US20200335374A1 - Chip transferring machine - Google Patents
Chip transferring machine Download PDFInfo
- Publication number
- US20200335374A1 US20200335374A1 US16/599,312 US201916599312A US2020335374A1 US 20200335374 A1 US20200335374 A1 US 20200335374A1 US 201916599312 A US201916599312 A US 201916599312A US 2020335374 A1 US2020335374 A1 US 2020335374A1
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- United States
- Prior art keywords
- chip
- module
- conveyor belt
- disposed
- adhesive surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000758 substrate Substances 0.000 claims abstract description 74
- 239000000853 adhesive Substances 0.000 claims abstract description 52
- 230000001070 adhesive effect Effects 0.000 claims abstract description 52
- 238000004519 manufacturing process Methods 0.000 claims abstract description 8
- 229910000679 solder Inorganic materials 0.000 claims description 15
- 230000007246 mechanism Effects 0.000 claims description 13
- 238000012546 transfer Methods 0.000 description 23
- 238000000034 method Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
- B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
- B65G21/2027—Suction retaining means
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- B65G35/00—Mechanical conveyors not otherwise provided for
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- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
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- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/812—Applying energy for connecting
- H01L2224/8122—Applying energy for connecting with energy being in the form of electromagnetic radiation
- H01L2224/81224—Applying energy for connecting with energy being in the form of electromagnetic radiation using a laser
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/818—Bonding techniques
- H01L2224/81801—Soldering or alloying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
Definitions
- the present disclosure relates to a transferring machine, and more particularly to a chip transferring machine.
- the present disclosure provides a chip transferring machine.
- the present disclosure provides a chip transferring machine including: a chip carrier, a chip transferring module, and a chip carrier substrate.
- the chip carrier carries a plurality of chips.
- the chip transferring module includes at least one conveyor belt having an adhesive surface.
- the chip carrier substrate carries the plurality of chips.
- the chip carrier, the chip transferring module, and the chip carrier substrate are disposed on a same production line, and the chip carrier and the chip carrier substrate are disposed under or above the adhesive surface of the conveyor belt.
- the present disclosure provides a chip transfer machine including a chip carrier, a chip transferring module, and a chip carrier substrate.
- the chip transferring module includes at least one conveyor belt having an adhesive surface, and the chip carrier and the chip carrier substrate is disposed under or above the adhesive surface of the conveyor belt.
- the chip transferring module including the at least one conveyor belt having the adhesive surface” and “the chip carrier, the chip transferring module, and the chip carrier substrate being disposed on the same production line, and the chip carrier and the chip carrier substrate being disposed under or above the adhesive surface of the conveyor belt,” the efficiency and speed of chip transferring can be improved.
- FIG. 1 is a structural schematic view of a chip transferring machine according to a first embodiment of the present disclosure.
- FIG. 2 is a schematic diagram of an operation of a thimble module of the chip transfer machine according to the first embodiment of the present disclosure.
- FIG. 3 is a schematic diagram of a state in which the chip transferring machine transfers a chip to a chip carrier substrate according to the first embodiment of the present disclosure.
- FIG. 4 is a schematic diagram of an operation of a push module of the chip transfer machine according to the first embodiment of the present disclosure.
- FIG. 5 is a schematic diagram showing a first state in a chip transfer process of the chip transferring machine according to the first embodiment of the present disclosure.
- FIG. 6 is a schematic diagram showing a second state in the chip transfer process of the chip transferring machine according to the first embodiment of the present disclosure; wherein FIG. 6 and FIG. 5 depict the same chip transfer process.
- FIG. 7 is a structural schematic view of the chip transferring machine according to the first embodiment of the present disclosure.
- FIG. 8 is a schematic diagram of an operation of the push module and the laser generating module of the chip transfer machine according to the first embodiment of the present disclosure.
- FIG. 9 is a top view of the circuit substrate of the chip transfer machine according to the first embodiment of the present disclosure.
- FIG. 10 is a structural schematic view of a chip transferring machine according to a second embodiment of the present disclosure.
- FIG. 11 is a structural schematic view of the chip transferring machine according to the second embodiment of the present disclosure.
- Numbering terms such as “first”, “second” or “third” can be used to describe various components, signals or the like, which are for distinguishing one component/signal from another one only, and are not intended to, nor should be construed to impose any substantive limitations on the components, signals or the like.
- a first embodiment of the present disclosure provides a chip transfer machine Z including a chip carrier 1 , a chip transferring module 2 , and a chip carrier substrate 3 .
- the chip carrier 1 may be disposed under at least one conveyor belt 20 of the chip transferring module 2 and correspond to an adhesive surface 20 A of the conveyor belt 20 .
- the chip carrier 1 can carry a plurality of chips C, each of the chips C has at least one solder Cl, and the solder Cl can be solder paste or other conductive materials.
- the chip carrier 1 may include a carrier adjustment mechanism 10 and a carrier film 11 for carrying the chip C, and the carrier film 11 is disposed on the carrier adjustment mechanism 10 .
- the carrier adjustment mechanism 10 can be an X-Y table, but the present disclosure is not limited thereto.
- the carrier film 11 can be a blue PVC film, but the present disclosure is not limited thereto.
- the carrier adjustment mechanism 10 can be fixed onto the carrier film 11 by suction or clamping, but the present disclosure is not limited thereto.
- the carrier film 11 can carry the plurality of chips C, and there is a spacing D 1 between the adjacent two chips C.
- the chip transferring module 2 includes the conveyor belt 20 having the adhesive surface 20 A, and the conveyor belt 20 may be a light-transmitting single-sided tape, but present disclosure is not limited thereto. Further, the chip transferring module 2 may further include at least two rollers 21 , one end of the conveyor belt 20 may be connected to one of the rollers 21 , and the other end of the conveyor belt 20 may be connected to the other roller 21 . Therefore, in a process of transferring and retracting the conveyor belt 20 , the conveyor belt 20 can be transferred from one of the rollers 21 to the other roller 21 , and is transferred in only one direction, but the present disclosure is not limited thereto.
- the chip carrier substrate 3 can be used to carry a plurality of chips C, and the chip carrier substrate 3 can be disposed under the conveyor belt 20 of the chip transferring module 2 and corresponds to the adverse surface 20 A of the conveyor belt 20 .
- the chip carrier substrate 3 may include a carrier substrate adjustment mechanism 30 and a circuit substrate 31 for carrying the chip C, and the circuit substrate 31 is disposed on the carrier substrate adjustment mechanism 30 .
- the carrier substrate adjustment mechanism 30 can be an X-Y table, but the present disclosure is not limited thereto.
- the chip carrier 1 , the chip transferring module 2 , and the chip carrier substrate 3 may be disposed on a same production line, and the chip carrier 1 and the chip carrier substrate 3 are disposed under the adhesive surface 20 A of the conveyor belt 20 . Therefore, the chip C on the chip carrier 1 can be transferred to the chip carrier substrate 3 by the conveyor belt 20 .
- the chip transfer machine Z may further include: a thimble module 4 disposed under the chip carrier 1 , and the at least one chip C disposed on the chip carrier 1 is transferred by adhesion of the thimble module 4 to the adhesive surface 20 A of the conveyor belt 20 .
- the thimble module 4 can be disposed under the carrier film 11 of the chip carrier 1 .
- the material of the thimble module 4 can be a metal or plastic thimble, and a portion of the thimble module 4 that abuts against the chip C can be a sharp or blunt, but the present disclosure is not limited thereto. Therefore, as shown in FIG.
- the thimble module 4 can pass through the carrier film 11 , and the chip C corresponding to the thimble module 4 can be abutted against the adhesive surface 20 A of the conveyor belt 20 , so that the chip C is attached to the adhesive surface 20 A by detaching from the carrier film 11 .
- the above-mentioned process is repeated by the thimble module 4 , and the remaining chips C on the carrier film 11 are sequentially detached from the carrier film 11 and attached to the adhesive surface 20 A.
- the chip transfer machine Z can also horizontally offset the thimble module 4 relative to the carrier film 11 by controlling the thimble module 4 , or the carrier film 11 can be horizontally offset relative to the thimble module 4 , so that the chip C is attached to the adhesive surface 20 A by the thimble module 4 sequentially or randomly abutting the chip C on the carrier film 11 .
- the above-mentioned examples illustrate only one of the embodiments, and the present disclosure is not limited thereto.
- the chip transfer machine Z provided by the present disclosure may further include: a push module 5 disposed on at least one conveyor belt 20 and adhered to at least one chip C on the adhesive surface 20 A by the push module 5 abutting downwardly.
- the push module 5 may be disposed above the conveyor belt 20 and face a non-adhesive surface 20 B.
- the push module 5 may be a pillar of a metal or plastic material, but the present disclosure is not limited thereto.
- the chip C when the chip C is transferred above the circuit substrate 31 through the adhesive surface 20 A of the conveyor belt 20 , the chip C adhered to the adhesive surface 20 A is transferred and disposed on the chip carrier substrate 31 by the push module 5 abutting downwardly.
- the remaining chips C on the conveyor belt 20 can be transferred from the adhesive surface 20 A sequentially and then disposed on the circuit substrate 31 .
- the above-mentioned examples illustrate only one of the embodiments, and the present disclosure is not limited thereto.
- the circuit substrate 31 provided with the chips C is subjected to a heating process so that the chips C are fixed by the solder C 1 and electrically connected to the circuit substrate 31 .
- the above-mentioned examples illustrate only one of the embodiments, and the present disclosure is not limited thereto.
- the chip transfer machine Z may further include: a laser generating module 6 and a vacuum suction module 7 .
- the laser generating module 6 and the vacuum suction module 7 are disposed above at least one conveyor belt 20 , and a laser beam L generated by the laser generating module 6 passes through at least one conveyor belt 20 to project onto the solder Cl disposed on at least one chip C.
- the vacuum suction module 7 suctions at least one non-adhesive surface 20 B of the conveyor belt 20 to adjust the flatness of at least one conveyor belt 20 .
- the chip transfer machine Z of the present disclosure can also be provided with the laser generating module 6 and the vacuum suction module 7 above the conveyor belt 20 . Therefore, after the chip C is transferred to the circuit substrate 31 , the laser beam L can be projected toward the chip C through the laser generating module 6 , and the laser beam L is projected through the conveyor belt 20 and projected on the solder C 1 disposed on the chip C, so that the solder C 1 is heated to be fixed and electrically connected to the circuit substrate 31 .
- the flatness of the conveyor belt 20 can be maintained to avoid affecting the flatness of the conveyor belt 20 while the push module 5 is abutting downwardly against the conveyor belt 20 and the chip C, so that the chip C cannot easily attach to the adhesive surface 20 A, and other manufacturing problems can be avoided.
- the laser generating module 6 can also be operated together with the push module 5 .
- the laser generating module 6 and the push module 5 may be in the same axial direction, or a laser beam L projection path of the laser generating module 6 can correspond to the abutting surface of the push module 5 . Therefore, when the push module 5 abuts the chip C and the chip C is transferred to the circuit substrate 31 , the laser beam can be projected to the chip C through the laser generating module 6 , so that the chip C can be fixed and electrically connected to the circuit substrate 31 through the solder C 1 .
- the chip transfer machine Z provided by the present disclosure can also be horizontally offset from the circuit substrate 31 by controlling the push module 5 , or the carrier substrate adjustment mechanism 30 drives the circuit substrate 31 to perform the horizontal offset relative to the push module 5 , so that after the chip C is transferred to the circuit substrate 31 , the spacing D 2 between the two adjacent chips C may be greater than or less than the spacing D 1 , but the present disclosure is not limited thereto, and the spacing D 2 may be equal to the spacing D 1 . Further, in the above-mentioned method, the circuit substrate 31 having damaged chips C can be repaired. For example, as shown in FIG. 1 to FIG.
- the damaged chip C on the conveyor belt 20 can be transferred to a patch position P on the circuit substrate 31 through the push module 5 , thereby achieving the effect of chip patching.
- the above-mentioned examples illustrate only one of the embodiments, and the present disclosure is not limited thereto.
- the present disclosure may further provide a chip transfer machine Z including a chip carrier 1 , a chip transferring module 2 and a chip carrier substrate 3 .
- the chip transferring module 2 includes at least one conveyor belt 20 having an adhesive surface 20 A, both of which are disposed under or above the adhesive surface 20 A of the conveyor belt 20 .
- a second embodiment of the present disclosure provides a chip transferring machine Z that is slightly similar to the chip transferring machine Z of the first embodiment. Therefore, similar steps will not be repeated herein.
- the difference between the second embodiment of the present disclosure and the first embodiment is that, both a chip carrier 1 and a chip carrier substrate 3 are disposed above an adhesive surface 20 A of at least one conveyor belt 20 and face the adhesive surface 20 A. Therefore, the chip C on the chip carrier 1 can be transported to the chip carrier substrate 3 by conveyance of the conveyor belt 20 .
- the chip transfer machine Z may further include: a thimble module 4 disposed above the chip carrier 1 , and at least one chip C disposed on the chip carrier 1 is transferred and adhered to the adhesive surface 20 A of the at least one conveyor belt 20 by the thimble module 4 abutting downwardly.
- the thimble module 4 can be disposed above the carrier film 11 of the chip carrier 1 .
- the thimble module 4 passes downward through the carrier film 11 , and the chip C corresponding to the thimble module 4 can be abutted against the adhesive surface 20 A of the conveyor belt 20 , so that the chip C is detached from the carrier film 11 and attached to the adhesive surface 20 A.
- the present disclosure is not limited thereto.
- the remaining chips C on the carrier film 11 are detached from the carrier film 11 sequentially and attached to the adhesive surface 20 A, and a more detailed description thereof can be referred to in the first embodiment so that details are not described herein again.
- the chip transfer machine Z provided by the second embodiment may further include: a push module 5 disposed under the conveyor belt 20 and adhered to at least one of the chips C on the adhesive surface 20 A by the push module 5 abutting upwardly.
- the push module 5 may be disposed under the conveyor belt 20 and face a non-adhesive surface 20 B. Therefore, when the chip C is transferred under the circuit substrate 31 through the adhesive surface 20 A of the conveyor belt 20 , the chip C adhered to the adhesive surface 20 A is transferred and disposed on the chip carrier substrate 31 by the push module 5 abutting upwardly.
- the remaining chips C on the conveyor belt 20 can be sequentially transferred from the adhesive surface 20 A, and then disposed on the circuit substrate 31 .
- the above-mentioned examples illustrate only one of the embodiments, and the present disclosure is not limited thereto.
- the circuit substrate 31 provided with the chips C is subjected to a heating process so that the chips C are fixed by the solder C 1 and electrically connected to the circuit substrate 31 .
- the above-mentioned examples illustrate only one of the embodiments, and the present disclosure is not limited thereto.
- the chip transfer machine Z provided by the present embodiment may further include: a laser generating module 6 and a vacuum suction module 7 .
- the laser generating module 6 and the vacuum suction module 7 are disposed under at least one conveyor belt 20 , and a laser beam L generated by the laser generating module 6 passes through the at least one conveyor belt 20 to project on the solder C 1 disposed on the at least one chip C.
- the vacuum suction module 7 suctions at least one non-adhesive surface 20 B of the conveyor belt 20 to adjust the flatness of at least one conveyor belt 20 .
- the chip transfer machine Z of the present disclosure can also be provided with the laser generating module 6 and the vacuum suction module 7 under the conveyor belt 20 .
- the laser beam L can be projected toward the chip C through the laser generating module 6 , and the laser beam L is projected through the conveyor belt 20 and projected onto the solder Cl disposed on the chip C, so that the solder Cl is heated to be fixed and electrically connected to the circuit substrate 31 .
- the flatness of the conveyor belt 20 can be maintained to avoid affecting the flatness of the conveyor belt 20 while the push module 5 is abutting upwardly against the conveyor belt 20 and the chip C, so that the chip C cannot easily attach to the adhesive surface 20 A, and other manufacturing problems can be avoided.
- the laser generating module 6 can also be operated together with the push module 5 . Therefore, when the push module 5 is abuts the chip C and the chip C is transferred to the circuit substrate 31 , the laser beam can be projected to the chip C through the laser generating module 6 , so that the chip C can be fixed and electrically connected to the circuit substrate 31 through the solder C 1 . Details on a particular implementation of this embodiment can be referred to in the first embodiment, and will not be described herein again.
- the chip transferring module 2 including the at least one conveyor belt 20 having the adhesive surface 20 A” and “the chip carrier 1 , the chip transferring module 2 , and the chip carrier substrate 3 being disposed on the same production line, and the chip carrier 1 and the chip carrier substrate 3 being disposed under or above the adhesive surface 20 A of the conveyor belt 20 ,” the transferring efficiency and speed of chip C can be improved.
- the chip transfer machine Z provided by the present disclosure can not only improve the efficiency and speed of transferring the chips C, but also adjust the spacing D 2 of the chip C on the circuit substrate 31 , thereby customizing the circuit substrate 31 .
- the chip transfer machine Z of the present disclosure can also repair the circuit substrate 31 having the damaged chip C by the above-described technical solution, and fix the new chip C onto the patch position P.
- the chip transferring method and chip transferring apparatus provided by the present disclosure has the above-mentioned technical features so as to improve the efficiency and speed of the transferring of the chips 2 to the adhesive layer 4 of the substrate 5 , and shorten the time taken for performing the same.
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Abstract
Description
- This application claims the benefit of priority to Taiwan Patent Application No. 108113905, filed on Apr. 19, 2019. The entire content of the above identified application is incorporated herein by reference.
- Some references, which may include patents, patent applications and various publications, may be cited and discussed in the description of this disclosure. The citation and/or discussion of such references is provided merely to clarify the description of the present disclosure and is not an admission that any such reference is “prior art” to the disclosure described herein. All references cited and discussed in this specification are incorporated herein by reference in their entireties and to the same extent as if each reference was individually incorporated by reference.
- The present disclosure relates to a transferring machine, and more particularly to a chip transferring machine.
- Generally, when the prepared chip array is transferred to a substrate or panel of different size, the time required for the migration is long due to the complicated process involved.
- Therefore, improving the efficiency and speed of chip transferring through structural design or procedural improvement has become one of the important issues to be solved in the technical field of the present disclosure.
- In response to the above-referenced technical inadequacies, the present disclosure provides a chip transferring machine.
- In one aspect, the present disclosure provides a chip transferring machine including: a chip carrier, a chip transferring module, and a chip carrier substrate. The chip carrier carries a plurality of chips. The chip transferring module includes at least one conveyor belt having an adhesive surface. The chip carrier substrate carries the plurality of chips. The chip carrier, the chip transferring module, and the chip carrier substrate are disposed on a same production line, and the chip carrier and the chip carrier substrate are disposed under or above the adhesive surface of the conveyor belt.
- In one aspect, the present disclosure provides a chip transfer machine including a chip carrier, a chip transferring module, and a chip carrier substrate. The chip transferring module includes at least one conveyor belt having an adhesive surface, and the chip carrier and the chip carrier substrate is disposed under or above the adhesive surface of the conveyor belt.
- Therefore, one of the beneficial effects of the present disclosure is that by the technical features of “the chip transferring module including the at least one conveyor belt having the adhesive surface” and “the chip carrier, the chip transferring module, and the chip carrier substrate being disposed on the same production line, and the chip carrier and the chip carrier substrate being disposed under or above the adhesive surface of the conveyor belt,” the efficiency and speed of chip transferring can be improved.
- These and other aspects of the present disclosure will become apparent from the following description of the embodiment taken in conjunction with the following drawings and their captions, although variations and modifications therein may be affected without departing from the spirit and scope of the novel concepts of the disclosure.
- The present disclosure will become more fully understood from the following detailed description and accompanying drawings.
-
FIG. 1 is a structural schematic view of a chip transferring machine according to a first embodiment of the present disclosure. -
FIG. 2 is a schematic diagram of an operation of a thimble module of the chip transfer machine according to the first embodiment of the present disclosure. -
FIG. 3 is a schematic diagram of a state in which the chip transferring machine transfers a chip to a chip carrier substrate according to the first embodiment of the present disclosure. -
FIG. 4 is a schematic diagram of an operation of a push module of the chip transfer machine according to the first embodiment of the present disclosure. -
FIG. 5 is a schematic diagram showing a first state in a chip transfer process of the chip transferring machine according to the first embodiment of the present disclosure. -
FIG. 6 is a schematic diagram showing a second state in the chip transfer process of the chip transferring machine according to the first embodiment of the present disclosure; whereinFIG. 6 andFIG. 5 depict the same chip transfer process. -
FIG. 7 is a structural schematic view of the chip transferring machine according to the first embodiment of the present disclosure. -
FIG. 8 is a schematic diagram of an operation of the push module and the laser generating module of the chip transfer machine according to the first embodiment of the present disclosure. -
FIG. 9 is a top view of the circuit substrate of the chip transfer machine according to the first embodiment of the present disclosure. -
FIG. 10 is a structural schematic view of a chip transferring machine according to a second embodiment of the present disclosure. -
FIG. 11 is a structural schematic view of the chip transferring machine according to the second embodiment of the present disclosure. - The present disclosure is more particularly described in the following examples that are intended as illustrative only since numerous modifications and variations therein will be apparent to those skilled in the art. Like numbers in the drawings indicate like components throughout the views. As used in the description herein and throughout the claims that follow, unless the context clearly dictates otherwise, the meaning of “a”, “an”, and “the” includes plural reference, and the meaning of “in” includes “in” and “on”. Titles or subtitles can be used herein for the convenience of a reader, which shall have no influence on the scope of the present disclosure.
- The terms used herein generally have their ordinary meanings in the art. In the case of conflict, the present document, including any definitions given herein, will prevail. The same thing can be expressed in more than one way. Alternative language and synonyms can be used for any term(s) discussed herein, and no special significance is to be placed upon whether a term is elaborated or discussed herein. A recital of one or more synonyms does not exclude the use of other synonyms. The use of examples anywhere in this specification including examples of any terms is illustrative only, and in no way limits the scope and meaning of the present disclosure or of any exemplified term. Likewise, the present disclosure is not limited to various embodiments given herein. Numbering terms such as “first”, “second” or “third” can be used to describe various components, signals or the like, which are for distinguishing one component/signal from another one only, and are not intended to, nor should be construed to impose any substantive limitations on the components, signals or the like.
- Referring to
FIG. 1 toFIG. 9 , a first embodiment of the present disclosure provides a chip transfer machine Z including achip carrier 1, achip transferring module 2, and achip carrier substrate 3. - Firstly, as shown in
FIG. 1 , thechip carrier 1 may be disposed under at least oneconveyor belt 20 of thechip transferring module 2 and correspond to anadhesive surface 20A of theconveyor belt 20. For example, thechip carrier 1 can carry a plurality of chips C, each of the chips C has at least one solder Cl, and the solder Cl can be solder paste or other conductive materials. Further, thechip carrier 1 may include acarrier adjustment mechanism 10 and acarrier film 11 for carrying the chip C, and thecarrier film 11 is disposed on thecarrier adjustment mechanism 10. Thecarrier adjustment mechanism 10 can be an X-Y table, but the present disclosure is not limited thereto. Thecarrier film 11 can be a blue PVC film, but the present disclosure is not limited thereto. Thecarrier adjustment mechanism 10 can be fixed onto thecarrier film 11 by suction or clamping, but the present disclosure is not limited thereto. Thecarrier film 11 can carry the plurality of chips C, and there is a spacing D1 between the adjacent two chips C. - Next, as shown in
FIG. 1 , thechip transferring module 2 includes theconveyor belt 20 having theadhesive surface 20A, and theconveyor belt 20 may be a light-transmitting single-sided tape, but present disclosure is not limited thereto. Further, thechip transferring module 2 may further include at least tworollers 21, one end of theconveyor belt 20 may be connected to one of therollers 21, and the other end of theconveyor belt 20 may be connected to theother roller 21. Therefore, in a process of transferring and retracting theconveyor belt 20, theconveyor belt 20 can be transferred from one of therollers 21 to theother roller 21, and is transferred in only one direction, but the present disclosure is not limited thereto. - Next, as shown in
FIG. 1 , thechip carrier substrate 3 can be used to carry a plurality of chips C, and thechip carrier substrate 3 can be disposed under theconveyor belt 20 of thechip transferring module 2 and corresponds to theadverse surface 20A of theconveyor belt 20. Further, thechip carrier substrate 3 may include a carriersubstrate adjustment mechanism 30 and acircuit substrate 31 for carrying the chip C, and thecircuit substrate 31 is disposed on the carriersubstrate adjustment mechanism 30. The carriersubstrate adjustment mechanism 30 can be an X-Y table, but the present disclosure is not limited thereto. - Accordingly, as shown in
FIG. 1 , thechip carrier 1, thechip transferring module 2, and thechip carrier substrate 3 may be disposed on a same production line, and thechip carrier 1 and thechip carrier substrate 3 are disposed under theadhesive surface 20A of theconveyor belt 20. Therefore, the chip C on thechip carrier 1 can be transferred to thechip carrier substrate 3 by theconveyor belt 20. - Further, as shown in
FIG. 1 toFIG. 3 , the chip transfer machine Z provided by the present disclosure may further include: athimble module 4 disposed under thechip carrier 1, and the at least one chip C disposed on thechip carrier 1 is transferred by adhesion of thethimble module 4 to theadhesive surface 20A of theconveyor belt 20. For example, thethimble module 4 can be disposed under thecarrier film 11 of thechip carrier 1. The material of thethimble module 4 can be a metal or plastic thimble, and a portion of thethimble module 4 that abuts against the chip C can be a sharp or blunt, but the present disclosure is not limited thereto. Therefore, as shown inFIG. 2 , thethimble module 4 can pass through thecarrier film 11, and the chip C corresponding to thethimble module 4 can be abutted against theadhesive surface 20A of theconveyor belt 20, so that the chip C is attached to theadhesive surface 20A by detaching from thecarrier film 11. - Further, as shown in
FIG. 1 toFIG. 3 , the above-mentioned process is repeated by thethimble module 4, and the remaining chips C on thecarrier film 11 are sequentially detached from thecarrier film 11 and attached to theadhesive surface 20A. Further, the chip transfer machine Z can also horizontally offset thethimble module 4 relative to thecarrier film 11 by controlling thethimble module 4, or thecarrier film 11 can be horizontally offset relative to thethimble module 4, so that the chip C is attached to theadhesive surface 20A by thethimble module 4 sequentially or randomly abutting the chip C on thecarrier film 11. However, the above-mentioned examples illustrate only one of the embodiments, and the present disclosure is not limited thereto. - Further, as shown in
FIG. 3 toFIG. 6 , the chip transfer machine Z provided by the present disclosure may further include: apush module 5 disposed on at least oneconveyor belt 20 and adhered to at least one chip C on theadhesive surface 20A by thepush module 5 abutting downwardly. For example, as shown inFIG. 3 toFIG. 6 , thepush module 5 may be disposed above theconveyor belt 20 and face anon-adhesive surface 20B. Thepush module 5 may be a pillar of a metal or plastic material, but the present disclosure is not limited thereto. Therefore, when the chip C is transferred above thecircuit substrate 31 through theadhesive surface 20A of theconveyor belt 20, the chip C adhered to theadhesive surface 20A is transferred and disposed on thechip carrier substrate 31 by thepush module 5 abutting downwardly. In addition, by repeating the above process through thepush module 5, the remaining chips C on theconveyor belt 20 can be transferred from theadhesive surface 20A sequentially and then disposed on thecircuit substrate 31. However, the above-mentioned examples illustrate only one of the embodiments, and the present disclosure is not limited thereto. - Finally, the
circuit substrate 31 provided with the chips C is subjected to a heating process so that the chips C are fixed by the solder C1 and electrically connected to thecircuit substrate 31. However, the above-mentioned examples illustrate only one of the embodiments, and the present disclosure is not limited thereto. - Further, as shown in
FIG. 6 andFIG. 7 , the chip transfer machine Z provided by the present disclosure may further include: alaser generating module 6 and avacuum suction module 7. Thelaser generating module 6 and thevacuum suction module 7 are disposed above at least oneconveyor belt 20, and a laser beam L generated by thelaser generating module 6 passes through at least oneconveyor belt 20 to project onto the solder Cl disposed on at least one chip C. Thevacuum suction module 7 suctions at least onenon-adhesive surface 20B of theconveyor belt 20 to adjust the flatness of at least oneconveyor belt 20. For example, as shown inFIG. 6 andFIG. 7 , the chip transfer machine Z of the present disclosure can also be provided with thelaser generating module 6 and thevacuum suction module 7 above theconveyor belt 20. Therefore, after the chip C is transferred to thecircuit substrate 31, the laser beam L can be projected toward the chip C through thelaser generating module 6, and the laser beam L is projected through theconveyor belt 20 and projected on the solder C1 disposed on the chip C, so that the solder C1 is heated to be fixed and electrically connected to thecircuit substrate 31. In addition, by suctioning thenon-adhesive surface 20B of theconveyor belt 20 through thevacuum suction module 7, the flatness of theconveyor belt 20 can be maintained to avoid affecting the flatness of theconveyor belt 20 while thepush module 5 is abutting downwardly against theconveyor belt 20 and the chip C, so that the chip C cannot easily attach to theadhesive surface 20A, and other manufacturing problems can be avoided. - In addition, as shown in
FIG. 6 toFIG. 8 , thelaser generating module 6 can also be operated together with thepush module 5. Further, thelaser generating module 6 and thepush module 5 may be in the same axial direction, or a laser beam L projection path of thelaser generating module 6 can correspond to the abutting surface of thepush module 5. Therefore, when thepush module 5 abuts the chip C and the chip C is transferred to thecircuit substrate 31, the laser beam can be projected to the chip C through thelaser generating module 6, so that the chip C can be fixed and electrically connected to thecircuit substrate 31 through the solder C1. - Further, as shown in
FIG. 1 andFIG. 6 , the chip transfer machine Z provided by the present disclosure can also be horizontally offset from thecircuit substrate 31 by controlling thepush module 5, or the carriersubstrate adjustment mechanism 30 drives thecircuit substrate 31 to perform the horizontal offset relative to thepush module 5, so that after the chip C is transferred to thecircuit substrate 31, the spacing D2 between the two adjacent chips C may be greater than or less than the spacing D1, but the present disclosure is not limited thereto, and the spacing D2 may be equal to the spacing D1. Further, in the above-mentioned method, thecircuit substrate 31 having damaged chips C can be repaired. For example, as shown inFIG. 1 toFIG. 9 , after thecircuit substrate 31 having the damaged chip C is placed in the carriersubstrate adjustment mechanism 30, the damaged chip C on theconveyor belt 20 can be transferred to a patch position P on thecircuit substrate 31 through thepush module 5, thereby achieving the effect of chip patching. However, the above-mentioned examples illustrate only one of the embodiments, and the present disclosure is not limited thereto. - Furthermore, referring to
FIG. 1 toFIG. 9 , the present disclosure may further provide a chip transfer machine Z including achip carrier 1, achip transferring module 2 and achip carrier substrate 3. Thechip transferring module 2 includes at least oneconveyor belt 20 having anadhesive surface 20A, both of which are disposed under or above theadhesive surface 20A of theconveyor belt 20. - However, the above-mentioned examples illustrate only one of the embodiments, and the present disclosure is not limited thereto.
- Referring to
FIG. 10 andFIG. 11 together withFIG. 1 toFIG. 9 , a second embodiment of the present disclosure provides a chip transferring machine Z that is slightly similar to the chip transferring machine Z of the first embodiment. Therefore, similar steps will not be repeated herein. Further, according toFIG. 10 ,FIG. 11 ,FIG. 5 andFIG. 7 , the difference between the second embodiment of the present disclosure and the first embodiment is that, both achip carrier 1 and achip carrier substrate 3 are disposed above anadhesive surface 20A of at least oneconveyor belt 20 and face theadhesive surface 20A. Therefore, the chip C on thechip carrier 1 can be transported to thechip carrier substrate 3 by conveyance of theconveyor belt 20. - Further, as shown in
FIG. 10 , the chip transfer machine Z according to the second embodiment of the present disclosure may further include: athimble module 4 disposed above thechip carrier 1, and at least one chip C disposed on thechip carrier 1 is transferred and adhered to theadhesive surface 20A of the at least oneconveyor belt 20 by thethimble module 4 abutting downwardly. For example, as shown inFIG. 10 , thethimble module 4 can be disposed above thecarrier film 11 of thechip carrier 1. Therefore, thethimble module 4 passes downward through thecarrier film 11, and the chip C corresponding to thethimble module 4 can be abutted against theadhesive surface 20A of theconveyor belt 20, so that the chip C is detached from thecarrier film 11 and attached to theadhesive surface 20A. However, the present disclosure is not limited thereto. In addition, by repeating the above method, the remaining chips C on thecarrier film 11 are detached from thecarrier film 11 sequentially and attached to theadhesive surface 20A, and a more detailed description thereof can be referred to in the first embodiment so that details are not described herein again. - Further, as shown in
FIG. 10 , the chip transfer machine Z provided by the second embodiment may further include: apush module 5 disposed under theconveyor belt 20 and adhered to at least one of the chips C on theadhesive surface 20A by thepush module 5 abutting upwardly. For example, as shown inFIG. 10 , thepush module 5 may be disposed under theconveyor belt 20 and face anon-adhesive surface 20B. Therefore, when the chip C is transferred under thecircuit substrate 31 through theadhesive surface 20A of theconveyor belt 20, the chip C adhered to theadhesive surface 20A is transferred and disposed on thechip carrier substrate 31 by thepush module 5 abutting upwardly. In addition, by repeating the above method through thepush module 5, the remaining chips C on theconveyor belt 20 can be sequentially transferred from theadhesive surface 20A, and then disposed on thecircuit substrate 31. However, the above-mentioned examples illustrate only one of the embodiments, and the present disclosure is not limited thereto. - Finally, the
circuit substrate 31 provided with the chips C is subjected to a heating process so that the chips C are fixed by the solder C1 and electrically connected to thecircuit substrate 31. However, the above-mentioned examples illustrate only one of the embodiments, and the present disclosure is not limited thereto. - Further, as shown in
FIG. 11 , the chip transfer machine Z provided by the present embodiment may further include: alaser generating module 6 and avacuum suction module 7. Thelaser generating module 6 and thevacuum suction module 7 are disposed under at least oneconveyor belt 20, and a laser beam L generated by thelaser generating module 6 passes through the at least oneconveyor belt 20 to project on the solder C1 disposed on the at least one chip C. Thevacuum suction module 7 suctions at least onenon-adhesive surface 20B of theconveyor belt 20 to adjust the flatness of at least oneconveyor belt 20. For example, as shown inFIG. 11 , the chip transfer machine Z of the present disclosure can also be provided with thelaser generating module 6 and thevacuum suction module 7 under theconveyor belt 20. Therefore, after the chip C is transferred to thecircuit substrate 31, the laser beam L can be projected toward the chip C through thelaser generating module 6, and the laser beam L is projected through theconveyor belt 20 and projected onto the solder Cl disposed on the chip C, so that the solder Cl is heated to be fixed and electrically connected to thecircuit substrate 31. In addition, by suctioning thenon-adhesive surface 20B of theconveyor belt 20 through thevacuum suction module 7, the flatness of theconveyor belt 20 can be maintained to avoid affecting the flatness of theconveyor belt 20 while thepush module 5 is abutting upwardly against theconveyor belt 20 and the chip C, so that the chip C cannot easily attach to theadhesive surface 20A, and other manufacturing problems can be avoided. - In addition, as shown in
FIG. 8 toFIG. 10 , thelaser generating module 6 can also be operated together with thepush module 5. Therefore, when thepush module 5 is abuts the chip C and the chip C is transferred to thecircuit substrate 31, the laser beam can be projected to the chip C through thelaser generating module 6, so that the chip C can be fixed and electrically connected to thecircuit substrate 31 through the solder C1. Details on a particular implementation of this embodiment can be referred to in the first embodiment, and will not be described herein again. - However, the above-mentioned examples illustrate only one of the embodiments, and the present disclosure is not limited thereto.
- In conclusion, one of the beneficial effects of the present disclosure is that by the technical features of “the
chip transferring module 2 including the at least oneconveyor belt 20 having theadhesive surface 20A” and “thechip carrier 1, thechip transferring module 2, and thechip carrier substrate 3 being disposed on the same production line, and thechip carrier 1 and thechip carrier substrate 3 being disposed under or above theadhesive surface 20A of theconveyor belt 20,” the transferring efficiency and speed of chip C can be improved. - Furthermore, the chip transfer machine Z provided by the present disclosure can not only improve the efficiency and speed of transferring the chips C, but also adjust the spacing D2 of the chip C on the
circuit substrate 31, thereby customizing thecircuit substrate 31. Moreover, the chip transfer machine Z of the present disclosure can also repair thecircuit substrate 31 having the damaged chip C by the above-described technical solution, and fix the new chip C onto the patch position P. - Further, the chip transferring method and chip transferring apparatus provided by the present disclosure has the above-mentioned technical features so as to improve the efficiency and speed of the transferring of the
chips 2 to theadhesive layer 4 of thesubstrate 5, and shorten the time taken for performing the same. - The foregoing description of the exemplary embodiments of the disclosure has been presented only for the purposes of illustration and description and is not intended to be exhaustive or to limit the disclosure to the precise forms disclosed. Many modifications and variations are possible in light of the above teaching.
- The embodiments were chosen and described in order to explain the principles of the disclosure and their practical application so as to enable others skilled in the art to utilize the disclosure and various embodiments and with various modifications as are suited to the particular use contemplated. Alternative embodiments will become apparent to those skilled in the art to which the present disclosure pertains without departing from its spirit and scope.
Claims (10)
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TW108113905A | 2019-04-19 | ||
TW108113905A TWI686895B (en) | 2019-04-19 | 2019-04-19 | Chip transferring machine |
TW108113905 | 2019-04-19 |
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US20200335374A1 true US20200335374A1 (en) | 2020-10-22 |
US10825704B1 US10825704B1 (en) | 2020-11-03 |
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CN (1) | CN111834266A (en) |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20230056420A1 (en) * | 2020-02-21 | 2023-02-23 | Muehlbauer GmbH & Co. KG | Apparatus and method for transferring electronic components from a first carrier to a second carrier |
US11872114B2 (en) * | 2019-01-24 | 2024-01-16 | Curt G. Joa, Inc. | Method and apparatus for high-speed cross-folding of absorbent sanitary products |
US11955506B2 (en) | 2020-07-27 | 2024-04-09 | Au Optronics Corporation | Fabrication method of display device |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN114446816A (en) * | 2020-10-30 | 2022-05-06 | 均华精密工业股份有限公司 | Chip sorting device |
TWI840763B (en) * | 2022-03-09 | 2024-05-01 | 東捷科技股份有限公司 | Repair equipment |
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US6204092B1 (en) * | 1999-04-13 | 2001-03-20 | Lucent Technologies, Inc. | Apparatus and method for transferring semiconductor die to a carrier |
JP3641217B2 (en) * | 2000-03-31 | 2005-04-20 | Tdk株式会社 | End electrode forming method and apparatus for chip-shaped electronic component |
KR100484088B1 (en) * | 2002-12-06 | 2005-04-20 | 삼성전자주식회사 | Die attach and cure in line apparatus for multi chip package |
JP3739752B2 (en) * | 2003-02-07 | 2006-01-25 | 株式会社 ハリーズ | Small-piece transfer device capable of random-cycle shifting |
JP2004296839A (en) * | 2003-03-27 | 2004-10-21 | Kansai Paint Co Ltd | Method for manufacturing semiconductor chip |
US9331230B2 (en) * | 2012-10-30 | 2016-05-03 | Cbrite Inc. | LED die dispersal in displays and light panels with preserving neighboring relationship |
JP6760742B2 (en) * | 2015-09-09 | 2020-09-23 | 大森機械工業株式会社 | Chip transfer device and pickup machine |
US10672638B2 (en) * | 2017-01-27 | 2020-06-02 | International Business Machines Corporation | Picking up irregular semiconductor chips |
TWM559501U (en) * | 2017-10-16 | 2018-05-01 | Contrel Technology Co Ltd | Rolling device for picking up miniature device |
CN108010994B (en) * | 2017-12-15 | 2019-10-18 | 惠州雷通光电器件有限公司 | Micro- light emitting diode transfer method |
-
2019
- 2019-04-19 TW TW108113905A patent/TWI686895B/en not_active IP Right Cessation
- 2019-05-16 CN CN201910408682.2A patent/CN111834266A/en not_active Withdrawn
- 2019-10-11 US US16/599,312 patent/US10825704B1/en active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11872114B2 (en) * | 2019-01-24 | 2024-01-16 | Curt G. Joa, Inc. | Method and apparatus for high-speed cross-folding of absorbent sanitary products |
US20230056420A1 (en) * | 2020-02-21 | 2023-02-23 | Muehlbauer GmbH & Co. KG | Apparatus and method for transferring electronic components from a first carrier to a second carrier |
US12094736B2 (en) * | 2020-02-21 | 2024-09-17 | Muehlbauer GmbH & Co. KG | Apparatus and method for transferring electronic components from a first carrier to a second carrier |
US11955506B2 (en) | 2020-07-27 | 2024-04-09 | Au Optronics Corporation | Fabrication method of display device |
Also Published As
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US10825704B1 (en) | 2020-11-03 |
TWI686895B (en) | 2020-03-01 |
TW202040731A (en) | 2020-11-01 |
CN111834266A (en) | 2020-10-27 |
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