WO2006022458A1 - 液体定量吐出装置 - Google Patents

液体定量吐出装置 Download PDF

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Publication number
WO2006022458A1
WO2006022458A1 PCT/JP2005/016073 JP2005016073W WO2006022458A1 WO 2006022458 A1 WO2006022458 A1 WO 2006022458A1 JP 2005016073 W JP2005016073 W JP 2005016073W WO 2006022458 A1 WO2006022458 A1 WO 2006022458A1
Authority
WO
WIPO (PCT)
Prior art keywords
negative pressure
liquid
pressure
container
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2005/016073
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
Kazumasa Ikushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Musashi Engineering Inc
Original Assignee
Musashi Engineering Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Musashi Engineering Inc filed Critical Musashi Engineering Inc
Priority to US11/574,183 priority Critical patent/US7527768B2/en
Priority to EP05776929.1A priority patent/EP1795270B1/en
Priority to HK07113099.6A priority patent/HK1107303B/xx
Publication of WO2006022458A1 publication Critical patent/WO2006022458A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C17/00—Hand tools or apparatus using hand held tools, for applying liquids or other fluent materials to, for spreading applied liquids or other fluent materials on, or for partially removing applied liquids or other fluent materials from, surfaces
    • B05C17/002—Hand tools or apparatus using hand held tools, for applying liquids or other fluent materials to, for spreading applied liquids or other fluent materials on, or for partially removing applied liquids or other fluent materials from, surfaces with feed system for supplying material from an external source; Supply controls therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G01F11/02—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement
    • G01F11/021—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement of the piston type
    • G01F11/023—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement of the piston type with provision for varying the stroke of the piston
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F11/00—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it
    • G01F11/02—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement
    • G01F11/021—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement of the piston type
    • G01F11/029—Apparatus requiring external operation adapted at each repeated and identical operation to measure and separate a predetermined volume of fluid or fluent solid material from a supply or container, without regard to weight, and to deliver it with measuring chambers which expand or contract during measurement of the piston type provided with electric controlling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F13/00—Apparatus for measuring by volume and delivering fluids or fluent solid materials, not provided for in the preceding groups

Definitions

  • the present invention discharges, from a syringe, a highly accurate electronic material such as a paste-like or cream-like material, an adhesive or other medium-high viscosity liquid material, a liquid material whose viscosity changes over time, and a low-viscosity liquid material.
  • a highly accurate electronic material such as a paste-like or cream-like material, an adhesive or other medium-high viscosity liquid material, a liquid material whose viscosity changes over time, and a low-viscosity liquid material.
  • the present invention relates to a liquid metering / dispensing device capable of performing precise metering / dispensing (operation) immediately after the power is turned on.
  • This liquid dispensing apparatus provides a connection between a syringe and an air supply source and an air suction source via a discharge solenoid valve. From the solenoid valve side between the discharge solenoid valve and the air supply source. An accumulator and a pressure-reducing pressure reducing valve are disposed in sequence, and an accumulator and a suction negative pressure reducing valve are sequentially disposed from the solenoid valve side between the discharge solenoid valve and the air supply source. A control unit that outputs a discharge signal to the solenoid valve for a predetermined time and outputs a pressure setting signal corresponding to at least the remaining amount of the liquid in the syringe to each of the pressure adjusting pressure reducing valve and the suction negative pressure reducing valve. Is provided. In such a quantitative discharge device, an embodiment in which the pressure adjusting pressure reducing valve and the suction negative pressure reducing valve are configured by an electropneumatic regulator is disclosed together with a circuit diagram.
  • Electric-pneumatic regulator means that it has its own pressure when adjusting the pressure on the secondary side as described in Japanese Patent Publication No. 7-50418.
  • the detected pressure value is compared with the set pressure value, and an air pressure pulse is supplied to the pi-mouth chamber by controlling the solenoid valve of the device according to the comparison result. Open or close the intake valve body or exhaust valve body connected to the pilot chamber, and adjust the discharge pressure discharged from the main valve to the set pressure value. It is a device and is known per se.
  • the negative pressure in the syringe immediately after turning on the power of the metering discharge device has a large variation compared with the negative pressure in the syringe after a while after turning on the power. I understood.
  • the negative pressure that acts on the liquid material in the syringe to prevent dripping is not stable immediately after the power is turned on, and if the negative pressure is insufficient, the negative pressure is communicated with the syringe and the discharge port is connected to the tip.
  • the liquid material dropped from the nozzle or the negative pressure was excessive, outside air was sucked from the nozzle tip.
  • An object of the present invention is to solve such a problem, and to provide a liquid material discharge device that can secure a stable negative pressure immediately after power-on of the discharge device and can be used stably immediately after power-on. .
  • a liquid dispensing apparatus having a negative pressure system that discharges a predetermined amount of liquid in a storage container at a time and applies a negative pressure to the liquid in the storage container during a pause of liquid discharge.
  • FIG. 1 is a circuit diagram showing an embodiment of a metering discharge device according to the present invention.
  • Fig. 1 is a circuit diagram of the liquid dispensing device, where the solid line shows the pressure circuit and the broken line shows the signal circuit.
  • pressurized gas supply means 2 (in the drawing, compressor 2a and pressure adjustment disposed on the downstream side thereof) supplies a pressurized pressure for liquid discharge to the syringe 1 that discharges the filled liquid.
  • a negative pressure supply means 4 (in the drawing, a negative pressure supply means 4 for supplying a negative pressure for holding liquid) into the syringe 1 is connected to the two-position switchable discharge valve 3.
  • An electropneumatic regulator 4 a for pressure adjustment and an ejector 4 b) on the downstream side thereof are connected to the discharge valve 3 via an atmosphere release valve 6 that can be switched between two positions.
  • the discharge valve 3 communicating with the syringe 1 communicates with either the pressurized gas supply means 2 or the negative pressure supply means 4 by position switching.
  • the operation of the discharge valve 3 based on the signal from the control unit 5 is controlled so that either the pressurized gas supply means 2 or the atmosphere release valve 6 communicates with the syringe 1.
  • the operation of the atmosphere release valve 6 based on the signal from the control unit 5 is controlled so that either the negative pressure supply means 4 or the atmosphere release port 7 communicates with the discharge valve 3.
  • the discharge of the liquid stored in the syringe 1 is performed by shifting the discharge valve 3 from the illustrated port position in accordance with a signal from the control unit 5, and depending on the remaining amount of liquid in the syringe 1 and the like. This is done by supplying the required pressurizing pressure adjusted by the controller 2 b into the syringe 1 for the required time.
  • the control means 5 When the discharge of a predetermined amount of liquid from the syringe 1 is finished, the control means 5 The discharge valve 3 is returned to the port position shown in the figure, and the atmosphere release valve 6 is shifted from the port position shown in the figure to release the pressurized gas in the syringe to the atmosphere. By returning the air release valve 6 to the port position shown in the figure, an appropriate negative pressure is applied to the liquid material in the syringe 1 by the negative pressure supply means 4.
  • the regulator 2b for adjusting the pressure of the pressurized gas supply means 2 functions to reduce the pressurized gas from the compressor 2a to the required pressure, and is downstream of the regulator 2b. The gas pressure can be measured by the pressure sensor 8a.
  • the negative pressure supply means 4 L The L tractor 4 b generates a negative pressure having a magnitude corresponding to the flow rate of the passing gas, and the negative pressure adjusting electropneumatic regulator 4 a is It functions to make the negative pressure created by L Kuta 4 b the required pressure. Then, the negative pressure downstream of the negative pressure adjusting electropneumatic regulator 4 b can be measured by the pressure sensor 8 b.
  • the port positions of the discharge valve 3 and the air release valve 6 are positions where the syringe 1 and the negative pressure supply means 4 are communicated.
  • the downstream pressure of the negative pressure adjusting electropneumatic regulator 4 b is measured by the pressure sensor 8 b.
  • the pressure measured by the pressure sensor 8 b is transmitted to the control unit 5, and it is determined whether or not the pressure is a desired pressure, and the negative pressure adjusting electropneumatic regulator 4 b is used as necessary. By controlling, the negative pressure measured by the pressure sensor 8 b is adjusted to a desired pressure.
  • the present invention can be applied to electronic materials in the form of pastes or creams, adhesives and other medium and high viscosity liquid materials, liquid materials whose viscosity changes over time, low viscosity liquid materials, etc.
  • the liquid ejection device that can immediately and accurately dispense quantitatively is provided, and is particularly effectively used in the field of semiconductor manufacturing such as LSI.

Landscapes

  • Coating Apparatus (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Reciprocating Pumps (AREA)
PCT/JP2005/016073 2004-08-26 2005-08-26 液体定量吐出装置 Ceased WO2006022458A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US11/574,183 US7527768B2 (en) 2004-08-26 2005-08-26 Liquid dispenser with vacuum control
EP05776929.1A EP1795270B1 (en) 2004-08-26 2005-08-26 Device for discharging fixed quantity of liquid
HK07113099.6A HK1107303B (en) 2004-08-26 2005-08-26 Device for discharging fixed quantity of liquid

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004247248A JP4704710B2 (ja) 2004-08-26 2004-08-26 液体定量吐出装置
JP2004-247248 2004-08-26

Publications (1)

Publication Number Publication Date
WO2006022458A1 true WO2006022458A1 (ja) 2006-03-02

Family

ID=35967642

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2005/016073 Ceased WO2006022458A1 (ja) 2004-08-26 2005-08-26 液体定量吐出装置

Country Status (7)

Country Link
US (1) US7527768B2 (enExample)
EP (1) EP1795270B1 (enExample)
JP (1) JP4704710B2 (enExample)
KR (1) KR100895234B1 (enExample)
CN (1) CN100566850C (enExample)
TW (1) TW200618866A (enExample)
WO (1) WO2006022458A1 (enExample)

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CN103318830A (zh) * 2013-07-01 2013-09-25 核工业理化工程研究院 精密真空注油自动线

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CN1311913C (zh) * 2004-10-28 2007-04-25 博奥生物有限公司 一种微量液体喷射系统
WO2007064036A1 (ja) * 2005-11-30 2007-06-07 Musashi Engineering, Inc. 液体塗布装置のノズルクリアランス調整方法および液体塗布装置
TWI332440B (en) 2007-11-01 2010-11-01 Ind Tech Res Inst A dropplet ejection device for a highly viscous fluid
US8220661B2 (en) * 2008-08-04 2012-07-17 Asm Assembly Automation Ltd Apparatus for dispensing measured quantities of liquid
JP2010131493A (ja) * 2008-12-03 2010-06-17 Juki Corp 液体吐出装置
JP5195607B2 (ja) * 2009-04-21 2013-05-08 パナソニック株式会社 ペースト塗布装置、電子部品接合装置、ペースト塗布方法及び電子部品接合方法
JP5195608B2 (ja) * 2009-04-21 2013-05-08 パナソニック株式会社 ペースト塗布装置、電子部品接合装置、ペースト塗布方法及び電子部品接合方法
JP5195626B2 (ja) * 2009-05-08 2013-05-08 パナソニック株式会社 ペースト塗布装置、電子部品接合装置、ペースト塗布方法及び電子部品接合方法
JP5195627B2 (ja) * 2009-05-08 2013-05-08 パナソニック株式会社 ペースト塗布装置、電子部品接合装置、ペースト塗布方法及び電子部品接合方法
JP5387149B2 (ja) * 2009-06-04 2014-01-15 パナソニック株式会社 ペースト塗布装置、電子部品接合装置、ペースト塗布方法及び電子部品接合方法
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CN104722446B (zh) * 2015-04-23 2016-09-28 吉林大学 一种自调节式电液耦合喷射点胶装置
CN105152117B (zh) * 2015-07-10 2017-10-20 核工业理化工程研究院 精密容积式真空自动注油设备
JP6541489B2 (ja) * 2015-07-24 2019-07-10 武蔵エンジニアリング株式会社 液体材料吐出装置
DE102015113372A1 (de) * 2015-08-13 2017-02-16 Marco Systemanalyse Und Entwicklung Gmbh Verfahren und vorrichtung zum dosieren
CN105149168B (zh) * 2015-10-29 2017-09-01 烟台拓展聚氨酯设备有限公司 一种注胶装置
EP3165880A1 (de) * 2015-11-05 2017-05-10 MARTIN GmbH Pneumatik-modul, dosierkopf und maschinenkopf für eine dosiervorrichtung
CN105772335A (zh) * 2016-05-10 2016-07-20 深圳市华星光电技术有限公司 一种封框胶涂布装置以及方法
JP6778426B2 (ja) * 2016-09-20 2020-11-04 武蔵エンジニアリング株式会社 液体材料吐出装置
US10401246B2 (en) * 2017-05-31 2019-09-03 Oerlikon Metco (Us) Inc. Powder feed control system and method
CN107552323A (zh) * 2017-10-19 2018-01-09 绵阳鑫阳知识产权运营有限公司 灌胶机的灌胶结构
WO2020066440A1 (ja) * 2018-09-26 2020-04-02 日本電産マシナリー株式会社 液体塗布装置
KR102594753B1 (ko) 2018-12-24 2023-10-27 충북대학교 산학협력단 흡입 기능을 갖는 유량 제어 밸브
CN110371917B (zh) * 2019-06-04 2020-12-11 北京空间飞行器总体设计部 一种流体回路自动加注装置及加注方法
CN111076090B (zh) * 2019-12-31 2021-11-05 中国东方电气集团有限公司 一种注水系统及控制方法
KR102337814B1 (ko) * 2020-08-05 2021-12-10 주식회사 클리셀 바이오 3d 프린터의 생체물질　적층을 위한 하방 분사 방식 네블라이저의 누액 방지 시스템
KR102400123B1 (ko) * 2020-08-21 2022-05-19 주식회사 지오테크놀로지 디스펜서 및 이를 통한 시린지 내 액체잔량 정밀 산출 방법
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See also references of EP1795270A4 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103318830A (zh) * 2013-07-01 2013-09-25 核工业理化工程研究院 精密真空注油自动线
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US7527768B2 (en) 2009-05-05
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TW200618866A (en) 2006-06-16
TWI314478B (enExample) 2009-09-11
KR20070083591A (ko) 2007-08-24
CN101005904A (zh) 2007-07-25
EP1795270A4 (en) 2009-02-25
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EP1795270B1 (en) 2016-07-27
EP1795270A1 (en) 2007-06-13
JP4704710B2 (ja) 2011-06-22
KR100895234B1 (ko) 2009-05-04
US20070227227A1 (en) 2007-10-04

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