WO2008096524A1 - レーザ式ガス分析計 - Google Patents
レーザ式ガス分析計 Download PDFInfo
- Publication number
- WO2008096524A1 WO2008096524A1 PCT/JP2008/000125 JP2008000125W WO2008096524A1 WO 2008096524 A1 WO2008096524 A1 WO 2008096524A1 JP 2008000125 W JP2008000125 W JP 2008000125W WO 2008096524 A1 WO2008096524 A1 WO 2008096524A1
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- WIPO (PCT)
- Prior art keywords
- laser
- drive signal
- signal
- wavelength
- gas analyzer
- Prior art date
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
- G01N2021/396—Type of laser source
- G01N2021/399—Diode laser
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
周波数変調方式のレーザ式ガス分析計において、光源部204は、測定対象ガスの吸収波長を走査するようにレーザの発光波長を可変とする波長走査駆動信号と発光波長を変調する高周波変調信号とを合成してレーザ駆動信号として出力するレーザ駆動信号発生部204sと、電流制御部204cと、レーザ素子204eと、サーミスタ204f,ペルチェ素子204g,温度制御部204dと、を備え、信号処理回路208は、受光部207の出力信号から変調信号の2倍周波数成分の振幅を検出する同期検波回路208b、演算部208eを備える。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008800101537A CN101646934B (zh) | 2007-02-02 | 2008-02-01 | 激光式气体分析仪 |
EP08702857.7A EP2133686B1 (en) | 2007-02-02 | 2008-02-01 | Laser gas analyzer |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007023830 | 2007-02-02 | ||
JP2007-023830 | 2007-02-02 | ||
JP2007192775 | 2007-07-25 | ||
JP2007-192775 | 2007-07-25 | ||
JP2007-329645 | 2007-12-21 | ||
JP2007329645A JP5176535B2 (ja) | 2007-02-02 | 2007-12-21 | レーザ式ガス分析計 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008096524A1 true WO2008096524A1 (ja) | 2008-08-14 |
Family
ID=39681438
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/000125 WO2008096524A1 (ja) | 2007-02-02 | 2008-02-01 | レーザ式ガス分析計 |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP2133686B1 (ja) |
JP (1) | JP5176535B2 (ja) |
CN (1) | CN101646934B (ja) |
WO (1) | WO2008096524A1 (ja) |
Cited By (7)
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JP2010266303A (ja) * | 2009-05-14 | 2010-11-25 | Fuji Electric Systems Co Ltd | レーザ式ガス分析計 |
JP2011191164A (ja) * | 2010-03-15 | 2011-09-29 | Fuji Electric Co Ltd | レーザ式ガス分析計 |
JP2012108095A (ja) * | 2010-08-03 | 2012-06-07 | Fuji Electric Co Ltd | 多成分用レーザ式ガス分析計 |
WO2012160746A1 (ja) * | 2011-05-25 | 2012-11-29 | 富士電機株式会社 | 光源装置、分析装置、及び光生成方法 |
CN109900656A (zh) * | 2019-04-12 | 2019-06-18 | 西南石油大学 | 一种可精确定位的红外甲烷测量装置及测量方法 |
CN111721736A (zh) * | 2019-03-22 | 2020-09-29 | 株式会社岛津制作所 | 气体浓度测量装置的校正方法 |
US11169272B2 (en) | 2017-07-14 | 2021-11-09 | Neolund Ab | High spectral resolution Scheimpflug LIDAR |
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JP2010216959A (ja) * | 2009-03-16 | 2010-09-30 | Fuji Electric Systems Co Ltd | レーザ式ガス分析装置 |
JP5483161B2 (ja) * | 2009-06-11 | 2014-05-07 | 横河電機株式会社 | レーザ式ガス分析装置のゼロ・スパン調整方法 |
EP2569663A4 (en) * | 2010-05-10 | 2017-11-15 | Zolo Technologies, Inc. | Time-synchronized tdlas measurements of pressure and temperature in a gas turbine engine |
US8264690B2 (en) * | 2010-09-09 | 2012-09-11 | Adelphi University | Method and apparatus for the detection of trace gas species using multiple line integrated absorption spectroscopy |
US8395777B2 (en) | 2010-09-09 | 2013-03-12 | Adelphi University | Method and apparatus for trace gas detection using integrated wavelength modulated spectra across multiple lines |
JP5915089B2 (ja) * | 2011-11-01 | 2016-05-11 | 富士電機株式会社 | レーザ式ガス分析計 |
JP6028889B2 (ja) * | 2011-11-28 | 2016-11-24 | 富士電機株式会社 | レーザ式ガス分析計 |
WO2014018939A2 (en) | 2012-07-27 | 2014-01-30 | Thorlabs, Inc. | Amplified widely tunable short cavity laser |
JP5234381B1 (ja) * | 2012-11-20 | 2013-07-10 | 富士電機株式会社 | レーザ式酸素ガス分析計 |
JP5907442B2 (ja) | 2013-01-11 | 2016-04-26 | 富士電機株式会社 | レーザ式ガス分析計 |
US9774166B2 (en) | 2013-03-15 | 2017-09-26 | Praevium Research, Inc. | Widely tunable swept source |
RU2528129C1 (ru) * | 2013-04-18 | 2014-09-10 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Тамбовский государственный технический университет" ФГБОУ ВПО ТГТУ | Газоанализатор |
EP2899533A1 (de) * | 2014-01-22 | 2015-07-29 | Siemens Aktiengesellschaft | Verfahren zur Wellenlängenmodulationsspektroskopie mit einem Filter für das demodulierte Messsignal und das simulierte Signal |
CN104316493B (zh) * | 2014-11-04 | 2017-07-07 | 中国科学院长春光学精密机械与物理研究所 | 时分复用差分调制酒驾激光检测方法及装置 |
JP6668841B2 (ja) * | 2016-03-14 | 2020-03-18 | 富士電機株式会社 | レーザ式ガス分析計 |
JP6513762B2 (ja) | 2016-12-15 | 2019-05-15 | 株式会社堀場製作所 | 分析装置、分析装置用プログラム及び分析方法 |
JP6496341B2 (ja) * | 2017-03-22 | 2019-04-03 | スチールプランテック株式会社 | ガス成分測定装置 |
CN109596538B (zh) | 2017-10-03 | 2023-08-25 | 株式会社堀场制作所 | 分析装置和分析方法 |
US20200238438A1 (en) * | 2017-10-17 | 2020-07-30 | Mitsubishi Electric Corporation | Laser processing machine |
EP3543682B1 (de) * | 2018-03-22 | 2020-04-29 | Axetris AG | Verfahren zum betreiben eines optischen messsystems zur messung der konzentration einer gaskomponente in einem messgas |
JP6791211B2 (ja) * | 2018-06-28 | 2020-11-25 | 横河電機株式会社 | 掃引信号発生装置 |
CN111351768B (zh) * | 2018-12-20 | 2022-10-18 | 中国科学院合肥物质科学研究院 | 一种利用扫描振镜的多组分气体激光探测装置及方法 |
EP3674690B1 (en) | 2018-12-26 | 2023-10-18 | HORIBA, Ltd. | Analysis device, program for an analysis device and analysis method |
Citations (9)
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JPH02677B2 (ja) * | 1979-12-13 | 1990-01-09 | Fujitsu Ltd | |
JPH0616012B2 (ja) * | 1984-05-31 | 1994-03-02 | 富士通株式会社 | ガス濃度測定方式 |
JPH07151681A (ja) | 1993-11-30 | 1995-06-16 | Anritsu Corp | ガス濃度測定装置 |
JPH11142328A (ja) * | 1997-11-07 | 1999-05-28 | Japan Radio Co Ltd | 同位体分析装置 |
JPH11211658A (ja) * | 1998-01-28 | 1999-08-06 | Nippon Sanso Kk | ガス中の不純物の分光分析方法 |
JP2001235418A (ja) | 2000-02-24 | 2001-08-31 | Anritsu Corp | ガス濃度測定装置 |
JP2004361129A (ja) * | 2003-06-02 | 2004-12-24 | Tokyo Electric Power Co Inc:The | 多点型ガス濃度検出方法 |
JP3782473B2 (ja) * | 1994-04-08 | 2006-06-07 | 三菱重工業株式会社 | ガス濃度測定装置 |
JP6072804B2 (ja) * | 2011-09-14 | 2017-02-01 | ボストン サイエンティフィック サイムド,インコーポレイテッドBoston Scientific Scimed,Inc. | イオン伝導性バルーンを備えたアブレーション装置 |
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US4594511A (en) * | 1985-03-29 | 1986-06-10 | Sri International | Method and apparatus for double modulation spectroscopy |
JPS6423142A (en) * | 1987-07-17 | 1989-01-25 | Fujitsu Ltd | Detector for sulfurous acid gas |
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2007
- 2007-12-21 JP JP2007329645A patent/JP5176535B2/ja active Active
-
2008
- 2008-02-01 WO PCT/JP2008/000125 patent/WO2008096524A1/ja active Application Filing
- 2008-02-01 EP EP08702857.7A patent/EP2133686B1/en active Active
- 2008-02-01 CN CN2008800101537A patent/CN101646934B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH02677B2 (ja) * | 1979-12-13 | 1990-01-09 | Fujitsu Ltd | |
JPH0616012B2 (ja) * | 1984-05-31 | 1994-03-02 | 富士通株式会社 | ガス濃度測定方式 |
JPH07151681A (ja) | 1993-11-30 | 1995-06-16 | Anritsu Corp | ガス濃度測定装置 |
JP3051808B2 (ja) * | 1993-11-30 | 2000-06-12 | アンリツ株式会社 | ガス濃度測定装置 |
JP3782473B2 (ja) * | 1994-04-08 | 2006-06-07 | 三菱重工業株式会社 | ガス濃度測定装置 |
JPH11142328A (ja) * | 1997-11-07 | 1999-05-28 | Japan Radio Co Ltd | 同位体分析装置 |
JPH11211658A (ja) * | 1998-01-28 | 1999-08-06 | Nippon Sanso Kk | ガス中の不純物の分光分析方法 |
JP2001235418A (ja) | 2000-02-24 | 2001-08-31 | Anritsu Corp | ガス濃度測定装置 |
JP2004361129A (ja) * | 2003-06-02 | 2004-12-24 | Tokyo Electric Power Co Inc:The | 多点型ガス濃度検出方法 |
JP6072804B2 (ja) * | 2011-09-14 | 2017-02-01 | ボストン サイエンティフィック サイムド,インコーポレイテッドBoston Scientific Scimed,Inc. | イオン伝導性バルーンを備えたアブレーション装置 |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010266303A (ja) * | 2009-05-14 | 2010-11-25 | Fuji Electric Systems Co Ltd | レーザ式ガス分析計 |
JP2011191164A (ja) * | 2010-03-15 | 2011-09-29 | Fuji Electric Co Ltd | レーザ式ガス分析計 |
JP2012108095A (ja) * | 2010-08-03 | 2012-06-07 | Fuji Electric Co Ltd | 多成分用レーザ式ガス分析計 |
WO2012160746A1 (ja) * | 2011-05-25 | 2012-11-29 | 富士電機株式会社 | 光源装置、分析装置、及び光生成方法 |
US8654801B2 (en) | 2011-05-25 | 2014-02-18 | Fuji Electric Co., Ltd. | Light source device, analysis device, and light generation method |
US11169272B2 (en) | 2017-07-14 | 2021-11-09 | Neolund Ab | High spectral resolution Scheimpflug LIDAR |
US11536849B2 (en) | 2017-07-14 | 2022-12-27 | Neolund Ab | High resolution molecular LIDAR |
US11768295B2 (en) | 2017-07-14 | 2023-09-26 | Beamonics Ab | High spectral resolution Scheimpflug LIDAR |
CN111721736A (zh) * | 2019-03-22 | 2020-09-29 | 株式会社岛津制作所 | 气体浓度测量装置的校正方法 |
CN111721736B (zh) * | 2019-03-22 | 2023-08-08 | 株式会社岛津制作所 | 气体浓度测量装置的校正方法 |
CN109900656A (zh) * | 2019-04-12 | 2019-06-18 | 西南石油大学 | 一种可精确定位的红外甲烷测量装置及测量方法 |
Also Published As
Publication number | Publication date |
---|---|
EP2133686A4 (en) | 2016-01-20 |
CN101646934A (zh) | 2010-02-10 |
JP2009047677A (ja) | 2009-03-05 |
CN101646934B (zh) | 2011-02-09 |
JP5176535B2 (ja) | 2013-04-03 |
EP2133686A1 (en) | 2009-12-16 |
EP2133686B1 (en) | 2019-12-04 |
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