WO2008062679A1

WO2008062679A1 - Fluid coupling

Info

Publication number: WO2008062679A1
Application number: PCT/JP2007/071766
Authority: WO
Inventors: Tomohiro Nakata; Michio Yamaji; Tsutomu Shinohara; Ichiro Tokuda
Original assignee: Fujikin Incorporated
Priority date: 2006-11-22
Filing date: 2007-11-09
Publication date: 2008-05-29
Also published as: TW200839132A; JP5087555B2; JPWO2008062679A1

Abstract

A fluid coupling in which the diameter of a bolt as screw means is reduced to decrease the space for installing a device using the fluid coupling. The fluid coupling has a gasket (21) placed between butted end faces of joint members (3, 4), and sealing effect is secured when the gasket (21) is deformed. Gasket pressing projection (27, 28) each have two projections (31, 32) and a recess (33) formed between the projections (31, 32).

Description

Specification

Fluid coupling

Technical field

TECHNICAL FIELD [0001] The present invention relates to a fluid coupling, and more particularly, to a fluid coupling that secures sealing performance by deforming a gasket.

Background art

As shown in FIG. 12, conventionally, as a fluid coupling (60), first and second coupling members (61X62) having fluid passages (63X64) communicating with each other, and each coupling member (61X62 ) Formed on the butted end face of the annular gasket holding projection (65X66), gasket (67) interposed between the butted end faces of both joint members (61X62), and both joint members (61) And a screw means (not shown) for connecting (62), and a gasket (67) is deformed to ensure sealing performance.

[0003] As a more specific structure of the fluid coupling, each joint member is in the form of a block, and the screw means is provided in a bolt that is threaded through a through hole provided in one joint member and in the other joint member. Each joint member is tubular, one of the joint members is provided with a flange, and the screw means is provided on the other joint member. There are cases where the screw portion and a cap nut fitted into one joint member so that the inner surface of the top wall is in contact with the flange portion and screwed into the male thread portion of the other joint member are disclosed. Open 2003—No. 322127

Disclosure of the invention

Problems to be solved by the invention

[0004] According to the conventional fluid coupling described above, it is necessary to reduce the installation space as well as to ensure the sealing performance, and it is an issue to improve the sealing performance without increasing the installation space. ing. For example, when connecting block-shaped joint members, it is necessary to set the bolt diameter to a predetermined value or more in order to obtain a predetermined tightening force. Depends on the diameter. [0005] An object of the present invention is to provide a fluid coupling capable of reducing the diameter of a bolt as a screw means and thereby reducing the installation space of a device using the fluid coupling. is there.

Means for solving the problem

[0006] A fluid coupling according to the present invention includes first and second coupling members having fluid passages communicating with each other, a gasket interposed between the two coupling members, and screw means for coupling both the coupling members. The cross-sectional shape of the gasket retainer protrusion is a fluid joint that secures sealing performance by deforming the gasket by the annular gasket retainer protrusion formed on each joint member. It has at least two convex parts and a concave part formed between these convex parts! /.

[0007] The gasket pressing protrusion is provided so as to protrude outward in the axial direction on the reference surface of the joint member. For example, the annular convex portion having two arcs in cross section and a cross-sectional circle formed between the convex portions. It shall consist of an arc-shaped annular recessed part. The recess protrudes outward in the axial direction from the reference surface and contributes to the seal by being in close contact with the gasket. The leading end positions of the two convex portions may be the same or different. If they are different, it is preferable to project the convex portion located radially inward from the convex portion located radially outward. The number of recesses that adhere to the gasket and contribute to the seal is not limited to one. Therefore, there are three or four protrusions and two recesses formed between the two protrusions. Or it may consist of three recesses. The cross-sectional shape of the annular convex portion and the annular concave portion is not limited to an arc shape.

[0008] The joint member may be a single part or a part of a single part. In other words, in this specification, the “joint member” includes a block-shaped main body integrated with a fluid controller such as a valve that can be handled as a single part.

[0009] The structure of the fluid coupling is not particularly limited. For example, each coupling member has a block shape, and the screw means includes a bolt that is passed through a through-hole provided in one coupling member, and the other coupling member. Each of the joint members is tubular, and one of the joint members is provided with a flange portion. A male threaded portion provided on the other joint member, and a cap nut fitted into one joint member so that the inner surface of the top wall is in contact with the flange portion and screwed to the male threaded portion of the other joint member It may be a thing. The former is preferably used in a fluid control device called an integrated device constructed without using tubes, and the latter is preferably used when connecting tubes in the middle of piping. . In the latter case, the external thread portion may be a separate member from the joint member that may be integrally provided on the outer periphery of one joint member.

[0010] The bolts and cap nuts of the screw means are made of stainless steel (SUS304, SUS316, etc.) force S. Preferred joint members are also preferably made of stainless steel (SUS304, SUS316, etc.). The gasket is preferably formed in an annular shape (perforated disk shape) of stainless steel, nickel alloy, or the like.

[0011] When each joint member is in a block shape and the screw means is a bolt, it is preferable that one bolt is used for each seal member including the annular gasket pressing protrusion and the gasket of each joint member.

[0012] Conventionally, a force that required at least two bolts per seal part. The use of the gasket pressing projections improves the sealing performance, so that the number of bolts can be reduced.

[0013] In order to obtain one bolt per seal portion, for example, two seal portions are provided at a predetermined interval between the fluid control device and the base block at the front and rear. Are arranged on the outside in the front-rear direction of each seal part, one from the top.

The invention's effect

[0014] According to the fluid coupling of the present invention, the gasket pressing protrusion has a cross-sectional shape having at least two protrusions and a recess formed between these protrusions. The two convex parts bite into the gasket surface to form a seal, and the gasket part pushed by the two convex parts enters the concave part, so that the seal is also provided between the concave part and the gasket. Is formed. As a result, the sealing performance is improved, the force for reducing the diameter of the bolt as the screw means, or the number of bolts can be reduced, and the installation space of the apparatus using the fluid coupling can be reduced. Brief Description of Drawings

[0015] FIG. 1 is a longitudinal sectional view showing an embodiment of a fluid coupling according to the present invention, showing a state of being tightened by hand!

FIG. 2 is an enlarged view of the main part of FIG.

FIG. 3 is a partially enlarged longitudinal sectional view showing a gasket pressing protrusion shape.

[FIG. 4] FIG. 4 is a longitudinal sectional view showing one embodiment of the fluid coupling according to the present invention, and shows a tightening completion state in which a predetermined torque is tightened.

FIG. 5 is an enlarged view of the main part of FIG.

FIG. 6 is a graph showing the effect of the present invention.

[Fig. 7] Fig. 7 is a graph showing the results of comparing the sealing performance of the fluid coupling according to the present invention and the conventional fluid coupling.

[FIG. 8] FIG. 8 is a diagram showing a sealing performance evaluation apparatus, (a) is a plan view, and (b) is a vertical sectional view.

[Fig. 9] Fig. 9 is a perspective view showing an example of a configuration in which one bolt is attached to one seal portion. [Fig. 10] Fig. 10 is a configuration in which one bolt is attached to one seal portion. It is a perspective view which shows the other example.

FIG. 11 is a perspective view showing a fluid control apparatus as an example in which the fluid coupling according to the present invention is used.

FIG. 12 is a view corresponding to FIG. 5 showing an example of a conventional fluid coupling.

Explanation of symbols

[0016] (3) First joint member

(4) Second joint member

(20) Fluid coupling

(21) Gasket

(22) Bolt (screw means)

(25) Through hole (screw means)

(26) Female thread (screw means) (27X28) Ring gasket retainer protrusion

(31X32) Convex

(33) Recess

(S) Seal part

BEST MODE FOR CARRYING OUT THE INVENTION

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 11 shows a fluid control apparatus which is an example in which the fluid coupling of the present invention is used. This fluid control device (1) is used in a semiconductor manufacturing device or the like, and is a first fluid controller on the inlet side consisting of a pressure regulator or pressure transducer having a connecting block (3) at the lower end. (2), a first support block (4) that supports the first fluid controller (2), and a main body (6) disposed adjacent to the outlet side of the first fluid controller (2) ) Is connected to the first support block (4), and the main body (8) disposed below and adjacent to the outlet side of the first on-off valve (5) is the first on-off valve (5). 1 Main body of the second on-off valve (7) placed adjacent to the outlet side of the second on-off valve (7) and the second on-off valve (7) connected to the main body (6) of the on-off valve (5) A second support block (9) connected to (8), a third support block (10) disposed opposite to the outlet side of the second support block (9) at a predetermined interval, an inlet side and On the exit side It has a connecting block (12X13), the inlet connection block (12) is supported by the second support block (9), and the outlet connection block (13) is supported by the third support block (14). Thus, the second fluid controller (11) mounted across the second and third support blocks (9) (10) and the outlet side of the second fluid controller (11) are arranged adjacent to each other. A lower body (15) is provided with a third on-off valve (14) connected to the third support block (10).

[0019] In the above, the support block (4) (9) (10), the main body (6X8X15) of each on-off valve (5X7X14) and the connection block (3X12X13) of the fluid controller (2) (11) This joint member corresponds to the joint member in the present invention, and these joint members (denoted by reference numerals (3) and (4)) are connected by a fluid joint (20) shown in FIGS. 1 to 5! / RU

[0020] FIGS. 1 and 2 show the fluid coupling (20) in a hand-tightened state, FIG. 3 is an enlarged view of the seal portion, and FIGS. 4 and 5 show a predetermined size. The fluid coupling (20) is shown tightened with a torque of. [0021] The fluid coupling (20) according to the present invention includes first and second coupling members (3) (4) having fluid passages (23X24) communicating with each other, and both coupling members (3 ) (4) A perforated disc-shaped gasket (21) and a bolt (22) as a screw means for joining both joint members (3) and (4). (3) has a through hole (25) through which the bolt (22) passes, and the second joint member (4) has a female thread portion (26) into which the bolt (22) is screwed. It is provided!

[0022] Each joint member (3) (4) is formed with an annular gasket pressing projection (27X28). As shown in FIG. 3, the cross-sectional shape of the annular gasket pressing projection (27X28) is as follows.Two arc-shaped convex portions (31), (32) and an arc-shaped concave portion (33) formed between these convex portions (31X32). Consists of. In the illustrated example, the tip position of the radially inner convex portion (31) and the tip position of the radially outer convex portion (32) are the same.

[0023] As shown in Fig. 2, the gasket pressing protrusion (27X28) has a reference surface (3b) recessed inward in the axial direction from the butted end surface (3a) (4a) of the joint member (3) (4). It protrudes outward in the axial direction from (4b). The concave part (33) of the gasket pressing protrusion (27X28) is located inward in the axial direction from the tip of the convex part (31X32) so that it protrudes outward in the axial direction from the reference plane (3b) (4b). It has been made.

[0024] The joint members (3) and (4) are made of stainless steel, and the gasket (21) has a lower hardness than the joint members (3) and (4), and is made of stainless steel or a nickel alloy. When the bolt (22) is tightened, the gasket retainer protrusion (27X28) bites into the gasket (21) and the gasket (21) is deformed to ensure sealing performance.

[0025] In the hand-tightened state shown in Fig. 2, the distance from each butted end surface (3a) (4a) of the joint member (3) (4) to the tip of the annular gasket pressing projection (27X28) is the gasket (21 ), And the butted end faces (3a) and (4a) of the joint member (3X4) are opposed to each other with a slight gap.

[0026] When the fluid coupling (20) is tightened from the hand-tightened state shown in Figs. 1 and 2, as shown in Figs. 4 and 5, the butted end surfaces (3a) of the coupling members (3) (4) (4a) There is no gap between them, and the gasket (21) is plastically deformed to form a fluid tight seal. At this time, the two convex portions (31X32) of the gasket pressing projection (27X28) bite into the surface of the gasket (21) to form a seal, and the portion pressed by the two convex portions (31X32) is concave. By entering the part (33), a seal is also formed between the recess (33) and the gasket (21).

[0027] FIG. 6 is a graph for illustrating the operational effects of the present invention. In the figure, in the conventional fluid joint, the tightening torque and the sealing performance are in a proportional relationship. When the size of the fluid coupling A used as a reference is increased, it is possible to ensure the required sealability by enlarging the joint member in a similar manner and using the fluid coupling B using M5 bolts. it can. On the other hand, when the size is reduced, the joint member will be reduced to a similar size and the bolt diameter will be reduced to M3.5. You will not get sex. In contrast, according to the fluid coupling D of the present invention, even when the bolt diameter is reduced to M3.5, the same fluidity as the conventional fluid coupling A4 using M4 bolts is obtained. This makes it possible to reduce the width of the block-like joint member, which was impossible when a conventional fluid coupling was used. Also, compared to the conventional bolts that are tightened using at least two bolts per seal, even if only one bolt with the same diameter as the conventional bolt is used, the bolts can be tightened sufficiently. You can gain power.

[0028] Fig. 7 shows the results of comparing the sealing performance of the fluid coupling (20) and the conventional fluid coupling (60) shown in Fig. 12, and Fig. 8 shows the evaluation of the sealing performance. The device is shown.

[0029] In FIG. 8, the fluid coupling (20) has two block-shaped coupling members (3) and (4) that are abutted via two seal portions (S). The seal (S) is tightened using two bolts (22). The seal part (S) of the fluid coupling (20) of the invention has the above-described configuration, and the seal part (S) of the fluid coupling of the conventional product has a convex arc shape in cross section shown in FIG. An annular gasket holding protrusion (65X66) is used. The bolt (22) is M4 and has Ag plating. This fluid coupling (invention and conventional product) is attached to the leak test device (He leak detector) via the pipe joint (J), and the gas in the pipe connected to the fluid coupling (20) is evacuated, When He is applied to the fluid joint (20) from outside, if there is a clearance, He is sucked in, so that He reacts with the tester in the middle of the evacuated piping, and the amount of leakage is found. When the tightening torque is gradually increased, the amount of leakage (leakage) at the time of contact is shown in Fig. 7! [0030] According to the leak evaluation result shown in FIG. 7, the invention product already has less leakage than the conventional product when tightened by hand, and the tightening torque is 0.6 N / m. in became stage, has reached a is a measure of the leakage quantity ^{^{_{10_ u Pa 'm 3 / Sec}}} . In contrast, in the conventional product, when the tightening torque is 0. 6N / m is still a 10_ ⁶ Pa 'm ³ / sec about the limit of sensitivity of the amount of leakage He leak detector, the leak amount of the reference tightening torque for obtaining 10_ ^u Pa 'm ³ / sec is the, 1. 4~;! · 6N / m ( about 2 · 5 times) is necessary. From this, it can be seen that the sealing performance of the fluid coupling (20) of the present invention has been greatly improved. By this sealing performance improvement effect, two bolts (22), that is, one One bolt (22) can be attached to the seal (S), and the required number of bolts can be reduced.

[0031] FIGS. 9 and 10 illustrate a configuration in which one bolt (22) is attached to one seal portion (S).

FIG. 9 shows a joint member (4) supporting a pressure reducing valve (41) having a connection block (3) as a joint member and a connection block (3) as a joint member. The joint member (4) supporting the pressure indicator (42) is shown, and each joint member (4) is provided with two seal parts (S) arranged in front and back. It has been. A female thread (26) is provided on the upper surface of the front and rear ends of each joint member (4), and one bolt (22) to be tightened from above is provided on the outer side in the front-rear direction of each seal part (S). It is arranged only one by one.

[0033] The joint members (4) are connected to each other by bolts (43) from the front-rear direction, and at the four corners of the joint member (4) supporting the pressure reducing valve (41), the front-rear direction is provided. The screw thread hole (44) that extends and the female screw (45) that extends in the front-rear direction are provided alternately, and the joint member (4) that supports the pressure indicator (42) has a female screw that extends in the front-rear direction. (45) is provided at a position corresponding to the screw through hole (44) of the joint member (4) supporting the pressure reducing valve (41). A central bolt in the front-rear direction of each joint member (4) is used to pass a bolt (47) from above for fixing each joint member (4) to a base member (46) made of aluminum sheet metal. A pair of screw holes (48) extending in the vertical direction are provided so as to be lined up in the left and right (width direction).

[0034] The bolts (22) that are tightened from above are the forces that were conventionally placed at all four corners of the connection block (3). In Fig. 9, the left and right ends of the connection block (3) Center Each part has only one, and thus, it is possible to tighten the two seal parts (S) using two bolts (22).

[0035] FIG. 10 is a diagram showing a mass flow controller (11) as an example of a fluid controller and a pair of joint members (51X52) that support the mass flow controller (11X52). It is abutted to the overhang passage block (1 la) (l lb) of the roller (11) via the seal part (S)!

[0036] Each joint member (51X52) includes a large block portion (53) that contacts the lower surface of the overhang passage block (l laXl lb) and a large block portion (53) that is positioned below the flow rate regulator (11). ) And a small block part (54) provided integrally therewith. The small block part (54) has a lower surface that is flush with the large block part (53) and has a lower surface, and the base member (55) made of aluminum sheet metal is formed on the small block part (54). A through hole for a bolt (56) to which each joint member (51X52) is attached is formed. Each joint member (51X52) is attached to the base member (55) by two bolts (56).

[0037] The bolt (22) for attaching each overhang passage block (l laXl lb) to the corresponding joint member (51X52) is one from above, and the seal of the joint member (51X52) Since it is provided on the outer side in the front-rear direction with respect to the part (S), the tip part is screwed into the screw parts (51b) (52b). In this way, it is possible to perform tightening using one bolt for one seal portion (S).

[0038] Note that the shape of the gasket pressing protrusion (27X28) is not limited to that shown in Fig. 3, for example, the number of convex portions is three, or the radially inner convex portions and the radial direction It is possible to make the position of the tip of the outer convex part different from that of the outer convex part, and at least two convex parts respectively bite into the surface of the gasket and the portion of the gasket pushed by these convex parts enters the concave part. As long as the seal is formed at both the convex and concave portions, various gasket pressing projection shapes can be adopted.

Industrial applicability

[0039] The diameter of the bolt as the screw means can be reduced, thereby reducing the installation space of the device using the fluid coupling. It can contribute to performance improvement.

Claims

The scope of the claims

[1] First and second joint members having fluid passages communicating with each other, a gasket interposed between the two joint members, and screw means for coupling the two joint members, In the fluid coupling that ensures sealing performance by deforming the gasket by the annular gasket pressing projection formed on the member! /, The sectional shape of the gasket pressing projection is at least two projections and these projections A fluid coupling having a recess formed therebetween.

[2] Each joint member is in a block shape, and the screw means includes a bolt that is threaded through a through hole provided in one joint member, and a female thread portion that is provided in the other joint member and into which the bolt is screwed. The fluid coupling of claim 1.

[3] The fluid coupling according to claim 2, wherein one bolt is used for one seal portion composed of the annular gasket pressing protrusion and gasket of each joint member.

[4] The fluid coupling according to claim 3, wherein two seal portions are provided at predetermined intervals in the front and rear, and one bolt is arranged on each outer side in the front and rear direction of each seal portion. .

[5] A fluid control device comprising at least one fluid controller having a connection block! And / or at least one support block that supports the fluid controller. Force ^s , connected by any fluid coupling according to claims 1 to 4

V, a fluid control device characterized by that.