WO2007069686A1 - Condensateur a vide et soupape de vide - Google Patents

Condensateur a vide et soupape de vide Download PDF

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Publication number
WO2007069686A1
WO2007069686A1 PCT/JP2006/324940 JP2006324940W WO2007069686A1 WO 2007069686 A1 WO2007069686 A1 WO 2007069686A1 JP 2006324940 W JP2006324940 W JP 2006324940W WO 2007069686 A1 WO2007069686 A1 WO 2007069686A1
Authority
WO
WIPO (PCT)
Prior art keywords
movable
coating layer
hardness
electrode
vacuum
Prior art date
Application number
PCT/JP2006/324940
Other languages
English (en)
Japanese (ja)
Inventor
Toru Nishizawa
Eiichi Takahashi
Toshimichi Yamada
Shuji Hojo
Original Assignee
Meidensha Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meidensha Corporation filed Critical Meidensha Corporation
Priority to JP2007550222A priority Critical patent/JP5024049B2/ja
Publication of WO2007069686A1 publication Critical patent/WO2007069686A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/01—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/04—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode
    • H01G5/14—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to longitudinal movement of electrodes
    • H01G5/145—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to longitudinal movement of electrodes with profiled electrodes

Definitions

  • the present invention attaches the thread groove of the movable conductor to which the movable electrode is attached to the thread groove of the adjustment nut that is rotatably inserted into the bearing, and the movable conductor is moved in accordance with the rotation of the adjustment nut.
  • the present invention relates to a vacuum capacitor and a vacuum valve with an improved sliding surface that moves in the axial direction.
  • the structure of a conventional vacuum capacitor can be broadly divided into two types: a fixed capacitance type vacuum capacitor with a fixed capacitance value and a variable capacitance type vacuum capacitor with a variable capacitance value. is there.
  • the latter vacuum capacitor will be described with reference to FIGS.
  • copper cylindrical tubes 11a and 11b are joined to both ends of an insulating cylinder 12 that also serves as a ceramic member, and a fixed side end plate 13 and a movable side end are connected to both ends of the cylindrical tubes 11a and ib. Mounted with the plate 14, the container 10 is formed.
  • a plurality of cylindrical electrode plates F 1, F 2, -F having different radii are arranged on the inner side of the fixed side end plate 13.
  • a fixed electrode 15 is formed by being attached at regular intervals in a circular shape.
  • the fixed electrode 15 and the movable electrode 16 constitute a capacitor part.
  • the mounting conductor 18 is provided with a movable lead 2.
  • One end of the bellows 19 is applied to the movable lead 2, and the other end of the bellows 19 is brazed to the movable side end plate 14.
  • the bellows 19 allows the movable lead 2 to move up and down.
  • the fixed electrode 15 side and the movable electrode 16 side surrounded by the bellows 19 form a vacuum state, that is, a vacuum chamber.
  • a guide pin 1 is provided on the fixed-side electrode shaft center portion of the fixed-side end plate 13 so as to extend inwardly of the container 10 so that the movable lead 2 can smoothly move in the axial direction.
  • Guide pin 1 is formed of an insulating member.
  • the guide pin 1 is inserted into a guide portion 5 provided on the movable lead 2, and the movable lead bolt 32 is guided in the axial direction using the guide portion 5 as a guide.
  • the end of the movable lead bolt 32 opposite to the electrode is inserted into the bearing portion 34.
  • the bearing portion 34 is configured as follows. One end of the screw receiving portion 31 is attached to the inner side of the movable side end plate 14, and the other end of the screw receiving portion 31 is bent at the end protruding to the electrode side to the movable lead bolt 32 side to form a flange 31a. . A through-hole is formed in the center of the collar 31a, although no figure number is attached. An adjustment nut 33 is disposed outside the collar portion 31a via a bearing portion 34 of a thrust bearing. A central portion of the bearing portion 34 forms a through hole communicating with the above-described through hole.
  • the end portion 32b of the connecting portion 37 of the movable lead bolt 32 on the side opposite to the adjustment nut 33 is fixedly supported on the end face 2a of the movable lead 2 via the guide pin 1 and the space portion.
  • the thread groove 32x formed in the outer peripheral portion of the other end of the movable lead bolt 32 passes through the through hole of the bearing portion 34 and the adjustment nut 33, and the screw hole 33c formed in the inner surface of the adjustment nut 33 (shown in FIG. 4). It is screwed into.
  • a screw hole 32a is formed at the tip of the movable lead bolt 32 on the screw groove 32x side.
  • the adjusting screw 36 is inserted into the screw hole 32a.
  • FIG. 4 is an enlarged view showing details of the maximum capacitance adjusting portion 35.
  • the maximum capacitance adjusting portion 35 is screwed into the screw hole 32a at the tip of the movable lead bolt 32 and screwed into the screw hole 32a.
  • the adjustment screw 36, the adjustment nut 33 and the movable lead bolt 32, and the adjustment screw 36 inserted into the adjustment nut 33 where the movable lead bolt 32 is screwed into the adjustment nut 33.
  • a force is formed between the drilled large-diameter portion 33a and a stepped portion 33b between the large-diameter portion 33a and the screw hole 33c.
  • the adjustment screw 36 is screwed into the screw hole 32a until the contact surface of the head abuts on the stepped portion 33b. Fix the bolt 32 with adhesive, and regulate the raised position of the movable lead bolt 32 (does not bond to the adjusting nut 33). [0011] By regulating the raised position of the movable lead bolt 32 in this way, even if the maximum capacitance adjustment value of the manufactured vacuum capacitor varies, the maximum capacitance adjustment for each vacuum capacitor. The value can be adjusted, and a vacuum capacitor with a quality that matches the maximum capacitance adjustment value can be obtained.
  • the electrostatic capacitance of the vacuum capacitor is adjusted by rotating the adjustment nut 33.
  • the movable lead bolt 32 moves downward in the clockwise direction and moves upward in the counterclockwise direction, and the movable electrode 16 moves up and down.
  • the capacitance value is arbitrarily adjusted by varying the total area facing the fixed electrode 15.
  • This capacitance adjusting means is performed by, for example, an electric means (not shown).
  • Patent Document 1 Japanese Patent No. 3263992
  • Patent Document 2 Patent No. 3365082
  • the adjustment nut In order to change the capacitance of the vacuum capacitor, the adjustment nut is rotated to overcome the vacuum pressure in the container and move the movable electrode. For this reason, when the other screw groove moves along one screw part according to the rotation of the adjusting nut, friction resistance force and surface pressure act on the adjusting screw part while it is being used. The thread is worn and deformed. There was a fear.
  • the frictional resistance of the threaded portion may be further increased, and the rotational torque may be increased.
  • the movable electrode with respect to the rotational position may be used. Since the position of is displaced by the amount of wear and deformation of the thread, there is a risk that the capacitance will change. In particular, when the motor rotates in the opposite direction to the vacuum pressure where the area between the counter electrodes decreases, the mounting conductor 18 is moved against the vacuum pressure in the vacuum vessel, which may cause a large surface pressure. It was.
  • the operation interval of the power supply circuit has been relatively long as the rotation interval with a relatively long stop time.
  • operations that are constantly rotating and finely hunting have been used. Yes.
  • the adjustment nut and the adjustment screw as described above cannot cope with fine hunting of the same part, and there is a problem that they are worn out in a short period of time and the vacuum capacitor cannot be used.
  • the container is subjected to high-temperature vacuum brazing of about 750 ° C to 850 ° C, so that the adjustment nut and adjusting screw are annealed by brazing and the hardness is lowered.
  • high-temperature vacuum brazing of about 750 ° C to 850 ° C, so that the adjustment nut and adjusting screw are annealed by brazing and the hardness is lowered.
  • each material is unlikely to generate heat even when high-frequency current is applied.
  • heat treatment and demagnetization are performed to make the material highly hard.
  • the problem that the hardness of the material decreases due to the heat generated by high-frequency energization is eliminated.
  • the present invention has been made in view of the above circumstances, and reduces deformation and wear of the adjusting nut and adjusting screw due to rotation as much as possible, and solves problems that occur during brazing to improve durability.
  • An object of the present invention is to provide a vacuum capacitor and a vacuum valve.
  • a vacuum capacitor includes a vacuum vessel having a fixed side end plate on one end side of a cylindrical portion and a movable side end plate on the other end side, and the vacuum vessel
  • a fixed electrode formed by concentrically attaching a plurality of concentric cylindrical electrode plates having different diameters to the fixed electrode mounting conductor, and the cylindrical electrode plates of the fixed electrode can be inserted and removed in a non-contact state.
  • the center of the opposing surfaces of the movable electrode mounting conductor Each of which is provided with a guide portion formed by a guide pin provided to each of the guide pins and a guide portion that is electrically insulated and slidably inserted.
  • a movable lead bolt is attached to the tip of the movable lead in the bellows in the axial direction, and the movable side end plate is provided with a screw receiving portion protruding into the bellows on the inner side, and a bearing is provided at the end.
  • the movable lead bolt is screwed into an adjustment nut supported by a bearing, and the capacitance of the capacitor is adjusted by rotating the adjustment nut, and the movable lead bolt and the adjustment nut are screwed together. After adjusting to the maximum capacitance value defined by operating the adjustment nut, adjust the maximum capacitance adjustment means to restrict the movement of the movable lead bolt to the guide pin side at this adjustment position.
  • the capacity adjustment means is provided with a screw hole at the tip of the movable lead bolt, and the adjustment nut is provided with a large diameter portion larger than the screw hole into which the movable lead bolt is screwed.
  • the first high-hardness coating layer is provided on one of the adjustment screw and the adjustment nut, and the second is provided on the other. It is characterized by having a high hardness coating layer.
  • the first high-hardness coating layer has a titanium nitride core. It is characterized by an electroless coating that retains slipping and hardness, and an electroless coating or titanium nitride coating that retains slipping and hardness on the second high hardness coating layer. To do.
  • the vacuum capacitor of the third invention is characterized in that only one of the first and second high-hardness coating layers is provided with an electroless plating coating that maintains slipperiness and hardness. .
  • a vacuum capacitor according to a fourth aspect of the present invention is a container in which a fixed side end plate and a movable side end plate are attached to both ends of an insulating cylinder, a fixed electrode provided on the fixed side end plate in the container, A movable electrode disposed so as to form a capacitance with the fixed electrode; a movable electrode having a movable electrode at one end and a movable screw groove at the other end; and the movable conductor and the movable end plate A bellows attached so as to create a vacuum on the electrode side, an adjustment nut having a thread groove that engages with a movable side thread groove outside the mouthpiece, and the adjustment nut is rotatably inserted. And a bearing portion attached to the movable side end plate, and when the adjustment nut is rotated, the movable side conductor moves in a direction to increase or decrease the capacitance via the movable side thread groove.
  • a member having a hardness which is harder than the hardness of titanium nitride is formed with a coating layer having fine protrusions coated with titanium nitride on one side of the threaded side of the movable side conductor and the adjusting nut.
  • the coating layer is brought into contact with the surface to remove minute protrusions, thereby making the coating layer a smooth surface.
  • a vacuum capacitor according to a fifth aspect of the invention is characterized in that fine particles having a hardness higher than that of titanium nitride are sprayed on the coating layer to remove fine protrusions to make the coating layer a smooth surface. Is.
  • a vacuum capacitor according to a sixth aspect of the invention is characterized in that the smooth surface is a smooth surface that does not cause damage from minute protrusions when the movable conductor is rotated.
  • the sliding surface of the movable side conductor on which the movable side conductor moves while sliding on the bearing portion is formed on a coating layer having fine protrusions coated with titanium nitride,
  • the coating layer is harder than the hardness of titanium nitride and is in contact with the coating layer to remove minute protrusions and make the coating layer smooth. It is a feature.
  • a vacuum valve houses a pair of electrodes in a vacuum vessel, extends a movable side conductor from the one side electrode to the outside of the bearing portion of the vacuum vessel, and moves the movable side conductor to move to one side.
  • the movable conductor has a smooth sliding surface coated with a titanium nitride coating layer. It is what.
  • one of the adjusting screw and the adjusting nut is provided with the first high hardness coating layer, and the other is provided with the second high hardness coating layer. Since either one of the adjustment nuts is coated with titanium nitride and the other is coated with an electroless coating that retains slipperiness and hardness, high-hardness coated screws and nuts are constructed. Since the movable electrode can be moved with low frictional force by overcoming the vacuum pressure, it is possible to prevent the wear and deformation of the screw and nut, thereby suppressing the increase in rotational torque and extending the life of the rotating part. Can be planned.
  • the adjustment screw and adjustment nut of the high-hardness coating layer are used to rotate with a low frictional force, so that higher speed and higher acceleration than conventional screw rotation are achieved. Since there is little wear and deformation even when rotating, variable control of capacitance can be performed faster.
  • the high-hardness coating layer is a weak magnetic material, heat generation does not occur even in vacuum brazing by high-frequency energization even in a high-frequency environment with little hysteresis loss, and the temperature inside the vacuum vessel is increased.
  • the high heat resistance of the high-hardness coating layer can be suppressed, and high hardness can be maintained even during high-temperature vacuum brazing at 750 ° C to 850 ° C, and no force is required during high-temperature vacuum brazing
  • the present invention only has a high hardness coating on the adjusting screw, so that the life can be extended with the same shape without changing the arrangement inside the vacuum capacitor. Since any material can be used, screws can be manufactured without any restrictions on workability, and the inner diameter side of the adjusting nut can be coated. Thus, wear and deformation can be suppressed.
  • the screw groove side on one side of the movable side conductor and the adjusting nut is formed on the coating layer having the microprojections coated with titanium nitride,
  • the layer was contacted with the coating layer with a material harder than that of titanium nitride, and the microprotrusions were removed to make the coating layer smooth, so that the thread groove slid on the smooth surface and damaged the coating layer.
  • the yield of movable conductors and vacuum capacitors was improved.
  • the movable side conductor when the movable side conductor slides on the bearing portion, the movable side conductor has a smooth sliding surface coated with the titanium nitride coating layer. And the yield of vacuum valves was improved.
  • FIG. 1 is an enlarged cross-sectional view showing an embodiment.
  • FIG. 1 (a) shows an adjusting screw 36
  • FIG. 1 (b) shows an adjusting nut ⁇ 33.
  • the adjustment screw 36 uses SUS304 as a base material
  • the first high-hardness coating layer 41 is coated on the movable side screw groove 32x formed on the outer peripheral side of the movable lead bolt 32 of the adjustment screw 36 formed of this SUS304. did.
  • the first high-hardness coating layer 41 was coated with titanium nitride (TiN) [hardness: 2200HV] to a thickness of 3 ⁇ m.
  • TiN titanium nitride
  • SUS304 similar to the above is used as the base material for the adjustment nut 33 in FIG. 1 (b), and the screw hole 33c of the adjustment nut 33 formed of this SUS304 has a thread groove 33x on the inner surface.
  • the second high hardness coating layer 42 was coated on the thread groove 33x.
  • This second high-hardness coating layer 42 is made of a coating in which fine particles of PTFE are uniformly dispersed and co-deposited in the electroless nickel plating film, for example, Ni—P—PTFE (PTFE It has a content of 5%) and a [hardness: 750 to 900 HV] and is coated to a thickness of 10 m.
  • the friction coefficient at this time is 0.10-10.12.
  • the adjustment screw 36 uses SUS304 as the base material.
  • the adjustment screw 36 formed of 304 has a movable side thread groove 32x formed on the outer peripheral side of the movable lead bolt 32.
  • the movable side thread groove 32x is covered with the first high hardness coating layer 41! /
  • the first high-hardness coating layer 41 is coated with titanium nitride (TiN) [hardness: 2200HV] to a thickness of 3 ⁇ m.
  • the adjustment nut 33 uses the same SUS304 as the base material, and this SUS30
  • the adjustment nut 33 formed of 4 has a second hard coating layer 42 Ni—P—PTF
  • the first and second high hardness coating layers 41, 42 shown in the first and second embodiments are the first high hardness coating layer 41 on the adjusting nut 33 and the second high hardness coating layer 36 on the adjusting screw 36. Each of the hardness coating layers 42 may be coated.
  • the adjustment nut 33 and the adjustment screw 36 shown in the first and second embodiments are covered with the first and second high-hardness coating layers 42, the maximum rotation speed 1200rpm, the maximum acceleration Z deceleration lOOrpmZ ms (lms Fig. 2 shows the results of investigating the life characteristics when the life is defined when the rotational torque exceeds the specified value for each lOOrpm change).
  • the mechanical adjustment nut 33 and the adjustment screw 36 which have been hardened as shown in the first and second embodiments, are applied to the vacuum capacitor. Because it has high tensile strength and high heat resistance, it can withstand high temperature brazing.
  • the coating with a higher hardness can reduce wear and deformation, and the sliding force can be reduced by the coating, thereby reducing wear. Is possible.
  • Ni-P-PTFE electroless plating
  • the coating thickness, multiple coating, coating manufacturing method, and thickness direction may be arbitrarily used.
  • any thread shape such as single thread, multiple thread, trapezoidal thread, square thread, etc. can be used, and stainless steel, copper alloy, steel, etc. can be used as the screw base material.
  • the configuration of bolts and nuts of the vacuum capacitor guide pin, capacitance adjustment means, male and female, etc. can be used arbitrarily. Of course.
  • FIG. 5 is an enlarged view of the movable lead screw 32, which is a movable conductor, with the movable thread 32x on the movable nut 32 and the thread 33x on the adjustment nut 33 screwed together.
  • FIG. 5 is an enlarged view of the movable lead screw 32, which is a movable conductor, with the movable thread 32x on the movable nut 32 and the thread 33x on the adjustment nut 33 screwed together.
  • a screw groove 33x was formed on the inner surface of the screw hole 33c of the adjustment nut 33, and the second high hardness coating layer 42 as a coating layer was coated on the screw groove 33x.
  • This second high-hardness coating layer 42 is made of a coating in which fine particles of PTFE are uniformly dispersed and co-deposited in the electroless nickel plating film, for example, Ni—P—PTFE (PTFE It has a content of 5%) and a [hardness: 750 to 900 HV] and is coated to a thickness of 10 m. The friction coefficient at this time is 0.10-10.12.
  • a movable side thread groove 32x is formed on the outer peripheral side of the movable lead bolt 32 of the adjusting screw 36, and titanium nitride (TiN) is sprayed on the movable side thread groove 32x to form a hard coating layer.
  • TiN titanium nitride
  • a first high hardness coating layer 41 is formed. When the first high-hardness coating layer 41 is observed with a microscope, the first high-hardness coating layer 41 has innumerable protrusions 32y. This protrusion 32y is particularly present at the bottom of the movable side thread groove 32x, and the protrusion 32y is also called a droplet.
  • the protrusion 32y may be rubbed with a cloth adhered with diamond cannons in addition to the spraying of this embodiment. Since the spray force reaches the bottom of 32x, there is an advantage that the entire movable side thread groove 32x can be finished to a uniform smooth surface.
  • the smoothness of the smooth surface 47 may be a smooth surface that does not damage the first high-hardness coating layer 41 when the thread groove 33x slides and rotates on the movable side thread groove 32x.
  • the second high-hardness coating layer 42 may be coated on the movable-side thread groove 32x side, and the first high-hardness coating layer 41 may be coated on the thread groove 33x side.
  • the movable lead bolt 32 may be a movable side conductor having a movable side thread groove with a movable electrode attached to one end and inserted into the bearing portion at the other end.
  • a sliding surface of the movable side conductor on which the movable side conductor moves while sliding with the bearing portion is provided.
  • a pair of electrodes are housed in a vacuum vessel, a movable side conductor is extended from the one side electrode to the outside of the bearing portion of the vacuum vessel, and the movable side conductor is moved to move the one side electrode to the other side electrode.
  • the open / close vacuum valve when the movable conductor slides on the bearing portion, the sliding surface of the movable conductor covered with the titanium nitride coating layer is made smooth.
  • the sliding surface coated with the coating layer is made smooth to prevent the coating layer from being damaged, and the yield and life of the vacuum capacitor and the vacuum valve are reduced. I was able to improve it.
  • FIG. 1 is an enlarged cross-sectional view showing an adjustment nut and an adjustment screw of the first embodiment.
  • FIG. 2 Life characteristics when using the adjusting nut and adjusting screw used in Fig. 1.
  • FIG. 3 is a cross-sectional view of a vacuum capacitor.
  • FIG. 5 is an enlarged cross-sectional view when an adjusting nut and an adjusting screw according to a third embodiment of the present invention are combined.
  • FIG. 6 is a cross-sectional view illustrating an operation for making the first high-hardness coating layer on the adjustment screw side a smooth surface according to the third embodiment of the present invention.
  • FIG. 7 is a cross-sectional view of the first high-hardness coating layer made smooth according to FIG.

Abstract

L'invention vise à résoudre le problème posé par la rotation d'un écrou de réglage dans un état tel qu'une vis de réglage et l'écrou de réglage sont vissés ensemble, provoquant une collision des gorges de filetage contre des micro pointes, au cours du glissement entre les gorges de filetage, des fissures étant initiées à partir des micro pointes et conduisant à la rupture d'une couche de revêtement qui à son tour détériore le rendement d'un condensateur à vide. De fines particules (46) présentant une dureté plus élevée qu'une première couche (41) de revêtement de dureté élevée sont pulvérisées depuis un gicleur (45) sur la première couche (41) de revêtement de dureté élevée, recouverte avec une gorge de filetage (32x) mobile latéralement, située dans une direction indiquée par des flèches, et un pièce saillante (32y) est retirée, afin de former la surface de la première couche (41) de revêtement de dureté élevée sur une surface lisse (47). Ainsi, puisque les gorges de filetage glissent l'une contre l'autre sur la surface lisse, la première couche (41) de revêtement de dureté élevée n'est pas rompue, et le rendement du condensateur à vide peut être amélioré.
PCT/JP2006/324940 2005-12-16 2006-12-14 Condensateur a vide et soupape de vide WO2007069686A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007550222A JP5024049B2 (ja) 2005-12-16 2006-12-14 真空コンデンサ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005-364068 2005-12-16
JP2005364068 2005-12-16

Publications (1)

Publication Number Publication Date
WO2007069686A1 true WO2007069686A1 (fr) 2007-06-21

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PCT/JP2006/324940 WO2007069686A1 (fr) 2005-12-16 2006-12-14 Condensateur a vide et soupape de vide

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WO (1) WO2007069686A1 (fr)

Cited By (4)

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Publication number Priority date Publication date Assignee Title
JP2010538480A (ja) * 2007-09-04 2010-12-09 コメット アクチェンゲゼルシャフト 可変容量真空コンデンサ用駆動システム
JP2015053513A (ja) * 2014-11-11 2015-03-19 コメット アクチェンゲゼルシャフト 可変容量真空コンデンサ用駆動システム
JP2016522995A (ja) * 2013-05-30 2016-08-04 コメット アクチェンゲゼルシャフト 真空可変コンデンサ
US9534205B2 (en) 2008-03-17 2017-01-03 The Scripps Research Institute Combined chemical and genetic approaches for generation of induced pluripotent stem cells

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JPH03230438A (ja) * 1990-02-02 1991-10-14 Toshiba Corp 真空バルブ
JPH07264881A (ja) * 1994-03-23 1995-10-13 Nikon Corp 超音波モータ
JP3365082B2 (ja) * 1994-09-29 2003-01-08 株式会社明電舎 真空コンデンサ
JPH10217103A (ja) * 1997-02-07 1998-08-18 Ebara Corp 研磨用クロスのドレッサー及びその製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010538480A (ja) * 2007-09-04 2010-12-09 コメット アクチェンゲゼルシャフト 可変容量真空コンデンサ用駆動システム
US9534205B2 (en) 2008-03-17 2017-01-03 The Scripps Research Institute Combined chemical and genetic approaches for generation of induced pluripotent stem cells
JP2016522995A (ja) * 2013-05-30 2016-08-04 コメット アクチェンゲゼルシャフト 真空可変コンデンサ
KR101811412B1 (ko) * 2013-05-30 2017-12-21 코멧 아게 진공 가변 커패시터
JP2015053513A (ja) * 2014-11-11 2015-03-19 コメット アクチェンゲゼルシャフト 可変容量真空コンデンサ用駆動システム

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JP5024049B2 (ja) 2012-09-12

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