WO2008075546A1 - Verre pour un substrat - Google Patents
Verre pour un substrat Download PDFInfo
- Publication number
- WO2008075546A1 WO2008075546A1 PCT/JP2007/073157 JP2007073157W WO2008075546A1 WO 2008075546 A1 WO2008075546 A1 WO 2008075546A1 JP 2007073157 W JP2007073157 W JP 2007073157W WO 2008075546 A1 WO2008075546 A1 WO 2008075546A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- glass
- less
- substrate
- wavelength
- geo
- Prior art date
Links
- 239000011521 glass Substances 0.000 title claims abstract description 53
- 239000000758 substrate Substances 0.000 title claims abstract description 39
- 238000002834 transmittance Methods 0.000 claims abstract description 10
- 230000009477 glass transition Effects 0.000 claims abstract description 4
- 239000000203 mixture Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 4
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 abstract 8
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 abstract 6
- 229910052593 corundum Inorganic materials 0.000 abstract 3
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 abstract 3
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 3
- 238000004031 devitrification Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical group 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000005387 chalcogenide glass Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000005383 fluoride glass Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000000156 glass melt Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/12—Silica-free oxide glass compositions
- C03C3/253—Silica-free oxide glass compositions containing germanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/062—Glass compositions containing silica with less than 40% silica by weight
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/062—Glass compositions containing silica with less than 40% silica by weight
- C03C3/064—Glass compositions containing silica with less than 40% silica by weight containing boron
- C03C3/068—Glass compositions containing silica with less than 40% silica by weight containing boron containing rare earths
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/10—Compositions for glass with special properties for infrared transmitting glass
Definitions
- the present invention is a sensor for detecting concentration of CO gas, CO gas, NO gas, etc., which transmits infrared rays.
- the present invention relates to a glass for a substrate suitable for a substrate or the like.
- Infrared light with a wavelength of 4 ⁇ m is used for CO gas detection and CO gas detection.
- Infrared rays with a wavelength of 3-5 m are used for temperature detection.
- An infrared filter in which a multilayer film is formed on a substrate that transmits rays is used.
- a substrate a germanium substrate or a silicon substrate is widely used. These substrates are expensive and an alternative material is required.
- Bi O -PbO-ZnO-CdF glass is a thermally stable glass that transmits infrared light.
- Patent Document 1 Bi 2 O 3 —ZnO—R 2 O glass (R is an alkali metal.
- Patent Document 2
- Patent Document 1 Japanese Patent Laid-Open No. 8-188445
- Patent Document 2 JP-A-8-133779
- the BiO-PbO-ZnO-CdF-based glass is not preferable in that it contains PbO.
- the BiO-ZnO-R ⁇ glass has high light transmission up to the infrared region with a wavelength of 7.5 ⁇ m.
- An object of the present invention is to provide a glass for a substrate that can solve such problems.
- BiO is 10 to 55%
- GeO is 20 to 8 in terms of mol% based on the following oxides.
- Substrate glass (Aspect A glass) containing 50% or more of O + GeO and not containing MgO
- GaO gallium arsphide
- “contains 0-19% GaO” means that GaO is not essential, but 19%
- a glass for substrates is obtained that has a high Tg (glass transition point), is thermally stable, has a high transmittance at a wavelength of 5.5 111, and a low transmittance at a wavelength of 7 am.
- the glass for a substrate of the present invention (hereinafter, the glass of the present invention and V) is suitable for a glass substrate of a gas analyzer, a radiation thermometer, an infrared sensor or the like.
- the Tg of the glass of the present invention is preferably 400 ° C or higher. Below 400 ° C, the substrate may be deteriorated when detecting relatively high-temperature infrared rays, or the substrate may be deformed in the vapor deposition process for forming the multilayer film.
- the glass of the present invention has a light transmittance (T) of 50% or more at a wavelength of 5.5 m at a thickness of lmm.
- O ⁇ m at a thickness of lmm is preferably 10% or less.
- T force is less than 3 ⁇ 40%, the necessary amount of light may not be obtained.
- a substrate made of the glass of the present invention a concentration detection sensor substrate such as NO gas, a high temperature sensor
- the transmittance (T) of the light of a wavelength of 6.5 m at a thickness lmm of the glass of the present invention is 4% or less! /. If it exceeds 4%, light of unnecessary wavelength is blocked.
- BiO is an essential component. If its content is less than 10%, the melting temperature becomes high, and
- GeO is a network former and a component that lowers T and is essential
- T becomes high or devitrification tends to occur. More preferable
- T may decrease if the total content of BiO and GeO is less than 50%.
- Ga 2 O nor Al 2 O is a component that suppresses devitrification, although it is not essential.
- Ga may be contained in a range of 19% or less and 15% or less, respectively.
- GaO is 16% or less, and AlO is 12% or less.
- the total content of GaO and AlO is preferably 2 to 30%.
- the devitrification suppressing effect of the glass may be insufficient.
- the glass tends to be devitrified. More preferably, it is 25% or less, particularly preferably 22% or less.
- the BiO content is 15% or more
- the GeO content is 80% or less
- GeO + A10 is preferably 60% or more. T less than 60%, for example 4
- the glass of the present invention does not impair the object of the present invention, and BiO, GeO, GaO and
- Components other than 2 3 2 2 3 and Al 2 O may be contained. In the following, such components are illustratively described.
- the total content of BiO, GeO, GaO and AlO is preferably 70% or more, T
- MgO, CaO, SrO and BaO are essential, but may be contained in a total content of 25% or less in order to suppress devitrification. If it exceeds 25%, the glass tends to be easily devitrified. Preferably it is 20% or less.
- MgO + CaO + SrO is typically 0-8%.
- MgO, CaO, SrO and BaO When MgO, CaO, SrO and BaO are contained, their content is preferably 10% or less, 15% or less, 15% or less, and 20% or less, respectively, typically 7% or less, % Or less, 7% or less, 18% or less.
- Ga 2 O + MgO When MgO is contained, Ga 2 O + MgO must be 20% or less. 20%
- ZnO is not essential, but may be contained up to 20% in order to suppress devitrification. If it exceeds 20%, devitrification tends to occur. Typically less than 15%.
- V which may contain up to 25% of total content. If it exceeds 25%, chemical durability may be reduced. Preferably it is 20% or less, typically 15% or less.
- CeO is not essential, but Bi O precipitates as metallic bismuth in the glass melt
- the glass may be contained up to 2%. If it exceeds 2%, the glass tends to be devitrified. Preferably it is 1% or less, More preferably, it is 0.5% or less.
- the content is preferably 0.05% or more, more preferably 0.1% or more.
- the oxide may be contained.
- the total content of these components is 10% The following is preferable. If it exceeds 10%, devitrification tends to occur. Typically less than 5%.
- O + Y O + Nb O + ZnO is preferably 15% or less. More than 15% is devitrified
- SiO When SiO is contained, its content is preferably 1% or less. Over 1%
- the content is preferably 1% or less. Over 1%
- P o is typically not included.
- the glass of the aspect A is essentially composed of Bi O and GeO, which are essential components, and any one component.
- Quasi-essential components that must contain GaO, AlO and optional components CaO, Sr
- the total content of such components is preferably 15% or less, more preferably 10% or less, typically 5% or less.
- examples of such components include TiO, ZrO, InO, LaO, YO, and the like described above as examples.
- NbO is typical, and the above explanation regarding SiO, B 2 O, and P 2 O applies as well.
- Na 2 O + K 0 is 0-20%.
- the method for producing the glass of the present invention is not particularly limited.
- raw materials are prepared and mixed, and then placed in a gold crucible, platinum crucible, alumina crucible, or quartz crucible, and 800 to; air at 1300 ° C.
- the sol-gel method may be manufactured by a method other than the melting method such as a vapor deposition method.
- a glass having a composition indicated by% is produced by a melting method.
- Examples;! -47 are examples, examples 48-5 3 is a comparative example.
- Tg, T, ⁇ , and ⁇ were estimated by calculation from the force not produced by the melting method, that is, from the composition.
- the substrate glass of the present invention is a concentration detection sensor for CO gas, CO gas, NO gas, etc.
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Compositions (AREA)
Abstract
L'invention concerne un verre pour un substrat, dont la transmittance pour une lumière d'une longueur d'onde de 5,5 µm est de 50 % ou plus, et la transmittance pour une lumière d'une longueur d'onde de 7,0 µm est de 10 % ou moins, quand il est préparé à une épaisseur de 1 mm. L'invention concerne spécifiquement un verre pour un substrat, qui comprend (en moles, en terme d'oxyde) : 10 à 55 % de Bi2O3 ; 20 à 85 % de GeO2 ; 0 à 19 % de Ga2O3 ; et 0 à 15 % de Al2O3, la somme totale de Bi2O3 et GeO2 représentant 50 % ou plus et, si du MgO est présent, la somme totale de Ga2O3 et MgO représentant 20 % ou moins. Dans le verre, la teneur en Bi2O3 peut être de 15 % ou plus, la teneur en GeO2 peut être de 80 % ou moins, et la somme totale de Ga2O3 et Al2O3 peut représenter 2 à 30 %. Dans le verre, la somme totale de GeO2 et Al2O3 peut représenter 60 % ou plus. Le verre peut avoir une température de transition vitreuse de 400˚C ou plus.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006340941 | 2006-12-19 | ||
JP2006-340941 | 2006-12-19 | ||
JP2007174262A JP2008174440A (ja) | 2006-12-19 | 2007-07-02 | 基板用ガラス |
JP2007-174262 | 2007-07-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008075546A1 true WO2008075546A1 (fr) | 2008-06-26 |
Family
ID=39536180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/073157 WO2008075546A1 (fr) | 2006-12-19 | 2007-11-30 | Verre pour un substrat |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2008075546A1 (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102432174A (zh) * | 2011-09-08 | 2012-05-02 | 中国科学院上海光学精密机械研究所 | 红外窗口玻璃 |
CN102674690A (zh) * | 2012-05-31 | 2012-09-19 | 中国科学院上海光学精密机械研究所 | 3μm掺稀土离子的铋锗酸盐激光玻璃及其制备方法 |
FR3002530A1 (fr) * | 2013-02-28 | 2014-08-29 | Centre Nat Rech Scient | Verres et vitroceramiques nanostructures transparents dans le visible et l'infrarouge |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05201745A (ja) * | 1990-11-28 | 1993-08-10 | Corning Inc | 優れた放射線透過特性および光学的非直線性を有するガラス |
JP2005239476A (ja) * | 2004-02-26 | 2005-09-08 | Sumita Optical Glass Inc | 精密プレス成形用光学ガラス |
JP2006518325A (ja) * | 2003-02-20 | 2006-08-10 | ショット アクチエンゲゼルシャフト | 酸化ビスマスガラスおよびそれを製造するプロセス |
-
2007
- 2007-11-30 WO PCT/JP2007/073157 patent/WO2008075546A1/fr active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05201745A (ja) * | 1990-11-28 | 1993-08-10 | Corning Inc | 優れた放射線透過特性および光学的非直線性を有するガラス |
JP2006518325A (ja) * | 2003-02-20 | 2006-08-10 | ショット アクチエンゲゼルシャフト | 酸化ビスマスガラスおよびそれを製造するプロセス |
JP2005239476A (ja) * | 2004-02-26 | 2005-09-08 | Sumita Optical Glass Inc | 精密プレス成形用光学ガラス |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102432174A (zh) * | 2011-09-08 | 2012-05-02 | 中国科学院上海光学精密机械研究所 | 红外窗口玻璃 |
CN102674690A (zh) * | 2012-05-31 | 2012-09-19 | 中国科学院上海光学精密机械研究所 | 3μm掺稀土离子的铋锗酸盐激光玻璃及其制备方法 |
FR3002530A1 (fr) * | 2013-02-28 | 2014-08-29 | Centre Nat Rech Scient | Verres et vitroceramiques nanostructures transparents dans le visible et l'infrarouge |
WO2014131881A1 (fr) * | 2013-02-28 | 2014-09-04 | Centre National De La Recherche Scientifique (Cnrs) | Verres et vitroceramiques nanostructures transparents dans le visible et l'infrarouge |
CN105102389A (zh) * | 2013-02-28 | 2015-11-25 | 国家科学研究中心 | 在可见和红外范围内透明的纳米结构的透镜和玻璃陶瓷 |
JP2016508480A (ja) * | 2013-02-28 | 2016-03-22 | サントル ナスィオナル ド ラ ルシェルシュ スィアンティフィク(セ.エン.エル.エス.) | 可視範囲及び赤外範囲で透明なナノ構造化されたガラス及びガラスセラミック |
US9593039B2 (en) | 2013-02-28 | 2017-03-14 | Centre National De La Recherche Scientifique (Cnrs) | Nanostructured glasses and vitroceramics that are transparent in visible and infra-red ranges |
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