WO2009078341A1 - 光導波路及びその製造方法 - Google Patents

光導波路及びその製造方法 Download PDF

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Publication number
WO2009078341A1
WO2009078341A1 PCT/JP2008/072562 JP2008072562W WO2009078341A1 WO 2009078341 A1 WO2009078341 A1 WO 2009078341A1 JP 2008072562 W JP2008072562 W JP 2008072562W WO 2009078341 A1 WO2009078341 A1 WO 2009078341A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
optical waveguide
forming
core
ultraviolet absorbing
Prior art date
Application number
PCT/JP2008/072562
Other languages
English (en)
French (fr)
Inventor
Masatoshi Yamaguchi
Tomoaki Shibata
Takeshi Oohashi
Atsushi Takahashi
Original Assignee
Hitachi Chemical Company, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Company, Ltd. filed Critical Hitachi Chemical Company, Ltd.
Priority to CN2008801210175A priority Critical patent/CN101903814B/zh
Priority to US12/808,537 priority patent/US8620127B2/en
Priority to EP08861030A priority patent/EP2237089A1/en
Priority to JP2009546237A priority patent/JP5413200B2/ja
Publication of WO2009078341A1 publication Critical patent/WO2009078341A1/ja

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Materials For Photolithography (AREA)

Abstract

　無機充填材を含む樹脂基板上に、少なくとも紫外線吸収層、下部クラッド層、パターニングされたコア層、及び上部クラッド層がこの順に積層された光導波路であって、コア層のパターニングが露光・現像により行われ、かつ紫外線吸収層の厚さが１０～５０μｍであることを特徴とする光導波路、及び無機充填材を含む樹脂基板上に紫外線吸収層を形成する工程、該紫外線吸収層上に下部クラッド層を形成する工程、下部クラッド層上にコア層を形成する工程、コア層を露光して所定形状のパターンを転写する工程、現像してコアパターンを形成する工程、及び該パターニングされたコア層上に上部クラッド層を形成する工程を有する光導波路の製造方法である。本発明によれば、高解像度のコアパターンを有する光導波路を製造することができる。
PCT/JP2008/072562 2007-12-17 2008-12-11 光導波路及びその製造方法 WO2009078341A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN2008801210175A CN101903814B (zh) 2007-12-17 2008-12-11 光波导及其制造方法
US12/808,537 US8620127B2 (en) 2007-12-17 2008-12-11 Optical waveguide and method for manufacturing the same
EP08861030A EP2237089A1 (en) 2007-12-17 2008-12-11 Optical waveguide and method for manufacturing the same
JP2009546237A JP5413200B2 (ja) 2007-12-17 2008-12-11 光導波路及びその製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007325224 2007-12-17
JP2007-325224 2007-12-17

Publications (1)

Publication Number Publication Date
WO2009078341A1 true WO2009078341A1 (ja) 2009-06-25

Family

ID=40795457

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/072562 WO2009078341A1 (ja) 2007-12-17 2008-12-11 光導波路及びその製造方法

Country Status (7)

Country Link
US (1) US8620127B2 (ja)
EP (1) EP2237089A1 (ja)
JP (1) JP5413200B2 (ja)
KR (1) KR101545038B1 (ja)
CN (1) CN101903814B (ja)
TW (1) TWI438574B (ja)
WO (1) WO2009078341A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012053229A (ja) * 2010-08-31 2012-03-15 Hitachi Chem Co Ltd 感光性樹脂組成物、感光性樹脂ワニス、感光性樹脂フィルム、感光性樹脂硬化物、及び可視光導光路
JP2012053228A (ja) * 2010-08-31 2012-03-15 Hitachi Chem Co Ltd 感光性樹脂組成物、感光性樹脂ワニス、感光性樹脂フィルム、感光性樹脂硬化物、及び可視光導光路
US20130223803A1 (en) * 2010-08-24 2013-08-29 Masatoshi Yamaguchi Resin composition for formation of optical waveguide, resin film for formation of optical waveguide which comprises the resin composition, and optical waveguide produced using the resin composition or the resin film
JP2015138094A (ja) * 2014-01-21 2015-07-30 日東電工株式会社 光導波路装置およびその製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI655097B (zh) * 2017-12-27 2019-04-01 財團法人工業技術研究院 光波導元件及其製造方法

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JPS6272195A (ja) * 1985-09-25 1987-04-02 三菱電機株式会社 回路基盤の製造方法
JPH07278516A (ja) * 1994-02-21 1995-10-24 Toray Ind Inc 感光性樹脂版材
JP2000301534A (ja) 1999-02-19 2000-10-31 Hitachi Chem Co Ltd プリプレグ、金属張積層板及びこれらを用いた印刷配線板
JP2004020767A (ja) 2002-06-14 2004-01-22 Hitachi Cable Ltd 光−電気複合基板及びその製造方法
WO2005081025A1 (ja) * 2004-02-25 2005-09-01 Kansai Paint Co., Ltd. 光導波路形成用光硬化性樹脂組成物、光導波路形成用光硬化性ドライフィルム及び光導波路
JP2006058831A (ja) * 2004-03-29 2006-03-02 Jsr Corp 光導波路用感光性樹脂組成物および光導波路
JP2007233318A (ja) * 2006-01-31 2007-09-13 Kyocera Corp 光導波路部材、光配線モジュールおよび電子装置
WO2007125740A1 (ja) * 2006-04-25 2007-11-08 Jsr Corporation 光導波路形成用ドライフィルム、光導波路およびその製造方法

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EP1482336A3 (en) * 1994-07-21 2004-12-22 Sumitomo Electric Industries, Ltd. Optical waveguide module having waveguide substrate made of predetermined material and ferrule made of material different from that of waveguide substrate
JP3258520B2 (ja) * 1994-12-12 2002-02-18 松下電器産業株式会社 光ファイバセンサ及びその製造方法
JPH10288714A (ja) * 1997-04-16 1998-10-27 Fujikura Ltd 光導波路グレーティングおよびその製造方法
JP3019809B2 (ja) * 1997-07-23 2000-03-13 日本電気株式会社 光回路及びその製造方法
AUPP390098A0 (en) * 1998-06-04 1998-07-02 University Of Sydney, The An absorbing layer for minimising substrate exposure during the uv writing of a waveguide grating in addition to birefringent control system
US7022462B1 (en) * 1999-03-03 2006-04-04 Hitachi Chemical Company, Ltd. Photosensitive resin composition, photosensitive element using the same, process for producing resist pattern, and process for producing printed wiring board
JP3948505B2 (ja) * 1999-10-27 2007-07-25 富士フイルム株式会社 平版印刷版用原版
JP2001350051A (ja) 2000-06-06 2001-12-21 Nippon Telegr & Teleph Corp <Ntt> 光導波路モジュール及びその製造方法
US6929899B2 (en) * 2001-01-25 2005-08-16 E. I. Du Pont De Nemours And Company Fluorinated photopolymer composition and waveguide device
US6999668B2 (en) * 2002-01-09 2006-02-14 Matsushita Electric Industrial Co., Ltd. Method for manufacturing optical waveguide device, optical waveguide device, and coherent light source and optical apparatus using the optical waveguide device
US7754803B2 (en) * 2002-02-06 2010-07-13 Sekisui Chemical Co., Ltd. Resin composition
EP1512996A4 (en) * 2002-05-28 2005-11-16 Matsushita Electric Works Ltd MATERIAL FOR JOINT MOUNTING OF OPTICAL CIRCUIT SUBSTRATE / ELECTRICAL CIRCUIT AND MIXED MOUNTING OF OPTICAL CIRCUIT SUBSTRATE / ELECTRICAL CIRCUIT
US6833176B2 (en) * 2003-01-06 2004-12-21 General Electric Company Radiation curable microstructure-bearing articles
SG116641A1 (en) * 2004-04-26 2005-11-28 Matsushita Electric Ind Co Ltd Method and apparatus for recycling ultraviolet curing resin, and method for manufacturing optical recording medium using that recycling method.
KR101394683B1 (ko) 2004-10-07 2014-05-14 히타치가세이가부시끼가이샤 광도파로 형성용 수지 조성물, 광도파로 형성용 수지필름 및 이것을 이용한 광도파로
CN101592759B (zh) * 2004-10-07 2013-06-12 日立化成株式会社 光学材料用树脂组合物、光学材料用树脂薄膜及使用其的光导
US8045829B2 (en) 2005-12-02 2011-10-25 Kyocera Corporation Optical waveguide member, optical wiring board, optical wiring module and method for manufacturing optical waveguide member and optical wiring board
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Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6272195A (ja) * 1985-09-25 1987-04-02 三菱電機株式会社 回路基盤の製造方法
JPH07278516A (ja) * 1994-02-21 1995-10-24 Toray Ind Inc 感光性樹脂版材
JP2000301534A (ja) 1999-02-19 2000-10-31 Hitachi Chem Co Ltd プリプレグ、金属張積層板及びこれらを用いた印刷配線板
JP2004020767A (ja) 2002-06-14 2004-01-22 Hitachi Cable Ltd 光−電気複合基板及びその製造方法
WO2005081025A1 (ja) * 2004-02-25 2005-09-01 Kansai Paint Co., Ltd. 光導波路形成用光硬化性樹脂組成物、光導波路形成用光硬化性ドライフィルム及び光導波路
JP2006058831A (ja) * 2004-03-29 2006-03-02 Jsr Corp 光導波路用感光性樹脂組成物および光導波路
JP2007233318A (ja) * 2006-01-31 2007-09-13 Kyocera Corp 光導波路部材、光配線モジュールおよび電子装置
WO2007125740A1 (ja) * 2006-04-25 2007-11-08 Jsr Corporation 光導波路形成用ドライフィルム、光導波路およびその製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130223803A1 (en) * 2010-08-24 2013-08-29 Masatoshi Yamaguchi Resin composition for formation of optical waveguide, resin film for formation of optical waveguide which comprises the resin composition, and optical waveguide produced using the resin composition or the resin film
US9605143B2 (en) * 2010-08-24 2017-03-28 Hitachi Chemicals Company, Ltd. Resin composition for formation of optical waveguide, resin film for formation of optical waveguide which comprises the resin composition, and optical waveguide produced using the resin composition or the resin film
JP2012053229A (ja) * 2010-08-31 2012-03-15 Hitachi Chem Co Ltd 感光性樹脂組成物、感光性樹脂ワニス、感光性樹脂フィルム、感光性樹脂硬化物、及び可視光導光路
JP2012053228A (ja) * 2010-08-31 2012-03-15 Hitachi Chem Co Ltd 感光性樹脂組成物、感光性樹脂ワニス、感光性樹脂フィルム、感光性樹脂硬化物、及び可視光導光路
JP2015138094A (ja) * 2014-01-21 2015-07-30 日東電工株式会社 光導波路装置およびその製造方法

Also Published As

Publication number Publication date
CN101903814A (zh) 2010-12-01
US20110188827A1 (en) 2011-08-04
TWI438574B (zh) 2014-05-21
TW200937125A (en) 2009-09-01
JP5413200B2 (ja) 2014-02-12
EP2237089A1 (en) 2010-10-06
JPWO2009078341A1 (ja) 2011-04-28
US8620127B2 (en) 2013-12-31
KR101545038B1 (ko) 2015-08-17
KR20100100879A (ko) 2010-09-15
CN101903814B (zh) 2013-06-12

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