WO2004103920A1 - ガラスプレス用モールドの作製方法 - Google Patents
ガラスプレス用モールドの作製方法 Download PDFInfo
- Publication number
- WO2004103920A1 WO2004103920A1 PCT/JP2004/003861 JP2004003861W WO2004103920A1 WO 2004103920 A1 WO2004103920 A1 WO 2004103920A1 JP 2004003861 W JP2004003861 W JP 2004003861W WO 2004103920 A1 WO2004103920 A1 WO 2004103920A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- mold
- silicon carbide
- silicon
- glass
- glass press
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0075—Manufacture of substrate-free structures
- B81C99/009—Manufacturing the stamps or the moulds
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/082—Construction of plunger or mould for making solid articles, e.g. lenses having profiled, patterned or microstructured surfaces
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
- C03B11/086—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/001—Joining burned ceramic articles with other burned ceramic articles or other articles by heating directly with other burned ceramic articles
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
- C04B37/006—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of metals or metal salts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/03—Processes for manufacturing substrate-free structures
- B81C2201/034—Moulding
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
- C03B2215/22—Non-oxide ceramics
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/30—Intermediate layers, e.g. graded zone of base/top material
- C03B2215/32—Intermediate layers, e.g. graded zone of base/top material of metallic or silicon material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/40—Product characteristics
- C03B2215/41—Profiled surfaces
- C03B2215/412—Profiled surfaces fine structured, e.g. fresnel lenses, prismatic reflectors, other sharp-edged surface profiles
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
- C04B2235/6567—Treatment time
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/963—Surface properties, e.g. surface roughness
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/04—Ceramic interlayers
- C04B2237/08—Non-oxidic interlayers
- C04B2237/083—Carbide interlayers, e.g. silicon carbide interlayers
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/123—Metallic interlayers based on iron group metals, e.g. steel
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/365—Silicon carbide
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/56—Using constraining layers before or during sintering
- C04B2237/568—Using constraining layers before or during sintering made of non-oxide ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/64—Forming laminates or joined articles comprising grooves or cuts
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
Definitions
- the invention of this application relates to a method for manufacturing a mold for glass press. More specifically, the invention of this application relates to a method for producing a glass press mold capable of producing a glass breath mold having an extremely small surface thickness and a fine structure.
- Glass exhibits excellent properties such as optical properties, temperature stability, and durability. For this reason, high-performance optical components are made of glass. Since glass for mass production of glass optical parts is performed at a high temperature of, for example, 800 or more, carbide and silicon carbide, which have excellent high-temperature strength and chemical stability, are candidates for molding materials. No. However, carbide and silicon carbide are difficult to machine, and generally can only be machined by grinding. Grinding is applied for machining spherical or aspherical surfaces of a certain size, but it is not suitable for forming microstructures due to problems such as tool size and wear.
- a resin molding method there is known a method in which a fine structure is formed in silicon by photolithography and etching, and this is transferred as a mold by hot pressing or injection molding.
- silicon is not suitable as a molding material for a glass press because it creeps at a temperature of 600 or more and is highly reactive.
- the inventor of the invention of this application has previously proposed a method of manufacturing a microstructure of silicon carbide (Japanese Patent Application Laid-Open No. 2001-139377).
- the surface of the silicon carbide microstructure produced by this method was rough and could not be used for molding glass optical components.
- the invention of this application has been made in view of such circumstances, and provides a method for manufacturing a glass press mold capable of manufacturing a glass press mold having an extremely small surface roughness and a fine structure. This is an issue to be solved.
- the invention of this application solves the above-mentioned problems. First, after depositing silicon carbide on the surface of a silicon mold, the deposited silicon carbide and the silicon carbide substrate are joined together. Provided is a method for manufacturing a mold for glass press, characterized in that the glass is removed by etching.
- the invention of the present application is directed to the first method for producing a glass plate mold, wherein the metal plate thin film is interposed between the silicon carbide substrate deposited on the surface of the silicon mold and the silicon carbide substrate.
- the metal plate thin film is interposed between the silicon carbide substrate deposited on the surface of the silicon mold and the silicon carbide substrate.
- Figures l ⁇ a> ⁇ b> ⁇ c> ⁇ d> ⁇ e> ⁇ f> are process cross-sectional views each showing an outline of a method for manufacturing a glass press mold of the invention of the present application.
- FIG. 2 is a microscope image of the surface of the silicon carbide mold obtained in the example.
- FIG. 3 is a microscope image showing a state where glass is pressed by the silicon carbide mold obtained in the example.
- Silicon mold (1) is obtained by producing a fine structure on single-crystal silicon by photolithography, etching, etc. Type.
- the application of IC processing technology in the production of this silicon mold (1) enables fine processing with high resolution, high accuracy, and high flexibility.
- silicon carbide (SiC) (2) is deposited on a silicon mold (1).
- Chemical vapor deposition (CVD) can be used to deposit silicon carbide (2).
- the deposited silicon carbide (2) can be polished and planarized as shown in Fig. L ⁇ c>. This is effective for improving the bonding property with a silicon carbide substrate described later.
- a metal thin film (3) is formed on the surface of silicon carbide (2) by sputtering or the like. Can be.
- This metal thin film (3) functions as a bonding layer with a silicon carbide substrate to be described later, and is effective in improving the bonding property.
- the material of the metal thin film (3) is not particularly limited and can be appropriately selected. Also, the metal thin film (3) can be omitted.
- the silicon carbide substrate (4) is joined to the deposited silicon carbide (2). Bonding can be performed by solid phase bonding. As shown in Fig. L ⁇ d>, when the metal thin film (3) is formed on the surface of silicon carbide (2), the metal thin film (3) is made of silicon carbide (2) and silicon carbide substrate (4). ).
- the silicon mold (1) is removed by etching as shown in FIG.
- various solutions and the like can be used, for example, a mixed solution of hydrofluoric acid and nitric acid is shown.
- Silicon carbide was deposited at a thickness of 50 im by atmospheric pressure CVD on a silicon mold in which a plurality of fine triangular grooves were formed adjacent to each other in parallel.
- a 500-m-thick silicon carbide substrate was bonded via a 0.5-m-thick nickel thin film.
- the joining conditions were 900 and 0.5 hours.
- the silicon mold was etched with a mixed solution of hydrofluoric acid and nitric acid.
- the fabricated silicon carbide mold was as shown in Fig. 2. On the surface, multiple fine triangular prisms matching the triangular grooves of the silicon mold were formed adjacent to each other in parallel.
- the surface roughness of this silicon carbide mold is 0.004 to 0.008 mRa, and it is a mold that can be used sufficiently for manufacturing glass optical components.
- the obtained silicon carbide mold was pressed on Pyrex (registered trademark) glass having a thickness of 1 mm at 850 under the conditions of I MPa. As shown in FIG. 3, Pyrex (registered trademark) glass is formed without voids by a silicon carbide mold, and silicon carbide is not damaged.
- a mold for glass press having a very small surface roughness and a fine structure is manufactured.
- Glass optical elements that have been manufactured by photolithography and etching can now be manufactured by press molding. Also light It is expected that high performance and high functionality of the chemical element will be expected, and it is expected that a complicated optical system can be replaced with one glass optical element.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Structural Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Micromachines (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Chemical Vapour Deposition (AREA)
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/557,843 US20060130527A1 (en) | 2003-05-22 | 2004-03-22 | Method of fabricating mold for glass press |
EP04722391A EP1655269A4 (en) | 2003-05-22 | 2004-03-22 | METHOD OF MANUFACTURING MOLD FOR MECHANICAL GLASS MOLDING |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003144363A JP3998603B2 (ja) | 2003-05-22 | 2003-05-22 | ガラスプレス用モールドの作製方法 |
JP2003-144363 | 2003-05-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2004103920A1 true WO2004103920A1 (ja) | 2004-12-02 |
Family
ID=33475202
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2004/003861 WO2004103920A1 (ja) | 2003-05-22 | 2004-03-22 | ガラスプレス用モールドの作製方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20060130527A1 (ja) |
EP (1) | EP1655269A4 (ja) |
JP (1) | JP3998603B2 (ja) |
CN (1) | CN1791558A (ja) |
WO (1) | WO2004103920A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4575787B2 (ja) * | 2005-01-07 | 2010-11-04 | アルプス電気株式会社 | 型の製造方法 |
JP4917844B2 (ja) * | 2006-06-23 | 2012-04-18 | Hoya株式会社 | 成形型、および成形型の製造方法、並びにガラス光学素子の製造方法 |
CN101182100B (zh) * | 2006-11-13 | 2011-07-20 | 亚洲光学股份有限公司 | 具有微结构的玻璃模造模仁的制作方法及玻璃模造模仁 |
JP2009161405A (ja) * | 2008-01-09 | 2009-07-23 | National Institute Of Advanced Industrial & Technology | 微細周期構造を有する炭化ケイ素モールド及びその製造方法 |
US9981844B2 (en) * | 2012-03-08 | 2018-05-29 | Infineon Technologies Ag | Method of manufacturing semiconductor device with glass pieces |
US9249015B2 (en) | 2013-02-27 | 2016-02-02 | International Business Machines Corporation | Mold for forming complex 3D MEMS components |
CN105399046A (zh) * | 2015-11-02 | 2016-03-16 | 中国科学院重庆绿色智能技术研究院 | 无机微光学元件批量化制作方法 |
CN114956520B (zh) * | 2022-04-12 | 2023-09-22 | 深圳技术大学 | 非等温加热的模压方法 |
CN114905793B (zh) * | 2022-05-09 | 2024-02-23 | 深圳技术大学 | 高温模压成型硅模具的方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0512722A (ja) * | 1991-07-05 | 1993-01-22 | Tohoku Nakatani:Kk | スタンパー製造方法 |
JPH07257933A (ja) * | 1994-03-22 | 1995-10-09 | Konica Corp | ガラスプレス成形用型 |
JPH09132418A (ja) * | 1995-11-07 | 1997-05-20 | Hooya Precision Kk | ガラス成形用型及びその製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6452622A (en) * | 1987-08-25 | 1989-02-28 | Canon Kk | Mold member for molding optical element |
US5171348A (en) * | 1989-06-20 | 1992-12-15 | Matsushita Electric Industrial Co., Ltd. | Die for press-molding optical element |
US5873921A (en) * | 1994-09-09 | 1999-02-23 | Hoya Precisions Inc. | Process for manufacturing glass optical elements |
JP3857742B2 (ja) * | 1996-02-28 | 2006-12-13 | 日本タングステン株式会社 | ガラス製光学素子成形用型 |
JPH1179757A (ja) * | 1997-08-28 | 1999-03-23 | Canon Inc | 光学素子成形用型及びその再生方法 |
US6136243A (en) * | 1998-06-04 | 2000-10-24 | Case Western Reserve University | Method for molding high precision components |
JP2001064024A (ja) * | 1999-08-27 | 2001-03-13 | Nikon Corp | 光学素子の製造装置 |
-
2003
- 2003-05-22 JP JP2003144363A patent/JP3998603B2/ja not_active Expired - Fee Related
-
2004
- 2004-03-22 CN CNA2004800135484A patent/CN1791558A/zh active Pending
- 2004-03-22 EP EP04722391A patent/EP1655269A4/en not_active Withdrawn
- 2004-03-22 WO PCT/JP2004/003861 patent/WO2004103920A1/ja active Search and Examination
- 2004-03-22 US US10/557,843 patent/US20060130527A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0512722A (ja) * | 1991-07-05 | 1993-01-22 | Tohoku Nakatani:Kk | スタンパー製造方法 |
JPH07257933A (ja) * | 1994-03-22 | 1995-10-09 | Konica Corp | ガラスプレス成形用型 |
JPH09132418A (ja) * | 1995-11-07 | 1997-05-20 | Hooya Precision Kk | ガラス成形用型及びその製造方法 |
Non-Patent Citations (1)
Title |
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See also references of EP1655269A4 * |
Also Published As
Publication number | Publication date |
---|---|
CN1791558A (zh) | 2006-06-21 |
EP1655269A1 (en) | 2006-05-10 |
EP1655269A4 (en) | 2009-01-14 |
JP2004345897A (ja) | 2004-12-09 |
US20060130527A1 (en) | 2006-06-22 |
JP3998603B2 (ja) | 2007-10-31 |
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