WO2008093526A1 - 差圧センサ - Google Patents

差圧センサ Download PDF

Info

Publication number
WO2008093526A1
WO2008093526A1 PCT/JP2008/050238 JP2008050238W WO2008093526A1 WO 2008093526 A1 WO2008093526 A1 WO 2008093526A1 JP 2008050238 W JP2008050238 W JP 2008050238W WO 2008093526 A1 WO2008093526 A1 WO 2008093526A1
Authority
WO
WIPO (PCT)
Prior art keywords
contact portion
diaphragm
springs
chamber
pressure sensor
Prior art date
Application number
PCT/JP2008/050238
Other languages
English (en)
French (fr)
Inventor
Masato Kageyama
Mitsumasa Akashi
Original Assignee
Komatsu Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Komatsu Ltd. filed Critical Komatsu Ltd.
Priority to JP2008556037A priority Critical patent/JP4920047B2/ja
Priority to US12/449,025 priority patent/US7930943B2/en
Priority to DE112008000258T priority patent/DE112008000258B4/de
Priority to KR1020097016516A priority patent/KR101120453B1/ko
Priority to CN2008800100799A priority patent/CN101646932B/zh
Publication of WO2008093526A1 publication Critical patent/WO2008093526A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/14—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means involving the displacement of magnets, e.g. electromagnets

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

　差圧センサの出力信号特性に含まれるヒステリシスや他のノイズ成分を低減するために、差圧センサのチャンバ内に設けられたダイアフラムと一緒に動く弾性反力部材３０２は、ダイアフラムに接触する接触部３０４と、接触部３０４について対称に配置された複数のバネ３０６，３０８とを有する。バネ３０６，３０８の各々は、C、U、JまたはV字形に曲げられた板状または線状のバネで、その一端はチャンバを画成する壁に固定され、他端は接触部３０４に接続される。ダイアフラムと一緒に接触部３０４が移動するとき、複数のバネ３０６，３０８の変形が相互にバランスして、接触部３０４のダイアフラムに対する回動と横ずれを抑制する。
PCT/JP2008/050238 2007-01-30 2008-01-11 差圧センサ WO2008093526A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2008556037A JP4920047B2 (ja) 2007-01-30 2008-01-11 差圧センサ
US12/449,025 US7930943B2 (en) 2007-01-30 2008-01-11 Differential pressure sensor
DE112008000258T DE112008000258B4 (de) 2007-01-30 2008-01-11 Differenzdrucksensor
KR1020097016516A KR101120453B1 (ko) 2007-01-30 2008-01-11 차압 센서
CN2008800100799A CN101646932B (zh) 2007-01-30 2008-01-11 差压传感器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007019528 2007-01-30
JP2007-019528 2007-01-30

Publications (1)

Publication Number Publication Date
WO2008093526A1 true WO2008093526A1 (ja) 2008-08-07

Family

ID=39673840

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050238 WO2008093526A1 (ja) 2007-01-30 2008-01-11 差圧センサ

Country Status (6)

Country Link
US (1) US7930943B2 (ja)
JP (1) JP4920047B2 (ja)
KR (1) KR101120453B1 (ja)
CN (1) CN101646932B (ja)
DE (1) DE112008000258B4 (ja)
WO (1) WO2008093526A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010022428A1 (de) * 2009-06-03 2010-12-09 Marquardt Mechatronik Gmbh Sensor
US8935962B2 (en) * 2011-11-03 2015-01-20 Gammon Technical Products, Inc. Differential pressure gauge having a rotating positional element
US8701496B1 (en) * 2013-02-27 2014-04-22 Honeywell International Inc. Systems and methods for a pressure sensor having a two layer die structure
DE102014005399A1 (de) * 2013-04-24 2014-10-30 Marquardt Mechatronik Gmbh Anordnung zur Füllstandsmessung
US10151647B2 (en) 2013-06-19 2018-12-11 Honeywell International Inc. Integrated SOI pressure sensor having silicon stress isolation member
DE102017119714B4 (de) * 2017-08-28 2022-01-05 Vega Grieshaber Kg Vibrationssensor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6160135U (ja) * 1984-09-27 1986-04-23
JPH02145750U (ja) * 1989-05-13 1990-12-11
JPH1125826A (ja) * 1997-06-27 1999-01-29 Saginomiya Seisakusho Inc 圧力スイッチ
JP2000082369A (ja) * 1998-06-30 2000-03-21 Saginomiya Seisakusho Inc 二動作型圧力スイッチ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3575054A (en) * 1969-03-12 1971-04-13 United Aircraft Corp Pressure sensing device
US4072058A (en) * 1976-05-03 1978-02-07 Honeywell Inc. Differential pressure transmitter with pressure sensor protection
US4356365A (en) * 1980-10-24 1982-10-26 Edison International, Inc. Air operated DC switch
DE3172569D1 (en) * 1981-03-07 1985-11-14 Kernforschungsz Karlsruhe Differential pressure detector
JPS6160135A (ja) * 1984-08-31 1986-03-27 Toshiba Corp 割込制御装置
US4606229A (en) 1985-04-01 1986-08-19 Johnson Service Company Differential pressure transmitter
JPH02145750A (ja) * 1988-11-25 1990-06-05 Toshiba Corp 高低圧一体型タービンロータ
JPH04113044A (ja) 1990-08-31 1992-04-14 Toyota Motor Corp ダンパ一体型リーフスプリング装置
JP2545539Y2 (ja) * 1991-03-18 1997-08-25 株式会社コガネイ 圧力センサ
BRPI0403786A (pt) * 2004-09-09 2006-05-02 Petroleo Brasileiro Sa transdutor de pressão diferencial a fibra óptica
NO324582B1 (no) * 2006-02-03 2007-11-26 Roxar As Anordning for differensialtrykkmaling

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6160135U (ja) * 1984-09-27 1986-04-23
JPH02145750U (ja) * 1989-05-13 1990-12-11
JPH1125826A (ja) * 1997-06-27 1999-01-29 Saginomiya Seisakusho Inc 圧力スイッチ
JP2000082369A (ja) * 1998-06-30 2000-03-21 Saginomiya Seisakusho Inc 二動作型圧力スイッチ

Also Published As

Publication number Publication date
JP4920047B2 (ja) 2012-04-18
CN101646932B (zh) 2012-01-04
CN101646932A (zh) 2010-02-10
JPWO2008093526A1 (ja) 2010-05-20
DE112008000258T5 (de) 2009-12-24
US7930943B2 (en) 2011-04-26
US20100043563A1 (en) 2010-02-25
KR20090099085A (ko) 2009-09-21
DE112008000258B4 (de) 2013-08-01
KR101120453B1 (ko) 2012-02-29

Similar Documents

Publication Publication Date Title
WO2008093526A1 (ja) 差圧センサ
WO2007149733A3 (en) Isolated sensor housing
WO2011039486A3 (fr) Organe de mesure de pression etanche
MX2013000351A (es) Transmisor de presion diferencial con sensores de doble presion absoluta complementarios.
WO2006130425A8 (en) Line pressure measurement using differential pressure sensor
WO2007078748A3 (en) Design of a wet/wet amplified differential pressure sensor based on silicon piezo resistive technology
WO2007089463A3 (en) Pressure sensor fault detection
TW200733940A (en) Weighted bioacoustic sensor and method of using same
WO2005093378A3 (en) Annular capacitive pressure sensor
WO2008097326A3 (en) Micro electrical mechanical systems pressure sensor
EP2407668A3 (en) Scroll compressor
GB2441785B (en) Ruggedized pressure sensor
WO2007115304A3 (en) Monitor transducer system and manufacturing method thereof
WO2008116788A3 (de) Vorrichtung zur überwachung des vakuums
CY1118619T1 (el) Μεμβρανη για εναν θαλαμο πιεσεως
WO2008148371A3 (de) Sensor
DE502005011081D1 (de) Differenzdruckaufnehmer mit dynamischem überlastschutz
WO2013160019A3 (de) Druckmessaufnehmer
EP2017137A3 (en) Load detecting sensor and collision detecting sensor using the same
WO2010149519A3 (de) Wasserstoffsensor
WO2008015460A3 (en) Force transducer, force sensor and programmable emulator
BRPI0514683A (pt) conjunto de válvula
WO2009022515A1 (ja) 防振装置
WO2007000678A3 (en) Diaphragm for an electroacoustic transducer, and electroacoustic transducer
EP3534128A3 (en) Pressure indicator

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880010079.9

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08703102

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2008556037

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 12449025

Country of ref document: US

WWE Wipo information: entry into national phase

Ref document number: 1120080002584

Country of ref document: DE

WWE Wipo information: entry into national phase

Ref document number: 1020097016516

Country of ref document: KR

RET De translation (de og part 6b)

Ref document number: 112008000258

Country of ref document: DE

Date of ref document: 20091224

Kind code of ref document: P

122 Ep: pct application non-entry in european phase

Ref document number: 08703102

Country of ref document: EP

Kind code of ref document: A1