WO2009084335A1 - 多室型熱処理装置及び温度制御方法 - Google Patents
多室型熱処理装置及び温度制御方法 Download PDFInfo
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- WO2009084335A1 WO2009084335A1 PCT/JP2008/070762 JP2008070762W WO2009084335A1 WO 2009084335 A1 WO2009084335 A1 WO 2009084335A1 JP 2008070762 W JP2008070762 W JP 2008070762W WO 2009084335 A1 WO2009084335 A1 WO 2009084335A1
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- Prior art keywords
- chamber
- heat
- heating chamber
- temperature
- heat treatment
- Prior art date
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/18—Arrangement of controlling, monitoring, alarm or like devices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D15/00—Handling or treating discharged material; Supports or receiving chambers therefor
- F27D15/02—Cooling
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D21/00—Arrangements of monitoring devices; Arrangements of safety devices
- F27D21/0014—Devices for monitoring temperature
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
Definitions
- the present invention relates to a multi-chamber heat treatment apparatus that heat-treats a processing object in a heating chamber, then moves to the cooling chamber and cools the processing object in the cooling chamber, and a temperature control method thereof.
- a multi-chamber heat treatment apparatus includes a heating chamber that heat-treats a processing object, and a cooling chamber that cools a processing object that has been heat-treated in the heating chamber. It is the heat processing apparatus which heats by conveying between cooling chambers.
- a data recorder is present in the heating chamber and the cooling chamber together with the object to be processed. Since this data recorder is heat-treated together with the object to be processed, it is housed in a case having excellent heat resistance and heat insulation. Then, the data recorder is taken out from the cooling chamber after completion of the cooling process of the processing object, and the temperature of the processing object during the heat treatment is grasped from the temperature measurement result stored in the data recorder.
- Patent Document 1 has a problem that the arrangement space of the processing object in the heating chamber and the cooling chamber becomes narrow and the temperature of the processing object cannot be measured in real time.
- the inventors of the present invention have created the inventions of Patent Documents 2 and 3 and have already filed applications.
- Patent Document 2 reduces the space occupied by the temperature measuring device disposed in the heat treatment furnace, secures a wide space for the treatment object in the heat treatment furnace, and the temperature of the treatment object disposed in the heat treatment furnace.
- the purpose is to measure in real time. Therefore, as shown in FIG. 1, the present invention includes at least a heating chamber 53 that heat-treats the processing object X and a cooling chamber 52 that cools the processing object X heat-treated in the heating chamber 53.
- a chamber-type heat treatment apparatus which is a sensor unit 51 fixed to a predetermined position of a tray for conveying the processing object X, and a measurement unit (Fig.
- a connection line 54 that electrically connects the sensor unit 51 and the measurement unit when the sensor unit 51 is connected to one end and the measurement unit is connected to the other end, and in the cooling chamber 52 And a reel portion (not shown) capable of winding the connecting wire 54.
- Patent Document 3 aims to ensure accurate cooling control by ensuring a wide space for disposing the processing object in the heating chamber and the cooling chamber and measuring the temperature of the processing object in real time. Therefore, as shown in FIG. 2, the present invention includes a multi-chamber including at least a heating chamber 53 that heat-processes the processing object X and a cooling chamber 52 that cools the processing object X heat-treated in the heating chamber.
- the object of the present invention is to heat-treat the processing object in the heating chamber, then move to the cooling chamber and perform the cooling process in the cooling chamber, and the temperature of the processing object during the heating process and the cooling process. It is an object of the present invention to provide a multi-chamber heat treatment apparatus and a temperature control method in which the processing object loaded in the heating chamber does not move even when the winding tension is strong. Another object of the present invention is to suppress the heat radiation of the heat insulating door of the heating chamber and to seal the vacuum shield door of the cooling chamber during the heating chamber treatment, and thereby the gas atmosphere of the heating chamber and the cooling chamber. It is an object of the present invention to provide a multi-chamber heat treatment apparatus and a temperature control method capable of independently controlling the temperature.
- the transfer stage on which the processing object is placed has a first opening through which the processing object can pass horizontally, and a heating chamber containing a heating container for heat-treating the processing object inside, and opening and closing the first opening.
- a heat insulating door that can be closed, a cooling chamber that is adjacent to the heating chamber and that has a second opening through which the transfer table on which the processing target is placed from the heating chamber can pass horizontally, and cools the processing target inside;
- a multi-chamber heat treatment apparatus comprising: a vacuum shield door that seals the second opening so as to be openable and closable; and a transfer device that horizontally transfers the transfer table on which a processing target is placed between the heating chamber and the cooling chamber. Because there is provided a multi-chamber heat treatment apparatus comprising a temperature sensor attached to a processing object and a signal transmission device that transmits a detection signal of the temperature sensor to the outside of the heating chamber and the cooling chamber.
- a temperature measuring device that is disposed outside the heating chamber and the cooling chamber and measures the temperature of the object to be processed from the detection signal of the temperature sensor transmitted from the signal transmission device.
- the signal transmission device has a flexible tension member having one end fixed to the transfer table, extending through the first opening and the second opening, and the other end horizontally wound in the cooling chamber; A signal line connected to the output line of the temperature sensor at one end and extending to the other end along the tension member; A reel device that winds the tension member together with the signal line while applying tension in the winding direction to the tension member; An external output line is connected to the other end of the signal line via the reel device and transmits the detection signal to the outside of the cooling chamber.
- the tension member is When the first opening is closed by the heat insulating door, the first opening is sandwiched between the heat insulating door and the heating container to seal the portion.
- the first clamping portion is formed of a first heat-resistant sealing material having heat resistance that can withstand the temperature in the heating chamber in which the output wires of the heat-resistant string member and the temperature sensor are bundled in a thin plate shape corresponding to the gap between the heat insulating door and the heating chamber. Become.
- the tension member is When the second opening is closed by the vacuum shield door, the second opening portion is sandwiched between the vacuum shield door and the cooling chamber to seal the portion.
- the tension member has one end fixed to the transfer table, the other end extends to the cooling chamber when the transfer table is located in the heating chamber, and has a heat resistance string member having heat resistance to withstand the temperature in the heating chamber and the cooling chamber;
- the distal end of the heat-resistant string member is fixed to the distal end of the heat-resistant string member.
- the distal end of the heat-resistant string member is wound around the reel device.
- the second holding portion is provided at an intermediate position of the heat-resistant string, and has a heat resistance that can withstand a temperature in a cooling chamber integrally formed by bundling the signal strip and a guide band plate for connecting the heat-resistant string member. It consists of a sealing material and has a cross-sectional shape that can be followed by the sealing material of the vacuum shield door.
- the tension member has one end fixed to the transfer table, and the other end extends to an intermediate position between the first opening and the second opening when the transfer table is located in the heating chamber.
- a heat-resistant string member having heat resistance to withstand the temperature in the heating chamber;
- a tip end is fixed to the end of the heat-resistant string member, and the end is wound around the reel device, and includes a heat-resistant guide strip that can withstand the temperature in the cooling chamber.
- the second sandwiching portion is provided at an intermediate position of the guide strip, and is made of a second heat-resistant sealing material having heat resistance that can withstand the temperature in the cooling chamber integrally formed by bundling the guide strip and the signal line, And it has the cross-sectional shape which the sealing material of a vacuum shield door can follow.
- the heating chamber having the first opening through which the transfer table on which the processing object is placed can pass horizontally has a built-in heating container that heat-treats the processing object, and the first opening.
- a heat-insulating door that can be opened and closed, and a cooling chamber that is adjacent to the heating chamber and has a second opening through which the transfer table on which the processing object is placed can be horizontally passed and cools the processing object inside A multi-chamber type comprising: a vacuum shield door that seals the second opening so as to be openable and closable; and a transfer device that horizontally transfers the transfer table on which the processing object is placed between the heating chamber and the cooling chamber.
- a temperature control method for a heat treatment apparatus Transmit the detection signal of the temperature sensor attached to the object to be processed to the outside of the heating chamber and cooling chamber, Outside the heating chamber and the cooling chamber, measure the temperature of the processing object from the detection signal of the temperature sensor transmitted from the signal transmission device, There is provided a temperature control method for a multi-chamber heat treatment apparatus, characterized in that the multi-chamber heat treatment apparatus is controlled based on the measured temperature of the processing object.
- a heating chamber that heat-treats a processing object, a heat insulating door, a cooling chamber that cools the processing object, a vacuum shield door, and a processing object between the heating chamber and the cooling chamber. Since the transfer device for horizontally transferring the transfer table is mounted, the object to be processed can be heat-treated in the heating chamber, then moved to the cooling chamber, and cooled in the cooling chamber.
- the detection signal of the temperature sensor attached to the object to be processed is provided.
- the temperature of the object to be processed is measured from the detection signal of the temperature sensor transmitted from the signal transmission device outside the heating chamber and the cooling chamber, and transmitted to the outside of the heating chamber and the cooling chamber.
- the temperature of the object to be processed can be measured in real time.
- the tension member includes a heat-resistant string member having one end fixed to the transfer table, and a flexible hose or guide strip that has a distal end fixed to the end of the heat-resistant string member and the end is wound around the reel device. , Furthermore, since it has a first clamping portion provided at an intermediate position of the heat-resistant string member, When the first opening is closed by the heat insulating door, the first holding portion is held between the heat insulating door and the heating container, so that the portion is insulated and sealed, and no tension acts on the object to be processed. Even when the tension is strong, there is no possibility that the processing object loaded in the heating chamber moves.
- the second holding portion is provided at an intermediate position between the heat-resistant string member or the guide strip, the second holding portion is provided between the vacuum shield door and the cooling chamber when the second opening is closed by the vacuum shield door.
- the temperature of the processing object is measured from the detection signal of the temperature sensor transmitted from the signal transmission device, and the multi-chamber heat treatment apparatus is controlled based on the measured temperature of the processing object. can do.
- FIG. 2 is a schematic diagram of a multi-chamber heat treatment apparatus of Patent Document 2. It is a schematic diagram of the multi-chamber heat treatment apparatus of Patent Document 3. It is a cross-sectional view which shows one Embodiment of the multi-chamber type heat processing apparatus by this invention.
- 1 is an overall configuration diagram of a first embodiment of a signal transmission device. It is a whole block diagram of 2nd Embodiment of a signal transmission apparatus. It is a figure which shows the positional relationship of the transfer stand which mounted the process target object, and a 1st clamping part. It is a figure which shows the positional relationship of the heating container which closed the heat insulation door, and the 1st clamping part.
- FIG. 3 is a cross-sectional view showing an embodiment of a multi-chamber heat treatment apparatus according to the present invention.
- the multi-chamber heat treatment apparatus 1 of the present invention is a multi-chamber heat treatment apparatus including a cooling chamber 2 for cooling the processing object X and a heating chamber 3 for heating the processing object X.
- an intermediate chamber 4 is provided between the cooling chamber 2 and the heating chamber 3.
- the cooling chamber 2 is a substantially hollow cylindrical airtight container, and the posture is set so that the central axis of the cylindrical shape is horizontal.
- a clutch-type door 5 that horizontally moves in the axial direction of the cooling chamber 2 is installed on one side (right side in the figure) of the cooling chamber 2.
- the door 5 is used for accommodating the processing object X in the cooling chamber 2.
- a clamp-type vacuum shield door 6 that opens and closes vertically is installed in the opening 7a (second opening) of the partition wall 2a on the other side (left side in the figure).
- the inner space of the multi-chamber heat treatment apparatus 1 is in a sealed state that is shut off from the outside with the door 5 closed.
- a substantially rectangular parallelepiped air passage chamber 7 that is long in the central axis direction of the cooling chamber 2 is installed inside the cooling chamber 2, and the flow path of the cooling gas in the cooling chamber 2 is above and below the air passage chamber 7.
- Gas flow guide plates (not shown) for adjusting the direction are respectively installed. Further, the inside of the cooling chamber 2 outside the air passage chamber 7 is divided into upper and lower portions by a partition plate (not shown).
- lattice-like rectifying plates 9a and 9b that rectify and pass the cooling gas are respectively formed.
- a plurality of free rollers 12 for transferring the tray 10 on which the processing object X is placed in the axial direction of the cooling chamber 2 are rotatably provided in the air passage chamber 7 in the transfer direction of the tray 10. Yes.
- the tray 10 is formed, for example, in a lattice shape so that the cooling gas can pass therethrough.
- a heat exchanger In this example, a heat exchanger, a cooling fan, and a damper (not shown) are provided on the side surface of the cooling chamber 2 (the back surface of the air passage chamber 7 in the figure).
- the heat exchanger cools the cooling gas by exchanging heat between the water and the cooling gas.
- the cooling fan is driven by a cooling fan motor (not shown) and adjusts the amount of cooling gas passing through the heat exchanger.
- the damper adjusts the blowing direction (cooling air direction) of the cooling gas to the processing object X.
- the temperature and flow rate of the cooling gas flowing in the vertical direction through the rectifying plates 9a, 9b of the cooling chamber 2 can be controlled to adjust the cooling rate of the processing object X. Yes.
- the heating chamber 3 is formed in a substantially cylindrical shape with a water-cooled double wall, and water is interposed between the inner wall and the outer wall, and is disposed to face the cooling chamber 2.
- the tray 10 on which the processing target X is placed is transported horizontally in the multi-chamber heat treatment apparatus 1.
- a transport rod 22 for transporting X is installed.
- the end (left end in the figure) of the conveying rod 22 is connected to the chain, and the chain is moved by the rotation of the sprocket, the conveying rod 22 is moved horizontally, and the tray 10 engaged therewith is conveyed horizontally. It is supposed to be.
- a heating container 23 having a substantially rectangular shape is installed in the heating chamber 3.
- a heat insulating door 24 heating chamber door
- a conveyance rod door 25 serving as an entrance 22 is installed.
- the transport rod door 25 is opened and closed in the vertical direction by an elevating mechanism 26 installed so as to protrude from the outer wall of the heating chamber 3.
- a plurality of free rollers 27 for transferring the tray 10 on which the processing object X is placed in the axial direction of the heating chamber 3 are installed inside the heating container 23 . It is arranged on the extension line (pass line) of the free roller 12 installed in.
- the transport bar door 25, the transfer table 28, and the tray 10 are heat-insulated similarly to the heat-insulating door 24.
- a plurality of heaters (not shown) for heating the processing object X are installed in the heating container 23 above and below the processing object X so as to uniformly heat the entire processing object X. ing.
- the intermediate chamber 4 is set in a hollow, substantially rectangular shape, and is disposed between the cooling chamber 2 and the heating chamber 3.
- an elevating device 28 for elevating the vacuum shield door 6 and an elevating device 29 for elevating the heat insulating door 24 are installed.
- a decompression device (not shown) is installed outside the cooling chamber 2, the heating chamber 3, and the intermediate chamber 4. This decompression device is for evacuating the inside of the cooling chamber 2 and the heating chamber 3, and is connected to the cooling chamber 2 and the heating chamber 3, respectively.
- a cooling gas supply device (not shown) is also installed outside the cooling chamber 2, the heating chamber 3, and the intermediate chamber 4.
- the cooling gas supply device supplies the cooling gas into the cooling chamber 2 at a predetermined pressure based on a cooling gas control signal input from the cooling control unit.
- cooling gas may be supplied to the heating chamber 3 and the intermediate chamber 4 that are outside the cooling chamber 2 during maintenance work of the multi-chamber heat treatment apparatus 1, the cooling gas supply device is also connected to the intermediate chamber. ing.
- the heating chamber 3 has a function of heat-treating the processing object X inside, and the transfer table 10 on which the processing object X is placed on the cooling chamber 2 side of the heating container 23 can pass horizontally. It has the 1st opening 23a.
- the first opening 23 a is configured to be opened and closed by raising and lowering the heat insulating door 24.
- the cooling chamber 2 has a function of cooling the processing object X inside, is adjacent to the heating chamber 3, and is a second opening through which the transfer table 10 on which the processing object X is placed can be horizontally passed from the heating chamber. 7a.
- the second opening 7 a is configured to be opened and closed by raising and lowering the vacuum shield door 6.
- a transfer device 20 for horizontally transferring the transfer table 10 on which the processing object X is placed between the heating chamber 3 and the cooling chamber 2 is constituted by the transfer rod 22, the chain, and the sprocket.
- the transfer device 20 is not limited to this configuration.
- the transfer rod 22 may be formed of a straight bar having a required length and moved horizontally by a rack and pinion or the like. Alternatively, it may be moved from the heating chamber to the cooling chamber with a roller hearth or the like.
- the multi-chamber heat treatment apparatus 1 of the present invention further includes a temperature sensor 31, a signal transmission device 30, and a temperature measurement device 40 attached to the processing object X.
- the signal transmission device 30 has a function of transmitting the detection signal of the temperature sensor 31 to the outside of the heating chamber 3 and the cooling chamber 2.
- the temperature measuring device 40 is disposed outside the heating chamber 3 and the cooling chamber 2 and measures the temperature of the processing object from the detection signal of the temperature sensor 31 transmitted from the signal transmission device 30.
- FIG. 4 is an overall configuration diagram of the first embodiment of the signal transmission device 30.
- the signal transmission device 30 includes a tension member 32, a signal line 34, a reel device 36, and an external output line 38.
- the tension member 32 is a flexible member having a string shape, a hose shape, or a strip shape, and one end (the left end in the figure) is fixed to the transfer table 10 and the other end is horizontally wound by the reel device 36 in the cooling chamber. It is supposed to be.
- reference numeral 37 denotes a pulley, which has a function of guiding the tension member 32 to the reel device 36.
- the tension member 32 is wound from the reel device 36 through the opening of the heating chamber 3 (first opening 23a) and the opening of the cooling chamber (second opening 7a) when the transfer table 10 is located in the heating chamber 3. It is returned and extends almost horizontally.
- the signal line 34 is a flexible electric signal line, and has a connector 33 connected to the output line of the temperature sensor 31 at one end.
- the signal line 34 extends to the other end along the tension member 32 and is connected to an output contact (not shown) provided on the reel device 36.
- the reel device 36 winds the tension member 32 together with the signal line 34 while applying tension in the winding direction to the tension member 32.
- the external output line 38 is connected to the other end of the signal line 34 via the reel device 36 and transmits the detection signal of the temperature sensor 31 to the outside of the cooling chamber 2.
- the signal line 34 is connected to the output contact of the reel device 36 through a flexible hose 35a having heat resistance that can withstand the temperature in the cooling chamber.
- the hose 35 a functions as a part of the tension member 32 without applying a tension to the signal line 34.
- the tension member 32 includes a heat-resistant string member 32a and a flexible hose 35a.
- the heat-resistant string member 32a is made of a heat-resistant material that can withstand the temperature in the heating chamber (for example, 1200 to 1400 ° C.), such as a graphite string.
- One end of the heat-resistant string member 32 a is fixed to the transfer table 10.
- the length of the heat-resistant string member 32 a is set to such a length that the other end is located in the cooling chamber 2 when the transfer table 10 is located in the heating chamber 3.
- the flexible hose 35a is a hollow elastic hose having heat resistance that can withstand at least the temperature in the cooling chamber 2 (for example, 200 to 300 ° C.).
- the distal end of the flexible hose 35a is fixed to the distal end (right end in the figure) of the heat-resistant string member 32a, and the distal end is wound around the reel device 36.
- the tension member 32 is provided with a first clamping part 42 and a second clamping part 44 (elastic part).
- FIG. 5 is an overall configuration diagram of the second embodiment of the signal transmission device 30.
- the hose 35a is held by the tension member 32 by the fastening line 35b, and moves together with the tension member 32 without applying tension to the signal line 34.
- the tension member 32 includes a heat-resistant string member 32a and a guide strip plate 32b.
- the heat-resistant string member 32a is made of a heat-resistant material that can withstand the temperature in the heating chamber (for example, 1200 to 1400 ° C.), such as a graphite string.
- One end of the heat-resistant string member 32 a is fixed to the transfer table 10.
- the length of the heat-resistant string member 32a is set to a length at which the other end is located at an intermediate position between the first opening 23a and the second opening 7a when the transfer table 10 is located in the heating chamber 3.
- the guide strip 32b is made of an elastic strip (for example, a stainless strip) having heat resistance that can withstand at least the temperature in the cooling chamber 2 (for example, 200 to 300 ° C.).
- the front end of the guide band plate 32b is fixed to the end (right end in the figure) of the heat-resistant string member 32a, and the end is wound around the reel device 36 on the rear end side.
- Other configurations are the same as those in FIG.
- FIG. 6 is a diagram showing a positional relationship between the transfer table 10 on which the processing object X is placed and the first holding unit 42
- FIG. 7 shows the relationship between the heating container 23 with the heat insulating door 24 closed and the first holding unit 42. It is a figure which shows a positional relationship.
- the first holding part 42 is provided at an intermediate position of the heat-resistant string member 32a, and when the first opening 23a of the heating chamber 3 is closed by the heat-insulating door 24, It has a function of being sandwiched between the heating chambers (heating container 23) and sealing the portion to some extent.
- the first clamping part 42 is made of a first heat-resistant sealing material (for example, graphite string) having heat resistance that can withstand the temperature in the heating chamber 3, and the output lines of the heat-resistant string member 32 a and the temperature sensor 31 are connected to the heat insulating door 24 and the heating chamber. It is bundled in a thin plate shape corresponding to the gap of (heating container 23).
- a first heat-resistant sealing material for example, graphite string
- one end of the tension member 32 (heat-resistant string member 32 a) is connected to the transfer table in the state where the transfer table 10 on which the processing object X is placed is accommodated in the heating chamber (heating container 23). 10 and the other end of the tension member 32 is wound up horizontally in the cooling chamber, so that the tension member 32 extends substantially horizontally through the first opening 23a and the second opening 7a.
- the connector 33 is on the winding side with respect to the first clamping portion 42, and the output line of the temperature sensor 31 is set sufficiently longer than the required length to the connector 33, so the output line of the temperature sensor 31 No tension is applied to the.
- the first clamping portion 42 is connected to the heat insulating door 24 and the heating chamber (see FIG. 7). It is sandwiched between the heating containers 23) to seal the portion, and the high temperature in the heating container 23 can be blocked by the heat insulating door 24.
- FIGS. 8A to 8C show the positional relationship between the cooling chamber 2 with the vacuum shield door 6 closed and the second clamping unit 44 when the transfer table 10 on which the processing object X is placed is located in the heating chamber 3.
- FIG. 8B when the opening (second opening 7a) of the partition wall 2a is closed by the vacuum shield door 6, the second sandwiching portion 44 is connected to the vacuum shield door 6 and the cooling chamber 2 (partition wall). 2a), and has a function of sealing the portion.
- the vacuum shield door 6 has a sealing material 6a that hermetically seals between the vacuum shield door 6 and the cooling chamber 2 (partition wall 2a).
- the sealing material 6a is a tube seal in this example.
- the tube seal 6a is expanded from the state shown in FIG. 7A to the state shown in FIG. 7B by the gas pressure, and can be sealed to some extent without any gap therebetween.
- the sealing material 6a may be another sealing material, for example, an O-ring.
- the second clamping part 44 (elastic part) is made of a second heat-resistant sealing material (for example, silicon, Teflon (registered trademark)) having heat resistance that can withstand the temperature in the cooling chamber 2.
- the second sandwiching portion 44 is integrally formed by bundling the guide band plate 32b and the signal line 34, and has a cross-sectional shape that the tube seal 6a of the vacuum shield door 6 can follow.
- the cross-sectional shape of the second sandwiching portion 44 is such that the surface in close contact with the partition wall 2a is a flat surface, and the surface in close contact with the tube seal 6a is an arc surface.
- the shape may also be
- the guide band plate 32 b exists only inside the second holding portion 44, and connects the heat-resistant string member 32 a before and after that.
- the guide band plate 32 b is continuous through the second clamping portion 44.
- the first sandwiching portion 42 is sandwiched between the heat insulation door 24 and the heating chamber (heating container 23), and the portion is thermally insulated to some extent. It is in a state where it is blocked by the heat insulating door 24. Further, as shown in FIG. 8A, the vacuum shield door 6 is closed and the tube seal 6a is expanded by the gas pressure from the state of FIG. 8A to the state of FIG. Can be sealed.
- the guide band plate 32b and the signal line 34 sealed in the elastic part 44 are integrally formed in the second holding part 44, and in other parts, the signal line 34 is loosened and the heat-resistant string member 32a or the guide line is formed. Since it is fixed along the band plate 32b, no tension acts on the signal line.
- 9A to 9D are schematic views showing a method of using the multi-chamber heat treatment apparatus 1 of the present invention described above.
- 9A shows a state in which the transfer table 10 on which the processing object X is placed in the heating container
- FIG. 9B shows a heat treatment state in which the heat insulation door 24 is closed
- FIG. 9C shows a heat treatment state in which the vacuum shield door 6 is further closed
- FIG. 9D shows the cooling processing state in the cooling chamber 2.
- one end of the tension member 32 is fixed to the transfer table 10 on which the processing object X is placed in the heating chamber (heating container 23), and the other end of the tension member 32 is wound up horizontally in the cooling chamber.
- the tension member 32 extends substantially horizontally through the first opening 23a and the second opening 7a.
- the connector 33 described above is on the winding side with respect to the first clamping portion 42, and the output line of the temperature sensor 31 is set sufficiently longer than the required length to the connector 33, so the output of the temperature sensor 31 is No tension acts on the wire.
- FIG. 9C the vacuum shield door 6 is closed, and the tube seal 6a is expanded by gas pressure, whereby the gap between the vacuum shield door 6 and the partition wall 2a is reduced as much as possible by the second clamping portion 44.
- the opening 7a can be sealed.
- the tension member 32 extends substantially horizontally through the first opening 23a and the second opening 7a as shown in FIG. 9A. Become. In this state, when the transfer table 10 on which the processing object X is placed is moved horizontally from the heating chamber 3 to the cooling chamber 2 by the transfer device 20 described above, the tension member 32 is taken up by the reel device 36 without causing slack. .
- the temperature control method of the multi-chamber heat treatment apparatus of the present invention transmits the detection signal of the temperature sensor 31 attached to the processing object X to the outside of the heating chamber 3 and the cooling chamber 2, and the heating chamber 3 and the outside of the cooling chamber 2, the temperature of the processing object X is measured from the detection signal of the temperature sensor 31 transmitted from the signal transmission device 30, and the multi-chamber heat treatment apparatus 1 is based on the measured temperature of the processing object. To control.
- the temperature measuring device 40 described above also has a function as a data recorder that measures the temperature of the processing object X based on the temperature detection signal acquired by the temperature sensor 31 and stores the temperature detection result.
- thermocouple is used as the temperature sensor 31, and the signal line 34 is composed of a pair (two types) of conductive wires.
- the signal line 34 for example, chromel-alumel, chromel-constant, iron-constant, copper-constant, nicrosyl-nisyl, platinum / rhodium (10%)-platinum, platinum / rhodium (13%)-platinum , Platinum / rhodium (30%)-platinum / rhodium (6%), chromel / gold / iron, iridium / iridium / rhodium (49%), tungsten / rhenium (5%) / tungsten / rhenium (26%), nickel -Nickel / molybdenum (18%), palladium / platinum / gold-gold / palladium is used.
- the hose 35a is formed of, for example, a flexible material such as resin.
- the signal line 34 can be prevented from being damaged by inserting the signal line 34 into the hose 35a.
- the heating chamber 3 for heat-treating the processing object X, the heat insulating door 24, the cooling chamber 2 for cooling the processing object X, the vacuum shield door 6, and the heating chamber 3 and the cooling chamber. 2 is provided with a transfer device 20 for horizontally transferring the transfer table 10 on which the processing object X is placed, so that the processing object X is heated in the heating chamber 3 and then moved into the cooling chamber 2.
- the cooling process can be performed in the cooling chamber 2.
- the temperature sensor 31 attached to the processing object X and the signal transmission device 30 that transmits the detection signal of the temperature sensor 31 to the outside of the heating chamber 3 and the cooling chamber 2 are provided, it is attached to the processing object X.
- the detection signal of the temperature sensor 31 is transmitted to the outside of the heating chamber 3 and the cooling chamber 2, and the object to be processed is detected from the detection signal of the temperature sensor 31 transmitted from the signal transmission device 30 outside the heating chamber 3 and the cooling chamber 2.
- the temperature of X can be measured, and the temperature of the processing object X during the heat treatment and the cooling treatment can be measured in real time.
- the tension member 32 includes a heat-resistant string member 32a having one end fixed to the transfer table 10, and a flexible hose 35a or a guide band whose end is fixed to the end of the heat-resistant string member 32a and the end is wound around the reel device 36. Since it has the board
- the 2nd clamping part 44 provided in the intermediate position of the heat-resistant string member 32a or the guide strip board 32b, when the 2nd opening is closed with the vacuum shield door 6, the vacuum shield door 6 and the cooling chamber 2a The second clamping part 44 is sandwiched between them and the part is sealed to suppress the heat radiation of the heat insulation door 24 of the heating chamber 3 during the heating chamber treatment, and the vacuum shield door 6 of the cooling chamber 2 is sealed.
- the gas atmosphere in the heating chamber 3 and the cooling chamber 2 can be controlled independently.
- the temperature of the processing object X is measured from the detection signal of the temperature sensor 31 transmitted from the signal transmission device 30, and the temperature of the processing object X is measured based on the measured temperature.
- the chamber heat treatment apparatus 1 can be controlled.
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Abstract
Description
本発明は、処理対象物を加熱室内で加熱処理し、次いで冷却室内に移動して、冷却室内で冷却処理する多室型熱処理装置とその温度制御方法に関する。
多室型熱処理装置とは、処理対象物を加熱処理する加熱室と、加熱室において加熱処理された処理対処物を冷却処理する冷却室とを備え、処理対象物を加熱室と冷却室との間で搬送して熱処理する熱処理装置である。
そこで、この問題点を解決するために、本発明の発明者は、特許文献2,3の発明を創案し既に出願している。
そのため、この発明は、図1に示すように、処理対象物Xを加熱処理する加熱室53と、加熱室53において加熱処理された処理対処物Xを冷却処理する冷却室52とを少なくとも備える多室型熱処理装置であって、処理対象物Xを搬送するためのトレーの所定箇所に固定されるセンサ部51と、センサ部51と電気的に接続されると共に外部に配置される測定部(図示せず)と、センサ部51が一端部に接続されると共に測定部が他端部に接続されることによってセンサ部51と測定部とを電気的に接続する接続線54と、冷却室52内に配置されると共に上記接続線54を巻き取り可能なリール部(図示せず)とを備えるものである。
そのため、この発明は、図2に示すように、処理対象物Xを加熱処理する加熱室53と、加熱室において加熱処理された処理対処物Xを冷却処理する冷却室52とを少なくとも備える多室型熱処理装置であって、冷却室52内における処理対象物の温度を検出し、当該温度を示す温度検出信号を出力する温度センサ51と、加熱室及び冷却室の外部に配置されると共に、温度センサ51から入力される温度検出信号が示す冷却室内における処理対象物の温度に基づいて冷却処理を制御する冷却制御部56と、前記温度センサと前記冷却制御部とを接続する接続線54とを備えるものである。
また、上述した特許文献2,3の多室型熱処理装置の場合、加熱室で処理対象物を加熱処理する間、冷却室の真空シールド扉を密閉できない問題点があった。
そのため、処理対象物の加熱処理中に、冷却室内のガス雰囲気は、加熱室と同一となってしまい、加熱処理後に処理対象物を冷却室内に収容してから、冷却室を再度減圧し、ガス雰囲気を再調整しなければならない問題点があった。
また、本発明の別の目的は、加熱室処理中に加熱室の断熱扉の放熱を抑え、かつ冷却室の真空シールド扉のシールを行うことができ、これにより加熱室と冷却室のガス雰囲気を独立に制御することができる多室型熱処理装置及び温度制御方法を提供することにある。
処理対象物に取付けられた温度センサと、該温度センサの検出信号を前記加熱室及び冷却室の外部まで伝送する信号伝送装置と、を備えたことを特徴とする多室型熱処理装置が提供される。
前記温度センサの出力線と接続するコネクタを一端に有し、前記テンション部材に沿って他端まで延びる信号線と、
前記テンション部材に巻き取り方向のテンションを付加しながらテンション部材を信号線と共に巻き取るリール装置と、
前記リール装置を介して前記信号線の他端と接続し、前記冷却室の外部まで前記検出信号を伝送する外部出力線とを有する。
前記第1開口を断熱扉で閉鎖したときに、断熱扉と加熱容器の間に挟持されてその部分をシールする第1挟持部を有する。
前記第2開口を真空シールド扉で閉鎖したときに、真空シールド扉と冷却室との間に挟持されてその部分をシールする第2挟持部を有する。
該耐熱紐部材の末端に先端が固定され、前記リール装置に末端が巻き取られ、少なくとも冷却室内の温度に耐える耐熱性を有する可撓性ホースとからなる。
該耐熱紐部材の末端に先端が固定され、前記リール装置に末端が巻き取られ、少なくとも冷却室内の温度に耐える耐熱性を有するガイド帯板とからなる。
処理対象物に取付けられた温度センサの検出信号を加熱室及び冷却室の外部まで伝送し、
前記加熱室及び冷却室の外部において、信号伝送装置から伝送される温度センサの検出信号から処理対象物の温度を測定し、
計測した処理対象物の温度に基づいて多室型熱処理装置を制御する、ことを特徴とする多室型熱処理装置の温度制御方法が提供される。
さらに、前記耐熱紐部材の中間位置に設けられた第1挟持部を有するので、
第1開口を断熱扉で閉鎖したときに、断熱扉と加熱容器の間に第1挟持部が挟持されるので、その部分を断熱シールするとともに、処理対象物にテンションが作用しないので、巻き取りテンションが強い場合でも、加熱室に装填した処理対象物が移動するおそれがない。
また、前記耐熱紐部材又はガイド帯板の中間位置に設けられた第2挟持部を有するので、第2開口を真空シールド扉で閉鎖したときに、真空シールド扉と冷却室の間に第2挟持部が挟持されてその部分をシールすることにより、
加熱室処理中に加熱室の断熱扉の放熱を抑え、かつ冷却室の真空シールド扉のシールを行うことができ、これにより加熱室と冷却室のガス雰囲気を独立に制御することができる。
この図に示すように、本発明の多室型熱処理装置1は、処理対象物Xを冷却する冷却室2、処理対象物Xを加熱する加熱室3を備える多室型熱処理装置であり、これらに加えて、冷却室2と加熱室3との間に中間室4を有している。
この図に示すように、信号伝送装置30は、テンション部材32、信号線34、リール装置36および外部出力線38を備える。
外部出力線38は、リール装置36を介して信号線34の他端と接続し、冷却室2の外部まで温度センサ31の検出信号を伝送する。
耐熱紐部材32aは、加熱室内の温度(例えば1200~1400℃)に耐える耐熱性を有する材料、例えばグラファイト紐からなる。この耐熱紐部材32aの一端は、移送台10に固定されている。耐熱紐部材32aの長さは、移送台10が加熱室3内に位置するときに、他端が冷却室2内に位置する長さに設定されている。
この例において、ホース35aは、締結線35bによりテンション部材32に把持され、信号線34にテンションを作用させることなくテンション部材32と共に移動するようになっている。
耐熱紐部材32aは、加熱室内の温度(例えば1200~1400℃)に耐える耐熱性を有する材料、例えばグラファイト紐からなる。この耐熱紐部材32aの一端は、移送台10に固定されている。耐熱紐部材32aの長さは、移送台10が加熱室3内に位置するときに、他端が第1開口23aと第2開口7aの中間位置に位置する長さに設定されている。
その他の構成は図2と同様である。
図8A及び図8Bに示すように、第2挟持部44は、仕切壁2aの開口(第2開口7a)を真空シールド扉6で閉鎖したときに、真空シールド扉6と冷却室2(仕切壁2a)の間に挟持されてその部分をシールする機能を有する。
なお、図4の例では、ガイド帯板32bは、第2挟持部44の内部のみに存在し、その前後で耐熱紐部材32aを連結している。
また、図5の例では、ガイド帯板32bは第2挟持部44を通して連続している。
図9Aは加熱容器内に処理対象物Xを載せた移送台10を収容した状態、図9Bは断熱扉24を閉じた加熱処理状態、図9Cはさらに真空シールド扉6を閉じた加熱処理状態、図9Dは冷却室2内での冷却処理状態を示している。
この状態において、上述した移送装置20により処理対象物Xを載せた移送台10を加熱室3から冷却室2に水平に移動すると、テンション部材32は弛みを生じることなくリール装置36により巻き取られる。
Claims (11)
- 処理対象物を載せた移送台を水平に通過可能な第1開口を有し内部で処理対象物を加熱処理する加熱容器を内蔵する加熱室と、前記第1開口を開閉可能に閉鎖する断熱扉と、前記加熱室に隣接し加熱室から処理対象物を載せた前記移送台が水平に通過可能な第2開口を有し内部で処理対象物を冷却する冷却室と、前記第2開口を開閉可能に密閉する真空シールド扉と、前記加熱室と冷却室との間で処理対象物を載せた前記移送台を水平に移送する移送装置とを備えた多室型熱処理装置であって、
処理対象物に取付けられた温度センサと、該温度センサの検出信号を前記加熱室及び冷却室の外部まで伝送する信号伝送装置と、を備えたことを特徴とする多室型熱処理装置。 - 前記加熱室及び冷却室の外部に配置され、信号伝送装置から伝送される温度センサの検出信号から処理対象物の温度を測定する温度測定装置を備える、ことを特徴とする請求項1に記載の多室型熱処理装置。
- 前記信号伝送装置は、一端が前記移送台に固定され、前記第1開口および第2開口を通して延び、他端が冷却室内で水平に巻き取られる可撓性のテンション部材と、
前記温度センサの出力線と接続するコネクタを一端に有し、前記テンション部材に沿って他端まで延びる信号線と、
前記テンション部材に巻き取り方向のテンションを付加しながらテンション部材を信号線と共に巻き取るリール装置と、
前記リール装置を介して前記信号線の他端と接続し、前記冷却室の外部まで前記検出信号を伝送する外部出力線とを有する、ことを特徴とする請求項1又は2に記載の多室型熱処理装置。 - 前記テンション部材は、
前記第1開口を断熱扉で閉鎖したときに、断熱扉と加熱容器の間に挟持されてその部分をシールする第1挟持部を有する、ことを特徴とする請求項3に記載の多室型熱処理装置。 - 前記第1挟持部は、前記耐熱紐部材と前記温度センサの出力線を断熱扉と加熱室の隙間に相当する薄板状に束ねた加熱室内の温度に耐える耐熱性を有する第1耐熱シール材からなることを特徴とする請求項4に記載の多室型熱処理装置。
- 前記テンション部材は、
前記第2開口を真空シールド扉で閉鎖したときに、真空シールド扉と冷却室との間に挟持されてその部分をシールする第2挟持部を有する、ことを特徴とする請求項3又は4に記載の多室型熱処理装置。 - 前記テンション部材は、一端が前記移送台に固定され、移送台が加熱室内に位置するときに他端が冷却室内まで延び、加熱室内及び冷却室内の温度に耐える耐熱性を有する耐熱紐部材と、
該耐熱紐部材の末端に先端が固定され、前記リール装置に末端が巻き取られ、少なくとも冷却室内の温度に耐える耐熱性を有する可撓性ホースとからなることを特徴とする請求項4又は6に記載の多室型熱処理装置 - 前記第2挟持部は、前記耐熱紐の中間位置に設けられ、前記耐熱紐部材を連結するガイド帯板と前記信号線を束ねて一体成形した冷却室内の温度に耐える耐熱性を有する第2耐熱シール材からなり、かつ真空シールド扉のシール材が追従可能な断面形状を有する、ことを特徴とする請求項6に記載の多室型熱処理装置。
- 前記テンション部材は、一端が前記移送台に固定され、移送台が加熱室内に位置するときに他端が第1開口と第2開口の中間位置まで延び、加熱室内の温度に耐える耐熱性を有する耐熱紐部材と、
該耐熱紐部材の末端に先端が固定され、前記リール装置に末端が巻き取られ、少なくとも冷却室内の温度に耐える耐熱性を有するガイド帯板とからなることを特徴とする請求項4又は6に記載の多室型熱処理装置。 - 前記第2挟持部は、前記ガイド帯板の中間位置に設けられ、前記ガイド帯板と前記信号線を束ねて一体成形した冷却室内の温度に耐える耐熱性を有する第2耐熱シール材からなり、かつ真空シールド扉のシール材が追従可能な断面形状を有する、ことを特徴とする請求項6に記載の多室型熱処理装置。
- 処理対象物を載せた移送台が水平に通過可能な第1開口を有し内部で処理対象物を加熱処理する加熱容器を内蔵する加熱室と、前記第1開口を開閉可能に閉鎖する断熱扉と、前記加熱室に隣接し加熱室から処理対象物を載せた前記移送台が水平に通過可能な第2開口を有し内部で処理対象物を冷却する冷却室と、前記第2開口を開閉可能に密閉する真空シールド扉と、前記加熱室と冷却室との間で処理対象物を載せた前記移送台を水平に移送する移送装置とを備えた多室型熱処理装置の温度制御方法であって、
処理対象物に取付けられた温度センサの検出信号を加熱室及び冷却室の外部まで伝送し、
前記加熱室及び冷却室の外部において、信号伝送装置から伝送される温度センサの検出信号から処理対象物の温度を測定し、
計測した処理対象物の温度に基づいて多室型熱処理装置を制御する、ことを特徴とする多室型熱処理装置の温度制御方法。
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JP2005241132A (ja) | 2004-02-26 | 2005-09-08 | Ishikawajima Harima Heavy Ind Co Ltd | 多室型熱処理装置及び温度測定方法 |
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US6497502B1 (en) * | 2001-06-15 | 2002-12-24 | Joe F. Clift | Electrical candlestick device |
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- 2008-11-14 WO PCT/JP2008/070762 patent/WO2009084335A1/ja active Application Filing
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JPH09280968A (ja) | 1996-04-17 | 1997-10-31 | Nittetsu Hokkaido Seigyo Syst Kk | 高温移動物体の温度測定装置 |
JP2004045283A (ja) * | 2002-07-12 | 2004-02-12 | Univ Saitama | 温度測定装置 |
JP2004263277A (ja) * | 2003-03-04 | 2004-09-24 | Ishikawajima Harima Heavy Ind Co Ltd | 熱処理装置および熱処理方法 |
JP2005241132A (ja) | 2004-02-26 | 2005-09-08 | Ishikawajima Harima Heavy Ind Co Ltd | 多室型熱処理装置及び温度測定方法 |
JP2007046123A (ja) | 2005-08-11 | 2007-02-22 | Ishikawajima Harima Heavy Ind Co Ltd | 多室型熱処理装置及び温度制御方法 |
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JP2021092334A (ja) * | 2019-12-09 | 2021-06-17 | サンファーネス株式会社 | 真空炉 |
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JP5534384B2 (ja) | 2014-06-25 |
EP2226600A1 (en) | 2010-09-08 |
JP2009156550A (ja) | 2009-07-16 |
US9109958B2 (en) | 2015-08-18 |
CN101910769A (zh) | 2010-12-08 |
TWI357967B (en) | 2012-02-11 |
KR20100061840A (ko) | 2010-06-09 |
KR101191807B1 (ko) | 2012-10-16 |
US20110008742A1 (en) | 2011-01-13 |
EP2226600B1 (en) | 2018-01-10 |
TW200936974A (en) | 2009-09-01 |
EP2226600A4 (en) | 2013-03-13 |
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