WO2009044542A1 - エンコーダ - Google Patents
エンコーダ Download PDFInfo
- Publication number
- WO2009044542A1 WO2009044542A1 PCT/JP2008/002755 JP2008002755W WO2009044542A1 WO 2009044542 A1 WO2009044542 A1 WO 2009044542A1 JP 2008002755 W JP2008002755 W JP 2008002755W WO 2009044542 A1 WO2009044542 A1 WO 2009044542A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- illuminating light
- illuminating
- scale
- moving scale
- light
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Transform (AREA)
- Facsimile Scanning Arrangements (AREA)
Abstract
照明光LB1を移動スケール(24)へ入射させる反射ミラー(22B)を、変調信号V(t)に基づいてX軸方向に振動する。これにより、インデックススケール(20)で生成された照明光(LB1)及び照明光(LB2)のうちの照明光(LB1)の光路が、周期的に変化し、結果的に照明光(LB1)が周期的に変調される。したがって、照明光(LB1)又は照明光(LB2)を、移動スケール(24)に対して走査するスキャナーを別途設ける必要がなく、装置の小型化及び装置の低コスト化を図ることが可能となる。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009535974A JP5212840B2 (ja) | 2007-10-05 | 2008-10-01 | エンコーダ |
EP08836628.1A EP2202492A4 (en) | 2007-10-05 | 2008-10-01 | CODER |
US12/731,725 US8222594B2 (en) | 2007-10-05 | 2010-03-25 | Encoder that optically detects positional information of a movable body by changing a path length through periodic oscillation of an optical element |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-261541 | 2007-10-05 | ||
JP2007261541 | 2007-10-05 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/731,725 Continuation US8222594B2 (en) | 2007-10-05 | 2010-03-25 | Encoder that optically detects positional information of a movable body by changing a path length through periodic oscillation of an optical element |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009044542A1 true WO2009044542A1 (ja) | 2009-04-09 |
Family
ID=40525974
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/002755 WO2009044542A1 (ja) | 2007-10-05 | 2008-10-01 | エンコーダ |
Country Status (5)
Country | Link |
---|---|
US (1) | US8222594B2 (ja) |
EP (1) | EP2202492A4 (ja) |
JP (1) | JP5212840B2 (ja) |
TW (1) | TWI463115B (ja) |
WO (1) | WO2009044542A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8529823B2 (en) | 2009-09-29 | 2013-09-10 | Asml Netherlands B.V. | Imprint lithography |
JP2014119445A (ja) * | 2012-12-17 | 2014-06-30 | Mitsutoyo Corp | 光学エンコーダ用の照明部 |
US10546078B2 (en) | 2017-01-13 | 2020-01-28 | General Electric Company | Turbofan case for controlling blade deflection |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013203713A1 (de) * | 2013-03-05 | 2014-02-13 | Carl Zeiss Smt Gmbh | Inkrementalgeber und Lithographievorrichtung |
NL2015639A (en) | 2014-11-28 | 2016-09-20 | Asml Netherlands Bv | Encoder, position measurement system and lithographic apparatus. |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6639686B1 (en) | 2000-04-13 | 2003-10-28 | Nanowave, Inc. | Method of and apparatus for real-time continual nanometer scale position measurement by beam probing as by laser beams and the like of atomic and other undulating surfaces such as gratings or the like relatively moving with respect to the probing beams |
JP2006343314A (ja) * | 2004-12-13 | 2006-12-21 | Sendai Nikon:Kk | 光電式エンコーダ |
JP2007170938A (ja) * | 2005-12-21 | 2007-07-05 | Sendai Nikon:Kk | エンコーダ |
JP2007333722A (ja) * | 2006-05-19 | 2007-12-27 | Sendai Nikon:Kk | エンコーダ |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6098302A (ja) | 1983-11-04 | 1985-06-01 | Sony Magnescale Inc | 光学式変位測定装置 |
JPS61176907A (ja) * | 1985-01-31 | 1986-08-08 | Canon Inc | 撮像装置 |
DE4338680C1 (de) * | 1993-11-12 | 1995-03-23 | Heidenhain Gmbh Dr Johannes | Längen- oder Winkelmeßeinrichtung |
JP3513247B2 (ja) * | 1994-07-11 | 2004-03-31 | キヤノン株式会社 | 周波数シフター及びそれを用いた光学式変位計測装置 |
JP4023923B2 (ja) * | 1998-07-02 | 2007-12-19 | ソニーマニュファクチュアリングシステムズ株式会社 | 光学式変位測定装置 |
DE10333772A1 (de) * | 2002-08-07 | 2004-02-26 | Dr. Johannes Heidenhain Gmbh | Interferenzielle Positionsmesseinrichtung |
US7332709B2 (en) * | 2004-12-13 | 2008-02-19 | Nikon Corporation | Photoelectric encoder |
US7394546B2 (en) * | 2005-05-23 | 2008-07-01 | Southwest Sciences Incorporated | Method and apparatus for full phase interferometry |
US7601947B2 (en) | 2006-05-19 | 2009-10-13 | Nikon Corporation | Encoder that optically detects positional information of a scale |
-
2008
- 2008-10-01 EP EP08836628.1A patent/EP2202492A4/en not_active Withdrawn
- 2008-10-01 WO PCT/JP2008/002755 patent/WO2009044542A1/ja active Application Filing
- 2008-10-01 JP JP2009535974A patent/JP5212840B2/ja not_active Expired - Fee Related
- 2008-10-03 TW TW097138025A patent/TWI463115B/zh not_active IP Right Cessation
-
2010
- 2010-03-25 US US12/731,725 patent/US8222594B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6639686B1 (en) | 2000-04-13 | 2003-10-28 | Nanowave, Inc. | Method of and apparatus for real-time continual nanometer scale position measurement by beam probing as by laser beams and the like of atomic and other undulating surfaces such as gratings or the like relatively moving with respect to the probing beams |
JP2006343314A (ja) * | 2004-12-13 | 2006-12-21 | Sendai Nikon:Kk | 光電式エンコーダ |
JP2007170938A (ja) * | 2005-12-21 | 2007-07-05 | Sendai Nikon:Kk | エンコーダ |
JP2007333722A (ja) * | 2006-05-19 | 2007-12-27 | Sendai Nikon:Kk | エンコーダ |
Non-Patent Citations (1)
Title |
---|
See also references of EP2202492A4 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8529823B2 (en) | 2009-09-29 | 2013-09-10 | Asml Netherlands B.V. | Imprint lithography |
JP2014119445A (ja) * | 2012-12-17 | 2014-06-30 | Mitsutoyo Corp | 光学エンコーダ用の照明部 |
US10546078B2 (en) | 2017-01-13 | 2020-01-28 | General Electric Company | Turbofan case for controlling blade deflection |
Also Published As
Publication number | Publication date |
---|---|
JP5212840B2 (ja) | 2013-06-19 |
US8222594B2 (en) | 2012-07-17 |
US20100176282A1 (en) | 2010-07-15 |
EP2202492A1 (en) | 2010-06-30 |
EP2202492A4 (en) | 2014-12-31 |
JPWO2009044542A1 (ja) | 2011-02-03 |
TWI463115B (zh) | 2014-12-01 |
TW200923330A (en) | 2009-06-01 |
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