WO2008032406A1 - Dispositif de disque magnétique - Google Patents

Dispositif de disque magnétique Download PDF

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Publication number
WO2008032406A1
WO2008032406A1 PCT/JP2006/318404 JP2006318404W WO2008032406A1 WO 2008032406 A1 WO2008032406 A1 WO 2008032406A1 JP 2006318404 W JP2006318404 W JP 2006318404W WO 2008032406 A1 WO2008032406 A1 WO 2008032406A1
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WIPO (PCT)
Prior art keywords
substrate
recording medium
recording
layer
texture
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PCT/JP2006/318404
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English (en)
Japanese (ja)
Inventor
Kiyoshi Yamaguchi
Kenji Sato
Hisashi Umeda
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Fujitsu Limited
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Publication date
Application filed by Fujitsu Limited filed Critical Fujitsu Limited
Priority to PCT/JP2006/318404 priority Critical patent/WO2008032406A1/fr
Publication of WO2008032406A1 publication Critical patent/WO2008032406A1/fr

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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62—Record carriers characterised by the selection of the material
    • G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
    • G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
    • G11B5/676—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having magnetic layers separated by a nonmagnetic layer, e.g. antiferromagnetic layer, Cu layer or coupling layer
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers

Definitions

  • the present invention relates to a perpendicular magnetic recording medium having a texture, a method for manufacturing the same, and a magnetic storage device including the perpendicular magnetic recording medium.
  • the recording density has been remarkably improved by reducing the medium noise of the magnetic disk and adopting a spin valve reproducing element in the magnetic head, and 100 Gbit / (inch) A surface recording density exceeding 2 is achieved.
  • a magnetic recording medium of an in-plane recording system has been used as the magnetic recording medium.
  • This method is known to reduce media noise by reducing the residual magnetic film thickness product (tBr) and increasing the coercive force (He) of magnetic recording media.
  • tBr residual magnetic film thickness product
  • He coercive force
  • tBr residual magnetic film thickness product
  • crystal grains in the recording layer become finer, and the so-called thermal fluctuation problem occurs in which the remanent magnetism of the recording layer gradually decreases due to the influence of thermal energy.
  • He coercive force
  • Due to this background it has been difficult to increase the recording density of the longitudinal recording type magnetic recording medium.
  • the development of perpendicular magnetic recording magnetic recording media has become active! RU
  • the recording bit recorded on the perpendicular magnetic recording medium has an advantage that the higher the recording density, the larger the residual magnetic field is, due to the influence of the demagnetizing field of the adjacent recording bit. .
  • the thermal fluctuation resistance is also enhanced.
  • a soft magnetic backing layer made of a soft magnetic material is provided between the substrate and the recording layer. Recording and playback are possible without providing a soft magnetic backing layer, but the combination of a single-pole head and backing layer allows the magnetic field generated by the recording element force during recording to be compared with a conventional in-plane recording head. About 1.3 times or more. This makes it possible to apply He higher than that of the in-plane recording medium to the perpendicular medium. Soft magnetic back The striking layer steeply draws the magnetic field in which the recording element force is generated, so the magnetic field gradient is reduced and the influence of the signal writing spread is reduced. Thus, the perpendicular magnetic recording medium has various advantages compared to the in-plane magnetic recording medium.
  • Patent Document 1 JP 2005-353177 A
  • Patent Document 1 since the polishing tape containing the abrasive on the surface of the substrate is formed by oscillating in the radial direction while rotating the substrate, the texture groove has a diameter. Therefore, the extending direction of the groove is widened with respect to the radial direction), and the magnetic easy axis of the soft magnetic underlayer is accordingly increased with respect to the radial direction. Spreading (angle dispersion becomes larger) and the orientation of the easy axis is insufficient. As a result, there is a problem that wide-area track erasure cannot be sufficiently suppressed.
  • the present invention has been made in view of the above problems, and an object of the present invention is to improve the orientation of the magnetic easy axis of the soft magnetic backing layer so as to suppress wide track erase. Another object of the present invention is to provide a perpendicular magnetic recording medium, a manufacturing method thereof, and a magnetic storage device including the perpendicular magnetic recording medium.
  • a perpendicular magnetic recording medium for recording information by magnetizing a recording layer in a predetermined recording direction, a substrate, and a soft magnetic underlayer formed on the substrate, A recording layer formed on the soft magnetic underlayer, and the recording method is provided on the surface of the substrate.
  • the texture has a plurality of groove forces extending substantially orthogonal to the direction, and the texture is composed of a plurality of convex bodies that are long in substantially one direction, and the longitudinal direction of the texture is the recording direction.
  • a perpendicular magnetic recording medium characterized in that a plurality are arranged substantially along the perpendicular direction.
  • a plurality of groove-force textures extending substantially perpendicular to the recording direction are formed on the surface of the substrate, and the texture is a plurality of convex bodies that are long in one direction. Since the convex bodies are arranged in a plurality along the direction in which the longitudinal direction is orthogonal to the recording direction, the easy magnetization axis of the soft magnetic underlayer is oriented in the direction substantially orthogonal to the recording direction. Since the orientation becomes better, it is possible to suppress the erasure of the wide area track.
  • a magnetic storage device comprising any one of the above perpendicular magnetic recording media, and recording / reproducing means having a recording element and a magnetoresistive effect type reproducing element.
  • the perpendicular magnetic recording medium is capable of erasing a wide area track, it is possible to provide a magnetic storage device capable of increasing the recording density.
  • a method for manufacturing a perpendicular magnetic recording medium wherein information is recorded by magnetizing a recording layer disposed on a substrate in a predetermined recording direction. Irradiating the surface with an ion beam from the oblique direction along the recording direction and the surface of the substrate; forming a texture; forming a soft magnetic underlayer on the textured substrate; Forming a recording layer on the soft magnetic underlayer, and a method for producing a perpendicular magnetic recording medium.
  • a texture is formed on the surface of the substrate in a self-organizing manner along a direction orthogonal to the recording direction, and the easy magnetic axis of the soft magnetic underlayer is oriented in the direction orthogonal to the recording direction. Is done.
  • FIG. 1 is a cross-sectional view of a perpendicular magnetic recording medium according to a first embodiment of the present invention.
  • FIG. 2 is a schematic view of a part of a substrate on which a texture is formed.
  • FIG. 3 is a view for explaining the orientation of the easy axis of a magnetic underlayer.
  • ⁇ 4 A sectional view of a perpendicular magnetic recording medium of a first modification according to the first embodiment.
  • FIG. 5 is a cross-sectional view of a perpendicular magnetic recording medium of a second modification according to the first embodiment.
  • FIG. 6 is a diagram (part 1) for explaining a texture forming method.
  • FIG. 8A is an AFM image (0 degree) of the texture of the example.
  • FIG. 8B is an AFM image (90 degrees) of the texture of the example.
  • FIG. 8C is an AFM image (180 degrees) of the texture of the example.
  • FIG. 8D is an AFM image (270 degrees) of the texture of the example.
  • FIG. 9 is a diagram showing the magnetic properties of the soft magnetic underlayer of the example.
  • FIG. 10 is a diagram showing magnetic characteristics of a soft magnetic underlayer of a comparative example.
  • FIG. 11 is a perspective sectional view of a first example of the perpendicular magnetic recording medium according to the second embodiment of the present invention.
  • FIG. 12 is a cross-sectional view taken along the circumferential direction of the perpendicular magnetic recording medium of the first example according to the second embodiment.
  • FIG. 13 A perspective sectional view of a perpendicular magnetic recording medium of a second example according to the second embodiment.
  • FIG. 14 A diagram showing a main part of a magnetic memory device according to the third embodiment of the present invention. Explanation of symbols
  • FIG. 1 is a cross-sectional view of a perpendicular magnetic recording medium according to the first embodiment of the present invention.
  • Fig. 1 is a cross-sectional view along the recording direction.
  • a perpendicular magnetic recording medium 10 includes a substrate 11 having a texture 11a formed on a surface thereof, a soft magnetic underlayer 12, and a seed layer thereon. 13, an intermediate layer 14, a recording layer 15, a protective film 16, and a lubricating layer 17 are sequentially deposited.
  • irregularities may be formed on the surface of the seed layer 12 and the like deposited on the texture 11a due to the irregularities of the texture 11a, but the irregularities are omitted for convenience of explanation.
  • the perpendicular magnetic recording medium 10 will be described by taking a magnetic disk formed on a disk-shaped substrate as an example. That is, the recording direction is the circumferential direction, and the direction orthogonal to the recording direction is the radial direction.
  • the perpendicular magnetic recording medium 10 will be specifically described.
  • the substrate 11 is not particularly limited, and for example, a glass substrate, a NiP plated aluminum alloy substrate, a silicon substrate, a plastic substrate, a ceramic substrate, a carbon substrate, or the like can be used.
  • the substrate is preferably a glass substrate in that a preferable texture that will be described in detail later can be formed on the surface.
  • the glass substrate include soda-lime glass, borosilicate glass, aluminoborosilicate glass substrate, and crystallized glass substrate that have been chemically strengthened.
  • the soft magnetic underlayer 12 has a film thickness of, for example, 20 nm to 2 ⁇ m, Fe, Co, Ni, Al, Si, Ta, Ti, Zr, Hf, V, Nb, C, and B Amorphous or microcrystalline soft magnetic material containing at least one element selected from The soft magnetic underlayer 12 is made of, for example, CoNb Zr, CoTaZr, FeCoB, FeTaC, FeAISi, and NiFe. By selecting such a soft magnetic material, saturation of the recording magnetic field can be suppressed and side erase can be suppressed. Further, the soft magnetic backing layer 12 is not limited to one layer, and a plurality of layers may be laminated.
  • the seed layer 13 has a film thickness of, for example, 2.0 nm to 10 nm, and is made of an amorphous nonmagnetic material containing, for example, Ta, W, Mo, or the like.
  • the seed layer 13 improves the crystal orientation of the crystal grains of the intermediate layer 14 formed thereon. Further, the seed layer 13 makes the grain size of the crystal particles of the intermediate layer 14 uniform.
  • the seed layer 13 further includes a face-centered cubic lattice (fee) on the above amorphous amorphous material layer in that the crystal orientation of the intermediate layer 14 is improved. It is preferable to stack a crystalline layer having a crystal structure. Examples of strong crystalline layer materials include Cu, Ni, NiFe, NiCr, and NiCu. Each of these crystalline layers grows preferentially on the (111) crystal plane. When the intermediate layer 14 is made of a material having a hexagonal close packed (hep) crystal structure, the (0002) plane grows preferentially on the (111) crystal plane of the crystalline layer having the fee crystal structure. Although it is preferable to provide the seed layer 13 as described above, it may be omitted.
  • a face-centered cubic lattice (fee) on the above amorphous amorphous material layer in that the crystal orientation of the intermediate layer 14 is improved. It is preferable to stack a crystalline layer having a crystal structure. Examples of strong crystalline layer materials include Cu, Ni, NiF
  • the intermediate layer 14 also has a nonmagnetic material force having a hep crystal structure.
  • the intermediate layer 14 has, for example, a nonmagnetic Ru—X alloy having a Ru, hep crystal structure (X is at least one kind of force selected from the group consisting of Co, Cr, Fe, Ni, Ta, B, and Mn). ).
  • the intermediate layer 14 has a (0002) plane preferentially grown on the seed layer 13 that also has an amorphous nonmagnetic material force.
  • the intermediate layer 14 has a (0002) plane on the crystalline layer when the seed layer 13 is a layer having an amorphous nonmagnetic material force and a crystalline layer having a fee crystal structure.
  • the epitaxial growth is preferentially performed, the crystallinity and the crystal orientation become good, and the crystallinity of the intermediate layer 14 itself becomes good.
  • the c-axis orientation of the intermediate layer 14 is perpendicular to the substrate surface, and the crystal orientation is improved.
  • the intermediate layer 14 improves the crystal orientation of the recording layer 15 and improves the recording / reproducing characteristics.
  • the intermediate layer 14 also has any one kind of force selected from the group consisting of Ru, RuCo, RuCoCr, RuCoB, and RuCoCrTa. Since these materials have substantially the same lattice spacing as that of the recording layer 15, lattice matching is good with each other, orientation dispersion of the easy axis (c-axis) of the recording layer 15 is reduced, and recording / reproduction characteristics are improved. improves.
  • the intermediate layer 14 is provided in terms of obtaining better magnetic characteristics and recording characteristics. However, it is not always necessary to provide the intermediate layer 14 according to the characteristics required for the perpendicular magnetic recording medium 10. Absent.
  • the recording layer 15 is made of a ferromagnetic material, and includes, for example, a ferromagnetic material having a hep crystal structure. Ferromagnetic materials having a hep crystal structure include CoCr, CoPt, CoCrTa, CoCrPt, and CoCrPt—M (M is at least one of the group consisting of B, Mo, Nb, Ta, W, and Cu. (Hereinafter, referred to as a recording layer ferromagnetic material.) O
  • the recording layer 15 may be a ferromagnetic layer consisting of only the recording layer ferromagnetic material, a so-called continuous film.
  • the recording layer 15 may be a ferromagnetic material in which a recording layer ferromagnetic material is formed by sputtering in an atmosphere containing oxygen gas and oxygen is incorporated in the film. As a result, oxygen is taken into the grain boundary part, which is the interface between the magnetic particles, so that the thickness of the grain boundary part increases and the magnetic particles are further separated. This reduces media noise and improves the signal-to-noise ratio.
  • a recording layer 15 has a composition in which the recording layer ferromagnetic material contains 0 (oxygen), and is, for example, CoCr-0, CoCrPt-0, CoCrPt-0, or CoCrPt-MO.
  • the recording layer 15 may be a so-called dura-layer film composed of magnetic particles made of a recording layer ferromagnetic material and a non-solid solution layer made of a nonmagnetic material surrounding the recording layer.
  • the magnetic particles have a columnar structure that grows from the surface of the intermediate layer 14 in a direction substantially perpendicular to the substrate surface, and are separated from each other by a non-solid solution phase in the substrate surface direction.
  • the non-solid phase is composed of a non-magnetic material that does not form a solid solution with a ferromagnetic material that forms magnetic particles, or does not form a compound.
  • the non-solid solution phase is composed of one element selected from Si, Al, Ta, Zr, Y, Ti, and Mg, and at least one element selected from 0, N, and C forces.
  • oxides such as SiO, Al 2 O, Ta 2 O, ZrO, YO, TiO, MgO, Si N,
  • Magnetic particles are physically separated from adjacent magnetic particles by a non-solid solution phase made of such a non-magnetic material, so that magnetic interaction is reduced, and as a result, medium noise is reduced and SN ratio is reduced. improves.
  • the magnetic particles are made of one of CoCrPt and CoCrPt-M, and the non-solid solution layer also has an oxidative strength.
  • the solid solution layer is preferably made of SiO or TiO force. This combination makes the magnetic particles non-solid.
  • the magnetic layers are separated substantially uniformly by the melt layer, and good magnetic characteristics and recording / reproducing characteristics can be obtained.
  • any of the recording layers 15 may be a ferromagnetic artificial lattice film in which thin films of a ferromagnetic element and a nonmagnetic element are alternately stacked.
  • a ferromagnetic artificial lattice film examples include a Co / Pd artificial lattice film in which many Co layers and Pd layers are alternately laminated, and a CoZPt artificial lattice film in which many Co layers and Pt layers are alternately laminated.
  • the ferromagnetic artificial lattice film has an easy axis of magnetization in the direction perpendicular to the film surface.
  • each repeating unit of the Co layer, Pd layer, and Pt layer may be a single layer or two layers.
  • the recording layer 15 is not limited to a single layer, and a plurality of layers may be formed as a laminate.
  • the laminate is composed of ferromagnetic layers containing recording layer ferromagnetic materials having different compositions. That is, the recording layer 15 also has a recording layer ferromagnetic material having a combination of different elements, or a recording layer ferromagnetic material having a combination of the same elements and different element contents.
  • the film thickness of the recording layer 15 is 3 ⁇ in view of being suitable for increasing the recording density! Set in the range of ⁇ 15nm It is preferable.
  • the protective film 18 is not particularly limited, and is made of any of amorphous carbon, hydrogenated carbon, carbon nitride, aluminum oxide, and the like having a film thickness of 0.5 nm to 15 nm, for example.
  • the lubricant layer 19 is not particularly limited.
  • a lubricant having a main chain of perfluoropolyether having a film thickness of 0.5 nm to 5 nm can be used.
  • the lubricating layer 19 may or may not be provided depending on the material of the protective film 18.
  • FIG. 2 is a schematic view of a part of the substrate on which the texture is formed.
  • FIG. 3 is a view for explaining the orientation of the easy axis of the soft magnetic underlayer.
  • the texture 11a formed on the surface of the substrate 11 is obtained by irradiating the substrate surface with an ion beam from a predetermined direction by a texture forming apparatus described later.
  • a large number of grooves are formed in a self-organized manner in the region irradiated with the ion beam.
  • a large number of grooves 11a-1 are formed substantially parallel to each other along the radial direction (CIR direction shown in FIG. 2), and the grooves 11a-1 are formed in the circumferential direction (the RAD direction shown in FIG. 2). Are formed at substantially predetermined intervals.
  • the magnetic easy axis EA of the soft magnetic underlayer 12 is oriented in the radial direction due to the texture.
  • the textured grooves 11a-1 improve the orientation of the easy axis EA in the radial direction and increase the anisotropic magnetic field Hk. Therefore, the magnetic permeability of the soft magnetic underlayer is reduced in the circumferential direction (direction perpendicular to the radial direction). Therefore, it is possible to further reduce wide area track erasure.
  • These grooves 11a-1 are formed by arranging a large number of convex bodies 11a-2 that are long in the radial direction.
  • the convex bodies 11a-2 are arranged with a slight displacement in the circumferential direction, which is not necessarily arranged in a line on a straight line along the radial direction, but arranged in a line along the radial direction.
  • the convex bodies 1 la-2 By arranging the convex bodies 1 la-2 in this way, the groove 1 la-1 does not become a straight line along the radial direction, but most of the groove 1 la-1 is along the radial direction.
  • the easy magnetic axis EA of the soft magnetic underlayer 12 reduces the deviation of the radial force.
  • the magnetic easy axis EA of the soft magnetic underlayer 12 can be reduced with respect to the radial direction compared to the conventional mechanical texture. Therefore, it is possible to reduce the wide area track erasure at any time.
  • substantially equal intervals or “substantially predetermined intervals” means that adjacent grooves intersect or a plurality of grooves as described below. Thus, this includes a case where a region where grooves are not evenly spaced in the circumferential direction is locally formed as in the case where there is a concave portion.
  • the grooves 11a-1 are uniformly formed at substantially predetermined intervals in the circumferential direction. This is very different from the conventional mechanical texture in which the grooves are formed at various intervals. Since the grooves 1 la-1 of the tester 11a of the present invention are uniformly formed at substantially predetermined intervals, uniform internal stress is generated in the soft magnetic underlayer 12 shown in FIG. . By applying uniform internal stress, it is expected that the orientation of the magnetic axis of the crystal grains constituting the soft magnetic underlayer is made uniform.
  • the circumferential interval of the textured grooves 11a-1 is preferably formed at an interval selected from the range of lnm to LOONm in terms of imparting good magnetic anisotropy. That is, in the texture 11a, it is preferable that the number of grooves per 1 m in the circumferential direction is set in a range of 1 000 to 10 in terms of imparting good magnetic anisotropy! /.
  • the depth of the groove is preferably set so that the average groove depth is in the range of 0.3 nm to 5. Onm (further 0.3 nm to 2. Onm). If the average groove depth is less than 0.3 nm, the degree of orientation in the RAD direction of the first magnetic layer 15 and the second magnetic layer 17 is not sufficient. In addition, when the average groove depth exceeds 5. Onm, the surface roughness of the recording medium deteriorates, and a head crash is likely to occur in a magnetic recording device having a high recording density and a low flying height.
  • the depth of the groove was measured by measuring the cross-sectional shape in the direction perpendicular to the groove direction using AFM, and connecting the peaks of the two peaks sandwiching the valley from the deepest position of the valley of the cross-sectional shape.
  • the length of the perpendicular line is taken as a straight line.
  • the average groove depth is the average of the measured values of the depth of about 40 grooves.
  • the soft magnetic underlayer 12 may be a single layer. Since the soft magnetic backing layer 12 has a simpler structure than a laminated ferri-structured soft magnetic backing laminate, the manufacturing cost can be reduced. Also, you have to use expensive Ru material.
  • the perpendicular magnetic recording medium 10 As described above, according to the perpendicular magnetic recording medium 10 according to the first embodiment, a large number of grooves 11a-1 are formed on the surface of the base plate 11 substantially in parallel with each other along the radial direction. ,further The grooves 11a-1 are formed at substantially predetermined intervals in the circumferential direction. For this reason, the magnetic easy axis EA of the soft magnetic underlayer 12 has a texture groove 1 la-1, which improves the radial orientation of the magnetic easy axis EA and increases the anisotropic magnetic field Hk. As a result, the magnetic permeability in the circumferential direction decreases. Therefore, the perpendicular magnetic recording medium 10 can reduce wide area track erasure.
  • FIG. 4 is a cross-sectional view of the perpendicular magnetic recording medium of the first modification example according to the first embodiment.
  • portions corresponding to the portions described above are denoted by the same reference numerals, and description thereof is omitted.
  • the perpendicular magnetic recording medium 20 of the first modification is a soft layer of a laminated ferri structure in which a nonmagnetic coupling layer 23 is sandwiched between two soft magnetic layers 22a and 22b as a soft magnetic backing layer. It has a magnetic underlayer 21. That is, the perpendicular magnetic recording medium 20 has the same configuration as the perpendicular magnetic recording medium 10 of FIG. 1 except that a soft magnetic backing laminate 21 is provided instead of the soft magnetic backing layer 12 shown in FIG.
  • the soft magnetic layers 22a and 22b are selected from the same soft magnetic material as the soft magnetic underlayer 12 shown in FIG. 1, and the product of the thickness of the soft magnetic layers 22a and 22b and the saturation magnetic flux density is set to be equal. Is done.
  • the nonmagnetic coupling layer 23 is selected from, for example, Ru, Rh, Ir, Ru-based alloy, Rh-based alloy, Ir-based alloy and the like.
  • the nonmagnetic coupling layer 23 has a thickness of 0.4 ⁇ ! It is preferably set in the range of ⁇ 1.2 nm. By setting the thickness within this range, the soft magnetic layer 22a and the soft magnetic layer 22b are antiferromagnetically exchange-coupled via the nonmagnetic coupling layer 23.
  • the magnetic direction of the soft magnetic layer 22a is In the outer peripheral direction
  • the magnetic field direction of the soft magnetic layer 22b is the inner peripheral direction.
  • FIG. 5 is a cross-sectional view of the perpendicular magnetic recording medium of the second modification example according to the first embodiment.
  • portions corresponding to the portions described above are denoted by the same reference numerals, and description thereof is omitted.
  • the perpendicular magnetic recording medium 25 of the second modified example has a dielectric layer 26 between the substrate 11 and the soft magnetic underlayer 12, and forms a texture on the substrate surface.
  • the structure is the same as that of the perpendicular magnetic recording medium 10 of FIG. 1 except that the texture 26a is formed on the surface of the dielectric layer 26.
  • the material of the dielectric layer 26 include oxides, nitrides, and carbides of metal elements, glass materials, ceramic materials, and the like. Examples thereof include silicon dioxide films, nitride nitride films, and carbide carbides. Examples include membranes.
  • FIG. 4 and 5 are views for explaining a texture forming method by the texture forming apparatus, FIG. 4 is a view as seen from above the substrate, and FIG. 5 is a schematic sectional view.
  • the texture 11 a is formed on the surface of the substrate 11 using a texture forming apparatus.
  • the texture forming process will be described in detail.
  • the texture forming apparatus 30 includes a substrate holder 31 for placing the substrate 11 in the vacuum container 44, and a substrate around the rotation axis orthogonal to the main surface of the substrate holder 31 via the substrate holder 31.
  • a rotation drive unit 32 for rotating 11 is provided.
  • the texture forming apparatus 30 is provided with an exhaust system 45 that also serves as a rotary pump, a molecular turbo pump, or the like in order to evacuate the vacuum vessel 44 and maintain it in a vacuum atmosphere.
  • An ion gun 35 that irradiates the substrate 11 with the ion beam 41 is provided above the substrate 11.
  • a Kaufman type ion gun can be used, and an ion gun such as a follow force sword type or an ECR (Electron Cyclotron Resonance) type can be used.
  • the Kaufmann ion gun is preferable in that an ion beam bundle having a large beam diameter, for example, a diameter of several cm to several tens of cm can be obtained.
  • Kaufman type ion guns are preferred because of the good straightness of the ion beam 41.
  • the ion gun 35 includes a hot cathode 36, a cylindrical magnetron anode 38, a coil 39 that applies a magnetic field in the central axis direction of the magnetron anode 38, a shielding electrode 37, and an ionized gas I. It consists of an acceleration electrode 40 etc. that accelerates together. For shielding electrode 37 and acceleration electrode 40. A large number of openings 37a and 40a having a diameter of several hundreds / zm are provided so as to face each other. A power supply device (not shown) is connected to each of the hot cathode 36, the magnetron anode 38, and the acceleration electrode 40.
  • the ion gun 35 may be provided with a u-tizer that emits thermoelectrons into the ion beam accelerated by the acceleration electrode 40. This thermoelectron causes an ion beam This suppresses charging of the surface 11-1 of the substrate 11 and the shielding plate 42 irradiated with.
  • the operation of the ion gun 35 will be described below.
  • electrons emitted from the hot cathode 36 are confined in a cylindrical magnetron anode 38 while performing trochoidal motion.
  • the trapped electrons collide with the supplied gas and ionize the gas to generate gas ions (positive ions).
  • the gas ions are extracted from the opening 40 a and accelerated by a negative acceleration voltage applied to the acceleration electrode 40 to form an ion beam 41.
  • the ion beam 41 is irradiated on the surface of the substrate 11 in a predetermined irradiation direction.
  • the irradiation direction of the ion beam 41 is set to be parallel to the circumferential direction of the substrate 11 at the irradiation position (directly below the opening 42a). Further, the irradiation direction of the ion beam 41 is set to a direction in which the irradiation angle ⁇ is inclined to the circumferential direction side of the substrate 11 from the direction orthogonal to the surface 111 of the substrate 11 as shown in FIG. That is, the irradiation direction of the ion beam 41 is a direction in which the irradiation angle ⁇ is inclined from the direction orthogonal to the substrate surface 111 in a plane formed by the circumferential direction of the substrate 11 and the direction orthogonal to the surface of the substrate 11.
  • the term “self-organizing” means that a very fine groove is automatically formed as compared with the cross-sectional dimension of the ion beam. That is, many grooves are formed in the region irradiated with the ion beam 41, rather than focusing the ion beam to form individual grooves on the substrate surface.
  • the irradiation angle ⁇ of the ion beam 41 is set in the range of 45 degrees to 70 degrees.
  • the irradiation angle ⁇ is smaller than 45 degrees or exceeds 70 degrees, it is difficult to form a groove having a sufficient depth.
  • the irradiation angle ⁇ is more preferably set in the range of 55 degrees and 65 degrees in that the groove can be formed deeper.
  • Examples of the gas used for the ion beam 41 include inert gases such as Ar, Kr, and Xe. Further, at least two of these gases may be mixed and used. As the gas used for the ion beam, Kr and Xe are preferable in that the deep groove can be formed efficiently and the uniformity of the formed groove is good.
  • the gas supply amount to the ion gun 35 may be set to a range of 2 sccm to 20 sccm, for example. preferable. Further, it is preferable to set the acceleration voltage of the ion beam (voltage applied to the acceleration electrode 40 in FIG. 7) to 0.4 kV to l. OkV. In addition, the lower the acceleration voltage, the narrower the groove interval, and the number of grooves per unit length in the direction perpendicular to the groove direction tends to increase. Therefore, an appropriate degree of orientation in the circumferential direction of the recording layer can be obtained by appropriately selecting the acceleration voltage according to the average grain size of the crystal grains of the recording layer.
  • the ion beam current is appropriately selected in relation to the processing time, but is set in the range of 10 mA to 500 mA.
  • the substrate 11 may be rotated by a rotation driving means (not shown) while irradiating the ion beam 41 with the ion gun 35.
  • the rotation of the substrate 11 is rotated around a central axis that passes through the center of the substrate 11 and is orthogonal to the surface of the substrate 11, or a combination of the two rotational directions.
  • the rotation speed is set to about 15 rotations Z minutes.
  • a plurality of ion guns may be provided in the texture forming device to irradiate the entire surface of the substrate simultaneously to form a texture, and at that time, the substrate may be rotated. You don't have to.
  • a shielding plate 42 may be provided between the ion beam acceleration electrode 40 and the substrate 11 in order to limit the range in which the ion beam 41 is irradiated onto the substrate 11. It is preferable that the opening 42 a of the shielding plate 42 has a long slit shape along the radial direction of the substrate 11. By providing the opening 42a in this way, the irradiation range of the ion beam 41 spreading in the circumferential direction of the substrate 11 is limited. Therefore, by limiting the irradiation range in the circumferential direction, grooves are formed along the radial direction, and grooves with little deviation in radial force can be formed.
  • the shielding plate 42 having such an opening 42a is used, the ion beam 41 is irradiated while rotating the substrate 11 as described above.
  • the surface of the substrate 11 on which the texture 11a is formed is subjected to wet cleaning such as scrub cleaning using pure water or a surfactant and pure water.
  • wet cleaning such as scrub cleaning using pure water or a surfactant and pure water.
  • the substrate 11 is placed in the chamber 1.
  • the substrate surface may be heated in a vacuum, but the substrate is cooled before the soft magnetic backing layer is formed.
  • the above-described soft magnetic backing layer 12 is formed on the substrate 11 on which the texture 11a is formed by an electroless plating method, an electric plating method, a sputtering method, a vacuum deposition method, or the like.
  • the seed layer 13 is formed on the soft magnetic backing layer 12 by using a sputtering target with the above-described sputtering target having material strength.
  • Sputtering apparatus is preferably used an exhaust available-ultra-high vacuum sputtering system to advance 10- 7 Pa.
  • the seed layer 13 is formed by a DC magnetron method, for example, in an inert gas atmosphere, for example, an Ar gas atmosphere, with a pressure set to 0.4 Pa, for example, and an input power set to, for example, 0.5 kW.
  • the substrate 11 is not heated. Thereby, the crystallization of the soft magnetic underlayer 12 and the enlargement of the microcrystals can be suppressed.
  • the soft magnetic underlayer 12 may be heated to a temperature of 150 ° C. or lower, which is a temperature that does not cause crystallization of the soft magnetic underlayer 12 or enlargement of the fine crystals.
  • the temperature condition of the substrate 11 is the same as that in the case of forming the seed layer 13 in the step of forming the intermediate layer 14 and the recording layer 15.
  • the intermediate layer 14 and the recording layer 15 are sequentially formed on the seed layer 13 by using the above-described spotter target of the material.
  • the conditions for forming these layers 14 and 16 are the same as the conditions for forming the seed layer 13.
  • the recording layer 15 is formed in an atmosphere in which oxygen gas or nitrogen gas is added to the inert gas, or in an oxygen gas or nitrogen gas atmosphere. Also good. As a result, the magnetic particles in the recording layer 15 are well separated, medium noise is reduced, and the SN ratio is good.
  • the above-described sputtering target made of a ferromagnetic material and a sputtering target made of a non-solid phase non-magnetic material are used in an inert gas atmosphere. At the same time, it is formed by sputtering.
  • the nonmagnetic material is an oxide, nitride, or carbide
  • oxygen gas, nitrogen gas, or carbon dioxide gas may be added to the inert gas as the atmospheric gas, respectively.
  • each of oxygen, nitrogen and carbon in the non-solid solution phase is contained. The amount can be suppressed from decreasing from the stoichiometric composition, and a high-quality recording layer can be formed.
  • the perpendicular magnetic recording medium 10 has good durability and corrosion resistance.
  • a sputter target instead of the above two sputter targets, one sputter target with a material force that combines a ferromagnetic material and a non-magnetic material may be used. This facilitates the control of the molar ratio between the magnetic particles in the recording layer 15 and the non-solid solution phase.
  • the protective film 16 is formed on the recording layer 15 using a sputtering method, a CVD method, an FCA (Filtered Cathodic Arc) method, or the like. Further, the lubricating layer 18 is applied to the surface of the protective film 16 by a pulling method, a spin coating method, a liquid level lowering method, or the like. Thus, the perpendicular magnetic recording medium 10 according to the first embodiment is formed.
  • the substrate 11 or the surface of each layer that has already been formed can be maintained in a vacuum or in a film-forming atmosphere. Preferred in terms of cleanliness.
  • an ion beam is applied to the surface of the substrate 11 along the circumferential direction and obliquely with respect to the surface of the substrate.
  • a large number of grooves 1 la-1 are formed substantially parallel to each other along the radial direction of the substrate 11, and the grooves 11a-1 are formed at substantially predetermined intervals in the circumferential direction.
  • a texture consisting of a large number of grooves is formed in a self-organized manner, so that a conventional focused ion beam is irradiated. Textures can be formed in a significantly shorter time and more easily than texture forming methods. As a result, the processing cost of the texture can be greatly reduced, and consequently the manufacturing cost of the perpendicular magnetic recording medium can be reduced.
  • Xe gas 3. 3 X 10- 2 Pa.
  • Ar gas was introduced to the ion gun, and the speed of the beam of the beam was set to lkV, beam voltage lkV, and the processing time was set to 2000 seconds. Further, the shielding plate 42 having a slit-like opening 42 a was used so that the ion beam was irradiated from the inner peripheral edge to the outer peripheral edge of the glass substrate 11.
  • the ion beam irradiation angle ⁇ was set to 60 degrees from the direction perpendicular to the surface of the glass substrate, and the ion beam was irradiated so as to be parallel to the radial direction of the glass substrate.
  • the glass substrate was rotated around its center at 30 revolutions per minute.
  • FIG. 8A to FIG. 8D are atomic force microscope (AFM) images of the texture of the example.
  • 8A to 8D show the substrate surface on which the texture with the radius of 23 mm is formed, and the AFM image is measured every 90 degrees with reference to the position of FIG. 8A, and l ⁇ m X l ⁇ m The range is shown.
  • the RAD direction indicates the radial direction of the glass substrate
  • the CIR direction indicates the circumferential direction of the glass substrate.
  • the AFM image shows a lower (deeper) shape as it gets brighter and darker.
  • a force texture groove (the darkest part) is formed along a substantially radial direction. It can be seen that the textured grooves radiate from the center of the glass substrate.
  • a large number of convex bodies forming the tissue have an elliptical shape, and the longitudinal direction thereof is arranged substantially along the radial direction.
  • the average surface roughness Ra of the texture of the examples was 0.45 nm to 0.52 nm, and it was found that it had an average surface roughness substantially equivalent to the mechanical texture formed for comparison.
  • FIG. 9 is a diagram showing the magnetic properties of the soft magnetic backing layer of the example, and FIG.
  • FIGS. 9 and 10 are diagram showing the magnetic properties of the soft magnetic backing layer of the comparative example.
  • the magnetic characteristics of the magnetic disk with the soft magnetic backing layer described above were measured with a vibrating sample magnetometer, and the hysteresis loop shown in FIGS. 9 and 10 is the circumferential direction of the magnetic disk (shown by the solid line in the figure). ) And radial direction (indicated by a broken line in the figure) and measured by applying a magnetic field.
  • the radial hysteresis loop of the example has a coercive force more than the radial hysteresis loop of the comparative example.
  • the number Oe increased, and it can be seen that the orientation of the easily magnetized axis in the radial direction is better in the example than in the comparative example.
  • the inclination of the circumferential hysteresis loop of the example is lower than that of the circumferential hysteresis loop of the comparative example.
  • the magnetically difficult axis is oriented in the circumferential direction in the example than in the comparative example. Since the magnetic easy axis is orthogonal to the hard magnetic axis, this indicates that the orientation of the magnetic easy axis in the radial direction is better than that of the comparative example. And it ’s divided.
  • FIG. 11 is a cross-sectional view showing a part of the perpendicular magnetic recording medium according to the first example of the second embodiment of the present invention.
  • FIG. 12 is a sectional view taken along the circumferential direction of the perpendicular magnetic recording medium of the first example according to the second embodiment.
  • portions corresponding to the portions described above are denoted by the same reference numerals, and description thereof is omitted.
  • FIG. 11 a case where a perpendicular magnetic recording medium is formed on a disk-shaped substrate will be described as an example.
  • illustration of some films is omitted for convenience of explanation.
  • the perpendicular magnetic recording medium 50 includes a track area 51 that extends in the circumferential direction and records and reproduces information.
  • the track area 51 is formed with an inter-track area 52 extending in the circumferential direction and separating adjacent track areas 51 on both sides in the radial direction.
  • a recording cell 53 and an inter-cell area 54 are provided before and after the recording cell 53 in the circumferential direction along the circumferential direction.
  • the perpendicular magnetic recording medium 50 includes a plurality of recording cells 53 in which the track area 51 is separated into the inter-cell area 54 along the circumferential direction. It is characterized by being composed of power.
  • the substrate 11 includes a land region 11L having a convex portion provided at the position of the track region 51 and a group region 11G having a concave portion provided at the position of the inter-track region 52, and the land region 11L (in the circumferential direction)
  • the group region 11G is formed in a concentric circle shape.
  • the step between the land area 11L and the group area 11G is set to be at least larger than the thickness of the recording layer 15.
  • the texture 11a is formed on the surface of the substrate 11 along the radial direction (RAD direction), as in the first embodiment. It is sufficient if the texture 11a is formed only on the surface of the land region 11L.
  • the perpendicular magnetic recording medium 50 has the same configuration as that of the first embodiment on the substrate 11 having such a surface shape. That is, the perpendicular magnetic recording medium 50 has a constitutional force in which the soft magnetic underlayer 12, the seed layer 13, the intermediate layer 14, the recording layer 15, the protective film 16, and the lubricating layer 17 are sequentially deposited.
  • the recording cell 53 is formed higher than the inter-cell region 54 and the inter-track region 52, and data is recorded / reproduced on / from the recording layer 15 of the recording cell 53. Since the recording layer of the recording cell 53 of the recording cell 53 is separated from the adjacent recording cell, the magnetic interaction received from the recording layer of the adjacent recording cell is weak. The direction and size of is stable. As a result, the SN ratio at high recording density is improved, and further improvement in recording density is possible.
  • the size of the recording cell 53 is appropriately selected according to the linear recording density and track density of the perpendicular magnetic recording medium 50.
  • the linear recording density (recording density in the circumferential direction) is 40 kbit Zmm (l. OM bit Zinch)
  • the length of the recording cell 53 (circumferential length) is, for example, 20 nm
  • the length of the inter-cell region 54 For example, the circumferential gap of the recording cell 53 is set to 5 nm.
  • the length of the inter-cell region 54 is preferably set to 0.5 nm or more in terms of cutting off the magnetic interaction between the adjacent recording cells 53.
  • bit Means one flux reversal.
  • the width of the recording cell 53 (length in the radial direction), that is, the width of the track area 61 is
  • the width of the inter-track region 72 is set to 20 nm, for example, 5 nm.
  • the perpendicular magnetic recording medium 70 has a linear recording density and a track density of 40 kbit / mm and 40 ktrack / mm, respectively, and a recording density per unit area of 1.6 Mbit Zmm 2 (IT Bit / inch 2 ).
  • the magnetic axis of the soft magnetic underlayer 12 is oriented in the radial direction by the texture 11a, like the perpendicular magnetic recording medium according to the first embodiment.
  • the groove of the tacker improves the orientation of the magnetic easy axis in the radial direction and increases the anisotropic magnetic field Hk. For this reason, the magnetic permeability of the soft magnetic underlayer is reduced. As a result, it is possible to further reduce wide area track erasure.
  • the manufacturing method of the perpendicular magnetic recording medium 50 is substantially the same as the manufacturing method of the perpendicular magnetic recording medium according to the first embodiment.
  • the texture can be easily formed on the surface of the land region 11L (convex portion) on the surface of the substrate having unevenness.
  • FIG. 13 is a perspective sectional view of a perpendicular magnetic recording medium of a second example according to the second embodiment.
  • portions corresponding to the portions described above are denoted by the same reference numerals, and description thereof is omitted.
  • illustration of some films is omitted for convenience of explanation.
  • the perpendicular magnetic recording medium 60 includes a convex land area 11L-1 in which the substrate 11 extends in the circumferential direction, and a radial area on both sides of the land area 11L-1 in the circumferential direction. A group region 11G of recesses extending and separating adjacent land regions 11L-1 is formed.
  • the perpendicular magnetic recording medium 60 has the same configuration as the perpendicular magnetic recording medium of the first example according to the second embodiment, except that the land region 11L-1 is continuous along the circumferential direction.
  • the perpendicular magnetic recording medium 60 is formed on the surface of the substrate 11 in the same manner as in the first embodiment. Texture 11a is formed along the direction (RAD direction). Note that it is sufficient that the texture 11a is formed only on the surface of the land region 11L-1.
  • the inter-track region is provided in the perpendicular magnetic recording medium 60, the recording layers in the track region are separated from each other in the radial direction, and the magnetic interaction in this direction is reduced. Therefore, the SN ratio of the perpendicular magnetic recording medium 60 is improved.
  • the magnetic axis of the soft magnetic underlayer 12 is oriented in the radial direction by the texture 11a, like the perpendicular magnetic recording medium according to the first embodiment.
  • the groove of the tacker improves the orientation of the magnetic easy axis in the radial direction and increases the anisotropic magnetic field Hk. For this reason, the magnetic permeability of the soft magnetic underlayer is reduced. As a result, it is possible to further reduce wide area track erasure.
  • the configuration of the soft magnetic underlayer is the same as that of the first modification of the first embodiment shown in FIG. It is also possible to use the same structure as the laminated ferri-structured soft magnetic backing laminate 21. Also, the surface is provided with a dielectric layer having the same structure as that of the second modification of the first embodiment shown in FIG. It may be formed.
  • the embodiment of the present invention relates to a magnetic storage device including the perpendicular magnetic recording medium according to the first example or the second example of the first embodiment or the second embodiment.
  • FIG. 14 is a diagram showing a main part of a magnetic memory device according to the third embodiment of the present invention.
  • the magnetic storage device 90 is generally composed of a nosing 91.
  • a hub 92 driven by a spindle (not shown) a perpendicular magnetic recording medium 93 fixed to the hub 92 and rotated, an actuator unit 94, and an actuator unit 94 are attached.
  • the arm 95 and the suspension 96 which are moved in the radial direction of the perpendicular magnetic recording medium 93 and the magnetic head 98 supported by the suspension 96 are provided.
  • the magnetic head 98 is a composite of a read head such as an MR element (magnetoresistance effect type element), a GMR element (giant magnetoresistance effect type element), or a TMR element (tunneling magnetic effect type) and an inductive recording head.
  • the magnetic storage device 90 is characterized by a perpendicular magnetic recording medium 93.
  • the perpendicular magnetic recording medium 93 is, for example, one of the perpendicular magnetic recording medium according to the first embodiment and the perpendicular magnetic recording medium according to the first example and the second example of the second embodiment.
  • the perpendicular magnetic recording medium 93 extends on the surface of the substrate 11 or the dielectric layer 26 shown in FIG. 5 in a substantially parallel direction in the radial direction, and is arranged in a large number at a predetermined interval along the circumferential direction. Tetaschia with groove strength is formed.
  • the orientation of the soft magnetic backing layer 12 or the soft magnetic backing laminate 21 in the radial direction of the easy axis of the magnetic domain is good, wide area track erasure can be reduced. As a result, the track density can be improved, so that the recording density of the magnetic storage device 90 can be increased.
  • the basic configuration of the magnetic storage device 90 according to the present embodiment is not limited to that shown in FIG. 14, and the recording / reproducing head 98 is not limited to the above-described configuration, but a known recording medium. A reproducing head can be used.
  • the perpendicular magnetic recording medium is described as an example of a magnetic disk.
  • the perpendicular magnetic recording medium is a tape-shaped substrate instead of a disk-shaped substrate, for example, Magnetic tape using plastic films such as tape-like PET, PEN, and polyimide may also be used.
  • the texture is formed within the plane formed by the longitudinal direction of the plastic film and the direction perpendicular to the surface thereof, and the irradiation angle described above from the direction perpendicular to the surface. Irradiation with an ion beam from the direction may be performed.
  • a plurality of groove forces extending substantially perpendicular to the recording direction are formed on the surface of the substrate, and a plurality of convex shapes that are long in substantially one direction.
  • the convex body has a texture in which a plurality of the longitudinal directions are arranged substantially along the direction perpendicular to the recording direction, so that the magnetic easy axis of the soft magnetic underlayer is always in the recording direction.
  • Perpendicular magnetic field that can be oriented in the perpendicular direction, and as a result, suppresses noise caused by the soft magnetic underlayer An air recording medium can be realized.

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Abstract

La présente invention concerne un support d'enregistrement magnétique vertical (10) qui comprend un substrat (11) ayant une texture (11a) formée sur la surface dans la direction radiale, ainsi qu'une couche de doublage magnétique souple (12) et une couche d'enregistrement (15) formée sur le substrat (11). La texture (11a) est formée en irradiant le substrat (11) avec un faisceau d'ions dans la direction de la circonférence, à partir d'une direction oblique par rapport à la surface. En conséquence, un grand nombre de tranchées est formé dans la surface du substrat, dans la direction radiale par auto-organisation. L'axe facile de magnétisation de la couche de doublage magnétique souple (12) est orienté dans la direction radiale par la texture (11a). La texture (11a) peut être formée sur la surface d'une couche diélectrique formée sur le substrat.
PCT/JP2006/318404 2006-09-15 2006-09-15 Dispositif de disque magnétique WO2008032406A1 (fr)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005353177A (ja) * 2004-06-11 2005-12-22 Fuji Electric Device Technology Co Ltd 垂直磁気記録媒体用ディスク基板並びにその基板の製造方法及びその基板を用いた垂直磁気記録媒体
JP2006172686A (ja) * 2004-11-22 2006-06-29 Fujitsu Ltd 磁気記録媒体およびその製造方法、磁気記憶装置、基板、テクスチャ形成装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005353177A (ja) * 2004-06-11 2005-12-22 Fuji Electric Device Technology Co Ltd 垂直磁気記録媒体用ディスク基板並びにその基板の製造方法及びその基板を用いた垂直磁気記録媒体
JP2006172686A (ja) * 2004-11-22 2006-06-29 Fujitsu Ltd 磁気記録媒体およびその製造方法、磁気記憶装置、基板、テクスチャ形成装置

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