the steering torque detector 20, the support structure of the steering shaft 21, the rack and pinion mechanism 34, the power transmission mechanism 35, and the steering force assisting motor 42.
- the upper portion of the steering shaft 21 is coupled to a steering wheel (not shown) of the vehicle.
- a lower portion of the steering shaft 21 is configured to transmit a steering force to an axle provided with a rack shaft via a rack and pinion mechanism 34.
- the steering torque detector 20 is attached to the upper part of the steering shaft 21.
- the steering torque detector 20 includes a magnetostrictive torque sensor 10. A portion of the steering shaft 21 on which the magnetostrictive film 14 (magnetostrictive film portions 14A to 14C) is formed corresponds to the rotating shaft 11.
- the steering shaft 21 is supported by two bearing portions 32 and 33 so as to be rotatable.
- a rack and pinion mechanism 34 and a power transmission mechanism 35 are accommodated in the housing 31a.
- a steering torque detector 20 (including the magnetostrictive torque sensor 10) is attached to the upper side of the housing 31a with respect to the steering shaft 21 (corresponding to the rotary shaft 11 described above).
- the above-described magnetostrictive film portions 14A, 14B, and 14C are formed on the steering shaft 21, and an exciting coil 12 and detection coils 13A, 13B, and 13C are provided corresponding to the magnetostrictive film portions 14A, 14B, and 14C.
- Excitation coil 12 and detection coils 13A, 13B, and 13C are supported by support frame portions 15A, 15B, and 15C and yoke portions 36A, 36B, and 36C.
- the upper opening of the housing 31a is closed with a lid 37, and the lid 37 is fixed to the housing 31a with a bolt (not shown).
- a pinion 38 provided at the lower end portion of the steering shaft 21 is located between the bearing portions 32 and 33.
- the rack shaft 39 is guided by a rack guide 40 and is urged by a compressed spring 41 to be pressed against the pinion 38 side.
- the power transmission mechanism 35 is formed by a worm gear 44 and a worm wheel 45.
- the worm gear 44 is fixed to a transmission shaft 43 coupled to the output shaft of the steering force assisting motor 42.
- the worm wheel 45 is fixed to the steering shaft 21.
- the steering torque detector 20 is attached to the inside of the cylindrical portion 37 a of the lid 37.
- Steering torque detector 20 detects steering torque that acts on the steering shaft 21.
- the detected value is input to a control device (not shown in FIG. 3) and used as a reference signal for causing the motor 42 to generate an appropriate auxiliary steering torque.
- the steering torque detector 20 changes the magnetic characteristics of the magnetostrictive film portions 14A and 14B according to the twist generated in the steering shaft 21, and the magnetostrictive film portion 14C. the characteristic change, the detection coils 13A, 13B, induced voltage V a from the output terminals of the @ 13 C, V B, electrically detected as a change in V C.
- convex magnetostrictive characteristic curves 51A and 51B shown in FIG. 4 are obtained, respectively.
- the magnetostrictive characteristic curves 51A and 51B correspond to the change characteristics of the induced voltage which is the detection output from the detection coils 13A and 13B, respectively.
- the steering torque detector 20 calculates a difference between induced voltages output from the two detection coils based on the two magnetostrictive characteristic curves 51A and 51B, and is applied to the steering shaft 21 according to the sign and magnitude of the calculated value.
- the rotation direction (right rotation or left rotation) and magnitude of the steering torque is detected.
- the steering shaft 21 When a steering torque is applied to the steering shaft 21, the steering shaft 21 is twisted. As a result, a magnetostrictive effect is generated in the magnetostrictive film portions 14A and 14B.
- the change in the magnetic field due to the magnetic permeability change caused by the magnetostriction effect in the magnetostrictive film portions 14A and 14B is detected by the detection coils 13A and 13A. It is detected as a change in induced voltages V A and V B by 13B.
- the induced voltage V A based on the change in V B, and outputs two induction voltages V A, the difference V B as a detected voltage value. Therefore, the direction and magnitude of the steering torque (T) applied to the steering shaft 21 can be detected based on the output voltage value (V A ⁇ V B ) of the steering torque detector 20.
- FIG. 4 shows the magnetostrictive characteristic curves 51A and 51B of the two magnetostrictive film portions 14A and 14B, respectively.
- the horizontal axis represents the steering torque applied to the steering shaft 21, and the positive side (+) corresponds to the right rotation and the negative side (-) corresponds to the left rotation.
- the vertical axis in FIG. 4 means the voltage axis.
- Magnetostrictive characteristic curves 51A and 51B for the magnetostrictive film portions 14A and 14B simultaneously represent the detection output characteristics of the detection coils 13A and 13B. That is, an exciting alternating current is supplied to the magnetostrictive film portions 14A and 14B having the magnetostrictive characteristic curves 51A and 51B by the common exciting coil 12, and the detecting coils 13A and 13B are induced voltages in response to the exciting alternating current. Therefore, the change characteristics of the induced voltages of the detection coils 13A and 13B correspond to the magnetostriction characteristic curves 51A and 51B of the magnetostrictive film portions 14A and 14B.
- the magnetostrictive characteristic curve 51A shows the change characteristic of the induced voltage VA output from the detection coil 13A
- the magnetostrictive characteristic curve 51B shows the change characteristic of the induced voltage VB output from the detection coil 13B.
- the value of the induced voltage VA output from the detection coil 13A is substantially linear as the steering torque value changes from the negative region to the positive region and further reaches the positive value T1 of the steering torque. It has a characteristic that it increases in the characteristic, reaches a peak value when the steering torque becomes a positive value T1, and gradually decreases when the steering torque further increases from T1.
- the value of the induced voltage V B output from the detection coil 13B gradually increases until the steering torque reaches a negative value ⁇ T1, and the steering torque is negative.
- the value is -T1
- the peak value is obtained, and when the steering torque further increases from -T1 and changes from the negative region to the positive region, it has a characteristic of decreasing in a substantially linear characteristic.
- the magnetostrictive characteristic curve 51A related to the detection coil 13A and the magnetostrictive characteristic curve 51B related to the detection coil 13B have magnetic anisotropies that are opposite to each other in the magnetostrictive film portions 14A and 14B. Reflecting this, the relationship is substantially line symmetric with respect to the vertical axis including the point where the two magnetostrictive characteristic curves intersect.
- a line 52 shown in FIG. 4 represents a detection coil from each value of the magnetostrictive characteristic curve 51A obtained as the output voltage of the detection coil 13A in a common area of the magnetostrictive characteristic curves 51A and 51B and having a substantially linear characteristic.
- the graph produced based on the value which subtracted each corresponding value of the magnetostriction characteristic curve 51B obtained as an output voltage of 13B is shown.
- the steering torque detector 20 uses the region regarded as a substantially constant gradient near the neutral point (zero point) of the steering torque in the magnetostrictive characteristic curves 51A and 51B, so that the line 52 has a substantially linear characteristic.
- the vertical axis in FIG. 4 means the axis indicating the value of the differential voltage.
- a straight line 52 which is a characteristic graph is a straight line passing through the origin (0, 0), and exists on the positive and negative sides of the vertical axis and the horizontal axis. Since the detection output value of the steering torque detection unit 20 is obtained as the difference between the induced voltages output from the detection coils 13A and 13B (V A -V B ) as described above, based on the use of the straight line 52, The direction and magnitude of the steering torque applied to the steering shaft 21 can be detected.
- the detected value of the steering torque detector 20 is output as any point on the straight line 52 according to the steering torque.
- the steering torque is determined to rotate right, and when the detected value is positioned on the negative side on the horizontal axis, the steering torque is determined to rotate left.
- the absolute value of the detected value on the vertical axis is the magnitude of the steering torque. In this manner, the steering torque can be detected based on the output voltage values of the detection coils 13A and 13B by using the characteristic of the straight line 52 by the steering torque detection unit 20.
- the detection coils 13A, 13B, induced voltage V A from @ 13 C, V B, the failure determination of a malfunction detection unit 18 V C is input is performed as follows.
- FIG. 5 shows torque / output characteristics of each of the three detection coils 13A, 13B, and 13C.
- Reference numeral 61A indicates the torque / output characteristic of the detection coil 13A
- reference numeral 61B indicates the torque / output characteristic of the detection coil 13B
- reference numeral 61C indicates the torque / output characteristic of the detection coil 13C.
- the steering torque signal VOUT is taken out by the output characteristic 61A of the detection coil 13A and the output characteristic 61B of the detection coil 13B.
- the failure detection signals V OUT 1 and V OUT 2 are extracted by the output characteristic 61A of the detection coil 13A and the output characteristic 61C of the detection coil 13C, and by the output characteristic 61B of the detection coil 13B and the output characteristic 61C of the detection coil 13C. .
- the output signals of the detection coils 13A and 13B corresponding to the magnetostrictive film portions 14A and 14B having magnetic anisotropy change with respect to the steering torque, but oblique magnetic anisotropy.
- the output signal of the detection coil 13C corresponding to the magnetostrictive film portion 14C having no property hardly changes with respect to the steering torque.
- disturbances other than torque for example, changes in temperature, etc.
- similar changes occur in the output signals of the detection coils 13A to 13C. Therefore, when the output signal of the detection coil 13C is used, it is possible to compensate for a drift due to disturbance included in the output signals of the detection coils 13A and 13B.
- the magnetostrictive film 14 in which the magnetostrictive film portions 14A to 14C are formed has the same component of Fe and there is no difference in composition, the error can be reduced even during compensation.
- a method for manufacturing the magnetostrictive torque sensor 10 will be described with reference to FIGS.
- the main part of the manufacturing method of the magnetostrictive torque sensor 10 shown in FIG. 6 is the manufacturing process of the rotating shaft 11 of the magnetostrictive torque sensor 10.
- the manufacturing process of the rotating shaft 11 is roughly divided into a magnetostrictive film forming step P1, a magnetic anisotropy adding step P2, a characteristic stabilizing step P3, and an inspection step P4.
- the characteristic stabilization process P3 further includes an annealing process P31 and a demagnetization process P32.
- the inspection process P4 is a process for inspecting the quality of the manufactured rotating shaft.
- a detector attaching step is provided in which detectors such as the excitation coil 12 and the detection coils 13A to 13C are attached to the rotating shaft 11 after the inspection step P4.
- the magnetostrictive film forming step P1 is executed.
- a magnetostrictive material plating portion is formed as a base portion of the magnetostrictive film 14 at a predetermined position on the surface of the rotating shaft 11 by an electrolytic plating process.
- an acceptance inspection process (not shown) is usually provided before the magnetostrictive film formation process P1.
- step S11 pre-processing of the rotating shaft 11 is performed.
- pretreatment process for example, preliminary cleaning, mask jig attachment, electrolytic degreasing, acid electrolysis, and the like are performed.
- electrolytic plating is performed (step S12).
- a continuous magnetostrictive material is applied to one place of the rotating shaft 11 so as to have a predetermined film thickness.
- the magnetostrictive material plating portion is a portion that becomes a magnetostrictive film 14 having magnetic anisotropy by post-processing described later.
- drying is performed (step S13).
- an electrolytic plating method is used to form the above-described magnetostrictive film 14 on the surface of the rotating shaft 11.
- the basic portion for forming the magnetostrictive film 14 on the rotating shaft 11 can also be formed by a method other than the electrolytic plating method, for example, a PVD method such as a sputtering method or an ion plating method, or a plasma spraying method.
- the magnetostrictive film forming step P1 masking is performed in order to form a plated portion that becomes the magnetostrictive film 14 in a single region continuous with the rotating shaft 11, but compared with the conventional method of forming a plurality of magnetostrictive films, As shown in FIG. 8, by using the two masking members 71 and 72, masking can be easily performed, and the manufacturing cost can be reduced.
- the magnetic anisotropy adding step P2 is executed.
- magnetic anisotropy adding step P2 magnetic anisotropy is added to a part of one magnetostrictive material plating portion formed on the rotating shaft 11, and the magnetostrictive film portions 14A and 14B and the magnetostrictive film portion described above are added. 14C forming step.
- the magnetic anisotropy adding step P2 includes a step S21 for performing high frequency heating on the magnetostrictive material plated portion in the upper region and a step S22 for performing high frequency heating on the magnetostrictive plated portion in the lower region. .
- FIG. 7 shows a flowchart of processing steps performed in steps S21 and S22 of the magnetic anisotropy adding step P2.
- Step S21 of high-frequency heating the magnetostrictive material plating portion in the upper region of the magnetic anisotropy adding step P2 includes a torque application step S201, a heat treatment step S202, a cooling step S203, and a torque release step S204.
- a predetermined torsion torque (Tq) is applied to the rotating shaft 11 by a torque application device (not shown).
- a heat treatment step S202 a high frequency is supplied for a predetermined time to the magnetostrictive material plating portion in the upper region of the rotating shaft 11 in a state where a predetermined torsion torque (Tq) is applied, and heat treatment is performed by electromagnetic induction.
- the heated rotating shaft 11 is naturally cooled.
- the above-described magnetostrictive film portion 14A is formed by adding the magnetic anisotropy to the magnetostrictive material plated portion in the upper region by releasing the torsional torque.
- an induction heating coil is arranged in the magnetostrictive material plating part in the upper region of the rotating shaft 11 in the torque application state, and a predetermined high frequency is supplied to the induction heating coil from a high frequency power source so that the magnetostrictive material plating unit in the upper region. Only high frequency heating.
- the above steps S201 to S204 are similarly executed. That is, magnetic anisotropy is added to the magnetostrictive material plating portion in the lower region, whereby the magnetostrictive film portion 14 B having magnetic anisotropy is formed in the magnetostrictive film 14.
- the magnetostrictive film portion 14B is formed by adding magnetic anisotropy to the magnetostrictive material plated portion in the lower region, the rotation is performed so as to be opposite to the magnetic anisotropy of the magnetostrictive film portion 14A. The direction of application of torque applied to the shaft 11 is reversed.
- FIGS. 9A to 9C show states when the magnetostrictive film portion 14A and the magnetostrictive film portion 14B are formed by the magnetostrictive film 14.
- FIG. 9A shows a state when the magnetostrictive film portion 14A is made
- FIG. 9B shows a state when the magnetostrictive film portion 14B is made.
- a region 73 indicates a heated portion.
- heat treatment is performed to form the magnetostrictive film portion 14A and the magnetostrictive film portion 14B, respectively.
- a magnetostrictive film portion 14C is formed as a torque dead zone having no anisotropy.
- the intermediate portion of the magnetostrictive film 14 (corresponding to the magnetostrictive film portion 14C) is eventually heated by thermal diffusion during the heat treatment of each of the magnetostrictive film portion 14A and the magnetostrictive film portion 14B.
- the applied torque at the intermediate portion is reversed during each heating.
- the magnetostrictive film portion 14C has no oblique magnetic anisotropy and becomes a torque dead zone.
- the process of forming the magnetostrictive film portion 14A and the magnetostrictive film portion 14B is the same as the conventional process.
- the magnetostrictive film 14 including the magnetostrictive film portions 14A and 14B having the opposite magnetic anisotropy and the magnetostrictive film portion 14C is the same as the conventional process. Can be created.
- the magnetostrictive film portions 14A and 14B in the upper and lower regions and the magnetostrictive film portion 14C in the intermediate region are continuously formed. Therefore, the dimension of the magnetostrictive film 14 in the axial direction can be made considerably smaller than when the magnetostrictive film portions 14A to 14C are formed separately.
- FIG. 10A and 10 (B) are views for explaining the advantages of the magnetostrictive film 14 according to the present embodiment manufactured as described above.
- the magnetostrictive film 14 formed on the rotating shaft 11 is continuously formed without being separated at one place of the rotating shaft 11, and there is used for torque detection.
- Magnetostrictive film portions 14A and 14B and a magnetostrictive film portion 14C for failure detection are formed.
- the upper and lower magnetostrictive films 81 and 82 for torque detection are separated from the rotating shaft 11. It was made.
- a separation boundary 83 is formed between the two magnetostrictive films 81 and 82.
- the magnetostrictive film 14 according to the present embodiment is formed in a state where the magnetostrictive films are continuously connected as shown in FIG. 10A. Therefore, when a bias magnetic field is applied from the outside, the bias magnetic field is applied. Becomes easier to pass through the magnetostrictive film 14 as indicated by reference numeral 84. Therefore, a desirable bias magnetic field can be easily obtained and power consumption can be reduced.
- the bias magnetic field 85 is interrupted at the separation boundary 83 when the magnetostrictive film is formed separately. Therefore, in order to obtain a desired bias magnetic field, it is necessary to generate a bias magnetic field with a large power consumption from the outside.
- the power change with respect to the bias magnetic field is larger in one magnetostrictive film, and the same bias magnetic field is generated as measured data.
- the power consumption can be reduced by about 10%.
- the upper and lower magnetostrictive film portions having the opposite magnetic anisotropy are simply made by heat treatment in a conventional torque application state, and the torque dead zone as an intermediate portion is obtained. Since the magnetostrictive film portion can be formed, the process of manufacturing the magnetostrictive film is simple. In addition, the number of detection coils can be reduced compared to the case where two magnetostrictive films are formed, and there is no need to change the composition of Fe compared to the case where three magnetostrictive films are formed, and the manufacturing process is not increased. can do. *
- the electric power steering apparatus uses the magnetostrictive torque sensor according to the present invention for the steering torque detection unit, the number of parts can be reduced, and the dimensions of the steering shaft portion can be shortened. It can be manufactured compactly with a simple structure.
- the magnetostrictive torque sensor according to the present invention is used in a steering torque detection unit of an electric power steering device for an automobile.
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Abstract
Description
11 回転軸
12 励磁コイル
13A,13B,13C 検出コイル
14 磁歪膜
14A,14B,14C 磁歪膜部分
P1 磁歪膜形成工程
P2 磁気異方性付加工程
P3 特性安定化工程
Claims (9)
- ロッド形状の回転軸と、
前記回転軸の表面で円周方向の全周囲に形成された磁歪膜と、
前記磁歪膜の周囲に配置された第1検出コイル、第2検出コイル、第3検出コイルを備え、
前記磁歪膜は、前記回転軸の軸方向に連続した領域として形成され、かつ連続的に形成される前記領域で、互いに逆方向の磁気異方性を有する第1磁歪膜部分および第2磁歪膜部分と、前記第1磁歪膜部分および前記第2磁歪膜部分の間に形成された第3磁歪膜部分とを有し、
前記第1検出コイル、前記第2検出コイル、前記第3検出コイルはそれぞれ前記第1磁歪膜部分、前記第2磁歪膜部分、前記第3磁歪膜部分に対応して設けられている、ことを特徴とする磁歪式トルクセンサ。 - 前記第3磁歪膜部分はトルク不感領域であり、前記第3検出コイルは故障検出用コイルであることを特徴とする請求項1記載の磁歪式トルクセンサ。
- 前記磁歪膜は、前記回転軸の周面上で、前記回転軸の軸方向の一部に軸方向に連続して形成されていることを特徴とする請求項1記載の磁歪式トルクセンサ。
- 前記の第1磁歪膜部分と第2磁歪膜部分と第3磁歪膜部分の各々の軸方向の長さがほぼ同一であることを特徴とする請求項1記載の磁歪式トルクセンサ。
- 前記回転軸は、自動車の電動パワーステアリング装置におけるステアリングシャフトの少なくとも一部であることを特徴とする請求項1記載の磁歪式トルクセンサ。
- ステアリングシャフトと、
このステアリングシャフトに加えられる操舵トルクを検出する操舵トルク検出部と、
この操舵トルク検出部が出力する操舵トルク検出信号に応じてモータを駆動し前記ステアリングシャフトに補助トルクを与えるように制御する制御手段と
を備える電動パワーステアリング装置において、
前記操舵トルク検出部は請求項1~4のいずれか1項に記載された磁歪式トルクセンサを含むことを特徴とする電動パワーステアリング装置。 - ロッド形状の回転軸の表面で円周方向の全周囲に、軸方向の一部に軸方向に連続して磁歪膜を形成する工程と、
前記回転軸に第1の捩りトルクを加えた状態で前記磁歪膜の第1磁歪膜部分に熱処理を行う工程と、
前記第1捩りトルクを解放して前記第1磁歪膜部分に第1の磁気異方性を作る工程と、
前記回転軸に前記第1の捩りトルクと逆方向の第2の捩りトルクを加えた状態で第2磁歪膜部分に熱処理を行う工程と、
前記第2捩りトルクを解放して前記第2磁歪膜部分に第2の磁気異方性を作る工程と、を備え
前記第1磁歪膜部分と前記第2磁歪膜部分の間に、磁気異方性のない第3の磁歪膜部分が形成される、
ことを特徴とする磁歪式トルクセンサの製造方法。 - 前記磁歪膜における前記第1磁歪膜部分と前記第2磁歪膜部分と前記第3磁歪膜部分は連続して形成されることを特徴とする請求項7記載の磁歪式トルクセンサの製造方法。
- 前記第1磁歪膜部分の熱処理および前記第2磁歪膜部分の熱処理で同一の加熱コイルを使用し、前記第1磁歪膜部分と前記第2磁歪膜部分の各々の軸方向の長さはほぼ同一であることを特徴とする請求項7または8記載の磁歪式トルクセンサの製造方法。
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US12/919,995 US8181538B2 (en) | 2008-02-28 | 2009-02-26 | Magnestostrictive torque sensor and manufacturing method thereof, and electric power steering system |
GB1014660.3A GB2470152B (en) | 2008-02-28 | 2009-02-26 | Magnetostrictive torque sensor and manufacturing method thereof, and electric power steering system |
CN200980106782.4A CN101960274B (zh) | 2008-02-28 | 2009-02-26 | 磁致伸缩扭矩传感器及其制造方法以及电动助力转向系统 |
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- 2008-02-28 JP JP2008048579A patent/JP2009204533A/ja active Pending
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2009
- 2009-02-26 WO PCT/JP2009/053606 patent/WO2009107751A1/ja active Application Filing
- 2009-02-26 CN CN200980106782.4A patent/CN101960274B/zh not_active Expired - Fee Related
- 2009-02-26 US US12/919,995 patent/US8181538B2/en not_active Expired - Fee Related
- 2009-02-26 GB GB1014660.3A patent/GB2470152B/en not_active Expired - Fee Related
Patent Citations (6)
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JPH0641889B2 (ja) * | 1985-04-23 | 1994-06-01 | 三菱電機株式会社 | トルク検出装置 |
JP2564049B2 (ja) * | 1991-03-28 | 1996-12-18 | 株式会社クボタ | トルクセンサの温度補償装置 |
JP2000019032A (ja) * | 1998-06-29 | 2000-01-21 | Suzuki Motor Corp | トルクセンサ装置 |
JP2004354327A (ja) * | 2003-05-30 | 2004-12-16 | Suzuki Motor Corp | トルクセンサ |
JP2007101422A (ja) * | 2005-10-05 | 2007-04-19 | Honda Motor Co Ltd | 磁歪式トルクセンサとこれを利用した電動パワーステアリング装置 |
JP2007225347A (ja) * | 2006-02-21 | 2007-09-06 | Honda Motor Co Ltd | 磁歪式力学量センサ及び磁歪式力学量センサの製造方法 |
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CN102205851A (zh) * | 2010-03-31 | 2011-10-05 | 本田技研工业株式会社 | 电动动力转向装置的控制装置 |
Also Published As
Publication number | Publication date |
---|---|
US8181538B2 (en) | 2012-05-22 |
US20110067947A1 (en) | 2011-03-24 |
CN101960274A (zh) | 2011-01-26 |
CN101960274B (zh) | 2012-10-03 |
GB2470152B (en) | 2011-12-28 |
JP2009204533A (ja) | 2009-09-10 |
GB2470152A (en) | 2010-11-10 |
GB201014660D0 (en) | 2010-10-20 |
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