WO2009041439A1 - 光導波路及びその製造方法 - Google Patents

光導波路及びその製造方法 Download PDF

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Publication number
WO2009041439A1
WO2009041439A1 PCT/JP2008/067192 JP2008067192W WO2009041439A1 WO 2009041439 A1 WO2009041439 A1 WO 2009041439A1 JP 2008067192 W JP2008067192 W JP 2008067192W WO 2009041439 A1 WO2009041439 A1 WO 2009041439A1
Authority
WO
WIPO (PCT)
Prior art keywords
optical waveguide
producing
same
cladding layer
layer
Prior art date
Application number
PCT/JP2008/067192
Other languages
English (en)
French (fr)
Inventor
Masatoshi Yamaguchi
Toshihiko Takasaki
Tokutarou Komatsu
Atsushi Takahashi
Original Assignee
Hitachi Chemical Company, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Company, Ltd. filed Critical Hitachi Chemical Company, Ltd.
Priority to US12/680,372 priority Critical patent/US20100278496A1/en
Priority to JP2009534330A priority patent/JPWO2009041439A1/ja
Publication of WO2009041439A1 publication Critical patent/WO2009041439A1/ja

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method
    • G02B6/138Integrated optical circuits characterised by the manufacturing method by using polymerisation

Abstract

 基材上に第1のクラッド層、パターニングされたコア層、及び第2のクラッド層がこの順に積層されてなる光導波路であって、コア層の高さが20μm以上であり、第2のクラッド層におけるコア層の外周から10μmの範囲の硬化率が95%以上である光導波路である。  光導波路形成用樹脂を用い、均一なコアとクラッドを有し、透明性及び耐熱性に優れた光導波路、及び生産性に優れた該光導波路の製造方法を提供することができる。
PCT/JP2008/067192 2007-09-26 2008-09-24 光導波路及びその製造方法 WO2009041439A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/680,372 US20100278496A1 (en) 2007-09-26 2008-09-24 Optical waveguide and method for producing the same
JP2009534330A JPWO2009041439A1 (ja) 2007-09-26 2008-09-24 光導波路及びその製造方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007249063 2007-09-26
JP2007-249063 2007-09-26
JP2008-096361 2008-04-02
JP2008096361 2008-04-02

Publications (1)

Publication Number Publication Date
WO2009041439A1 true WO2009041439A1 (ja) 2009-04-02

Family

ID=40511322

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/067192 WO2009041439A1 (ja) 2007-09-26 2008-09-24 光導波路及びその製造方法

Country Status (4)

Country Link
US (1) US20100278496A1 (ja)
JP (1) JPWO2009041439A1 (ja)
TW (1) TW200925685A (ja)
WO (1) WO2009041439A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106646736B (zh) * 2016-11-18 2018-11-16 华为机器有限公司 光波导

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63182889A (ja) * 1987-01-26 1988-07-28 関西ペイント株式会社 プリント配線板の製造方法
JPH0235457A (ja) * 1988-07-26 1990-02-06 Sony Corp 露光方法及び露光装置
JPH1145455A (ja) * 1997-01-29 1999-02-16 Ricoh Co Ltd 光ピックアップ用光学素子および光ピックアップ用光学素子の製造方法および光ピックアップ
JP2003066615A (ja) * 2001-08-30 2003-03-05 Nec Toppan Circuit Solutions Inc パターン露光方法
JP2006162886A (ja) * 2004-12-06 2006-06-22 Fujikura Ltd 永久レジスト層の形成方法
JP2006308960A (ja) * 2005-04-28 2006-11-09 Hitachi Chem Co Ltd マイクロレンズアレイの製造方法、マイクロレンズアレイ用感光性樹脂組成物及びマイクロレンズアレイ用感光性エレメント

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5026135A (en) * 1990-04-20 1991-06-25 E. I. Du Pont De Nemours And Company Moisture sealing of optical waveguide devices with doped silicon dioxide
US6306563B1 (en) * 1999-06-21 2001-10-23 Corning Inc. Optical devices made from radiation curable fluorinated compositions
EP2392619A1 (en) * 2004-10-07 2011-12-07 Hitachi Chemical Company, Ltd. Resin composition for optical material, resin film for optical material, and optical waveguide using same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63182889A (ja) * 1987-01-26 1988-07-28 関西ペイント株式会社 プリント配線板の製造方法
JPH0235457A (ja) * 1988-07-26 1990-02-06 Sony Corp 露光方法及び露光装置
JPH1145455A (ja) * 1997-01-29 1999-02-16 Ricoh Co Ltd 光ピックアップ用光学素子および光ピックアップ用光学素子の製造方法および光ピックアップ
JP2003066615A (ja) * 2001-08-30 2003-03-05 Nec Toppan Circuit Solutions Inc パターン露光方法
JP2006162886A (ja) * 2004-12-06 2006-06-22 Fujikura Ltd 永久レジスト層の形成方法
JP2006308960A (ja) * 2005-04-28 2006-11-09 Hitachi Chem Co Ltd マイクロレンズアレイの製造方法、マイクロレンズアレイ用感光性樹脂組成物及びマイクロレンズアレイ用感光性エレメント

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
TAKASAKI T. ET AL.: "Film-gata Hikari Doharo Zairyo", HITACHI KASEI TECHNICAL REPORT, no. 48, January 2007 (2007-01-01), pages 17 - 22 *

Also Published As

Publication number Publication date
US20100278496A1 (en) 2010-11-04
JPWO2009041439A1 (ja) 2011-01-27
TW200925685A (en) 2009-06-16

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