JP2000213659A - Fluid coupling member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To eliminate a disadvantageous flow rate reducing factor in use of a block type coupling member having a V-shaped passage while securing an advantage of using it by forming a spherical fluid passage perforation auxiliary recess part in an opening of a fluid passage. SOLUTION: In fluid coupling members 12, 31, fluid passages 12a, 31a tilting to the normal line direction of an abutting end face are formed, and gasket pressing annular projections 72, 73 are arranged so as to surround opening parts of the fluid passages 12a, 31a. In the openings of the fluid passages 12a, 31a, a spherical fluid passage perforation auxiliary recess part 75 is formed. In this way, a flow rate can be increased without causing any demerit such as generation of wrinkles in a gasket, and a disadvantageous flow rate reducing factor can be eliminated while securing advantage of using a block type coupling member having a V-shaped fluid passage.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid control device used in a semiconductor manufacturing device or the like.
The present invention relates to a block-shaped fluid coupling member used for communicating an outlet of an on-off valve with an inlet of a mass flow controller.

[0002]

2. Description of the Related Art FIG. 3 shows a fluid control device using a fluid coupling member according to the present invention. This is proposed by the present inventors (see Japanese Patent Application No. 9-278473), and a fluid control device (4) used in a semiconductor manufacturing device or the like.
Consists of a mass flow controller (3) and shutoff / opening devices (1) and (2) provided on the left and right sides of the massflow controller (3) .Each of the shutoff / opening devices (1) and (2) has an inlet and an outlet. A plurality of valves (6) (7) (8) (9) (10) provided on the lower surface and each valve (6) (7)
(8) (9) (10) consists of a valve mounting base (28) (29), which is detachably mounted in one direction from above, and the valve mounting base (28) (29) Inflow path forming members (30) and (34) having a passage leading to the inlets of the valves (6) and (8) arranged at the inlets of the adjacent valves (6) (7) (8) (9) (10) One or more communication passage forming members (31), (36), (38) having a passage communicating with the outlet and an outlet having a passage communicating with the outlet of the valve (7) (10) arranged on the other end side. It is formed by the road forming members (33) and (39).

In the figure, (5) and (11) are joints (40) (4)
1) A check valve comprising a left valve body (22) (25) provided with (60) (61), a center valve body (23) (26) and a right valve body (24) (27), 32), (35), (37) are auxiliary passage forming members composed of the joint holding members (47), (51), (53) and the joint portions (48), (52), (54),
Reference numerals (49) and (50) denote rectangular parallelepiped projections provided at the lower end of the mass flow controller (3) and having a passage opening downward. The on-off valves (6), (7), (8), (9), and (10) are respectively mounted on the valve body (12), (14), (16), (18), and (20) and the valve attached thereto from above. Actuator (13) (15) (17) (19) (21) that appropriately closes and opens the flow path in the body (12) (14) (16) (18) (20)
And a rectangular flange (12a) (14a) (16a) (18) provided at the lower end of the valve body (12) (14) (16) (18) (20).
a) (20a) is connected to the valve mounting bases (28) and (29) by screws (not shown) screwed from above.

[0004]

SUMMARY OF THE INVENTION
(1) In (2), the block-shaped joint member (31) (33) (34) (36)
(39) has the advantage of reducing the number of parts and easiness of heating by the heater, but the V-shaped passages (31a) (33a) (34a)
Block-shaped joint members having (36a) and (39a) (31) (33) (34)
(36) In the case of using (39), as compared with the flow path forming member having a U-shaped passage, since the flow path diameter is small even if the diameter of the opening is the same, it is disadvantageous in terms of increasing the flow rate. I have.

FIGS. 4A and 4B are enlarged views of a conventional fluid coupling member. FIG. 4A shows a valve body (12) of a first on-off valve and a second on-off valve shown in FIG. It is an enlarged cross-sectional view of the butt portion of the valve body (14) of the valve and the communication path forming member (31),
(B) is a sectional view in which the butted portion of the valve body (12) of the first on-off valve and the communication passage forming member (31) is further enlarged.
Conventional fluid coupling members (12) and (31) are, as shown in the figure, in a recess provided on the butt end face of each member (12) and (31), annular projections for gasket pressing (81a) and (82a). Cylindrical protrusions (81) and (82) are provided at the end, and the fluid passages (85) and (86) of the members (12) and (31) are formed on the inner periphery of the cylindrical protrusions (81) and (82). A short opening passage formed by a surface and orthogonal to the butt end face
(85a) (86a) and main passages (85b) (86b) connected to it in an inclined manner
It consists of An annular gasket (73) held by a retainer (74) is interposed between the two members (12) and (31). It is attached to the outer periphery of the part (72).

The fluid coupling member (12) formed as described above.
In (31), the diameter of the main passages (85b) and (86b) is restricted by the existence of the short opening passages (85a) and (86a) orthogonal to the abutting end surface, and as a result, the cross-sectional area of the passage is reduced. There was a problem that it was not secured.

SUMMARY OF THE INVENTION An object of the present invention is to provide a fluid coupling member which can eliminate the drawback of the flow reduction factor while securing the advantage of using a block-shaped coupling member having a V-shaped passage.

[0008]

In the fluid coupling member according to the present invention, a fluid passage inclined with respect to the normal direction of the butt end face is formed, and an annular projection for gasket pressing is provided so as to surround the opening of the fluid passage. The fluid coupling member according to claim 1, wherein a spherical fluid passage perforation assisting recess is formed at an opening of the fluid passage.

Here, the term "fluid coupling member" refers to a block-shaped fluid coupling member used for connecting an outlet of an on-off valve and an inlet of a mass flow controller, and an actuator for opening and closing a fluid passage. The valve body shall be included.

[0010]

Embodiments of the present invention will be described below with reference to the drawings.

FIGS. 1 (a) and 1 (b) show a fluid coupling member of the present invention. FIG. 1 (a) shows a valve body (12) of a first on-off valve and a second on-off valve of FIG. It is an expanded sectional view of the butting part of valve body (14) and communication passage formation member (31), (b)
The valve body (12) of the first on-off valve and the communication passage forming member (31)
FIG. 4 is a cross-sectional view in which the butted portion of FIG. 4, the same components as those in FIG. 4 are denoted by the same reference numerals, and description thereof is omitted.

In FIG. 1, each member (12) (14) (31) has a slanted fluid passage (12a) (14a) (31a). (69) and (70) are provided, and the concave portions (69) and (70) are provided with cylindrical protrusions (71) and (72) each having a gasket pressing annular protrusion (71a) (72a) at the tip. I have. At the open end of each of the oblique fluid passages (12a) (14a) (31a), short open passages (85a) (86a) that are orthogonal to the abutting end faces are not opened. ,
The abutting end face has a recess for assisting drilling of a spherical fluid passage.
(75) is formed. The diameter of the openings of the fluid passages (12a), (14a), (31a) is made equal to the inner diameter of the gasket (73). The diameter of the spherical recess (75) at the opening of the fluid passages (12a) (14a) (31a) is equal to the inner diameter of the gasket (73), and is therefore provided slightly outside the inner circumference of the gasket (73). The inner diameter of the gasket pressing annular projections (71a) (72a) is smaller than the inner diameter.

Each of the oblique fluid passages (12a) (14a) (31a) has a spherical recess (75) at the opening of the fluid passage (12a) (14a) (31a).
It is opened with a diameter almost equal to the diameter of. That is, FIG.
As shown in (a), first, a spherical recess (75) having a maximum diameter equal to the inner diameter of the gasket (73) is formed on the abutting end face, and then corresponds to the maximum diameter of the spherical recess (75). By opening the oblique fluid passage (31a) having a diameter of a size corresponding to the diameter of the oblique fluid passage (12a) of each member (12) (14) (31).
a) (14a) and (31a) are formed.

According to the fluid coupling member of the present invention, the fluid passage is larger than the main passages (85b) and (86b) of the fluid coupling member shown in FIG.
Since the diameters of (12a), (14a), and (31a) are large, and the annular projections (71a) (72a) for gasket holding contact the radial center of the gasket (73), the gasket (73) There is no stress concentration on the inner edge, and therefore, the flow rate is increased without demerits such as generation of wrinkles in the gasket (73).

[0015]

According to the fluid coupling member of the present invention, for the fluid coupling member in which the fluid passage is inclined with respect to the direction perpendicular to the butt end face, the flow rate can be increased without generating disadvantages such as wrinkling of the gasket. Therefore, the advantage of using the block-shaped joint member having the V-shaped fluid passage can be secured, and the drawback of the flow rate reduction factor can be eliminated.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a fluid coupling member according to the present invention.

FIG. 2 is a partially enlarged sectional view showing a main part and a manufacturing method of a fluid coupling member according to the present invention.

FIG. 3 is a diagram showing a fluid control device in which the fluid coupling member according to the present invention is used.

FIG. 4 is a sectional view showing a conventional fluid coupling member.

[Explanation of symbols]

 (12) First on-off valve body (14) Second on-off valve body (31) Communication passage forming member (12a) (14a) (31a) Oblique fluid passage (71a) (72a) Annular projection for gasket holding (75) Recess for assisting drilling of fluid passage

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Osamu Fukada 2-3-2, Noribori, Nishi-ku, Osaka-shi Inside Fujikin Co., Ltd. (72) Inventor Tadanobu 2-2-2, Noribori, Nishi-ku, Osaka Fujikin Co., Ltd. (72) Inventor Kosuke Yokoyama 2-3-2, Nobori, Nishi-ku, Osaka-shi Fujikin F-term (reference) 3H051 AA01 AA03 BB10 CC11 CC14 CC15 CC16 EE01 FF09

Claims (1)

[Claims] In a fluid coupling member, a fluid passage inclined with respect to a normal direction of a butt end face is formed, and a gasket pressing annular projection is provided so as to surround the opening of the fluid passage. A fluid coupling member, wherein a spherical fluid passage perforation assisting recess is formed.