WO2009051059A1 - フォトマスク保護用粘着テープ - Google Patents

フォトマスク保護用粘着テープ Download PDF

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Publication number
WO2009051059A1
WO2009051059A1 PCT/JP2008/068352 JP2008068352W WO2009051059A1 WO 2009051059 A1 WO2009051059 A1 WO 2009051059A1 JP 2008068352 W JP2008068352 W JP 2008068352W WO 2009051059 A1 WO2009051059 A1 WO 2009051059A1
Authority
WO
WIPO (PCT)
Prior art keywords
adhesive tape
adhesive
layer
photomask
sheet
Prior art date
Application number
PCT/JP2008/068352
Other languages
English (en)
French (fr)
Inventor
Nobuto Kamiya
Hiroshi Tada
Original Assignee
Sekisui Chemical Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co., Ltd. filed Critical Sekisui Chemical Co., Ltd.
Priority to JP2009538068A priority Critical patent/JP4448897B2/ja
Publication of WO2009051059A1 publication Critical patent/WO2009051059A1/ja

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/20—Adhesives in the form of films or foils characterised by their carriers
    • C09J7/22—Plastics; Metallised plastics
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
    • C09J7/35—Heat-activated
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/48—Protective coatings
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2401/00—Presence of cellulose
    • C09J2401/006—Presence of cellulose in the substrate
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2423/00—Presence of polyolefin
    • C09J2423/006—Presence of polyolefin in the substrate
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2425/00—Presence of styrenic polymer
    • C09J2425/006—Presence of styrenic polymer in the substrate
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2427/00—Presence of halogenated polymer
    • C09J2427/006—Presence of halogenated polymer in the substrate
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2467/00—Presence of polyester
    • C09J2467/006—Presence of polyester in the substrate
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2469/00—Presence of polycarbonate
    • C09J2469/006—Presence of polycarbonate in the substrate
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2475/00—Presence of polyurethane
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2483/00—Presence of polysiloxane

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Adhesive Tapes (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Laminated Bodies (AREA)

Abstract

　粘着性を有するフォトレジストに密着露光を繰り返しても剥離効果が低下せず持続でき使用が可能である離型性及びレジストからの汚染付着物の洗浄にアルコール等の溶剤を用いても表面保護層の脱落がない耐溶剤性を同時に兼ね備え、しかも、滑り性を抑えた光学特性の優れたフォトマスク保護用粘着テープの提供。 　透明な基材フィルム又はシート（Ａ）と、その片面に形成された粘着剤層（Ｂ）と、粘着剤層（Ｂ）の面とは反対側の面に形成された特定の混合物から形成されてなる表面保護層（Ｃ）またはそれぞれ特定の混合物から順次形成されてなる中間層（ｄ）及び表面層（ｅ）からなる表面保護層（Ｃ）とを含むフォトマスク保護用粘着テープによる。 　 　 　 　 　
PCT/JP2008/068352 2007-10-19 2008-10-09 フォトマスク保護用粘着テープ WO2009051059A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009538068A JP4448897B2 (ja) 2007-10-19 2008-10-09 フォトマスク保護用粘着テープ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-272313 2007-10-19
JP2007272313 2007-10-19

Publications (1)

Publication Number Publication Date
WO2009051059A1 true WO2009051059A1 (ja) 2009-04-23

Family

ID=40567326

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/068352 WO2009051059A1 (ja) 2007-10-19 2008-10-09 フォトマスク保護用粘着テープ

Country Status (2)

Country Link
JP (1) JP4448897B2 (ja)
WO (1) WO2009051059A1 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011107468A (ja) * 2009-11-18 2011-06-02 Asahi Kasei E-Materials Corp ペリクル
WO2011105217A1 (ja) * 2010-02-23 2011-09-01 株式会社 きもと 粘着シート
WO2014119426A1 (ja) * 2013-01-29 2014-08-07 日東電工株式会社 多層粘着シート
CN104965390A (zh) * 2015-05-29 2015-10-07 王氏港建经销有限公司 一种运送多个基板依次通过曝光机的方法和系统
JP2015193236A (ja) * 2014-03-28 2015-11-05 積水化学工業株式会社 積層フィルム及び積層構造体の製造方法
EP3031874A4 (en) * 2013-08-05 2017-04-12 Nitto Denko Corporation Adhesive sheet

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH117121A (ja) * 1997-06-17 1999-01-12 Kimoto & Co Ltd 表面保護フィルム
JP2003096409A (ja) * 2001-09-20 2003-04-03 Kimoto & Co Ltd 表面保護フィルム
JP2003344982A (ja) * 2002-05-29 2003-12-03 Nippon Paper Industries Co Ltd 写真乳剤面保護層転写シート及び写真乳剤面保護層の形成方法並びに保護層付きフォトマスク
JP2005181565A (ja) * 2003-12-18 2005-07-07 Kimoto & Co Ltd 表面保護膜およびこれを用いた表面保護フィルム
JP2005181564A (ja) * 2003-12-18 2005-07-07 Kimoto & Co Ltd 表面保護膜およびこれを用いた表面保護フィルム
WO2008117677A1 (ja) * 2007-03-23 2008-10-02 Sekisui Chemical Co., Ltd. フォトマスク保護用粘着テープ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH117121A (ja) * 1997-06-17 1999-01-12 Kimoto & Co Ltd 表面保護フィルム
JP2003096409A (ja) * 2001-09-20 2003-04-03 Kimoto & Co Ltd 表面保護フィルム
JP2003344982A (ja) * 2002-05-29 2003-12-03 Nippon Paper Industries Co Ltd 写真乳剤面保護層転写シート及び写真乳剤面保護層の形成方法並びに保護層付きフォトマスク
JP2005181565A (ja) * 2003-12-18 2005-07-07 Kimoto & Co Ltd 表面保護膜およびこれを用いた表面保護フィルム
JP2005181564A (ja) * 2003-12-18 2005-07-07 Kimoto & Co Ltd 表面保護膜およびこれを用いた表面保護フィルム
WO2008117677A1 (ja) * 2007-03-23 2008-10-02 Sekisui Chemical Co., Ltd. フォトマスク保護用粘着テープ

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011107468A (ja) * 2009-11-18 2011-06-02 Asahi Kasei E-Materials Corp ペリクル
WO2011105217A1 (ja) * 2010-02-23 2011-09-01 株式会社 きもと 粘着シート
CN102762683A (zh) * 2010-02-23 2012-10-31 木本股份有限公司 粘合片
CN102762683B (zh) * 2010-02-23 2014-09-24 木本股份有限公司 粘合片
WO2014119426A1 (ja) * 2013-01-29 2014-08-07 日東電工株式会社 多層粘着シート
JP2014167099A (ja) * 2013-01-29 2014-09-11 Nitto Denko Corp 多層粘着シート
EP3031874A4 (en) * 2013-08-05 2017-04-12 Nitto Denko Corporation Adhesive sheet
US10392533B2 (en) 2013-08-05 2019-08-27 Nitto Denko Corporation Adhesive sheet
JP2015193236A (ja) * 2014-03-28 2015-11-05 積水化学工業株式会社 積層フィルム及び積層構造体の製造方法
CN104965390A (zh) * 2015-05-29 2015-10-07 王氏港建经销有限公司 一种运送多个基板依次通过曝光机的方法和系统

Also Published As

Publication number Publication date
JPWO2009051059A1 (ja) 2011-03-03
JP4448897B2 (ja) 2010-04-14

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