WO2005085144A1 - Procédé de fabrication d’un matériau de base en verre poreux pour fibre optique et matériau de base en verre - Google Patents

Procédé de fabrication d’un matériau de base en verre poreux pour fibre optique et matériau de base en verre Download PDF

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Publication number
WO2005085144A1
WO2005085144A1 PCT/JP2005/002930 JP2005002930W WO2005085144A1 WO 2005085144 A1 WO2005085144 A1 WO 2005085144A1 JP 2005002930 W JP2005002930 W JP 2005002930W WO 2005085144 A1 WO2005085144 A1 WO 2005085144A1
Authority
WO
WIPO (PCT)
Prior art keywords
glass
deposition
base material
glass base
porous glass
Prior art date
Application number
PCT/JP2005/002930
Other languages
English (en)
Japanese (ja)
Inventor
Tetsuya Otosaka
Dai Inoue
Original Assignee
Shin-Etsu Chemical Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co., Ltd. filed Critical Shin-Etsu Chemical Co., Ltd.
Publication of WO2005085144A1 publication Critical patent/WO2005085144A1/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • E—FIXED CONSTRUCTIONS
    • E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06C—LADDERS
    • E06C1/00—Ladders in general
    • E06C1/02—Ladders in general with rigid longitudinal member or members
    • E06C1/38—Special constructions of ladders, e.g. ladders with more or less than two longitudinal members, ladders with movable rungs or other treads, longitudinally-foldable ladders
    • E06C1/383—Foldable ladders in which the longitudinal members are brought together on folding
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • E—FIXED CONSTRUCTIONS
    • E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06C—LADDERS
    • E06C7/00—Component parts, supporting parts, or accessories
    • E06C7/08—Special construction of longitudinal members, or rungs or other treads
    • E06C7/082—Connections between rungs or treads and longitudinal members
    • E—FIXED CONSTRUCTIONS
    • E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06C—LADDERS
    • E06C7/00—Component parts, supporting parts, or accessories
    • E06C7/50—Joints or other connecting parts
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/50—Multiple burner arrangements
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/60—Relationship between burner and deposit, e.g. position
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/60—Relationship between burner and deposit, e.g. position
    • C03B2207/62—Distance
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/70—Control measures

Definitions

  • the present invention relates to a method for producing a porous glass base material by depositing glass fine particles generated by flame hydrolysis of a glass raw material on a starting member, and in particular, a method for improving the deposition efficiency of glass fine particles.
  • the present invention relates to a method for producing a porous glass preform for fiber and a glass preform.
  • Synthetic quartz glass is used for various purposes such as optical fibers, mask substrates, lenses, and the like.
  • the VAD method is widely used as a method for producing synthetic quartz glass.
  • glass materials such as SiCl are flame-hydrolyzed in a
  • a glass rod prepared in advance is used as a starting member, glass fine particles are deposited around the starting member, and the outer peripheral portion is synthesized. In addition, the central portion and the outer peripheral portion corresponding to the starting member are simultaneously formed. It can also be synthesized.
  • the glass particles generated by the flame hydrolysis are sprayed onto the deposition surface of the starting member together with the flame flow, and adhere to the deposition surface, but a part (force of about 50% depending on conditions) of the glass particles is discharged together with the exhaust gas. It is discharged out of the system.
  • the porous glass preform for an optical fiber synthesized by the VAD method usually has a shape as shown in FIG. 1, and the core portion (a) and the first clad portion (b) are arranged in order from the center. And a second clad portion (c). In this case, the diameter of each deposited layer monotonically increases (see Patent Document 1).
  • the porous glass base material is firstly cored by a core deposition parner 1.
  • a central rod 2 is formed, on which a first cladding part is deposited by a first cladding part deposition parner 3, and a second cladding part is further deposited thereon by a second cladding part deposition parner 4.
  • a glass preform is formed.
  • the glass fine particle flow 5 from the first cladding part deposition parner 3 rises while being divided into right and left on the central part 2 as shown by No. and Tching, then leaves the surface and is finally discharged out of the system. At this time, most of the non-adhered glass particles (soot) that are not deposited are exhausted out of the system together with the exhaust gas, but a part of the particles adheres and deposits on the inner wall of the reaction vessel.
  • Patent Document 1 JP-A-2000-63141
  • Synthetic quartz glass is used for various purposes, but in recent years, for optical fiber, the demand for larger size has been particularly strong, and the amount of unadhered soot has also increased, resulting in an increase in raw material costs. Let me. Furthermore, if the deposition rate of the glass particles on the deposition surface is low, the unattached soot adheres to the inner wall of the reaction vessel. * If the soot that has peeled off adheres to the deposition surface, it will cause bubbles to be generated in the product. And lowers the yield.
  • the method for producing a porous glass base material of the present invention involves flame hydrolysis of a glass raw material in an oxyhydrogen flame.
  • the center rod is raised at a substantially constant speed in accordance with the deposition of the glass fine particles, and the diagonal downward is directed toward the glass fine particle deposition surface.
  • the method is characterized in that glass fine particles are deposited.
  • the fine glass particles may be deposited by injecting a flame flow and forming a concave portion on the lower surface of the deposition body.
  • the center rod is made of a porous glass material obtained by depositing and growing glass fine particles in the axial direction using a parner different from the deposition parner, or a transparent glass material, more preferably a quartz glass material. Can be used.
  • the quartz glass material may be uniform in the radial direction or may partially contain a dopant.
  • the shape of the concave portion formed on the lower surface of the deposition is preferably adjusted by the flow rate of the glass material supplied to the deposition parner, but may be adjusted by the flow rate of the combustion gas or the auxiliary gas supplied to the deposition parner. . It is preferable that the deposition parner is installed at an angle of 30 ° to 50 ° with respect to a vertically disposed central rod.
  • porous glass base material thus obtained is dehydrated, sintered and transparently vitrified, and for example, quartz glass excellent in optical properties suitable as a glass base material for optical fibers can be produced at low cost.
  • quartz glass excellent in optical properties suitable as a glass base material for optical fibers can be produced at low cost.
  • FIG. 1] (A) and (B) are diagrams showing the outline of a porous glass base material synthesized by the VAD method. To increase.
  • FIG. 2 is a schematic view showing a conventional state of deposition of glass fine particles.
  • FIG. 3 is a schematic view showing a state of deposition of glass fine particles according to the present invention.
  • the present inventors have found that there is a method for increasing the adhesion rate of glass fine particles other than the flow rate of the glass raw material, the flow rate of the panner flame, the temperature of the deposition surface, and the like. Specifically, the object was achieved by adjusting the shape of the stacked body so as to form a concave portion on the lower surface of the stacked body.
  • the present invention is an improvement of the present invention.
  • By forming a concave portion on the lower surface of the deposition body it is possible to increase the adhesion rate of the glass fine particles sprayed from the first cladding portion deposition parner 3.
  • By increasing the outer diameter of the first clad portion the adhesion rate of the second clad portion is also improved, and excess soot floating in the reaction vessel can be reduced.
  • the glass fine particle stream 5 generated by the parner 3 is divided into left and right parts by hitting the central rod 2 and passing through the concave groove formed by the concave part 6, thereby forming It wraps around to the opposite side and separates from the deposition surface after merging again. For this reason Since the glass fine particle flow 5 passes through the concave groove of the concave portion 6, the contact time with the deposition surface increases, and the adhesion rate of the glass fine particles increases.
  • the shape of the concave portion 6 depends on the thickness of the center rod 2 on which the glass fine particle flow 5 hits, the flow rate and speed of the raw material gas and the combustion gas supplied to the parner 3, the diameter of the parner 3, etc.
  • the shape adjustment of the concave portion 6 is not particularly discussed, but it is particularly effective to increase the flow rate of the glass raw material gas more than usual.
  • the force of forming the first clad portion by one wrench 3 may be obtained by arranging a plurality of wrench 3.
  • the center rod 2 serving as the core is formed simultaneously with the core deposition parner 1, a quartz glass rod or the like prepared in advance may be used as the center rod 2.
  • the gas supply to the burner is H: 12 L / min, O: 14 L / min, and Ar: 2 L / min.
  • the raw material (SiCl 3) was set to 0.8 L / min, which is larger than usual. Burner is 30mm diameter transparent
  • a recess (concave groove) is formed in the shape of a passage around the center bar and the bottom surface of the sediment, and the Pana flame flow flows through this groove, and the deposition rate of glass particles reaches 87%, which is extremely high. did.
  • the adhesion rate of glass fine particles can be improved, which contributes to a reduction in the cost of an optical fiber.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
  • Glass Melting And Manufacturing (AREA)

Abstract

Il est prévu un procédé de fabrication d’un matériau de base en verre poreux dans lequel une matière première pour le verre est hydrolysée à la flamme dans une flamme d’oxyhydrogène et de fines particules de verre sont déposées, caractérisé en ce qu’une tige centrale est élevée à une vitesse constante avec le dépôt de fines particules de verre, et l’on pulvérise un courant de flamme contenant de fines particules de verre synthétisées par un brûleur pour dépôt, sur une face de dépôt de fines particules de verre partant diagonalement de dessous, pour constituer une partie concave sur la face de dépôt inférieure d’un article déposé et déposer de fines particules de verre ; et un matériau de base en verre produit par le procédé. Le procédé ci-dessus permet d’améliorer la proportion de la fixation de fines particules de verre sur une face de dépôt, la réduction de la suie flottant dans un récipient de réaction et empêche la génération de bulles dans le produit résultant.
PCT/JP2005/002930 2004-03-04 2005-02-23 Procédé de fabrication d’un matériau de base en verre poreux pour fibre optique et matériau de base en verre WO2005085144A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004-060499 2004-03-04
JP2004060499A JP4530687B2 (ja) 2004-03-04 2004-03-04 光ファイバ用多孔質ガラス母材の製造方法

Publications (1)

Publication Number Publication Date
WO2005085144A1 true WO2005085144A1 (fr) 2005-09-15

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2005/002930 WO2005085144A1 (fr) 2004-03-04 2005-02-23 Procédé de fabrication d’un matériau de base en verre poreux pour fibre optique et matériau de base en verre

Country Status (5)

Country Link
JP (1) JP4530687B2 (fr)
KR (1) KR101157674B1 (fr)
CN (1) CN1946640A (fr)
TW (1) TW200533616A (fr)
WO (1) WO2005085144A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4750867B2 (ja) * 2009-02-24 2011-08-17 信越化学工業株式会社 多孔質ガラス母材製造用バーナ及び多孔質ガラス母材の製造方法
JP6581637B2 (ja) * 2017-10-13 2019-09-25 信越化学工業株式会社 多孔質ガラス母材の製造装置および製造方法
JP7170555B2 (ja) * 2019-02-12 2022-11-14 信越化学工業株式会社 光ファイバ用多孔質ガラス母材の製造方法
CN113354263B (zh) * 2021-07-03 2022-08-26 神光光学集团有限公司 一种生产合成石英玻璃的方法及设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60260433A (ja) * 1984-06-04 1985-12-23 Sumitomo Electric Ind Ltd 光フアイバ用母材の製造方法
JPH01138147A (ja) * 1987-11-26 1989-05-31 Hitachi Cable Ltd 単一モード光ファイバ母材の製造方法
JPH054825A (ja) * 1991-06-25 1993-01-14 Sumitomo Electric Ind Ltd ガラス物品の製造方法
JPH0761831A (ja) * 1993-08-26 1995-03-07 Shin Etsu Chem Co Ltd 光ファイバ用多孔質ガラス母材の製造方法
JP2000063141A (ja) * 1998-08-11 2000-02-29 Shin Etsu Chem Co Ltd 光ファイバ用多孔質ガラス母材の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR850000288B1 (en) * 1980-10-06 1985-03-16 Nippon Telegraph & Telephone Method of fabrication malti-mode optical fiber preforms

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60260433A (ja) * 1984-06-04 1985-12-23 Sumitomo Electric Ind Ltd 光フアイバ用母材の製造方法
JPH01138147A (ja) * 1987-11-26 1989-05-31 Hitachi Cable Ltd 単一モード光ファイバ母材の製造方法
JPH054825A (ja) * 1991-06-25 1993-01-14 Sumitomo Electric Ind Ltd ガラス物品の製造方法
JPH0761831A (ja) * 1993-08-26 1995-03-07 Shin Etsu Chem Co Ltd 光ファイバ用多孔質ガラス母材の製造方法
JP2000063141A (ja) * 1998-08-11 2000-02-29 Shin Etsu Chem Co Ltd 光ファイバ用多孔質ガラス母材の製造方法

Also Published As

Publication number Publication date
CN1946640A (zh) 2007-04-11
JP2005247636A (ja) 2005-09-15
TW200533616A (en) 2005-10-16
KR101157674B1 (ko) 2012-06-20
JP4530687B2 (ja) 2010-08-25
KR20050089747A (ko) 2005-09-08

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