WO2008129988A1 - マイクロミラー素子及びマイクロミラーアレイ - Google Patents

マイクロミラー素子及びマイクロミラーアレイ Download PDF

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Publication number
WO2008129988A1
WO2008129988A1 PCT/JP2008/057364 JP2008057364W WO2008129988A1 WO 2008129988 A1 WO2008129988 A1 WO 2008129988A1 JP 2008057364 W JP2008057364 W JP 2008057364W WO 2008129988 A1 WO2008129988 A1 WO 2008129988A1
Authority
WO
WIPO (PCT)
Prior art keywords
movable beam
micromirror
frame section
array
end fixed
Prior art date
Application number
PCT/JP2008/057364
Other languages
English (en)
French (fr)
Inventor
Mitsuo Usui
Shingo Uchiyama
Fusao Shimokawa
Etsu Hashimoto
Johji Yamaguchi
Tohru Matsuura
Toshifumi Konishi
Original Assignee
Nippon Telegraph And Telephone Corporation
Ntt Advanced Technology Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph And Telephone Corporation, Ntt Advanced Technology Corporation filed Critical Nippon Telegraph And Telephone Corporation
Priority to CA2682795A priority Critical patent/CA2682795C/en
Priority to US12/594,578 priority patent/US8599460B2/en
Priority to JP2009510845A priority patent/JP4995899B2/ja
Publication of WO2008129988A1 publication Critical patent/WO2008129988A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

　ミラー基板（１０８）の枠部（１８１）の内側には、一端が枠部（１８１）に固定された可動梁（１８２ａ）及び可動梁（１８２ｂ）を備えている。可動梁（１８２ａ）及び可動梁（１８２ｂ）は、各々の一端が枠部（１８１）の内側の対向する２つの辺の各々に固定され、上記２つの辺の対向する方向の同じ線上に、所定の距離離間して整列した状態とされている。また、可動梁（１８２ａ）及び可動梁（１８２ｂ）は、各々の他端が、ミラー基板（１０８）の法線方向に変位可能とされ、片持ち梁構造とされている。また、可動梁（１８２ａ）及び可動梁（１８２ｂ）の間には、一対の連結部（１０９ａ，１０９ｂ）により連結されてミラー（１８３）が配置されている。
PCT/JP2008/057364 2007-04-19 2008-04-15 マイクロミラー素子及びマイクロミラーアレイ WO2008129988A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CA2682795A CA2682795C (en) 2007-04-19 2008-04-15 Micromirror element and micromirror array
US12/594,578 US8599460B2 (en) 2007-04-19 2008-04-15 Micromirror device and micromirror array
JP2009510845A JP4995899B2 (ja) 2007-04-19 2008-04-15 マイクロミラー素子及びマイクロミラーアレイ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-110436 2007-04-19
JP2007110436 2007-04-19

Publications (1)

Publication Number Publication Date
WO2008129988A1 true WO2008129988A1 (ja) 2008-10-30

Family

ID=39875516

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/057364 WO2008129988A1 (ja) 2007-04-19 2008-04-15 マイクロミラー素子及びマイクロミラーアレイ

Country Status (4)

Country Link
US (1) US8599460B2 (ja)
JP (1) JP4995899B2 (ja)
CA (4) CA2764403C (ja)
WO (1) WO2008129988A1 (ja)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010185931A (ja) * 2009-02-10 2010-08-26 Nippon Telegr & Teleph Corp <Ntt> Ｍｅｍｓ素子の製造方法およびｍｅｍｓ素子
JP2011031344A (ja) * 2009-08-03 2011-02-17 Nippon Telegr & Teleph Corp <Ntt> マイクロメカニカル構造体およびその製造方法
JP2011174977A (ja) * 2010-02-23 2011-09-08 Nippon Telegr & Teleph Corp <Ntt> マイクロミラーアレイ
JP2011257680A (ja) * 2010-06-11 2011-12-22 Nippon Telegr & Teleph Corp <Ntt> マイクロミラー素子、ミラーアレイおよびその製造方法
JP2013083741A (ja) * 2011-10-07 2013-05-09 Nippon Telegr & Teleph Corp <Ntt> マイクロミラー素子
JP2013088492A (ja) * 2011-10-14 2013-05-13 Nippon Telegr & Teleph Corp <Ntt> マイクロミラー素子およびマイクロミラーアレイ
JP2013101377A (ja) * 2013-01-08 2013-05-23 Nippon Telegr & Teleph Corp <Ntt> マイクロミラー素子およびマイクロミラーアレイ
JP2013182029A (ja) * 2012-02-29 2013-09-12 Nippon Telegr & Teleph Corp <Ntt> ミラー装置および波長選択スイッチ
WO2014010243A1 (ja) * 2012-07-13 2014-01-16 住友精密工業株式会社 半導体装置
JP2015175914A (ja) * 2014-03-13 2015-10-05 日本電信電話株式会社 マイクロミラー素子およびミラーアレイ

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013195940A (ja) * 2012-03-22 2013-09-30 Hitachi Media Electoronics Co Ltd 光走査ミラーデバイス及びその制御方法、並びに、当該デバイスを利用した画像描画装置
JP2013200337A (ja) * 2012-03-23 2013-10-03 Stanley Electric Co Ltd 光偏向器
FR3046153A1 (fr) * 2015-12-24 2017-06-30 Commissariat Energie Atomique Systeme presentant une densite surfacique de dispositfs microelectromecaniques et/ou nanoelectromecaniques augmentee

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060222312A1 (en) * 2005-02-16 2006-10-05 Mohiuddin Mala Articulated MEMs structures
JP2006524349A (ja) * 2003-04-24 2006-10-26 メトコネックス カナダ インコーポレイティッド 高フィルファクターアレイのための、連接式サスペンション構造を有する微小電子機械システム２次元ミラー

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3579015B2 (ja) 2000-10-10 2004-10-20 日本電信電話株式会社 マイクロミラー装置およびその製造方法
JP4036643B2 (ja) * 2001-12-21 2008-01-23 オリンパス株式会社 光偏向器及び光偏向器アレイ
JP4262574B2 (ja) * 2003-10-30 2009-05-13 オリンパス株式会社 光偏向器
KR100624436B1 (ko) * 2004-10-19 2006-09-15 삼성전자주식회사 2축 액츄에이터 및 그 제조방법

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006524349A (ja) * 2003-04-24 2006-10-26 メトコネックス カナダ インコーポレイティッド 高フィルファクターアレイのための、連接式サスペンション構造を有する微小電子機械システム２次元ミラー
US20060222312A1 (en) * 2005-02-16 2006-10-05 Mohiuddin Mala Articulated MEMs structures

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010185931A (ja) * 2009-02-10 2010-08-26 Nippon Telegr & Teleph Corp <Ntt> Ｍｅｍｓ素子の製造方法およびｍｅｍｓ素子
JP2011031344A (ja) * 2009-08-03 2011-02-17 Nippon Telegr & Teleph Corp <Ntt> マイクロメカニカル構造体およびその製造方法
JP2011174977A (ja) * 2010-02-23 2011-09-08 Nippon Telegr & Teleph Corp <Ntt> マイクロミラーアレイ
JP2011257680A (ja) * 2010-06-11 2011-12-22 Nippon Telegr & Teleph Corp <Ntt> マイクロミラー素子、ミラーアレイおよびその製造方法
JP2013083741A (ja) * 2011-10-07 2013-05-09 Nippon Telegr & Teleph Corp <Ntt> マイクロミラー素子
JP2013088492A (ja) * 2011-10-14 2013-05-13 Nippon Telegr & Teleph Corp <Ntt> マイクロミラー素子およびマイクロミラーアレイ
JP2013182029A (ja) * 2012-02-29 2013-09-12 Nippon Telegr & Teleph Corp <Ntt> ミラー装置および波長選択スイッチ
WO2014010243A1 (ja) * 2012-07-13 2014-01-16 住友精密工業株式会社 半導体装置
JPWO2014010243A1 (ja) * 2012-07-13 2016-06-20 住友精密工業株式会社 半導体装置
JP2013101377A (ja) * 2013-01-08 2013-05-23 Nippon Telegr & Teleph Corp <Ntt> マイクロミラー素子およびマイクロミラーアレイ
JP2015175914A (ja) * 2014-03-13 2015-10-05 日本電信電話株式会社 マイクロミラー素子およびミラーアレイ

Also Published As

Publication number Publication date
CA2764403C (en) 2014-02-11
CA2682795A1 (en) 2008-10-30
CA2764402A1 (en) 2008-10-30
US8599460B2 (en) 2013-12-03
US20100118372A1 (en) 2010-05-13
JP4995899B2 (ja) 2012-08-08
CA2764747C (en) 2014-02-11
CA2764747A1 (en) 2008-10-30
CA2682795C (en) 2012-09-04
CA2764402C (en) 2014-02-11
CA2764403A1 (en) 2008-10-30
JPWO2008129988A1 (ja) 2010-07-22

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