Classifications

• • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
  • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
  • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
  • F16K31/00—Actuating devices; Operating means; Releasing devices
  • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
  • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid

Definitions

• the present invention relates to a flow characteristic adjustment mechanism of a solenoid proportional valve that controls a flow of a control fluid in proportion to an attraction force generated by an applied current applied to a coil, and a flow characteristic adjustment method using the same.
• microfabrication proceeds, and a control fluid such as a process gas is precisely controlled by a solenoid proportional valve.
• a flapper type electromagnetic proportional valve is used to prevent the occurrence of particles.
• FIG. 8 is a cross-sectional view of a solenoid proportional valve 100 adopting a flapper system.
• an inlet flow passage 102 and an outlet flow passage 103 are formed in a body 101, and a valve chamber 104 is provided in the communication portion.
• a valve seat 105 is provided in the valve chamber 104, and the inlet channel 102 and the outlet channel 103 communicate with each other through the valve seat 105.
• a holding member 106 made of a magnetic material is fitted in the body 101, and a panel panel 107 is held between the body 101 and the holding member 106.
• a valve seat 109 is attached to the center of the plate panel 107, and the valve seat 109 is pressed against the valve seat 105 by the mounting load of the plate panel 107.
• the panel 107 is welded to the plunger 110 to form an integral structure.
• the outer edge of the plate panel 107 is sandwiched between the upper spacer 117 and the lower spacer 118, and the position of the plate panel 107 is adjusted with respect to the plunger 110, the valve seat 105, and the like.
• the fixed core 112 is supported by the holding member 106 via an annular fitting member 111 made of nonmagnetic material, and is disposed coaxially with the plunger 110.
• the stationary core 112 is loaded on the coil bobbin 114 wound with the coil 113, and when current is supplied to the coil 113, the stationary core 112 and the holding member 106 are excited and the plunge against the restoring force of the plate panel 107. It is designed to aspirate the
• the bonnet 115 is put on the coil bobbin 114, and the lower end opening portion is in contact with the holding member 106 and is fixed to the fixed core 112 via the fixing screw 116.
• a coil 113 is surrounded by a fixed core 112, a holding member 106, and a bonnet 115 to form a magnetic circuit, and a magnetic circuit is formed. Operates at a point where the suction force generated in the fixed core 112 is not equal to the combined force (seal load). That is, the solenoid proportional valve 100 controls the flow rate of the control fluid in proportion to the suction force generated by the applied current applied to the coil 113. Since the suction force of the stationary core 112 acting on the plunger 110 is determined between the plunger 110 and the stationary core 112, the proportional solenoid valve 100 increases the distance between the plunger 110 and the stationary core 112. The flow rate characteristics are adjusted by changing the thickness 117.
• FIG. 9 is a diagram showing flow rate characteristics.
• FIG. 10 is a view showing suction force characteristics of the conventional solenoid proportional valve 100. As shown in FIG.
• the solenoid proportional valve 100 obtains the flow characteristic A shown in FIG. 9, and the operation stroke St Is set to 0.10 mm, the flow characteristic B shown in FIG. 9 is obtained, and when the operation stroke St is set to 0.20 mm, the flow characteristic C shown in FIG. 9 is obtained.
• the adjustment of the flow rate characteristic of the solenoid proportional valve 100 under this condition will be described.
• the solenoid proportional valve 100 aligns the panel panel 107 with the reference surface to secure a predetermined seal load, and the upper spacer 117 so that the distance between the plunger 110 and the fixed iron core 112 becomes a predetermined value S. Adjust the thickness of the assembly.
• panel panel 107 has a predetermined panel constant, and when an applied magnetic force of 400 AT is applied to coil 113, fixed core 112 has an attractive force curve as shown in the figure. Draw.
• the proportional solenoid valve 100 when the suction force generated by the applied current applied to the coil 112 becomes larger than the mounting load of the plate panel 107 (point L1), the plunger 110 starts to move and the fluid starts to flow.
• L1 be the valve opening start position where the valve starts to open. Thereafter, the proportional solenoid valve 100 balances the suction force with the force applied to the plunger 110 at F1 point, and the plunger 110 moves to L2. Therefore, the movement stroke St of the plunger 110 is a distance of 0.15 mm from L1 to L2, and the solenoid proportional valve 100 is adjusted to the flow rate characteristic A.
• the solenoid proportional valve 100 adjusted to the flow rate characteristic A is in the basic state.
• the spacer 117 is made thicker than in the basic state, and the distance between the plunger 110 and the fixed core 112 is made larger than the predetermined value S.
• the set position of the panel panel 107 changes, so the panel diagram becomes to the right in the figure. It moves in parallel and is set to the panel diagram K1. Therefore, the valve opening start position L1 is changed to the valve opening start position L3, the operation stroke St of the plunger 110 becomes 0.10 mm, and the solenoid proportional valve 100 is adjusted to the flow rate characteristic B.
• the spacer 117 above the basic state is made thinner and the distance between the plunger 110 and the fixed core 112 is made smaller than the predetermined value S. .
• the attractive force curve when applying the applied magnetic force 400AT to the coil 112 does not change, so the set position of the panel 107 changes, so the panel diagram K moves in the left direction in the drawing and the panel Set to diagram K2. Therefore, the valve opening start position L1 is changed to the valve opening start position L4, the operation stroke St of the plunger 110 becomes 0.20 mm, and the solenoid proportional valve 100 is adjusted to the flow characteristic C (see, for example, Patent Document 1).
• Patent Document 1 Japanese Patent Application Laid-Open No. 2002-357280
• the solenoid proportional valve 100 stacks the lower spacer 118, the panel panel 107, and the upper spacer 117 with respect to the body 101, and further fits the holding member 106 into the body 101, thereby the plunger 110 and the fixed core 112
• the absolute accuracy of the distance between them and the distance between the plunger 110 and the fixed core 112 fluctuated from product to product due to the effects of component tolerances and assembly tolerances.
• the proportional solenoid valve 100 measures the part tolerance of each part to determine the thickness of the upper spacer 117, adjusts the distance between the plunger 110 and the fixed iron core 112, and the assembly man-hour of the part There were many. Also, if it is found that the desired flow characteristics can not be obtained after assembling the product, the parts are disassembled and the upper spacer 11 The thickness of 7 had to be readjusted, and it took time and effort to adjust the flow characteristics.
• Japanese Patent Application No. 2002-355121 the applicants provide a bent portion at the outer edge of the panel, and bend the portion according to the amount of screwing the holding member into the body.
• the electromagnetic proportional valve disclosed in Japanese Patent Application No. 2002-355121 has a disadvantage that the flow characteristic can not be adjusted after the body and the holding member are welded and assembled.
• the present invention has been made to solve the above-mentioned problems, and the flow characteristic characteristic of an electromagnetic proportional valve capable of easily adjusting the flow characteristic of an electromagnetic proportional valve even after product assembly
• An object of the present invention is to provide a flow characteristic adjustment method using the same.
• the flow rate characteristic adjusting mechanism of the solenoid proportional valve according to the present invention and the flow rate characteristic adjusting method using the same have the following configuration.
• a fixed iron core having a biasing member always biased in a direction, an intermediate coupling body interposed between the coil bobbin and the body, and a covering member removably put on the coil bobbin so as to contact the intermediate coupling body;
• the intermediate coupling body and the covering member form a magnetic circuit by surrounding the coil, and the fixed iron core attracts the movable iron core against the biasing member according to the applied current supplied to the coil.
• the moving means is characterized in that the covering member is moved in the axial direction by a screw feed mechanism.
• the moving means includes an elastic member disposed between the covering member and the stationary core, and the covering member being screwed to the stationary core. And a fixing screw.
• the moving means includes a first fixed core fixed to the hollow hole of the coil bobbin from the body side, and the first core fixed to the fixed core.
• the coil bobbin is divided into a second fixed iron core rotatably loaded in the bore of the coil bobbin, and the second fixed iron core is screwed to the first fixed iron core, and the covering member is brought into surface contact with the second fixed iron core.
• the moving means is characterized by comprising a female screw portion provided on the covering member side and a male screw portion provided on the coil bobbin side.
• the applied current is not supplied to the coil.
• Supply current to the coil the flow rate of the fluid output from the second flow path is measured by the flow rate measuring means, and the coating is performed by the moving means until the flow rate measuring means measures the predetermined value.
• the member is moved in the axial direction to change the magnetic path to adjust the flow rate.
• the flow characteristic adjustment mechanism of the solenoid proportional valve having the above configuration and the flow characteristic adjustment method using the same have the following effects.
• the movable iron core when the coil is not energized, the movable iron core is biased toward the valve seat by the biasing member, and the valve body is pressed against the valve seat with a predetermined seal load.
• a predetermined application current is supplied to the coil, a magnetic path is formed around the coil and the stationary core is excited.
• the movable core is attracted to the stationary core, moves to a position where the attracting force of the stationary core and the biasing force of the biasing member are balanced, and causes the valve body to move away from the valve seating force.
• the fluid is adjusted in flow rate according to the valve opening degree when passing through the valve seat from the first flow passage, and then output from the second flow passage.
• a coil In the electromagnetic proportional valve, a coil is surrounded by a fixed core, an intermediate connector, and a covering member to form a magnetic circuit, and when the coil is energized, a magnetic path is formed around the coil.
• the flow characteristic adjustment mechanism of the proportional solenoid valve and the flow characteristic adjustment method using it pay attention to the fact that the attraction of the fixed iron core changes when the magnetic path changes, and the magnetic path formed around the coil is Vary to adjust the flow rate to the applied current.
• the covering member is detachably mounted on the coil bobbin, and even after the product is assembled It moves in the axial direction by operating the moving means.
• the covering member moves in the axial direction, the contact area between the covering member and the intermediate joint is changed to change the magnetic circuit, and the magnetic path is expanded or narrowed.
• the magnetic path is expanded, the magnetic resistance on the magnetic circuit is reduced, so that the attraction force of the fixed iron core is increased.
• the magnetic path is narrowed, the magnetic resistance on the magnetic circuit is increased. Suction force decreases.
• the proportional solenoid valve can move the coating member in the axial direction to adjust the suction force of the fixed core, and finally adjust the flow characteristic which is a proportional characteristic of the applied current and the flow.
• the proportional solenoid valve when adjusting the flow characteristic of the proportional solenoid valve, the proportional solenoid valve is assembled without measuring the component crossing of each part, and the fluid is supplied to the first flow passage in a state where the coil is not energized. Do. Fluid flows from the first flow path to the valve seat and is shut off.
• a predetermined applied current is supplied to the coil, a magnetic field is generated around the coil, and the fixed core is excited.
• the movable core moves in accordance with the suction force of the fixed core, causing the valve body to move away from the valve seat.
• the flow rate is adjusted by the valve opening degree at which the valve body is separated from the valve seat, and the fluid is output from the second flow path. Therefore, the flow rate of the fluid output from the second flow path is measured by the flow rate measuring means.
• the moving means operate the moving means while looking at the measurement result of the flow rate measuring means, move the covering member in the axial direction, and change the contact area between the covering member and the intermediate connection body, thereby changing the suction force of the fixed core.
• the measurement result of the flow rate measuring means is adjusted to a predetermined value.
• the predetermined value means the target flow rate with respect to the current applied to the coil. This allows the proportional solenoid valve to be adjusted to the desired flow rate characteristics.
• the flow characteristic of the solenoid proportional valve can be easily adjusted even after the product is assembled.
• the position of the covering member can be finely adjusted by the feed amount of screw feeding.
• An elastic member is disposed between the covering member and the stationary core, and the fixing screw penetrated through the covering member Is screwed into the fixed iron core against the pressure of the elastic member and the position of the covering member is adjusted, the contact area of the covering member and the intermediate joint changes, and the gap between the covering member and the fixed iron core also changes. And the magnetic path changes. Therefore, according to the present invention, since the contact area between the covering member and the intermediate joint member and the gap between the covering member and the fixed core relatively change to change the magnetic path, the suction of the fixed core is realized. The rate of change of force increases, and the flow characteristics can be adjusted more precisely.
• the stationary core is divided into a first stationary core and a second stationary core
• the second stationary core is screwed to the first stationary core, between the first stationary core and the second stationary core.
• There is a gap in the The gap is changed by pinching and rotating the second stationary core and adjusting the screwing amount to the first stationary core.
• the covering member is placed on the coil bobbin so as to be in surface contact with the second stationary core and in contact with the intermediate connector. Therefore, the covering member is adjusted in position by the position of the second stationary core, and the contact area between the covering member and the intermediate coupling body is changed.
• the fixation is achieved.
• the rate of change of the suction force of the core increases, and the flow characteristics can be adjusted more precisely.
• the covering member is screwed into the external thread on the coil bobbin side by pinching and rotating the covering member, whereby the covering member is axially oriented. Moving.
• the covering member can be moved in the axial direction without using a tool, which is convenient.
• FIG. 1 is a cross-sectional view of a solenoid proportional valve according to a first embodiment of the present invention, showing a state after adjustment of flow rate characteristics.
• FIG. 2 A sectional view of the same proportional solenoid valve, showing the state before adjusting the flow rate characteristic.
• FIG. 3 A drawing showing suction force characteristics when a predetermined applied magnetic force is applied to the same electromagnetic proportional valve, and shows suction force characteristics in the basic state, the first state, and the second state.
• FIG. 4 is a cross-sectional view of a proportional solenoid valve according to a second embodiment of the present invention.
• FIG. 5 is a cross-sectional view of a solenoid proportional valve according to a third embodiment of the present invention.
• FIG. 6 is a cross-sectional view of a proportional solenoid valve according to a fourth embodiment of the present invention.
• FIG. 7 is a modified example of the solenoid proportional valve according to the present invention.
• FIG. 8 is a cross-sectional view of a conventional proportional solenoid valve.
• FIG. 9 is a diagram showing flow rate characteristics.
• FIG. 10 is a view showing suction force characteristics of a conventional solenoid proportional valve.
• FIG. 1 is a cross-sectional view of the solenoid proportional valve 1A, showing a state after adjusting the flow rate characteristic.
• FIG. 2 is a cross-sectional view of the solenoid proportional valve 1A, showing a state before adjusting the flow rate characteristic.
• the solenoid proportional valve 1A is used, for example, to control a process gas in a semiconductor manufacturing process, and is proportional to the electromagnetic attraction force of the coil 17 to be a plunger (corresponding to a "movable iron core") 1
• the suction movement of 0 is performed to separate the valve seat (corresponding to the “valve body”) 12 from the valve seat 6 to control the flow rate of the control fluid.
• the solenoid proportional valve 1A connects the body 2 and the coil bobbin 16 via a first core (corresponding to an “intermediate coupling body”) 9 to form a bonnet (corresponding to a “cover member”.
• the external appearance is formed in a substantially cylindrical shape by covering the coil bobbin 14 so as to bring 19 into contact with the first core 9.
• Body 2 has a block shape in which an inlet channel (corresponding to a “first channel”) 3 and an outlet channel (corresponding to a “second channel”) 4 are formed.
• the valve chamber 5 is provided coaxially with the first flow passage 3 to communicate the first flow passage 3 and the second flow passage 4, and an opening portion in which the inlet flow passage 3 is opened.
• a valve seat 6 is annularly protruded around the.
• a step 7 is provided around the valve seat 6 to set a reference surface of the plate panel 8.
• the outer diameter of the panel panel 8 is set to substantially the same diameter as the opening of the body 2, and the outer core is fitted to the body 2 after being placed on the step 7 of the body 2. It is pinched with the first core 9.
• a plunger 10 is welded to the central portion of the panel 8.
• the plunger 10 is stacked on the panel 8 in a state where the valve seat 12 is attached to the valve body storage 11, and the panel 8 is spot-welded to the plunger 10 to obtain the panel 8, the plunger 10 and the valve sheet 12.
• the valve sheet 12 is formed of a thermoplastic elastic material such as rubber, PTFE (polytetrafluoroethylene), PTEE (tetrafluorinated ethylene resin), etc., and the mirror surface is applied to the sealing surface in contact with the valve seat 6 To improve sealing performance.
• the third core (corresponding to a “fixed core”) 15 is a ferromagnetic material formed into a cylindrical shape.
• the third core 15 is pressed into the first core 9 via the second core 14 and welded or welded. It is held by brazing.
• the coil bobbin 16 is formed of a magnetic material in a hollow cylindrical shape, and a coil 17 is wound around a body.
• the coil bobbin 16 is fitted to the third core 16 so as to abut on the first core 9 and the second core 14.
• the third core 15 is inserted into the hollow hole of the coil bobbin 16 by the amount of accommodating the washer (corresponding to “elastic member”) 18.
• the bonnet 19 is formed in a cylindrical shape in which a magnetic material is opened to one side.
• the bonnet 19 is fixed to the third core 15 by a fixing screw 22 screwed into the screw hole 21 of the third core 15 from the through hole 20 through the washer 18.
• the lower end portion of the third core 15 protrudes from the second core 14 and is present in the valve chamber 5 so as to face the inner peripheral surface of the first core 9.
• the second core 14 is a nonmagnetic material
• the first core 9 and the third core 15 are magnetic materials. Therefore, a magnetic leakage space may be generated between the first core 9 and the third core 15. 25 are annularly formed.
• a portion inserted into the body 2 is formed in a step-like shape as a (side cross section) of a side wall with the valve chamber 5. Further, the positional relationship between the lower end portion of the third core 15 and the hollow portion of the plunger 10 is such that the lower end portion of the third core 15 is inserted without contacting the hollow portion of the plunger 10.
• the positional relationship between the step-like portion of the first core 9 (the side wall of the valve chamber 5) and the projecting edge 26 of the ring-shaped plunger 10 is such that the plunger 10 moves either vertically upward or vertically downward. Even, the flange 26 of the plunger 10 Does not contact the portion on the step of the first core 9 (the side wall of the valve chamber 5).
• the “moving means” is configured by the fixing screw 22, the through hole 20 of the bonnet 19, the screw hole 21 of the third core 15, and the washer 18.
• the “screw feeding mechanism” is configured by the fixing screw 22 and the screw hole 21 of the third core 15! .
• valve sheet 12 has a combined force (seal load) of the self weight of the plunger 10 and the panel force of the plate panel 8. Is pressed against the valve seat 6 and the valve seat 6 is closed. Therefore, even if the control fluid is supplied to the inlet channel 3, the control fluid is blocked at the valve seat 6.
• the plunger 10 moves in a vertically upward direction without sliding so as to fill the magnetic leakage space 25 between the third core 15 and the first core 9, the suction force and the seal load of the third core 15 are balanced. Stop in the fully open position, and the valve seat 12 separates from the valve seat 6 and opens the valve seat 6. That is, the example solenoid valve operates with an opening proportional to the magnetic force of the applied current applied to the coil 17.
• the control fluid is controlled to flow according to the distance between the valve seat 12 and the valve seat 6 when passing from the first flow path 3 to the valve seat 6, and then from the outlet flow path 4 It is output.
• the flow rate characteristic adjusting mechanism of the proportional solenoid valve 1A and the flow rate characteristic adjusting method using the same are formed around the coil 17, noting that the attraction force of the third core 15 changes when the magnetic path changes. The magnetic path is changed to adjust the flow rate to the applied current.
• the bonnet 19 of the solenoid proportional valve 1A is detachably mounted on the coil bobbin 16, and moves axially by rotating the fixing screw 22 even after the product is assembled (see FIGS. 1 and 2).
• the contact area (see M1 in FIG. 1 and M2 in FIG. 2) in which the bonnet 19 and the first core 9 contact in the circumferential direction is changed, the magnetic circuit is changed, and the magnetic path is widened or narrowed.
• the magnetic path is expanded, the magnetic reluctance on the magnetic circuit is reduced, and the attractive force of the third core 15 is increased.
• the magnetic path is narrowed, the magnetic resistance on the magnetic circuit is increased, and the attraction force of the third core 15 is reduced.
• a gap (see G1 in FIG. 1 and G2 in FIG. 2) is provided between the bonnet 19 and the third core 15 via the washer 18, and when the bonnet 19 moves in the axial direction, the gap fluctuate. Since magnetism flows in space, the gap also forms a part of the magnetic circuit, and the fluctuation of the gap changes the magnetic resistance. As the gap increases, the magnetic reluctance on the magnetic circuit increases, so the attractive force of the third core 15 decreases. On the other hand, when the gap is reduced, the magnetic resistance on the magnetic circuit is reduced, and the attractive force of the third core is increased.
• the proportional solenoid valve 1A adjusts the suction force of the third core 15 by moving the bonnet 19 in the axial direction to change the magnetic circuit (resistance), and finally, the applied current and the flow rate are adjusted. It is possible to adjust the flow characteristics, which are proportional characteristics.
• FIG. 3 is a view showing suction force characteristics when a predetermined applied magnetic force is applied to the solenoid proportional valve 1A, and shows suction force characteristics of the basic state, the first state, and the second state.
• the flow characteristic of FIG. A is obtained (this will be referred to as the “basic state”), and when the movement stroke St of the plunger 110 is set to 0.10 mm, the flow characteristic B of FIG. 9 is obtained (this is referred to as the “first state”. If the operating stroke St of the plunger 110 is set to 0.20 mm, the flow characteristic C shown in FIG. 9 is obtained (this is referred to as the “second state”.) 0 Under this condition, electromagnetic The adjustment of the flow rate characteristics of the proportional valve 1A will be specifically described.
• the solenoid proportional valve 1A is assembled so that the panel 8 is aligned with the reference surface to ensure a predetermined seal load, and the first proportional core 1 is formed between the body 2 and the first core 9 as shown in FIG. Welding is performed between the core 9 and the second core 14 and between the second core 14 and the third core 15 to prevent fluid leakage.
• the proportional solenoid valve 1A is assembled without measuring the thickness tolerance or the like of the upper spacer by measuring the part tolerance of each part. Accordingly, at the time of product assembly, the distance between the plunger 10 and the third core 15 varies in the electromagnetic proportional valve 1A, and the proportional to the flow characteristic A is not necessarily adjusted.
• the proportional solenoid valve 1A has a predetermined panel constant as shown in the panel diagram K of FIG. 3, with the panel 8 fitted to the reference surface.
• a flow meter (corresponding to "flow rate measuring means" (not shown) is connected to the outlet channel 4 of the solenoid proportional valve 1A, and the inlet channel of the solenoid proportional valve 1A is not energized with the coil 17.
• Supply fluid for example, air etc.
• plunger 10 moves according to the attraction force of first core 9 and third core 15. Then, separate the valve sheet 12 from the valve seat 6 and open the valve seat 6. Fluid flows from the inlet channel 3 to the valve seat 6 and is flow-regulated and output from the outlet channel 4.
• a predetermined applied current supplied to coil 17 and a predetermined applied magnetic force (here, 400 AT) is applied
• plunger 10 moves according to the attraction force of first core 9 and third core 15. Then, separate the valve sheet 12 from the valve seat 6 and open the valve seat 6. Fluid flows from the inlet channel 3 to the valve seat 6 and is flow-regulated and output from the outlet channel 4.
• the flow rate of the fluid output from the outlet flow path 4 is measured by a flow meter (not shown), and it is confirmed whether the measurement result is a predetermined value or not.
• the predetermined value refers to the target flow rate when a predetermined application current is supplied to the coil 17.
• the maximum flow rate of the flow rate characteristic A is referred to. If the measured flow rate is the maximum flow rate of the flow rate characteristic A, it means that the operation stroke St of the plunger 10 of the proportional solenoid valve 1A is secured at 0.15 mm, and the desired flow rate characteristic A is secured. .
• the solenoid proportional valve 1 A stops the energization of the coil 17 and the supply of fluid as it is, removes the flow meter (not shown) from the outlet flow path 4 and Finish the adjustment.
• the operation stroke St of the plunger 10 is not secured at 0.15 mm, and the solenoid proportional valve 1 A is not adjusted to the flow rate characteristic A.
• the bonnet 19 is moved in the axial direction so that a flow meter (not shown) indicates the maximum flow rate of the flow rate characteristic A.
• the flow meter When indicates the maximum flow rate of the flow rate characteristic A, the suction force draws the suction force curve XI shown in FIG.
• the suction force generated by the applied current to the coil 17 becomes larger than the attachment load of the plate panel 8 (point L1), the plunger 10 moves and the fluid starts to flow.
• This L1 is set to the valve opening start position L1.
• the solenoid proportional valve 1A the seal load balances the suction force and the point F1, and the plunger 10 reaches L2. Therefore, the operating stroke St of the plunger 10 becomes a distance of 0.15 mm from L1 to L2, and the solenoid proportional valve 1A is adjusted to the flow rate characteristic A.
• the fluid is flowed to the example solenoid valve 1A, and the measurement result of the flow meter shows a predetermined value (here, the maximum of the flow characteristic B
• the fixing screw 22 is rotated in the direction opposite to the predetermined direction so that the flow rate), and the bonnet 19 is axially moved in the opposite direction to the body 2 by the screw feed and the pressure of the washer 18. Ru. Then, the contact area Ml between the bonnet 19 and the first core 9 decreases from the basic state, and the gap G1 between the bonnet 19 and the third core 15 becomes larger than the basic state, and the suction force of the third core 15 Is smaller than the basic state.
• the solenoid proportional valve 1A can not adjust the set position of the plate panel 8 because the body 2 and the like are welded, and therefore the opening diagram L can not be changed by shifting the panel diagram K.
• the fully open position of the plunger 10 is lowered and the operating stroke St of the plunger 10 is reduced to 0.10 mm, as the suction curve XI is reduced to the suction curve X2 as a whole. Therefore, the solenoid proportional valve 1A can change the flow characteristic A shown in FIG. 9 into the flow characteristic B simply by rotating the fixing screw 22 without disassembling parts after product assembly.
• the electromagnetic proportional valve 1A When the electromagnetic proportional valve 1A is assembled in the basic state and then changed to the third state, the fluid is flowed to the electromagnetic ratio example valve 1A, and the measurement result of the flowmeter shows a predetermined value (here, the maximum of the flow characteristic C).
• the fixing screw 22 is rotated in a predetermined direction so that the flow rate), and the bonnet 19 is axially moved toward the body 2 side against the washer 18 by the screw feeding. Then, the contact area Ml between the bonnet 19 and the first core 9 increases from the basic state, and the gap G1 between the bonnet 19 and the third core 15 becomes smaller than the basic state, and the suction force of the third core 15 Becomes larger.
• the suction force curve XI in the basic state becomes large to the suction force curve X3.
• the solenoid proportional valve 1A can not change the valve opening start position L1 by shifting the panel diagram K.
• the fully open position of the plunger 10 is increased by an amount corresponding to the suction force curve XI generally increasing to the suction force curve X3, and the operation stroke St of the plunger 10 is increased to 0.20 mm. Therefore, the solenoid proportional valve 1A can change the flow characteristic A shown in FIG. 9 to the flow characteristic C simply by rotating the fixing screw 22 which will not disassemble the parts after product assembly.
• a force washer 18 which moves the bonnet 22 by means of screw feeding of the fixing screw 22 always pushes the bonnet 19 in the opposite direction to the third core 15. Therefore, the bonnet 19 is held without rattling, and the solenoid proportional valve 1A stably adjusts the flow rate.
• the cylindrical hollow coil bobbin 16 around which the coil 17 is wound and the third core 15 fixed in the hollow hole of the coil bobbin 16 A body 2 in which an inlet flow passage 3 and an outlet flow passage 4 are formed, a valve seat 6 for communicating the inlet flow passage 3 and the outlet flow passage 4, and a valve seat 12 contacting or separating from the valve seat 6
• a third core 15 and a first core 9 have a first core 9 interposed between the body 2 and a bonnet 19 removably put on the coil bobbin 16 so as to contact the first core 9.
• the bonnet 19 surround the coil 17 to form a magnetic circuit, and the applied current supplied to the coil 17 is Similarly, the third core 15 suctions the plunger 10 against the panel 8 to adjust the flow rate, and moves the bonnet 19 in the axial direction to change the magnetic circuit. Because the flow rate characteristics of the proportional solenoid valve 1A can be easily adjusted even after the product is assembled.
• the number of assembling steps can be significantly reduced. Also, even if it is found that the desired flow characteristics can not be obtained after the parts are assembled, the flow can be adjusted simply by rotating the fixing screw 22 from the outside of the bonnet 19 without disassembling the parts. Adjustment can be done easily and in a short time Further, according to the flow rate characteristic adjusting mechanism of the solenoid proportional valve 1A of the present embodiment, since the “moving means” moves the bonnet 19 in the axial direction by the “screw feeding mechanism”, the feed amount of screw feed is Allows the position of the bonnet 19 to be finely adjusted.
• the “moving means” includes the washer 18 disposed between the bonnet 19 and the third core 15, and the bonnet 19. , And the contact area Ml between the bonnet 19 and the first core 9 and the gap G1 between the bonnet 19 and the third core 15 are relative to each other. Since the magnetic path changes in a fluctuating manner, the rate of change of the attraction force of the third core 15 increases, and the flow characteristic can be adjusted more precisely.
• the fluid is supplied to inlet flow path 3 without applying the applied current to coil 17.
• the coil 17 is supplied with a predetermined applied current
• the flow rate of the fluid output from the outlet channel 4 is measured by a flow meter (not shown)
• the flow is measured until the flow meter (not shown) measures a predetermined value.
• FIG. 4 is a cross-sectional view of the solenoid proportional valve 1B.
• the solenoid proportional valve 1B of the present embodiment is a fixed screw in that the magnetic path is changed according to the amount by which the second fixed core 45 is screwed into the first fixed core 41.
• the second embodiment differs from the first embodiment in which the magnetic path is changed by adjusting the amount of screwing into the third core 15. Therefore, here, the points different from the first embodiment will be described in detail, and the same reference numerals as in the first embodiment will be given to the component parts in common points, and the description will be appropriately omitted.
• the first stationary core 41 and the second stationary core 45 are screwed together in the coil bobbin 16 to form a third core 40.
• the first fixed core 41 is formed by molding a ferromagnetic material into a cylindrical shape, and the bore of the coil bobbin 16 is also loaded with the force on the side of the body 2 and fixed. Lower end portion of the first fixed core 41 The second core 14 also projects force to face the inner peripheral surface of the first core 9, and a magnetic leakage space 25 is provided between the first fixed core 41 and the first core 9.
• a cylindrical protrusion 42 is coaxially protruded on the upper end surface of the first fixed core 41 and exists in the hollow hole of the coil bobbin 16.
• the protrusion 42 has an external thread formed on the outer peripheral surface.
• a screw hole 43 for fastening the fixing screw 22 coaxially from the end face of the projection 42 is formed in the first fixed core 41.
• the second fixed core 45 is formed by molding a ferromagnetic material into a cylindrical shape, and is inserted into the hollow hole of the coil bobbin 16 so as to be rotatable from the side opposite to the body 2.
• the second fixed core 45 has a recess 46 formed in the end face on the body 2 side, and a female screw is formed on the inner peripheral surface of the recess 46.
• the second fixed core 45 has a total length set so that the upper end face has almost the same height as the end face of the coil bobbin 16 when the female screw of the recess 46 is screwed into the male screw of the first fixed core 41 to the end. It is done.
• the second stationary core 45 is formed with a through hole 47 through which the fixing screw 22 is inserted along the axial center.
• the “moving means” includes the convex portion 42 of the first fixed core 41, the screw hole 43, the concave portion 46 of the second fixed core 45, the through hole 47, the through hole 20 of the bonnet 19 and fixing. It is configured by screws 20. Also, the “screw feeding mechanism” is constituted by the fixing screw 20 and the screw hole 43 of the first fixed core 41 !.
• the bonnet 19 With the electromagnetic proportional valve 1 B, the bonnet 19 is put on the coil bobbin 16, and the fixing screw 22 is passed through the through hole 20 of the bonnet 19 and the through hole 47 of the second fixed core 45, and the tip end of the fixing screw 22.
• the bonnet 19 is detachably attached by screwing the part into the screw hole 43 of the first fixed core 41. Since the bonnet 19 is positioned in contact with the second stationary core 45, the contact area M3 circumferentially contacting the first core 9 changes in accordance with the amount by which the second stationary core 45 protrudes from the coil bobbin 19. .
• the gap G3 formed between the first fixed core 41 and the second fixed core 45 changes depending on the screwed amount.
• the contact area M3 between the first core 9 and the bonnet 19 and the gap G3 formed between the first fixed core 41 and the second fixed core 45 are formed around the coil 17.
• the configuration of the magnetic circuit changes and the magnetic resistance changes.
• a flow meter is connected to the outlet channel 4 and fluid is supplied to the inlet channel 3 in a state where the coil is not energized, Supply a predetermined applied current to the coil 17, and check whether the measurement result of the flowmeter is a predetermined value or not.
• the coil 17 is deenergized and the fluid supply is stopped.
• the fixing screw 22 is removed and the bonnet 19 is removed from the coil bobbin 16, the second stationary core 45 is exposed. Therefore, by rotating the second stationary core 45, the female screw of the second stationary core 45 is made the first Adjust the amount of screwing into the external thread of fixed core 41 and adjust gap G3. Then, the bonnet 19 is put on the coil bobbin 16 and brought into contact with the second fixed core 45, and the fixing screw 22 is penetrated through the through hole 20 of the bonnet 19 and the through hole 47 of the second fixed core 45 and the first fixed core 41 Screw the bonnet 19 into the first fixed iron core 41 by screwing it into the screw hole 43 of.
• the contact area M 3 with the first core 9 is adjusted in accordance with the amount by which the second stationary core 45 also projects the force of the coil bobbin 16. Then, after the fluid is supplied to the inlet channel 3 of the proportional solenoid valve 1 B, a predetermined applied current is supplied again to the coil 17, and the flow rate of the fluid output from the outlet channel 4 is measured by a flow meter. If the measurement result is a predetermined value, the flow rate characteristic adjustment is ended, and if it is not the predetermined value, the flow rate characteristic adjustment described above is repeated.
• the “moving means” fixes the third core 40 and the body 2 side force to the hollow space of the coil bobbin 16 as well.
• the iron core 41 and the body 2 and the opposite side force are also rotatably loaded in the hollow space of the coil bobbin 16.
• the second iron core 41 is divided into a second iron core 45 and the second iron core 45 is screwed on the first iron core 41.
• FIG. 5 is a cross-sectional view of the solenoid proportional valve 1C.
• the solenoid proportional valve 1C according to the present embodiment rotates the bonnet 51 to move the bonnet 51 in the axial direction.
• the fixing screw 22 is rotated to move the bonnet 51 in the axial direction. Is different from the proportional solenoid valve 1A. Therefore, here, the points different from the first embodiment will be described in detail, and the same reference numerals as in the first embodiment will be attached to the drawings for the common points, and the description will be appropriately omitted.
• the proportional solenoid valve 1 C includes a fixing member 52 formed of a ferromagnetic material in a cylindrical shape, and fixes a fixing screw 22 penetrating the through hole 53 of the fixing member 52 in the screw hole 21 of the third core 15.
• the fixing member 52 is fixed to the third core 15.
• the fixing member 52 has substantially the same diameter as the outer diameter of the outer diameter force coil bobbin 16, and a male screw is formed on the outer peripheral surface! .
• the bonnet 51 is formed by forming a ferromagnetic material in a cylindrical shape, and a female screw is formed on the inner peripheral surface at one end opening. An internal thread of the bonnet 51 is screwed to an external thread of the fixing member 52 and held.
• the “moving means” and the “screw feeding mechanism” are configured by the female screw of the bonnet 51 and the male screw of the fixing member 52.
• the fluid is supplied to the inlet channel 3 in a state where the coil 17 is not energized, and then the coil 17 Supply a predetermined applied current to the and measure the flow rate with the flow meter.
• the bonnet 51 is pinched to apply a force in the rotational direction. Then, although the fixing member 52 is fixed by the fixing screw 22 and does not rotate, the bonnet 51 rotates with respect to the fixing member 52, and is axially moved by screw feeding. Therefore, the contact area M4 of the bonnet 51 and the first core 9 changes, the magnetic path changes, and the flow rate changes. After the flow meter has measured the predetermined value, the rotation of the bonnet 51 is stopped to complete the adjustment of the flow characteristic.
• the “moving means” is a female screw provided on the bonnet 51 side; Since the male screw and the force provided on the fixing member 52 on the side of the coil bobbin 2 are also used, the bonnet 51 can be directly rotated and moved in the axial direction without using a tool, which is convenient.
• Figure 6 shows the proportional solenoid valve 1D FIG.
• the solenoid proportional valve ID of the present embodiment is the solenoid proportional valve 1A according to the first embodiment, in which the fixing screw 22 is rotated to move the bonnet 19 axially at a point where the bonnet 63 is rotated and moved in the axial direction. And is different. Therefore, here, the points different from the first embodiment will be described in detail, and the points common to the first embodiment will be denoted by the same reference numerals as the first embodiment, and the description will be appropriately omitted.
• the third core 61 is formed by molding a ferromagnetic material into a cylindrical shape, and is press-fit to the first core 62 via the second core 14 and held by welding or brazing. There is.
• the lower end portion also projects the force of the second core 14 and faces the inner circumferential surface of the first core 62.
• the upper end portion of the third core 61 protrudes from the coil bobbin 16 force.
• the bonnet 63 is formed in a cylindrical shape in which a magnetic material is opened to one side, and a through hole 64 is formed in the closed end face.
• the bonnet 63 has a female screw formed on the inner peripheral surface of the opening, and is screwed to a male screw formed on the outer peripheral surface of the first core 62. At this time, the inner circumferential surface of the through hole 64 is in sliding contact with the third core 61, and the bonnet 63 is guided and moved by the third core 61.
• the “moving means” and the “screw feeding mechanism” are configured by the female screw of the bonnet 63 and the male screw of the first core 62.
• the measurement result of the flowmeter is not a predetermined value, pinch the hood 63 and rotate it.
• the bonnet 63 is rotated, the bonnet 63 is axially moved by a fixed amount by the screw feed between the female thread of the bonnet 63 and the male thread of the first core 62. Therefore, the contact area M5 between the bonnet 63 and the first core 62 and the contact area M6 between the bonnet 63 and the third core 61 change relatively to change the magnetic resistance and the flow rate.
• the “moving means” includes an internal thread provided to the bonnet 63, and a coil bobbin Since it consists of an external thread provided on the first core 62 on the 16 side, no tool is used.
• the net 63 can be moved in the axial direction, which is convenient.
• the washer 18 is used as the elastic member, but a coil spring 71 is provided between the third core 15 and the bonnet 19 as in the solenoid proportional valve 1E shown in FIG. You can shrink the
• a plug for hiding the fixing screw 22 may be attached to the bonnet 19.
• the thickness of the bonnet 19 may be changed, or the length and material of the fixing screw 22 may be changed to change the magnetic resistance of the magnetic circuit and adjust the flow rate, in addition to the above embodiment.
• a flow rate characteristic adjusting mechanism may be provided in the plunger type proportional solenoid valve or the like.
• the solenoid proportional valve is used in the semiconductor manufacturing apparatus, but the use application is not limited to this.
• 3 is an inlet flow path
• 4 is an outlet flow path
• 3 may be an outlet flow path
• 4 may be an inlet flow path.

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• Mechanical Engineering (AREA)
• Magnetically Actuated Valves (AREA)

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• 2004
  • 2004-04-23 JP JP2004128523A patent/JP4414269B2/ja not_active Expired - Lifetime
• 2005
  • 2005-04-18 CN CNB2005800125129A patent/CN100427818C/zh active Active
  • 2005-04-18 WO PCT/JP2005/007399 patent/WO2005103541A1/ja active Application Filing

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