WO2007014474A1 - Ozongenerator - Google Patents
Ozongenerator Download PDFInfo
- Publication number
- WO2007014474A1 WO2007014474A1 PCT/CH2006/000269 CH2006000269W WO2007014474A1 WO 2007014474 A1 WO2007014474 A1 WO 2007014474A1 CH 2006000269 W CH2006000269 W CH 2006000269W WO 2007014474 A1 WO2007014474 A1 WO 2007014474A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sections
- ozone generator
- generator according
- dielectric
- gap
- Prior art date
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title claims abstract description 82
- 239000007789 gas Substances 0.000 claims abstract description 37
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000001301 oxygen Substances 0.000 claims abstract description 8
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 8
- 238000006385 ozonation reaction Methods 0.000 claims description 18
- 230000007423 decrease Effects 0.000 claims description 17
- 238000011144 upstream manufacturing Methods 0.000 claims description 6
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 238000000429 assembly Methods 0.000 description 4
- 230000000712 assembly Effects 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000012856 packing Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 230000000875 corresponding effect Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000009736 wetting Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- -1 pressure surges Chemical compound 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/10—Dischargers used for production of ozone
- C01B2201/14—Concentric/tubular dischargers
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/20—Electrodes used for obtaining electrical discharge
- C01B2201/22—Constructional details of the electrodes
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2201/00—Preparation of ozone by electrical discharge
- C01B2201/30—Dielectrics used in the electrical dischargers
- C01B2201/32—Constructional details of the dielectrics
Definitions
- the invention relates to an ozone generator with two electrodes and an intervening dielectric layer according to the preamble of claim 1.
- an ozone generator with two tubular electrodes and an intermediate dielectric layer is known, which are arranged so that between them serving as an ozonization gap space is formed, wherein an oxygen-containing gas is passed through the ozonizing.
- the gap width of the ozonization gap is smaller on the inlet side than on the outlet side.
- the dielectric capacity can be smaller in the flow direction of the oxygen-containing gas.
- the present invention has for its object to provide an ozone generator with a good efficiency. This means that an ozone generator is to be created which generates a high amount of ozone per energy expended. This object is achieved by an ozone generator with the features of claim 1.
- the two electrodes and the dielectric layer are arranged such that an ozonization gap is formed between the dielectric layer and one of the electrodes, through which an oxygen-containing gas can be conducted.
- an oxygen-containing gas In the flow direction of the gas is a
- Dielectric capacity of the dielectric layer smaller.
- the layer thickness of the dielectric layer can be larger.
- a gap width of the ozonization gap is greater on the inlet side than on the outlet side.
- the gap width of the ozonization gap preferably increases continuously or discretely in the flow direction of the gas.
- the gap width can be discrete even over a certain range and continuously larger over another range.
- the discrete enlargement of the ozonization gap can take place, for example, via a step-shaped design of one or both electrodes. For small ozone concentrations is the
- Ozone generation efficiency essentially not ⁇ temperature dependent. At higher ozone concentrations, the efficiency deteriorates with increasing temperature. The injection of energy into the so-called discharge channels leads to local, instantaneous temperature peaks.
- Temperature peaks can be influenced by adjusting the power consumption in the flow direction of the oxygen-containing gas.
- Upe a k is the so-called peak voltage or the peak value of the applied voltage in volts
- U m i n indicates the so-called ignition voltage or minimum voltage, from which the ozone generator is in a stable state and micro discharges take place over the entire half-cycle of the applied alternating voltage
- f the frequency of the applied voltage in Hertz
- C D the dielectric capacity
- Dielectric capacity to reduce the power consumed by the ozone generator As already mentioned above, the power depends on the temperature in the ozonization gap, the efficiency at high ozone concentrations, ie in particular at the output side of the ozone generator, being reduced. To increase the efficiency, it is therefore proposed to reduce the dielectric capacity from the input side to the output side of the ozone generator. A corresponding effect can also be achieved by increasing the thickness of the dielectric layer from the input side to the output side. The efficiency of the ozone generator improves when the inlet side, a higher power consumption than the outlet side. Furthermore, a decreasing toward the output
- the optimum gap width decreases with increasing ozone content of the gas.
- the maximum efficiency for air with low ozone content as gas (essentially 1 weight percent) at a Gap width of slightly more than 0.5 mm, while for high ozone air as a gas (substantially 5 weight percent) with a gap width of less than 0.4 mm.
- pure oxygen is used as gas to be ozonized.
- the (relative) ozonization efficiency is defined as the value k / E, where k is a given constant and E is the electrical energy required per kilogram of ozone.
- k is a given constant
- E is the electrical energy required per kilogram of ozone.
- Gap width is that the cross-sectional area of the ozonizing gap decreases towards the outlet area. This leads to an increasingly higher flow velocity. Thus, the more ozone it contains, the faster the gas to be ozonized flows. In this way, the influence of degradation processes on ozone generation can be reduced. Such degradation processes result, for example, from setbacks of ions from the surface of the electrodes, which in turn leads to dust formation in the form of metal oxides. This effect is also called sputtering effect. Due to the formation of dust it comes to a dust occupancy of the
- nitrogen oxide in particular N 2 O 5
- the nitric oxide leads to an additional emission of UV light, which in turn leads to uninhibited discharges, so that the voltage level of the operating voltage can be lowered.
- the nitrogen oxides include the metal oxides and thereby prevent the formation of dust. By the nitrogen oxide is thus a passivation of the on the Surfaces of the electrodes are deposited as dust-depositing metal oxides.
- a locally weighted power consumption takes place in that the gap width decreases towards the outlet and the dielectric capacity decreases in the flow direction of the gas and / or the layer thickness of the dielectric increases. Due to the locally weighted power consumption of the ozone generator, the influence of the surface of the electrodes decreases and the weighting of the power consumption can increase the robustness of the ozone generator.
- This has the advantage, for example, that less nitrogen or nitrogen oxide is needed to passivate the metal oxides depositing on the surfaces of the electrodes. For example, it may be sufficient to use nitrogen of the order of 2000 ppm.
- the onset time of the ozone generator can be reduced to less than 12 hours, while in conventional ozone generators with constant ozonization gap, constant dielectric capacity and constant layer thickness of the dielectric layer is more than 500 hours.
- the inventive ozone generator behaves robustly and allows trouble-free or largely trouble-free operation even at ozone concentrations that may be above the ozone concentrations which are common in ozone generators with constant gap width, constant dielectric capacity and constant thickness of the dielectric layer.
- Non-ideal conditions include, for example, low nitrogen, pressure surges, ozone concentrations close to the poisoning limit, a high dew point or temperature of condensation, and / or increased levels of hydrocarbons in the gas to be ozonated. A high dew point and the presence of traces of Hydrocarbons in the gas to be ozonised lead to wetting of the surfaces of the electrodes in the ozonization gap.
- pulse is understood to mean the occurrence of a series of regularly recurring, similar impulses or sparks. Since a locally weighted power consumption takes place in the ozone generator according to the invention, the influence of the pulsation on the efficiency can be reduced.
- individual series-connected sections are provided with constant dielectric capacity in the respective section, wherein downstream sections have the same or a smaller dielectric capacity than upstream sections.
- individual sections connected in series may be provided with a constant layer thickness of the dielectric layer in the respective section, wherein downstream sections have the same or a greater layer thickness than upstream sections.
- downstream portions have a smaller gap width than upstream portions.
- the sections have an im
- Substantially equal length and the ratio of portions with a first dielectric capacity to portions with a second dielectric capacity, wherein the second dielectric capacity is greater than the first dielectric capacity, is at a
- the ratio of portions having a first layer thickness to portions having a second layer thickness greater than the first layer thickness may be 1: 3 for a total number of sections divisible by 4 and one for a divisible by 3 but not divisible by 4 Total number of sections to be 1: 2.
- the ratio of sections having a first gap width to sections having a second, smaller gap width can be 1: 3 for a total number of sections divisible by 4 and 1: 2 for a total number of sections divisible by 3 but not divisible by 4 be.
- a locally weighted power consumption of the ozone generator can take place via the voltage supply and / or the electrode length. For example, a higher voltage can be fed to inlet-side sections than to outlet-side sections, or the peak voltage can decrease from the inlet side to the outlet side.
- FIG. 1 is a sectional view of an ozone generator
- FIG. 2 shows a sectional illustration through a first embodiment of an electrode arrangement of an ozone generator according to the invention
- FIG. 3 shows a sectional illustration through a second embodiment of an electrode arrangement of an ozone generator according to the invention
- FIG. 4 shows a sectional view through a third embodiment of an electrode arrangement of an inventive ozone generator and FIG. 5 is a sectional view of a fourth embodiment of an electrode arrangement of an ozone generator according to the invention.
- Ozone generator shown comprising a housing 1 in which a plurality of substantially tubular electrode assemblies 2 is provided.
- Each electrode arrangement 2 has an inner electrode 3 and a tubular outer electrode 5, which is arranged concentrically around the inner electrode 3.
- the inner electrode 3 is arranged on a plurality of, arranged in the flow direction of the gas successively arranged, substantially cylindrical electrode carriers 4.
- the internal electrodes 3 are connected to a high voltage AC power source 6.
- the outer electrodes 5 are grounded.
- the gaps 7 between the electrode assemblies 2 are flushed by a cooling water, which is supplied via an inflow line 8 and discharged via a drain line 9.
- the oxygen-containing gas to be ozonized which may also be pure oxygen, is fed via an opening 10 into an inlet region or inlet region 11 of the ozone generator, from where it flows through the between the internal electrodes 3 and the external electrodes 5 of the electrode assemblies 2 formed Ozon confusesspalte 13 flows.
- the gas is generated by one of the electrodes 3 and 5, transversely to the
- the ozonated gas enters an outlet region or exit region 12 at the end of the electrode assemblies 2 and escapes therefrom through a discharge opening 14.
- the direction of flow of the gas is indicated by unspecified arrows. Also in the other figures, the flow direction is indicated by arrows.
- FIG. 2 shows a sectional view of a partial region of a first embodiment of an electrode arrangement 2.
- the tubular outer electrode 5 has a constant inner diameter.
- the likewise tubular inner electrode 3 has a constant outer diameter.
- a dielectric layer 15 is arranged on the inner electrode 3.
- the dielectric layer can also be provided elsewhere in the unspecified gap between inner electrode 3 and outer electrode 5.
- the layer thickness of the dielectric layer is larger on the outlet side. This can (as shown) reduce the gap width of the
- FIG. 3 shows a sectional illustration of a partial region of a second embodiment of an electrode arrangement 2 of an ozone generator according to the invention.
- the inner diameter of the outer electrode decreases conically in the flow direction of the gas.
- the inner diameter decreases in another way, for example discretely by an inner surface of the outer electrode 5 designed as a staircase.
- the inner electrode 3 has a constant outer diameter.
- the dielectric layer 15 also has a constant Outer diameter .
- the outer diameter of the inner electrode 3 increase in the flow direction.
- the first and second embodiments shown in FIGS. 1 and 2 can be combined with one another so that, for example, in the second embodiment, the layer thickness of the dielectric layer 15 increases in the flow direction and / or the dielectric capacity in the flow direction decreases.
- the dielectric capacity on the inlet side is preferably 9 nanofarad (nF) or more than 9 nanofarad (nF), in particular 10.6 nanofarad (nF) and on the outlet side less than 9 nanofarad (nF), in particular 7.8 nanofarad (nF).
- Ozonticiansspalts inlet side is preferably more than 0.35 millimeters, in particular 0.38 millimeters, and on the outlet side less than 0.35 millimeters, in particular 0.32 millimeters.
- the dielectric capacity thus preferably increases in the flow direction
- the gap width of the ozonization gap in the flow direction preferably decreases substantially by 0.06 millimeters.
- the ratio of gas gap capacity to dielectric capacity is preferably substantially 0.2 on the inlet side and is preferably greater than 0.3 on the outlet side. This choice of the parameters dielectric capacity and gap width results in a particularly good efficiency of the ozone generator.
- FIG. 4 shows a partial region of a third embodiment of an electrode arrangement 2, in which the outer electrode 5 has a constant inner diameter and the inner electrode 3 has a constant outer diameter.
- the outer diameter of the inner electrode 3 may increase in the flow direction.
- the inner diameter of the outer electrode 5 in Remove flow direction.
- the electrode arrangement 2 is subdivided by way of example into four sections 16.1, 16.2, 16.3, 16.4, which preferably have an identical length, wherein the dielectric layers 15.1, 15.2, 15.3, 15.4, which are assigned to the respective sections 16.1, 16.2, 16.3, 16.4, respectively have a different layer thickness and / or a different dielectric capacity.
- the layer thickness of the dielectric layers 15.1, 15.2, 15.3, 15.4 preferably increases in the flow direction, which can lead to a reduction in the gap width of the ozonization gap 13.
- the dielectric capacities of the dielectric layers 15.1, 15.2, 15.3, 15.4 may decrease in the flow direction.
- the first section 16.1 has a gap width of 0.38 millimeters
- the second section 16.2 a gap width of 0.36 millimeters
- the third section 16.3 a gap width of 0.34 millimeters
- the fourth gap a gap width of
- the dielectric capacity in the first section 16.1 is preferably 10.63 nanofarads (nF), in the second section 9.31 nanofarads (nF), in the third section 8.41 nanofarads (nF) and in the fourth section 7.80 nanofarads (nF).
- nF nanofarads
- the second section 9.31 nanofarads (nF) in the third section 8.41 nanofarads (nF) and in the fourth section 7.80 nanofarads (nF).
- the dielectric capacities in Sections 16.1, 16.2, 16.3, 16.4 can also have the following values in this order: 15 nanofarads (nF), 11.3 nanofarads (nF), 9.2 nanofarads (nF), 7.8 nanofarads (nF) or 10.63 nanofarads (nF), 10.21 nanofarads (nF), 9.82 nanofarads (nF), and 9.46 nanofarads (nF).
- the dielectric capacities for the sections 16.1, 16.2, 16.3, 16.4 in their order may also assume the following values: 10.63 nanofarads (nF), 8.41 nanofarads (nF), 7.8 nanofarads (nF) and 7, 8 nanofarads (nF). In this way, a particularly good efficiency can be achieved.
- FIG. 5 shows a partial region of a fourth, particularly preferred embodiment of an electrode arrangement 2 of an inventive device
- Ozone generator There are four sections by way of example
- the dielectric capacity in the first section 16.1 may be greater than the dielectric capacity in the sections 16.2, 16.3, 16.4, in which it is advantageously constant.
- the change in the gap width can be achieved via a decrease in the inner diameter of the outer electrode 5 and / or an increase in the outer diameter of the inner electrode 3 in FIG
- the outer electrode 5 can narrow by means of a step and / or the inner electrode can be expanded by means of a step, wherein the gap width in the
- Sections 16.2, 16.3, 16.4 is constant and smaller than the gap width in the first section 16.1.
- the Power consumption on the remaining flow path in sections 16.2, 16.3, 16.4 is more damped.
- the Power consumption in the first section 16.1 is preferably at low attenuation, for example at an attenuation of about 0.2, while the attenuation in the sections 16.2, 16.3, 16.4 is preferably greater than 0.3.
- the attenuation is calculated as the quotient
- FIG. 5 shows a section 16.1 with a high power consumption and three sections 16.2, 16.3, 16.4 with a lower power consumption.
- two sections 16.1 with a high power consumption and six sections with a lower power input can be provided, which connect in the flow direction to the two inlet-side sections 16.1 with high power consumption.
- the inlet-side section preferably has a high power consumption and the two sections adjoining in the flow direction have a low power consumption.
- the inlet-side first two sections have a high power consumption and the four sections adjoining this have a lower power consumption. If a total of five sections are provided, the inlet-side section preferably has a high power consumption and the four sections adjoining in the flow direction have a low power consumption. Further assignments of sections and theirs
- Ozone generator is preferably designed such that in the flow direction on the first 15 to 35% of the total length of the Ozontechnischsspalts 13 at least 20 to 40% of the power consumption. While preferred embodiments of the invention are described in the present application, it is to be understood that the invention is not limited thereto and may be practiced otherwise within the scope of the following claims.
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Paper (AREA)
Abstract
Description
Claims
Priority Applications (12)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/913,129 US8728402B2 (en) | 2005-08-03 | 2006-05-22 | Ozone generator |
DE502006002900T DE502006002900D1 (de) | 2005-08-03 | 2006-05-22 | Ozongenerator |
BRPI0614437-3A BRPI0614437A2 (pt) | 2005-08-03 | 2006-05-22 | gerador de ozÈnio |
CN2006800215577A CN101300193B (zh) | 2005-08-03 | 2006-05-22 | 臭氧发生器 |
EP06721968A EP1910223B1 (de) | 2005-08-03 | 2006-05-22 | Ozongenerator |
JP2008524334A JP5183472B2 (ja) | 2005-08-03 | 2006-05-22 | オゾン発生器 |
PL06721968T PL1910223T3 (pl) | 2005-08-03 | 2006-05-22 | Generator ozonu |
AU2006275277A AU2006275277B2 (en) | 2005-08-03 | 2006-05-22 | Ozone generator |
CA2610367A CA2610367C (en) | 2005-08-03 | 2006-05-22 | Ozone generator |
KR1020087002772A KR101164290B1 (ko) | 2005-08-03 | 2006-05-22 | 오존 발생 장치 |
DK06721968T DK1910223T3 (da) | 2005-08-03 | 2006-05-22 | Ozongenerator |
RSP-2009/0138A RS50846B (sr) | 2005-08-03 | 2006-05-22 | Ozonski generator |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CHPCT/CH2005/000458 | 2005-08-03 | ||
PCT/CH2005/000458 WO2007014473A1 (de) | 2005-08-03 | 2005-08-03 | Ozongenerator |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2007014474A1 true WO2007014474A1 (de) | 2007-02-08 |
Family
ID=36046984
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/CH2005/000458 WO2007014473A1 (de) | 2005-08-03 | 2005-08-03 | Ozongenerator |
PCT/CH2006/000269 WO2007014474A1 (de) | 2005-08-03 | 2006-05-22 | Ozongenerator |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/CH2005/000458 WO2007014473A1 (de) | 2005-08-03 | 2005-08-03 | Ozongenerator |
Country Status (17)
Country | Link |
---|---|
US (1) | US8728402B2 (de) |
EP (1) | EP1910223B1 (de) |
JP (1) | JP5183472B2 (de) |
CN (1) | CN101300193B (de) |
AT (1) | ATE423079T1 (de) |
AU (1) | AU2006275277B2 (de) |
BR (1) | BRPI0614437A2 (de) |
CA (1) | CA2610367C (de) |
DE (1) | DE502006002900D1 (de) |
DK (1) | DK1910223T3 (de) |
ES (1) | ES2319927T3 (de) |
PL (1) | PL1910223T3 (de) |
PT (1) | PT1910223E (de) |
RS (1) | RS50846B (de) |
RU (1) | RU2401800C2 (de) |
WO (2) | WO2007014473A1 (de) |
ZA (1) | ZA200710470B (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2088121A1 (de) | 2008-02-08 | 2009-08-12 | "Oxy 3" Egger KEG | Transportable Einheit zur Erzeugung von Ozon |
US8342418B2 (en) | 2009-05-29 | 2013-01-01 | Toyota Jidosha Kabushiki Kaisha | Thermo-valve |
WO2015049376A1 (fr) | 2013-10-04 | 2015-04-09 | Degremont Technologies Ag | Generateur d'ozone |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5185592B2 (ja) * | 2007-10-18 | 2013-04-17 | メタウォーター株式会社 | オゾン発生装置 |
JP5892754B2 (ja) * | 2011-09-22 | 2016-03-23 | 株式会社オーク製作所 | エキシマランプおよび放電ランプの点灯方法 |
JP5677344B2 (ja) | 2012-03-16 | 2015-02-25 | 株式会社東芝 | オゾン発生装置 |
CN102897716B (zh) * | 2012-09-29 | 2014-10-01 | 青岛国林实业股份有限公司 | 放电体串接的臭氧发生单元及臭氧发生器 |
JP2014118342A (ja) * | 2012-12-19 | 2014-06-30 | Toshiba Corp | オゾン発生装置 |
JP6316047B2 (ja) * | 2014-03-24 | 2018-04-25 | 株式会社東芝 | ガス処理装置 |
DE102015002103A1 (de) * | 2015-02-23 | 2016-08-25 | Xylem Ip Management S.À.R.L. | Ozongenerator mit positionsabhängiger Entladungsverteilung |
DE102015002102A1 (de) * | 2015-02-23 | 2016-08-25 | Xylem Ip Management S.À.R.L. | Ozongenerator mit positionsabhängiger Entladungsverteilung |
PL3208233T3 (pl) * | 2016-02-17 | 2019-01-31 | Xylem Ip Management S.À.R.L. | Wytwarzanie ozonu przy wysokich ciśnieniach |
JP6374902B2 (ja) * | 2016-03-25 | 2018-08-15 | 住友精密工業株式会社 | オゾンガス発生装置およびオゾンガス発生装置の製造方法 |
EP3333125B1 (de) | 2016-12-07 | 2019-05-15 | Xylem IP Management S.à.r.l. | Verfahren zur steuerung eines ozongenerators |
EP3421417A1 (de) | 2017-06-30 | 2019-01-02 | SUEZ Groupe | Verfahren zur steuerung einer ozonerzeugungsmaschine |
EP3421418B1 (de) | 2017-06-30 | 2020-01-15 | SUEZ Groupe | Ozonerzeugungsmaschine zur verwendung in einem schiff |
WO2021033320A1 (ja) * | 2019-08-22 | 2021-02-25 | 東芝三菱電機産業システム株式会社 | 活性ガス生成装置 |
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JPS5828201B2 (ja) * | 1976-07-29 | 1983-06-14 | 三菱電機株式会社 | オゾナイザ |
JPS5396988A (en) * | 1977-02-04 | 1978-08-24 | Mitsubishi Electric Corp | Ozonizer |
JPS5828201A (ja) | 1981-08-10 | 1983-02-19 | 日本甜菜製糖株式会社 | 圧力空気を利用する株間除草装置 |
JPS6065705A (ja) * | 1983-09-16 | 1985-04-15 | Senichi Masuda | オゾン発生装置 |
JPS6352307A (ja) * | 1986-08-20 | 1988-03-05 | Toshiba Corp | 磁気デイスク装置 |
JPH0881205A (ja) * | 1994-09-09 | 1996-03-26 | Toshiba Corp | オゾン発生装置 |
CN2280086Y (zh) * | 1996-11-21 | 1998-04-29 | 包振华 | 臭氧发生器 |
AU2003292678A1 (en) * | 2002-12-27 | 2004-07-29 | Adtec Plasma Technology Co., Ltd. | Plasma generator, ozone generator, substrate processing apparatus, and method for manufacturing semiconductor device |
-
2005
- 2005-08-03 WO PCT/CH2005/000458 patent/WO2007014473A1/de active Application Filing
-
2006
- 2006-05-22 US US11/913,129 patent/US8728402B2/en active Active
- 2006-05-22 PL PL06721968T patent/PL1910223T3/pl unknown
- 2006-05-22 RS RSP-2009/0138A patent/RS50846B/sr unknown
- 2006-05-22 JP JP2008524334A patent/JP5183472B2/ja active Active
- 2006-05-22 EP EP06721968A patent/EP1910223B1/de active Active
- 2006-05-22 PT PT06721968T patent/PT1910223E/pt unknown
- 2006-05-22 DE DE502006002900T patent/DE502006002900D1/de active Active
- 2006-05-22 DK DK06721968T patent/DK1910223T3/da active
- 2006-05-22 ZA ZA200710470A patent/ZA200710470B/xx unknown
- 2006-05-22 AT AT06721968T patent/ATE423079T1/de active
- 2006-05-22 CN CN2006800215577A patent/CN101300193B/zh active Active
- 2006-05-22 ES ES06721968T patent/ES2319927T3/es active Active
- 2006-05-22 AU AU2006275277A patent/AU2006275277B2/en not_active Ceased
- 2006-05-22 CA CA2610367A patent/CA2610367C/en not_active Expired - Fee Related
- 2006-05-22 BR BRPI0614437-3A patent/BRPI0614437A2/pt not_active Application Discontinuation
- 2006-05-22 RU RU2008108017/05A patent/RU2401800C2/ru not_active IP Right Cessation
- 2006-05-22 WO PCT/CH2006/000269 patent/WO2007014474A1/de active Application Filing
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DE3220018A1 (de) * | 1981-07-10 | 1983-01-20 | BBC Aktiengesellschaft Brown, Boveri & Cie., 5401 Baden, Aargau | Verfahren und einrichtung zur herstellung von ozon |
US4886645A (en) * | 1987-10-27 | 1989-12-12 | Bbc Brown Boveri Ag | Ozone generator |
US5145653A (en) * | 1990-03-29 | 1992-09-08 | Ozonia Ag, | Device for generating ozone |
SU1763357A1 (ru) * | 1990-06-19 | 1992-09-23 | Кооперативно-Государственный Институт Физических Проблем Технологии "Магнит" | Каскадный озонатор |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2088121A1 (de) | 2008-02-08 | 2009-08-12 | "Oxy 3" Egger KEG | Transportable Einheit zur Erzeugung von Ozon |
US8342418B2 (en) | 2009-05-29 | 2013-01-01 | Toyota Jidosha Kabushiki Kaisha | Thermo-valve |
WO2015049376A1 (fr) | 2013-10-04 | 2015-04-09 | Degremont Technologies Ag | Generateur d'ozone |
US10308509B2 (en) | 2013-10-04 | 2019-06-04 | Degremont Technologies Ag | Ozone generator |
Also Published As
Publication number | Publication date |
---|---|
PL1910223T3 (pl) | 2009-07-31 |
CA2610367C (en) | 2012-07-10 |
CN101300193B (zh) | 2010-07-07 |
WO2007014473A1 (de) | 2007-02-08 |
RS50846B (sr) | 2010-08-31 |
EP1910223B1 (de) | 2009-02-18 |
AU2006275277A1 (en) | 2007-02-08 |
JP5183472B2 (ja) | 2013-04-17 |
US8728402B2 (en) | 2014-05-20 |
US20080193343A1 (en) | 2008-08-14 |
CA2610367A1 (en) | 2007-02-08 |
RU2401800C2 (ru) | 2010-10-20 |
DE502006002900D1 (de) | 2009-04-02 |
RU2008108017A (ru) | 2009-09-10 |
JP2009502719A (ja) | 2009-01-29 |
DK1910223T3 (da) | 2009-06-02 |
ATE423079T1 (de) | 2009-03-15 |
ZA200710470B (en) | 2009-08-26 |
EP1910223A1 (de) | 2008-04-16 |
CN101300193A (zh) | 2008-11-05 |
ES2319927T3 (es) | 2009-05-14 |
PT1910223E (pt) | 2009-05-06 |
AU2006275277B2 (en) | 2011-05-12 |
BRPI0614437A2 (pt) | 2011-03-29 |
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