WO2008116788A3 - Vorrichtung zur überwachung des vakuums - Google Patents

Vorrichtung zur überwachung des vakuums Download PDF

Info

Publication number
WO2008116788A3
WO2008116788A3 PCT/EP2008/053211 EP2008053211W WO2008116788A3 WO 2008116788 A3 WO2008116788 A3 WO 2008116788A3 EP 2008053211 W EP2008053211 W EP 2008053211W WO 2008116788 A3 WO2008116788 A3 WO 2008116788A3
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum
switching tube
bellows
membrane
optical device
Prior art date
Application number
PCT/EP2008/053211
Other languages
English (en)
French (fr)
Other versions
WO2008116788A2 (de
Inventor
Roman Renz
Original Assignee
Siemens Ag
Roman Renz
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag, Roman Renz filed Critical Siemens Ag
Priority to US12/532,208 priority Critical patent/US20100102034A1/en
Priority to EP08717944A priority patent/EP2140467A2/de
Publication of WO2008116788A2 publication Critical patent/WO2008116788A2/de
Publication of WO2008116788A3 publication Critical patent/WO2008116788A3/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00—High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/60—Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
    • H01H33/66—Vacuum switches
    • H01H33/668—Means for obtaining or monitoring the vacuum

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Examining Or Testing Airtightness (AREA)

Abstract

Ein Lecksensor (1) zur Überwachung des Vakuums in einer Vakuumschaltrohre verfugt über eine verformbare Trennwand, insbesondere in Gestalt einer Membran oder eines Faltenbalges (13). Die Trennwand steht über eine Messoffnung (9) mit der Vakuumkammer einer Vakuumschaltrohre in Verbindung. Beim Belüften der Vakuumkammer der Vakuumschaltrohre erfolgt eine Verformung der Membran oder des Faltenbalges (13), die mit einer mechanischen Anzeigevorrichtung (25), einer optischen Einrichtung oder einer elektrooptischen Einrichtung (1) erfassbar ist.
PCT/EP2008/053211 2007-03-23 2008-03-18 Vorrichtung zur überwachung des vakuums WO2008116788A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/532,208 US20100102034A1 (en) 2007-03-23 2008-03-18 Apparatus for Monitoring Vacuum
EP08717944A EP2140467A2 (de) 2007-03-23 2008-03-18 Vorrichtung zur überwachung des vakuums

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007014940A DE102007014940B3 (de) 2007-03-23 2007-03-23 Vorrichtung zur Überwachung des Vakuums
DE102007014940.0 2007-03-23

Publications (2)

Publication Number Publication Date
WO2008116788A2 WO2008116788A2 (de) 2008-10-02
WO2008116788A3 true WO2008116788A3 (de) 2008-12-11

Family

ID=39744468

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/053211 WO2008116788A2 (de) 2007-03-23 2008-03-18 Vorrichtung zur überwachung des vakuums

Country Status (5)

Country Link
US (1) US20100102034A1 (de)
EP (1) EP2140467A2 (de)
CN (1) CN101632145A (de)
DE (1) DE102007014940B3 (de)
WO (1) WO2008116788A2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130220032A1 (en) * 2010-10-26 2013-08-29 Muthukumaran Packirisamy System For Sensing a Mechanical Property of a Sample
FR2968827B1 (fr) * 2010-12-09 2012-12-21 Schneider Electric Ind Sas Dispositif de detection de la perte de vide dans un appareil de coupure a vide et appareil de coupure a vide comportant un tel dispositif
JP5183763B2 (ja) * 2011-03-31 2013-04-17 中国電力株式会社 タンク形真空遮断器
DE102011107260A1 (de) * 2011-07-06 2013-01-10 Comde Computer Meßtechnik Design und Entwicklungs GmbH Leistungsschalteinheit mit zumindest abschnittsweise verlagerbarem Kontrollelement
CN103672144A (zh) * 2012-09-24 2014-03-26 上海一核阀门制造有限公司 波纹管破损探测仪
EP2884151A1 (de) * 2013-12-10 2015-06-17 Linde Aktiengesellschaft Vorrichtung zur Anzeige des Verlusts eines Vakuums
TWI516189B (zh) * 2014-01-29 2016-01-01 緯創資通股份有限公司 防水裝置
CN104296921A (zh) * 2014-11-10 2015-01-21 昆山国力真空电器有限公司 智能真空器件在线监测方法及其装置
CN106369497B (zh) * 2016-10-31 2019-04-30 任闫涛 一种灯具
CN106981394A (zh) * 2016-12-22 2017-07-25 唐恩(厦门)电气有限公司 一种基于高频电流的高压断路器真空度检测系统
CN109166762A (zh) * 2018-09-19 2019-01-08 中山瑞科新能源有限公司 一种用于真空设备的触点开关
KR102672647B1 (ko) * 2019-04-02 2024-06-04 엘에스일렉트릭(주) 진공도 측정장치 및 이를 포함하는 진공인터럽터
US11156926B2 (en) * 2019-08-12 2021-10-26 Kla Corporation Vacuum actuator containment for molecular contaminant and particle mitigation
CN111964835B (zh) * 2020-08-06 2021-07-30 苏州讯如电子科技有限公司 高灵敏度范围可控调节的真空计

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2036250A5 (de) * 1968-09-26 1970-12-24 Liebknecht Transformator
JPS547581A (en) * 1977-06-21 1979-01-20 Tokyo Shibaura Electric Co Vacuum switching device
JPS59228326A (ja) * 1983-06-10 1984-12-21 三菱電機株式会社 真空スイツチ管
JPS60136119A (ja) * 1983-12-23 1985-07-19 株式会社東芝 真空バルブ
JPS61153913A (ja) * 1984-12-27 1986-07-12 株式会社東芝 真空バルブ
EP0768689A1 (de) * 1995-10-11 1997-04-16 ABBPATENT GmbH Vorrichtung zur Überwachung und Anzeige der Stellung eines beweglichen Kontaktstückes eines Mittelspannungs- oder Hochspannungsschaltgerätes
US20060278010A1 (en) * 2004-05-18 2006-12-14 Montesclaros Mary G Method and apparatus for the detection of high pressure conditions in a vacuum-type electrical device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3424339A1 (de) * 1984-06-28 1986-01-09 Siemens AG, 1000 Berlin und 8000 München Vakuumschalter mit einer einrichtung zur ueberwachung des vakuums
DE8431998U1 (de) * 1984-11-02 1985-01-31 Leybold-Heraeus GmbH, 5000 Köln Membranvakuummeter
DE19539535A1 (de) * 1995-10-24 1997-04-30 Siemens Ag Verfahren zur Drucküberwachung einer Vakuumschaltröhre

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2036250A5 (de) * 1968-09-26 1970-12-24 Liebknecht Transformator
JPS547581A (en) * 1977-06-21 1979-01-20 Tokyo Shibaura Electric Co Vacuum switching device
JPS59228326A (ja) * 1983-06-10 1984-12-21 三菱電機株式会社 真空スイツチ管
JPS60136119A (ja) * 1983-12-23 1985-07-19 株式会社東芝 真空バルブ
JPS61153913A (ja) * 1984-12-27 1986-07-12 株式会社東芝 真空バルブ
EP0768689A1 (de) * 1995-10-11 1997-04-16 ABBPATENT GmbH Vorrichtung zur Überwachung und Anzeige der Stellung eines beweglichen Kontaktstückes eines Mittelspannungs- oder Hochspannungsschaltgerätes
US20060278010A1 (en) * 2004-05-18 2006-12-14 Montesclaros Mary G Method and apparatus for the detection of high pressure conditions in a vacuum-type electrical device

Also Published As

Publication number Publication date
WO2008116788A2 (de) 2008-10-02
DE102007014940B3 (de) 2008-10-16
CN101632145A (zh) 2010-01-20
EP2140467A2 (de) 2010-01-06
US20100102034A1 (en) 2010-04-29

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