WO2004069438A1 - Appareil de nettoyage a bain d'air automatique et procede d'assemblage d'un dispositif d'affichage a cristaux liquides - Google Patents

Appareil de nettoyage a bain d'air automatique et procede d'assemblage d'un dispositif d'affichage a cristaux liquides Download PDF

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Publication number
WO2004069438A1
WO2004069438A1 PCT/CN2003/000121 CN0300121W WO2004069438A1 WO 2004069438 A1 WO2004069438 A1 WO 2004069438A1 CN 0300121 W CN0300121 W CN 0300121W WO 2004069438 A1 WO2004069438 A1 WO 2004069438A1
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WO
WIPO (PCT)
Prior art keywords
liquid crystal
crystal display
display device
air
bath cleaning
Prior art date
Application number
PCT/CN2003/000121
Other languages
English (en)
French (fr)
Inventor
I-Min Chin
Chien-Wen Lai
Original Assignee
Quanta Display Inc.
Quanta Display Japan Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quanta Display Inc., Quanta Display Japan Inc. filed Critical Quanta Display Inc.
Priority to AU2003221273A priority Critical patent/AU2003221273A1/en
Priority to PCT/CN2003/000121 priority patent/WO2004069438A1/zh
Publication of WO2004069438A1 publication Critical patent/WO2004069438A1/zh

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02Cleaning by the force of jets, e.g. blowing-out cavities
    • B08B5/023Cleaning travelling work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02Cleaning by the force of jets, e.g. blowing-out cavities
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1316Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133354Arrangements for aligning or assembling substrates

Definitions

  • the invention relates to an automatic air-bath cleaning device and method for assembling liquid crystal display device components, which are suitable for automatically removing foreign substances attached to the liquid crystal panel and the backlight module component during transportation. Background technique
  • LCD liquid crystal display device
  • the liquid crystal display device mainly uses a liquid crystal panel for display. Since the liquid crystal panel itself does not emit light, it is necessary to supply a light source with sufficient brightness and uniform distribution so that the liquid crystal panel can display images normally. The function of supplying the light source is performed by the backlight module.
  • liquid crystal display device when assembling a liquid crystal display device, first assemble the external circuit (such as the driver IC and signal circuit board) of the liquid crystal panel in front of the module (LCM) of the liquid crystal display device, and then cut the liquid crystal panel. After it is made into an appropriate size, it is sent to a backlight module assembly area and assembled with a backlight module composed of an optical film, a light guide plate, and a lamp tube.
  • the external circuit such as the driver IC and signal circuit board
  • the optical film and other components constituting the backlight module also have the same problem of foreign matter attachment. If the foreign matter attached to the optical film is not removed and then brought into the assembly area, it will also increase the assembly failure rate of the LCD device , Causing defects in the product.
  • an object of the present invention is to provide an automatic air bath cleaning device and method for assembling liquid crystal display device components, which are applicable to the transportation process of liquid crystal panel and backlight module components, and can automatically Removal of foreign objects reduces labor and time costs for manual removal actions, and can effectively control the adhesion of foreign objects between LCD panel or backlight module components, improving product yield.
  • the present invention provides an automatic air-bath cleaning device for a liquid crystal panel and a backlight module element, including: a conveying device for conveying the liquid crystal display device element; a circulating filtering air supply device provided in the conveying device for generating A flow of air removes foreign matter adhering to the components of the liquid crystal display device; and an assembly area is provided at the end of the conveying device to receive the liquid crystal display device components for assembly.
  • the circulation The filter air supply device may further include a filter screen; a high-efficiency filter provided on one side of the filter screen; a air supply device provided on the other side of the high-efficiency filter opposite to the filter screen; an air outlet, provided The airflow side of the windmill device sends airflow to the conveying device; and an air inlet, the airflow is received by the conveying device and returned to the filter; wherein the airflow is along the air inlet, the filter, the high-efficiency filter, the air supply device and The air outlet forms a circulating air flow.
  • a nozzle may be provided at the air outlet to increase the airflow velocity and enhance the effect of removing foreign matter.
  • the present invention also provides an automatic air bath cleaning method for assembling liquid crystal display device components, including the following steps: firstly providing a liquid crystal display device component; secondly, placing the liquid crystal display device component on a conveying device for conveying, The conveying device is provided with a circulating filtering air-supplying device; then, the liquid crystal display device element is sent into the circulating filtering air-supplying device, and the foreign matter attached to the liquid crystal display device element is removed by circulating the airflow generated by the circulating filtering air-supply device; The liquid crystal display device components are fed into the assembly area.
  • the flow direction of the circulating air flow is preferably set to be the same as the conveying direction of the conveying device.
  • the liquid crystal display device element may be a liquid crystal panel or an optical film of a backlight module.
  • Fig. 1 is a perspective view showing an automatic air bath cleaning device for assembling a liquid crystal display device element according to an embodiment of the present invention.
  • Fig. 2 is a plan view showing an automatic air bath cleaning device for assembling the liquid crystal display device elements of Fig. 1;
  • FIG. 3 is a schematic diagram showing the circulating filtering air supply device 10 in Fig. 1.
  • FIG. 4 is a flowchart showing an automatic air bath cleaning method for assembling liquid crystal display device elements according to the present invention. detailed description
  • FIG. 1 is a three-dimensional appearance showing an automatic air bath cleaning device for a liquid crystal panel and a backlight module element of the present invention.
  • the automatic air-bath cleaning device for a liquid crystal panel and a backlight module element of the present invention includes a circulating filtering air supply device 10 and a conveying device 20.
  • the conveying device 20 may be a conveying belt for conveying components of a liquid crystal display device, such as a liquid crystal panel, or an optical film of a backlight module.
  • the circulating filtering air-supplying device 10 is set up on the conveying device 20, and is used for generating an air flow to remove the foreign matters attached to the elements of the liquid crystal display device.
  • the liquid crystal panel and backlight module component automatic air bath cleaning device of the present invention also has an assembly area 30 disposed at the end of the conveying device 20 for receiving the liquid crystal display device components for assembly.
  • the circulating filtering air supply device 10 can be set as shown in FIG. 3.
  • the circulating filtering air supply device 10 is set up on the conveying device 20 and has an air outlet 122, a The air inlet 124, a filter screen 14, a high-efficiency filter 16, and an air supply device 18, and a circulation passage 12 is formed between the circulating filtration air supply device 10 and the conveyance device 20.
  • the functions of each component are explained separately below.
  • the function of the filter screen 14 is to preliminary filter foreign objects in the air flow.
  • the high-efficiency filter 16 is disposed on one side of the screen 14 to further filter the airflow.
  • the air supply device 18 may be a windmill, which is disposed on the other side of the high-efficiency filter 16 relative to the screen 14 to maintain the airflow direction.
  • the airflow in FIG. 3 flows counterclockwise.
  • the air outlet 122 is provided on the air outlet side of the windmill device 18, and sends airflow to the conveying channel 12. Airflow When the conveying channel 12 flows, its flow direction is the same as the conveying direction of the conveying device 20. Finally, the airflow flows to the end of the conveying channel 12 and is sent back to the filter screen 14 through the air inlet 124.
  • the air flow returns to the conveying channel 12 along the air inlet 124, the filter screen 14, the high-efficiency filter 16, the air supply device 18, and the air outlet 122 along the air inlet 124, the filter 14, and the air outlet 122 to form a circulating air flow.
  • a liquid crystal display device element for example, a liquid crystal panel or an optical film of a backlight module is provided (step S10), and is ready to be sent to an assembly area for assembly.
  • the liquid crystal panel or the optical film is placed on the conveying device 20 to be conveyed (step S20). Since the circulating filtering air supply device 10 is set up on the conveying device 20, the conveying device 20 sends the liquid crystal panel or optical film into the circulating filtering air supply device 10 (step S30), and the circulating filtering air supply device 10 generates airflow to clear the liquid crystal. Foreign matter adhering to the panel / optical film (step S40). After passing through the circulating filtering air supply device 10, the conveying device 20 sends the liquid crystal panel / optical film into the assembly area 30 (step S50) to complete the cleaning operation.
  • the circulating filtering air supply device 10 is set such that when the airflow flows in the conveying channel 12, its flow direction is the same as the conveying direction of the conveying device 20; It can also be set to other directions to get different airflow removal effects.
  • the automatic air bath cleaning device and method for assembling liquid crystal display device components according to the present invention are applicable to the transportation process of liquid crystal panel and backlight module components, and can automatically remove foreign objects on the liquid crystal panel and backlight module components, thereby reducing manual removal.
  • the labor and time cost of the action can effectively control the adhesion of foreign objects between the LCD panel or the backlight module components, and improve the product yield.

Landscapes

  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Liquid Crystal (AREA)

Description

液晶显示装置元件组装自动气浴清洁装置及方法 技术领域
本发明涉及一种液晶显示装置元件组装自动气浴清洁装置及 方法,适用于在液晶面板及背光模块元件进行输送时, 自动清除附 着于其上的异物。 背景技术
近年来, 显示装置的技术不断演进, 形式也日益多样化, 从传 统的阴极射线管(CRT)不断演进而产生各种新式的显示装置。 其 中, 液晶显示装置(LCD)具备轻薄、 省电、 低辐射等优点, 因此 逐渐成为现今常用的显示装置之一,可广泛应用于计算机、数字相 机、摄录像机、笔记本电脑或移动电话等通讯、信息或消费性电子 产品之中。
液晶显示装置主要是以一液晶面板进行显示,由于液晶面板本 身并不会发光, 因此必须供应亮度充分与分布均匀的光源,使液晶 面板能够正常显示影像。 此一供应光源的功能即由背光模块来进 行。
一般而言,液晶显示装置在进行组装时,先将液晶面板于液晶 显示装置之模块 (LCM) 前段完成外部线路 (例如驱动 IC及讯号 电路路板)的组装后, 再将液晶面板进行切割, 使其成为适当的大 小之后, 送入背光模块组装区域, 与由光学膜片、 导光板、 灯管等 所构成的背光模块进行组装。
然而,液晶面板进行生产后,由于必须经由输送与切割等动作, 因此最重要且最不容易克服的问题之一,便是因液晶面板的环境及 液晶面板本身因切割等动作而产生的异物,例如切屑或环境中的灰 尘等问题。另外, 液晶面板在切割或输送时, 也可能因磨擦而产生 静电问题,使其更容易吸附环境中的异物。这些附着于液晶面板上 的异物若未清除,而随着液晶面板带入组装区,则可能会造成液晶 显示装置的组装不良率增加,进而造成作业人员产出效率降低,造 成产品光学之瑕疵。
另外,构成背光模块的光学膜片等元件,也有相同的异物附着 问题, 附着于光学膜片上的异物若未清除, 而随之带入组装区, 也 会使液晶显示装置的组装不良率增加, 造成产品之瑕疵。
针对上述的异物附着问题,除了改善液晶面板以及背光模块等 元件作业环境的洁净度之外, 习知的作法通常是以人工方式, 以毛 刷等清洁工具将液晶面板或背光模块元件上的异物加以清除。 然 而,如此的做法不仅耗费人工与时间成本,且并不见得能有效控制 液晶面板或背光模块元件间之异物附着现象。 发明内容
有鉴于此, 本发明的目的是提出一种液晶显示装置元件组装 之自动气浴清洁装置及方法,适用于液晶面板及背光模块元件的输 送过程中, 可自动将液晶面板及背光模块元件上的异物加以清除, 减少人工清除动作的人工与时间成本,且可有效控制液晶面板或背 光模块元件间之异物附着, 提升产品良率。
为此,本发明提供了一种液晶面板及背光模块元件自动气浴清 洁装置, 包含: 一输送装置, 用以输送液晶显示装置元件; 一循环 过滤送风装置, 设置于输送装置, 用以产生一气流, 对液晶显示装 置元件上附着之异物加以清除; 以及一组装区,设置于输送装置之 末端, 接收液晶显示装置元件以进行组装。
本发明之液晶面板及背光模块元件自动气浴清洁装置中,循环 过滤送风装置还可包含一滤网;一高效率过滤器,设置于滤网之一 侧; 一送风装置, 设置于高效率过滤器相对于滤网之另一侧; 一出 风口, 设置于风车装置之出风侧, 向输送装置送出气流; 以及一入 风口, 由输送装置接收气流, 并送回滤网; 其中, 气流沿入风口、 滤网、 高效率过滤器、送风装置以及出风口而构成一循环气流。此 外, 在出风口可设有一喷嘴, 以增加气流之流速, 加强异物清除的 效果。
另外,本发明还提供了一种液晶显示装置元件组装之自动气浴 清洁方法, 包含下列步骤: 首先提供一液晶显示装置元件; 其次, 将液晶显示装置元件放置于一输送装置, 以进行输送,其中输送装 置设置有一循环过滤送风装置;然后,将液晶显示装置元件送入循 环过滤送风装置,藉由循环过滤送风装置产生之气流,清除液晶显 示装置元件上附着之异物;最后,将液晶显示装置元件送入组装区。
本发明之液晶显示装置元件组装之自动气浴清洁装置及方法 中, 循环气流之流动方向最好设置成相同于该输送装置之输送方 向。 另外, 液晶显示装置元件可为一液晶面板, 或是一背光模块之 光学膜片。
为使本发明之上述及其它目的、特征和优点能更明显易懂,下 文特举一具体之较佳实施例, 并配合附图做详细说明。 附图说明
图 1 是显示本发明一实施例之液晶显示装置元件组装自动气 浴清洁装置之立体图。
图 2是显示第 1图之液晶显示装置元件组装自动气浴清洁装置 之俯视图。
图 3是显示第 1图中之循环过滤送风装置 10之示意图。 图 4 是显示本发明之液晶显示装置元件组装自动气浴清洁方 法之流程图。 具体实施方式
请参见图 1〜3, 以一实施例说明本发明之液晶面板及背光模 块元件自动气浴清洁装置。
图 1 是显示本发明之液晶面板及背光模块元件自动气浴清洁 装置之立体外观。本发明之液晶面板及背光模块元件自动气浴清洁 装置具有一循环过滤送风装置 10以及一输送装置 20。输送装置 20 可为一输送带, 用以输送液晶显示装置之元件, 例如液晶面板, 或 是一背光模块之光学膜片。 循环过滤送风装置 10架设于输送装置 20,用以产生一气流,对液晶显示装置元件上附着之异物加以清除。 另外,如图 2之俯视图所示,本发明之液晶面板及背光模块元件自 动气浴清洁装置还具有一组装区 30, 设置于输送装置 20之末端, 用以接收液晶显示装置元件以进行组装。
另外, 本发明之液晶面板及背光模块元件自动气浴清洁装置 中, 循环过滤送风装置 10可如图 3之设置, 循环过滤送风装置 10 架设于输送装置 20,具有一出风口 122、一入风口 124、一滤网 14、 一高效率过滤器 16、 以及一送风装置 18, 且循环过滤送风装置 10 与输送装置 20之间构成一输送通道 12。 以下分别说明各元件之功 用。
滤网 14之功用在于初步过滤气流中的异物。高效率过滤器 16 设置于滤网 14之一侧, 用以进一步对气流进行过滤。 送风装置 18 可为一风车,设置于高效率过滤器 16相对于滤网 14之另一侧,用 以维持气流的流向,例如图 3中之气流以逆时针方向流动。出风口 122设置于风车装置 18之出风侧, 向输送通道 12送出气流。 气流 在输送通道 12流动时,其流动方向与输送装置 20之输送方向相同。 最后, 气流流动至输送通道 12的末端, 由入风口 124再送回滤网 14。 如此, 气流由输送通道 12沿入风口 124、 滤网 14、 高效率过 滤器 16、送风装置 18以及出风口 122再回到输送通道 12,而构成 一循环气流。
在此必须说明, 一般而言, 当气流流速越高时, 气流清除异物 的效果越佳, 因此若能在出风口 122设有一喷嘴, 以增加气流之流 速, 如此可加强异物清除的效果。
以下请再参见图 4,说明本发明之液晶显示装置元件组装之自 动气浴清洁方法。首先, 提供一液晶显示装置元件, 例如一液晶面 板或是背光模块之一光学膜片 (步骤 S10), 准备送至组装区进行 组装。 其次, 将液晶面板或光学膜片放置于输送装置 20, 以进行 输送 (步骤 S20)。 由于循环过滤送风装置 10架设于输送装置 20, 因此输送装置 20会将液晶面板或光学膜片送入循环过滤送风装置 10 (步骤 S30), 由循环过滤送风装置 10产生气流, 清除液晶面板 /光学膜片上附着之异物 (步骤 S40)。 通过循环过滤送风装置 10 之后, 输送装置 20再将液晶面板 /光学膜片送入组装区 30 (步骤 S50), 完成清洁动作。
在此必须说明, 上述实施例中, 将循环过滤送风装置 10设置 成气流在输送通道 12流动时,其流动方向与输送装置 20之输送方 向相同; 然而, 本发明之循环过滤送风装置 10也可设置成其它方 向, 以得到不同之气流清除效果。
虽然本发明已以具体之较佳实施例披露如上,然其并非用以限 定本发明,任何熟习此项技艺者,在不脱离本发明之精神和范围内, 仍可作些许的改动与润饰。 工业应用性
根据本发明提出的液晶显示装置元件组装之自动气浴清洁装 置及方法,适用于液晶面板及背光模块元件的输送过程中,可自动 将液晶面板及背光模块元件上的异物加以清除,减少人工清除动作 的人工与时间成本,且可有效控制液晶面板或背光模块元件间之异 物附着, 提升产品良率。

Claims

1. 一种液晶显示装置元件组装自动气浴清洁装置, 包含: 一输送装置, 用以输送该液晶显示装置元件;
一循环过滤送风装置, 其设置于该输送装置上, 用以产生一 气流; 以及
一组装区, 设置于该输送装置之末端, 接收该液晶显示装置 元件以进行组装。
2. 如权利要求 1所述之液晶显示装置元件组装自动气浴清洁 装置, 其中该循环过滤送风装置还包含:
一滤网;
一高效率过滤器, 其设置于该滤网之一侧;
一送风装置, 其设置于该高效率过滤器相对于该滤网之另一
一出风口, 其设置于该风车装置之出风侧, 向该输送装置送 出气流; 以及
一入风口, 由该输送装置接收气流, 并送回该滤网;
其中, 气流沿该入风口、 该滤网、 该高效率过滤器、 该送风 装置以及该出风口而构成一循环气流。
3. 如权利要求 2所述之液晶显示装置元件组装自动气浴清洁 装置, 其中该循环气流之流动方向相同于该输送装置之输送方向。
4. 如权利要求 2所述之液晶显示装置元件组装自动气浴清洁 装置, 其中该出风口设有一喷嘴。
5. 如权利要求 1所述之液晶显示装置元件组装自动气浴清洁 装置, 其中该液晶显示装置元件是一液晶面板。
6. 如权利要求 1所述之液晶显示装置元件组装自动气浴清洁 装置, 其中该液晶显示装置元件是一背光模块之光学膜片。
7. 一种液晶显示装置元件组装之自动气浴清洁方法, 包含下 列步骤:
提供一液晶显示装置元件;
将该液晶显示装置元件放置于一输送装置, 以进行输送, 其 中该输送装置设置有一循环过滤送风装置;
将该液晶显示装置元件送入该循环过滤送风装置, 藉由该循 环过滤送风装置产生的气流,清除该液晶显示装置元件上附着之异 物; 以及
将该液晶显示装置元件送入组装区。
8. 如权利要求 7所述之液晶显示装置元件组装自动气浴清洁 方法, 其中该气流之流动方向相同于该输送装置之输送方向。
9. 如权利要求 7所述之液晶显示装置元件组装自动气浴清洁 方法, 其中该液晶显示装置元件是一液晶面板。
10. 如权利要求 7 所述之液晶显示装置元件组装自动气浴清 洁方法, 其中该液晶显示装置元件是一背光模块之光学膜片。
PCT/CN2003/000121 2003-02-08 2003-02-08 Appareil de nettoyage a bain d'air automatique et procede d'assemblage d'un dispositif d'affichage a cristaux liquides WO2004069438A1 (fr)

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AU2003221273A AU2003221273A1 (en) 2003-02-08 2003-02-08 Automatic air bath cleaning apparatus and method for assembling liquid crystal display device
PCT/CN2003/000121 WO2004069438A1 (fr) 2003-02-08 2003-02-08 Appareil de nettoyage a bain d'air automatique et procede d'assemblage d'un dispositif d'affichage a cristaux liquides

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2107325U (zh) * 1991-12-30 1992-06-17 北京核工程研究设计院比尼新技术公司 物品吹风传递窗
JPH07181467A (ja) * 1993-12-22 1995-07-21 Toshiba Corp 基板のクリーニング方法およびその装置
JPH09197362A (ja) * 1996-01-23 1997-07-31 Nec Eng Ltd 凸型面ガラスパネルの液晶除去ノズル
JPH09211407A (ja) * 1996-01-30 1997-08-15 Nec Eng Ltd 凸型面ガラスパネルの液晶除去装置
JP2000005715A (ja) * 1998-06-25 2000-01-11 Huegle Electronics Kk 除塵装置
JP2000093909A (ja) * 1998-09-25 2000-04-04 Toray Ind Inc ガラス基板の塵埃除去方法および装置
JP2000107715A (ja) * 1998-10-07 2000-04-18 Sharp Corp 基板クリーニング装置
US6192547B1 (en) * 1998-08-14 2001-02-27 Lg. Philips Lcd Co. Ltd. Air curtain system used in manufacturing thin film transistor liquid crystal display

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2107325U (zh) * 1991-12-30 1992-06-17 北京核工程研究设计院比尼新技术公司 物品吹风传递窗
JPH07181467A (ja) * 1993-12-22 1995-07-21 Toshiba Corp 基板のクリーニング方法およびその装置
JPH09197362A (ja) * 1996-01-23 1997-07-31 Nec Eng Ltd 凸型面ガラスパネルの液晶除去ノズル
JPH09211407A (ja) * 1996-01-30 1997-08-15 Nec Eng Ltd 凸型面ガラスパネルの液晶除去装置
JP2000005715A (ja) * 1998-06-25 2000-01-11 Huegle Electronics Kk 除塵装置
US6192547B1 (en) * 1998-08-14 2001-02-27 Lg. Philips Lcd Co. Ltd. Air curtain system used in manufacturing thin film transistor liquid crystal display
JP2000093909A (ja) * 1998-09-25 2000-04-04 Toray Ind Inc ガラス基板の塵埃除去方法および装置
JP2000107715A (ja) * 1998-10-07 2000-04-18 Sharp Corp 基板クリーニング装置

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