WO2009004797A1 - 熱インプリント用樹脂、熱インプリント用樹脂溶液、熱インプリント用射出成型体、熱インプリント用薄膜およびその製造方法 - Google Patents

熱インプリント用樹脂、熱インプリント用樹脂溶液、熱インプリント用射出成型体、熱インプリント用薄膜およびその製造方法 Download PDF

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Publication number
WO2009004797A1
WO2009004797A1 PCT/JP2008/001732 JP2008001732W WO2009004797A1 WO 2009004797 A1 WO2009004797 A1 WO 2009004797A1 JP 2008001732 W JP2008001732 W JP 2008001732W WO 2009004797 A1 WO2009004797 A1 WO 2009004797A1
Authority
WO
WIPO (PCT)
Prior art keywords
resin
thermal imprinting
thin film
imprinting
thermal
Prior art date
Application number
PCT/JP2008/001732
Other languages
English (en)
French (fr)
Inventor
Takuro Satsuka
Yoshiaki Takaya
Takahisa Kusuura
Anupam Mitra
Original Assignee
Maruzen Petrochemical Co., Ltd.
Scivax Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Maruzen Petrochemical Co., Ltd., Scivax Corporation filed Critical Maruzen Petrochemical Co., Ltd.
Priority to US12/667,345 priority Critical patent/US20100189985A1/en
Priority to EP08790131A priority patent/EP2163565A4/en
Publication of WO2009004797A1 publication Critical patent/WO2009004797A1/ja

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F32/00—Homopolymers and copolymers of cyclic compounds having no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system
    • C08F32/08—Homopolymers and copolymers of cyclic compounds having no unsaturated aliphatic radicals in a side chain, and having one or more carbon-to-carbon double bonds in a carbocyclic ring system having two condensed rings

Abstract

　熱インプリントによる微細加工において、パーティクル状物の発生を抑制するために、耐熱劣化性に優れ、かつ流動化時の樹脂弾性率が低く微細パターン転写性の良好な熱インプリント用樹脂、当該樹脂を用いた熱インプリント用樹脂溶液、当該樹脂を用いた熱インプリント用射出成型体、当該樹脂を用いた熱インプリント用薄膜およびその製造方法を提供する。空気中、昇温速度5°C/minでの示差走査熱量計測定において、酸化に伴う発熱ピークの発熱開始温度（酸化開始温度）が、当該樹脂のガラス転移温度＋35°C以上であり、窒素気流中、周波数1rad/secでの動的粘弾性率測定おいて、樹脂のガラス転移温度＋35°Cでの複素弾性率が0.24MPa未満である熱インプリント用樹脂。また、これを用いた熱インプリント用樹脂溶液、熱インプリント用射出成型体、熱インプリント用薄膜およびその製造方法。
PCT/JP2008/001732 2007-07-04 2008-07-02 熱インプリント用樹脂、熱インプリント用樹脂溶液、熱インプリント用射出成型体、熱インプリント用薄膜およびその製造方法 WO2009004797A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/667,345 US20100189985A1 (en) 2007-07-04 2008-07-02 Thermal-imprinting resin, thermal-imprinting-resin solution, thermal-imprinting injection-molded body, thermal-imprinting thin film and production method thereof
EP08790131A EP2163565A4 (en) 2007-07-04 2008-07-02 THERMAL PRINTING RESIN, RESIN SOLUTION FOR THERMAL PRINTING, INJECTION MOLDED BODY FOR THERMAL PRINTING, THIN FILM FOR THERMAL PRINTING, AND PRODUCTION METHOD FOR PRODUCING THE THIN FILM

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-176062 2007-07-04
JP2007176062A JP5331315B2 (ja) 2007-07-04 2007-07-04 熱インプリント方法

Publications (1)

Publication Number Publication Date
WO2009004797A1 true WO2009004797A1 (ja) 2009-01-08

Family

ID=40225862

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/001732 WO2009004797A1 (ja) 2007-07-04 2008-07-02 熱インプリント用樹脂、熱インプリント用樹脂溶液、熱インプリント用射出成型体、熱インプリント用薄膜およびその製造方法

Country Status (5)

Country Link
US (1) US20100189985A1 (ja)
EP (1) EP2163565A4 (ja)
JP (1) JP5331315B2 (ja)
KR (1) KR20100044198A (ja)
WO (1) WO2009004797A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5584241B2 (ja) * 2012-02-27 2014-09-03 株式会社東芝 半導体製造装置及び半導体デバイスの製造方法
WO2013160931A1 (en) 2012-04-23 2013-10-31 Empire Technology Development Llc Methods and systems for collecting thermoplastic resins
JP2016002731A (ja) * 2014-06-18 2016-01-12 住友ベークライト株式会社 積層体

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5772905A (en) 1995-11-15 1998-06-30 Regents Of The University Of Minnesota Nanoimprint lithography
JP2003082017A (ja) 2001-09-12 2003-03-19 Maruzen Petrochem Co Ltd 環状オレフィン系共重合体の製造方法
WO2007037085A1 (ja) * 2005-09-27 2007-04-05 Scivax Corporation 熱インプリント用樹脂
WO2007066712A1 (ja) * 2005-12-09 2007-06-14 Scivax Corporation 熱インプリント用樹脂

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03188113A (ja) * 1989-12-15 1991-08-16 Mitsui Petrochem Ind Ltd 変性環状オレフィン系ランダム共重合体
JPH1060048A (ja) * 1996-08-23 1998-03-03 Nippon Zeon Co Ltd 環状オレフィン系重合体及びその製造方法
JP2005330465A (ja) * 2004-04-21 2005-12-02 Mitsui Chemicals Inc エチレン・環状オレフィン共重合体およびその光学部品
JP2006182011A (ja) * 2004-11-30 2006-07-13 Asahi Glass Co Ltd 光硬化性樹脂成型用モールドおよび該モールドを用いる硬化物の製造方法
US20090137771A1 (en) * 2005-08-11 2009-05-28 Satoshi Moriyama Resin composition

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5772905A (en) 1995-11-15 1998-06-30 Regents Of The University Of Minnesota Nanoimprint lithography
JP2003082017A (ja) 2001-09-12 2003-03-19 Maruzen Petrochem Co Ltd 環状オレフィン系共重合体の製造方法
WO2007037085A1 (ja) * 2005-09-27 2007-04-05 Scivax Corporation 熱インプリント用樹脂
WO2007066712A1 (ja) * 2005-12-09 2007-06-14 Scivax Corporation 熱インプリント用樹脂

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
J. MATER. CHEM., vol. 10, 2000, pages 2634
See also references of EP2163565A4 *

Also Published As

Publication number Publication date
JP5331315B2 (ja) 2013-10-30
KR20100044198A (ko) 2010-04-29
EP2163565A4 (en) 2010-10-27
JP2009013277A (ja) 2009-01-22
EP2163565A1 (en) 2010-03-17
US20100189985A1 (en) 2010-07-29

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