WO2005072027A3 - Verfahren und vorrichtungen zur erzeugung fester filamente in einer vakuumkammer - Google Patents

Verfahren und vorrichtungen zur erzeugung fester filamente in einer vakuumkammer Download PDF

Info

Publication number
WO2005072027A3
WO2005072027A3 PCT/EP2005/000333 EP2005000333W WO2005072027A3 WO 2005072027 A3 WO2005072027 A3 WO 2005072027A3 EP 2005000333 W EP2005000333 W EP 2005000333W WO 2005072027 A3 WO2005072027 A3 WO 2005072027A3
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum chamber
liquid
methods
solid
production
Prior art date
Application number
PCT/EP2005/000333
Other languages
English (en)
French (fr)
Other versions
WO2005072027A2 (de
Inventor
Manfred Faubel
Ales Charvat
Juergen Troe
Bernd Abel
Eugene Lugovoi
Original Assignee
Max Planck Gesellschaft
Univ Goettingen Georg August
Manfred Faubel
Ales Charvat
Juergen Troe
Bernd Abel
Eugene Lugovoi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft, Univ Goettingen Georg August, Manfred Faubel, Ales Charvat, Juergen Troe, Bernd Abel, Eugene Lugovoi filed Critical Max Planck Gesellschaft
Priority to JP2006549984A priority Critical patent/JP2007519193A/ja
Priority to EP05700929A priority patent/EP1709844A2/de
Priority to US10/585,833 priority patent/US20080296799A1/en
Publication of WO2005072027A2 publication Critical patent/WO2005072027A2/de
Publication of WO2005072027A3 publication Critical patent/WO2005072027A3/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H05G2/006—X-ray radiation generated from plasma being produced from a liquid or gas details of the ejection system, e.g. constructional details of the nozzle
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • X-Ray Techniques (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Inorganic Fibers (AREA)

Abstract

Es werden Verfahren zur Erzeugung eines festen Filaments (1) aus einer Flüssigkeit (2) in einer Vakuumkammer (70) beschrieben, mit den Schritten: Verflüssigung eines Gases in einer Wärmeaustauschereinrichtung (20) zur Erzeugung der Flüssigkeit (2), und Zuführung der Flüssigkeit (2) über eine Zufuhrleitung (27) und durch eine Düse (30) in die Vakuumkammer (70), wobei die Verflüssigung des Gases in der Wärmeaustauschereinrichtung (20) die Einstellung eines p-T-Arbeitspunktes der Flüssigkeit (2) umfasst, bei dem die Flüssigkeit (2) nach dem Austritt aus der Düse (30) in die Vakuumkammer (70) in den festen Aggregatzustand überführt wird und einen kollimierten und stabilen Strahl bildet. Es werden auch Düsenanordnungen zur Erzeugung fester Filamente (1) in einem Vakuum beschrieben.
PCT/EP2005/000333 2004-01-26 2005-01-14 Verfahren und vorrichtungen zur erzeugung fester filamente in einer vakuumkammer WO2005072027A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006549984A JP2007519193A (ja) 2004-01-26 2005-01-14 真空チャンバ内での固体フィラメントの製造のための方法及び装置
EP05700929A EP1709844A2 (de) 2004-01-26 2005-01-14 Verfahren und vorrichtungen zur erzeugung fester filamente in einer vakuumkammer
US10/585,833 US20080296799A1 (en) 2004-01-26 2005-01-14 Methods and Devices for the Production of Solid Filaments in a Vacuum Chamber

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004003854.6 2004-01-26
DE102004003854A DE102004003854A1 (de) 2004-01-26 2004-01-26 Verfahren und Vorrichtungen zur Erzeugung fester Filamente in einer Vakuumkammer

Publications (2)

Publication Number Publication Date
WO2005072027A2 WO2005072027A2 (de) 2005-08-04
WO2005072027A3 true WO2005072027A3 (de) 2005-12-29

Family

ID=34801019

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2005/000333 WO2005072027A2 (de) 2004-01-26 2005-01-14 Verfahren und vorrichtungen zur erzeugung fester filamente in einer vakuumkammer

Country Status (5)

Country Link
US (1) US20080296799A1 (de)
EP (1) EP1709844A2 (de)
JP (1) JP2007519193A (de)
DE (1) DE102004003854A1 (de)
WO (1) WO2005072027A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005334922A (ja) * 2004-05-26 2005-12-08 Yamazaki Mazak Corp レーザ加工機におけるノズルチェック装置
DE102005034359B4 (de) * 2005-07-22 2008-10-30 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Verfahren und Vorrichtung zur Bereitstellung fester Filamente in einer Vakuumkammer
JP5215540B2 (ja) * 2006-07-18 2013-06-19 ギガフォトン株式会社 ターゲット物質供給装置
WO2013107860A1 (de) 2012-01-19 2013-07-25 Technische Universität Dresden Einrichtung und verfahren zur erzeugung beschleunigter teilchen aus targets zur strahlentherapie
JP2012256608A (ja) * 2012-08-17 2012-12-27 Gigaphoton Inc ターゲット物質供給装置
NL2011580A (en) * 2012-11-07 2014-05-08 Asml Netherlands Bv Method and apparatus for generating radiation.

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4055741A (en) * 1975-12-08 1977-10-25 David Grigorievich Bykhovsky Plasma arc torch
US6324256B1 (en) * 2000-08-23 2001-11-27 Trw Inc. Liquid sprays as the target for a laser-plasma extreme ultraviolet light source
WO2002019781A1 (en) * 2000-08-31 2002-03-07 Powerlase Limited Electromagnetic radiation generation using a laser produced plasma
US20020044629A1 (en) * 2000-10-13 2002-04-18 Hertz Hans Martin Method and apparatus for generating X-ray or EUV radiation
US20020051358A1 (en) * 1999-05-06 2002-05-02 Advanced Energy Systems, Inc. System and method for providing a lithographic light source for a semiconductor manufacturing process
US20020141536A1 (en) * 2000-10-20 2002-10-03 Martin Richardson EUV, XUV, and X-ray wavelength sources created from laser plasma produced from liquid metal solutions, and nano-size particles in solutions

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE510133C2 (sv) * 1996-04-25 1999-04-19 Jettec Ab Laser-plasma röntgenkälla utnyttjande vätskor som strålmål
JP5073146B2 (ja) * 2000-07-28 2012-11-14 ジェテック、アクチボラグ Ｘ線発生方法および装置
JP4714910B2 (ja) * 2000-11-09 2011-07-06 独立行政法人 日本原子力研究開発機構 重水素氷の連続生成・装填装置および方法
FR2823949A1 (fr) * 2001-04-18 2002-10-25 Commissariat Energie Atomique Procede et dispositif de generation de lumiere dans l'extreme ultraviolet notamment pour la lithographie
JP4111487B2 (ja) * 2002-04-05 2008-07-02 ギガフォトン株式会社 極端紫外光源装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4055741A (en) * 1975-12-08 1977-10-25 David Grigorievich Bykhovsky Plasma arc torch
US20020051358A1 (en) * 1999-05-06 2002-05-02 Advanced Energy Systems, Inc. System and method for providing a lithographic light source for a semiconductor manufacturing process
US6324256B1 (en) * 2000-08-23 2001-11-27 Trw Inc. Liquid sprays as the target for a laser-plasma extreme ultraviolet light source
WO2002019781A1 (en) * 2000-08-31 2002-03-07 Powerlase Limited Electromagnetic radiation generation using a laser produced plasma
US20020044629A1 (en) * 2000-10-13 2002-04-18 Hertz Hans Martin Method and apparatus for generating X-ray or EUV radiation
US20020141536A1 (en) * 2000-10-20 2002-10-03 Martin Richardson EUV, XUV, and X-ray wavelength sources created from laser plasma produced from liquid metal solutions, and nano-size particles in solutions

Also Published As

Publication number Publication date
DE102004003854A1 (de) 2005-08-18
EP1709844A2 (de) 2006-10-11
JP2007519193A (ja) 2007-07-12
US20080296799A1 (en) 2008-12-04
WO2005072027A2 (de) 2005-08-04

Similar Documents

Publication Publication Date Title
WO2005072027A3 (de) Verfahren und vorrichtungen zur erzeugung fester filamente in einer vakuumkammer
CN1123680C (zh) 通过湿法加压在气体涡轮中获得功率增加的方法和装置
JP5989963B2 (ja) 低ＮＯｘ複合インジェクタ
JP5032596B2 (ja) 極低温蒸留により、高いフレキシビリティをもった気体及び液体の形態で、ガスを空気から製造する方法及び装置
CN104854682B (zh) 超高速均匀粒子的生成喷嘴、生成装置及生成方法
CA2480109A1 (en) Apparatus and method for preparing and delivering fuel
JPH09236024A (ja) ガスタービン，コンバインドサイクルプラント及び圧縮機
CA2399580A1 (fr) Compresseur thermocinetique
CN101358729A (zh) 用于产生蒸汽的装置
WO2005025757A3 (fr) Appareil de brumisation d'une composition liquide
JP2010530947A (ja) 高いフレキシビリティ（ｈａｕｔｅｆｌｅｘｉｂｉｌｉｔｅ）で及び極低温蒸留によって、ガスを空気から気体及び液体の形態で製造する方法及びデバイス
CA2663131A1 (en) Gas turbine topping in sulfuric acid manufacture
JP3691711B2 (ja) ガスタービンプラント
JP4246624B2 (ja) 空気分離ユニットと結合したガスタービンによるエネルギー生産のための方法および設備
JPH02160040A (ja) 鉱物質超微粒子の製造方法
JP2010242749A (ja) 圧縮機抽気の冷却を達成するシステム及び方法
CN105190175B (zh) 加压流动炉设备
CN109724805A (zh) 一种空气加热装置的吹除系统及吹除方法
US7645319B2 (en) Method for renovating a combined blast furnace and air/gas separation unit system
KR20100111455A (ko) 드라이아이스 분무식 세정장치
GB2479001A (en) Compressor with atomised cryogenic liquefied gas injection
CN101487600A (zh) 燃气炉具送风控制兼燃气供给阀门
JPH11287132A (ja) ガスタ―ビン，コンバインドサイクルプラント及び圧縮機
JPH10246127A (ja) ガスタービン，コンバインドサイクルプラント及び圧縮機
JP4167989B2 (ja) ガスタービン設備及びガスタービン用加湿設備

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2005700929

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2006549984

Country of ref document: JP

WWP Wipo information: published in national office

Ref document number: 2005700929

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 10585833

Country of ref document: US