WO2004100621A1 - レーザープラズマ発生方法及び装置 - Google Patents
レーザープラズマ発生方法及び装置 Download PDFInfo
- Publication number
- WO2004100621A1 WO2004100621A1 PCT/JP2004/004031 JP2004004031W WO2004100621A1 WO 2004100621 A1 WO2004100621 A1 WO 2004100621A1 JP 2004004031 W JP2004004031 W JP 2004004031W WO 2004100621 A1 WO2004100621 A1 WO 2004100621A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- laser
- plasma
- plasma generation
- generation method
- fine particles
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
- H05G2/005—X-ray radiation generated from plasma being produced from a liquid or gas containing a metal as principal radiation generating component
Definitions
- the present invention relates to a laser plasma generation method and apparatus for generating radiation from plasma obtained by irradiating a material with a laser.
- An object of the present invention is to provide a method capable of continuously supplying an element existing as a solid at room temperature as a material for laser plasma for a long time and a radiation light source using the same.
- High-temperature, high-density plasma generated by irradiating a short pulse laser is a high-intensity light source that generates radiation from the EUV region to the X-ray region.
- the emitted spectrum differs greatly depending on the laser irradiation conditions and the types of elements that make up the plasma, and it is necessary to optimize the materials to be plasma and the laser irradiation conditions depending on the application.
- EUVL extreme ultraviolet light
- EUVL extreme ultraviolet light
- the multilayer reflector used in EUVL is Mo / Si, and its reflection spectrum has a peak wavelength of 13 nm to 14 nm and a bandwidth of 2-3%, so the light source also needs a spectrum suitable for it. It is.
- Non-Patent Document 1 When plasma is used as a light source with a bandwidth of several percent, it is best to use the 4d-4f band emission in the early 1970s by Sugar (see Non-Patent Document 1) and in the 1980s It was revealed by a study of Sugar and 0, Sullivan.
- the peak wavelength of the 4d-4f band emission is determined by the atomic number of the element, and it is clear that tin having an atomic number of 50 has a peak at 13 nm (see Non-Patent Document 2). Therefore, it is well known that tin may be the best light source for EUVL, which requires 13 light sources.
- Non-Patent Document 3 Xe, which is a gas at room temperature, is used, it will not adhere even if it reaches the surface of the optical element, and there is an expectation that contamination will be minimal, and R & D has been conducted. In fact, no contamination due to the deposition of Xe has been observed.
- Non-Patent Document 4 In the electron temperature is 30- 50 eV, diameter 500 ⁇ m before and after the electron density is required uniform and 10 2Q / cm 3 or more. In the case of tin, which is the best light source for 13nm, the ionization number is around 8, so the required mass is
- Matsui et al. have proposed that tin particles, which are a solid material, are made into fine particles, mixed with Xe gas, and ejected, to increase the 13 mn light intensity.
- this proposal has two problems. One is that particles are scattered during transport by gas and most are not supplied to the plasma generation area, but are scattered to the environment. When the plasma is generated, the pressure reaches 10,000 atmospheres, and the scattering of fine particles is amplified by blowing off the mixed Xe gas at that pressure. This pollutes the environment and damages surrounding materials. The other is that the diffusion of fine particles is large, the density of fine particles that can be supplied to the plasma generation region is low, and high-luminance plasma cannot be generated. In other words, in the method of ejecting Xe gas in which tin is mixed with fine particles, it is difficult to debris-free because the fine particles are scattered and dispersed, and the density of the fine particles that can be supplied is low.
- Non-Patent Document 8 a liquid jet made by dissolving a copper nitrate solution in ethylene glycol is formed into droplets, and 1 kHz repetition of 5-20 keV X-rays has been realized. It is well known that tin is optimal for 13nm light generation, so it is easy to come up with a droplet using tin nitrate or tin sulfate solution.
- Figure 1 shows the results of a numerical simulation calculation of the time variation of the density distribution when a solid plate is irradiated with a laser with a wavelength of 1 m using a one-dimensional fluid code.
- the substance heated to a high temperature by absorbing the laser beam blows out into a vacuum, and as shown in Fig. 1, the solid gate is cut at a speed of the order of tens of nm / ns (abbreviation).
- the size of the region near the EUV emission intensity strong 3x10- 3 g / cm 3 hardly changed. In other words, when the diameter of a solid sunset is several tens of meters or more, as shown in Fig.
- the degree of vacuum in the light source chamber must be about 0.1 Pa or less in the case of oxygen.
- the droplet diameter is 500 im and the solvent that occupies most of the mass is water, it is vaporized by laser irradiation and 5 liters of 0.1 Pa oxygen is produced.
- the EUVL light source is required to operate at about 10 kHz, and this means that 50,000 litters of O.lPa nitrogen will be produced in 1 second, or 10,000 shots. Exhausting this is a considerable burden on the vacuum pump, and it is necessary to reduce the amount of gas to be exhausted to 1/50 or less. If possible, the amount of generated gas should be as small as 1/1000. That is, it is desirable that the diameter of the droplet is as follows.
- the present inventor As a debris-free plasma, the present inventor has proposed a method of making the evening gate into a cavity structure (see Patent Document 2), and has reported the experimental result that it is actually debris-free.
- the problem is that it is not easy to increase the conversion efficiency because it is not easy to increase the plasma density, and the cleaning is insufficient because the distance between the plasma and the solid is not easy to increase. is there.
- Matsui proposed that tin be made into fine particles and mixed with Xe gas for jetting, but most of the fine particles conveyed were scattered in the chamber, extremely polluting the environment, and could be supplied to the plasma generation area. Plasma with high brightness due to low density of fine particles cannot be generated.
- the present invention overcomes the problems of these conventional proposals, and supplies solid material to a place sufficiently separated from surrounding solids at a sufficiently high density without dispersing debris to the environment.
- the purpose is to provide.
- the laser plasma generation method and apparatus according to the present invention are obtained by irradiating a substance with a laser. Radiation is generated from the generated plasma.
- This substance is a particle aggregate in which a large number of ultrafine particles are aggregated, and is characterized by using a material that aggregates by intermolecular force or electrification or vaporizes below the melting point of the ultrafine particles as an aggregating agent.
- the laser-plasma generating method and apparatus of the present invention generate radiation from plasma obtained by irradiating a substance with a laser.
- Ultra-fine particles are generated by irradiation of a solid or liquid target with a short pulse laser in a gas-flowing environment, and the ultra-fine particles are transported to the plasma generation area using the gas flow to supply the plasma-generating substance. It is characterized by doing. BRIEF DESCRIPTION OF THE FIGURES
- FIG. 1 is a diagram showing a time change of a density profile when a spherical target having a diameter is irradiated with a laser beam.
- FIG. 2 is a diagram showing a temporal change of a density profile when a spherical target having a diameter of 20 zm is irradiated with a laser.
- FIG. 3 is a diagram illustrating the formation of droplets of a solution containing ultrafine particles.
- FIG. 4 is a diagram for explaining that the solvent of the droplets is evaporated and the concentration of the fine particles is concentrated to produce a fine particle aggregate.
- FIG. 5 is a diagram illustrating generation of a large-diameter plasma.
- FIG. 6 is a diagram illustrating that the aggregate of fine particles is charged and its trajectory is controlled by an electromagnetic method.
- FIG. 3 is a diagram illustrating the formation of droplets of a solution containing ultrafine particles.
- a solution containing tin fine particles 3 having a diameter of several tens of nil is jetted out of a nozzle 2 as a jet 4 having a diameter of 500 m to um from a nozzle 2.
- a forced vibration having a frequency equal to or higher than the number of repetitions of light source generation is given to the nozzle 2, and the continuous jet 4 is divided into droplets 5.
- the amplitude of vibration of the nozzle due to the vacuum pump and other factors is suppressed as much as possible, and the amplitude of forced vibration applied to the nozzle is sufficiently larger than the amplitude of vibration due to disturbance acting on the nozzle. I do.
- the uniformity of the ultrafine particle concentration in the solution is increased by means such as adjusting the hydrogen ion index of the solution in the storage tank and stirring.
- FIG. 4 is a diagram for explaining that a solvent of droplets is evaporated to produce a fine particle aggregate having a high concentration of fine particles.
- the droplets 5 are heated by the laser 16 to evaporate the solvent 7 in order to supply the particle aggregate 8 having the increased particle concentration to the plasma generation vacuum container 9.
- the diameter of the fine particle aggregate 8 after high concentration is several tens of m.
- the vacuum vessel 1 for generating droplets has a low vacuum exceeding several Pa due to a large amount of evaporation of the solvent.
- the vacuum chamber 9 for plasma generation needs a degree of vacuum of O.lPa or less. For this reason, the two vacuum vessels are connected with a small-diameter aperture to provide a structure that allows sufficient differential pumping.
- FIG. 5 is a diagram for explaining increasing the uniformity of the density when generating a large-diameter plasma.
- a laser 10 for splitting a particle aggregate 10 into a particle aggregate 8 having a diameter of several tens of Irradiate before the formation of plasma, as shown in Fig. 5, a laser 10 for splitting a particle aggregate 10 into a particle aggregate 8 having a diameter of several tens of Irradiate.
- the irradiation of the fission laser 10 dissolves and coalesces the fine particles that make up the aggregate, so the meaning of the fine particle aggregate is lost, so the ultrashort pulse laser is used for the fission laser 10.
- the particles that have absorbed the light of the ultrashort pulse laser expand in temperature and expand, and the center of gravity moves by ⁇ .
- the irradiation energy density has an upper limit. It is acceptable that several layers of fine particles on the surface coalesce, as long as the whole fine particle aggregate does not form a lump.
- the ultrafine particles 3 are diffused 11 into a region having a diameter of several hundreds / zrn in diameter.
- a pulsed laser beam 12 is irradiated to generate a plasma EUV light source.
- the plasma diameter should be about 500 ⁇ 111 and the plasma temperature should be 30-50eV. It is better to adjust the mass of the fine particle aggregate so that the electron density is l (P / cm 3) .
- the pulse laser 12 has a wavelength of l ⁇ m, a pulse width of about 10 ns, and a pulse energy of several It is good to increase from 10 mJ to several hundred mJ.
- FIG. 6 is a diagram illustrating that the aggregate of fine particles is charged and its trajectory is controlled by an electromagnetic method.
- the charged particles 14 are imparted to the particle aggregate 8 by an electron gun 13 or an ion gun and charged.
- the trajectory is controlled by the electrode 15.
- the occurrence time and speed of the particle aggregate 8 may slightly fluctuate.
- the detector 17 detects the time at which the particle aggregate 8 crosses the beam path 16 of the CW laser for one monitor. Then, the pulse is supplied to a plasma control pulse laser control circuit 12 and synchronized.
- the present invention provides a means for supplying a target material having a total weight similar to that of a single sphere having a diameter of several tens of zm as a group of a large number of ultrafine particles.
- ultrafine particles with a diameter of 10 ZI1 or less are vaporized by laser irradiation for several nanoseconds without leaving solid density nuclei.
- a plasma having a uniform density of several hundreds of m can be generated.
- Diameter 10 PC haze 04031 An aggregate of 27 fine particles of zm may be aggregated.However, in order to increase the uniformity when diffusing the fine particles before plasma conversion, it is preferable that the number of fine particles to be aggregated is large. . When ultrafine particles with a diameter of 1 zm are agglomerated, 20,000 particles will be formed into one fine particle aggregate to equal the weight of a single sphere of diameter.
- ultrafine particles To supply a mass equivalent to a single sphere with a diameter of 30 m in a group of ultrafine particles with a diameter of 0.1 / m, 3E7 ultrafine particles are required. Since ultrafine particles have a small mass and a low thermal kinetic velocity, the ultrafine particles have a diffusion angle that is not small. When flying over long distances, they scatter in a wide space.
- the present invention provides means for aggregating ultrafine particles using an intermolecular force and an aggregating force due to charging or an aggregating agent.
- a coagulant liquid nitrogen, water or an organic solvent, which becomes a gas or liquid at room temperature as a medium, does not create a new source of debris and pollutants.
- the liquid When the liquid is ejected from the nozzle, it is a continuous jet immediately after ejection, but after a certain distance, it breaks up.
- the distance at which droplet break-off begins depends on the nozzle diameter, jet velocity, and liquid viscosity. Droplet breakup in continuous jets is due to instability of the fluid, which usually has large fluctuations and cannot produce stable droplets.
- the present invention provides means for imparting vibration to the ejected liquid in a liquid ejecting direction or an arbitrary direction by a nozzle or other means for stable droplet generation.
- FIG. 3 shows an example in which the droplet generation is stabilized by the forced vibration.
- the droplet diameter may be 500 zm. Not in translation.
- the chamber is used to avoid EUV light absorption.
- the diameter of the solvent droplet is desirably the following.
- the density of the solute ultrafine particles must be sufficiently low for stable droplet generation. Therefore, the droplet diameter must be sufficiently large.
- the diameter of the droplet is about twice the diameter of the liquid jet, and the ratio between the interval between successive droplets and the diameter of the droplet is about four times.
- the ratio between the droplet interval and the droplet diameter cannot be arbitrarily large.
- the present invention uses a solvent, as shown in FIG. 4, to generate a large droplet from the nozzle for stable generation of the droplet, and to sufficiently reduce the diameter of the aggregate of fine particles during generation of the plasma light source.
- the present invention provides a means for increasing the concentration of ultrafine particles in a droplet by evaporating the droplet to reduce the droplet diameter.
- the concentration is performed by evaporation or sublimation of the medium from the droplets, but the degree of concentration is controlled by controlling the temperature and flight distance of the droplets.
- the temperature of the droplet can be controlled by heating the droplet with infrared rays, weak laser irradiation, or other heating means. Separate space is provided for concentration in order to prevent pressure increase in the plasma generation vacuum vessel.
- the present invention provides means for charging the droplet by exposure to an electron shower or other methods and means for electrically controlling the movement of the charged droplet.
- the present invention In order to increase the uniformity of the density of the generated plasma, it is effective to disperse the ultrafine particles in the aggregate in advance before irradiating the plasma generation pulse laser. As shown in FIG. 5, the present invention also provides a means for dispersing the ultrafine particles in the fine particle aggregate in a space of a required size.
- the dropletizing solvent that acts as an aggregating agent in the fine particle aggregate is a fluid that is a gas or a liquid at room temperature
- heating the flocculant of the fine particle aggregate with infrared or weak laser irradiation or other heating means causes the droplet medium to evaporate and diffuse
- the ultrafine particles, which are solutes, also start dispersing. If necessary, the ultrafine particles themselves may be turned into weak plasma.
- solute Since the solute is turned into plasma after being turned into plasma in the plasma generation space, it is desirable to use nitrogen, which has a small effect on the environment.
- Liquid nitrogen is a suitable solute, but water that generates oxygen is also suitable.
- an organic solvent containing carbon and other solvents may be used depending on various conditions such as easy dissolution of fine particles and easy formation of droplets. (Ultra-fine particle generation by evaporation)
- the diameter of the ultrafine particles that are dissolved in a liquid to form droplets should be small enough to eliminate solid nuclei by laser irradiation for plasma generation.
- the size varies depending on the laser and irradiation conditions, but is less than about 10 / m for a single pulse. In other words, if the diameter is about 10 ⁇ m, the density of the generated plasma will be uniform to some extent. In some cases, it may be desirable to reduce the thickness from about nm to several hundred nm.
- ultrafine particles As a method for producing ultrafine particles having a diameter of several tens nm to several hundreds of nm, means for aggregating the vapor of the ultrafine particles material can be adopted.
- the ultrafine particles can be mixed with the solvent, but it is also possible to send the vapor of the ultrafine particle material into the solvent and make it ultrafine in the solvent.
- the ultrafine particles used in the present invention can be generated by thermal shock due to pulsed laser irradiation.
- pulsed laser irradiation or other pulsed heating means can be used.
- the thermal kinetic effect decreases, and when the distance to be conveyed is not so large, aggregation by droplet formation to suppress the diffusion of the fine particle group is not always necessary. . But not used environment In order to suppress the number of fine particles to be scattered, it is desirable that the supply of the fine particles be performed not continuously but in a pulsed manner.
- the present invention provides a means for generating ultrafine particles having a diameter of about 0.1 m or more and about 1 m by utilizing the abrasion by a pulse laser, and conveying the group by airflow. I will provide a.
- Irradiation of a solid flat plate with a pulsed laser has been observed to generate fine particles with a particle diameter of 0.2 ⁇ m as a peak.
- the fine particles can be carried in the airflow, and can be guided through a thin tube to a vacuum region for plasma generation.
- gases such as nitrogen gas, helium gas, and air can be used as the transfer gas.
- a solid material is supplied at a sufficiently distant place from surrounding solids at a sufficiently high density without dispersing debris to the environment by supplying the target material in the form of a fine particle aggregate. be able to.
- the present invention provides a high-repetition supply exceeding kHz by forming droplets of a solution in which ultrafine particles are dissolved, thereafter evaporating the solvent and concentrating the solution to form fine particle aggregates, and a plasma generation region.
- the present invention can prevent deterioration of the degree of vacuum in the plasma generation vacuum container by evaporating the solvent of the droplets containing the ultrafine particles before introducing the particle aggregate into the plasma generation vacuum container. it can.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- X-Ray Techniques (AREA)
- Lasers (AREA)
- Plasma Technology (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04723018A EP1615482B1 (en) | 2003-03-24 | 2004-03-24 | Laser plasma producing method and device |
US10/550,413 US7576343B2 (en) | 2003-03-24 | 2004-03-24 | Method and apparatus for generating laser produced plasma |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003080378A JP4264505B2 (ja) | 2003-03-24 | 2003-03-24 | レーザープラズマ発生方法及び装置 |
JP2003-080378 | 2003-03-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2004100621A1 true WO2004100621A1 (ja) | 2004-11-18 |
Family
ID=33294254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2004/004031 WO2004100621A1 (ja) | 2003-03-24 | 2004-03-24 | レーザープラズマ発生方法及び装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7576343B2 (ja) |
EP (1) | EP1615482B1 (ja) |
JP (1) | JP4264505B2 (ja) |
WO (1) | WO2004100621A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7608846B2 (en) * | 2006-01-24 | 2009-10-27 | Komatsu Ltd. | Extreme ultra violet light source device |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7405416B2 (en) * | 2005-02-25 | 2008-07-29 | Cymer, Inc. | Method and apparatus for EUV plasma source target delivery |
JP4555679B2 (ja) * | 2002-05-13 | 2010-10-06 | ジェテック・アクチエボラーグ | X線または極紫外線を生じさせる方法およびそれを利用する方法 |
WO2004086467A1 (ja) * | 2003-03-26 | 2004-10-07 | Kansai Technology Licensing Organization Co., Ltd. | 極端紫外光源及び極端紫外光源用ターゲット |
DE10326279A1 (de) * | 2003-06-11 | 2005-01-05 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Plasma-basierte Erzeugung von Röntgenstrahlung mit einem schichtförmigen Targetmaterial |
JP4337648B2 (ja) | 2004-06-24 | 2009-09-30 | 株式会社ニコン | Euv光源、euv露光装置、及び半導体デバイスの製造方法 |
US7741616B2 (en) | 2004-06-24 | 2010-06-22 | Nikon Corporation | EUV light source, EUV exposure equipment, and semiconductor device manufacturing method |
JP2006128313A (ja) * | 2004-10-27 | 2006-05-18 | Univ Of Miyazaki | 光源装置 |
JP4496355B2 (ja) * | 2005-01-27 | 2010-07-07 | 独立行政法人産業技術総合研究所 | 液滴供給方法および装置 |
DE102005007884A1 (de) * | 2005-02-15 | 2006-08-24 | Xtreme Technologies Gmbh | Vorrichtung und Verfahren zur Erzeugung von extrem ultravioletter (EUV-) Strahlung |
JP4512747B2 (ja) * | 2005-03-02 | 2010-07-28 | 独立行政法人産業技術総合研究所 | レーザープラズマから輻射光を発生させる方法、該方法を用いたレーザープラズマ輻射光発生装置 |
JP4807560B2 (ja) * | 2005-11-04 | 2011-11-02 | 国立大学法人 宮崎大学 | 極端紫外光発生方法および極端紫外光発生装置 |
DE102006017904B4 (de) * | 2006-04-13 | 2008-07-03 | Xtreme Technologies Gmbh | Anordnung zur Erzeugung von extrem ultravioletter Strahlung aus einem energiestrahlerzeugten Plasma mit hoher Konversionseffizienz und minimaler Kontamination |
EP1976344B1 (en) * | 2007-03-28 | 2011-04-20 | Tokyo Institute Of Technology | Extreme ultraviolet light source device and extreme ultraviolet radiation generating method |
JP5386799B2 (ja) * | 2007-07-06 | 2014-01-15 | 株式会社ニコン | Euv光源、euv露光装置、euv光放射方法、euv露光方法および電子デバイスの製造方法 |
JP5458243B2 (ja) * | 2007-10-25 | 2014-04-02 | 国立大学法人大阪大学 | Euv光の放射方法、および前記euv光を用いた感応基板の露光方法 |
JP5280066B2 (ja) * | 2008-02-28 | 2013-09-04 | ギガフォトン株式会社 | 極端紫外光源装置 |
EP2159638B1 (en) | 2008-08-26 | 2015-06-17 | ASML Netherlands BV | Radiation source and lithographic apparatus |
US9265136B2 (en) | 2010-02-19 | 2016-02-16 | Gigaphoton Inc. | System and method for generating extreme ultraviolet light |
US9113540B2 (en) | 2010-02-19 | 2015-08-18 | Gigaphoton Inc. | System and method for generating extreme ultraviolet light |
US8263953B2 (en) * | 2010-04-09 | 2012-09-11 | Cymer, Inc. | Systems and methods for target material delivery protection in a laser produced plasma EUV light source |
US9335637B2 (en) * | 2011-09-08 | 2016-05-10 | Kla-Tencor Corporation | Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation |
JP6121414B2 (ja) * | 2012-06-22 | 2017-04-26 | ギガフォトン株式会社 | 極端紫外光生成システム |
JP6364002B2 (ja) * | 2013-05-31 | 2018-07-25 | ギガフォトン株式会社 | 極端紫外光生成システム |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000091095A (ja) * | 1998-09-14 | 2000-03-31 | Nikon Corp | X線発生装置 |
JP2000215998A (ja) * | 1999-01-26 | 2000-08-04 | Nikon Corp | X線発生装置及びx線装置 |
WO2002046839A2 (en) | 2000-10-20 | 2002-06-13 | University Of Central Florida | Laser plasma from metals and nano-size particles |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE510133C2 (sv) * | 1996-04-25 | 1999-04-19 | Jettec Ab | Laser-plasma röntgenkälla utnyttjande vätskor som strålmål |
JP2897005B1 (ja) | 1998-02-27 | 1999-05-31 | 工業技術院長 | レーザプラズマ光源及びこれを用いた輻射線発生方法 |
JP2001023795A (ja) * | 1999-07-05 | 2001-01-26 | Toyota Macs Inc | X線発生装置 |
JP2001108799A (ja) | 1999-10-08 | 2001-04-20 | Nikon Corp | X線発生装置、x線露光装置及び半導体デバイスの製造方法 |
JP2002008891A (ja) | 2000-06-22 | 2002-01-11 | Nikon Corp | 電磁波発生装置、これを用いた半導体製造装置並びに半導体デバイスの製造方法 |
JP3836326B2 (ja) | 2001-02-14 | 2006-10-25 | 松下電器産業株式会社 | 高純度標準粒子作製装置 |
-
2003
- 2003-03-24 JP JP2003080378A patent/JP4264505B2/ja not_active Expired - Lifetime
-
2004
- 2004-03-24 EP EP04723018A patent/EP1615482B1/en not_active Expired - Fee Related
- 2004-03-24 WO PCT/JP2004/004031 patent/WO2004100621A1/ja active Application Filing
- 2004-03-24 US US10/550,413 patent/US7576343B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000091095A (ja) * | 1998-09-14 | 2000-03-31 | Nikon Corp | X線発生装置 |
JP2000215998A (ja) * | 1999-01-26 | 2000-08-04 | Nikon Corp | X線発生装置及びx線装置 |
WO2002046839A2 (en) | 2000-10-20 | 2002-06-13 | University Of Central Florida | Laser plasma from metals and nano-size particles |
Non-Patent Citations (3)
Title |
---|
EICKMANS, APPL.OPT., vol. 26, 1987, pages 3721 |
R.J.TOMKINS, REV.SCI.INSTRUM., vol. 69, 1998, pages 3113 |
See also references of EP1615482A4 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7608846B2 (en) * | 2006-01-24 | 2009-10-27 | Komatsu Ltd. | Extreme ultra violet light source device |
Also Published As
Publication number | Publication date |
---|---|
EP1615482B1 (en) | 2012-02-15 |
EP1615482A1 (en) | 2006-01-11 |
JP2004288517A (ja) | 2004-10-14 |
JP4264505B2 (ja) | 2009-05-20 |
US7576343B2 (en) | 2009-08-18 |
US20070158577A1 (en) | 2007-07-12 |
EP1615482A4 (en) | 2009-12-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4264505B2 (ja) | レーザープラズマ発生方法及び装置 | |
JP5901210B2 (ja) | 放射線発生装置及び放射線発生方法 | |
JP5073146B2 (ja) | X線発生方法および装置 | |
EP0895706B2 (en) | Method and apparatus for generating x-ray or euv radiation | |
US7067832B2 (en) | Extreme ultraviolet light source | |
US6647088B1 (en) | Production of a dense mist of micrometric droplets in particular for extreme UV lithography | |
EP1367441A2 (en) | Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source | |
US8569721B2 (en) | Extreme ultra violet light source apparatus | |
JP4512747B2 (ja) | レーザープラズマから輻射光を発生させる方法、該方法を用いたレーザープラズマ輻射光発生装置 | |
JP2019082483A (ja) | 組成分析システムのためのレーザアブレーションセル及びトーチシステム | |
JP2006314900A (ja) | 微粒子発生方法及び装置 | |
JP2006210157A (ja) | レーザ生成プラズマ方式極端紫外光光源 | |
US20080142738A1 (en) | Generator for flux specific bursts on nano-particles | |
JP4496355B2 (ja) | 液滴供給方法および装置 | |
RU2412108C2 (ru) | Способ получения наночастиц и устройство для его осуществления | |
Endo | Extendibility evaluation of industrial EUV source technologies for kW average power and 6. x nm wavelength operation | |
JP2007059373A (ja) | 液滴供給方法及び装置 | |
JP5234448B2 (ja) | 放射線源用ターゲット、その製造方法及び放射線発生装置 | |
JP2008031529A (ja) | ナノ粒子の堆積方法及びナノ粒子堆積装置 | |
JP2005256017A (ja) | 粒子配置装置及び粒子の配置方法 | |
JP2005251601A (ja) | X線発生用ターゲット物質供給方法およびその装置 | |
TWI812635B (zh) | 用於捕獲於材料路徑上行進之材料之容器 | |
Jabbar et al. | Quasi-Mono-Energetic Electron Beams From An Argon Clustered Gas Target Driven By A Laser For Radiation Therapy. | |
TW202319830A (zh) | 產生在極紫外線光源中之目標材料的小滴之設備及方法 | |
TW202209933A (zh) | 在euv源之液滴產生器中加速液滴之方法及其設備 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): BW GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 2004723018 Country of ref document: EP |
|
WWP | Wipo information: published in national office |
Ref document number: 2004723018 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2007158577 Country of ref document: US Ref document number: 10550413 Country of ref document: US |
|
WWP | Wipo information: published in national office |
Ref document number: 10550413 Country of ref document: US |