WO2006030504A1 - 真空熱処理炉の冷却ガス風路切替え装置 - Google Patents
真空熱処理炉の冷却ガス風路切替え装置 Download PDFInfo
- Publication number
- WO2006030504A1 WO2006030504A1 PCT/JP2004/013503 JP2004013503W WO2006030504A1 WO 2006030504 A1 WO2006030504 A1 WO 2006030504A1 JP 2004013503 W JP2004013503 W JP 2004013503W WO 2006030504 A1 WO2006030504 A1 WO 2006030504A1
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- WIPO (PCT)
- Prior art keywords
- cooling
- gas
- cooling chamber
- heat treatment
- chamber
- Prior art date
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 63
- 239000000112 cooling gas Substances 0.000 title claims abstract description 23
- 238000001816 cooling Methods 0.000 claims abstract description 178
- 239000007789 gas Substances 0.000 claims abstract description 98
- 238000005192 partition Methods 0.000 claims description 41
- 238000010586 diagram Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000000638 solvent extraction Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 241000920340 Pion Species 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 238000005261 decarburization Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D9/00—Cooling of furnaces or of charges therein
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/12—Arrangement of devices for charging
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/13—Arrangement of devices for discharging
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/14—Arrangements of heating devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
- F27B5/06—Details, accessories, or equipment peculiar to furnaces of these types
- F27B5/16—Arrangements of air or gas supply devices
Definitions
- the present invention relates to a cooling gas air path switching device for a vacuum heat treatment furnace.
- a vacuum heat treatment furnace is a heat treatment furnace that heats a product to be treated by reducing the inside and then refilling with an inert gas or the like.
- the moisture in the furnace and the processed product after gasification is gasified and then decompressed again, and refilled with inert gas, etc., so that the moisture can be completely removed.
- heat treatment (called “bright heat treatment”) can be performed.
- the gas-cooled vacuum heat treatment furnace has many advantages such as (1) bright heat treatment, (2) no decarburization, (3) little deformation, (4) good working environment, etc. Have.
- the initial gas-cooled vacuum heat treatment furnace has a disadvantage that the cooling rate is insufficient because it is of a reduced pressure cooling type. Therefore, in order to increase the cooling rate, a high-speed circulating gas cooling method has been put into practical use.
- FIG. 1 is a configuration diagram of a high-speed circulating gas cooling furnace disclosed in Non-Patent Document 1.
- 50 is a heat insulating material
- 51 is a heater
- 52 is an effective work area
- 53 is a furnace body and a water cooling jacket
- 54 is a heat exchanger
- 55 is a turbo fan
- 56 is a motor for a fan
- 57 is a cooling door 58 is a hearth
- 59 is a gas distributor
- 60 is a damper for switching the cooling gas air path.
- the "gas circulation cooling promotion method in a vacuum furnace" of Patent Document 1 includes a heating chamber 66 surrounded by a heat insulating wall 67 in an airtight vacuum vessel 61, as shown in FIG.
- the heated object 64 is heated in a vacuum by a heater 72 disposed in the vacuum chamber 61, and a cooler 62 and a fan 63 are provided in the vacuum vessel 61, and the oxygen-free gas supplied to the vacuum vessel is cooled by the cooler 6 2 is cooled, and the non-oxidizing gas is circulated into the heating chamber 66 through the openings 68 and 69 provided on the opposite heat insulating wall 6 7 surface of the heating chamber 66 by the rotation of the fan 63.
- a vacuum furnace for forced gas circulation cooling At least one end of the heat-resistant cylinder is widened toward the end.
- the hood 65 is disposed so that it surrounds the object to be heated 64 placed in the heating chamber 66 with an appropriate space between them, and both ends of the hood 65 are opposed to the openings 68 and 69.
- the gas is circulated in the heating chamber 66.
- 70 is a damper for switching the cooling gas air path.
- Non-patent document 1 Katsuhiro Yamazaki, Vacuum heat treatment of metal materials (2), Heat treatment No. 30-2, April 1990
- Patent Document 1 Japanese Patent Laid-Open No. 5-230528
- a damper device is usually used up and down as a mechanism for switching between the upward and downward air paths.
- the upper and lower damper devices are air path switching mechanisms, the following problems have been identified.
- the damper device has a large load fluctuation due to wind pressure passing at a high speed depending on its opening / closing position. Therefore, in the case of high-pressure gas, it is difficult to move smoothly due to the effect of wind pressure with the damper method.
- the opening / closing angle and the opening area are not proportional. For this reason, when switching between a plurality of upper and lower drive devices, there is a difference in the opening area of the suction port and the discharge port, which makes it difficult to adjust the opening area, or the fluctuation increases, and the amount of cooling gas varies. Stable gas cooling is difficult.
- the present invention has been created to solve the above-described problems. That is, the object of the present invention is to smoothly switch the air path under the influence of wind pressure, Stable gas cooling that is difficult to cause fluctuations in the area and difference between the opening area of the suction port and the discharge port is possible, the structure is simple, and switching is possible with a single drive unit, and a vacuum that can secure a large opening area An object of the present invention is to provide a cooling gas air path switching device for a heat treatment furnace.
- a cooling chamber that surrounds a cooling region in which an object to be processed is allowed to stand, and a gas cooling circulation device that cools and circulates gas passing through the cooling chamber.
- a cooling gas air path switching device for a vacuum heat treatment furnace that cools a product with a pressurized circulating gas, the stationary partition plate partitioning between the cooling chamber and the gas cooling circulation device, along the surface of the stationary partition plate
- the fixed partition plate has a suction opening and a discharge opening that communicate independently with the suction port and the discharge port of the gas cooling circulation device, respectively.
- a vacuum heat treatment furnace cooling gas characterized by having a shielding part that partially shields the suction opening and the discharge opening of the fixed partition plate, thereby alternately switching the direction of the gas passing through the cooling chamber An air path switching device is provided.
- the gas passing through the cooling chamber can be obtained simply by sliding the sliding shielding plate along the surface of the fixed partition plate that partitions the cooling chamber and the gas cooling circulation device.
- the direction can be switched alternately.
- the sliding shielding plate moves in a direction perpendicular to the flow direction, the air path is smoothly switched without being affected by the wind pressure even with a high-pressure gas (a high-density gas body). be able to.
- the fixed partition plate has a suction opening and a discharge opening that communicate independently with the suction port and the discharge port of the gas cooling circulation device, respectively, and the sliding shielding plate has a suction opening and a discharge port of the fixed partition plate. Since the shielding portion that partially shields the opening is provided, it is possible to perform stable gas cooling in which fluctuation of the opening area and difference in opening area between the suction port and the discharge port are unlikely to occur. In addition, the structure is simple and can be switched with a single drive unit, and a large opening area can be secured.
- the cooling chamber has a gas flow path that passes vertically inside the cooling chamber, and when the gas flows downward in the cooling chamber, the suction opening is the cooling chamber. Communicates only with the lower part and the discharge opening communicates only with the upper part of the cooling chamber, and when the gas flows upward in the cooling chamber, the suction opening communicates only with the upper part of the cooling chamber and the discharge opening only with the lower part of the cooling chamber The opening position is set so as to communicate with. [0017] With this configuration, out of the furnace body area A partitioning between the cooling chamber and the gas cooling circulation device, 1 Z2 is used as the suction port and the discharge port of the gas cooling circulation device, and further, out of the suction port and the discharge port. By setting 1Z2 downward and upward, the suction opening and discharge opening can be set to approximately 1Z4 of the furnace body area A. Therefore, the air passage area can be made larger than before, the flow velocity of gas can be reduced, and the pressure loss can be reduced.
- the fixed partition plate has a pair of upper and lower suction openings and discharge openings, and the shield portion of the sliding shield plate simultaneously opens the upper suction opening and the lower discharge opening of the fixed partition plate. It is preferable to shield and slide to simultaneously shield the lower suction opening and the upper discharge opening.
- the cooling chamber is positioned so that a processed product can be directly loaded / unloaded from the outside via a loading / unloading door, and the gas cooling circulation device is installed on a side surface that does not directly affect the loading / unloading of the processed product. .
- the product to be processed can be directly carried into and out of the cooling chamber from the outside via the carry-in / carry-out door without being affected by the gas cooling / circulating device.
- the gas cooling circulation device is installed adjacent to the cooling chamber and sucks and pressurizes the gas that has passed through the cooling chamber, and a gas fan installed between the fixed partition plate and the cooling chamber. It consists of upper and lower heat exchangers that indirectly cool the gas.
- the gas cooling circulation device is installed adjacent to the cooling chamber and sucks and pressurizes the gas that has passed through the cooling chamber, and is installed between the discharge port of the cooling fan and the fixed partition plate for cooling.
- Fan power It may be configured with heat exchange ⁇ for indirectly cooling the discharged gas
- FIG. 1 is a configuration diagram of a high-speed circulating gas cooling furnace disclosed in Non-Patent Document 1.
- FIG. 1 is a configuration diagram of a high-speed circulating gas cooling furnace disclosed in Non-Patent Document 1.
- FIG. 2 is a configuration diagram of “a method of promoting gas circulation cooling in a vacuum furnace” in Patent Document 1.
- FIG. 3 is an overall configuration diagram of a vacuum heat treatment furnace equipped with a cooling gas air path switching device of the present invention.
- FIG. 4 is a cross-sectional view taken along line AA in FIG.
- FIG. 5 is a cross-sectional view taken along line BB in FIG.
- FIG. 6 A and B are explanatory views of the operation of the present invention.
- FIG. 3 is an overall configuration diagram of a vacuum heat treatment furnace provided with the cooling gas air path switching device of the present invention.
- this vacuum heat treatment furnace is a multi-chamber heat treatment furnace provided with a vacuum heating furnace 10, a gas cooling furnace 20, and a moving device 30.
- the vacuum heating furnace 10 is a sealable furnace that includes a heating chamber 12 that is adjacent to the cooling chamber and that heats the workpiece 1 at approximately the same height as the cooling chamber 22 of the gas cooling furnace 20. After depressurizing treated product 1, it has the function of refilling with inert gas and heating it.
- the gas-cooled furnace 20 is a sealable pressure vessel containing a cooling chamber 22 for gas-cooling the heated article 1 to be cooled, and the heated article 1 is cooled by a pressurized circulating gas 2. It has a function to
- the moving device 30 has a function of horizontally conveying the article 1 to be processed between the heating chamber 12 and the cooling chamber 22.
- the vacuum heating furnace 10 includes a vacuum vessel 11 in which the inside is evacuated, a heating chamber 12 in which the article 1 to be processed is housed, and before the article 1 to be taken in and out of the heating chamber.
- Door 13, heating It consists of a rear door 14 that closes the opening for moving the workpiece 1 in the room, a mounting table 15 on which the workpiece 1 can be moved horizontally back and forth, a heater 16 for heating the workpiece 1, etc.
- the inside of the vacuum vessel 11 can be decompressed to a vacuum, and the article 1 to be processed can be heated to a predetermined temperature by the heater 16.
- the gas cooling furnace 20 includes a carry-in / out door 21, a cooling chamber 22, a rectifier 23, and a vacuum vessel 24.
- the cooling chamber 22 positions the workpiece 1 so that an external force can be directly loaded / unloaded via the loading / unloading door 21, and allows the workpiece to be loaded from the outside without being affected by the gas cooling / circulation device described later. It is now possible to carry in and out of the cooling room directly via the carry-out door!
- the carry-in / out door 21 is provided on the opposite side (right side in the figure) of the heating chamber 12 and is used to carry the workpiece 1 into or out of the cooling chamber 22.
- This carry-in Z carry-out is performed by transport means (for example, a fixed loader Z unloader device, a forklift, a crane, etc.) provided outside the furnace.
- transport means for example, a fixed loader Z unloader device, a forklift, a crane, etc.
- the cooling chamber 22 surrounds a cooling region in which the article to be processed 1 is allowed to stand, and forms a gas flow path having a constant cross section in the vertical direction inside thereof.
- the loading / unloading door side of the cooling chamber 22 can be opened and closed by an opening / closing door 22a. In some cases, the opening / closing door 22a can be replaced by the loading / unloading door 21.
- the rectifier 23 is provided above and below the upper and lower ends of the cooling chamber 22, and has a function of rectifying the flow in the vertical direction and uniformizing the velocity distribution of the gas passing through the cooling chamber 22.
- the vacuum container 24 includes an intermediate heat insulating door 24a provided facing the front door 13 of the vacuum heating furnace 10, a cylindrical container body 24b that accommodates the workpiece 1 therein, and a container body 24b. It consists of a clutch ring 24c that can open and close the loading / unloading door 21 in an airtight manner.
- the carry-in / out door 21 is hermetically connected to the container body 24b by the clutch ring 24c and pressurized by supplying a pressurized cooling gas (argon, helium, nitrogen, etc.) from a pipe (not shown). Gas Can be used for cooling.
- a pressurized cooling gas argon, helium, nitrogen, etc.
- the moving device 30 includes a plurality of free rollers 32, a push-pull member 34, and a driving device 36.
- the plurality of free rollers 32 are installed in the heating chamber 12 and the cooling chamber 22, and support only the both ends in the width direction of the workpiece 1 so as to be movable in the horizontal conveyance direction.
- the free roller 32 is a short cylindrical roller that can freely rotate about its axis, and hardly disturbs the smooth flow of gas in the cooling chamber 22.
- the free roller has only a function of supporting the workpiece 1 so as to be movable in the horizontal conveyance direction, and is a simple bearing (for example, a large gap!) So that the function is not impaired even when heated in the heating chamber 12. It has a simple structure that requires almost no heat countermeasures by periodically inspecting or replacing it.
- the push-pull member 34 moves horizontally while engaging the article 1 to be processed, and pushes and pulls the article to be processed horizontally. Further, the push-pull member 34 has an engaging member 35 that can be raised and lowered at the tip, so that the push-pull member 34 can be raised and lowered at any time by an actuator (not shown) built in the end (left end) of the push-pull member 34. It is summer. With this up-and-down movement, the engagement member 35 can be changed at any time between the high position and the low position, and can engage with the workpiece 1 (or its mounting table) in the high position to push and pull the workpiece 1 horizontally. In the low position, it is configured to move horizontally without engaging the workpiece (or its mounting table)! RU
- this hoisting mechanism is not limited to a structure that is hoisted directly by the actuator, and may be a rack pion, chain drive, or other mechanism as long as the external force of the heating chamber 12 and the cooling chamber 22 can be raised and lowered. .
- the drive device 36 is provided adjacent to the opposite side of the heating chamber to the cooling chamber (left side in the figure) and has a function of moving the push-pull member 34 horizontally.
- the transport device 30 is a chain pusher puller type.
- the driving device 36 is connected to the end of the push-pull member 34 and horizontally moves, a horizontally moving chain 37a, a sprocket 37b that meshes with the horizontally moving chain, and a rotary motor that rotates the sprocket 37b (see FIG. Not shown).
- the free roller 33 for the push-pull member is installed in the cooling chamber 2. Provide for areas other than 2 as appropriate.
- the sprocket 37b is rotationally driven by the rotary motor, the horizontal movement chain 37a is moved horizontally, the push-pull member 34 is moved horizontally, and the engagement member 35 at the tip thereof is moved horizontally. Can do.
- the free roller 32 has only a function of supporting the article 1 to be moved so as to be movable in the horizontal conveyance direction, and almost no heat countermeasure is required, and the structure can be simplified.
- the transfer device 30 is used to move from the cooling chamber 22 to the heating chamber 12, and after the heating process, the heating chamber 12 moves from the heating chamber 12 to the cooling chamber 22. Can be taken out after cooling.
- the push-pull member 34 can be made to stand by to the left side of the heating chamber 12, so that each chamber can be kept airtight.
- the transport device 30 other than the free roller 32 is located in the non-heated area, so that overheating can be prevented without taking any special measures against heat.
- FIG. 4 is a cross-sectional view taken along line AA in FIG. As shown in this figure, the gas cooling furnace 20 further includes a gas cooling circulation device 40 and a cooling gas air path switching device 50.
- the cooling chamber 22 is provided in the container body 24b adjacent to the vacuum heating furnace 10 at a position close to the left side in this figure. Also, the gas cooling circulation device side (right side in the figure) of the cooling chamber 22 is divided by an intermediate rectifying plate 25a, and the opposite side (left side in the figure) is partitioned by a vertical rectifying plate 25b. A gas flow path having a substantially constant cross section is formed in the vertical direction.
- the inside of the cooling chamber 22 is a cooling region, and the article to be processed 1 is a small metal part such as a moving blade, a stationary blade, or a bolt of a jet engine, and is accommodated in a tray or a basket. In the center of 22 is placed on a mounting table 26 with air permeability and allowed to stand.
- the mounting table 26 is installed at the same height as the mounting table 15 of the vacuum heating furnace 10 and can freely move on the built-in roller.
- the gas cooling / circulation device 40 is attached to the side surface of the body portion of the container 24 in a direction orthogonal to the loading / unloading direction of the processed product 1 so as not to directly affect the loading / unloading of the processed product 1.
- a gas cooling / circulation device 40 is installed in the body of the container 24 adjacent to the cooling chamber 22 and sucks and pressurizes the gas that has passed through the cooling chamber 22, and a fixed partition plate.
- the cooling fan 42 is rotationally driven by a cooling fan motor 46 attached to the cylindrical container body 24b, and sucks the gas at the center thereof and discharges it from the outer periphery.
- Heat exchanger 44
- cooling fin tube 45 is, for example, a cooling fin tube whose interior is water-cooled.
- a hollow cylindrical cutting duct 47 that partitions the central portion (suction side) and the outer peripheral portion (discharge side) of the cooling fan 42 is provided, and the inside thereof is formed in a suction opening 52a of a fixed partition plate 52 described later. The outside communicates with the discharge opening 52b.
- the cooling gas air path switching device 50 includes a fixed partition plate 52, a sliding shielding plate 54, and a sliding drive device 56.
- the fixed partition plate 52 and the sliding shielding plate 54 partition the cooling chamber 22 and the gas cooling circulation device 40 vertically, and partially block between them.
- the sliding shielding plate 54 is driven to slide up and down by a sliding drive device 56 along the surface of the fixed partition plate 52.
- a sliding material (not shown) (for example, bearing, lead brass, graphite) force is attached between the fixed partition plate 52 and the sliding shielding plate 54 to at least one of them, reducing gas leakage therebetween and reducing sliding resistance. Reduce and smooth the movement.
- the sliding drive device 56 is a force rack and a pion which are pneumatic or hydraulic cylinders, and the present invention is not limited to this configuration, and other known drive devices (rack and pin) are used. Use -on).
- both ends are fixed to the central partition plate 55 for vertically partitioning between the fixed partition plate 52 and the cooling chamber 22 to the central portion of the fixed partition plate 52 and the intermediate rectifying plate 25a of the cooling chamber 22. Is provided.
- FIG. 5 is a cross-sectional view taken along line BB in FIG. 6A and 6B are operation explanatory views of the present invention.
- FIG. 6A shows the case where the sliding shielding plate 54 is located below
- FIG. 6B shows the case where the sliding shielding plate 54 is located above, with the plates 52 and 54 separated.
- the fixed partition plate 52 has a pair of upper and lower suction openings 52a and discharge openings 52b that communicate independently with the suction port and the discharge port of the gas cooling and circulation device, respectively.
- the size of each opening should be approximately the same.
- the outer periphery of the fixed partition plate 52 is airtightly fixed to the cylindrical container body 24b in FIG.
- the sliding shielding plate 54 includes shielding portions 54a and 54b that partially shield the suction opening 52a and the discharge opening 52b of the fixed partition plate.
- the shielding portions 54a and 54b simultaneously shield the upper suction opening 52a and the lower discharge opening 52b of the fixed partition plate.
- the shielding portions 54a and 54b slide to simultaneously shield the lower suction opening 52a and the upper discharge opening 52b.
- the sliding shielding plate 52 is simply slid up and down.
- the pair of suction openings 52a and discharge openings 52b can be switched, and the direction of gas passing through the cooling chamber can be switched alternately.
- FIG. 4, FIG. 5, and FIG. 6A show a state in which the sliding shielding plate 52 is slid downward.
- the gas 2 that has passed downward through the cooling chamber is subjected to heat exchange on the lower side.
- the air is cooled by the vessel 45, and sucked into the central portion (suction side) of the cooling fan 42 through the lower suction opening 52a.
- the gas 2 discharged from the outer peripheral portion (discharge side) of the cooling fan 42 passes through the upper discharge opening 52b, is cooled by the upper heat exchanger 44, flows downward into the cooling chamber, and circulates the gas. Is performed.
- FIG. 6B shows a state in which the sliding shielding plate 52 is slid upward.
- the gas 2 that has passed upward in the cooling chamber is cooled by the upper heat exchanger 44, and the upper side The air is sucked into the central portion (suction side) of the cooling fan 42 through the suction opening 52a. Further, the gas 2 discharged from the outer peripheral portion (discharge side) of the cooling fan 42 passes through the lower discharge opening 52b, is cooled by the lower heat exchange 45, flows into the cooling chamber upward, Gas circulation takes place.
- the sliding shield 54 is a sliding drive that moves vertically with respect to the flow direction (in this example, the horizontal direction), even the high pressure gas (gas body having a high density) is affected by the wind pressure.
- the air path can be switched smoothly and easily.
- the fixed partition plate 52 has a suction opening 52a and a discharge opening 52b that communicate independently with the suction port and the discharge port of the gas cooling circulation device 40, respectively. Since the shielding portions 54a and 54b that partially shield the suction opening and the discharge opening are provided, it is possible to perform stable gas cooling in which variation in the opening area and difference in the opening area between the suction port and the discharge port are unlikely to occur. In addition, the structure is simple and can be switched with a single driving device, and a large opening area can be secured.
- the present invention is not limited to the above-described embodiments, and can be freely changed without departing from the gist of the present invention.
- it can be used not only in a device in which a heating chamber and a cooling chamber are separated but also in a single-chamber furnace in which heating and cooling can be performed in one room.
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/575,430 US7377774B2 (en) | 2004-09-16 | 2004-09-16 | Change-over apparatus for cooling gas passages in vacuum heat treating furnace |
EP04773162A EP1801529B1 (en) | 2004-09-16 | 2004-09-16 | Change-over apparatus for cooling gas passages in vacuum heat treatment furnace |
CNB2004800440082A CN100483058C (zh) | 2004-09-16 | 2004-09-16 | 真空热处理炉的冷却气体风路切换装置 |
PCT/JP2004/013503 WO2006030504A1 (ja) | 2004-09-16 | 2004-09-16 | 真空熱処理炉の冷却ガス風路切替え装置 |
DE602004025991T DE602004025991D1 (de) | 2004-09-16 | 2004-09-16 | Kühlgasdurchgangsschalteinrichtung für unterdruckwärmebehandlungsofen |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2004/013503 WO2006030504A1 (ja) | 2004-09-16 | 2004-09-16 | 真空熱処理炉の冷却ガス風路切替え装置 |
Publications (1)
Publication Number | Publication Date |
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WO2006030504A1 true WO2006030504A1 (ja) | 2006-03-23 |
Family
ID=36059771
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2004/013503 WO2006030504A1 (ja) | 2004-09-16 | 2004-09-16 | 真空熱処理炉の冷却ガス風路切替え装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7377774B2 (ja) |
EP (1) | EP1801529B1 (ja) |
CN (1) | CN100483058C (ja) |
DE (1) | DE602004025991D1 (ja) |
WO (1) | WO2006030504A1 (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
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US7625204B2 (en) * | 2003-06-27 | 2009-12-01 | Ihi Corporation | Gas cooling type vacuum heat treating furnace and cooling gas direction switching device therefor |
US7771193B2 (en) | 2004-03-18 | 2010-08-10 | Ihi Corporation | Double-chamber type heat-treating furnace |
US7758339B2 (en) * | 2005-08-18 | 2010-07-20 | Jhawar Industries, Inc. | Method and apparatus for directional and controlled cooling in vacuum furnaces |
US20100248603A1 (en) * | 2009-03-31 | 2010-09-30 | Decastro Eugene | Retrofit Fume Hood Drive Assembly |
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WO2012037905A1 (de) * | 2010-09-24 | 2012-03-29 | Ipsen International Gmbh | Verfahren und einrichtung zur leitung der strömung in industrieöfen für die wärmebehandlung von metallischen werkstoffen/werkstücken |
US9187799B2 (en) | 2012-08-13 | 2015-11-17 | William R. Jones | 20 bar super quench vacuum furnace |
KR101627503B1 (ko) * | 2015-02-11 | 2016-06-07 | 주식회사 썸백 | 고온 진공 열처리로의 이송장치 |
JP6596703B2 (ja) * | 2015-03-04 | 2019-10-30 | 株式会社Ihi | 多室型熱処理装置 |
JP6338314B2 (ja) | 2015-05-26 | 2018-06-06 | 株式会社Ihi | 熱処理装置 |
DE102015011504A1 (de) * | 2015-09-09 | 2017-03-09 | Ipsen International Gmbh | Vorrichtung zur Behandlung von metallischen Werkstücken mit Kühlgas |
CN108027208B (zh) * | 2015-09-11 | 2020-01-17 | 光洋热系统股份有限公司 | 热处理装置 |
DE102018100745B3 (de) | 2018-01-15 | 2019-05-09 | Ebner Industrieofenbau Gmbh | Konvektionsofen |
JP7338818B2 (ja) * | 2019-11-28 | 2023-09-05 | 島津産機システムズ株式会社 | 熱処理炉 |
KR102238028B1 (ko) * | 2020-10-22 | 2021-04-08 | 주식회사 한화 | 기판 처리용 밀폐형 열처리 장치 |
CN113446842B (zh) * | 2021-05-08 | 2023-08-29 | 滁州华海中谊工业炉有限公司 | 一种高压高流率的气冷真空炉 |
CN114322566A (zh) * | 2022-01-03 | 2022-04-12 | 昇力恒(宁夏)真空科技股份公司 | 高温真空石墨烧结炉 |
JP2023107329A (ja) * | 2022-01-24 | 2023-08-03 | 芝浦メカトロニクス株式会社 | 熱処理装置、熱処理方法 |
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- 2004-09-16 WO PCT/JP2004/013503 patent/WO2006030504A1/ja active Application Filing
- 2004-09-16 DE DE602004025991T patent/DE602004025991D1/de active Active
- 2004-09-16 EP EP04773162A patent/EP1801529B1/en not_active Expired - Fee Related
- 2004-09-16 CN CNB2004800440082A patent/CN100483058C/zh not_active Expired - Fee Related
- 2004-09-16 US US11/575,430 patent/US7377774B2/en active Active
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JPH05230528A (ja) * | 1992-02-24 | 1993-09-07 | Daido Steel Co Ltd | 真空炉におけるガス循環冷却促進法 |
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Also Published As
Publication number | Publication date |
---|---|
CN100483058C (zh) | 2009-04-29 |
EP1801529B1 (en) | 2010-03-10 |
CN101018997A (zh) | 2007-08-15 |
DE602004025991D1 (de) | 2010-04-22 |
EP1801529A4 (en) | 2008-01-09 |
EP1801529A1 (en) | 2007-06-27 |
US7377774B2 (en) | 2008-05-27 |
US20070212657A1 (en) | 2007-09-13 |
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