WO2009011382A1 - 垂直磁気記録媒体の製造方法 - Google Patents

垂直磁気記録媒体の製造方法 Download PDF

Info

Publication number
WO2009011382A1
WO2009011382A1 PCT/JP2008/062904 JP2008062904W WO2009011382A1 WO 2009011382 A1 WO2009011382 A1 WO 2009011382A1 JP 2008062904 W JP2008062904 W JP 2008062904W WO 2009011382 A1 WO2009011382 A1 WO 2009011382A1
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic recording
layer
recording medium
vertical magnetic
manufacturing vertical
Prior art date
Application number
PCT/JP2008/062904
Other languages
English (en)
French (fr)
Inventor
Tadashi Yamamoto
Original Assignee
Ulvac, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac, Inc. filed Critical Ulvac, Inc.
Priority to CN2008800244511A priority Critical patent/CN101743588B/zh
Priority to US12/669,214 priority patent/US20100187197A1/en
Priority to JP2009523669A priority patent/JP5280359B2/ja
Publication of WO2009011382A1 publication Critical patent/WO2009011382A1/ja

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855—Coating only part of a support with a magnetic layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
    • G11B5/667—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers including a soft magnetic layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/74—Record carriers characterised by the form, e.g. sheet shaped to wrap around a drum
    • G11B5/82—Disk carriers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B2005/0002—Special dispositions or recording techniques
    • G11B2005/0026—Pulse recording
    • G11B2005/0029—Pulse recording using magnetisation components of the recording layer disposed mainly perpendicularly to the record carrier surface
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/90—Magnetic feature

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Magnetic Record Carriers (AREA)

Abstract

　基板と、この基板上に形成された軟磁性層と、この軟磁性層上に直接、または中間層を挟んで形成され、表面に対して垂直な磁化容易軸を有する磁気記録層とを備え、前記磁気記録層には、前記磁気記録層を複数の記録要素に区画する複数の溝が形成されている垂直磁気記録媒体の製造方法であって、前記磁気記録層の上層に形成したハードマスク層をマスクとして、少なくともハロゲンおよび酸素を含有するガスを用いた反応性イオンエッチングにより前記各溝を形成する工程を備える。
PCT/JP2008/062904 2007-07-18 2008-07-17 垂直磁気記録媒体の製造方法 WO2009011382A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2008800244511A CN101743588B (zh) 2007-07-18 2008-07-17 垂直磁记录介质的制造方法
US12/669,214 US20100187197A1 (en) 2007-07-18 2008-07-17 Method for manufacturing a vertical magnetic recording medium
JP2009523669A JP5280359B2 (ja) 2007-07-18 2008-07-17 垂直磁気記録媒体の製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007187253 2007-07-18
JP2007-187253 2007-07-18

Publications (1)

Publication Number Publication Date
WO2009011382A1 true WO2009011382A1 (ja) 2009-01-22

Family

ID=40259714

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/062904 WO2009011382A1 (ja) 2007-07-18 2008-07-17 垂直磁気記録媒体の製造方法

Country Status (6)

Country Link
US (1) US20100187197A1 (ja)
JP (1) JP5280359B2 (ja)
KR (1) KR20100049003A (ja)
CN (1) CN101743588B (ja)
TW (1) TW200910336A (ja)
WO (1) WO2009011382A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014106996A (ja) * 2012-11-29 2014-06-09 Toshiba Corp 垂直磁気記録媒体、及びその製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6417888B2 (ja) * 2014-11-20 2018-11-07 戸田工業株式会社 非水電解質二次電池用正極活物質粒子粉末とその製造方法、および非水電解質二次電池

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005056547A (ja) * 2003-07-18 2005-03-03 Tdk Corp 磁性材を含む被加工体の加工方法及び磁気記録媒体の製造方法
JP2006278456A (ja) * 2005-03-28 2006-10-12 Ulvac Japan Ltd トンネル接合素子のエッチング加工方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6024885A (en) * 1997-12-08 2000-02-15 Motorola, Inc. Process for patterning magnetic films
JP4012173B2 (ja) * 1999-06-07 2007-11-21 株式会社東芝 多孔質構造体の製造方法、多孔質構造体形成材料、パターン形成方法、パターン形成材料、電気化学セル、および中空糸フィルター
JP2002025032A (ja) * 2000-06-30 2002-01-25 Sony Corp 磁気記録媒体
US6762911B2 (en) * 2002-02-11 2004-07-13 Headway Technologies, Inc. Combination type thin film magnetic head and method of manufacturing the same
US7101633B2 (en) * 2002-03-06 2006-09-05 Tdk Corporation Electroplated magnetic thin film, method of manufacturing the same, electroplating bath and thin film magnetic head
US6821907B2 (en) * 2002-03-06 2004-11-23 Applied Materials Inc Etching methods for a magnetic memory cell stack
US6942813B2 (en) * 2003-03-05 2005-09-13 Applied Materials, Inc. Method of etching magnetic and ferroelectric materials using a pulsed bias source
JP2004332045A (ja) * 2003-05-07 2004-11-25 Renesas Technology Corp 多層膜材料のドライエッチング方法
US7405162B2 (en) * 2004-09-22 2008-07-29 Tokyo Electron Limited Etching method and computer-readable storage medium
JP2006127681A (ja) * 2004-10-29 2006-05-18 Hitachi Ltd 磁気記録媒体及びその製造方法、磁気記録再生装置
JP2006286105A (ja) * 2005-03-31 2006-10-19 Fujitsu Ltd 磁気記録媒体および磁気記憶装置
JP2007035164A (ja) * 2005-07-27 2007-02-08 Toshiba Corp 凹凸パターン基板およびその製造方法、磁気記録媒体、ならびに磁気記録装置
JP4675722B2 (ja) * 2005-09-02 2011-04-27 株式会社東芝 磁気記録媒体
JP4469774B2 (ja) * 2005-09-27 2010-05-26 株式会社東芝 磁気記録媒体および磁気記録装置
JP2006252772A (ja) * 2006-06-23 2006-09-21 Tdk Corp 磁気記録媒体の製造方法
JP2008159105A (ja) * 2006-12-21 2008-07-10 Tdk Corp 強磁性共鳴を用いる磁気記録方法及び該方法に用いる薄膜磁気ヘッド
US7758981B2 (en) * 2007-07-25 2010-07-20 Hitachi Global Storage Technologies Netherlands B.V. Method for making a master disk for nanoimprinting patterned magnetic recording disks, master disk made by the method, and disk imprinted by the master disk
US8003236B2 (en) * 2008-06-17 2011-08-23 Hitachi Global Storage Technologies Netherlands B.V. Method for making a master mold with high bit-aspect-ratio for nanoimprinting patterned magnetic recording disks, master mold made by the method, and disk imprinted by the master mold
US7976715B2 (en) * 2008-06-17 2011-07-12 Hitachi Global Storage Technologies Netherlands B.V. Method using block copolymers for making a master mold with high bit-aspect-ratio for nanoimprinting patterned magnetic recording disks

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005056547A (ja) * 2003-07-18 2005-03-03 Tdk Corp 磁性材を含む被加工体の加工方法及び磁気記録媒体の製造方法
JP2006278456A (ja) * 2005-03-28 2006-10-12 Ulvac Japan Ltd トンネル接合素子のエッチング加工方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014106996A (ja) * 2012-11-29 2014-06-09 Toshiba Corp 垂直磁気記録媒体、及びその製造方法

Also Published As

Publication number Publication date
KR20100049003A (ko) 2010-05-11
CN101743588B (zh) 2012-07-18
CN101743588A (zh) 2010-06-16
JP5280359B2 (ja) 2013-09-04
JPWO2009011382A1 (ja) 2010-09-24
TW200910336A (en) 2009-03-01
US20100187197A1 (en) 2010-07-29

Similar Documents

Publication Publication Date Title
WO2012058377A3 (en) Methods for etching oxide layers using process gas pulsing
SG196834A1 (en) Magnetic recording medium and manufacturing method of the magnetic recording medium
WO2008016650A3 (en) Methods of forming carbon-containing silicon epitaxial layers
WO2007109522A3 (en) Methods for etching a dielectric barrier layer with high selectivity
SG164353A1 (en) Single-sided perpendicular magnetic recording medium
WO2009085672A3 (en) Fabrication of a silicon structure and deep silicon etch with profile control
JP2010056579A5 (ja)
WO2007106864A3 (en) Computer-implemented methods, carrier media, and systems for creating a metrology target structure design for a reticle layout
SG159491A1 (en) Method for manufacturing magnetic recording medium and magnetic recording medium
WO2006004693A3 (en) Method for bilayer resist plasma etch
TW200741885A (en) Method of fabricating a recess channel array transistor
SG128539A1 (en) Tunable magnetic recording medium and its fabricating method
PH12013000242A1 (en) Glass substrate for magnetic recording medium, and method for manufacturing the same
WO2011133674A3 (en) Changing the composition and/or density of gases inside of assemblies during manufacturing
WO2009029859A3 (en) Nanodisks and methods of fabrication of nanodisks
TW200641829A (en) Perpendicular magnetic recording disk and manufacturing method thereof
WO2009038208A1 (ja) 磁気記録媒体の製造方法および磁気記録再生装置
WO2009017016A1 (ja) 磁気記録媒体の製造方法および磁気記録再生装置
WO2009011382A1 (ja) 垂直磁気記録媒体の製造方法
WO2011041140A3 (en) Method of filling deep trench in a substrate
SG148956A1 (en) Patterned magnetic media for magnetic recording
WO2007001653A3 (en) Reticle alignment technique
WO2004071153A3 (en) Method of forming sub-micron-size structures over a substrate
SG162707A1 (en) Magnetic layering for bit-patterned media
WO2008096752A1 (ja) エッチング方法および記憶媒体

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880024451.1

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08791258

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2009523669

Country of ref document: JP

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 20107000722

Country of ref document: KR

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 12669214

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08791258

Country of ref document: EP

Kind code of ref document: A1