WO2009028332A1 - 波面収差計測装置および方法、並びに波面収差調整方法 - Google Patents
波面収差計測装置および方法、並びに波面収差調整方法 Download PDFInfo
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- WO2009028332A1 WO2009028332A1 PCT/JP2008/064523 JP2008064523W WO2009028332A1 WO 2009028332 A1 WO2009028332 A1 WO 2009028332A1 JP 2008064523 W JP2008064523 W JP 2008064523W WO 2009028332 A1 WO2009028332 A1 WO 2009028332A1
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- WO
- WIPO (PCT)
- Prior art keywords
- wavefront aberration
- wavefront
- optical system
- change
- measuring
- Prior art date
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
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- Physics & Mathematics (AREA)
- Geometry (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
被検光学系(20)の波面収差を計測する波面収差計測装置は、計測光を供給する点光源(3a:1~3)と、点光源と光学的に共役な位置に配置された検出面を有する光検出器(7)と、点光源と光検出器との間の光路中に配置されて被検光学系を経た光に波面の変化を付与する波面変化付与部(5)と、光検出器の出力と波面変化付与部において付与される波面の変化とに基づいて、被検光学系の波面収差を計測する計測部(6)とを備える。干渉法を用いることなく、比較的簡素な構成にしたがって被検光学系の波面収差を計測することができる。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200880101961A CN101772696A (zh) | 2007-08-27 | 2008-08-13 | 波面像差测量装置及方法、以及波面像差调整方法 |
EP08828535.8A EP2184596B1 (en) | 2007-08-27 | 2008-08-13 | Wavefront aberration measuring device and method and wavefront aberration adjusting method |
US12/713,598 US8797520B2 (en) | 2007-08-27 | 2010-02-26 | Wavefront aberration measuring device and method and wavefront aberration adjusting method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-219215 | 2007-08-27 | ||
JP2007219215 | 2007-08-27 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/713,598 Continuation US8797520B2 (en) | 2007-08-27 | 2010-02-26 | Wavefront aberration measuring device and method and wavefront aberration adjusting method |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009028332A1 true WO2009028332A1 (ja) | 2009-03-05 |
Family
ID=40387058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/064523 WO2009028332A1 (ja) | 2007-08-27 | 2008-08-13 | 波面収差計測装置および方法、並びに波面収差調整方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8797520B2 (ja) |
EP (1) | EP2184596B1 (ja) |
JP (1) | JP5353112B2 (ja) |
CN (1) | CN101772696A (ja) |
TW (1) | TWI453381B (ja) |
WO (1) | WO2009028332A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2339317A3 (en) * | 2009-12-23 | 2011-07-20 | Foxsemicon Integrated Technology, Inc. | Method and System for Evaluating Light Uniformity Through an Optical Lens |
CN108827595A (zh) * | 2018-03-12 | 2018-11-16 | 西安应用光学研究所 | 基于自适应理论光学系统加工误差的检测装置 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2011129068A1 (ja) * | 2010-04-13 | 2011-10-20 | コニカミノルタオプト株式会社 | 偏心量測定方法 |
CN102564731A (zh) * | 2010-12-16 | 2012-07-11 | 中国科学院西安光学精密机械研究所 | 一种透镜焦距及波前畸变测量装置 |
CN102607719B (zh) * | 2011-06-24 | 2013-07-17 | 北京理工大学 | 基于横向剪切干涉的扩束准直系统波面像差检测装置 |
CN102297759B (zh) * | 2011-06-24 | 2013-03-27 | 北京理工大学 | 基于横向剪切干涉的扩束准直系统波面像差检测方法 |
JP6181084B2 (ja) * | 2012-02-10 | 2017-08-16 | ジョンソン・アンド・ジョンソン・ビジョン・ケア・インコーポレイテッドJohnson & Johnson Vision Care, Inc. | 眼用デバイスの波面を測定するための方法及び装置 |
JP2015087198A (ja) * | 2013-10-30 | 2015-05-07 | キヤノン株式会社 | 計測装置及び計測方法 |
CN107430046B (zh) * | 2015-03-27 | 2019-08-30 | 奥林巴斯株式会社 | 波面计测装置和波面计测方法 |
JP6391550B2 (ja) * | 2015-11-13 | 2018-09-19 | 三菱電機株式会社 | 波面センサ及び波面処理方法 |
RU2623702C1 (ru) * | 2016-07-19 | 2017-06-28 | федеральное государственное бюджетное образовательное учреждение высшего образования "Московский государственный технический университет имени Н.Э. Баумана (национальный исследовательский университет)" (МГТУ им. Н.Э. Баумана) | Устройство и способ определения радиуса кривизны крупногабаритных оптических деталей на основе датчика волнового фронта |
RU2695085C2 (ru) * | 2017-10-24 | 2019-07-19 | Некоммерческое партнерство "Научный центр "Лазерные информационные технологии" НП НЦ "ЛИТ" | Способ определения радиуса кривизны вогнутой оптической сферической поверхности с центральным осевым отверстием методом оптической дальнометрии |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6134430A (ja) * | 1984-04-13 | 1986-02-18 | テイ ア−ル ダブリユ− インコ−ポレ−テツド | アクテイブミラ−波面センサ |
JPH11304641A (ja) * | 1998-04-23 | 1999-11-05 | Canon Inc | 波面収差測定方法及び波面収差測定装置 |
JP2001235373A (ja) * | 2001-01-17 | 2001-08-31 | Mitsubishi Electric Corp | 波面センサ |
JP2007078434A (ja) * | 2005-09-13 | 2007-03-29 | Canon Inc | 三次元位置測定装置、波面収差測定装置および三次元形状測定装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4033696A (en) * | 1975-02-03 | 1977-07-05 | Nippon Kogaku K.K. | Lens meter |
US4682025A (en) * | 1984-04-13 | 1987-07-21 | Trw Inc. | Active mirror wavefront sensor |
JPS61118639A (ja) * | 1984-11-15 | 1986-06-05 | Olympus Optical Co Ltd | 偏心量測定装置 |
JPH0812127B2 (ja) * | 1988-11-11 | 1996-02-07 | オリンパス光学工業株式会社 | 曲率半径測定装置及び方法 |
CA2169141A1 (en) * | 1995-04-07 | 1996-10-08 | Ivan Prikryl | Interferometer having a micromirror |
US5777719A (en) * | 1996-12-23 | 1998-07-07 | University Of Rochester | Method and apparatus for improving vision and the resolution of retinal images |
US20060238710A1 (en) * | 1999-12-03 | 2006-10-26 | Manfred Dick | Method for determining vision defects and for collecting data for correcting vision defects of the eye by interaction of a patient with an examiner and apparatus therefor |
JP4157839B2 (ja) * | 2001-08-30 | 2008-10-01 | ユニバーシティー オブ ロチェスター | 生体眼の網膜領域撮像方法及びそのシステム |
JP4266673B2 (ja) * | 2003-03-05 | 2009-05-20 | キヤノン株式会社 | 収差測定装置 |
DE10360570B4 (de) * | 2003-12-22 | 2006-01-12 | Carl Zeiss | Optisches Meßsystem und optisches Meßverfahren |
JP2005311296A (ja) * | 2004-03-25 | 2005-11-04 | Nikon Corp | 波面収差測定方法、波面収差測定系の校正方法、波面収差測定装置、及び投影露光装置 |
JP4600047B2 (ja) * | 2005-01-13 | 2010-12-15 | 株式会社ニコン | 波面収差測定方法、波面収差測定装置、投影露光装置、投影光学系の製造方法 |
US7445335B2 (en) * | 2006-01-20 | 2008-11-04 | Clarity Medical Systems, Inc. | Sequential wavefront sensor |
US7402785B2 (en) * | 2006-01-30 | 2008-07-22 | Science Applications International Corporation | System and method for correction of turbulence effects on laser or other transmission |
US7443514B2 (en) * | 2006-10-02 | 2008-10-28 | Asml Holding N.V. | Diffractive null corrector employing a spatial light modulator |
-
2008
- 2008-08-13 CN CN200880101961A patent/CN101772696A/zh active Pending
- 2008-08-13 EP EP08828535.8A patent/EP2184596B1/en not_active Not-in-force
- 2008-08-13 WO PCT/JP2008/064523 patent/WO2009028332A1/ja active Application Filing
- 2008-08-21 JP JP2008212434A patent/JP5353112B2/ja not_active Expired - Fee Related
- 2008-08-26 TW TW097132502A patent/TWI453381B/zh not_active IP Right Cessation
-
2010
- 2010-02-26 US US12/713,598 patent/US8797520B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6134430A (ja) * | 1984-04-13 | 1986-02-18 | テイ ア−ル ダブリユ− インコ−ポレ−テツド | アクテイブミラ−波面センサ |
JPH11304641A (ja) * | 1998-04-23 | 1999-11-05 | Canon Inc | 波面収差測定方法及び波面収差測定装置 |
JP2001235373A (ja) * | 2001-01-17 | 2001-08-31 | Mitsubishi Electric Corp | 波面センサ |
JP2007078434A (ja) * | 2005-09-13 | 2007-03-29 | Canon Inc | 三次元位置測定装置、波面収差測定装置および三次元形状測定装置 |
Non-Patent Citations (1)
Title |
---|
See also references of EP2184596A4 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2339317A3 (en) * | 2009-12-23 | 2011-07-20 | Foxsemicon Integrated Technology, Inc. | Method and System for Evaluating Light Uniformity Through an Optical Lens |
CN102109413B (zh) * | 2009-12-23 | 2012-06-13 | 富士迈半导体精密工业(上海)有限公司 | 均匀度测量系统与方法 |
CN108827595A (zh) * | 2018-03-12 | 2018-11-16 | 西安应用光学研究所 | 基于自适应理论光学系统加工误差的检测装置 |
Also Published As
Publication number | Publication date |
---|---|
EP2184596B1 (en) | 2018-11-14 |
TWI453381B (zh) | 2014-09-21 |
JP5353112B2 (ja) | 2013-11-27 |
TW200921062A (en) | 2009-05-16 |
US20100149549A1 (en) | 2010-06-17 |
EP2184596A4 (en) | 2012-12-05 |
US8797520B2 (en) | 2014-08-05 |
JP2009075090A (ja) | 2009-04-09 |
CN101772696A (zh) | 2010-07-07 |
EP2184596A1 (en) | 2010-05-12 |
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