WO2008096524A1 - レーザ式ガス分析計 - Google Patents

レーザ式ガス分析計 Download PDF

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Publication number
WO2008096524A1
WO2008096524A1 PCT/JP2008/000125 JP2008000125W WO2008096524A1 WO 2008096524 A1 WO2008096524 A1 WO 2008096524A1 JP 2008000125 W JP2008000125 W JP 2008000125W WO 2008096524 A1 WO2008096524 A1 WO 2008096524A1
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WO
WIPO (PCT)
Prior art keywords
laser
drive signal
signal
wavelength
gas analyzer
Prior art date
Application number
PCT/JP2008/000125
Other languages
English (en)
French (fr)
Inventor
Noritomo Hirayama
Kazuhiro Koizumi
Takashi Iida
Yusuke Nakamura
Hideo Kanai
Original Assignee
Fuji Electric Systems Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Systems Co., Ltd. filed Critical Fuji Electric Systems Co., Ltd.
Priority to CN2008800101537A priority Critical patent/CN101646934B/zh
Priority to EP08702857.7A priority patent/EP2133686B1/en
Publication of WO2008096524A1 publication Critical patent/WO2008096524A1/ja

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/396—Type of laser source
    • G01N2021/399—Diode laser

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

　周波数変調方式のレーザ式ガス分析計において、光源部２０４は、測定対象ガスの吸収波長を走査するようにレーザの発光波長を可変とする波長走査駆動信号と発光波長を変調する高周波変調信号とを合成してレーザ駆動信号として出力するレーザ駆動信号発生部２０４ｓと、電流制御部２０４ｃと、レーザ素子２０４ｅと、サーミスタ２０４ｆ，ペルチェ素子２０４ｇ，温度制御部２０４ｄと、を備え、信号処理回路２０８は、受光部２０７の出力信号から変調信号の２倍周波数成分の振幅を検出する同期検波回路２０８ｂ、演算部２０８ｅを備える。
PCT/JP2008/000125 2007-02-02 2008-02-01 レーザ式ガス分析計 WO2008096524A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN2008800101537A CN101646934B (zh) 2007-02-02 2008-02-01 激光式气体分析仪
EP08702857.7A EP2133686B1 (en) 2007-02-02 2008-02-01 Laser gas analyzer

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2007023830 2007-02-02
JP2007-023830 2007-02-02
JP2007192775 2007-07-25
JP2007-192775 2007-07-25
JP2007-329645 2007-12-21
JP2007329645A JP5176535B2 (ja) 2007-02-02 2007-12-21 レーザ式ガス分析計

Publications (1)

Publication Number Publication Date
WO2008096524A1 true WO2008096524A1 (ja) 2008-08-14

Family

ID=39681438

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/000125 WO2008096524A1 (ja) 2007-02-02 2008-02-01 レーザ式ガス分析計

Country Status (4)

Country Link
EP (1) EP2133686B1 (ja)
JP (1) JP5176535B2 (ja)
CN (1) CN101646934B (ja)
WO (1) WO2008096524A1 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010266303A (ja) * 2009-05-14 2010-11-25 Fuji Electric Systems Co Ltd レーザ式ガス分析計
JP2011191164A (ja) * 2010-03-15 2011-09-29 Fuji Electric Co Ltd レーザ式ガス分析計
JP2012108095A (ja) * 2010-08-03 2012-06-07 Fuji Electric Co Ltd 多成分用レーザ式ガス分析計
WO2012160746A1 (ja) * 2011-05-25 2012-11-29 富士電機株式会社 光源装置、分析装置、及び光生成方法
CN109900656A (zh) * 2019-04-12 2019-06-18 西南石油大学 一种可精确定位的红外甲烷测量装置及测量方法
CN111721736A (zh) * 2019-03-22 2020-09-29 株式会社岛津制作所 气体浓度测量装置的校正方法
US11169272B2 (en) 2017-07-14 2021-11-09 Neolund Ab High spectral resolution Scheimpflug LIDAR

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010216959A (ja) * 2009-03-16 2010-09-30 Fuji Electric Systems Co Ltd レーザ式ガス分析装置
JP5483161B2 (ja) * 2009-06-11 2014-05-07 横河電機株式会社 レーザ式ガス分析装置のゼロ・スパン調整方法
EP2569663A4 (en) * 2010-05-10 2017-11-15 Zolo Technologies, Inc. Time-synchronized tdlas measurements of pressure and temperature in a gas turbine engine
US8264690B2 (en) * 2010-09-09 2012-09-11 Adelphi University Method and apparatus for the detection of trace gas species using multiple line integrated absorption spectroscopy
US8395777B2 (en) 2010-09-09 2013-03-12 Adelphi University Method and apparatus for trace gas detection using integrated wavelength modulated spectra across multiple lines
JP5915089B2 (ja) * 2011-11-01 2016-05-11 富士電機株式会社 レーザ式ガス分析計
JP6028889B2 (ja) * 2011-11-28 2016-11-24 富士電機株式会社 レーザ式ガス分析計
WO2014018939A2 (en) 2012-07-27 2014-01-30 Thorlabs, Inc. Amplified widely tunable short cavity laser
JP5234381B1 (ja) * 2012-11-20 2013-07-10 富士電機株式会社 レーザ式酸素ガス分析計
JP5907442B2 (ja) 2013-01-11 2016-04-26 富士電機株式会社 レーザ式ガス分析計
US9774166B2 (en) 2013-03-15 2017-09-26 Praevium Research, Inc. Widely tunable swept source
RU2528129C1 (ru) * 2013-04-18 2014-09-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Тамбовский государственный технический университет" ФГБОУ ВПО ТГТУ Газоанализатор
EP2899533A1 (de) * 2014-01-22 2015-07-29 Siemens Aktiengesellschaft Verfahren zur Wellenlängenmodulationsspektroskopie mit einem Filter für das demodulierte Messsignal und das simulierte Signal
CN104316493B (zh) * 2014-11-04 2017-07-07 中国科学院长春光学精密机械与物理研究所 时分复用差分调制酒驾激光检测方法及装置
JP6668841B2 (ja) * 2016-03-14 2020-03-18 富士電機株式会社 レーザ式ガス分析計
JP6513762B2 (ja) 2016-12-15 2019-05-15 株式会社堀場製作所 分析装置、分析装置用プログラム及び分析方法
JP6496341B2 (ja) * 2017-03-22 2019-04-03 スチールプランテック株式会社 ガス成分測定装置
CN109596538B (zh) 2017-10-03 2023-08-25 株式会社堀场制作所 分析装置和分析方法
US20200238438A1 (en) * 2017-10-17 2020-07-30 Mitsubishi Electric Corporation Laser processing machine
EP3543682B1 (de) * 2018-03-22 2020-04-29 Axetris AG Verfahren zum betreiben eines optischen messsystems zur messung der konzentration einer gaskomponente in einem messgas
JP6791211B2 (ja) * 2018-06-28 2020-11-25 横河電機株式会社 掃引信号発生装置
CN111351768B (zh) * 2018-12-20 2022-10-18 中国科学院合肥物质科学研究院 一种利用扫描振镜的多组分气体激光探测装置及方法
EP3674690B1 (en) 2018-12-26 2023-10-18 HORIBA, Ltd. Analysis device, program for an analysis device and analysis method

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JPH02677B2 (ja) * 1979-12-13 1990-01-09 Fujitsu Ltd
JPH0616012B2 (ja) * 1984-05-31 1994-03-02 富士通株式会社 ガス濃度測定方式
JPH07151681A (ja) 1993-11-30 1995-06-16 Anritsu Corp ガス濃度測定装置
JPH11142328A (ja) * 1997-11-07 1999-05-28 Japan Radio Co Ltd 同位体分析装置
JPH11211658A (ja) * 1998-01-28 1999-08-06 Nippon Sanso Kk ガス中の不純物の分光分析方法
JP2001235418A (ja) 2000-02-24 2001-08-31 Anritsu Corp ガス濃度測定装置
JP2004361129A (ja) * 2003-06-02 2004-12-24 Tokyo Electric Power Co Inc:The 多点型ガス濃度検出方法
JP3782473B2 (ja) * 1994-04-08 2006-06-07 三菱重工業株式会社 ガス濃度測定装置
JP6072804B2 (ja) * 2011-09-14 2017-02-01 ボストン サイエンティフィック サイムド，インコーポレイテッドＢｏｓｔｏｎ Ｓｃｉｅｎｔｉｆｉｃ Ｓｃｉｍｅｄ，Ｉｎｃ． イオン伝導性バルーンを備えたアブレーション装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02677B2 (ja) * 1979-12-13 1990-01-09 Fujitsu Ltd
JPH0616012B2 (ja) * 1984-05-31 1994-03-02 富士通株式会社 ガス濃度測定方式
JPH07151681A (ja) 1993-11-30 1995-06-16 Anritsu Corp ガス濃度測定装置
JP3051808B2 (ja) * 1993-11-30 2000-06-12 アンリツ株式会社 ガス濃度測定装置
JP3782473B2 (ja) * 1994-04-08 2006-06-07 三菱重工業株式会社 ガス濃度測定装置
JPH11142328A (ja) * 1997-11-07 1999-05-28 Japan Radio Co Ltd 同位体分析装置
JPH11211658A (ja) * 1998-01-28 1999-08-06 Nippon Sanso Kk ガス中の不純物の分光分析方法
JP2001235418A (ja) 2000-02-24 2001-08-31 Anritsu Corp ガス濃度測定装置
JP2004361129A (ja) * 2003-06-02 2004-12-24 Tokyo Electric Power Co Inc:The 多点型ガス濃度検出方法
JP6072804B2 (ja) * 2011-09-14 2017-02-01 ボストン サイエンティフィック サイムド，インコーポレイテッドＢｏｓｔｏｎ Ｓｃｉｅｎｔｉｆｉｃ Ｓｃｉｍｅｄ，Ｉｎｃ． イオン伝導性バルーンを備えたアブレーション装置

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010266303A (ja) * 2009-05-14 2010-11-25 Fuji Electric Systems Co Ltd レーザ式ガス分析計
JP2011191164A (ja) * 2010-03-15 2011-09-29 Fuji Electric Co Ltd レーザ式ガス分析計
JP2012108095A (ja) * 2010-08-03 2012-06-07 Fuji Electric Co Ltd 多成分用レーザ式ガス分析計
WO2012160746A1 (ja) * 2011-05-25 2012-11-29 富士電機株式会社 光源装置、分析装置、及び光生成方法
US8654801B2 (en) 2011-05-25 2014-02-18 Fuji Electric Co., Ltd. Light source device, analysis device, and light generation method
US11169272B2 (en) 2017-07-14 2021-11-09 Neolund Ab High spectral resolution Scheimpflug LIDAR
US11536849B2 (en) 2017-07-14 2022-12-27 Neolund Ab High resolution molecular LIDAR
US11768295B2 (en) 2017-07-14 2023-09-26 Beamonics Ab High spectral resolution Scheimpflug LIDAR
CN111721736A (zh) * 2019-03-22 2020-09-29 株式会社岛津制作所 气体浓度测量装置的校正方法
CN111721736B (zh) * 2019-03-22 2023-08-08 株式会社岛津制作所 气体浓度测量装置的校正方法
CN109900656A (zh) * 2019-04-12 2019-06-18 西南石油大学 一种可精确定位的红外甲烷测量装置及测量方法

Also Published As

Publication number Publication date
EP2133686A4 (en) 2016-01-20
CN101646934A (zh) 2010-02-10
JP2009047677A (ja) 2009-03-05
CN101646934B (zh) 2011-02-09
JP5176535B2 (ja) 2013-04-03
EP2133686A1 (en) 2009-12-16
EP2133686B1 (en) 2019-12-04

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