WO2006030506A1 - Procédé de pulvérisation d’entretoises - Google Patents

Procédé de pulvérisation d’entretoises Download PDF

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Publication number
WO2006030506A1
WO2006030506A1 PCT/JP2004/013542 JP2004013542W WO2006030506A1 WO 2006030506 A1 WO2006030506 A1 WO 2006030506A1 JP 2004013542 W JP2004013542 W JP 2004013542W WO 2006030506 A1 WO2006030506 A1 WO 2006030506A1
Authority
WO
WIPO (PCT)
Prior art keywords
color filter
black matrix
droplet
spacer
openings
Prior art date
Application number
PCT/JP2004/013542
Other languages
English (en)
Japanese (ja)
Inventor
Hiroyuki Sekiguchi
Ryusuke Hayashi
Original Assignee
Nagase & Co., Ltd.
Choshu Industry Company Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nagase & Co., Ltd., Choshu Industry Company Limited filed Critical Nagase & Co., Ltd.
Priority to PCT/JP2004/013542 priority Critical patent/WO2006030506A1/fr
Publication of WO2006030506A1 publication Critical patent/WO2006030506A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/24—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means incorporating means for heating the liquid or other fluent material, e.g. electrically
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133514—Colour filters
    • G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1339—Gaskets; Spacers; Sealing of cells
    • G02F1/13392—Gaskets; Spacers; Sealing of cells spacers dispersed on the cell substrate, e.g. spherical particles, microfibres

Definitions

  • the present invention relates to a spacer spraying method.
  • a color filter and a drive substrate are arranged to face each other, and liquid crystal is sealed between the color filter and the drive substrate.
  • This color filter includes, for example, a grid-like black matrix in which a plurality of openings are formed on a transparent substrate, and colored portions of R, G, and B colors provided in these openings. It is a thing.
  • the color filter can further have an upper film on the colored portion and the black matrix as necessary, and the upper film is formed by laminating a transparent electrode film, an alignment film, and the like.
  • a large number of spacers for maintaining a predetermined distance are arranged between the drive substrate and the color filter.
  • Patent Document 1 Japanese Patent Laid-Open No. 10-48417
  • a driving substrate is overlaid on the spacer.
  • a spacer is arranged on the surface of the color filter facing the colored portion, it may affect the display quality of the pixel corresponding to the colored portion when used as a liquid crystal display. The Therefore, it is necessary to arrange a spacer on the surface of the color filter in a portion facing the black matrix.
  • the present invention has been made in view of the above problems, and it is possible to dispose a spacer with sufficiently high accuracy in a portion of the surface of the color filter facing the black matrix.
  • An object is to provide a method for spreading a spacer.
  • a method for spreading a spacer includes a step of preparing a color filter having a black matrix in which a plurality of openings are formed, and a colored portion provided in each opening of the black matrix; A process of adhering droplets containing spacers to the area including the part facing the black matrix on the surface of the color filter, and a light shield capable of shielding infrared rays and having openings corresponding to the colored portions. And a step of arranging the plate so that the colored portion of the color filter faces the opening of the light shielding plate and irradiating the color filter with infrared rays through the opening of the light shielding plate.
  • a droplet including a spacer adheres to a region including a portion facing the black matrix on the surface of the color filter, and the portion facing the colored portion is opened through the light shielding plate. Infrared rays are irradiated to the color filter.
  • infrared rays are exclusively applied to the portion of the droplet that faces the colored portion. Therefore, when the droplets dry, the liquid in the portion of the droplet that faces the colored portion evaporates mainly, and the liquid in the portion of the droplet that faces the black matrix. Is likely to remain. Therefore, in the process of drying the droplets, the spacers in the droplets are pulled by the remaining liquid so that the portion facing the black matrix on the surface of the color filter, in other words, the portion on the black matrix has a counter force. Move. As the drying progresses and the liquid droplets disappear, the spacer is disposed on the surface of the color filter facing the black matrix.
  • the spacer is accurately placed on the surface of the color filter facing the black matrix.
  • a recessed portion that is depressed more than a portion facing the colored portion on the surface of the color filter is formed in the portion facing the black matrix on the surface of the color filter.
  • the droplets are attached to the region including the depression on the surface of the color filter.
  • the spacer is included in the region including the depression on the surface of the color filter.
  • a droplet adheres and is dried by infrared rays irradiated through the opening of the light shielding plate.
  • the liquid in the recess is more likely to remain in the recess where it is more difficult to evaporate than the liquid outside the recess.
  • the spacer in the droplet is pulled by the liquid and moves toward the depression. In other words, the spacer is more reliably arranged at the portion facing the black matrix on the surface of the color filter.
  • the color filter preferably further has an upper film on each colored portion and the black matrix.
  • the upper film can include a transparent electrode film and an alignment film in order from the side closer to the colored portion and the black matrix, and the color filter having such a configuration is suitable for a liquid crystal device.
  • FIG. 1 is a schematic cross-sectional view illustrating a color filter according to a first embodiment.
  • FIG. 2 is an enlarged view of the color finisher of FIG.
  • FIG. 3 is a top view of the color finisher shown in FIG. 2.
  • FIG. 4 is a schematic cross-sectional view showing a method of depositing a droplet containing a spacer on a color filter.
  • FIG. 5 is a schematic view showing droplets attached on the color filter.
  • Fig. 6 is a schematic diagram following Fig. 5 showing how the droplets are dried.
  • FIG. 7 is a schematic diagram following FIG. 6 showing how the droplets are dried.
  • FIG. 8 is a schematic diagram following FIG. 7 showing how the droplets are dried.
  • FIG. 9 is a schematic diagram following FIG. 8 showing how droplets are dried.
  • FIG. 10 is a schematic cross-sectional view showing a method for drying droplets on an upper film of a color filter in the second embodiment.
  • FIG. 11 is a schematic cross-sectional view showing a state after drying droplets on an upper film of a color filter in the second embodiment.
  • a color filter 100 as shown in FIG. 1 and FIG. 3 is prepared. This color filter 1
  • 00 includes a substrate 10, a black matrix 20, a red coloring portion 30R, a green coloring portion 30G, a blue coloring portion 30B, and an upper film 60.
  • the substrate 10 is a transparent flat plate on which glass isotropic force is also formed.
  • the black matrix 20 is a film that also has a material force to shield visible light.
  • the material of the black matrix 20 include metal materials such as chromium and chromium Z chromium oxide, and a resin material.
  • the black matrix 20 has a lattice shape or a stripe shape, and forms a large number of openings 20p.
  • the width 20w of the black matrix can be set to about 5-30 / z m, for example. Further, the height 20h of the black matrix can be set to about 0.1-, for example.
  • the red coloring portion 30R, the green coloring portion 30G, and the blue coloring portion 30B are arranged in this order in the opening 20p of the black matrix 20, respectively.
  • Each of the red coloring portion 30R, the green coloring portion 30G, and the blue coloring portion 30B is made of a transparent coloring material that can selectively transmit visible light of each color, and for example, a transparent coloring resin can be used.
  • the width 3 Ow of the colored portions 30R, 30G, and 30B can be set to 5 to 100 m, for example.
  • the height 3 Oh of each coloring portion 30R, 30G, 30B can be set to 1 to 2 m, for example.
  • the height 30h of each of the colored portions 30R, 30G, and 30B is sufficiently higher than the height 20h of the black matrix 20.
  • An upper film 60 is formed over the colored portions 30R, 30G, 30B and the black matrix 20.
  • This upper film 60 is a laminated body having the transparent electrode film 40 and the alignment film 50 in the order of the substrate 10 side force.
  • the transparent electrode film 40 is a common electrode that should be disposed opposite to a pixel electrode (not shown) of a driving substrate of a liquid crystal display, and is formed of a transparent conductive material such as ITO.
  • the thickness of the transparent electrode film 40 is, for example, about 0.1 ⁇ m.
  • the alignment film 50 aligns the liquid crystal in a desired direction, and can be formed of, for example, a resin material such as polyimide.
  • the thickness of the alignment film 50 is, for example, about 0.1 ⁇ m.
  • the black matrix 20 has a lattice shape, and the recess 60a has a groove shape along the black matrix 20. Since the recess 60a has a groove shape along the black matrix 20, it is easy to attach the droplet 240 to the region 240s including the recess 60a.
  • such a color filter 100 is formed by forming a lattice-like black matrix 20 on the substrate 10 by a photolithography method or the like and then opening the openings 20p of the black matrix 20 by a photolithography method or the like.
  • the colored portions 30R, 30G, and 30B are sequentially formed so as to be higher than the black matrix 20, and then a predetermined thickness is formed on the black matrix 20 and the colored portions 3OR, 30G, and 30B by a sputtering method, a vapor deposition method, or the like.
  • the transparent electrode film 40 is formed, and an alignment film material such as polyimide resin is applied to the transparent electrode film 40 to a predetermined thickness and solidified, and the surface is rubbed to form the alignment film 50. Obtained in
  • droplets 240 including the spacers 230 are deposited on the upper film 60 of the color filter 100 by using a spacer dispersing device 300 as shown in FIG.
  • the spraying device 300 includes a discharge unit 200 and a moving unit 250.
  • Discharge unit 200 is open In addition to having a container 210 with a mouth 220 formed therein, a hammer 204 and a piezo element 202 for moving the hammer 204 toward the opening 220 are provided in the container 210. Then, the discharge unit 200 moves the hammer 204 by the piezo element 202 to discharge the spray liquid 206 including the spacer 230 in the container 210 as droplets 240 from the fine openings 220, so that the color filter 100 Adhere on 240s of area.
  • the moving unit 250 moves the position of the force filter 100 so that the droplet 240 adheres onto the region 240s of the surface of the upper film 60.
  • the region 240s is a region including the recess 60a on the surface of the upper film 60. In this case, if there is a recess 60a anywhere in the region 240s, it is not necessary to include the recess 60a in the center of the region 240s.
  • the position of the spacer 230 is arbitrary in the droplet 240 on the color filter 100.
  • the spacer 230 is sunk in the droplet 240.
  • the position where the spacer 230 sinks is a force that may be within the recess 6 Oa.
  • the portion other than the recess 60a on the upper film 60, that is, each colored part in the upper film 60 Often located opposite to 30R, 30G, 30B
  • FIG. 5 shows an enlarged cross-sectional view of the color filter 100 with the droplet 240 attached.
  • the droplet 240 is particularly attached to the region including the recess 60a between the coloring portion 30R and the coloring portion 30B. Is preferable.
  • the spacer 230 becomes the red colored portion 30R. In other words, the possibility that the spacer 230 is disposed on the green coloring portion 30G is significantly reduced.
  • the shape of the spacer 230 is not limited! However, it is preferable that the spacer 230 has a spherical shape because of the movement to the recess 60 a on the upper film 60.
  • the material of the spacer 230 is arbitrary, and for example, a silicon compound such as silica, a plastic particle formed by a silicone-modified polymer or the like can be used.
  • the particle size of the spacer 230 can be set to 1 ⁇ m-7 ⁇ m, for example.
  • the liquid of the droplet 240 is not particularly limited! However, for example, a mixed solution of water and alcohol (IPA) can be used.
  • the diameter of the droplet 240 on the color filter 100 can be, for example, about 50-100 m.
  • a light shielding plate 400 capable of shielding infrared rays is prepared.
  • openings 400a having shapes and sizes corresponding to the colored portions 30R, 30G, and 30B of the color filter 100 are formed.
  • a light shielding plate 400 can be easily manufactured by patterning a material such as a metal resin by a known patterning method.
  • the light shielding plate 400 can also be formed of a material having a heat insulating effect in addition to the infrared light shielding property, such as ceramic. In this case, the light shielding plate 400 itself is not easily heated, and the heat of the light shielding plate 400 is difficult to reach the droplet 240, which is preferable.
  • the light shielding plate 400 is applied to the colored plate 30R, 30G, and 30B of the S color finoleta 100 against the surface of the color filter 100 on which the droplets 240 of the color filter 100 adhere. Arrange to face.
  • the distance between the light shielding plate 400 and the color filter 100 is as short as possible in the range without contact with the light shielding plate 400 and the droplet 240, and the force S is as short as possible.
  • the infrared light is irradiated to the color filter 100 through the opening 400a of the light shielding plate 400.
  • a preferable wavelength range of infrared rays is about 0.76 ⁇ m to 1000 ⁇ m, and particularly, a far infrared ray, that is, 4 ⁇ m to 1000 ⁇ m is preferable.
  • the infrared rays are mainly incident on the portion 240c facing the colored portions 30R, 30G, 30B in the droplet 240, and a part of the infrared rays is transmitted through the portion 240c.
  • the light mainly enters the portion 60c facing the colored portions 30R, 30G, and 30B on the surface of the color filter 100. And these parts are mainly heated by infrared rays.
  • infrared rays do not enter the portion 240b facing the black matrix 20 in the droplet 240 or the portion 60b facing the black matrix 20 on the surface of the color filter 100, and the temperature of these portions Is hard to go up. [0044] Therefore, when the droplet 240 is dried, the portion 240c facing the colored portions 30R, 30G, 3OB in the droplet 240 is mainly evaporated, and the black portion of the droplet 240 is black. The portion 240b facing the matrix 20 tends to remain until the end. As a result, as shown in FIGS.
  • the spacer 230 in the droplet 240 is pulled by the remaining droplet 240 until the end, and the upper film of the color filter 60 is formed. Move to the part 60b facing the black matrix 20 on the 60. When the drying progresses and the droplets 240 disappear, the spacer 230 is disposed on the portion 60 b facing the black matrix 20 on the surface of the color filter 100.
  • the recess 60a is formed in the portion 60b facing the black matrix 20 on the surface of the color filter 100, the liquid in the recess 60a is further in comparison with the outside of the recess 60a. Evaporate. Therefore, when the droplet 240 is dried, the droplet 240 moves more accurately in the recess 60 a that is a portion facing the black matrix 20 on the surface of the color filter 100.
  • the spacer 230 is disposed at an arbitrary position in the droplet 240 when the droplet is deposited, the droplet 240 If 240 adheres to the region 240s including the depression 60a, the spacer 230 moves into the depression 6Oa as the droplet 240 dries.
  • the spacer 230 is disposed in the recess 60a as shown in FIG. This completes the spacer spraying process.
  • an electrode substrate (not shown) is stacked with the spacer 230 interposed therebetween, and liquid crystal is sealed between the color filter 100 and the electrode substrate to complete a liquid crystal display.
  • the droplet 240 including the spacer 230 is attached to the region 240s including the portion 60b facing the black matrix 20 on the surface of the color filter 100, and the coloring portion 30R.
  • the color filter 100 is irradiated with infrared rays through a light shielding plate having an opening 400a opposite to 30G and 30B.
  • the droplet 240 is mainly dried from the portion 240c facing the coloring portions 30R, 30G, and 30B, and as the drying proceeds, the spacer 230 in the droplet 240 is pulled by the remaining liquid, and the color filter 100 It moves toward the part 60b facing the black matrix 20 on the surface. Therefore, drop 240 is applied to the upper film 60.
  • the spacer 230 is located at an arbitrary position in the droplet 240 when the droplet is deposited, the spacer will be removed after the droplet is dried. It is arranged in a portion 60b facing the black matrix 20 on the surface of 100.
  • the spacer spraying method according to the present embodiment is different from the first embodiment in that the upper film 60 further includes a flat film 55 in the color filter 100.
  • this flat film 55 is also formed of material strength such as epoxy resin, acrylic resin, etc., and fills the level difference between the colored portions 30R, 30G, 30B and the black matrix 20 with color. It has the role of flattening the surface of the filter 100.
  • the transparent conductive film 40 and the alignment film 50 are formed on the flattening film 55. That is, in this embodiment, the depression 60a is formed on the surface of the color filter 100.
  • the droplet 240 is attached to the region including the portion 60b facing the black matrix 20 on the surface of the color filter 100, that is, the surface of the upper film 60, and then the first embodiment.
  • the color filter 100 is irradiated with infrared rays through the opening 400a of the light shielding plate 400.
  • the droplet 240 is likely to remain on the portion 60b facing the black matrix 20 on the surface of the color filter 100. Therefore, after drying, the spacer 230 is shown in FIG.
  • the color filter 100 is disposed on the portion 60b facing the black matrix 20 on the surface.
  • the spacer density is higher than the droplet density, but the spacer density may be lower than the droplet density.
  • the spacer 230 is in the state shown by the dotted line in FIG.
  • the spacer 230 is disposed in the portion 60 b facing the black matrix 20 on the surface of the color filter 100. The same applies to the second embodiment.
  • the spray device 300 ejects the droplets 240 from the top to the bottom, and the droplets adhere to the color filter 100 with the upper film 60 disposed upward.
  • the droplet 240 may be discharged from the bottom to the top by the cloth device 300, and the droplet 240 may be attached to the lower surface of the color filter 100 in which the upper film 60 is disposed downward.
  • the spacer 230 is disposed in the recess 60a in the same manner as described above, regardless of whether the spacer 230 floats or sinks in the droplet.

Landscapes

  • Liquid Crystal (AREA)

Abstract

L’invention porte sur un procédé de pulvérisation d’entretoises comprenant une phase d’élaboration d’un filtre de couleur (100) ayant une matrice noire (20) pourvue d’une pluralité d’ouvertures (20p), des parties colorées (30R, 30G, 30B) aménagées dans des ouvertures respectives (20p) et un film supérieur (60) installé sur les parties colorées (30R, 30G, 30B) et la matrice noire (20), une phase de collage d’une gouttelette (240) contenant une entretoise (230) sur une région (240s) de la surface du film supérieur (60) comportant une portion (60b) faisant face à la matrice noire (20) et une phase de disposition d’une plaque de blindage contre la lumière (400) capable de bloquer des rayons infrarouges et pourvue d’ouvertures (400a) correspondant respectivement aux parties colorées (30R, 30G, 30B) pour que les parties colorées (30R, 30G, 30B) fassent face aux ouvertures (400a), et d’irradiation du filtre de couleur (100) avec des rayons infrarouges à travers les ouvertures (400a).
PCT/JP2004/013542 2004-09-16 2004-09-16 Procédé de pulvérisation d’entretoises WO2006030506A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2004/013542 WO2006030506A1 (fr) 2004-09-16 2004-09-16 Procédé de pulvérisation d’entretoises

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2004/013542 WO2006030506A1 (fr) 2004-09-16 2004-09-16 Procédé de pulvérisation d’entretoises

Publications (1)

Publication Number Publication Date
WO2006030506A1 true WO2006030506A1 (fr) 2006-03-23

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Application Number Title Priority Date Filing Date
PCT/JP2004/013542 WO2006030506A1 (fr) 2004-09-16 2004-09-16 Procédé de pulvérisation d’entretoises

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WO (1) WO2006030506A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08160433A (ja) * 1994-12-08 1996-06-21 Sharp Corp 液晶表示装置およびその製造方法
JP2003121854A (ja) * 2001-10-09 2003-04-23 Lac:Kk スペーサー散布方法及び装置
JP2003121855A (ja) * 2001-10-09 2003-04-23 Lac:Kk スペーサー散布方法及び装置
JP2004145102A (ja) * 2002-10-25 2004-05-20 Seiko Epson Corp 液晶装置、液晶装置の製造方法、電子機器

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08160433A (ja) * 1994-12-08 1996-06-21 Sharp Corp 液晶表示装置およびその製造方法
JP2003121854A (ja) * 2001-10-09 2003-04-23 Lac:Kk スペーサー散布方法及び装置
JP2003121855A (ja) * 2001-10-09 2003-04-23 Lac:Kk スペーサー散布方法及び装置
JP2004145102A (ja) * 2002-10-25 2004-05-20 Seiko Epson Corp 液晶装置、液晶装置の製造方法、電子機器

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