WO2009078284A1 - 角速度センサ - Google Patents

角速度センサ Download PDF

Info

Publication number
WO2009078284A1
WO2009078284A1 PCT/JP2008/072037 JP2008072037W WO2009078284A1 WO 2009078284 A1 WO2009078284 A1 WO 2009078284A1 JP 2008072037 W JP2008072037 W JP 2008072037W WO 2009078284 A1 WO2009078284 A1 WO 2009078284A1
Authority
WO
WIPO (PCT)
Prior art keywords
detection
drive
portions
mass
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/072037
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Yoichi Mochida
Masaya Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to KR20107013320A priority Critical patent/KR101149266B1/ko
Priority to JP2009546214A priority patent/JP4929489B2/ja
Publication of WO2009078284A1 publication Critical patent/WO2009078284A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
PCT/JP2008/072037 2007-12-19 2008-12-04 角速度センサ Ceased WO2009078284A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR20107013320A KR101149266B1 (ko) 2007-12-19 2008-12-04 각속도 센서
JP2009546214A JP4929489B2 (ja) 2007-12-19 2008-12-04 角速度センサ

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007327502 2007-12-19
JP2007-327502 2007-12-19
JP2008-265489 2008-10-14
JP2008265489 2008-10-14

Publications (1)

Publication Number Publication Date
WO2009078284A1 true WO2009078284A1 (ja) 2009-06-25

Family

ID=40795402

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/072037 Ceased WO2009078284A1 (ja) 2007-12-19 2008-12-04 角速度センサ

Country Status (4)

Country Link
JP (1) JP4929489B2 (enExample)
KR (1) KR101149266B1 (enExample)
TW (1) TW200942776A (enExample)
WO (1) WO2009078284A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012508373A (ja) * 2008-11-11 2012-04-05 フラウンホファー ゲセルシャフト ツール フェールデルンク ダー アンゲヴァンテン フォルシュンク エー．ファオ． マイクロメカニクスによるコリオリ式回転速度センサ
JP2012177610A (ja) * 2011-02-25 2012-09-13 Sony Corp 角速度センサ
EP2610588A3 (en) * 2011-12-28 2015-06-17 Maxim Integrated Products, Inc. Micro rate of rotation sensor and method for operating a micro rate of rotation sensor
JP2020064054A (ja) * 2018-10-03 2020-04-23 株式会社村田製作所 ピエゾｚ軸ジャイロスコープ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101299731B1 (ko) * 2012-05-29 2013-08-22 삼성전기주식회사 각속도 센서

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
JPH0791958A (ja) * 1993-09-27 1995-04-07 Canon Inc 角速度センサ
JPH1089968A (ja) * 1996-09-12 1998-04-10 Murata Mfg Co Ltd 角速度センサ
JPH10239347A (ja) * 1997-02-28 1998-09-11 Japan Aviation Electron Ind Ltd 運動センサ
JPH11183179A (ja) * 1997-12-22 1999-07-09 Toyota Central Res & Dev Lab Inc 検出器
US5955668A (en) * 1997-01-28 1999-09-21 Irvine Sensors Corporation Multi-element micro gyro
JP2000180177A (ja) * 1998-12-15 2000-06-30 Mitsumi Electric Co Ltd 回転振動型ジャイロ
JP2000509812A (ja) * 1996-10-07 2000-08-02 ハーン―シッカート―ゲゼルシャフト フア アンゲワンテ フォルシュンク アインゲトラーゲナー フェライン 直交する１次振動および２次振動の相互干渉を防止した回転速度ジャイロスコープ
JP2004354109A (ja) * 2003-05-27 2004-12-16 Matsushita Electric Works Ltd 回転振動式角速度センサ
JP2006153798A (ja) * 2004-12-01 2006-06-15 Denso Corp 回転振動型角速度センサ
JP2006250850A (ja) * 2005-03-14 2006-09-21 Japan Aviation Electronics Industry Ltd 振動ジャイロ
US20060272411A1 (en) * 2005-06-06 2006-12-07 Cenk Acar Torsional rate sensor with momentum balance and mode decoupling
JP2007271611A (ja) * 2006-03-10 2007-10-18 Stmicroelectronics Srl 回転駆動運動を用いる微小電気機械集積センサ構造

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09196682A (ja) * 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ
JP3999377B2 (ja) * 1997-11-04 2007-10-31 日本碍子株式会社 振動子、振動型ジャイロスコープ、直線加速度計および回転角速度の測定方法
JP4529203B2 (ja) * 1999-08-05 2010-08-25 パナソニック株式会社 角速度センサ
JP3627618B2 (ja) 2000-04-19 2005-03-09 株式会社デンソー 角速度センサ
JP2002296038A (ja) 2001-03-30 2002-10-09 Mitsubishi Electric Corp 角速度センサ
JP3870895B2 (ja) 2002-01-10 2007-01-24 株式会社村田製作所 角速度センサ
JP2005241500A (ja) 2004-02-27 2005-09-08 Mitsubishi Electric Corp 角速度センサ
CN101910789B (zh) * 2008-01-07 2012-02-29 株式会社村田制作所 角速度传感器

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5203208A (en) * 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
JPH0791958A (ja) * 1993-09-27 1995-04-07 Canon Inc 角速度センサ
JPH1089968A (ja) * 1996-09-12 1998-04-10 Murata Mfg Co Ltd 角速度センサ
JP2000509812A (ja) * 1996-10-07 2000-08-02 ハーン―シッカート―ゲゼルシャフト フア アンゲワンテ フォルシュンク アインゲトラーゲナー フェライン 直交する１次振動および２次振動の相互干渉を防止した回転速度ジャイロスコープ
US5955668A (en) * 1997-01-28 1999-09-21 Irvine Sensors Corporation Multi-element micro gyro
JPH10239347A (ja) * 1997-02-28 1998-09-11 Japan Aviation Electron Ind Ltd 運動センサ
JPH11183179A (ja) * 1997-12-22 1999-07-09 Toyota Central Res & Dev Lab Inc 検出器
JP2000180177A (ja) * 1998-12-15 2000-06-30 Mitsumi Electric Co Ltd 回転振動型ジャイロ
JP2004354109A (ja) * 2003-05-27 2004-12-16 Matsushita Electric Works Ltd 回転振動式角速度センサ
JP2006153798A (ja) * 2004-12-01 2006-06-15 Denso Corp 回転振動型角速度センサ
JP2006250850A (ja) * 2005-03-14 2006-09-21 Japan Aviation Electronics Industry Ltd 振動ジャイロ
US20060272411A1 (en) * 2005-06-06 2006-12-07 Cenk Acar Torsional rate sensor with momentum balance and mode decoupling
JP2007271611A (ja) * 2006-03-10 2007-10-18 Stmicroelectronics Srl 回転駆動運動を用いる微小電気機械集積センサ構造

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012508373A (ja) * 2008-11-11 2012-04-05 フラウンホファー ゲセルシャフト ツール フェールデルンク ダー アンゲヴァンテン フォルシュンク エー．ファオ． マイクロメカニクスによるコリオリ式回転速度センサ
JP2012177610A (ja) * 2011-02-25 2012-09-13 Sony Corp 角速度センサ
US9885576B2 (en) 2011-02-25 2018-02-06 Sony Semiconductor Solutions Corporation Angular velocity sensor
EP2610588A3 (en) * 2011-12-28 2015-06-17 Maxim Integrated Products, Inc. Micro rate of rotation sensor and method for operating a micro rate of rotation sensor
US9151611B2 (en) 2011-12-28 2015-10-06 Maxim Integrated Products, Inc. Micro rate of rotation sensor and method for operating a micro rate of rotation sensor
US9784580B2 (en) 2011-12-28 2017-10-10 Hanking Electronics Ltd. Micro rate of rotation sensor and method for operating a micro rate of rotation sensor
JP2020064054A (ja) * 2018-10-03 2020-04-23 株式会社村田製作所 ピエゾｚ軸ジャイロスコープ
US11280610B2 (en) 2018-10-03 2022-03-22 Murata Manufacturing Co., Ltd. Piezoelectric z-axis gyroscope

Also Published As

Publication number Publication date
KR101149266B1 (ko) 2012-07-20
JP4929489B2 (ja) 2012-05-09
TW200942776A (en) 2009-10-16
TWI379992B (enExample) 2012-12-21
JPWO2009078284A1 (ja) 2011-04-28
KR20100086059A (ko) 2010-07-29

Similar Documents

Publication Publication Date Title
WO2009078284A1 (ja) 角速度センサ
WO2007123933A3 (en) Vibrating inertial rate sensor utilizing split or skewed operational elements
WO2010110989A3 (en) Vertically integrated mems acceleration transducer
WO2009037751A1 (ja) 複合センサおよび加速度センサ
ATE496279T1 (de) Mikromechanischer coriolis-drehratensensor
WO2009013666A3 (en) Multi-axial sensor for determining displacement, velocity and acceleration of a linear or angular movement
WO2012037538A3 (en) Micromachined monolithic 6-axis inertial sensor
WO2008052065A3 (en) Three-dimensional nanoscale metrology using firat probe
WO2008129865A1 (ja) 慣性力センサ
WO2008008138A3 (en) Optical navigation sensor with variable tracking resolution
FR2898884B1 (fr) Micro-capteur inertiel resonant a epaisseur variable realise en technologies de surface
NO20080786L (no) Vindstromestimering og folging ved a bruke tarndynamikk
WO2005071347A3 (en) Gyroscopic system for boresighting equipment
WO2006138697A3 (en) Integrated displacement sensors for probe microscopy and force spectroscopy
EP1950529A8 (en) Angular velocity sensor
WO2008099817A1 (ja) 可変分光素子
WO2007082506A3 (de) Rotationsvorrichtung zur verwendung in einem fluid
WO2010108168A3 (en) Multiple degree of freedom displacement transducer
WO2009134778A3 (en) Calibration of non-vibrating contact potential difference measurements to detect surface variations that are perpendicular to the direction of sensor motion
US10030977B2 (en) Multiaxial rotation rate sensor including a split central rotor
WO2011099848A3 (en) Air flow assisted chip self-assembly
WO2005053146A3 (en) Method and system for enhanced resolution, automatically- calibrated position sensor
EP1662235A3 (en) Acceleration sensor
CN106849746B (zh) 基于惯性冲击的三自由度压电驱动平台
RU2374138C1 (ru) Способ формирования подъемной силы

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08860989

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2009546214

Country of ref document: JP

ENP Entry into the national phase

Ref document number: 20107013320

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08860989

Country of ref document: EP

Kind code of ref document: A1