200827879 (1) 九、發明說明 【發明所屬之技術領域】 本發明，是關於間隔物的配置方法。 【先前技術】 以往以來，在液晶面板等之製造上，就實施著在基板 上配置複數個間隔物之做法。作爲如此之間隔物配置方法 ，被周知有：從噴頭容器之開口，將間隔物含有液的液滴 吐出，讓液滴附著在例如黑矩陣（black matrix )上，然 後，藉由讓該液滴乾燥，將間隔物固著（固定接著）於基 板上所期望的位置之方法。 在液晶面板等之製造上，於基板上必須將間隔物分別 配置於極爲多數的位置。因此，使用其多數之開口是被以 預定的間距所配置的噴頭容器，從該噴頭容器的各開口以 一行分吐出多數的液滴使之附著於基板，並且，使該噴頭 容器與基板相對地朝向與開口之排列方向交叉之方向移動 ，使液滴以矩陣狀地附著在基板上（例如，請參照專利文 獻 1、2 )。 〔專利文獻1〕日本特開2005- 1 04 1 2號公報 〔專利文獻2〕日本特開2005-4094號公報 【發明內容】 〔發明所欲解決之技術問題〕 在近年中，被期望著於彩色濾光片上之間隔物的配置 -4- 200827879 (2) 能夠更高精度地進行。然而，即使使噴頭容器相對於彩色 濾光片能夠高精度地移動，但由於種種的要因，從噴頭容 器的開口所吐出的液滴飛散到基板上無特定之場所，亦即 ，可能遠遠偏離液滴之彈著目標位置、或是有時亦會從噴 頭容器的開口吐出意料中之液滴以外的無意料隨從液滴。 ' 並且，當如此之液滴含有間隔物時，就會造成妨礙間隔物 的高精度配置。 Φ 本發明，是有鑑於上述課題而硏發。其目的，係在於 提供一種可以簡易且低成本地將間隔物朝向基板上之所期 望的位置配置之間隔物的配置方法。 〔解決問題之技術手段〕 本發明之間隔物的配置方法，係具備附著製程、固定 接著製程、固定接著製程、以及未固定接著間隔物去除製 程。在附著製程中，係使含有複數個間隔物的液膜附著於 # 基板上，或是，使含有間隔物的複數個液滴附著於基板上 。在固定接著製程中，係藉由夾介具有使光透過之開口部 和不使光透過之遮光部的遮光板來對基板照射光，使與遮 光板之開口部相向的間隔物對基板固定接著。在未固定接 著間隔物去除製程，係從基板的表面將未固定接著的間隔 物予以去除。 依據本發明，附著於基板之液膜中的複數個間隔物或 是附著於基板之複數個液滴中的間隔物之中，存在於與遮 光板之開口部相向之處所的間隔物爲選擇性地固定接著於 -5- 200827879 (3) 基板。其後，藉由將未固定接著的間隔物從基板去除，不 管附著製程中之在基板上的間隔物爲如何配置，可以因應 遮光板之開口部的配置，將間隔物配置於基板上所希望的 位置處。換言之，依據本發明，由於可以容易地防止附著 到所希望之處所以外的間隔物與基板固定接著，所以可以 實現極高精度之間隔物的配置方法。 在此，具體上，在固定接著製程中照射紅外線，使與 • 遮光板之開口部相向之間隔物周圍的液體乾燥爲理想。 以如此方式實施，藉由使存在於所希望之位置之間隔 物周圍的液膜或液滴的液體乾燥，則無關於間隔物的種類 、材質等，而可以使液滴或是液膜中之該間隔物大致在其 所在位置良好地固定接著於基板的表面。 特別是，當間隔物的表面是藉由聚合物等之樹脂所形 成，或者是於間隔物的表面結合有能夠與基板結合之官能 基時，藉由使間隔物周圍的液體乾燥，可以極爲良好地使 I 間隔物對基板固定接著。 在此，於附著製程中，間隔物的表面是藉由利用可視 - 光線或紫外線的照射而硬化的樹脂所形成，在固定接著製 . 程中’使間隔物周圍的液體乾燥後，夾介遮光板對基板更 進一步地照射可視光線或紫外線亦爲理想。 於此種情形時，由於間隔物的表面會硬化，故可以更 加提高間隔物與基板的固定接著力。 另一方面，於附著製程中，間隔物的表面是藉由利用 光線的照射而硬化的樹脂所形成，於固定接著製程中，當 -6 - 200827879 (4) 照射上述光線時，間隔物是與基板的表面接觸著亦爲理想 〇 依此，於液體中，與基板接觸著的間隔物表面由於是 藉由光線而硬化，所以不用使液滴乾燥就可以把位於期望 處所的間隔物固定接著於基板。 ^ 作爲利用光線照射而硬化之樹脂，例如，可以舉出紫 外線硬化樹脂、可視光硬化樹脂、紅外線硬化樹脂等。 特別是，對於間隔物的表面是利用紫外線的照射而硬 化的樹脂所形成之物品的情形時，藉由照射紫外線，可以 適切地讓間隔物與基板固定接著。 又，在固定接著製程中，在不使液體乾燥而藉由光來 使間隔物固定接著之後，夾介遮光板對基板更進一步地照 射紅外線，來使與遮光板的開口部相向的間隔物周圍的液 體乾燥亦爲理想。如此實施時，利用液體的乾燥，能夠更 加強化地固定接著。又，由於間隔物藉由受光硬化而已經 • 固定接著住，所以在其後之藉由紅外線進行液滴/液體乾 燥爲止之期間，即使進行基板搬運等之作業，已附著後之 . 液滴或是、液滴/液膜中的間隔物由於並不會從所期望的 , 位置有所偏離，故爲理想。 又，藉由將液體供給至基板的表面，來進行未固定接 著間隔物去除製程爲理想。 藉此，可以容易地進行未固定接著間隔物之去除程序 。特別是，在以使用可以與於附著製程中所使用構成之液 膜或液滴的液體相溶的液體爲理想。 200827879 (5) 又，在本發明中，於附著製程，藉由從以預定之間距 所配置的複數個開口分別將含有間隔物的液滴吐出，可以 使複數個液滴呈矩陣狀地附著於基板。此情形時，因應開 口部的配置，可以不受制於噴嘴之複數個開口的配置，而 能夠自如且高精度地進行間隔物的配置。 例如，對於從特定的開口所吐出之液滴列，藉由使光 線不會照射到之方式來配置遮光部，可以防止特定列之液 • 滴中的間隔物固定接著於基板，而可以以比開口的間距更 爲寬幅地來配置間隔物。 又，在本發明中，於附著製程，藉由將含有附數個間 隔物之液予以噴霧，使上述之液膜附著於基板上，或是， 使複數個液滴附著於基板上爲理想。藉由噴霧可以極爲容 易且迅速地進行多數液滴的附著或液膜的形成。 又，在本發明中，於附著製程，藉由將含有複數個間 隔物之液予以塗佈於基板上，使液膜附著於基板上亦爲理 • 想。藉由塗佈可以極爲簡易地將含有多數間隔物的液膜配 置於基板上。 . 又，在遮光板配置製程中，使上述遮光板對基板相向 . 配置，以夾介遮光板來對基板照射光爲理想。雖然於基板 所預先設計配置之配線等構件當中’是可以以能夠遮光的 構件作爲遮光板來使用，但以使用與基板不同的遮光板’ 特別對於具有黑矩陣之彩色濾光片在間隔物的配置上爲理 相 〇 (6) (6)200827879 〔發明之效果〕 依據本發明，可以簡易且低成本地將間隔物配置到基 板上之所期望的位置。 【實施方式】 以下，對於本發明之間隔物的配置方法之適切的實施 形態，一面參照圖面，同時加以說明。尙且，在圖面之說 明中，對於同一構成要件標示以相同符號，並省略重複之 說明。又，在圖面中，尺寸比率與說明對象未必必然一致 (第1實施形態） 首先，如第1圖所示，準備彩色濾光片（基板）100 。此彩色濾光片1 00，係具備：透明基板1 10、黑矩陣120 、紅色著色部130R、綠色著色部130G、藍色著色部130B 、及上膜1 6 0。 透明基板1 1 0，是由玻璃等所形成的透明平板。 黑矩陣120，爲將可視光予以遮光之材料所形成的膜 。作爲黑矩陣120之材料，例如，可舉出有鉻、鉻/氧化 鉻等之金屬系材料、或樹脂材料等。此黑矩陣〗2〇，係成 爲格子形狀或是條紋形狀，並形成多數個開口 120p。在本 實施形態的圖面中，是採用條紋狀的黑矩陣。黑矩陣的寬 幅120W，例如，可以設爲5〜3〇μχη左右。又，黑矩陣的 高度120Η，例如，可以設爲1〜2μιη左右。 -9- 200827879 (7) 紅色著色部13〇R、綠色著色部 130G、藍色著色部 130B，分別依此順序排列在黑矩陣120的各開口 120p內 。紅色著色部130R、綠色著色部130G、藍色著色部130B ，係分別由能夠選擇性地透過各色之可見光的透明著色材 料所形成，例如，可以使用透明著色樹脂。各著色部 130R、130G、130B的寬幅 130W，例如可以設爲 5〜 1 0 0 μιη。各著色部1 3 0 R、1 3 0 G、1 3 0 Β的高度1 3 0 Η，例如 _ 可以設爲1〜2μπι。 在此，各著色部130R、13 0G、13 0Β的高度130Η，是 被設爲充分地高於黑矩陣120的高度120Η。 並且，在及於該等各著色部130R、130G、130Β及黑 矩陣120上，形成有上膜160。該上膜160，是具有由透 明基板1 1 0側依順序，因應必要而設置之透明平坦化膜（ 圖示省略）、透明電極膜140、及定向膜150等之積層體 〇 ® 透明電極膜1 40，是相對於液晶顯示器之驅動基板的 畫素電極爲對向配置的共通電極，由ΙΤΟ等透明的導電材 _ 料所形成。透明電極膜140的厚度，例如，大約是0.1 μιη _ 左右。 定向膜1 5 0，是使液晶朝向所期望的方向做定向者， 例如，可以藉由聚醯亞胺等樹脂材料所形成。定向膜1 5 0 的厚度，例如，大約是Ο.ΐμπι左右。 並且，對應於黑矩陣120的上面與各著色部130R、 13 0G ' 130Β的上面之階段差，在彩色濾光片1〇〇的表面 -10- (8) 200827879 ’也就是在上膜160的表面，於黑矩陣120上形成有 部160a，黑矩陣120爲格子狀或條紋狀，因此該凹 160a，係沿著黑矩陣120而成爲溝狀。又，各著 130R、130G、130B之位於黑矩陣120側的端部，分 隆起。 如此之彩色濾光片〗〇〇 ’例如，是在透明基板1] ，藉由光蝕刻法等形成黑矩陣1 2 0後，在黑矩陣1 2 0 口 120p，藉由光蝕刻法等使各著色部l3〇R、130G、 以分別依順序高於黑矩陣1 20之方式來形成，然後， 矩陣120及各著色部130R、130G、130B上，利用灑 蒸著法等形成預定厚度的透明電極膜140，然後在透 極膜140之上再塗佈預定厚度的聚醯亞胺樹脂等之定 材料使之固化，並利用擦刷（rubbing)其表面可以容 取得定向膜1 5 0。 接著，在如此之彩色濾光片1〇〇的上膜160上， 如第2圖所示的間隔物配置裝置1，使含有間隔物的 附著。該間隔物配置裝置1，是從噴頭裝置41對上方 色濾光片1 00，分別嘖射間隔物含有液，於彩色濾 100的下面，爲使間隔物含有液之液滴附著的裝置。 間隔物配置裝置1，其主要係具備：攪拌間隔物 液1 2的攪拌槽20 ;及將由攪拌槽20所供給的間隔物 液12以液滴200方式朝向上方的彩色濾光片1〇〇噴 的噴頭裝置41;及使彩色濾光片1〇〇在噴頭裝置41 方移動的基板移動單元80;以及控制噴頭裝置41或 凹窪 窪部 色部 別呈 0上 的開 130B 在黑 鍍或 明電 向膜 易地 使用 液滴 的彩 光片 含有 含有 射的 的上 基板 -11 - 200827879 (9) 移動單元80的控制器90。 噴頭裝置41，係具有噴頭容器42。噴 延伸在彩色濾光片1 〇〇的寬幅方向而呈箱并 42的上面，形成有以預定間距37P排列成 開口 3 7。開口 3 7的排列方向是與彩色濾光 方向平行，而與彩色濾光片的移動方向垂直 在此，開口 3 7的口徑，例如，可以設; φ 左右。又，開口 3 7的間距3 7P，例如，爲 該間距3 7P，是依據從開口 3 7所吐出而附 片100表面之液滴的外徑（例如80μιη)， 開口 3 7之排列方向的液滴彼此不會合而爲 定即可。 在噴頭容器42，由上依序設有錘52及 壓電元件54的底部是被固定在噴頭容器42 壓電元件54，是連接於控制器90。因應來 Φ 的信號而於上下伸縮。 錘52是被固定在壓電元件54上。錘 對於各開口 3 7是從下方相向於各開口 3 7， 開口 3 7離開一預定間隔。 並且，壓電元件5 4當利用來自於控制] 朝向上方延伸時，使得錘5 2朝向上方運動 口 3 7之間隔物含有液〗2在受到錘5 2之上 用而從開口 3 7被壓出，使得間隔物含有液 上方被噴射出。 頭容器42，爲 :。在噴頭容器 :一列的多數個 片1 〇 〇的寬幅 〇 定爲1 0〜5 0 μηι 1 ΟΟμπι 左右。 著在彩色濾光 以使得相鄰於 一之方式來訂 壓電兀件5 4。 的底部。又， 自於控制器90 5 2的上面，相 並且相對於各 器9 0的信號而 丨。因而靠近開 端面52d的作 1 2之液滴朝向 -12- 200827879 (10) 攪拌槽2 0，係具備有利用馬達1 7 a而旋轉的攪拌 1 7，其用以攪拌間隔物含有液1 2使間隔物23 〇分散於 隔物載體液1 1。作爲間隔物2 3 0，例如，可以使用粒徑 〜7 μπι左右之二氧化矽等之氧化砂粒子、或是矽酮橡膠 性聚合物等之塑膠粒子等。又，作爲用以使間隔物2 3 0 散的間隔物載體液1 1，例如，可以利用水與ΙΡΑ之混 液等。 φ 又，間隔物的表面是藉由聚合物等之樹脂所形成， 者是，於間隔物的表面結合上能夠與彩色濾光片的表面 合的官能基，例如，環氧基、環氧丙基、氧雜環丁烷基 酸酐基、內酯基、醯胺基、羧基等，可以強化固定接著 ，故爲理想。 例如，當間隔物的表面爲藉由樹脂所形成時，藉由 述之乾燥時之熱等，可以更加提高間隔物與彩色濾光片 固定接著性。作爲樹脂，例如，熱可塑性樹脂、熱硬化 ® 樹脂、以及藉由光照射而硬化的樹脂，例如可舉出：可 光線硬化樹脂、紫外線硬化樹脂、紅外線硬化樹脂等。 . 此，可以是間隔物整體全由樹脂所形成，也可以是僅表 是由樹脂所形成。又，於間隔物的表面結合有上述之官 基時，藉由官能基與彩色濾光片的化學性結合等，可以 高間隔物與彩色濾光片的固定接著性。 噴頭容器42的一端，是藉由管線L1而與攪拌槽 連接。又，噴頭容器42的另一端，是藉由具備有循環 浦70之管線L2而與攪拌槽20連接。循環泵浦70，是 翼 間 1 變 分 合 或 結 、 性 後 的 性 視 在 層 能 提 20 泵 抽 -13- (11) 200827879 吸噴頭容器4 2內的間隔物含有液而排出至攪拌槽2 0內。 對應於此，攪拌槽20內的間隔物含有液經由管線L1而被 供給至噴頭容器42。 基板移動單元80，係具有基板吸引部82與基板移動 部84。基板吸引部82，是在噴頭裝置41的上方，利用靜 電或減壓方式吸附彩色濾光片來支持彩色濾光片1 00。在 此，基板吸引部82是以上膜160之凹窪部l6〇a爲朝下且 φ 與開口 37的排列方向成平行地來支持彩色濾光片1 〇〇。 又，基板移動部8 4，是使吸附著彩色濾光片1 〇 〇的基 板吸引部8 2以彩色濾光片移動方向，亦即，是於與彩色 濾光片的寬幅方向正交之方向水平地移動。又，基板移動 部84，亦可以使彩色濾光片100以預定距離之方式移動於 彩色濾光片1 〇 〇的寬幅方向，而能夠進行彩色濾光片1 0 0 的配向（alignment )。作爲基板移動部8 4，係以能夠將 彩色濾光片1 〇 〇高精度地移動之線性馬達方式者爲理想。 # 控制器90，是依據預先定好的程式進行處理的電腦裝 置，爲連接於基板移動單元80、壓電元件54、循環泵浦 ι 70、以及馬達1 7a，用以控制該等之驅動者。 並且，在本實施形態中，是使彩色濾光片1 00在一面 朝向彩色濾光片移動方向進行移動之同時，從噴頭容器42 的各開口 3 7反復吐出液滴，藉由使由複數個液滴所形成 的行（線）反復地附著於基板表面，如第3圖及第4圖所 示，使複數個液滴200呈矩陣狀地附著於彩色濾光片的表 面。液滴200爲含有著間隔物230。 -14- 200827879 (12) 在此，藉由控制基板移動單元80及壓電元件54，來 控制彩色濾光片1 〇〇的移動，用以使液滴200附著於上膜 160表面之中的凹窪部160a。於凹窪部160a上的液滴200 的間距37P，係對應於噴頭容器42之開口 37的間距37P 。於彩色濾光片1 〇〇上之液滴200的外徑，例如，可以設 定爲50〜ΙΟΟμπι左右。 在此，在第3圖及第4圖中，液滴200Α，爲藉由間 隔物配置裝置1，按照意圖而在凹窪部160a上之配置成矩 陣狀的複數個液滴當中，存在於所欲固定接著間隔物230 之處所的液滴200。又，液滴200B，爲藉由間隔物配置裝 置1，按照意圖而在凹窪部160a上之配置成矩陣狀的複數 個液滴當中，存在於不想固定接著間隔物23 0之處所B的 液滴。在此，將液滴200A中的間隔物稱之爲間隔物23 0A ，將液滴200B中的間隔物稱之爲間隔物230B。 再者，如第3圖所示，液滴200C，是由於某種事由 (例如，外界干擾）而從噴頭容器4 2之開口 3 7朝向非意 圖之不特定方向射出，附著在由所預定的處所朝向圖面右 方偏離之處所。又，液滴200D，是從噴頭容器42之開口 3 7，以無意圖之附帶性方式被形成及吐出，外徑相較於其 他液滴爲小，被稱之衛星（液滴）之液滴，此種液滴亦是 附著於非意圖之不特定處所。液滴200C，是包含間隔物 23 0C，液滴200D，是包含間隔物23 0D。再者，液滴200E ’爲液滴本身是附著在按照意圖之處所者，但其中之間隔 物23 0 ( 23 0E)並不存在於黑矩陣120上，而是存在於透 -15- 200827879 (13) 明著色樹脂130R上之液滴。 在此整理一下，欲固定接著在彩色濾光片100的間隔 物是僅有液滴200A的間隔物230A，除此之外的液滴 200B〜200E中的間隔物23 0B〜230E，爲不欲使之固定接 著在彩色濾光片的間隔物。 又，在本實施型態中，在照射光線階段，如第4圖所 示，是調整彩色濾光片1 〇 〇的朝向以使液滴2 0 0中的間隔 物23 0接觸於彩色濾光片100的表面。具體上，作爲使液 滴20 0中的間隔物23 0接觸於彩色濾光片1 00的方法，例 如，若於間隔物23 0的比重比液體的比重還大之情形時， 如第4圖所示，以使液滴200存在於彩色濾光片100的上 面側之方式來配置彩色濾光片100即可，若於間隔物230 的比重比液體的比重還小之情形時，以使液滴存在於彩色 濾光片1 00的下面側之方式來配置彩色濾光片即可。又， 所謂彩色濾光片，如前述般，是指包含透明基板1 1 〇、黑 矩陣120、紅色著色部13 0R、綠色著色部 130G、藍色著 色部130B、及上膜160之整體。 接著，如第5圖及第6圖所示，準備好能夠遮光的遮 光板400，將該遮光板400相向於彩色濾光片1〇〇的表面 而配置。又遮光板400，使之相向於彩色濾光片1 〇〇的液 滴附著面或是液滴非附著面之任一者皆可，但以使之相向 於液滴附著面爲理想。 於該遮光板400，形成有配置成矩陣狀的複數個開口 部400a。開口部400a的寬幅400W，是與黑矩陣120的寬 -16- 200827879 (14) 幅120W大致對應。又，開口部40〇a的長度400L，例如 ，是被設爲與液滴200之外徑相同尺寸至2倍尺寸左右。 該遮光板400的開口部400a，在彩色濾光片100之黑 矩陣120上當中，尤其是以相向於欲使間隔物23 0固定接 著之部分的方式來配置。 亦即，如第6圖所示，使開口部4 0 0 a相向於液滴 200A中之間隔物23 0A，另一方面，則使遮光部400b與 # 液滴200B中之間隔物23 0B相向，再者，圖示中省略，遮 光部400b，分別相向於液滴200C中之各間隔物23 0C、液 滴200D中之各間隔物23 0D、液滴200E中之各間隔物 2 3 0E。 如此之遮光板4 0 0，是以金屬或樹脂等材料，容易地 藉由周知之圖案成形法進行圖案成形而製得。又，遮光板 4 00，亦可以由具備紅外線遮光性之外再加上具有隔熱效 果之材料，例如，由陶瓷等而成形。於此情形時，遮光板 ^ 400本身不易被加熱，遮光板400的熱難以到達液滴200 故爲理想。又，如後述般地，再藉由紫外線的照射來提高 . 強度之情形時，遮光板400以能夠遮蔽紫外線光線者爲理 . 想。 接著，進行固定接著製程。具體上，如第6圖所示， 夾著該遮光板400從位於與彩色濾光片1 00相反側之紅外 線燈45 01，經由遮光板400的開口部400a，將紅外線（ 熱輻射）對彩色濾光片1 〇〇進行照射。 在此，紅外線之較佳的波長範圍爲〇.76μπΐ〜ΙΟΟΟμπι -17-200827879 (1) Description of the Invention [Technical Field of the Invention] The present invention relates to a method of arranging spacers. [Prior Art] Conventionally, in the manufacture of a liquid crystal panel or the like, a plurality of spacers are disposed on a substrate. As such a spacer arrangement method, it is known that a droplet containing a spacer liquid is discharged from an opening of a head container, and a droplet is attached to, for example, a black matrix, and then, by allowing the droplet Drying, a method of fixing (fixing) the spacer to a desired position on the substrate. In the manufacture of a liquid crystal panel or the like, spacers must be disposed on a large number of positions on the substrate. Therefore, the plurality of openings are used as the head containers which are disposed at a predetermined interval, and a plurality of droplets are discharged from the respective openings of the head container to adhere to the substrate, and the head container is opposed to the substrate. The liquid droplets are moved in a direction intersecting with the arrangement direction of the openings, and the liquid droplets are attached to the substrate in a matrix (for example, refer to Patent Documents 1 and 2). [Patent Document 1] Japanese Laid-Open Patent Publication No. 2005-104A (Patent Document 2) Japanese Laid-Open Patent Publication No. Hei No. Hei. No. 2005-4094 [Draft of the Invention] [Technical Problem to be Solved by the Invention] In recent years, it has been expected Arrangement of spacers on color filters -4- 200827879 (2) Can be performed with higher precision. However, even if the head container can be moved with high precision with respect to the color filter, the droplets ejected from the opening of the head container are scattered to the substrate without any particular place due to various factors, that is, may deviate far from The droplets are hitting the target position, or sometimes unintentional follower droplets other than the intended droplets are ejected from the opening of the head container. Also, when such a droplet contains a spacer, it causes a high-precision arrangement of the spacer. Φ The present invention has been made in view of the above problems. It is an object of the invention to provide a method of arranging spacers which are arranged at a desired position on a substrate at a simple and low cost. [Technical means for solving the problem] The method of arranging the spacer of the present invention includes an attachment process, a fixed subsequent process, a fixed subsequent process, and an unfixed subsequent spacer removal process. In the adhesion process, a liquid film containing a plurality of spacers is attached to the # substrate, or a plurality of droplets containing the spacer are attached to the substrate. In the fixed subsequent process, the substrate is irradiated with light by interposing a light-shielding plate having an opening through which light is transmitted and a light-shielding portion through which light is not transmitted, and the spacer facing the opening of the light-shielding plate is fixed to the substrate. . The spacer removal process is not fixed, and the unfixed spacers are removed from the surface of the substrate. According to the present invention, the plurality of spacers attached to the liquid film of the substrate or the spacers adhering to the plurality of droplets of the substrate are selectively present in the spacer facing the opening of the light shielding plate. The ground is fixed on the -5 - 200827879 (3) substrate. Thereafter, by removing the unfixed spacer from the substrate, regardless of the arrangement of the spacers on the substrate in the adhesion process, it is desirable to arrange the spacers on the substrate in accordance with the arrangement of the openings of the light shielding plate. The location. In other words, according to the present invention, since the spacer outside the substrate can be easily prevented from adhering to the desired position, the method of arranging the spacer with extremely high precision can be realized. Here, in particular, it is preferable to irradiate infrared rays in a fixed subsequent process to dry the liquid around the spacer facing the opening of the light shielding plate. In this manner, by drying the liquid of the liquid film or liquid droplets around the spacer at the desired position, the type or material of the spacer can be made, and the liquid droplet or the liquid film can be used. The spacer is well fixed to the surface of the substrate substantially at its location. In particular, when the surface of the spacer is formed of a resin such as a polymer or a functional group capable of bonding to the substrate is bonded to the surface of the spacer, it is extremely good by drying the liquid around the spacer. The I spacer is fixed to the substrate next. Here, in the adhesion process, the surface of the spacer is formed by a resin which is hardened by irradiation with visible light or ultraviolet rays, and the liquid around the spacer is dried after the fixing process. It is also desirable for the board to further illuminate visible light or ultraviolet light. In this case, since the surface of the spacer hardens, the fixed adhesion of the spacer to the substrate can be further increased. On the other hand, in the adhesion process, the surface of the spacer is formed by a resin which is hardened by irradiation with light, and in the subsequent process, when the light is irradiated by -6 - 200827879 (4), the spacer is It is also desirable to contact the surface of the substrate. In the liquid, the surface of the spacer in contact with the substrate is hardened by light, so that the spacer located at the desired place can be fixed without drying the droplets. Substrate. ^ As the resin which is cured by irradiation with light, for example, an ultraviolet curable resin, a visible light curable resin, an infrared curable resin, or the like can be given. In particular, when the surface of the spacer is an article formed by a resin hardened by irradiation with ultraviolet rays, the spacer can be appropriately fixed to the substrate by irradiation with ultraviolet rays. Further, in the fixed subsequent process, after the spacer is fixed by light without drying the liquid, the interlayer light shielding plate further irradiates the substrate with infrared rays to surround the spacer facing the opening of the light shielding plate. Liquid drying is also ideal. In this way, by drying the liquid, it is possible to fix it more strongly. In addition, since the spacer has been fixed by the photo-curing, it is adhered to the liquid droplet/liquid after the liquid droplet/liquid is dried by the infrared ray. Yes, the spacers in the droplet/liquid film are ideal because they do not deviate from the desired position. Further, it is preferable to supply the liquid to the surface of the substrate to perform the unfixed spacer removal process. Thereby, the unfixed and subsequent spacer removal process can be easily performed. In particular, it is preferred to use a liquid which is compatible with a liquid which can be used in the liquid film or liquid droplets used in the adhesion process. 200827879 (5) Further, in the present invention, in the adhesion process, droplets containing spacers are respectively ejected from a plurality of openings arranged at a predetermined interval, so that a plurality of droplets can be attached in a matrix form. Substrate. In this case, depending on the arrangement of the opening portion, the arrangement of the spacers can be performed freely and accurately without being disposed in the plurality of openings of the nozzle. For example, in the liquid droplet row discharged from a specific opening, the light shielding portion is disposed so that the light is not irradiated, thereby preventing the spacer in the liquid/drop of the specific column from being fixed to the substrate, and The spacing of the openings is wider to configure the spacers. Further, in the present invention, it is preferable that the liquid film containing the plurality of spacers is sprayed on the substrate to adhere the liquid film to the substrate or to attach a plurality of droplets to the substrate. The adhesion of most droplets or the formation of a liquid film can be carried out extremely easily and quickly by spraying. Further, in the present invention, it is also preferable to apply a liquid containing a plurality of spacers to the substrate in the adhesion process to adhere the liquid film to the substrate. The liquid film containing a large number of spacers can be extremely easily placed on the substrate by coating. Further, in the visor arranging process, it is preferable that the visor is opposed to the substrate, and it is preferable to illuminate the substrate by sandwiching the visor. In the case of members such as wirings that are pre-designed on the substrate, 'the member can be used as a light-shielding plate, but a light-shielding plate different from the substrate is used. Especially for a color filter having a black matrix in the spacer. (6) (6) 200827879 [Effects of the Invention] According to the present invention, the spacer can be easily and inexpensively placed at a desired position on the substrate. [Embodiment] Hereinafter, an appropriate embodiment of the method for arranging spacers according to the present invention will be described with reference to the drawings. In the description of the drawings, the same components are denoted by the same reference numerals, and the description thereof will not be repeated. Further, in the drawing, the size ratio does not necessarily coincide with the description object (first embodiment) First, as shown in Fig. 1, a color filter (substrate) 100 is prepared. The color filter 100 includes a transparent substrate 110, a black matrix 120, a red colored portion 130R, a green colored portion 130G, a blue colored portion 130B, and an upper film 160. The transparent substrate 110 is a transparent flat plate formed of glass or the like. The black matrix 120 is a film formed of a material that shields visible light. Examples of the material of the black matrix 120 include a metal-based material such as chromium, chromium/chromium oxide, or a resin material. The black matrix is 格子2〇, which is formed into a lattice shape or a stripe shape, and forms a plurality of openings 120p. In the drawing of this embodiment, a stripe-shaped black matrix is used. The width of the black matrix is 120 W, and for example, it can be set to about 5 to 3 〇 μχη. Further, the height of the black matrix is 120 Η, for example, it can be set to about 1 to 2 μm. -9- 200827879 (7) The red colored portion 13A, the green colored portion 130G, and the blue colored portion 130B are arranged in the respective openings 120p of the black matrix 120 in this order. The red colored portion 130R, the green colored portion 130G, and the blue colored portion 130B are each formed of a transparent colored material capable of selectively transmitting visible light of each color. For example, a transparent colored resin can be used. The width 130W of each of the colored portions 130R, 130G, and 130B can be, for example, 5 to 1 0 0 μηη. The height of each of the colored portions 1 3 0 R, 1 3 0 G, and 1 3 0 1 1 3 0 Η, for example, _ can be set to 1 to 2 μm. Here, the height 130 各 of each of the colored portions 130R, 130G, and 130 is set to be sufficiently higher than the height 120 of the black matrix 120. Further, an upper film 160 is formed on each of the colored portions 130R, 130G, and 130B and the black matrix 120. The upper film 160 is a laminated body transparent electrode film having a transparent flattening film (not shown), a transparent electrode film 140, and an alignment film 150 which are provided in order from the transparent substrate 110 side in order. Reference numeral 1 to 40 denotes a common electrode which is disposed opposite to the pixel electrode of the drive substrate of the liquid crystal display, and is formed of a transparent conductive material such as ruthenium. The thickness of the transparent electrode film 140 is, for example, about 0.1 μm η or so. The orientation film 150 is a direction in which the liquid crystal is oriented in a desired direction, and may be formed, for example, by a resin material such as polyimide. The thickness of the orientation film 150 is, for example, about Ο.ΐμπι. Further, corresponding to the phase difference between the upper surface of the black matrix 120 and the upper portions of the respective coloring portions 130R, 130G' 130Β, on the surface of the color filter 1〇〇-10-(8) 200827879 'that is, in the upper film 160 On the surface, a portion 160a is formed on the black matrix 120, and the black matrix 120 has a lattice shape or a stripe shape. Therefore, the recess 160a is grooved along the black matrix 120. Further, the ends of the 130R, 130G, and 130B on the side of the black matrix 120 are respectively swelled. Such a color filter 〇〇' is formed on the transparent substrate 1], for example, by forming a black matrix 1 2 0 by photolithography or the like, and then performing a photolithography method or the like on the black matrix 1 120 port 120p. The colored portions l3, R, and 130G are formed so as to be higher than the black matrix 1 20, respectively. Then, the transparent electrodes of a predetermined thickness are formed on the matrix 120 and the colored portions 130R, 130G, and 130B by a steaming method or the like. The film 140 is then coated with a predetermined material of a polyimide resin or the like of a predetermined thickness on the transmissive film 140 to be cured, and the alignment film 150 can be obtained by rubbing the surface thereof. Next, on the upper film 160 of the color filter 1A, the spacer arrangement device 1 shown in Fig. 2 is attached to the spacer. The spacer arranging device 1 is a device that aligns the upper color filter 100 with the upper color filter 100 from the head unit 41, and attaches a liquid to the lower surface of the color filter 100 to cause droplets of the spacer-containing liquid. The spacer arrangement device 1 mainly includes a stirring tank 20 that stirs the spacer liquid 12; and a color filter 1 that sprays the spacer liquid 12 supplied from the stirring tank 20 upward by the droplet 200. The head unit 41; and the substrate moving unit 80 for moving the color filter 1 to the head unit 41; and the opening 130B for controlling the head unit 41 or the concave portion to be 0 on the black plate or the bright The color filter for easily using the droplets to the film contains the upper substrate 11-200827879 (9) the controller 90 of the mobile unit 80. The head unit 41 has a head container 42. The spray is extended in the width direction of the color filter 1 而 to form the upper surface of the case 42 and is formed with openings 37 at a predetermined interval 37P. The arrangement direction of the openings 37 is parallel to the color filter direction and perpendicular to the moving direction of the color filter. Here, the aperture of the opening 37 can be set, for example, to about φ. Further, the pitch 3 7P of the opening 37 is, for example, the pitch 3 7P, which is the liquid according to the outer diameter (for example, 80 μm) of the droplets on the surface of the patch 100 from the opening 37, and the arrangement direction of the openings 37. Drops will not coincide with each other. In the head container 42, the bottom of the head member 52 and the piezoelectric element 54 are sequentially fixed to the head unit 42 and the piezoelectric element 54 is connected to the controller 90. It is stretched up and down in response to the signal of Φ. The hammer 52 is fixed to the piezoelectric element 54. The hammers are spaced apart from each other by a predetermined interval from the lower side to the respective opening 3 7 from the lower side. Further, when the piezoelectric element 5 4 is extended upward from the control, the spacer liquid containing the hammer 5 2 toward the upper moving port 37 is pressed by the opening 3 7 by being applied by the hammer 5 2 It is caused to be ejected above the spacer containing liquid. The head container 42 is: . In the nozzle container: the width of a large number of sheets 1 〇 一 of one column is set to be 1 0~5 0 μηι 1 ΟΟμπι. The color filter is colored in order to order the piezoelectric element 54 in a manner adjacent to it. bottom of. Further, from the upper surface of the controller 90 5 2, the phase is compared with the signal of each of the devices 90. Therefore, the droplets 12 which are close to the opening end face 52d face the -12-200827879 (10) agitation tank 20, and are provided with a stirring 17 which is rotated by the motor 1 7 a for stirring the spacer containing liquid 1 2 The spacer 23 is dispersed in the spacer carrier solution 1 1 . As the spacer 203, for example, oxidized sand particles such as cerium oxide having a particle diameter of about 7 μπι or plastic particles such as an anthrone rubber polymer can be used. Further, as the spacer carrier liquid 1 1 for dispersing the spacers 230, for example, a mixture of water and hydrazine can be used. φ Further, the surface of the spacer is formed by a resin such as a polymer, and a functional group capable of bonding to the surface of the color filter on the surface of the spacer, for example, an epoxy group or a propylene oxide group The base, the oxetanyl anhydride group, the lactone group, the decylamino group, the carboxyl group and the like can be reinforced and fixed, which is preferable. For example, when the surface of the spacer is formed of a resin, the spacer and the color filter can be further improved in adhesion by heat or the like during drying. Examples of the resin include a thermoplastic resin, a thermosetting resin, and a resin which is cured by light irradiation, and examples thereof include a light-curable resin, an ultraviolet-curable resin, and an infrared-curing resin. Therefore, the spacer may be entirely formed of a resin, or may be formed only of a resin. Further, when the above-mentioned base is bonded to the surface of the spacer, the adhesion between the high spacer and the color filter can be improved by chemically bonding the functional group to the color filter or the like. One end of the head container 42 is connected to the stirring tank by a line L1. Further, the other end of the head container 42 is connected to the stirring tank 20 by a line L2 provided with a circulation pump 70. Circulating pump 70, which is a change or junction between the wings, and the nature of the layer can be lifted. 20 Pumping-13- (11) 200827879 The spacer in the suction nozzle container 4 2 contains liquid and is discharged to the agitation tank. Within 2 0. In response to this, the spacer-containing liquid in the agitation tank 20 is supplied to the head container 42 via the line L1. The substrate moving unit 80 has a substrate suction portion 82 and a substrate moving portion 84. The substrate suction portion 82 supports the color filter 100 by adsorbing a color filter by electrostatic or decompression means above the head unit 41. Here, the substrate suction portion 82 supports the color filter 1 in such a manner that the concave portion l6a of the upper film 160 faces downward and φ is parallel to the arrangement direction of the openings 37. Further, the substrate moving portion 84 is such that the substrate suction portion 8 2 to which the color filter 1 吸附 is adsorbed is moved in the color filter direction, that is, orthogonal to the width direction of the color filter. The direction moves horizontally. Further, the substrate moving portion 84 can move the color filter 100 at a predetermined distance in the width direction of the color filter 1 〇 , and can align the color filter 100. The substrate moving portion 84 is preferably a linear motor that can move the color filter 1 〇 〇 with high precision. The controller 90 is a computer device that processes according to a predetermined program, and is connected to the substrate moving unit 80, the piezoelectric element 54, the circulating pump 70, and the motor 17a for controlling the drivers. Further, in the present embodiment, the color filter 100 is moved toward the color filter in the moving direction, and the liquid droplets are repeatedly ejected from the respective openings 37 of the head container 42 by a plurality of The rows (lines) formed by the droplets are repeatedly attached to the surface of the substrate, and as shown in FIGS. 3 and 4, a plurality of droplets 200 are attached to the surface of the color filter in a matrix. The droplet 200 contains a spacer 230. -14- 200827879 (12) Here, by controlling the substrate moving unit 80 and the piezoelectric element 54, the movement of the color filter 1 is controlled so that the droplet 200 is attached to the surface of the upper film 160. Concave portion 160a. The pitch 37P of the droplets 200 on the concave portion 160a corresponds to the pitch 37P of the opening 37 of the head container 42. The outer diameter of the droplet 200 on the color filter 1 can be set, for example, to about 50 to ΙΟΟμπι. Here, in FIGS. 3 and 4, the liquid droplets 200Α are present in the plurality of liquid droplets arranged in a matrix on the concave portion 160a by the spacer arrangement device 1 as intended. The droplet 200 at the location next to the spacer 230 is intended to be fixed. Further, the liquid droplets 200B are a plurality of liquid droplets arranged in a matrix on the concave portion 160a by the spacer arrangement device 1, and are present in the liquid where the spacer B is not fixed. drop. Here, the spacer in the droplet 200A is referred to as a spacer 230A, and the spacer in the droplet 200B is referred to as a spacer 230B. Furthermore, as shown in FIG. 3, the droplet 200C is ejected from the opening 37 of the head container 4 2 toward the unintended unspecified direction due to a certain cause (for example, external disturbance), and is attached to the predetermined one. The location where the premises deviate to the right of the drawing. Further, the liquid droplets 200D are formed and discharged from the opening 37 of the head container 42 in an unintentional manner, and the outer diameter is smaller than that of the other droplets, and is called a droplet of a satellite (droplet). Such droplets are also attached to unintended unspecified spaces. The droplet 200C is composed of a spacer 23 0C and a droplet 200D containing a spacer 23 0D. Furthermore, the droplet 200E' is attached to the droplet itself as intended, but the spacer 23 0 (23 0E) does not exist on the black matrix 120, but exists in -15-200827879 ( 13) A droplet on the colored resin 130R. Here, the spacers 230A to which the spacers of the color filter 100 are to be fixed are the droplets 200A, and the spacers 23 0B to 230E in the droplets 200B to 200E are not intended. Fix it to the spacer next to the color filter. Further, in the present embodiment, in the irradiation light stage, as shown in Fig. 4, the orientation of the color filter 1 is adjusted so that the spacer 23 0 in the droplet 200 is in contact with the color filter. The surface of the sheet 100. Specifically, as a method of bringing the spacers 23 0 in the droplets 20 0 into contact with the color filter 100, for example, if the specific gravity of the spacers 23 0 is larger than the specific gravity of the liquid, as shown in FIG. 4 As shown in the figure, the color filter 100 may be disposed such that the droplets 200 are present on the upper surface side of the color filter 100. If the specific gravity of the spacer 230 is smaller than the specific gravity of the liquid, the liquid is used. The color filter may be disposed in such a manner that the droplet exists on the lower side of the color filter 100. The color filter is as described above, and includes the entire transparent substrate 1 1 〇, the black matrix 120, the red colored portion 130R, the green colored portion 130G, the blue colored portion 130B, and the upper film 160. Next, as shown in Figs. 5 and 6, a light-shielding plate 400 that can be shielded is prepared, and the light-shielding plate 400 is disposed facing the surface of the color filter 1A. Further, the light shielding plate 400 may be opposed to any of the liquid droplet attachment surface of the color filter 1 or the droplet non-adhesion surface, but it is preferable to face the droplet attachment surface. In the light shielding plate 400, a plurality of openings 400a arranged in a matrix are formed. The width 400W of the opening portion 400a substantially corresponds to the width -16 - 200827879 (14) width 120W of the black matrix 120. Further, the length 400L of the opening 40a is, for example, approximately the same as the outer diameter of the droplet 200 to about twice the size. The opening portion 400a of the light shielding plate 400 is disposed on the black matrix 120 of the color filter 100, in particular, so as to face the portion where the spacers 230 are to be fixed. That is, as shown in Fig. 6, the opening portion 4 0 0 a faces the spacer 23 0A in the droplet 200A, and on the other hand, the light blocking portion 400b faces the spacer 23 0B in the # droplet 200B. Further, in the illustration, the light shielding portion 400b faces each of the spacers 23 0C in the droplets 200C, the spacers 23 0D in the droplets 200D, and the spacers 2 3 0E in the droplets 200E. Such a light-shielding plate 400 is obtained by patterning a material such as a metal or a resin by a known pattern forming method. Further, the light shielding plate 4 00 may be formed of a ceramic or the like by a material having a heat insulating effect in addition to the infrared light shielding property. In this case, the light shielding plate ^400 itself is not easily heated, and it is desirable that the heat of the light shielding plate 400 hardly reaches the liquid droplets 200. Further, as will be described later, when the intensity is increased by the irradiation of ultraviolet rays, the light shielding plate 400 is considered to be capable of shielding ultraviolet rays. Next, the fixing is followed by the process. Specifically, as shown in FIG. 6, the infrared ray (heat radiation) is colored in color from the infrared lamp 45 01 located on the opposite side of the color filter 100 from the opening 400a of the light shielding plate 400. The filter 1 is irradiated. Here, the preferred wavelength range of the infrared ray is 〇.76μπΐ~ΙΟΟΟμπι -17-
200827879 (15) 左右，尤其是遠紅外線，亦即，4μιη〜ΙΟΟΟμιη爲 如此一來，紅外線通過遮光板400的開口部 擇性地照射於液滴200Α中之間隔物23 0Α及其 由間隔物23 0Α及其周圍之液體的溫度上升，間Ρ 周圍的間隔物載體液蒸發。因此，如第7圖所 200Α中所含有的間隔物230Α固定接著於彩色濾 的黑矩陣120上。 另一方面，受到遮光板400之遮光部400b 液滴200B〜200E中的間隔物230B〜23 0E沒有 紅外線。因此，此等間隔物23 0B〜23 0E並沒有 於彩色濾光片1〇〇。 在此，間隔物2 3 0的表面，爲由可視光線而 脂或是由紫外線而硬化之樹脂所形成之情形時， 而固定接著後，經由遮光板400再照射可視光線 時，藉由已經固定接著後之間隔物23 0A表面的 以實現間隔物230A與彩色濾光片100更爲強固 著。 接著，從彩色濾光片1 〇〇將殘留而未固定接 物23 0B〜間隔物23 0E予以去除。 在此，如第8圖所示，將彩色濾光片1 00傾 從噴嘴480對其表面供給液體490，藉由使未匡 間隔物230B〜23 0E與未乾燥的液體一起沖流， 色濾光片1〇〇的表面將該等未固定接著的間隔1 23 0E予以去除。此時，利用已述之固定接著製 適宜。 400a ，選 周圍，藉 潯物230A 示，液滴 i光片1〇〇 所遮蔽的 被照射到 固定接著 硬化之樹 利用乾燥 或紫外線 硬化，可 ;的固定接 1著之間隔 (斜配置， I定接著之 可以從彩 勿 2 3 0 B〜 程而與彩 -18- 200827879 (16) 色濾光片100固定接著之間隔物23 0A，幾乎不會受到液 體490而被沖洗掉。 在此，液體490並無特別的限定，但以可與殘存液滴 2 00相溶之液體，例如，使用間隔物載體液等時，則可容 易去除未固定接著間隔物23 0B〜23 0E。 在此之後，只要讓彩色濾光片1 〇〇上的液體乾燥即可 。如此一來，如第9圖所示，在不想要配置間隔物的處所 • B，不會被配置間隔物23 0。又，衛星液滴200D中的間隔 物23 0D、或是沒有被配置在期望處所之液滴200C中的間 隔物23 0C並沒有固定接著於彩色濾光片100。再者，液 滴本身雖附著於所期望之處所，但在該液滴2〇〇E中並沒 有被配置在黑矩陣上之間隔物23 0E亦不會固定接著於彩 色濾光片1 00上。以此完成間隔物配置製程。 其後，夾著該間隔物23 0A，疊上沒有圖示出的電極 基板，藉由將液晶封入於彩色濾光片1 00與電極基板之間 ® ，完成液晶顯示器。又，當間隔物一旦被固定接著於彩色 濾光片，再重疊電極基板時，間隔物幾乎不會有所移動， . 並且，於重疊電極基板之前搬運彩色濾光片等之時，對彩 . 色濾光片之操作亦極爲容易。 依據本實施形態，因應遮光板400之開口部400a以 及遮光部400b之配置，已附著在彩色濾光片之多數的液 滴2 00中的間隔物230當中，可以僅使得被配置在所期望 之位置的間隔物230A藉由乾燥而固定接著於彩色濾光片 。並且，其後，藉由從彩色濾光片1 〇〇將未固定接著之間 -19- 200827879 (17) 隔物230B〜23GE予以去除，可不必過於拘泥於在附著製 程中之液滴200的配置等，而將間隔物230配置在所期望 的位置。 藉此，尤其是使用配置有以預定的固定間距之開口的 噴頭容器，不需要依各個開口來控制液滴吐出之有無，同 時可以以比該間距更寬廣之間距來散佈液滴、亦即間隔物 。又，當受到各種的外界干擾’使得液滴配置到彩色濾光 φ 片上之無意圖的非特定位置之情形時，或是液滴本身被配 置到所期望之場所而液滴中之間隔物被配置到無意圖的非 特定位置之情形時，可以防止如此情形之間隔物固定接著 在彩色濾光片上之無意圖的非特定位置。 又，將含有未固定接著之間隔物23 0B〜23 0E的去除 ，由於是藉由對彩色濾光片1 〇〇的表面供給液體來進行， 所以可以容易地執行該等之去除。 又，在上述實施形態中，液滴200中之間隔物230雖 Φ 是以接觸於彩色濾光片1 〇〇之狀態來進行紅外線的照射， 但在固定接著之製程開始時’亦即，於照射紅外線之際， 位於液滴200中之間隔物23 0的位置並無特別被限定，例 如，以沒有接觸於彩色濾光片而浮游於液滴200內亦可， 又，浮起在液滴200內亦可。本實施形態，由於是利用使 欲固定接著部分上的液體乾燥來讓間隔物2 3 0固定接著， 所以液滴200中之間隔物230無論處於何種狀態，只要藉 由遮光板使欲附著有間隔物之部分上的液體一乾燥，間隔 物23 0就會固定接著於乾燥後的位置、或是殘留在沒有被 -20- 200827879 (18) 乾燥的殘留液體內之任一者。 (第2實施形態） 接著說明關於本發明之第2實施形態。本 第1實施形態相異之點，是在固定接著製程中 ' 物周圍的液體乾燥而將間隔物230固定接著於 1 0 0的表面此點。 • 具體上，作爲被包含於液滴200中之間隔 使用藉由光的照射而硬化的樹脂來形成表面的丨 在此之間隔物23 0，其整體爲由受到光的 的樹脂所形成亦可，僅其表面爲由受到光的照 樹脂所形成亦可。作爲藉由光的照射而硬化的 ，可舉出紫外線硬化樹脂、可視光線硬化樹脂 化樹脂等。作爲藉由光而硬化的樹脂，例如， 可感應所期望之波長的光之光聚合起始劑以及 • 物者。 並且，在照射光之前，預先如第6圖之狀 _ 先行調整彩色濾光片1 0 0的朝向以使液滴2 0 0 230接觸於彩色濾光片100的表面。 具體上，作爲使液滴200中之間隔物230 濾光片100的方法，例如，若間隔物230的比 比重還大之情形時，如第6圖所示，以使液滴 彩色濾光片1 0 0的上面側之方式來配置彩色濾 可；若間隔物23 0的比重比液體的比重還小之 實施形態與 ，不使間隔 彩色濾光片 物230 ，是 間隔物。 照射而硬化 射而硬化的 樹脂，例如 、紅外線硬 可舉出混合 單體或寡聚 態所示地， 中之間隔物 接觸於彩色 重比液體的 200存在於 光片1 〇 0即 情形時，以 -21 - 200827879 (19) 使液滴200存在於彩色濾光片100的下面側之方式來配置 彩色濾光片即可。 然後，在如此地使間隔物23 0與彩色濾光片1 00接觸 後之狀態下，從燈45 0U通過遮光板400的開口部4〇〇a， 照射出用以使間隔物之表面硬化的光，例如，紫外線（波 長4〜400nm)、可視光線（波長400〜760nm)、紅外線 等。200827879 (15) Left and right, especially far infrared rays, that is, 4 μm to ΙΟΟΟμηη, the infrared rays are selectively irradiated through the opening of the light shielding plate 400 to the spacers 23 0 in the droplets 200Α and by the spacers 23 The temperature of the liquid around 0 上升 rises, and the spacer carrier liquid around the enthalpy evaporates. Therefore, the spacer 230, which is contained in Fig. 7, is fixed to the color filter black matrix 120. On the other hand, the spacers 230B to 23 0E in the liquid droplets 200B to 200E of the light blocking portion 400b of the light blocking plate 400 do not have infrared rays. Therefore, these spacers 23 0B to 23 0E are not present in the color filter 1〇〇. Here, when the surface of the spacer 203 is formed by a resin which is hardened by visible light or is cured by ultraviolet rays, and after fixing, the visible light is further irradiated through the visor 400, by being fixed. Subsequent to the surface of the spacer 23 0A, the spacer 230A and the color filter 100 are stronger. Next, the remaining unfixed material 23 0B to the spacer 23 0E are removed from the color filter 1 。. Here, as shown in Fig. 8, the color filter 100 is tilted from the nozzle 480 to supply the liquid 490 to the surface thereof, and the unfiltered spacers 230B to 23E are mixed with the undried liquid, and the color filter is filtered. The surface of the light sheet 1 将该 removes the unfixed intervals 1 1 2 0E. In this case, it is suitable to use the fixed method described above. 400a, select the surrounding, by the object 230A, the liquid that is covered by the droplet i-ray film is irradiated to the fixed and then hardened tree by dry or ultraviolet curing, and the fixed connection is spaced ( oblique configuration, I It is then possible to rinsing the spacers 23 0A from the color filter 100 and the color filter 100, which is almost unaffected by the liquid 490. The liquid 490 is not particularly limited. However, when a liquid which can be dissolved in the remaining liquid droplets 200, for example, a spacer carrier liquid or the like, the unfixed spacers 23 0B to 23 0E can be easily removed. As long as the liquid on the color filter 1 is dried, as shown in Fig. 9, in the place where the spacer is not required to be placed, B, the spacer 23 0 is not disposed. The spacer 23 0D in the satellite droplet 200D or the spacer 23 0C which is not disposed in the droplet 200C of the desired location is not fixedly attached to the color filter 100. Further, the droplet itself is attached to the spacer Expected, but not in the droplet 2〇〇E The spacers 23 0E placed on the black matrix are also not fixed on the color filter 100. This completes the spacer configuration process. Thereafter, the spacers 23 0A are sandwiched, and the stack is not illustrated. The electrode substrate is filled with liquid crystal between the color filter 100 and the electrode substrate to complete the liquid crystal display. Further, when the spacer is fixed to the color filter and the electrode substrate is overlapped, the spacer is almost Further, when the color filter or the like is conveyed before the electrode substrate is superimposed, the operation of the color filter is extremely easy. According to the present embodiment, the opening portion 400a of the light shielding plate 400 is used. The arrangement of the light shielding portion 400b is adhered to the spacer 230 in the plurality of droplets 200 of the color filter, and only the spacer 230A disposed at the desired position can be fixed by drying and then colored by the color filter. And then, by removing the unfixed -19-200827879 (17) spacers 230B to 23GE from the color filter 1 ,, it is not necessary to stick to the liquid in the adhesion process. Drop 200 Arrangement and the like, and the spacer 230 is disposed at a desired position. Thereby, in particular, using the head container which is provided with the opening at a predetermined fixed pitch, it is not necessary to control the presence or absence of the droplet discharge according to each opening, and at the same time, Spreading droplets, that is, spacers, wider than the spacing. Also, when subjected to various external disturbances, such that the droplets are disposed on an unintended non-specific position on the color filter φ sheet, or When the droplet itself is placed in the desired place and the spacer in the droplet is configured to an unintended non-specific position, the spacer in this case can be prevented from being fixed and then unintentionally non-specific on the color filter. position. Further, the removal of the spacers 23 0B to 23 0E including the unfixed ones is performed by supplying the liquid to the surface of the color filter 1 , so that the removal can be easily performed. Further, in the above-described embodiment, the spacer 230 in the droplet 200 is irradiated with infrared rays in a state of being in contact with the color filter 1 ,, but at the start of the process of fixing the same, that is, When the infrared ray is irradiated, the position of the spacer 23 0 located in the liquid droplet 200 is not particularly limited. For example, it may float in the liquid droplet 200 without contacting the color filter, and may float on the liquid droplet. Can also be within 200. In the present embodiment, since the spacers are fixed by the drying of the liquid to be fixed and the spacers are fixed, the spacers 230 in the droplets 200 are in any state as long as they are attached by the light shielding plate. Once the liquid on the portion of the spacer is dry, the spacer 230 is either fixed to the post-dry position or left in any residual liquid that is not dried by -20-200827879 (18). (Second Embodiment) Next, a second embodiment of the present invention will be described. The first embodiment differs in that the liquid around the object is dried during the fixed subsequent process, and the spacer 230 is fixed to the surface of the 100. Specifically, the spacers 230 are formed as a spacer which is formed by the resin which is cured by the irradiation of light, and is formed of a resin which receives light. Only the surface thereof may be formed of a resin that receives light. Examples of the curing by light irradiation include an ultraviolet curable resin, a visible light-curable resin resin, and the like. As the resin which is hardened by light, for example, a photopolymerization initiator which can induce light of a desired wavelength and the object. Further, before the light is irradiated, the orientation of the color filter 100 is adjusted in advance as in Fig. 6 so that the droplets 2 0 0 230 are in contact with the surface of the color filter 100. Specifically, as a method of making the spacer 230 filter 100 in the droplet 200, for example, if the specific gravity of the spacer 230 is large, as shown in FIG. 6, the droplet color filter is provided. The color filter may be disposed on the upper side of the 100°; if the specific gravity of the spacer 23 0 is smaller than the specific gravity of the liquid, the spacer color filter 230 is not disposed, and is a spacer. a resin which is hardened by irradiation and hardened, for example, an infrared ray is a mixed monomer or an oligomeric state, and a spacer in contact with a color-to-liquid ratio 200 exists in the case of the light sheet 1 〇 0. The color filter may be disposed such that the liquid droplets 200 are present on the lower surface side of the color filter 100 in the range of -21 to 200827879 (19). Then, in a state where the spacers 023 are brought into contact with the color filter 100, the light is applied from the lamp 45U through the opening 4a of the visor 400 to harden the surface of the spacer. Light, for example, ultraviolet light (wavelength 4 to 400 nm), visible light (wavelength 400 to 760 nm), infrared rays, and the like.
Φ 當光線從遮光板400的開口部400a照射到液滴200A 中的間隔物23 0A時，間隔物230A的表面便硬化而使得 間隔物230A固定接著於彩色濾光片100之例如黑矩陣 120 上。 另一方面，相向於遮光板400的遮光部400b之液滴 200B〜20 0E中的間隔物23 0B〜23 0E並沒有被照射到光線 ’故各間隔物23 0B〜23 0E並沒有固定接著於彩色濾光片 。又，使用紫外線或可視光線時，液滴200並無乾燥，而 ® 即使在照射紅外線的情形時亦與第1實施形態不同，不必 讓間隔物230周圍的液體乾燥。 . 又’因應需要，在間隔物固定接著後，再使紅外線經 . 由遮光板4〇〇的開口部400a照射出來來讓間隔物23 0周 圍的液體乾燥時，在很多情形下可以更加地增加間隔物 230A的固定接著力。 然後’與在第1實施形態之第8圖相同樣之作法，從 彩色濾光片100將未固定接著之間隔物230B〜23 0E予以 去除’因應需要藉由進行乾燥等，可以讓間隔物23 0A配 -22- 200827879 (20) 置到所期望的位置。 依據本實施形態，由於不必使所欲固定接著 周圍的液體乾燥亦可，所以能夠進行短時間效率 接著處理。 (第3實施形態） 接著說明關於本發明之第3實施形態。於第 態中，如第1 〇圖所示，不是使用如第1實施形 實施形態之間隔物配置裝置1，而是使用具有液 嘴202之噴霧裝置2來讓液滴200附著在彩色濾 上。 作爲液滴噴霧噴嘴202，可以使用一般的二 等。於此液滴噴霧噴嘴202經由管線L20連接 2 04，並且經由管線L22連接有泵浦206以及與彳 形態相同的攪拌槽20。並且，藉由泵浦206使間 液12被供給至液滴噴霧噴嘴202之同時，藉由送 使空氣被供給至液滴噴霧噴嘴202，而從液滴 202形成多數個間隔物含有液的液滴200。此多 2〇〇，附著在相向於液滴噴霧噴嘴202而配置之 片100的表面。又，液滴噴霧噴嘴202的孔口（ 徑、間隔物含有液或是空氣壓力等之噴霧條件， 滴外徑爲所期望之大小之方式來設定。又，各液 分別含有間隔物230。 於如此之噴霧法，是難以使用如第1實施形 之間隔物 佳的固定 3實施形 態或第2 滴噴霧噴 光片1〇〇 流體噴嘴 有送風機 第1實施 隔物含有 :風機204 噴霧噴嘴 數個液滴 彩色濾光 orifice ) 是以使液 滴 2 0 0, 態之方式 -23- 200827879 (21) 來控制位於彩色濾光片100上之液滴200的附著位置，如 第1 1圖所示，含有間隔物23 0之液滴200在彩色濾光片 1〇〇上大致成爲隨機配置。並且，液滴200中之間隔物 230，可區分爲被配置在黑矩陣120上的間隔物23 0G，以 及被配置在黑矩陣120以外之部分上的間隔物23 0H。 接著，如第12圖所示，準備長條狀的遮光板402，並 將對應彩色濾光片1〇〇之黑矩陣120部分的部分設爲開口 ❿ 部4〇2a，將其他部分設爲遮光部4〇2b。 然後，將此遮光板402，使其開口部402a以相向於黑 矩陣120之方式來配置，使光線經由此開口部402a照射 到彩色濾光片1〇〇之黑矩陣120。 例如，如第1實施形態地當夾介遮光板402來照射紅 外線時，在液滴200之黑矩陣1 20上的部分會乾燥，亦即 ，由於位於黑矩陣120之間隔物23 0G周圍的液體會乾燥 ，而使得間隔物23 0G固定接著於黑矩陣120上。另一方 ♦ 面，由於在黑矩陣1 20以外的部分不會照射到紅外線，所 以位於黑矩陣120以外之部分上的間隔物23 0H不會固定 . 接著於彩色濾光片100。 然後，間隔物230的表面爲藉由紫外線而硬化之樹脂 、或是藉由可視光線而硬化之樹脂所形成之情形時，更於 乾燥後夾介遮光板402來照射紅外線或紫外線，則可以更 加強固地使間隔物2 3 0 A固定接著於彩色濾光片1 〇〇。 另外，如第2實施形態，亦可以在不乾燥下來使液滴 固定接著。例如，間隔物230之表面爲藉由光的照射而硬 -24· 200827879 (22) 化之樹脂所形成之情形時，在使液滴200中之間隔物230 接觸於彩色瀘光片1〇〇的狀態下，夾介遮光板400，對彩 色濾光片1 〇〇照射出使樹脂硬化的光’例如’紫外線、紅 外線、可視光線等。如此一來’液滴2〇〇中之間隔物 _ 230G的表面硬化使間隔物230固定接著在黑矩陣120上 • 。另一方面，由於液滴200中之間隔物230H沒有被光線 照射到，故此間隔物23 0H不會固定接著於黑矩陣120。 φ 又，藉由硬化而固定接著之同時，或是藉由硬化而固定接 著之後，夾介遮光板402來對彩色濾光片100照射紅外線 ，使間隔物23 0G周圍的液體乾燥，亦能夠增加間隔物 23 0G與彩色濾光片100的固定接著力。 然後，以如此實施，讓黑矩陣120上的間隔物23 0G 固定接著於彩色濾光片之後，與第1實施形態及第2實施 形態相同樣地，只要從彩色濾光片表面將未固定接著之間 隔物23 0B予以去除的話，如第13圖所示地，就可以選擇 φ 性地將間隔物23 0 ( 23 0G)配置在黑矩陣120上。 (第4實施形態） 在本實施形態中，如第14圖及第15圖所示，不使用 液滴，而是使間隔物含有液12的液膜20 3附著在彩色濾 光片1 00上。具體上，可以使用周知之各種塗佈裝置來將 間隔物含有液12的液膜203形成於彩色濾光片1〇〇上。 例如，使用第14圖所不之模具塗佈機（die coater)可形 成液膜203。又，藉由利用如第3實施形態之噴霧噴嘴進 -25- 200827879 (23) 行充分長時間之液滴噴霧亦能夠形成液膜。 當形成如此之液膜203，如第14圖及第15圖所示， 於液膜203中，間隔物23 0爲大致隨機地配置在彩色濾光 片100上。在此，是將被配置在黑矩陣120上的間隔物標 示爲203G，將被配置在黑矩陣120以外之部分上的間隔 * 物標示爲203H。 然後，與第3實施形態相同樣地，只要夾介遮光板 φ 402照射光線即可。與第3實施形態相同樣地，藉由利用 紅外線讓黑矩陣1 2 0上之間隔物2 0 3 G周圍的液體乾燥， 使間隔物203G固定接著於彩色濾光片1〇〇亦可；又，藉 由光線讓間隔物203 G之表面硬化，使間隔物203 G與彩 色濾光片1 〇〇固定接著亦可。然後，在固定接著之後，只 要藉由洗淨等將未固定接著的間隔物203H去除即可。藉 此，如第13圖所示，使間隔物203選擇性地被配置在黑 矩陣1 2 0上。 φ 本發明並不限定於上述實施形態，是能夠有各種各樣 的變形形態。例如，在上述第1實施形態中，要去除未乾 燥的液滴200B及間隔物203B，雖然是使彩色濾光片傾斜 ，再藉由使液體490流下於其表面之方式來將液體供給至 彩色濾光片的表面，但例如，藉由讓彩色濾光片浸漬到貯 存有液體的槽內亦能夠去除。又，即使不將液體供給至彩 色濾光片1 00的表面也能夠實施，例如，將氣體等強吹於 彩色濾光片100的表面來把液滴200B以及間隔物203吹 走亦可。 -26- 200827879 (24) 又，在上。述第1實施形態中’雖然是將配置成矩陣狀 的液滴200之內的一個液滴200B當作爲未乾燥而於其後 將之去除，但當作爲未乾燥而於其後進行去除之液滴 200B的位置或個數可爲任意，藉由選擇遮光板40〇的開 口部400a以及遮光部400b的位置，可以以任意形態實施 。例如，對於由特定之開口 3 7所形成之排列於彩色濾光 片1 0 0之移動方向的1列的液滴群’藉由以不會照射到光 Φ 線之方式設定遮光板4 0 〇之遮光部，使得由特定之開口 3 7 所形成之液滴中的間隔物不會固定接著在彩色濾光片，而 可以得到與擴大開口 3 7之間距3 7P相同效果。 又，於上述第1及第2實施形態，雖然間隔物配置裝 置1是從下向上吐出液滴200，使液滴附著在朝下配置上 膜160之彩色濾光片100的下面，但由間隔物配置裝置1 從上向下吐出液滴200，來使液滴200附著在朝下配置上 膜160之彩色濾光片100的上面亦可。 • 又，當然，開口 3 7的排列或間距，甚至於開口 3 7的 排列方向與彩色濾光片移動方向的關係並無特別的限定。 又，遮光板的開口部的寬幅，與欲配置間隔物之處所 (例如，黑矩陣）的寬幅之關係，以設爲槪略相等之關係 即可，並因應光的種類（紫外線/可視光線/紅外線：其直 線性依種類有所差異）、遮光板與彩色濾光片的距離、彩 色濾光片的凹凸程度 '光線如何從光源到達彩色濾光片（ 平行光或是收斂光）等之性質，可以任意適宜地設定開口 部的寬幅與欲設置間隔物之處所的寬幅之關係。一般’以 -27- 200827879 (25) 設爲（開口部的寬幅）^ (欲設置間隔物之處所的寬幅） 即可。 再者，雖然在第1及第2實施形態，開口部是使用形 成爲矩陣狀的遮光板400，而在第3及第4實施形態，開 口部是使用形成爲長條狀的遮光板402，不過在第1及第 * 2實施形態，開口部以使用形成爲長條狀的遮光板4〇2， 而在第3及第4實施形態，開口部以使用形成爲矩陣狀的 • 遮光板400亦可。除此之外，遮光板的開口部，以對應欲 讓間隔物固定接著之處所的形狀，是能夠任意適切地設定 〇 具體上，例如，在上述各實施形態中，是藉由將開口 部的形狀及位置與彩色濾光片1 00的黑矩陣1 20相對應， 使間隔物固定接著於黑矩陣上，但是欲在黑矩陣以外的部 分配置間隔物之情形時，於對應該處所的位置設置開口部 即可。例如，要在透明著色樹脂上配置間隔物時，只要設 # 置對應透明著色樹脂的開口部即可。 又，在上述各實施形態中，對於彩色濾光片上的液膜 ^ /液體，是將不同於彩色濾光片的遮罩（遮光板）對彩色 _ 濾光片以相向配置來照射光。亦即，爲/光源/遮光板/液滴 /包含黑矩陣之基板/作爲其構成，但作爲遮光板，使用黑 矩陣本身，亦即，可以以如/液滴/包含黑矩陣之基板/光源 /之方式進行背面曝光。例如，在第14圖之狀態中，當光 線從與附著有液滴或/液體之面相反側的面（圖的下方） 照射時，由於光線透不過黑矩陣1 20，使透明著色樹脂 -28 - 200827879 (26) 130R、130G、130B爲具有作爲開口部之功能，黑矩陣 1 20爲具有作爲遮光部之功能。因此，不僅可以讓間隔物 23 0H固定接著於透明著色樹脂130R、130G、130B上，也 可以防止間隔物23 0G固定接著於黑矩陣120上。尤其是 對於彩色濾光片以外的基板，可以考慮以如此形態的散佈 方法。又，在第14圖中，符號120是可透過紫外線及/或 紅外線的膜，且透明著色樹脂13〇R、130G、130B爲不能 夠過紅外線及/或紫外線的膜之情形時，透明著色樹脂 130R、130G、130B爲具有遮光部的功能，由於膜120具 有作爲開口部之功能，因此可以讓間隔物不會固定接著於 透明著色樹脂130R、130G、130B上，而是固定接著於膜 1 20上。總之，對於本發明之遮光板，其中開口部及遮光 部，其在固定接著製程中所使用之光的透過率，只要彼此 相互充分相異即可。 又，對於彩色濾光片以外之製造上，例如，在製造 TFT基板、或是利用球狀間隔物形成製造液晶顯示元件必 須要有之液晶單元間隙（cell gap )、甚至於必須進行間 隙（gap )控制之多模式光導波路或連接器等之光學裝置 等之時，在需要對基板等配置間隔物之情形時當然也可以 使用上述各實施形態的方法。 【圖式簡單說明】 第1圖，是用以說明各實施形態所用之彩色濾光片的 槪略斷面圖。 -29- 200827879 (27) 第2圖，是顯示第1及第2實施形態中，使含有間隔 物之液滴附著於彩色濾光片之方法的槪略立體圖。 第3圖，是顯示在彩色濾光片上附著有液滴之狀態的 平面圖。 ‘ 第4圖，是第1圖的斷面圖。 ' 第5圖，是遮光板的平面圖。 第6圖，是相對於彩色濾光片將遮光板對向配置，使 φ 光線經由遮光板照射於彩色濾光片之狀態的槪略斷面圖。 第7圖，是顯示在第2實施形態，液滴200Α在乾燥 後之狀態，爲接續於第6圖的槪略斷面圖。 第8圖，是顯示從彩色濾光片的表面將液滴200Β及 間隔物23去除的樣子，爲接續於第7圖的槪略斷面圖。 第9圖，是顯示在除了彩色濾光片之場所Β等之部分 ，配置有間隔物23之狀態，爲接續於第8圖的槪略斷面 圖。 # 第1 〇圖，是顯示第3實施形態中之含有間隔物之液 滴散布方法的槪念圖。 第1 1圖，是顯示在第3實施形態中，液滴附著在彩 色濾光片上之狀態的平面圖。 第12圖，是遮光板的平面圖。 第1 3圖，是顯示間隔物僅固著於黑矩陣上的樣子之 彩色濾光片的平面圖。 第1 4圖，是顯示第4實施形態中之含有間隔物之液 膜形成方法的槪念斷面圖。 -30- 200827879 (28) 第15圖，是第14圖的平面圖。 【主要元件符號說明】 1 :間隔物配置裝置 100 : 彩色濾光片 120 ： 黑矩陣 120p :開口 130R，130G，130B :著色部 140 ： 透明電極膜 150 ： 配向膜 160 ： 上膜 160a :凹窪部 200，200A，200B，200C，200D, 200E :液滴 230，230A，230B，230C，230D，230E :間隔物 400, 402 :遮光板 φ 400a :開口部 4 0 0b :遮光部 4 5 01 ( 4 5 0 U ):燈 -31 -Φ When light is irradiated from the opening portion 400a of the light shielding plate 400 to the spacer 230A in the liquid droplet 200A, the surface of the spacer 230A is hardened so that the spacer 230A is fixed to, for example, the black matrix 120 of the color filter 100. . On the other hand, the spacers 23 0B to 23 0E in the droplets 200B to 20 0E of the light blocking portion 400b of the light blocking plate 400 are not irradiated with the light, so the spacers 23 0B to 23 0E are not fixed to Color filter. Further, when ultraviolet rays or visible light are used, the liquid droplets 200 are not dried, and ® is different from the first embodiment even when infrared rays are irradiated, and it is not necessary to dry the liquid around the spacers 230. Further, if necessary, after the spacer is fixed, the infrared ray is irradiated by the opening portion 400a of the visor 4 to dry the liquid around the spacer 203, and in many cases, it can be further increased. The spacer 230A is fixed to the force. Then, in the same manner as in the eighth embodiment of the first embodiment, the spacers 230B to 23E which are not fixed are removed from the color filter 100. The spacers 23 can be made by drying or the like as needed. 0A with -22- 200827879 (20) Set to the desired position. According to this embodiment, since it is not necessary to dry the liquid to be fixed and then the surrounding liquid, it is possible to carry out the processing in a short time efficiency. (Third Embodiment) Next, a third embodiment of the present invention will be described. In the first aspect, as shown in Fig. 1, instead of using the spacer arrangement device 1 of the first embodiment, the spray device 2 having the liquid nozzle 202 is used to attach the liquid droplets 200 to the color filter. . As the droplet discharge nozzle 202, a general second class can be used. Here, the droplet discharge nozzle 202 is connected to CC 4 via a line L20, and a pump 206 and a stirring tank 20 of the same form as the crucible are connected via a line L22. Further, while the inter-liquid 12 is supplied to the droplet discharge nozzle 202 by the pump 206, the air is supplied to the droplet discharge nozzle 202, and a plurality of spacer-containing liquids are formed from the droplets 202. Drop 200. This is more than 2 inches and adheres to the surface of the sheet 100 disposed opposite to the droplet discharge nozzle 202. Further, the orifice of the droplet discharge nozzle 202 (the diameter, the spacer containing the liquid or the air pressure, etc., is set so that the outer diameter of the droplet is a desired size. Further, each liquid contains the spacer 230. In such a spray method, it is difficult to use the fixed 3 embodiment or the second drop sprayed light-emitting sheet as in the first embodiment. The first nozzle of the fluid nozzle has a blower. The first embodiment includes a plurality of spray nozzles of the blower 204. The color filter of the droplet is controlled by the method of making the droplet 2 0 0, state -23-200827879 (21), the position of the droplet 200 located on the color filter 100, as shown in FIG. The droplets 200 containing the spacers 23 are substantially randomly arranged on the color filter 1A. Further, the spacer 230 in the droplet 200 can be divided into a spacer 23 0G disposed on the black matrix 120 and a spacer 23 0H disposed on a portion other than the black matrix 120. Next, as shown in Fig. 12, a long-shaped light-shielding plate 402 is prepared, and a portion corresponding to the portion of the black matrix 120 of the color filter 1A is set as the opening portion 4〇2a, and the other portions are shielded from light. Department 4〇2b. Then, the light blocking plate 402 is disposed such that the opening portion 402a faces the black matrix 120, and the light is irradiated to the black matrix 120 of the color filter 1 through the opening portion 402a. For example, when the infrared ray shield 402 is irradiated with infrared rays as in the first embodiment, the portion on the black matrix 126 of the liquid droplets 200 is dried, that is, due to the liquid located around the spacer 23 0G of the black matrix 120. It will dry and the spacers 23 0G will be fixed to the black matrix 120. On the other hand, since the portion other than the black matrix 1 20 is not irradiated with the infrared ray, the spacer 23 0H located on the portion other than the black matrix 120 is not fixed. Next, the color filter 100 is used. Then, when the surface of the spacer 230 is formed by a resin which is hardened by ultraviolet rays or a resin which is hardened by visible light, it is possible to further irradiate the light-shielding plate 402 to irradiate infrared rays or ultraviolet rays after drying. The spacer 2 30 A is firmly fixed to the color filter 1 〇〇. Further, as in the second embodiment, the liquid droplets may be fixed without being dried. For example, when the surface of the spacer 230 is formed by hardening the light by the irradiation of light, the spacer 230 in the liquid droplet 200 is brought into contact with the color light-emitting sheet 1 In the state of the interlayer light shielding plate 400, the color filter 1 is irradiated with light (for example, 'ultraviolet rays, infrared rays, visible light rays, etc.) which hardens the resin. As a result, the surface hardening of the spacer _ 230G in the droplet 2 is such that the spacer 230 is fixed on the black matrix 120. On the other hand, since the spacer 230H in the droplet 200 is not irradiated with light, the spacer 230H is not fixed to the black matrix 120. φ, by fixing by hardening, or fixing by hardening, and then absorbing the light-shielding plate 402 to irradiate the color filter 100 with infrared rays to dry the liquid around the spacer 23 0G, and can also increase The fixed adhesion force of the spacer 23 0G and the color filter 100. Then, in this manner, after the spacers 23 0G on the black matrix 120 are fixed to the color filter, as in the first embodiment and the second embodiment, the surface of the color filter is not fixed. When the spacer 23 0B is removed, as shown in Fig. 13, the spacer 23 0 (230 G) can be selectively placed on the black matrix 120. (Fourth Embodiment) In the present embodiment, as shown in Figs. 14 and 15, the liquid film 203 of the spacer-containing liquid 12 is attached to the color filter 100 without using droplets. . Specifically, the liquid film 203 of the spacer-containing liquid 12 can be formed on the color filter 1 by using various coating apparatuses known in the art. For example, the liquid film 203 can be formed by using a die coater not shown in Fig. 14. Further, a liquid film can be formed by spraying the droplets for a sufficiently long period of time by using the spray nozzle of the third embodiment -25-200827879 (23). When such a liquid film 203 is formed, as shown in Figs. 14 and 15, in the liquid film 203, the spacers 203 are arranged substantially randomly on the color filter 100. Here, the spacers disposed on the black matrix 120 are indicated as 203G, and the spacers disposed on portions other than the black matrix 120 are denoted as 203H. Then, similarly to the third embodiment, the light can be irradiated with the light shielding plate φ 402. Similarly to the third embodiment, the liquid around the spacer 2 0 3 G on the black matrix 1 0 0 is dried by infrared rays, and the spacer 203G is fixed to the color filter 1; The surface of the spacer 203 G is hardened by light, and the spacer 203 G and the color filter 1 are fixed. Then, after the fixing is continued, the unfixed spacer 203H may be removed by washing or the like. Thereby, as shown in Fig. 13, the spacer 203 is selectively disposed on the black matrix 120. φ The present invention is not limited to the above embodiment, and various modifications are possible. For example, in the first embodiment, the undried liquid droplets 200B and the spacers 203B are removed, and the color filter is tilted, and the liquid is supplied to the color by flowing the liquid 490 on the surface thereof. The surface of the filter can be removed, for example, by dipping the color filter into a tank in which the liquid is stored. Further, even if the liquid is not supplied to the surface of the color filter 100, for example, a gas or the like is strongly blown onto the surface of the color filter 100 to blow the droplets 200B and the spacers 203 away. -26- 200827879 (24) Again, on the top. In the first embodiment, the liquid droplets 200B in the liquid crystals 200 arranged in a matrix are removed as undried, but are removed as undried. The position or the number of the drops 200B may be arbitrary, and the position of the opening 400a and the light blocking portion 400b of the light shielding plate 40A may be selected in any form. For example, the liquid droplet group ' of one column formed by the specific opening 37 and arranged in the moving direction of the color filter 100 is set by the light shielding plate 4 0 without illuminating the light Φ line. The light shielding portion is such that the spacer in the liquid droplet formed by the specific opening 37 is not fixed to the color filter, and the same effect as the distance between the enlarged opening 37 and the 3 7P can be obtained. Further, in the above-described first and second embodiments, the spacer arranging device 1 discharges the liquid droplets 200 from the bottom to the top, and causes the liquid droplets to adhere to the lower surface of the color filter 100 on which the upper film 160 is disposed downward. The object disposing device 1 discharges the liquid droplets 200 from the top to the bottom so that the liquid droplets 200 may adhere to the upper surface of the color filter 100 on which the upper film 160 is disposed downward. Further, of course, the arrangement or pitch of the openings 37, and even the relationship between the arrangement direction of the openings 37 and the moving direction of the color filters are not particularly limited. Further, the relationship between the width of the opening of the visor and the width of the spacer (for example, the black matrix) is set to be approximately equal, and depending on the type of light (ultraviolet/visual) Light/infrared: its linearity varies depending on the type), the distance between the visor and the color filter, and the degree of unevenness of the color filter. How does the light reach the color filter (parallel light or convergent light) from the light source? As a property, the relationship between the width of the opening portion and the width of the spacer to be provided can be arbitrarily set. Generally, -27-200827879 (25) is set to (width of the opening) ^ (the width of the space where the spacer is to be placed). Further, in the first and second embodiments, the opening portion is formed by using the light shielding plate 400 formed in a matrix shape, and in the third and fourth embodiments, the opening portion is formed by using the light shielding plate 402 formed in a long shape. However, in the first and second embodiments, the opening portion is formed by using the light shielding plate 4〇2 formed in a long shape, and in the third and fourth embodiments, the opening portion is formed in a matrix shape. Also. In addition, the opening of the light shielding plate can be arbitrarily set in a shape corresponding to the position where the spacer is to be fixed, for example, in the above embodiments, the opening portion is provided. The shape and position correspond to the black matrix 1 20 of the color filter 100, so that the spacer is fixed to the black matrix, but when the spacer is to be placed in a portion other than the black matrix, the position corresponding to the location is set. The opening can be. For example, when a spacer is to be placed on the transparent colored resin, the opening corresponding to the transparent colored resin may be provided. Further, in each of the above embodiments, the liquid film ^ / liquid on the color filter is such that a mask (light shield) different from the color filter is arranged to face the color filter to illuminate the light. That is, it is / light source / visor / droplet / substrate containing black matrix / as its configuration, but as a visor, the black matrix itself is used, that is, the substrate/light source such as / droplet / black matrix can be used / The way to back exposure. For example, in the state of Fig. 14, when the light is irradiated from the surface (the lower side of the figure) on the side opposite to the surface on which the liquid droplet or the liquid is attached, the transparent colored resin -28 is made because the light does not pass through the black matrix 1 20 - 200827879 (26) 130R, 130G, and 130B have a function as an opening, and the black matrix 126 has a function as a light blocking unit. Therefore, not only the spacers 230H can be fixed to the transparent colored resins 130R, 130G, and 130B, but also the spacers 23 0G can be prevented from being attached to the black matrix 120. In particular, for a substrate other than the color filter, a scattering method in such a form can be considered. Further, in Fig. 14, reference numeral 120 denotes a film which is permeable to ultraviolet rays and/or infrared rays, and when the transparent colored resin 13〇R, 130G, and 130B is a film which cannot pass infrared rays and/or ultraviolet rays, the transparent colored resin 130R, 130G, and 130B have a function of having a light shielding portion. Since the film 120 has a function as an opening portion, the spacer can be prevented from being attached to the transparent colored resin 130R, 130G, and 130B, but fixed to the film 1 20. on. In the light-shielding plate of the present invention, the transmittances of the light used in the fixing process and the light-shielding portion are sufficiently different from each other. Further, in the manufacture other than the color filter, for example, a liquid crystal cell gap or a gap must be formed in the production of a TFT substrate or a formation of a liquid crystal display element by using a spherical spacer. In the case of controlling an optical device such as a multimode optical waveguide or a connector, it is a matter of course that the method of each of the above embodiments can be used when it is necessary to arrange a spacer for a substrate or the like. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view for explaining a color filter used in each embodiment. -29-200827879 (27) Fig. 2 is a schematic perspective view showing a method of attaching a droplet containing a spacer to a color filter in the first and second embodiments. Fig. 3 is a plan view showing a state in which droplets are attached to a color filter. ‘ Figure 4 is a cross-sectional view of Figure 1. 'Figure 5 is a plan view of the visor. Fig. 6 is a schematic cross-sectional view showing a state in which the light shielding plate is opposed to the color filter, and φ light is irradiated onto the color filter through the light shielding plate. Fig. 7 is a schematic cross-sectional view showing the state in which the liquid droplets 200 are dried after the second embodiment, and is continued from Fig. 6. Fig. 8 is a schematic cross-sectional view showing the removal of the droplets 200 Β and the spacers 23 from the surface of the color filter, which is continued from Fig. 7. Fig. 9 is a schematic cross-sectional view showing the state in which the spacer 23 is disposed in a portion other than the color filter, and the like. #第一1图 is a view showing a method of dispensing a liquid droplet containing a spacer in the third embodiment. Fig. 1 is a plan view showing a state in which droplets are attached to a color filter in the third embodiment. Figure 12 is a plan view of the visor. Fig. 13 is a plan view showing a color filter in which the spacer is fixed only to the black matrix. Fig. 14 is a perspective view showing a method of forming a liquid film containing a spacer in the fourth embodiment. -30- 200827879 (28) Figure 15, is a plan view of Figure 14. [Description of main component symbols] 1 : spacer arrangement device 100 : color filter 120 : black matrix 120p : opening 130R, 130G, 130B : coloring portion 140 : transparent electrode film 150 : alignment film 160 : upper film 160 a : concave Parts 200, 200A, 200B, 200C, 200D, 200E: droplets 230, 230A, 230B, 230C, 230D, 230E: spacers 400, 402: visor φ 400a: opening portion 4 0 0b: opaque portion 4 5 01 ( 4 5 0 U ): Lights - 31 -