JP2000213659A - Fluid coupling member - Google Patents

Fluid coupling member

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Publication number
JP2000213659A
JP2000213659A JP11019748A JP1974899A JP2000213659A JP 2000213659 A JP2000213659 A JP 2000213659A JP 11019748 A JP11019748 A JP 11019748A JP 1974899 A JP1974899 A JP 1974899A JP 2000213659 A JP2000213659 A JP 2000213659A
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JP
Japan
Prior art keywords
fluid
coupling member
passage
fluid passage
31a
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11019748A
Other languages
Japanese (ja)
Inventor
Osamu Fukada
Yuji Karato
Michio Yamaji
Kosuke Yokoyama
Tadanobu Yoshida
忠信 吉田
裕司 唐土
道雄 山路
光祐 横山
収 深田
Original Assignee
Fujikin Inc
株式会社フジキン
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc, 株式会社フジキン filed Critical Fujikin Inc
Priority to JP11019748A priority Critical patent/JP2000213659A/en
Publication of JP2000213659A publication Critical patent/JP2000213659A/en
Application status is Pending legal-status Critical

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Abstract

PROBLEM TO BE SOLVED: To eliminate a disadvantageous flow rate reducing factor in use of a block type coupling member having a V-shaped passage while securing an advantage of using it by forming a spherical fluid passage perforation auxiliary recess part in an opening of a fluid passage. SOLUTION: In fluid coupling members 12, 31, fluid passages 12a, 31a tilting to the normal line direction of an abutting end face are formed, and gasket pressing annular projections 72, 73 are arranged so as to surround opening parts of the fluid passages 12a, 31a. In the openings of the fluid passages 12a, 31a, a spherical fluid passage perforation auxiliary recess part 75 is formed. In this way, a flow rate can be increased without causing any demerit such as generation of wrinkles in a gasket, and a disadvantageous flow rate reducing factor can be eliminated while securing advantage of using a block type coupling member having a V-shaped fluid passage.

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【発明の属する技術分野】この発明は、半導体製造装置等において用いられる流体制御装置において、例えば、 [Field of the Invention The invention provides a fluid control apparatus for use in a semiconductor manufacturing apparatus or the like, for example,
開閉弁の出口とマスフローコントローラの入口とを連通させるさいなどに使用されるブロック状の流体継手部材に関する。 An inlet of the outlet and the mass flow controller on-off valve for block-shaped fluid coupling member used like again to communicate.

【0002】 [0002]

【従来の技術】図3は、この発明の流体継手部材が使用される流体制御装置を示している。 BACKGROUND ART FIG. 3, the fluid coupling member of the invention shows a fluid control device used. これは、本発明者らが提案したもので(特願平9−278473参照)、半導体製造装置等において用いられる流体制御装置(4) This is what the present inventors have proposed (see Japanese Patent Application No. 9-278473), a fluid control apparatus for use in semiconductor manufacturing apparatus or the like (4)
は、マスフローコントローラ(3)およびこれの左方および右方に設けられた遮断開放器(1)(2)により構成されており、各遮断開放器(1)(2)が、入口および出口が下面に設けられた複数の弁(6)(7)(8)(9)(10)と、各弁(6)(7) The mass flow controller (3) and its left and shutoff-opening device provided on the right side (1) (2) is constituted by, each shutoff-opening device (1) (2), inlet and outlet a plurality of valves provided on the lower surface (6) (7) (8) (9) and (10), each valve (6) (7)
(8)(9)(10)が上方から着脱自在に一方向に並んで取り付けられている弁取付基部(28)(29)とよりなり、弁取付基部(28)(29)が、一端側に配置された弁(6)(8)の入口に通じる通路を有する流入路形成部材(30)(34)と、隣り合う弁(6)(7)(8)(9)(10)の入口と出口とを連通する通路を有する1または複数の連通路形成部材(31)(36)(38)と、他端側に配置された弁(7)(10) の出口に通じる通路を有する流出路形成部材(33)(39)とによって形成されている。 (8) (9) (10) and more becomes a Row attached valve mounting base (28) (29) in one direction detachably from above, the valve mounting base (28) (29), one end inlet of the deployed valve (6) (8) the inflow channel forming member (30) having a passage leading to the inlet of the (34), adjacent the valve (6) (7) (8) (9) (10) outflow with the one or more of the communication passage forming member having a passage connecting the outlet (31) (36) (38), the passage leading to the outlet of the deployed valve (7) (10) on the other end It is formed by the road forming member (33) (39).

【0003】同図において、(5)(11) は、継手部(40)(4 [0003] In the figure, (5) (11), the joint portion (40) (4
1)(60)(61)が設けられた左側弁本体(22)(25)、中央弁本体(23)(26)および右側弁本体(24)(27)よりなる逆止弁であり、(32)(35)(37)は、継手保持部材(47)(51)(53)および継手部(48)(52)(54)からなる副通路形成部材であり、 1) (60) (61) left valve body is provided (22) (25), a central valve body (23) (26) and a check valve consisting of the right valve body (24) (27), ( 32) (35) (37), the joint holding member (47) (51) (53) and the joint portion (48) (52) (54) and the auxiliary passage forming member made of,
(49)(50)は、マスフローコントローラ(3) の下端部に設けられかつ下向きに開口した通路を有する直方体状張出部である。 (49) (50) is a rectangular parallelepiped projecting portion having a passage that opens and downwardly provided at the lower end of the mass flow controller (3). また、各開閉弁(6)(7)(8)(9)(10)は、それぞれ、弁本体(12)(14)(16)(18)(20)およびこれに上方から取り付けられて弁本体(12)(14)(16)(18)(20)内の流路を適宜遮断開放するアクチュエータ(13)(15)(17)(19)(21) Each on-off valve (6) (7) (8) (9) (10), respectively, the valve body (12) (14) (16) (18) (20) and this is attached from above the valve body (12) (14) (16) (18) (20) actuator appropriately shutoff-opening the flow path in the (13) (15) (17) (19) (21)
よりなり、弁本体(12)(14)(16)(18)(20)の下端部に設けられた上から見て方形のフランジ部(12a)(14a)(16a)(18 More becomes, the valve body (12) (14) (16) (18) (20) rectangular flange portion as viewed from the top provided at the lower end of (12a) (14a) (16a) (18
a)(20a)が上方からねじ込まれたねじ(図示略)により弁取付基部(28)(29)に結合されている。 a) (20a) is coupled to the screw screwed from above (the valve mounting base by not shown) (28) (29).

【0004】 [0004]

【発明が解決しようとする課題】上記の各遮断開放器 [SUMMARY OF THE INVENTION Each shutoff-opening device described above
(1)(2)において、ブロック状継手部材(31)(33)(34)(36) (1) in (2), a block-shaped joint members (31) (33) (34) (36)
(39)は、部品数の低減とヒーターによる加熱の容易さという利点を有しているが、V字状通路(31a)(33a)(34a) (39), has the advantage of ease of heat by reducing the heater in the number of components, V-shaped passage (31a) (33a) (34a)
(36a)(39a) を有するブロック状継手部材(31)(33)(34) (36a) blocky joint member (31) having a (39a) (33) (34)
(36)(39)を用いた場合、U字状通路を有する流路形成部材と比較すると、その開口部の径が同じでも流路径が小さくなるため、流量アップという点からは不利になっている。 (36) (39) is used, when compared to the flow path forming member having a U-shaped passage, since the channel diameter size of the opening is even with the same decreases, becomes disadvantageous from the viewpoint that flow up there.

【0005】図4(a)(b)は、従来の流体継手部材を拡大して示すもので、(a)は、図3に示した第1開閉弁の弁本体(12)、第2開閉弁の弁本体(14)および連通路形成部材(31)の突き合わせ部の拡大断面図であり、 [0005] FIG. 4 (a) (b) is it shows an enlarged conventional fluid coupling member, (a) represents the valve body (12) of the first on-off valve shown in FIG. 3, the second on-off is an enlarged sectional view of a butt portion of the valve body (14) and the communication passage forming member of the valve (31),
(b)は、第1開閉弁の弁本体(12)および連通路形成部材(31)の突き合わせ部をさらに拡大した断面図である。 (B) is a cross-sectional view of the abutted portion to further expand the first opening and closing valve of the valve body (12) and the communication passage forming member (31).
従来の流体継手部材(12)(31)は、同図に示すように、各部材(12)(31)の突き合わせ端面に設けられた凹所に、ガスケット押さえ用環状突起(81a)(82a)を先端に有する円筒状突出部(81)(82)が設けられ、各部材(12)(31)の流体通路(85)(86)が、円筒状突出部(81)(82)の内周面により形成され突き合わせ端面に直交している短い開口部通路 Conventional fluid coupling member (12) (31), as shown in the figure, the recess provided in the butting end faces of the members (12) (31), a gasket holding annular projection (81a) (82a) cylindrical projection having a tip (81) (82) provided with an inner periphery of each member (12) (31) fluid passages (85) (86), a cylindrical protrusion (81) (82) short opening passageway orthogonal to the butting end face is formed by a surface
(85a)(86a)と、これに傾斜状に連なる本通路(85b)(86b) (85a) and (86a), the passage leading to the inclined thereto (85b) (86b)
とよりなるものである。 And one in which more made. 両部材(12)(31)間には、リテーナ(74)に保持された円環状ガスケット(73)が介在させられており、リテーナ(74)は、ブロック状継手部材(31)の円筒状突出部(72)の外周部に取り付けられている。 Between two members (12) (31), an annular gasket held by a retainer (74) (73) has been interposed, the retainer (74) includes a cylindrical projection of the block-shaped joint members (31) It is attached to the outer periphery of the part (72).

【0006】上記のように形成された流体継手部材(12) [0006] forming fluid coupling member as described above (12)
(31)では、突き合わせ端面に直交している短い開口部通路(85a)(86a)の存在により、本通路(85b)(86b)の径が制約されており、結果として、通路の断面積が確保されないという問題があった。 In (31), the presence of short opening passageway orthogonal to the butting end face (85a) (86a), the diameter has been constrained to the present passage (85b) (86b), as a result, the cross-sectional area of ​​the passage there is a problem that not be ensured.

【0007】この発明の目的は、V字状通路を有するブロック状継手部材を用いる利点を確保しつつ、その欠点である流量低下要因を除去することができる流体継手部材を提供することにある。 An object is of the present invention, while securing the advantage of using a block-shaped joint member having a V-shaped passage to provide a fluid coupling member which is capable of removing the flow reduction factor is its disadvantage.

【0008】 [0008]

【課題を解決するための手段】この発明による流体継手部材は、突き合わせ端面の法線方向に対して傾斜する流体通路が形成され、流体通路の開口を囲むようにガスケット押さえ用環状突起が設けられている流体継手部材において、流体通路の開口に、球面状の流体通路穿孔補助用凹所が形成されていることを特徴とするものである。 Means for Solving the Problems] fluid coupling member according to the present invention, the fluid passage is formed which is inclined with respect to the normal direction of the butted end faces, the gasket holding annular projection is provided so as to surround the opening of the fluid passage in the fluid coupling member is, the opening of the fluid passage, and is characterized in that the spherical fluid passage piercing the auxiliary recesses are formed.

【0009】ここで、流体継手部材という語は、開閉弁の出口とマスフローコントローラの入口とを連通させるさいなどに使用されるブロック状流体継手部材のほかに、流体通路遮断開放用のアクチュエータが取り付けられた弁本体も含むものとする。 [0009] Here, the term fluid coupling member, in addition to the actuator mounting for fluid passage shutoff-opening of the block-shaped fluid coupling member used like again for communicating the inlet of the outlet and the mass flow controller on-off valve also it included a valve body which is.

【0010】 [0010]

【発明の実施の形態】この発明の実施の形態を、以下図面を参照して説明する。 DETAILED DESCRIPTION OF THE INVENTION The embodiment of the present invention will be described with reference to the following drawings.

【0011】図1(a)(b)は、この発明の流体継手部材を示すもので、(a)は、図3に示した第1開閉弁の弁本体(12)、第2開閉弁の弁本体(14)および連通路形成部材(31)の突き合わせ部の拡大断面図であり、(b) [0011] Figure 1 (a) (b) is shows the fluid coupling member of the invention, (a) represents the valve body (12) of the first on-off valve shown in FIG. 3, the second on-off valve the valve body (14) and an enlarged sectional view of a butt portion of the communication passage forming member (31), (b)
は、第1開閉弁の弁本体(12)および連通路形成部材(31) The valve body of the first on-off valve (12) and the communication passage forming member (31)
の突き合わせ部をさらに拡大した断面図である。 Butt portion is a further enlarged sectional view of. 同図において、図4と同じ構成のものには、同じ符号を付して説明を省略する。 In the figure, the the same configuration as FIG. 4, the description thereof is omitted the same reference numerals.

【0012】同図において、各部材(12)(14)(31)は斜め状の流体通路(12a)(14a)(31a) を有しており、その突き合わせ端面に、それぞれ断面円形の凹所(69)(70)が設けられ、この凹所(69)(70)に、ガスケット押さえ用環状突起(71a)(72a)を先端に有する円筒状突出部(71)(72)が設けられている。 [0012] In the figure, each member (12) (14) (31) has an oblique shaped fluid passage (12a) (14a) (31a), at its butt end faces, a recess in each circular section (69) (70) is provided in the recess (69) (70), a cylindrical protrusion having a gasket holding annular projection of (71a) (72a) to the tip (71) (72) is provided there. 各斜め状の流体通路(12a)(14a)(31a)の開口端部には、突き合わせ端面に直交している短い開口部通路(85a)(86a)は開けられておらず、これに代えて、 The open end of the angled fluid passage (12a) (14a) (31a), short opening passageway orthogonal to the butting end face (85a) (86a) is not opened, instead of this ,
突き合わせ端面には、球面状の流体通路穿孔補助用凹所 The butted end faces, the spherical recess for fluid passage piercing aid
(75)が形成されている。 (75) is formed. 流体通路(12a)(14a)(31a) の開口の径は、ガスケット(73)の内径と等しくなされている。 Diameter of the opening of the fluid channel (12a) (14a) (31a) is adapted equal to the inside diameter of the gasket (73). 流体通路(12a)(14a)(31a) の開口における球面状凹所(75)の径は、ガスケット(73)の内径と等しく、したがって、ガスケット(73)の内周から若干外側に設けられているガスケット押さえ用環状突起(71a)(72a)の内径よりは小さくなされている。 Diameter of the fluid passage (12a) (14a) spherical recess at the opening of (31a) (75) is equal to the inner diameter of the gasket (73), therefore, slightly disposed outwardly from the inner periphery of the gasket (73) It is made smaller than the inner diameter of the gasket holding annular projection (71a) (72a) which are.

【0013】各斜め状流体通路(12a)(14a)(31a) は、流体通路(12a)(14a)(31a) の開口における球面状凹所(75) [0013] Each angled fluid passage (12a) (14a) (31a) into a fluid passageway (12a) (14a) spherical recess at the opening of (31a) (75)
の径にほぼ等しい径で開けられている。 It is opened in approximately equal diameter to the diameter. すなわち、図2 That is, FIG. 2
(a)に示すように、まず、突き合わせ端面に最大径がガスケット(73)の内径と等しい球面状凹所(75)が形成され、次いで、この球面状凹所(75)の最大径に相当する大きさの径を有する斜め状の流体通路(31a) が開けられることにより、各部材(12)(14)(31)の斜め状流体通路(12 (A), the first maximum diameter in butted end faces are formed gasket inside diameter (73) equal spherical recess (75) is then equivalent to the maximum diameter of the spherical recess (75) by the angled fluid passage (31a) is opened having a size diameter of the, angled fluid passage (12 of each member (12) (14) (31)
a)(14a)(31a) が形成されている。 a) (14a) (31a) are formed.

【0014】この発明の流体継手部材によると、図4に示した流体継手部材の本通路(85b)(86b)よりも流体通路 [0014] According to the fluid coupling member of the invention, the fluid passage than the passage of the fluid coupling member shown in FIG. 4 (85b) (86b)
(12a)(14a)(31a) の径が大きくなっており、また、ガスケット押さえ用環状突起(71a)(72a)がガスケット(73)の径方向中央部に接しているので、ガスケット(73)内縁部への応力集中がなく、したがって、ガスケット(73)のしわの発生などのデメリットを生じることなく流量アップが図られている。 (12a) (14a) diameter (31a) has become large, since the gasket holding annular projection (71a) (72a) is in contact with the radially intermediate portion of the gasket (73), gaskets (73) no stress concentration on the inner edge, therefore, the flow rate up is achieved without causing demerits such as generation of wrinkles of the gasket (73).

【0015】 [0015]

【発明の効果】この発明の流体継手部材によると、流体通路が突き合わせ端面に直交する方向に対して傾斜している流体継手部材について、ガスケットのしわの発生などのデメリットを生じることなく流量アップができるので、V字状流体通路を有するブロック状継手部材を用いる利点を確保しつつ、その欠点である流量低下要因を除去することができる。 According to the fluid coupling member according to the present invention the present invention, the fluid coupling member which is inclined with respect to the direction perpendicular to the end face butt fluid passage, the flow rate up without causing disadvantages such as occurrence of wrinkles in the gasket since it, while ensuring the advantage of using a block-shaped joint member having a V-shaped fluid passageway, it is possible to remove the flow reduction factor is its disadvantage.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】この発明による流体継手部材を示す断面図である。 1 is a cross-sectional view showing a fluid coupling member according to the present invention.

【図2】この発明による流体継手部材の要部および製造方法を示す部分拡大断面図である。 2 is a partial enlarged sectional view showing a main part and a manufacturing method of a fluid coupling member according to the present invention.

【図3】この発明による流体継手部材が使用される流体制御装置を示す図である。 3 is a diagram showing a fluid control device in which the fluid coupling members are used according to the present invention.

【図4】従来の流体継手部材を示す断面図である。 4 is a sectional view showing a conventional fluid coupling member.

【符号の説明】 DESCRIPTION OF SYMBOLS

(12) 第1開閉弁本体 (14) 第2開閉弁本体 (31) 連通路形成部材 (12a)(14a)(31a) 斜め状流体通路 (71a)(72a) ガスケット押さえ用環状突起 (75) 流体通路穿孔補助用凹所 (12) first on-off valve body (14) the second on-off valve body (31) communicating passage forming member (12a) (14a) (31a) angled fluid passage (71a) (72a) gasket holding annular projection (75) recesses fluid passage piercing aid

───────────────────────────────────────────────────── フロントページの続き (72)発明者 深田 収 大阪市西区立売堀2丁目3番2号 株式会 社フジキン内 (72)発明者 吉田 忠信 大阪市西区立売堀2丁目3番2号 株式会 社フジキン内 (72)発明者 横山 光祐 大阪市西区立売堀2丁目3番2号 株式会 社フジキン内 Fターム(参考) 3H051 AA01 AA03 BB10 CC11 CC14 CC15 CC16 EE01 FF09 ────────────────────────────────────────────────── ─── of the front page continued (72) inventor Osamu Fukada Nishi-ku, Osaka Itachibori 2-chome No. 3 No. 2 stock company in Fujikin (72) inventor Tadanobu Yoshida Nishi-ku, Osaka Itachibori 2-chome No. 3 No. 2 stock company Fujikin the inner (72) inventor Yokoyama HikariYu Nishi-ku, Osaka Itachibori 2-chome No. 3 No. 2 stock Company Fujikin in the F-term (reference) 3H051 AA01 AA03 BB10 CC11 CC14 CC15 CC16 EE01 FF09

Claims (1)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 突き合わせ端面の法線方向に対して傾斜する流体通路が形成され、流体通路の開口を囲むようにガスケット押さえ用環状突起が設けられている流体継手部材において、流体通路の開口に、球面状の流体通路穿孔補助用凹所が形成されていることを特徴とする流体継手部材。 1. A fluid passageway which is inclined with respect to the normal direction of the butted end faces are formed in the fluid coupling member gasket holding annular projection is provided so as to surround the opening of the fluid passage, the opening of the fluid passage fluid coupling member characterized by spherical fluid passage piercing the auxiliary recesses are formed.
JP11019748A 1999-01-28 1999-01-28 Fluid coupling member Pending JP2000213659A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11019748A JP2000213659A (en) 1999-01-28 1999-01-28 Fluid coupling member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11019748A JP2000213659A (en) 1999-01-28 1999-01-28 Fluid coupling member

Publications (1)

Publication Number Publication Date
JP2000213659A true JP2000213659A (en) 2000-08-02

Family

ID=12007975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11019748A Pending JP2000213659A (en) 1999-01-28 1999-01-28 Fluid coupling member

Country Status (1)

Country Link
JP (1) JP2000213659A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004036099A1 (en) * 2002-10-21 2004-04-29 Ckd Corporation Integrated gas valve
JPWO2008062679A1 (en) * 2006-11-22 2010-03-04 株式会社フジキン Fluid coupling

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004036099A1 (en) * 2002-10-21 2004-04-29 Ckd Corporation Integrated gas valve
CN100339629C (en) * 2002-10-21 2007-09-26 喜开理株式会社 Integrated gas valve
JPWO2008062679A1 (en) * 2006-11-22 2010-03-04 株式会社フジキン Fluid coupling
JP5087555B2 (en) * 2006-11-22 2012-12-05 株式会社フジキン Fluid coupling

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