WO2008062679A1 - Coupleur hydraulique - Google Patents

Coupleur hydraulique Download PDF

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Publication number
WO2008062679A1
WO2008062679A1 PCT/JP2007/071766 JP2007071766W WO2008062679A1 WO 2008062679 A1 WO2008062679 A1 WO 2008062679A1 JP 2007071766 W JP2007071766 W JP 2007071766W WO 2008062679 A1 WO2008062679 A1 WO 2008062679A1
Authority
WO
WIPO (PCT)
Prior art keywords
gasket
fluid
fluid coupling
joint member
bolt
Prior art date
Application number
PCT/JP2007/071766
Other languages
English (en)
Japanese (ja)
Inventor
Tomohiro Nakata
Michio Yamaji
Tsutomu Shinohara
Ichiro Tokuda
Original Assignee
Fujikin Incorporated
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Incorporated filed Critical Fujikin Incorporated
Priority to JP2008545360A priority Critical patent/JP5087555B2/ja
Priority to TW096144017A priority patent/TW200839132A/zh
Publication of WO2008062679A1 publication Critical patent/WO2008062679A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J15/00—Sealings
    • F16J15/02—Sealings between relatively-stationary surfaces
    • F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/062—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces characterised by the geometry of the seat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/02—Flanged joints the flanges being connected by members tensioned axially
    • F16L23/036—Flanged joints the flanges being connected by members tensioned axially characterised by the tensioning members, e.g. specially adapted bolts or C-clamps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L23/00—Flanged joints
    • F16L23/16—Flanged joints characterised by the sealing means
    • F16L23/18—Flanged joints characterised by the sealing means the sealing means being rings
    • F16L23/22—Flanged joints characterised by the sealing means the sealing means being rings made exclusively of a material other than metal

Definitions

  • the present invention relates to a fluid coupling, and more particularly, to a fluid coupling that secures sealing performance by deforming a gasket.
  • first and second coupling members (61X62) having fluid passages (63X64) communicating with each other, and each coupling member (61X62 ) Formed on the butted end face of the annular gasket holding projection (65X66), gasket (67) interposed between the butted end faces of both joint members (61X62), and both joint members (61)
  • a screw means (not shown) for connecting (62), and a gasket (67) is deformed to ensure sealing performance.
  • each joint member is in the form of a block, and the screw means is provided in a bolt that is threaded through a through hole provided in one joint member and in the other joint member.
  • Each joint member is tubular, one of the joint members is provided with a flange, and the screw means is provided on the other joint member.
  • An object of the present invention is to provide a fluid coupling capable of reducing the diameter of a bolt as a screw means and thereby reducing the installation space of a device using the fluid coupling. is there.
  • a fluid coupling according to the present invention includes first and second coupling members having fluid passages communicating with each other, a gasket interposed between the two coupling members, and screw means for coupling both the coupling members.
  • the cross-sectional shape of the gasket retainer protrusion is a fluid joint that secures sealing performance by deforming the gasket by the annular gasket retainer protrusion formed on each joint member. It has at least two convex parts and a concave part formed between these convex parts! /.
  • the gasket pressing protrusion is provided so as to protrude outward in the axial direction on the reference surface of the joint member.
  • the annular convex portion having two arcs in cross section and a cross-sectional circle formed between the convex portions. It shall consist of an arc-shaped annular recessed part. The recess protrudes outward in the axial direction from the reference surface and contributes to the seal by being in close contact with the gasket.
  • the leading end positions of the two convex portions may be the same or different. If they are different, it is preferable to project the convex portion located radially inward from the convex portion located radially outward.
  • the number of recesses that adhere to the gasket and contribute to the seal is not limited to one. Therefore, there are three or four protrusions and two recesses formed between the two protrusions. Or it may consist of three recesses.
  • the cross-sectional shape of the annular convex portion and the annular concave portion is not limited to an arc shape.
  • the joint member may be a single part or a part of a single part.
  • the “joint member” includes a block-shaped main body integrated with a fluid controller such as a valve that can be handled as a single part.
  • each coupling member has a block shape
  • the screw means includes a bolt that is passed through a through-hole provided in one coupling member, and the other coupling member.
  • Each of the joint members is tubular, and one of the joint members is provided with a flange portion.
  • the former is preferably used in a fluid control device called an integrated device constructed without using tubes, and the latter is preferably used when connecting tubes in the middle of piping. .
  • the external thread portion may be a separate member from the joint member that may be integrally provided on the outer periphery of one joint member.
  • the bolts and cap nuts of the screw means are made of stainless steel (SUS304, SUS316, etc.) force S.
  • Preferred joint members are also preferably made of stainless steel (SUS304, SUS316, etc.).
  • the gasket is preferably formed in an annular shape (perforated disk shape) of stainless steel, nickel alloy, or the like.
  • each joint member is in a block shape and the screw means is a bolt, it is preferable that one bolt is used for each seal member including the annular gasket pressing protrusion and the gasket of each joint member.
  • two seal portions are provided at a predetermined interval between the fluid control device and the base block at the front and rear. Are arranged on the outside in the front-rear direction of each seal part, one from the top.
  • the gasket pressing protrusion has a cross-sectional shape having at least two protrusions and a recess formed between these protrusions.
  • the two convex parts bite into the gasket surface to form a seal, and the gasket part pushed by the two convex parts enters the concave part, so that the seal is also provided between the concave part and the gasket. Is formed.
  • the sealing performance is improved, the force for reducing the diameter of the bolt as the screw means, or the number of bolts can be reduced, and the installation space of the apparatus using the fluid coupling can be reduced.
  • FIG. 1 is a longitudinal sectional view showing an embodiment of a fluid coupling according to the present invention, showing a state of being tightened by hand!
  • FIG. 2 is an enlarged view of the main part of FIG.
  • FIG. 3 is a partially enlarged longitudinal sectional view showing a gasket pressing protrusion shape.
  • FIG. 4 is a longitudinal sectional view showing one embodiment of the fluid coupling according to the present invention, and shows a tightening completion state in which a predetermined torque is tightened.
  • FIG. 5 is an enlarged view of the main part of FIG.
  • FIG. 6 is a graph showing the effect of the present invention.
  • Fig. 7 is a graph showing the results of comparing the sealing performance of the fluid coupling according to the present invention and the conventional fluid coupling.
  • FIG. 8 is a diagram showing a sealing performance evaluation apparatus, (a) is a plan view, and (b) is a vertical sectional view.
  • Fig. 9 is a perspective view showing an example of a configuration in which one bolt is attached to one seal portion.
  • Fig. 10 is a configuration in which one bolt is attached to one seal portion. It is a perspective view which shows the other example.
  • FIG. 11 is a perspective view showing a fluid control apparatus as an example in which the fluid coupling according to the present invention is used.
  • FIG. 12 is a view corresponding to FIG. 5 showing an example of a conventional fluid coupling.
  • FIG. 11 shows a fluid control apparatus which is an example in which the fluid coupling of the present invention is used.
  • This fluid control device (1) is used in a semiconductor manufacturing device or the like, and is a first fluid controller on the inlet side consisting of a pressure regulator or pressure transducer having a connecting block (3) at the lower end. (2), a first support block (4) that supports the first fluid controller (2), and a main body (6) disposed adjacent to the outlet side of the first fluid controller (2) ) Is connected to the first support block (4), and the main body (8) disposed below and adjacent to the outlet side of the first on-off valve (5) is the first on-off valve (5).
  • This joint member corresponds to the joint member in the present invention, and these joint members (denoted by reference numerals (3) and (4)) are connected by a fluid joint (20) shown in FIGS. 1 to 5! / RU
  • FIGS. 1 and 2 show the fluid coupling (20) in a hand-tightened state
  • FIG. 3 is an enlarged view of the seal portion
  • FIGS. 4 and 5 show a predetermined size.
  • the fluid coupling (20) is shown tightened with a torque of.
  • the fluid coupling (20) according to the present invention includes first and second coupling members (3) (4) having fluid passages (23X24) communicating with each other, and both coupling members (3 ) (4) A perforated disc-shaped gasket (21) and a bolt (22) as a screw means for joining both joint members (3) and (4).
  • (3) has a through hole (25) through which the bolt (22) passes
  • the second joint member (4) has a female thread portion (26) into which the bolt (22) is screwed. It is provided!
  • Each joint member (3) (4) is formed with an annular gasket pressing projection (27X28).
  • the cross-sectional shape of the annular gasket pressing projection (27X28) is as follows.Two arc-shaped convex portions (31), (32) and an arc-shaped concave portion (33) formed between these convex portions (31X32). Consists of. In the illustrated example, the tip position of the radially inner convex portion (31) and the tip position of the radially outer convex portion (32) are the same.
  • the gasket pressing protrusion (27X28) has a reference surface (3b) recessed inward in the axial direction from the butted end surface (3a) (4a) of the joint member (3) (4). It protrudes outward in the axial direction from (4b).
  • the concave part (33) of the gasket pressing protrusion (27X28) is located inward in the axial direction from the tip of the convex part (31X32) so that it protrudes outward in the axial direction from the reference plane (3b) (4b). It has been made.
  • the joint members (3) and (4) are made of stainless steel, and the gasket (21) has a lower hardness than the joint members (3) and (4), and is made of stainless steel or a nickel alloy.
  • the gasket retainer protrusion (27X28) bites into the gasket (21) and the gasket (21) is deformed to ensure sealing performance.
  • FIG. 6 is a graph for illustrating the operational effects of the present invention.
  • the tightening torque and the sealing performance are in a proportional relationship.
  • the size of the fluid coupling A used as a reference is increased, it is possible to ensure the required sealability by enlarging the joint member in a similar manner and using the fluid coupling B using M5 bolts. it can.
  • the size is reduced, the joint member will be reduced to a similar size and the bolt diameter will be reduced to M3.5. You will not get sex.
  • the fluid coupling D of the present invention even when the bolt diameter is reduced to M3.5, the same fluidity as the conventional fluid coupling A4 using M4 bolts is obtained.
  • FIG. 7 shows the results of comparing the sealing performance of the fluid coupling (20) and the conventional fluid coupling (60) shown in Fig. 12, and Fig. 8 shows the evaluation of the sealing performance. The device is shown.
  • the fluid coupling (20) has two block-shaped coupling members (3) and (4) that are abutted via two seal portions (S).
  • the seal (S) is tightened using two bolts (22).
  • the seal part (S) of the fluid coupling (20) of the invention has the above-described configuration, and the seal part (S) of the fluid coupling of the conventional product has a convex arc shape in cross section shown in FIG.
  • An annular gasket holding protrusion (65X66) is used.
  • the bolt (22) is M4 and has Ag plating.
  • This fluid coupling (invention and conventional product) is attached to the leak test device (He leak detector) via the pipe joint (J), and the gas in the pipe connected to the fluid coupling (20) is evacuated,
  • He is applied to the fluid joint (20) from outside, if there is a clearance, He is sucked in, so that He reacts with the tester in the middle of the evacuated piping, and the amount of leakage is found.
  • the tightening torque is gradually increased, the amount of leakage (leakage) at the time of contact is shown in Fig. 7! [0030]
  • the invention product already has less leakage than the conventional product when tightened by hand, and the tightening torque is 0.6 N / m.
  • FIGS. 9 and 10 illustrate a configuration in which one bolt (22) is attached to one seal portion (S).
  • FIG. 9 shows a joint member (4) supporting a pressure reducing valve (41) having a connection block (3) as a joint member and a connection block (3) as a joint member.
  • the joint member (4) supporting the pressure indicator (42) is shown, and each joint member (4) is provided with two seal parts (S) arranged in front and back. It has been.
  • a female thread (26) is provided on the upper surface of the front and rear ends of each joint member (4), and one bolt (22) to be tightened from above is provided on the outer side in the front-rear direction of each seal part (S). It is arranged only one by one.
  • the joint members (4) are connected to each other by bolts (43) from the front-rear direction, and at the four corners of the joint member (4) supporting the pressure reducing valve (41), the front-rear direction is provided.
  • the screw thread hole (44) that extends and the female screw (45) that extends in the front-rear direction are provided alternately, and the joint member (4) that supports the pressure indicator (42) has a female screw that extends in the front-rear direction. (45) is provided at a position corresponding to the screw through hole (44) of the joint member (4) supporting the pressure reducing valve (41).
  • a central bolt in the front-rear direction of each joint member (4) is used to pass a bolt (47) from above for fixing each joint member (4) to a base member (46) made of aluminum sheet metal.
  • a pair of screw holes (48) extending in the vertical direction are provided so as to be lined up in the left and right (width direction).
  • connection block (3) The bolts (22) that are tightened from above are the forces that were conventionally placed at all four corners of the connection block (3).
  • the left and right ends of the connection block (3) Center Each part has only one, and thus, it is possible to tighten the two seal parts (S) using two bolts (22).
  • FIG. 10 is a diagram showing a mass flow controller (11) as an example of a fluid controller and a pair of joint members (51X52) that support the mass flow controller (11X52). It is abutted to the overhang passage block (1 la) (l lb) of the roller (11) via the seal part (S)!
  • Each joint member (51X52) includes a large block portion (53) that contacts the lower surface of the overhang passage block (l laXl lb) and a large block portion (53) that is positioned below the flow rate regulator (11). ) And a small block part (54) provided integrally therewith.
  • the small block part (54) has a lower surface that is flush with the large block part (53) and has a lower surface, and the base member (55) made of aluminum sheet metal is formed on the small block part (54).
  • a through hole for a bolt (56) to which each joint member (51X52) is attached is formed.
  • Each joint member (51X52) is attached to the base member (55) by two bolts (56).
  • the bolt (22) for attaching each overhang passage block (l laXl lb) to the corresponding joint member (51X52) is one from above, and the seal of the joint member (51X52) Since it is provided on the outer side in the front-rear direction with respect to the part (S), the tip part is screwed into the screw parts (51b) (52b). In this way, it is possible to perform tightening using one bolt for one seal portion (S).
  • the shape of the gasket pressing protrusion is not limited to that shown in Fig. 3, for example, the number of convex portions is three, or the radially inner convex portions and the radial direction It is possible to make the position of the tip of the outer convex part different from that of the outer convex part, and at least two convex parts respectively bite into the surface of the gasket and the portion of the gasket pushed by these convex parts enters the concave part. As long as the seal is formed at both the convex and concave portions, various gasket pressing projection shapes can be adopted.
  • the diameter of the bolt as the screw means can be reduced, thereby reducing the installation space of the device using the fluid coupling. It can contribute to performance improvement.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Gasket Seals (AREA)
  • Branch Pipes, Bends, And The Like (AREA)

Abstract

La présente invention concerne un coupleur hydraulique dans lequel le diamètre d'un boulon comme moyen de vissage est réduit pour diminuer l'espace destiné à l'installation d'un dispositif utilisant le coupleur hydraulique. Le coupleur hydraulique possède un joint (21) placé entre les faces d'extrémité en butée des éléments de joint (3, 4), l'effet hermétique étant assuré lorsque le joint (21) est déformé. Les protubérances de joint faisant pression (27, 28) possèdent chacune deux protubérances (31, 32) et un évidement (33) formé entre les protubérances (31, 32).
PCT/JP2007/071766 2006-11-22 2007-11-09 Coupleur hydraulique WO2008062679A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008545360A JP5087555B2 (ja) 2006-11-22 2007-11-09 流体継手
TW096144017A TW200839132A (en) 2006-11-22 2007-11-21 Fluid coupling

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006315607 2006-11-22
JP2006-315607 2006-11-22

Publications (1)

Publication Number Publication Date
WO2008062679A1 true WO2008062679A1 (fr) 2008-05-29

Family

ID=39429617

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/071766 WO2008062679A1 (fr) 2006-11-22 2007-11-09 Coupleur hydraulique

Country Status (3)

Country Link
JP (1) JP5087555B2 (fr)
TW (1) TW200839132A (fr)
WO (1) WO2008062679A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008149702A1 (fr) * 2007-05-31 2008-12-11 Tokyo Electron Limited Appareil de régulation de fluide
KR101560867B1 (ko) 2010-08-02 2015-10-15 가부시키가이샤 후지킨 유체 커플링
CN106917872A (zh) * 2015-12-23 2017-07-04 罗伯特·博世有限公司 具有液压线路的壳构件
WO2021192643A1 (fr) * 2020-03-23 2021-09-30 株式会社堀場エステック Système de vaporisation

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH061809U (ja) * 1992-06-17 1994-01-14 エスエムシー株式会社 流量調節器付き流体圧アクチュエータ
JP2003322127A (ja) * 2002-04-26 2003-11-14 Fujikin Inc 流体継手
JP6089865B2 (ja) * 2013-03-27 2017-03-08 株式会社バッファロー 情報処理装置、情報処理装置における表示方法及びプログラム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0689865B2 (ja) * 1987-01-06 1994-11-14 三興工業株式会社 管継手
JP3580897B2 (ja) * 1995-05-11 2004-10-27 克郎 神谷 シール構造を利用した液体吐出装置
JP3859807B2 (ja) * 1997-05-08 2006-12-20 克郎 神谷 液体吐出装置
JP2000213659A (ja) * 1999-01-28 2000-08-02 Fujikin Inc 流体継手部材

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH061809U (ja) * 1992-06-17 1994-01-14 エスエムシー株式会社 流量調節器付き流体圧アクチュエータ
JP2003322127A (ja) * 2002-04-26 2003-11-14 Fujikin Inc 流体継手
JP6089865B2 (ja) * 2013-03-27 2017-03-08 株式会社バッファロー 情報処理装置、情報処理装置における表示方法及びプログラム

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008149702A1 (fr) * 2007-05-31 2008-12-11 Tokyo Electron Limited Appareil de régulation de fluide
JPWO2008149702A1 (ja) * 2007-05-31 2010-08-26 東京エレクトロン株式会社 流体制御装置
JP5150628B2 (ja) * 2007-05-31 2013-02-20 東京エレクトロン株式会社 流体制御装置
KR101560867B1 (ko) 2010-08-02 2015-10-15 가부시키가이샤 후지킨 유체 커플링
CN106917872A (zh) * 2015-12-23 2017-07-04 罗伯特·博世有限公司 具有液压线路的壳构件
CN106917872B (zh) * 2015-12-23 2021-12-31 罗伯特·博世有限公司 具有液压线路的壳构件
WO2021192643A1 (fr) * 2020-03-23 2021-09-30 株式会社堀場エステック Système de vaporisation
CN115279941A (zh) * 2020-03-23 2022-11-01 株式会社堀场Stec 气化系统

Also Published As

Publication number Publication date
JPWO2008062679A1 (ja) 2010-03-04
TW200839132A (en) 2008-10-01
JP5087555B2 (ja) 2012-12-05

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