WO2007010716A1 - 異常検出装置付きエンコーダおよびその制御システム - Google Patents
異常検出装置付きエンコーダおよびその制御システム Download PDFInfo
- Publication number
- WO2007010716A1 WO2007010716A1 PCT/JP2006/312812 JP2006312812W WO2007010716A1 WO 2007010716 A1 WO2007010716 A1 WO 2007010716A1 JP 2006312812 W JP2006312812 W JP 2006312812W WO 2007010716 A1 WO2007010716 A1 WO 2007010716A1
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- WO
- WIPO (PCT)
- Prior art keywords
- encoder
- signal
- abnormality
- abnormality detection
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24457—Failure detection
Definitions
- the present invention relates to an abnormality detection circuit that detects an abnormality of an encoder, an encoder including an abnormality signal transmission circuit that transmits a signal detected by the abnormality detection circuit to the outside of the encoder, and an abnormality signal of encoder power.
- the present invention relates to an encoder with an abnormality detection device for safely operating a control system and its control system.
- FIG. 10 is a block diagram showing an electrical configuration of the conventional encoder device described in Patent Document 1.
- FIG. 10 is a block diagram showing an electrical configuration of the conventional encoder device described in Patent Document 1.
- reference numeral 200 denotes an encoder device, which includes a detection unit 210, an interpolation Z alarm unit 220, and a driver 230.
- Interpolation Z alarm unit 220 interpolates the pseudo sine wave signal from detection unit 210 to generate a two-phase square wave signal with the required resolution, detects a scale error due to overspeed, and outputs an alarm signal AL It has a function to
- the driver 230 is a tri-state buffer, and enters the high impedance state when the alarm signal is AL.
- Reference numeral 300 denotes a control device, which is connected to the encoder device 200 via a first connector 270 and a second connector 280 connected to the first connector 270 provided at a position that can be easily visually recognized from the outside. ing.
- the first connector 270 is provided with an alarm indicator 290 between the power line and the alarm signal line.
- the controller 300 If the controller 300 detects that the differential force between the position command and position feedback is also abnormal, it checks whether the input signal is in high impedance. If high impedance, the alarm indicator 290 is not lit, and the cable is disconnected. If the alarm indicator 290 is lit, it is determined that the encoder device 200 is defective.
- the conventional encoder device is an interpolation Z alarm unit provided in the encoder device, which interpolates the signal of the detection unit force, generates a two-phase square wave signal, detects a scale error, and outputs an alarm signal Was.
- Patent Document 1 JP 2000-193489 A
- one power source is supplied to the interpolation Z alarm unit, that is, a signal processing unit that interpolates a signal from the detection unit and outputs a position signal, and an error Because the power supply of the abnormality detection circuit that detects the alarm and outputs an alarm signal is shared, if an abnormality occurs in the power supply or if an abnormality occurs in the power supply line, the operation of the abnormality detection circuit becomes unstable. There was a problem that it was difficult to accurately determine and handle the abnormality!
- the present invention has been made in view of such problems, and even when an abnormality occurs in the power supply of the circuit section of the encoder, the abnormality in the signal in the encoder device can be detected quickly and reliably.
- An object is to provide an encoder with a device.
- the present invention is configured as follows.
- the invention according to claim 1 is an encoder that detects a displacement such as a rotation angle or a linear position of a detected object, a detection unit that detects a signal corresponding to the displacement of the detected object, and the detection unit
- a displacement such as a rotation angle or a linear position of a detected object
- the detection unit that detects a signal corresponding to the displacement of the detected object
- the power source of the encoder circuit and the power source of the abnormality detection device are: Each is supplied by a separate power source.
- the invention according to claim 2 is an encoder that detects a displacement such as a rotation angle or a linear position of a detected object, a detection unit that detects a signal corresponding to the displacement of the detected object, and the detection An encoder circuit that processes the force signal and outputs a signal corresponding to the displacement; A first wiring cable connected to the power supply and output signal section of the encoder circuit; a second wiring cable connected to the power supply and abnormality signal output section of the abnormality detection device; and detecting an abnormal state of the encoder.
- a displacement such as a rotation angle or a linear position of a detected object
- a detection unit that detects a signal corresponding to the displacement of the detected object
- the detection An encoder circuit that processes the force signal and outputs a signal corresponding to the displacement; A first wiring cable connected to the power supply and output signal section of the encoder circuit; a second wiring cable connected to the power supply and abnormality signal output section of the abnormality detection device; and detecting an abnormal state of the encoder.
- the encoder circuit power supply and the abnormality detection device power supply are supplied by separate independent power supplies, and the first wiring cable and the second wiring cable use separate cables, respectively. To do.
- the invention according to claim 3 is an encoder that detects displacement such as a rotation angle or a linear position of a detected object, a detection unit that detects a signal corresponding to the displacement of the detected object, and the detection
- an encoder comprising: an encoder circuit that processes a signal of a force and outputs a signal corresponding to a displacement; and an abnormality detection device that detects an abnormal state of the encoder
- the power supply of the abnormality detection device is supplied from a power supply of the encoder circuit by a circuit that also includes a backflow prevention diode connected to the power supply and a large-capacity capacitor force that accumulates the charge obtained through the backflow prevention diode. It is characterized by that.
- the invention described in claim 4 is characterized in that the signal for detecting an abnormal state of the encoder is a power supply voltage signal of the encoder circuit.
- the invention described in claim 5 is characterized in that the signal for detecting an abnormal state of the encoder is a waveform voltage signal detected by the angle detector.
- the invention described in claim 6 is characterized in that the signal for detecting an abnormal state of the encoder is an LED current signal corresponding to a current flowing through the LED of the angle detection unit.
- the abnormality detection device includes an environmental abnormality detection element that detects an environmental state of the encoder with the abnormality detection device.
- the invention according to claim 8 uses the environmental abnormality detection element as a temperature detection element.
- the environmental abnormality detection element is a vibration detection element.
- the invention according to claim 10 is provided with a function of sending a signal notifying that the abnormality detecting device is operating normally after a certain time after the power is turned on. Further, the invention according to claim 11 is characterized in that the abnormality detection device has a function of exchanging abnormality detection signals by bidirectional communication.
- the invention according to claim 12 is a motor including the encoder with an abnormality detection device according to any one of claims 1 to 11, a control device connected to the encoder with the abnormality detection device, And a motor drive device that drives the motor in response to a control signal from the control device.
- the control device detects an abnormality signal from the encoder with the abnormality detection device, and the motor according to an abnormal state. It is characterized by controlling.
- the present invention has the following effects.
- the encoder circuit and the abnormality detection device are provided independently and are supplied by separate power supplies, when a power supply abnormality of the encoder circuit occurs, the abnormality detection device promptly An abnormal signal can be sent. Therefore, the reliability of the encoder can be improved.
- the power supply voltage of the encoder circuit is caused by the disconnection of the wiring cable to the encoder circuit. Even if an abnormality occurs, the abnormality detection device can send out an abnormal signal promptly. Therefore, the reliability of the encoder can be improved.
- the power supply of the abnormality detection device passes through the backflow prevention diode that prevents the backflow of current from the power supply of the encoder circuit, and then is connected to the power supply of the abnormality detection device in parallel. Even if the encoder circuit power supply is cut off due to disconnection of the wiring cable to the encoder circuit, the power supply of the abnormality detection device is backed up for a short time with a large-capacitance capacitor. By sending, the encoder reliability can be improved with a simple configuration.
- the malfunction of the encoder circuit due to the waveform voltage abnormality can be detected promptly or in advance, so that the reliability of the encoder can be improved.
- the malfunction of the encoder circuit due to the LED current abnormality can be detected quickly or in advance, so that the reliability of the encoder can be improved. I can do it.
- the abnormality detection device includes an environmental abnormality detection element
- the malfunction of the encoder circuit due to the abnormal environmental condition of the encoder can be detected quickly or in advance. Can improve the reliability.
- the abnormality detection device includes a temperature detection element, the malfunction of the encoder circuit due to the abnormality of the encoder temperature can be detected promptly or in advance. Can improve the reliability.
- the abnormality detecting device includes a vibration detecting element, it is possible to quickly or proactively detect an encoder circuit malfunction due to a vibration abnormality of the encoder. Can improve the reliability.
- the abnormality detection device if the abnormality detection device has a function of sending a signal notifying that it is operating normally after a certain period of time after the power is turned on, the abnormality detection device functions normally. Therefore, the reliability of the abnormality detection device is improved. Therefore, the reliability of the encoder can be improved.
- the abnormality detection device if the abnormality detection device has a function of exchanging abnormality detection signals by bidirectional communication, it can always be verified that the abnormality detection device functions normally.
- the reliability of the detection device is further improved. Therefore, the reliability of the encoder can be improved.
- the control system detects an abnormality signal of the encoder with the abnormality detection device, determines how the control device should respond according to the abnormal state, and stops the motor promptly. Therefore, a safe and highly reliable control system can be configured.
- FIG. 1 is a block diagram showing a first embodiment of the present invention.
- FIG. 2 (a) Perspective view showing the configuration of the angle detector, (b) Circuit diagram of the encoder circuit
- FIG. 3 is a block diagram showing a second embodiment of the present invention.
- FIG. 4 is a block diagram showing a third embodiment of the present invention.
- FIG. 5 is a block diagram showing a fourth embodiment of the present invention.
- FIG. 6 is a time chart showing the operation of the fourth embodiment.
- FIG. 7 is a block diagram showing a fifth embodiment of the present invention.
- FIG. 8 is a time chart showing the operation of the fifth embodiment.
- FIG. 9 is a block diagram showing a sixth embodiment of the present invention.
- FIG. 10 is a block diagram illustrating a configuration of a conventional example.
- Receiver-side abnormal signal detection circuit block Receiver-side control circuit
- FIG. 1 is a block diagram showing a first embodiment of the present invention.
- reference numeral 10 denotes an encoder with an abnormality detection device, an angle detection unit 20 that detects displacement of a rotation angle, an encoder circuit 30 that shapes a detection signal and outputs a signal corresponding to the displacement, and this encoder circuit. It consists of an anomaly detector 40 mounted on an independent board that has a power line separate from the power line to 30 boards.
- the abnormality detection device 40 includes an abnormality detection circuit 41 and an abnormality signal transmission circuit 42.
- the first distribution cable 81 and the second distribution cable 82 are wired with different cables.
- FIG. 2A is a perspective view showing a configuration of the angle detection unit 20 of the present embodiment.
- the angle detection unit 20 includes an LED 21, a fixed slit 22, and a photodiode 23, and detects a rotation angle of a detection object (not shown) by a rotating disk 25 fixed to the hub 24, a fixed slit 22, and a photodiode 23.
- the signal is sent to the encoder circuit 30 as an electrical signal.
- an analog signal A indicating the signal state of each part of the encoder for detecting an abnormal state of the encoder is input from the encoder circuit 30 to the abnormality detection circuit 41.
- the abnormality detection circuit 41 detects the level of the analog signal. Is detected within a predetermined range. When it is detected that it is outside the predetermined range, an abnormal signal is generated and input to the abnormal signal transmission circuit.
- FIG. 2B is a circuit diagram showing a part of the encoder circuit 30 of the present embodiment.
- 31 is an operational amplifier that amplifies the signal detected by the photodiode 23, and 32 is a comparator that converts the amplified signal into a rectangular wave.
- the output of the operational amplifier 31 is input to the abnormality detection circuit 41 as a waveform voltage signal.
- 33 is a resistor for detecting the LED current, and the voltage across the resistor 33 is input to the abnormality detection circuit 41 as an LED current signal.
- analog signal A indicating the encoder status include the following a), b), and c).
- the maximum value and the minimum value of the approximate sine wave signal waveform sent from the angle detection unit are detected.
- the abnormality detection level can be set according to the situation, and by providing a margin for the detection level, the system to which this encoder is applied can be safely installed before malfunctioning. Can be stopped.
- the substrate of the encoder circuit 30 and the substrate of the abnormality detection device 40 have been described as separate substrates. However, in order to simplify the components, the same effect can be obtained even if the circuits are configured independently on the same substrate. is there.
- FIG. 3 is a block diagram showing a second embodiment of the present invention.
- 51 is a backflow prevention diode
- 52 is a large capacity capacitor
- 83 is a wiring cable that also has the wiring power of the abnormality signal output unit 43, and does not have a power supply wiring to the abnormality detection device 40.
- the difference between the present embodiment and the first embodiment is that the power to the encoder circuit 30 and the power to the abnormality detection device 40 in the first embodiment are different powers.
- the encoder circuit The power source of 30 and the power source of the abnormality detection device 40 are made common, and the power source of the encoder circuit 30 also supplies power to the abnormality detection device 40 by the backflow prevention diode 51 and the large-capacitance capacitor 52.
- the abnormality detection device 40 When the power supply wiring of the encoder circuit 30 becomes unavailable due to disconnection or the like, the abnormality detection device 40 is supplied with power for a while due to the capacity of the large-capacitance capacitor 52. While this power is supplied, the abnormality detection device 40 detects a power supply abnormality of the encoder circuit 30 and sends an abnormality signal.
- the power supply of the encoder circuit and the power supply of the abnormality detection device are shared, there is an effect that the number of wires from the power supply is reduced and the chance of disconnection is reduced.
- the configuration is simple because only one power source is required.
- FIG. 4 is a block diagram showing a third embodiment of the present invention.
- 60 is an environmental abnormality detection element.
- This embodiment is different from the first embodiment in that the encoder 10 with the abnormality detection device includes an environmental abnormality detection element 60.
- a temperature detection element 61 that detects the temperature of the encoder and a vibration detection element 62 that detects the vibration of the encoder are provided as the environmental abnormality detection element 60.
- a thermistor was used as the temperature detection element 61, and an acceleration sensor was used as the vibration detection element 62.
- the temperature of the encoder 10 is detected by the temperature detection element 61, and an analog signal corresponding to the temperature is sent to the abnormality detection circuit 41.
- the vibration detection element 62 The encoder 10 vibration is detected, and an analog signal corresponding to the vibration is sent to the abnormality detection circuit 41.
- an abnormal signal is generated. These abnormal signals are sent from the abnormal signal transmission circuit 42.
- the encoder with the abnormality detection device includes the vibration detection element. Therefore, the malfunction of the electrical component or the mechanical component due to the environmental abnormality such as the temperature rise or vibration of the encoder, or the malfunction of the circuit is prevented. This can be prevented and the reliability of the encoder can be further improved.
- FIG. 5 is a block diagram showing a fourth embodiment of the present invention.
- reference numeral 71 denotes a normal signal generating circuit.
- This embodiment differs from the first embodiment in that a normal signal generation circuit 71 is provided to notify that the encoder 10 with an abnormality detection device is operating normally after a certain period of time after the abnormality detection device 40 is turned on. It is a point that has.
- FIG. 6 is a time chart showing the operation of this embodiment.
- reference numeral 711 denotes a power supply voltage of the abnormality detection device 40
- reference numeral 712 denotes an output signal of the normal signal generation circuit.
- the normal signal generation circuit 71 detects that the abnormality detection device 40 is operating normally, and after T seconds set by the normal signal generation circuit 71 from the rise of the power supply. Sends a signal that goes high. Immediately after turning on the power, if there is a possibility that the abnormality detection device 40 will break down and send a high level signal, the abnormality detection device 40 will operate normally after a certain time of T seconds. The reliability of detection has been improved by providing a function to send a signal indicating that the device is operating.
- the abnormality detection device has a normal signal generation circuit, and when the power is turned on, it detects whether the abnormality detection device is operating normally.
- the reliability of the encoder can be further improved.
- FIG. 7 is a block diagram showing a fifth embodiment of the present invention.
- 72 is a bidirectional abnormality signal generating circuit for examining the operation of the abnormality detecting device 40 bidirectionally with a control device (not shown).
- the difference between this embodiment and the fourth embodiment is that, in the fourth embodiment, the abnormality detection device 40 has the normal signal generation circuit 71, but in this embodiment, the abnormality detection device 40 has the bidirectional abnormality signal generation circuit 72. In other words, the operation of the abnormality detection device 40 is checked by bidirectional communication.
- FIG. 8 is a time chart showing the operation of this embodiment.
- reference numeral 721 denotes a signal waveform of the abnormal signal output unit.
- a control circuit (not shown) sends an abnormality inquiry signal 722 that short-circuits the output terminal of the abnormality signal transmission circuit 42 for a short time (T1) at a constant time interval (TO).
- the bidirectional abnormality signal generation circuit 72 outputs a low level signal 723 indicating normal operation for a short time (T2) T seconds after the short circuit is released.
- T0 0.1 seconds
- ⁇ 1 0.01 seconds
- ⁇ 0.05 seconds
- ⁇ 2 0.005 seconds
- the normal state can be constantly monitored at a high speed of 0.1 seconds.
- the operation of the method of short-circuiting the output terminal of the abnormal signal transmission circuit 42 for a short time has been described. However, even if this method is not used, it is possible to say “abnormality inquiry” and “normal operation” in both directions. It goes without saying that a circuit capable of exchanging communication signals is needed.
- the abnormality detection device includes the bidirectional abnormality signal generation circuit and always checks the operation of the abnormality detection device itself, so that the reliability of the encoder can be further improved.
- FIG. 9 is a block diagram showing a sixth embodiment of the present invention.
- 90 is a control device
- 100 is a motor drive device
- 110 is a motor mounted on an industrial machine such as a machine tool (not shown) and equipped with the encoder 10 with an abnormality detection device of the present invention.
- the control device 90 includes a receiving side abnormal signal detection circuit unit 91 and a receiving side control circuit 92. Next, the operation of this embodiment will be described.
- the receiving-side control circuit 92 stops the motor 110 quickly or makes an emergency stop.
- the abnormal signal output 94 is transmitted to the motor drive device 100.
- the control device determines how to respond according to the abnormal signal output generated by the receiving control circuit of the control device, and sends the result as the abnormal signal output.
- a process such as quickly stopping the motor is performed, a safe and highly reliable control system can be configured.
- the present invention can be applied to an encoder that detects the rotational position or linear displacement of a motor used in many industrial machines such as semiconductor manufacturing equipment, robots, and NC machine tools.
- a rotary optical encoder has been described, but it is not limited to either a rotary type or a linear type, and is not limited to either an optical type or a magnetic type. Needless to say!
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Abstract
Description
Claims
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007525922A JP4968069B2 (ja) | 2005-07-19 | 2006-06-27 | 異常検出装置付きエンコーダおよびその制御システム |
| US11/996,355 US20090229134A1 (en) | 2005-07-19 | 2006-06-27 | Encoder including abnormality detecting device and control system thereof |
| DE112006001925T DE112006001925T5 (de) | 2005-07-19 | 2006-06-27 | Codierer, der eine Anomaliedetektionsvorrichtung und ein zugehöriges Steuersystem enthält |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005-207979 | 2005-07-19 | ||
| JP2005207979 | 2005-07-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2007010716A1 true WO2007010716A1 (ja) | 2007-01-25 |
Family
ID=37668602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2006/312812 Ceased WO2007010716A1 (ja) | 2005-07-19 | 2006-06-27 | 異常検出装置付きエンコーダおよびその制御システム |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20090229134A1 (ja) |
| JP (1) | JP4968069B2 (ja) |
| CN (1) | CN101223418A (ja) |
| DE (1) | DE112006001925T5 (ja) |
| WO (1) | WO2007010716A1 (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008222394A (ja) * | 2007-03-14 | 2008-09-25 | Hitachi Ltd | エレベーター装置 |
| JP2011154005A (ja) * | 2010-01-28 | 2011-08-11 | Nikon Corp | エンコーダ |
| CN101266155B (zh) * | 2007-03-16 | 2011-08-17 | 大隈株式会社 | 用于旋转式绝对编码器的异常检测装置 |
| JP2016052223A (ja) * | 2014-09-02 | 2016-04-11 | ソムフィ株式会社 | モータ駆動装置 |
| DE102019001231A1 (de) | 2018-02-20 | 2019-08-22 | Fanuc Corporation | Messgeber und Sicherungsstrom-Abnormalitätsbestimmungsverfahren |
| JP2021009134A (ja) * | 2019-07-01 | 2021-01-28 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mit Beschrankter Haftung | エンコーダ及びエンコーダ動作方法 |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8322214B2 (en) | 2008-04-04 | 2012-12-04 | Panasonic Corporation | Sensor device |
| US8131508B2 (en) * | 2009-02-05 | 2012-03-06 | Panasonic Corporation | Sensor apparatus |
| JP4337952B1 (ja) * | 2009-02-05 | 2009-09-30 | パナソニック株式会社 | センサ装置 |
| JP4386143B1 (ja) * | 2009-02-05 | 2009-12-16 | パナソニック株式会社 | センサ装置 |
| DE102010007349B4 (de) * | 2009-02-09 | 2018-03-01 | Fuji Electric Co., Ltd. | Anomalienüberwachungsvorrichtung |
| JP6193000B2 (ja) * | 2013-06-12 | 2017-09-06 | 株式会社日立製作所 | エンコーダ異常検出装置及びエンコーダ異常検出装置を用いたエレベータ装置 |
| JP6857818B2 (ja) * | 2016-10-24 | 2021-04-14 | パナソニックIpマネジメント株式会社 | エンコーダの異常検出方法及び異常検出装置、並びにロボット制御システム |
| US10578463B2 (en) * | 2016-12-19 | 2020-03-03 | Microchip Technology Incorporated | Detection of defects in motor position decoder system |
| JP6434571B1 (ja) * | 2017-06-23 | 2018-12-05 | ファナック株式会社 | 消費電流の異常を検知する異常検知部を備えるアブソリュートエンコーダ |
| CN109471049B (zh) * | 2019-01-09 | 2021-09-17 | 南京航空航天大学 | 一种基于改进堆叠自编码器的卫星电源系统异常检测方法 |
| TWI874700B (zh) * | 2021-08-19 | 2025-03-01 | 達明機器人股份有限公司 | 位置偵測系統 |
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- 2006-06-27 CN CNA2006800263867A patent/CN101223418A/zh active Pending
- 2006-06-27 WO PCT/JP2006/312812 patent/WO2007010716A1/ja not_active Ceased
- 2006-06-27 US US11/996,355 patent/US20090229134A1/en not_active Abandoned
- 2006-06-27 DE DE112006001925T patent/DE112006001925T5/de not_active Withdrawn
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2008222394A (ja) * | 2007-03-14 | 2008-09-25 | Hitachi Ltd | エレベーター装置 |
| CN101266155B (zh) * | 2007-03-16 | 2011-08-17 | 大隈株式会社 | 用于旋转式绝对编码器的异常检测装置 |
| JP2011154005A (ja) * | 2010-01-28 | 2011-08-11 | Nikon Corp | エンコーダ |
| JP2016052223A (ja) * | 2014-09-02 | 2016-04-11 | ソムフィ株式会社 | モータ駆動装置 |
| DE102019001231A1 (de) | 2018-02-20 | 2019-08-22 | Fanuc Corporation | Messgeber und Sicherungsstrom-Abnormalitätsbestimmungsverfahren |
| US10847995B2 (en) | 2018-02-20 | 2020-11-24 | Fanuc Corporation | Encoder and backup current abnormality determining method based on the rotational speed of the object of detection |
| JP2021009134A (ja) * | 2019-07-01 | 2021-01-28 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツングDr. Johannes Heidenhain Gesellschaft Mit Beschrankter Haftung | エンコーダ及びエンコーダ動作方法 |
| JP7597516B2 (ja) | 2019-07-01 | 2024-12-10 | ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | エンコーダ及びエンコーダ動作方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101223418A (zh) | 2008-07-16 |
| JP4968069B2 (ja) | 2012-07-04 |
| JPWO2007010716A1 (ja) | 2009-01-29 |
| US20090229134A1 (en) | 2009-09-17 |
| DE112006001925T5 (de) | 2008-05-21 |
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