WO2008152979A1 - 光走査型センサ - Google Patents

光走査型センサ Download PDF

Info

Publication number
WO2008152979A1
WO2008152979A1 PCT/JP2008/060433 JP2008060433W WO2008152979A1 WO 2008152979 A1 WO2008152979 A1 WO 2008152979A1 JP 2008060433 W JP2008060433 W JP 2008060433W WO 2008152979 A1 WO2008152979 A1 WO 2008152979A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
reflective
optical scanning
type sensor
mirror
Prior art date
Application number
PCT/JP2008/060433
Other languages
English (en)
French (fr)
Inventor
Ryohei Shigematsu
Hiroshi Imamura
Takafumi Hirata
Original Assignee
Nhk Spring Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nhk Spring Co., Ltd. filed Critical Nhk Spring Co., Ltd.
Priority to US12/451,953 priority Critical patent/US20100118363A1/en
Priority to EP08765246A priority patent/EP2157441A1/en
Priority to CN200880019921A priority patent/CN101680947A/zh
Priority to JP2009519238A priority patent/JPWO2008152979A1/ja
Publication of WO2008152979A1 publication Critical patent/WO2008152979A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/42—Simultaneous measurement of distance and other co-ordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Optical Radar Systems And Details Thereof (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

　走査光と反射光との相互干渉を抑制することができ、高精度の物体検知を行うことができる光走査型センサを提供する。この目的のため、光を投光する投光素子２と、光を反射するミラー３３を介して投光素子２が投光した光を出射し、この出射した光をミラー３３が揺動することによって走査する光走査用アクチュエータ３と、光走査用アクチュエータ３が出射する走査光が外部の物体によって反射された反射光を、ミラー３３を介して受光する受光素子４と、を備え、ミラー３３は、投光素子２が投光した光を反射し、この反射した光を走査光として外部へ出射する第１の表面３３ａと、第１の表面３３ａに平行かつ反射領域において不連続であり、外部の物体による反射光を反射して受光素子４へ照射する第２の表面３３ｂと、を有する。
PCT/JP2008/060433 2007-06-12 2008-06-06 光走査型センサ WO2008152979A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US12/451,953 US20100118363A1 (en) 2007-06-12 2008-06-06 Optical scanning sensor
EP08765246A EP2157441A1 (en) 2007-06-12 2008-06-06 Optical scanning type sensor
CN200880019921A CN101680947A (zh) 2007-06-12 2008-06-06 光扫描型传感器
JP2009519238A JPWO2008152979A1 (ja) 2007-06-12 2008-06-06 光走査型センサ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007155436 2007-06-12
JP2007-155436 2007-06-12

Publications (1)

Publication Number Publication Date
WO2008152979A1 true WO2008152979A1 (ja) 2008-12-18

Family

ID=40129584

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060433 WO2008152979A1 (ja) 2007-06-12 2008-06-06 光走査型センサ

Country Status (5)

Country Link
US (1) US20100118363A1 (ja)
EP (1) EP2157441A1 (ja)
JP (1) JPWO2008152979A1 (ja)
CN (1) CN101680947A (ja)
WO (1) WO2008152979A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011242644A (ja) * 2010-05-19 2011-12-01 Mitsubishi Electric Corp ガルバノスキャナ、及びレーザ加工装置
KR20180002765A (ko) * 2015-06-03 2018-01-08 발레오 샬터 운트 센소렌 게엠베아 편향 거울 구성체의 구동 유닛을 유지하기 위한 유지 장치, 편향 거울 구성체를 구비하는 검출 장치 및 자동차
KR20190046496A (ko) * 2017-10-26 2019-05-07 현대오트론 주식회사 초음파 센서 및 그 제어 방법

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008052365A1 (en) * 2006-10-30 2008-05-08 Autonosys Inc. Scanning system for lidar
JP7035558B2 (ja) * 2018-01-24 2022-03-15 株式会社デンソー ライダー装置
JP7375378B2 (ja) * 2019-08-29 2023-11-08 セイコーエプソン株式会社 光走査装置、光学計測装置、および、ロボット
US11714277B2 (en) * 2019-09-10 2023-08-01 Luminar Technologies, Inc. Compact galvanometer mirror design
TW202119072A (zh) * 2019-10-31 2021-05-16 佑勝光電股份有限公司 光學收發模組及光纖纜線模組
US11543652B2 (en) * 2020-04-20 2023-01-03 Luminar, Llc Imaging system having coil on mirror actuator

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0540951A (ja) * 1991-06-25 1993-02-19 Canon Inc トラツキング用回動ミラー装置
JPH10170637A (ja) * 1996-12-16 1998-06-26 Omron Corp 光走査装置
WO2002008818A1 (fr) * 2000-07-24 2002-01-31 Nhk Spring Co., Ltd. Actionneur a balayage de lumiere sonde
JP2002174794A (ja) * 2000-12-07 2002-06-21 Denso Corp 光スキャナ
JP2005127971A (ja) * 2003-10-27 2005-05-19 Nhk Spring Co Ltd 角度検出装置およびこれを用いたスキャン型アクチュエータ
JP2007279017A (ja) * 2006-03-15 2007-10-25 Omron Corp レーダ装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US6486995B2 (en) * 2000-04-28 2002-11-26 Denso Corporation Vibration-resisting structure of optical scanner

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0540951A (ja) * 1991-06-25 1993-02-19 Canon Inc トラツキング用回動ミラー装置
JPH10170637A (ja) * 1996-12-16 1998-06-26 Omron Corp 光走査装置
WO2002008818A1 (fr) * 2000-07-24 2002-01-31 Nhk Spring Co., Ltd. Actionneur a balayage de lumiere sonde
JP2002174794A (ja) * 2000-12-07 2002-06-21 Denso Corp 光スキャナ
JP2005127971A (ja) * 2003-10-27 2005-05-19 Nhk Spring Co Ltd 角度検出装置およびこれを用いたスキャン型アクチュエータ
JP2007279017A (ja) * 2006-03-15 2007-10-25 Omron Corp レーダ装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011242644A (ja) * 2010-05-19 2011-12-01 Mitsubishi Electric Corp ガルバノスキャナ、及びレーザ加工装置
KR20180002765A (ko) * 2015-06-03 2018-01-08 발레오 샬터 운트 센소렌 게엠베아 편향 거울 구성체의 구동 유닛을 유지하기 위한 유지 장치, 편향 거울 구성체를 구비하는 검출 장치 및 자동차
JP2018517610A (ja) * 2015-06-03 2018-07-05 ヴァレオ・シャルター・ウント・ゼンゾーレン・ゲーエムベーハー 偏向鏡装置の駆動ユニットを保持するための保持機器、偏向鏡装置を有した検出機器、および自動車両
KR102041694B1 (ko) * 2015-06-03 2019-11-06 발레오 샬터 운트 센소렌 게엠베아 편향 거울 구성체의 구동 유닛을 유지하기 위한 유지 장치, 편향 거울 구성체를 구비하는 검출 장치 및 자동차
KR20190046496A (ko) * 2017-10-26 2019-05-07 현대오트론 주식회사 초음파 센서 및 그 제어 방법
KR102030449B1 (ko) * 2017-10-26 2019-10-10 현대오트론 주식회사 초음파 센서 및 그 제어 방법

Also Published As

Publication number Publication date
EP2157441A1 (en) 2010-02-24
CN101680947A (zh) 2010-03-24
US20100118363A1 (en) 2010-05-13
JPWO2008152979A1 (ja) 2010-08-26

Similar Documents

Publication Publication Date Title
WO2008152979A1 (ja) 光走査型センサ
US8605258B2 (en) Distance measuring device and method for measuring distance
JP5607392B2 (ja) 光干渉測定装置
GB2499159A (en) Wide angle bistatic scanning optical ranging sensor
TW200602630A (en) Optical cell measurement apparatus
WO2010010311A3 (fr) Dispositif optique et procede de mesure de rotation d'un objet
WO2016175395A3 (ko) 미러 회전 방식의 다채널 라이더 스캐너 광학계
WO2010027593A3 (en) Optical relay for compact head up display
ATE496283T1 (de) Positionsmesseinrichtung
JP2013517465A5 (ja)
EP2058671A3 (en) Laser radar apparatus that measures direction and distance of an object
EP2525198A3 (en) Method and system for spectral calibration of a remote sensing sensor and a synthetic target having a tunable spectral composition
TW200712597A (en) Optical module of a light source module and a sensor module positioned on a frame
WO2009034825A1 (ja) 半導体単結晶製造装置における位置計測装置および位置計測方法
EP2781931A3 (en) Limited reflection type photoelectric sensor
WO2009151660A3 (en) Detecting a target using an optical augmentation sensor
ATE527559T1 (de) Lichtschrankenanordnung
TW200741251A (en) Optical system and projector utilizing the same
EP1471565A3 (en) Mapping device for semiconductor wafers
WO2006136381A3 (de) Licht reflektierendes tripel, reflektor sowie verfahren zur erkennung eines gegenstands
WO2012073178A3 (en) Sensor device with double telecentric optical system
WO2010015458A3 (de) Optischer sensor und verfahren zum vermessen von profilen
TW200717289A (en) Mini ball displacement detecting system
WO2010015459A3 (de) Optischer sensor und verfahren zum vermessen von profilen
WO2002097364A8 (de) Sensorvorrichtung zur schnellen optischen abstandsmessung nach dem konfokalen optischen abbildungsprinzip

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880019921.5

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08765246

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2009519238

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 12451953

Country of ref document: US

Ref document number: 2008765246

Country of ref document: EP

NENP Non-entry into the national phase

Ref country code: DE