WO2005117147A1 - Verfahren zur herstellung eines bereichs mit reduzierter elektrischer leitfähigkeit innerhalb einer halbleiterschicht und optoelektronisches halbleiterbauelement - Google Patents
Verfahren zur herstellung eines bereichs mit reduzierter elektrischer leitfähigkeit innerhalb einer halbleiterschicht und optoelektronisches halbleiterbauelement Download PDFInfo
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- WO2005117147A1 WO2005117147A1 PCT/DE2005/000753 DE2005000753W WO2005117147A1 WO 2005117147 A1 WO2005117147 A1 WO 2005117147A1 DE 2005000753 W DE2005000753 W DE 2005000753W WO 2005117147 A1 WO2005117147 A1 WO 2005117147A1
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- Prior art keywords
- layer
- semiconductor layer
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- semiconductor
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 101
- 230000005693 optoelectronics Effects 0.000 title claims abstract description 39
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 6
- 238000000034 method Methods 0.000 claims abstract description 33
- 238000000151 deposition Methods 0.000 claims description 11
- 230000008021 deposition Effects 0.000 claims description 9
- 238000000137 annealing Methods 0.000 claims description 8
- 230000007480 spreading Effects 0.000 claims description 4
- 238000003892 spreading Methods 0.000 claims description 4
- 238000005496 tempering Methods 0.000 claims description 4
- 238000004020 luminiscence type Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000002347 injection Methods 0.000 abstract description 3
- 239000007924 injection Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 7
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 238000002513 implantation Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02461—Phosphides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02463—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02551—Group 12/16 materials
- H01L21/02554—Oxides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/7605—Making of isolation regions between components between components manufactured in an active substrate comprising AIII BV compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
- H01L33/42—Transparent materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
Definitions
- the invention relates to a method for producing an electrically conductive III-V semiconductor layer according to the preamble of patent claim 1 and an optoelectronic semiconductor component according to the preamble of patent claims 16 or 17.
- connection contact In radiation-emitting optoelectronic components, no current is to be injected below an electrical connection contact (bond pad), since electromagnetic radiation which is generated in regions of the active zone below the connection contact would be absorbed to a relatively large extent within the connection contact, and therefore not could be coupled out of the component.
- the area of the optoelectronic surface through which a current flows Restrict the semiconductor component to a partial area of the semiconductor chip in order to achieve an increased charge carrier density in this partial area and thereby a shorter switching time of the optoelectronic component.
- Known methods for influencing the current path through a semiconductor component are the underlaying of an electrical connection contact with an insulating layer, the implantation of protons in partial regions of a semiconductor layer or the selective oxidation of epitaxially produced AlAs layers in order to produce current limiting diaphragms in this way.
- the invention is based on the object of specifying a method with which a region with reduced electrical conductivity can be produced within an electrically conductive III-V semiconductor layer with comparatively little effort, and an advantageous optoelectronic component with such a III-V semiconductor layer specify.
- This object is achieved by a method according to patent claim 1 or by optoelectronic semiconductor components according to patent claims 16 or 17.
- Advantageous refinements and developments of the invention are the subject of the dependent claims.
- a ZnO layer is applied to the region of the semiconductor layer and subsequently annealed.
- the method thus advantageously creates a region within a III-V semiconductor layer in which the electrical conductivity is reduced compared to the region or regions of the III-V semiconductor layer that adjoin the region with reduced conductivity.
- the III-V semiconductor layer has an electrical conductivity ⁇ i, and an area with a reduced electrical conductivity ⁇ 2 compared to ⁇ x is generated within the electrically conductive III-V semiconductor layer, so that ⁇ 2 ⁇ i.
- the ZnO layer is preferably deposited on the III-V semiconductor material at a temperature of less than 150 ° C., preferably between 25 ° C. and 120 ° C. inclusive.
- the ZnO layer is advantageously applied by means of sputtering.
- the subsequent annealing is preferably carried out at a temperature of about 300 ° C to 500 ° C.
- the ZnO layer can be structured, for example, using photolithography or a lift-off technique.
- the conductivity of the ZnO layer can be doped with Al, preferably with a concentration of up to 3%.
- the invention is based on the knowledge that the electrical conductivity, in particular also the transverse conductivity, of a III-V semiconductor layer can be influenced in a targeted manner by applying a ZnO layer and a subsequent annealing process.
- the reduction in the conductivity of the III-V semiconductor layer strongly depends on the temperature at which the ZnO layer is applied.
- a deposition temperature of less than 150 ° C. it is possible, for example, to reduce the conductivity of a III-V semiconductor layer by at least a factor of 2, preferably by at least a factor 5 and particularly preferably even by at least a factor 10.
- the conductivity of the III-V semiconductor layer is influenced at least less, preferably even only negligibly, by the application of a ZnO layer at a temperature of more than 150 ° C., for example at about 250 ° C., and subsequent annealing.
- the ZnO layer can be removed after the tempering or can also remain on the semiconductor layer and act as a current spreading layer, for example, within an optoelectronic component.
- the method according to the invention is particularly suitable for a III-V semiconductor layer which is one of the
- III-V semiconductor layer is preferably p-doped.
- the III-V semiconductor layer is contained in an optoelectronic component, in particular in a luminescence diode or in a semiconductor laser device.
- the optoelectronic component contains a radiation-emitting active zone and by means of the area with reduced electrical conductivity, the current flow through partial areas of the active zone is reduced.
- the area with reduced electrical conductivity is advantageously arranged between an electrical connection contact of the optoelectronic component and the active zone.
- An advantageous variant of the method according to the invention consists in depositing a first ZnO layer on a first region of the semiconductor layer and depositing a second ZnO layer on a second region of the semiconductor layer, the deposition temperature of the second ZnO layer compared to the deposition temperature of the first ZnO layer.
- Layer is increased in such a way that during the subsequent annealing the conductivity of the second region of the semiconductor layer is reduced at least less than the conductivity of the first region.
- the second ZnO layer is preferably applied at a temperature of more than 150 ° C., for example at about 250 ° C.
- an optoelectronic semiconductor component which contains a III-V semiconductor layer which has at least one region with reduced electrical conductivity produced by a method according to the invention.
- a preferred embodiment of an optoelectronic semiconductor component according to the invention has a III-V semiconductor layer which is covered with a ZnO layer in at least a first region, the conductivity in the semiconductor body being lower in the first region covered by the ZnO layer than in the laterally adjacent areas of the semiconductor layer.
- the electrical conductivity of the first region of the III-V semiconductor layer is advantageously lower by at least a factor of 2, preferably by at least a factor 5 and particularly preferably by at least a factor 10 than in the laterally adjacent regions of the semiconductor layer.
- the III-V semiconductor layer preferably contains one of the semiconductor materials In ⁇ - x - y Ga x Al y P with 0 ⁇ x + y ⁇ l, O ⁇ x ⁇ l, O ⁇ y ⁇ l or Al ⁇ _ x Ga x As with O ⁇ x ⁇ l.
- a second ZnO layer can be deposited on a second region of the semiconductor layer, the conductivity of the second region of the semiconductor layer being greater than the conductivity of the first region.
- first ZnO layer and the second ZnO layer can adjoin one another and be arranged between the III-V semiconductor layer and the connection contact of an optoelectronic component.
- the first ZnO layer and the second ZnO layer thus advantageously together form a current spreading layer.
- An optoelectronic semiconductor component preferably contains a radiation-emitting active zone, the region with reduced electrical conductivity between one electrical connection contact of the optoelectronic component and the active zone is arranged in order to reduce the current injection in a region of the active zone opposite the connection contact. This reduces the generation of radiation in this area and thus advantageously reduces the absorption in the final contact.
- FIG. 1 a shows a schematically illustrated top view of an optoelectronic component in accordance with a first exemplary embodiment of the invention
- FIG. 1b shows a schematic illustration of a cross section along the line AB of the exemplary embodiment of the invention shown in FIG.
- FIG. 2a shows a schematically illustrated plan view of an optoelectronic component in accordance with a second exemplary embodiment of the invention
- Figure 2b is a schematic representation of a cross section along the line CD of the embodiment of the invention shown in Figure 2a and
- Figure 2c is a schematic representation of a cross section along the line EF of the embodiment of the invention shown in Figure 2a.
- the same or equivalent elements are provided with the same reference numerals in the figures.
- the first exemplary embodiment of an optoelectronic component according to the invention shown in FIGS.
- the semiconductor layer sequence 3, 4, 5, which is shown only schematically in FIG. 1b, can have any desired embodiment for luminescence diodes or semiconductor laser devices within the scope of the invention.
- quantum layers can also be provided as radiation-emitting active zone 4.
- a second ZnO layer 6 which, in contrast to the first ZnO layer, was applied at a higher deposition temperature of more than 150 ° C., for example about 250 ° C.
- the first ZnO layer 1 and the second ZnO layer 6 can be applied, for example, in such a way that the second ZnO layer 6 is applied over the whole area to the III-V semiconductor layer 3 and then covered with a mask layer which contains an opening in the partial area provided for the first ZnO layer.
- the second ZnO layer 6 is removed in this partial area, for example using an etching process, and then the first ZnO layer 1 is applied at a deposition temperature of less than 150 ° C.
- a first connection contact 7 is then applied. From the areas of the second ZnO layer 6 covered with the mask layer, the material of the first ZnO layer 1 and the connecting contact 7 deposited there can be lifted off together with the mask layer (lift-off technique).
- the tempering is then carried out at a temperature between 300 ° C. and 500 ° C. in order to produce the region 8 below the first ZnO layer 1 with reduced electrical conductivity.
- the current flow from an electrical connection contact 7 on the first ZnO layer 1 to a second connection contact 9, which is arranged, for example, on the rear side of the substrate 2 facing away from the active zone 4, is advantageously in the areas the active zone 4, which are not opposite the connection contact 7.
- the preferred current path from the connection contact 7 to the active zone 4 within the semiconductor layer 3 is indicated in FIG. 1b by the arrows 10.
- This course of the current path 10 has the advantage that only a relatively small proportion of the radiation emitted by the optoelectronic component is generated in the regions of the active zone 4 opposite the connection contact 7 , whereby the absorption losses in the connection contact 7 are reduced.
- the first ZnO layer 1 and the second ZnO layer 6 adjoin one another and together form a current spreading layer.
- the ZnO layers 1, 6 are advantageously doped with up to three percent Al. Due to the good transverse conductivity of the ZnO layers 1, 6, which is also retained in the annealing process step, the current from the connection contact 7 through the first ZnO layer 1 and the second ZnO layer 6 into the areas with or not slightly reduced electrical conductivity of the III-V semiconductor layer 3 are injected.
- the second exemplary embodiment of an optoelectronic component according to the invention shown in FIGS. 2a, 2b and 2c differs from that shown in FIG. 1 essentially in that the current injection into the semiconductor layer 3 does not have a second ZnO layer 6, but rather an structured form on the semiconductor layer 3 applied contact layer 11 takes place.
- the contact layer 11 is preferably a metal layer which is suitable for forming an ohmic contact on the semiconductor layer 3 and can in particular contain Au, Zn or a compound of these materials.
- the contact layer 11 is structured such that it describes the outline of a square when viewed from above. Alternatively, the contact layer 11 can also have a different structuring.
- the contact layer 11 is connected to the centrally arranged connection contact 7 via connecting webs 12.
- the connection contact 7 is arranged on the first ZnO layer 1, which according to the previously described method for reducing the conductivity of the areas below it to III -V semiconductor layer 3 was applied and annealed.
- the conductivity of the semiconductor layer 3 is therefore also reduced in this exemplary embodiment in a region 8 which lies opposite the connection contact 7, so that the current is impressed through the contact layer 11 preferably in those regions of the active zone 4 which do not lie opposite the connection contact 7.
- the absorption of the radiation emitted by the optoelectronic component in the connection contact 7 is thereby reduced and thus the efficiency of the component is increased.
- the invention is not limited by the description based on the exemplary embodiments. Rather, the invention encompasses every new feature and every combination of features, which in particular includes every combination of features in the patent claims, even if this feature or this combination itself is not explicitly specified in the patent claims or exemplary embodiments.
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
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- Semiconductor Lasers (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/597,928 US8293553B2 (en) | 2004-05-28 | 2005-04-25 | Method for producing an area having reduced electrical conductivity within a semiconductor layer and optoelectronic semiconductor element |
JP2007513666A JP5044394B2 (ja) | 2004-05-28 | 2005-04-25 | 半導体層内に導電率が低減されている領域を形成する方法およびオプトエレクトロニクス半導体素子 |
KR1020067027371A KR100900114B1 (ko) | 2004-05-28 | 2005-04-25 | 반도체 층 내부에 전기 전도도가 감소하는 영역을 형성하기위한 방법 및 광전 반도체 소자 |
EP05747600.4A EP1749317B1 (de) | 2004-05-28 | 2005-04-25 | Verfahren zur herstellung eines bereichs mit reduzierter elektrischer leitfähigkeit innerhalb einer halbleiterschicht und optoelektronisches halbleiterbauelement |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004026231.4A DE102004026231B4 (de) | 2004-05-28 | 2004-05-28 | Verfahren zur Herstellung eines Bereichs mit reduzierter elektrischer Leitfähigkeit innerhalb einer Halbleiterschicht und optoelektronisches Halbleiterbauelement |
DE102004026231.4 | 2004-05-28 |
Publications (1)
Publication Number | Publication Date |
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WO2005117147A1 true WO2005117147A1 (de) | 2005-12-08 |
Family
ID=34969016
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/DE2005/000753 WO2005117147A1 (de) | 2004-05-28 | 2005-04-25 | Verfahren zur herstellung eines bereichs mit reduzierter elektrischer leitfähigkeit innerhalb einer halbleiterschicht und optoelektronisches halbleiterbauelement |
Country Status (7)
Country | Link |
---|---|
US (1) | US8293553B2 (de) |
EP (1) | EP1749317B1 (de) |
JP (1) | JP5044394B2 (de) |
KR (1) | KR100900114B1 (de) |
CN (2) | CN101702399B (de) |
DE (1) | DE102004026231B4 (de) |
WO (1) | WO2005117147A1 (de) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007124708A1 (de) * | 2006-04-27 | 2007-11-08 | Osram Opto Semiconductors Gmbh | Optoelektronischer halbleiterchip |
WO2008092417A1 (de) * | 2007-01-31 | 2008-08-07 | Osram Opto Semiconductors Gmbh | Optoelektronischer halbleiterchip und verfahren zur herstellung einer kontaktstruktur für einen derartigen chip |
WO2008112064A2 (en) * | 2007-03-08 | 2008-09-18 | Cree, Inc. | Light emitting devices having current reducing structures and methods of forming light emitting devices having current reducing structures |
US8410490B2 (en) | 2005-01-24 | 2013-04-02 | Cree, Inc. | LED with current confinement structure and surface roughening |
EP2533308A3 (de) * | 2008-11-24 | 2013-05-29 | LG Innotek Co., Ltd. | Lichtemittierende Vorrichtung und Verfahren zu ihrer Herstellung |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004026231B4 (de) | 2004-05-28 | 2019-01-31 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines Bereichs mit reduzierter elektrischer Leitfähigkeit innerhalb einer Halbleiterschicht und optoelektronisches Halbleiterbauelement |
DE102005061797B4 (de) * | 2005-12-23 | 2020-07-09 | Osram Opto Semiconductors Gmbh | Lumineszenzdiodenchip mit Stromaufweitungsschicht und Verfahren zu dessen Herstellung |
KR101020945B1 (ko) * | 2009-12-21 | 2011-03-09 | 엘지이노텍 주식회사 | 발광 소자, 발광 소자 패키지 및 발광 소자 제조방법 |
DE102018127201A1 (de) * | 2018-10-31 | 2020-04-30 | Osram Opto Semiconductors Gmbh | Optoelektronischer halbleiterchip und verfahren zur herstellung eines optoelektronischen halbleiterchips |
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EP0723285A2 (de) | 1995-01-19 | 1996-07-24 | Oki Electric Industry Co., Ltd. | Diffusionsmaske und Herstellungsverfahren von PN-Übergängen in einem Verbindungshalbleitersubstrat |
DE102004026231A1 (de) | 2004-05-28 | 2005-12-22 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines Bereichs mit reduzierter elektrischer Leitfähigkeit innerhalb einer Halbleiterschicht und optoelektronisches Halbleiterbauelement |
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US3798083A (en) * | 1971-04-15 | 1974-03-19 | Monsanto Co | Fabrication of semiconductor devices |
JPH0777278B2 (ja) * | 1988-12-09 | 1995-08-16 | 三菱電機株式会社 | 半導体レーザおよびその製造方法 |
JP2752423B2 (ja) * | 1989-03-31 | 1998-05-18 | 三菱電機株式会社 | 化合物半導体へのZn拡散方法 |
JP2566661B2 (ja) * | 1990-04-18 | 1996-12-25 | 三菱電機株式会社 | 不純物拡散方法 |
US5135581A (en) * | 1991-04-08 | 1992-08-04 | Minnesota Mining And Manufacturing Company | Light transmissive electrically conductive oxide electrode formed in the presence of a stabilizing gas |
JP3151096B2 (ja) | 1993-12-15 | 2001-04-03 | シャープ株式会社 | 半導体発光素子 |
JPH07307490A (ja) | 1994-05-10 | 1995-11-21 | Daido Steel Co Ltd | 半導体光電素子に対するZnO膜形成方法 |
JPH07307409A (ja) | 1994-05-12 | 1995-11-21 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JPH11112078A (ja) | 1997-09-30 | 1999-04-23 | Hitachi Ltd | 半導体レーザ素子 |
JPH11274635A (ja) * | 1998-03-19 | 1999-10-08 | Hitachi Ltd | 半導体発光装置 |
JP2000138419A (ja) | 1998-11-04 | 2000-05-16 | Hitachi Ltd | 半導体レーザ素子及びその製造方法 |
JP3276930B2 (ja) * | 1998-11-17 | 2002-04-22 | 科学技術振興事業団 | トランジスタ及び半導体装置 |
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2004
- 2004-05-28 DE DE102004026231.4A patent/DE102004026231B4/de not_active Expired - Lifetime
-
2005
- 2005-04-25 US US11/597,928 patent/US8293553B2/en active Active
- 2005-04-25 CN CN200910212134.9A patent/CN101702399B/zh active Active
- 2005-04-25 WO PCT/DE2005/000753 patent/WO2005117147A1/de active Application Filing
- 2005-04-25 EP EP05747600.4A patent/EP1749317B1/de active Active
- 2005-04-25 KR KR1020067027371A patent/KR100900114B1/ko active IP Right Grant
- 2005-04-25 CN CN200580017279.3A patent/CN100576584C/zh active Active
- 2005-04-25 JP JP2007513666A patent/JP5044394B2/ja active Active
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EP0723285A2 (de) | 1995-01-19 | 1996-07-24 | Oki Electric Industry Co., Ltd. | Diffusionsmaske und Herstellungsverfahren von PN-Übergängen in einem Verbindungshalbleitersubstrat |
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Also Published As
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EP1749317B1 (de) | 2017-01-18 |
KR100900114B1 (ko) | 2009-06-01 |
US8293553B2 (en) | 2012-10-23 |
CN101702399B (zh) | 2013-04-03 |
CN100576584C (zh) | 2009-12-30 |
EP1749317A1 (de) | 2007-02-07 |
CN101702399A (zh) | 2010-05-05 |
DE102004026231A1 (de) | 2005-12-22 |
US20090008751A1 (en) | 2009-01-08 |
KR20070034526A (ko) | 2007-03-28 |
JP5044394B2 (ja) | 2012-10-10 |
CN101099244A (zh) | 2008-01-02 |
JP2008500710A (ja) | 2008-01-10 |
DE102004026231B4 (de) | 2019-01-31 |
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