WO2004090969A1 - 炭化珪素半導体装置およびその製造方法 - Google Patents
炭化珪素半導体装置およびその製造方法 Download PDFInfo
- Publication number
- WO2004090969A1 WO2004090969A1 PCT/JP2004/004023 JP2004004023W WO2004090969A1 WO 2004090969 A1 WO2004090969 A1 WO 2004090969A1 JP 2004004023 W JP2004004023 W JP 2004004023W WO 2004090969 A1 WO2004090969 A1 WO 2004090969A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- silicon carbide
- semiconductor device
- silicon
- film
- carbide semiconductor
- Prior art date
Links
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 87
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 70
- 239000004065 semiconductor Substances 0.000 title claims abstract description 52
- 238000000034 method Methods 0.000 title claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 50
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 34
- 239000012535 impurity Substances 0.000 claims abstract description 34
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 34
- 229910052751 metal Inorganic materials 0.000 claims abstract description 16
- 239000002184 metal Substances 0.000 claims abstract description 15
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000010438 heat treatment Methods 0.000 claims abstract description 4
- 239000001301 oxygen Substances 0.000 claims abstract description 4
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 230000003647 oxidation Effects 0.000 claims description 11
- 238000007254 oxidation reaction Methods 0.000 claims description 11
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 9
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 9
- 238000005229 chemical vapour deposition Methods 0.000 claims description 8
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 239000002131 composite material Substances 0.000 claims 3
- 239000003245 coal Substances 0.000 claims 1
- 230000015556 catabolic process Effects 0.000 abstract description 14
- 230000007774 longterm Effects 0.000 description 8
- 238000005259 measurement Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000001186 cumulative effect Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 150000002500 ions Chemical group 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 239000002365 multiple layer Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/048—Making electrodes
- H01L21/049—Conductor-insulator-semiconductor electrodes, e.g. MIS contacts
Definitions
- the present invention relates to a silicon carbide semiconductor device fabricated on a silicon carbide (SiC) semiconductor substrate, and more particularly to a silicon carbide semiconductor device having a metal-insulating film-semiconductor (MIS) structure (field effect transistor (MI SFET)). And its manufacturing method.
- MIS metal-insulating film-semiconductor
- silicon carbide (SiC) Compared to silicon (Si), silicon carbide (SiC) has excellent physical properties such as (1) wide band gap, (2) high dielectric breakdown strength, and (3) high electron saturation drift velocity. You. Therefore, by using silicon carbide (SiC) as a substrate material, a power semiconductor element having a high withstand voltage and a low resistance exceeding the limit of silicon (Si) can be manufactured.
- silicon carbide As well as silicon (Si), a feature that can be formed of silicon oxide (Si0 2) which is an insulator by thermal oxidation.
- the realization of the MISFET silicon carbide substrate material high long-term reliability of silicon oxide to be used as the gate oxide film (Si0 2) must be guaranteed.
- the total breakdown charge (Q BD ) is widely used. This value indicates the total amount of electric charge flowing through the silicon oxide film until the silicon oxide film reaches dielectric breakdown.
- Non-Patent Document 1 J, Anthony et al. "Materials Science and Engineering B61-62, 460 (1999)] Disclosure of the invention
- the present invention improves the dielectric breakdown of a silicon oxide film formed on a silicon carbide substrate, and provides a metal-insulating film-semiconductor (MIS) comprising a silicon carbide (SiC) semiconductor substrate having excellent characteristics. It is an object to obtain a silicon carbide semiconductor device having a structure.
- the present invention provides a method for forming a silicon oxide film by a thermal oxidation method on a silicon carbide substrate having a low concentration of an impurity element inevitably contained in the substrate, in other words, an impurity element which is not an intentionally doped impurity. It has been found that the formation of a gate insulating film is effective in improving the withstand voltage and long-term reliability of the silicon oxide film.
- the silicon carbide semiconductor device according to the present invention has an n-type carbide having a p-type impurity element and a metal element having a concentration of 3xl0 14 cm- 3 or less, respectively. It has a silicon region.
- the silicon carbide semiconductor device has a metal-insulating-film-semiconductor (MIS) structure, and the p-type impurity element and the metal element have a concentration of 3 ⁇ 10 14 cm ⁇ 3 or less under the gate insulating film.
- the p-type impurity element and the metal element are at least one or two or more of I of Al, B, Ti, Cr, Fe, and Ni, and the total concentration is 5.OxlO 15 cm “ 3 or less.
- the silicon carbide semiconductor device of the present invention has a DM0SFET, Lateral Resurf M0SFET or UMOSFET.
- the MIS structure of a silicon carbide semiconductor device is usually formed on a silicon carbide layer that is epitaxially grown on a silicon carbide substrate.
- a method of manufacturing a silicon carbide semiconductor device according to the present invention is a method of manufacturing a silicon carbide semiconductor device using a silicon carbide substrate having a silicon carbide layer epitaxially grown on an uppermost layer, wherein the method is intentionally performed during epitaxial growth.
- the silicon carbide layer is epitaxially grown so that the concentration of each of the impurities other than the doped impurity is 3 ⁇ 10 14 cm ⁇ 3 or less.
- a method of manufacturing a silicon carbide semiconductor device according to the invention using a carbonization silicon substrate having n-type silicon carbide region each concentration is less than 3xlO w cm_ 3 of p-type impurity element and the metal element, a metal - insulator
- a method for manufacturing a silicon carbide semiconductor device for forming a gate insulating film having a film-semiconductor (MIS) structure comprising: forming an oxide film in a portion of the gate insulating film that is in contact with a silicon carbide substrate in the air It is formed by heating in an oxygen atmosphere or a steam atmosphere.
- MIS film-semiconductor
- a silicon oxide film formed by chemical vapor deposition a silicon nitride film formed by chemical vapor deposition, or a silicon oxynitride film formed by thermally oxidizing a silicon nitride film formed by chemical vapor deposition. Any one or more of them may be formed.
- FIG. 1 is a schematic cross-sectional view of the MIS structure used for TDDB measurement.
- FIG. 2 is a diagram showing the QBD dependence of the Weibull plate as a function of the cumulative defect rate P of the silicon oxide film measured by TDDB.
- a silicon carbide semiconductor device having a metal-insulating film-semiconductor (MIS) structure has a structure in which each of the impurity elements that are unintentionally mixed into the silicon carbide (SiC) substrate under the gate insulating film, by setting the concentration and 3xlO l cin- 3 below, or by using a silicon carbide substrate concentration of each of the p-type non-pure product elements and metal elements having an n-type silicon carbide region is 3xl0 14 cm- 3 or less This significantly improves the dielectric strength and long-term reliability of the silicon oxide film, which is a major feature of the present invention.
- MIS metal-insulating film-semiconductor
- the impurity element Al, B, Ti, Cr , Fe 5 Ni and the like, which easily mixed into the silicon carbide (SiC) substrate, and they are contained in excess of 3X10 14 CBT 3 withstand voltage ⁇ And long-term reliability. That is, when the above-described impurity element, particularly a metal element, is taken into the silicon oxide film, it acts as a charge trap center, so that electrons injected into the silicon oxide film when stress is applied, or This is because holes generated by impact ionization are trapped, the local electric field in the silicon oxide film is rapidly changed, and the dielectric breakdown life is deteriorated. Therefore, it is extremely important to reduce the impurity element concentration. Such knowledge was first recognized by the present inventors. In particular, the total concentration of these impurity elements is desirably 5.0xl0 15 cm- 3 or less.
- the present invention uses a silicon carbide (SiC) substrate containing a small amount of impurity elements that are inevitably mixed as a starting material, and forms an oxide film serving as a gate insulating film in a portion in contact with the silicon carbide substrate in the air,
- the semiconductor device is formed by heating in an atmosphere or a steam atmosphere to constitute a semiconductor device.
- any one of a silicon oxide film, a silicon nitride film, and a silicon oxynitride film, or two or more of them can be formed thereon.
- These single-layer or multiple-layer films can be obtained by chemical vapor deposition and / or thermal oxidation of a silicon nitride film by chemical vapor deposition.
- a silicon carbide (SiC) substrate having excellent characteristics can be used, and a silicon carbide semiconductor device having a gate insulating film having a high withstand voltage and long-term reliability can be manufactured.
- These silicon carbide semiconductor devices having the MIS structure can be used as silicon carbide semiconductor devices for DM0SFET, Lateral Resurf MOSFET, and UM0SFET. Examples and comparative examples
- SiC silicon carbide
- two types of silicon carbide (SiC) having different impurity concentrations as described below were used.
- SIMS secondary ion mass spectrometry
- this substrate has the lower impurity concentration in the silicon carbide (SiC) substrate, the A substrate (Example) and the higher impurity concentration in the B substrate Plate (Comparative Example).
- a thick insulating film 2 is formed on each silicon carbide (SiC) substrate 1, a window is opened in this, a normal RCA cleaning is performed, then a sacrificial oxide film is formed and removed with hydrofluoric acid. did. Then, in an oxygen atmosphere at 1000 ° C or more at atmospheric pressure was formed in 50 dishes silicon oxide (Si0 2) film 3 of silicon carbide (SiC) substrates.
- the sample was heat treated at 1100 ° C. for 30 minutes in a nitrogen gas flow rate of 1 liter / min.
- an A1 electrode 4 and an ohmic electrode 5 for forming an ohmic contact with the substrate were formed on the silicon oxide film 3, thereby producing an M0S structure sample.
- This sample was connected to a TDDB measurement device 6, and a time-dependent dielectric breakdown (TDDB) measurement was performed in a vacuum-evacuated metal measurement chamber while light was cut off.
- TDDB time-dependent dielectric breakdown
- the horizontal axis represents D that has passed through the silicon oxide film by the time the dielectric breakdown of the silicon oxide film occurred, and the vertical axis represents a Weibull distribution plot as a function of the cumulative defect rate p.
- dielectric breakdown of the silicon oxide film starts to occur at the same level in both types of silicon carbide substrates.
- the subsequent dielectric breakdown of the silicon oxide film showed a better value for Q B1) on the A substrate than on the B substrate.
- the B substrate of the comparative example is 0.03 C / cm 2 , whereas The substrate is 0.16 C / cm 2, which is about an order of magnitude higher. .
- an impurity element when taken into a silicon oxide film, it acts as a charge trapping center, and thus is generated by electrons injected into the silicon oxide film when a stress is applied or by impact ionization.
- the trapping holes are trapped, locally accelerating the change in the internal electric field of the silicon oxide film, and causing a deterioration in the dielectric breakdown life.
- Table 1 shows the secondary ions Shows the concentrations of Ti, Al and B impurity elements in silicon carbide (SiC) substrates (A substrate, B substrate) measured by mass spectrometry (SIMS).
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005505190A JPWO2004090969A1 (ja) | 2003-03-24 | 2004-03-24 | 炭化珪素半導体装置およびその製造方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003-080052 | 2003-03-24 | ||
JP2003080052 | 2003-03-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2004090969A1 true WO2004090969A1 (ja) | 2004-10-21 |
Family
ID=33156606
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2004/004023 WO2004090969A1 (ja) | 2003-03-24 | 2004-03-24 | 炭化珪素半導体装置およびその製造方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPWO2004090969A1 (ja) |
WO (1) | WO2004090969A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010123794A (ja) * | 2008-11-20 | 2010-06-03 | Toyota Motor Corp | p型SiC半導体 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1167757A (ja) * | 1997-08-13 | 1999-03-09 | Agency Of Ind Science & Technol | 酸化薄膜形成方法 |
JP2001291869A (ja) * | 2000-04-06 | 2001-10-19 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
JP2003086518A (ja) * | 2001-09-10 | 2003-03-20 | Toshiba Corp | 炭化珪素膜のcvd方法、cvd装置及びcvd装置用サセプター |
-
2004
- 2004-03-24 WO PCT/JP2004/004023 patent/WO2004090969A1/ja active Application Filing
- 2004-03-24 JP JP2005505190A patent/JPWO2004090969A1/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1167757A (ja) * | 1997-08-13 | 1999-03-09 | Agency Of Ind Science & Technol | 酸化薄膜形成方法 |
JP2001291869A (ja) * | 2000-04-06 | 2001-10-19 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
JP2003086518A (ja) * | 2001-09-10 | 2003-03-20 | Toshiba Corp | 炭化珪素膜のcvd方法、cvd装置及びcvd装置用サセプター |
Non-Patent Citations (1)
Title |
---|
NISHIO J, ET AL: "Investigation of residual impurities in 4H-SiC epitaxial layers grown by hot-wall chemical vapor deposition", MATERIALS SCIENCE FORUM VOLS., vol. 389-393, 2002, pages 215 - 218, XP002981719 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010123794A (ja) * | 2008-11-20 | 2010-06-03 | Toyota Motor Corp | p型SiC半導体 |
DE112009003685T5 (de) | 2008-11-20 | 2012-10-18 | Toyota Jidosha Kabushiki Kaisha | P-SiC-Halbleiter |
US8399888B2 (en) | 2008-11-20 | 2013-03-19 | Toyota Jidosha Kabushiki Kaisha | P-type SiC semiconductor |
Also Published As
Publication number | Publication date |
---|---|
JPWO2004090969A1 (ja) | 2006-07-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1463121B1 (en) | Semiconductor device and production method therefor | |
TW457627B (en) | Layered dielectric on silicon carbide semiconductor structures | |
Sharma et al. | High-mobility stable 4H-SiC MOSFETs using a thin PSG interfacial passivation layer | |
JP5229845B2 (ja) | 炭化ケイ素mosfetの製造方法および炭化ケイ素mosfet | |
JP5212833B2 (ja) | 半導体装置 | |
JP5584823B2 (ja) | 炭化珪素半導体装置 | |
US9755064B2 (en) | Semiconductor device and method for manufacturing the same | |
US20070001176A1 (en) | Environmentally robust passivation structures for high-voltage silicon carbide semiconductor devices | |
US7256082B2 (en) | Production method for semiconductor device | |
US20160247884A1 (en) | Semiconductor device and method for manufacturing the same | |
JP2002261275A (ja) | Mosデバイス | |
JP2016063111A (ja) | 半導体装置及びその製造方法 | |
KR20140085595A (ko) | 채널 이동도가 증가한 반도체 소자를 제조하기 위한 습식 화학 공정 | |
JP2011165941A (ja) | 半導体装置および半導体装置の製造方法 | |
JP6432232B2 (ja) | 炭化ケイ素半導体装置および炭化ケイ素半導体装置の製造方法 | |
US20220115529A1 (en) | Semiconductor device and method for manufacturing the same | |
JP2013201308A (ja) | 半導体装置及びその製造方法 | |
WO2004025735A1 (ja) | 半導体装置 | |
JP2003243653A (ja) | 炭化珪素半導体装置の製造方法 | |
US8524585B2 (en) | Method of manufacturing semiconductor device | |
JP2015060905A (ja) | 半導体装置及びその製造方法 | |
JP2012151400A (ja) | SiC半導体装置、SiC半導体装置の製造方法 | |
US20120231618A1 (en) | Method of manufacturing semiconductor device | |
JP5072482B2 (ja) | 炭化珪素半導体装置の製造方法 | |
WO2004090969A1 (ja) | 炭化珪素半導体装置およびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NA NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): BW GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 2005505190 Country of ref document: JP |
|
122 | Ep: pct application non-entry in european phase |